WO1998013677B1 - Smart temperature sensing device - Google Patents
Smart temperature sensing deviceInfo
- Publication number
- WO1998013677B1 WO1998013677B1 PCT/US1997/017068 US9717068W WO9813677B1 WO 1998013677 B1 WO1998013677 B1 WO 1998013677B1 US 9717068 W US9717068 W US 9717068W WO 9813677 B1 WO9813677 B1 WO 9813677B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor
- temperature
- processor
- memory
- nonlinear calibration
- Prior art date
Links
Abstract
A smart temperature sensing device (10) includes a sensor (16) and a memory (25) on a sensor unit (14). The memory contains a plurality of custom nonlinear calibration coefficients which uniquely characterize the sensor (16). A temperature system includes the smart temperature sensing device (10) and a FSAU (12) having a processor (28) which downloads the calibration coefficients and utilizes them in converting electrical signals from the sensor (16) into temperature values that represent the temperature at the sensor (16). A method of calibrating a sensor (16) includes measuring an output signal of the sensor (16) over a temperature range, thereby obtaining a plurality of paired data points. The paired data points are used in a curve-fitting algorithm to obtain coefficients to a polynomial that characterizes the nonlinear temperature-voltage relationship of the sensor (16). The coefficients are stored within the memory (25) until downloaded by the processor (28) for use in signal conversion.
Claims
1. A temperature sensing device ( 10), comprising: a sensor unit (14) including a sensor (16) operable to sense a temperature; and a memory (25) integral to the sensor unit (14), wherein the memory (25) contains nonlinear calibration data which characterize the sensor (16) and wherein the nonlinear calibration data is independent of conversion circuitry for utilizing the nonlinear calibration data in generating an output indicative of the temperature.
2. The temperature sensing device (10) of claim 1, wherein the nonlinear calibration data comprises historical data that reflects nonlinear behavior of a particular class of sensors.
3. The temperature sensing device ( 10) of claim 1 , wherein the nonlinear calibration data comprises custom data which uniquely characterizes the sensor (16).
4. The temperature sensing device (10) of claim 1, wherein the nonlinear calibration data comprises a plurality of nonlinear calibration coefficients (42).
5. The temperature sensing device ( 10) of claim 1 , further comprising a connector (20) for coupling a processor (28) to the sensor (16) and the memory (25), wherein the processor (28) is operable to access the nonlinear calibration data from the memory (25) and receive an electrical signal from the sensor (16) which is indicative of the temperature at the sensor (16), and to convert the electrical signal using the nonlinear calibration data into a temperature value which represents the temperature at the sensor (16).
6. The sensing device (10) of claim 5, further comprising a noise suppression circuit (26) coupled between the sensor (16) and the processor (26), wherein the noise suppression circuit (26) eliminates noise, thereby providing a filtered signal to the processor (28), and wherein the filtered signal is indicative of the temperature at the sensor (16).
7. The sensing device (10) of claim 5, further comprising an analog-to-digital converter (32) coupled between the sensor (16) and the processor (28), wherein the analog-to-digital converter (32) is operable to convert the electrical signal from the sensor (16) into a digital signal to be utilized by the processor (28). 19
8. The sensing device (10) of claim 5, further comprising a display (22) coupled to the processor (28) for displaying the temperature value which represents the temperature at the sensor (16).
9. The sensing device (10) of claim 1, wherein the sensor (16) comprises a resistance temperature device (47).
10. The sensing device (10) of claim 1, wherein the sensor (16) comprises a thermocouple device (52).
11. The sensing device (10) of claim 1 , wherein the memory (25) comprises an electrically erasable programmable read-only memory (48).
12. A smart temperature sensor system (10), comprising: a sensor (16) on a sensor unit (14), operable to sense a temperature; a memory (25) on the sensor unit (14), wherein the memory (25) contains nonlinear calibration data which characterizes the sensor (16) and wherein the nonlinear calibration data is independent of conversion circuitry for utilizing the nonlinear calibration data in generating an output indicative of the temperature; and a processor (28) remote from the sensor unit (14) in electrical communication with the sensor (16) and the memory (25), wherein the processor (28) receives the nonlinear calibration data from the memory (25) and an electrical signal from the sensor (16), and wherein the processor (28) utilizes the nonlinear calibration data to convert the electrical signal into a value that represents the temperature at the sensor (16).
13. The smart temperature sensor system (10) of claim 12, wherein the nonlinear calibration data comprises historical data that reflects nonlinear behavior of a particular class of sensors.
14. The smart temperature sensor system ( 10) of claim 12, wherein the nonlinear calibration data comprises custom data which uniquely characterizes the sensor (16).
15. The smart temperature sensor system ( 10) of claim 12, wherein the nonlinear calibration data comprises a plurality of nonlinear calibration coefficients (42).
16. The smart temperature sensor system (10) of claim 12, wherein the processor (28) communicates with the sensor (16) and the memory (25) through a wired connection (20). 20
17. The smart temperature sensor system ( 10) of claim 12, wherein the processor (28) communicates with the sensor (16) and the memory (25) through an RF connection.
18. The smart temperature sensor system (10) of claim 12, wherein the processor (28) communicates with the sensor (16) and the memory (25) through an IR connection.
19. The smart temperature sensor system (10) of claim 12, further comprising a noise suppression circuit (26) coupled between the sensor (16) and the processor (28), wherein the noise suppression circuit (26) eliminates noise, thereby providing a filtered signal to the processor (28) which is indicative of the temperature at the sensor (16).
20. The smart thermal sensor system (10) of claim 12, further comprising an analog-to-digital converter (32) coupled between the sensor (16) and the processor (28), wherein the analog-to-digital converter (32) is operable to convert the electrical signal from the sensor (16) into a digital signal to be subsequently received by the processor (28).
21. The smart thermal sensing system (10) of claim 12, further comprising a display (22) coupled to the processor (28) for displaying a temperature value which represents the temperature at the sensor (16).
22. A method of calibrating a temperature sensor (16), comprising the steps of: measuring an output value of the temperature sensor (16) over a range of temperatures, thereby obtaining a plurality of paired data points (38,40); and utilizing the plurality of paired data points (38,40) in a mathematical curve fitting technique to obtain coefficients (42) to a polynomial that characterizes the performance of the sensor (16) over the temperature range.
23. The method of claim 22 further comprising the step of storing the coefficients (42) within a memory (25) associated with the sensor (16).
24. The method of claim 22, wherein the step of measuring the output value comprises measuring a voltage signal (40).
25. The method of claim 22, wherein the step of measuring the output value of the sensor (16) over a range of temperatures comprises: measuring a voltage at a first known temperature in the temperature range; 21
incrementing the temperature to a second known temperature in the temperature range; measuring the voltage at the second known temperature; and repeating the steps of incrementing the temperature and measuring the voltage at that temperature until the temperature range is traversed, thereby creating the plurality of paired data points (38,40).
26. The method of claim 22, wherein the step of measuring the output value comprises measuring a resistance.
27. The method of claim 22, wherein the step of utilizing the plurality of data points in a mathematical curve fitting technique comprises putting the data into a least squares fitting algorithm to calculate the polynomial coefficients (42).
28. The method of claim 27, wherein the polynomial is of a form T = CO + C1*EMF + C2*EMF2 + C3*EMF3 + . . . + C8*EMF8, and wherein CO, Cl, . . C8 are the coefficients.
29. The method of claim 27, further comprising the step of artificially weighing the least squares fitting algorithm so that the temperature at a voltage value of zero is zero degrees Celsius.
30. A method of making temperature measurements, comprising the steps of: sending at least one nonlinear calibration datum from a sensor (16) to a processor
(28); measuring a temperature with the sensor (16), wherein the sensor (16) converts the temperature to an electrical signal; communicating the electrical signal from the sensor (16) to the processor (28); and converting the electrical signal into a temperature reading by utilizing the at least one nonlinear calibration datum in a conversion algorithm.
31. A method of providing custom calibration sensors (16) for measuring temperature, comprising the steps of: measuring a voltage signal (40) of a thermal sensor (16) over a range of temperatures (38), thereby creating a plurality of paired data points (38,40); calculating a plurality of custom nonlinear calibration coefficients (42) that are uniquely associated with the sensor (16) using the plurality of paired data points (38,40); and storing the custom nonlinear calibration coefficients (42) in a memory (25) associated with the sensor (16).
32. A smart thermal sensing device (10), comprising: a sensor (16) on a sensor unit (14), wherein the sensor (16) is operable to sense a temperature; and a memory (25) on the sensor unit (14), wherein the memory (25) contains custom sensor data uniquely associated with the sensor (16), and wherein the custom sensor data comprises at least one of: one or more nonlinear calibration coefficients (42), a time constant, maintenance data, intended use environment data, regulatory data, or cold junction compensation coefficients.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU45911/97A AU4591197A (en) | 1996-09-25 | 1997-09-24 | Smart temperature sensing device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/718,921 US5857777A (en) | 1996-09-25 | 1996-09-25 | Smart temperature sensing device |
| US08/718,921 | 1996-09-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1998013677A1 WO1998013677A1 (en) | 1998-04-02 |
| WO1998013677B1 true WO1998013677B1 (en) | 1998-05-07 |
Family
ID=24888102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1997/017068 WO1998013677A1 (en) | 1996-09-25 | 1997-09-24 | Smart temperature sensing device |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US5857777A (en) |
| AU (1) | AU4591197A (en) |
| WO (1) | WO1998013677A1 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6970003B2 (en) | 2001-03-05 | 2005-11-29 | Rosemount Inc. | Electronics board life prediction of microprocessor-based transmitters |
| US7010459B2 (en) | 1999-06-25 | 2006-03-07 | Rosemount Inc. | Process device diagnostics using process variable sensor signal |
| US7254518B2 (en) | 1996-03-28 | 2007-08-07 | Rosemount Inc. | Pressure transmitter with diagnostics |
| US7321846B1 (en) | 2006-10-05 | 2008-01-22 | Rosemount Inc. | Two-wire process control loop diagnostics |
| US8898036B2 (en) | 2007-08-06 | 2014-11-25 | Rosemount Inc. | Process variable transmitter with acceleration sensor |
| US9207670B2 (en) | 2011-03-21 | 2015-12-08 | Rosemount Inc. | Degrading sensor detection implemented within a transmitter |
Families Citing this family (453)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6907383B2 (en) | 1996-03-28 | 2005-06-14 | Rosemount Inc. | Flow diagnostic system |
| US7630861B2 (en) | 1996-03-28 | 2009-12-08 | Rosemount Inc. | Dedicated process diagnostic device |
| US7085610B2 (en) | 1996-03-28 | 2006-08-01 | Fisher-Rosemount Systems, Inc. | Root cause diagnostics |
| US7623932B2 (en) | 1996-03-28 | 2009-11-24 | Fisher-Rosemount Systems, Inc. | Rule set for root cause diagnostics |
| US6519546B1 (en) * | 1996-11-07 | 2003-02-11 | Rosemount Inc. | Auto correcting temperature transmitter with resistance based sensor |
| CA2206969C (en) * | 1997-06-04 | 2006-08-08 | Digital Security Controls Ltd. | Self diagnostic heat detector |
| US6056435A (en) * | 1997-06-24 | 2000-05-02 | Exergen Corporation | Ambient and perfusion normalized temperature detector |
| KR100264247B1 (en) * | 1998-03-28 | 2000-08-16 | 김영삼 | Heat change error measuring system |
| IL126224A0 (en) * | 1998-09-15 | 1999-05-09 | Gerlitz Jonathan | Ear thermometer and detector therefor |
| SE514745C2 (en) * | 1999-06-18 | 2001-04-09 | Samba Sensors Ab | Method and apparatus for bending compensation in intensity-based optical measurement systems |
| US20090027659A1 (en) * | 1999-06-18 | 2009-01-29 | Sambra Sensors Ab | Measuring system for measuring a physical parameter influencing a sensor element |
| US6676600B1 (en) * | 1999-09-03 | 2004-01-13 | Tensys Medical, Inc. | Smart physiologic parameter sensor and method |
| US6643610B1 (en) * | 1999-09-24 | 2003-11-04 | Rosemount Inc. | Process transmitter with orthogonal-polynomial fitting |
| US6517240B1 (en) * | 1999-11-05 | 2003-02-11 | Durametrics, Inc. | Ultrasonic thermometer system |
| DE19954177A1 (en) * | 1999-11-10 | 2001-05-23 | Bosch Gmbh Robert | Procedure for checking the functionality and / or for adjusting an exhaust gas temperature sensor |
| DE19955972C2 (en) * | 1999-11-19 | 2002-03-14 | Heraeus Electro Nite Int | Procedure for calibrating a temperature sensor |
| US6655835B2 (en) * | 1999-12-21 | 2003-12-02 | Schweitzer Engineering Laboratories Inc. | Setting-free resistive temperature device (RTD) measuring module |
| DE19962938A1 (en) * | 1999-12-24 | 2001-07-19 | Perkinelmer Optoelectronics | Method for correcting the output of a multi-element infrared radiation sensor, multi-element infrared radiation sensor and multi-element infrared radiation sensor system |
| DE10108181A1 (en) * | 2001-02-21 | 2002-08-29 | Bosch Gmbh Robert | Method and device for correcting a temperature signal |
| US6859755B2 (en) | 2001-05-14 | 2005-02-22 | Rosemount Inc. | Diagnostics for industrial process control and measurement systems |
| US20030002562A1 (en) * | 2001-06-27 | 2003-01-02 | Yerlikaya Y. Denis | Temperature probe adapter |
| US6609076B2 (en) * | 2001-09-28 | 2003-08-19 | Claud S. Gordon Company | Interface device and method of use with a smart sensor |
| US7317409B2 (en) | 2002-01-30 | 2008-01-08 | Tensys Medical, Inc. | Apparatus and method for interfacing time-variant signals |
| US20030158683A1 (en) * | 2002-02-19 | 2003-08-21 | Claude Gauthier | Temperature calibration using on-chip electrical fuses |
| US6908224B2 (en) * | 2002-05-21 | 2005-06-21 | Kendro Laboratory Products, Lp | Temperature sensor pre-calibration method and apparatus |
| NL1021054C1 (en) * | 2002-07-12 | 2004-01-13 | Best Medical Internat Beheer B | Universal measuring device for medical application. |
| US7140768B2 (en) * | 2002-07-15 | 2006-11-28 | Cold Chain Technologies, Inc. | System and method of monitoring temperature |
| US20040019459A1 (en) * | 2002-07-29 | 2004-01-29 | Paul Dietz | Auto-characterization of optical devices |
| US20040047392A1 (en) * | 2002-09-06 | 2004-03-11 | Shu-Mei Wu | Apparatus for measuring ear and forehead temperature |
| US6827488B2 (en) | 2002-10-10 | 2004-12-07 | Welch Allyn, Inc. | Sealed probe chamber for thermometry apparatus |
| US6971790B2 (en) * | 2002-10-11 | 2005-12-06 | Welch Allyn, Inc. | Thermometry probe calibration method |
| US7285951B2 (en) * | 2002-12-20 | 2007-10-23 | Thales | Method and device for magnetic measurement of the position and orientation of a mobile object relative to a fixed structure |
| US7044633B2 (en) * | 2003-01-09 | 2006-05-16 | International Business Machines Corporation | Method to calibrate a chip with multiple temperature sensitive ring oscillators by calibrating only TSRO |
| US7484887B2 (en) * | 2003-02-20 | 2009-02-03 | Ysis Incorporated | Digitally modified resistive output for a temperature sensor |
| US6854883B2 (en) * | 2003-02-27 | 2005-02-15 | F.O.B. Instruments, Ltd. | Food safety thermometer |
| US20040170214A1 (en) * | 2003-02-27 | 2004-09-02 | Richard Rund | Food safety thermometer |
| US20040190585A1 (en) * | 2003-03-27 | 2004-09-30 | International Business Machines Corporation | Method to calibrate a temperature sensitive ring oscillator with minimal test time |
| US7223014B2 (en) | 2003-03-28 | 2007-05-29 | Intempco Controls Ltd. | Remotely programmable integrated sensor transmitter |
| US6921198B2 (en) * | 2003-06-12 | 2005-07-26 | Medivance Incorporated | Patient temperature repeating system and method |
| EP1646864B1 (en) | 2003-07-18 | 2018-11-07 | Rosemount Inc. | Process diagnostics |
| US7018800B2 (en) | 2003-08-07 | 2006-03-28 | Rosemount Inc. | Process device with quiescent current diagnostics |
| US6910804B2 (en) * | 2003-09-09 | 2005-06-28 | Schweitzer Engineering Laboratories, Inc. | Resistive temperature device (RTD) module with improved noise immunity |
| EP1673008B1 (en) * | 2003-09-12 | 2012-03-14 | Laborie Medical Technologies Inc. | Apparatus for medical measurement |
| US7627441B2 (en) | 2003-09-30 | 2009-12-01 | Rosemount Inc. | Process device with vibration based diagnostics |
| EP1530034A1 (en) * | 2003-11-05 | 2005-05-11 | Microlife Intellectual Property GmbH | An infrared thermometer and a method for determining a temperature |
| US6850859B1 (en) * | 2003-12-03 | 2005-02-01 | Watlow Electric Manufacturing Company | Sensor drift compensation by lot |
| US7523667B2 (en) | 2003-12-23 | 2009-04-28 | Rosemount Inc. | Diagnostics of impulse piping in an industrial process |
| GB2410554A (en) * | 2004-01-28 | 2005-08-03 | Expert Monitoring Ltd | Configuration of remote sensors in a wireless sensor monitoring system |
| US6920799B1 (en) | 2004-04-15 | 2005-07-26 | Rosemount Inc. | Magnetic flow meter with reference electrode |
| US7046180B2 (en) | 2004-04-21 | 2006-05-16 | Rosemount Inc. | Analog-to-digital converter with range error detection |
| US7369458B2 (en) * | 2004-05-10 | 2008-05-06 | Airmar Technology Corporation | Transducer identification |
| US20070237207A1 (en) | 2004-06-09 | 2007-10-11 | National Semiconductor Corporation | Beta variation cancellation in temperature sensors |
| US7447607B2 (en) * | 2004-08-31 | 2008-11-04 | Watow Electric Manufacturing | System and method of compensation for device mounting and thermal transfer error |
| US7309157B1 (en) * | 2004-09-28 | 2007-12-18 | National Semiconductor Corporation | Apparatus and method for calibration of a temperature sensor |
| US7946994B2 (en) * | 2004-10-07 | 2011-05-24 | Tensys Medical, Inc. | Compact apparatus and methods for non-invasively measuring hemodynamic parameters |
| DE102004058931A1 (en) * | 2004-12-07 | 2006-06-08 | Isabellenhütte Heusler Gmbh & Co. Kg | Temperature measurement system has a low cost thermal element sensor, e.g. a Seebeck element, that is combined with a correction element so that its characteristic curve lies within the tolerance range of a standard thermal element |
| US7313966B2 (en) * | 2004-12-14 | 2008-01-01 | Brooks Automation, Inc. | Method and apparatus for storing vacuum gauge calibration parameters and measurement data on a vacuum gauge structure |
| JP2009503952A (en) | 2005-07-20 | 2009-01-29 | ローズマウント インコーポレイテッド | Field device with power supply via Ethernet |
| DE102005062389A1 (en) * | 2005-12-23 | 2007-06-28 | Endress + Hauser Gmbh + Co. Kg | Sensor system for determining e.g. goods filling level in container, has control/evaluation unit controlling temperature measuring unit and sensor characteristic unit with positive voltage or negative voltage over common conductor |
| DE102006010107A1 (en) * | 2006-03-01 | 2007-09-06 | E.G.O. Elektro-Gerätebau GmbH | Method and device for detecting a temperature sensor connected to a control |
| CA2655049A1 (en) | 2006-05-13 | 2007-11-22 | Tensys Medical, Inc. | Continuous positioning apparatus and methods |
| US7461562B2 (en) * | 2006-08-29 | 2008-12-09 | Rosemount Inc. | Process device with density measurement |
| US8757870B2 (en) * | 2007-03-22 | 2014-06-24 | Baker Hughes Incorporated | Location dependent calibration for distributed temperature sensor measurements |
| US8388223B2 (en) * | 2007-08-09 | 2013-03-05 | The Edward Orton Jr. Ceramic Foundation | Furnace temperature monitoring device and method |
| US20090052498A1 (en) * | 2007-08-24 | 2009-02-26 | Asm America, Inc. | Thermocouple |
| US8702306B2 (en) * | 2007-09-21 | 2014-04-22 | Siemens Industry, Inc. | Systems, devices, and/or methods for managing a thermocouple module |
| US7590511B2 (en) | 2007-09-25 | 2009-09-15 | Rosemount Inc. | Field device for digital process control loop diagnostics |
| CA2705352A1 (en) | 2007-10-12 | 2009-04-16 | Tensys Medical, Inc. | Apparatus and methods for non-invasively measuring a patient's arterial blood pressure |
| US8449173B1 (en) * | 2008-04-10 | 2013-05-28 | Google Inc. | Method and system for thermal testing of computing system components |
| US8849589B2 (en) * | 2008-05-23 | 2014-09-30 | Rosemount Inc. | Multivariable process fluid flow device with energy flow calculation |
| US10378106B2 (en) | 2008-11-14 | 2019-08-13 | Asm Ip Holding B.V. | Method of forming insulation film by modified PEALD |
| US20100128753A1 (en) * | 2008-11-26 | 2010-05-27 | Rubbermaid Incorporated | Multiple-Stage Thermometer and Temperature Monitoring |
| US8262287B2 (en) | 2008-12-08 | 2012-09-11 | Asm America, Inc. | Thermocouple |
| US8478558B2 (en) * | 2008-12-18 | 2013-07-02 | Kohler Co. | Method for processing a temperature sensor signal |
| US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
| US8382370B2 (en) | 2009-05-06 | 2013-02-26 | Asm America, Inc. | Thermocouple assembly with guarded thermocouple junction |
| US9297705B2 (en) * | 2009-05-06 | 2016-03-29 | Asm America, Inc. | Smart temperature measuring device |
| US8370017B2 (en) | 2009-07-13 | 2013-02-05 | Ford Global Technologies, Llc | Smart vehicle sensor |
| US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
| US8434936B2 (en) * | 2009-10-16 | 2013-05-07 | Ge Inspection Technologies, Lp | Method for performing ultrasonic testing |
| US8794829B2 (en) * | 2009-12-31 | 2014-08-05 | Welch Allyn, Inc. | Temperature-measurement probe |
| US8301408B2 (en) * | 2010-03-09 | 2012-10-30 | Invensys Systems, Inc. | Temperature prediction transmitter |
| US8714816B2 (en) * | 2010-09-12 | 2014-05-06 | Medisim Ltd. | Temperature sensor with calibrated analog resistive output |
| US20120065923A1 (en) * | 2010-09-14 | 2012-03-15 | General Electric Company | Integrated cold junction compensation circuit for thermocouple connections |
| DE102011005128B4 (en) * | 2011-03-04 | 2021-11-25 | Endress + Hauser Wetzer Gmbh + Co. Kg | Measuring device with compensation for delayed response behavior |
| US9312155B2 (en) | 2011-06-06 | 2016-04-12 | Asm Japan K.K. | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
| US10364496B2 (en) | 2011-06-27 | 2019-07-30 | Asm Ip Holding B.V. | Dual section module having shared and unshared mass flow controllers |
| US10854498B2 (en) | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
| US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
| US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
| US9052240B2 (en) | 2012-06-29 | 2015-06-09 | Rosemount Inc. | Industrial process temperature transmitter with sensor stress diagnostics |
| US9659799B2 (en) | 2012-08-28 | 2017-05-23 | Asm Ip Holding B.V. | Systems and methods for dynamic semiconductor process scheduling |
| CN102879121B (en) * | 2012-09-13 | 2014-10-22 | 北京百纳威尔科技有限公司 | Temperature measuring method and communication equipment |
| US9207129B2 (en) | 2012-09-27 | 2015-12-08 | Rosemount Inc. | Process variable transmitter with EMF detection and correction |
| US9602122B2 (en) | 2012-09-28 | 2017-03-21 | Rosemount Inc. | Process variable measurement noise diagnostic |
| US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
| US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
| USD702188S1 (en) | 2013-03-08 | 2014-04-08 | Asm Ip Holding B.V. | Thermocouple |
| US9484191B2 (en) | 2013-03-08 | 2016-11-01 | Asm Ip Holding B.V. | Pulsed remote plasma method and system |
| US9589770B2 (en) | 2013-03-08 | 2017-03-07 | Asm Ip Holding B.V. | Method and systems for in-situ formation of intermediate reactive species |
| US9587992B1 (en) * | 2013-03-13 | 2017-03-07 | Inphi Corporation | Voltage and temperature sensor for a serializer/deserializer communication application |
| CA2888096A1 (en) * | 2013-03-14 | 2014-09-25 | Primex Wireless, Inc. | Method and apparatus for probe calibration |
| US9240412B2 (en) | 2013-09-27 | 2016-01-19 | Asm Ip Holding B.V. | Semiconductor structure and device and methods of forming same using selective epitaxial process |
| CN103698056B (en) * | 2013-12-16 | 2016-01-27 | 杭州华安医疗保健用品有限公司 | Demarcate temperature error correcting device and modification method |
| US9599521B2 (en) | 2014-01-27 | 2017-03-21 | Medisim, Ltd. | Interface between vital-signs sensors and patient monitor |
| US10683571B2 (en) | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
| US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
| US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
| CN105092095B (en) * | 2014-05-04 | 2019-08-20 | 睿励科学仪器（上海）有限公司 | Temperature calibration method and device |
| CN104048777B (en) * | 2014-06-24 | 2017-02-01 | 中国东方电气集团有限公司 | Temperature value and resistance value conversion method for NTC-type thermistor |
| US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
| US9890456B2 (en) | 2014-08-21 | 2018-02-13 | Asm Ip Holding B.V. | Method and system for in situ formation of gas-phase compounds |
| US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| US9657845B2 (en) | 2014-10-07 | 2017-05-23 | Asm Ip Holding B.V. | Variable conductance gas distribution apparatus and method |
| KR102263121B1 (en) | 2014-12-22 | 2021-06-09 | 에이에스엠 아이피 홀딩 비.브이. | Semiconductor device and manufacuring method thereof |
| US10529542B2 (en) | 2015-03-11 | 2020-01-07 | Asm Ip Holdings B.V. | Cross-flow reactor and method |
| US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
| KR101704222B1 (en) * | 2015-06-24 | 2017-02-08 | 엘에스산전 주식회사 | Method for temperature drift compensation of temperature measurement device using thermocouple |
| US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
| US10600673B2 (en) | 2015-07-07 | 2020-03-24 | Asm Ip Holding B.V. | Magnetic susceptor to baseplate seal |
| US9960072B2 (en) | 2015-09-29 | 2018-05-01 | Asm Ip Holding B.V. | Variable adjustment for precise matching of multiple chamber cavity housings |
| US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
| US10322384B2 (en) | 2015-11-09 | 2019-06-18 | Asm Ip Holding B.V. | Counter flow mixer for process chamber |
| US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
| US10468251B2 (en) | 2016-02-19 | 2019-11-05 | Asm Ip Holding B.V. | Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
| US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
| US10501866B2 (en) | 2016-03-09 | 2019-12-10 | Asm Ip Holding B.V. | Gas distribution apparatus for improved film uniformity in an epitaxial system |
| US10343920B2 (en) | 2016-03-18 | 2019-07-09 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
| US9892913B2 (en) | 2016-03-24 | 2018-02-13 | Asm Ip Holding B.V. | Radial and thickness control via biased multi-port injection settings |
| US9947184B2 (en) * | 2016-04-11 | 2018-04-17 | Verizon Patent And Licensing, Inc. | Enabling interchangeability of sensor devices associated with a user device |
| US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
| US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
| US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
| US10032628B2 (en) | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
| KR102592471B1 (en) | 2016-05-17 | 2023-10-20 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming metal interconnection and method of fabricating semiconductor device using the same |
| US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
| US10388509B2 (en) | 2016-06-28 | 2019-08-20 | Asm Ip Holding B.V. | Formation of epitaxial layers via dislocation filtering |
| US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
| US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
| US10714385B2 (en) | 2016-07-19 | 2020-07-14 | Asm Ip Holding B.V. | Selective deposition of tungsten |
| KR102354490B1 (en) | 2016-07-27 | 2022-01-21 | 에이에스엠 아이피 홀딩 비.브이. | Method of processing a substrate |
| KR102532607B1 (en) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and method of operating the same |
| US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| US10395919B2 (en) | 2016-07-28 | 2019-08-27 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
| KR102613349B1 (en) | 2016-08-25 | 2023-12-14 | 에이에스엠 아이피 홀딩 비.브이. | Exhaust apparatus and substrate processing apparatus and thin film fabricating method using the same |
| US10410943B2 (en) | 2016-10-13 | 2019-09-10 | Asm Ip Holding B.V. | Method for passivating a surface of a semiconductor and related systems |
| US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
| US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
| US10643904B2 (en) | 2016-11-01 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for forming a semiconductor device and related semiconductor device structures |
| US10435790B2 (en) | 2016-11-01 | 2019-10-08 | Asm Ip Holding B.V. | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
| US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| US10134757B2 (en) | 2016-11-07 | 2018-11-20 | Asm Ip Holding B.V. | Method of processing a substrate and a device manufactured by using the method |
| KR102546317B1 (en) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Gas supply unit and substrate processing apparatus including the same |
| US10340135B2 (en) | 2016-11-28 | 2019-07-02 | Asm Ip Holding B.V. | Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
| KR102762543B1 (en) | 2016-12-14 | 2025-02-05 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| KR102700194B1 (en) | 2016-12-19 | 2024-08-28 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
| US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
| US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
| US10283353B2 (en) | 2017-03-29 | 2019-05-07 | Asm Ip Holding B.V. | Method of reforming insulating film deposited on substrate with recess pattern |
| KR102457289B1 (en) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing a thin film and manufacturing a semiconductor device |
| US10446393B2 (en) | 2017-05-08 | 2019-10-15 | Asm Ip Holding B.V. | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
| US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| US10504742B2 (en) | 2017-05-31 | 2019-12-10 | Asm Ip Holding B.V. | Method of atomic layer etching using hydrogen plasma |
| US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
| US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
| US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
| KR20190009245A (en) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Methods for forming a semiconductor device structure and related semiconductor device structures |
| US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
| US10312055B2 (en) | 2017-07-26 | 2019-06-04 | Asm Ip Holding B.V. | Method of depositing film by PEALD using negative bias |
| US10605530B2 (en) | 2017-07-26 | 2020-03-31 | Asm Ip Holding B.V. | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
| US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| TWI815813B (en) | 2017-08-04 | 2023-09-21 | 荷蘭商Ａｓｍ智慧財產控股公司 | Showerhead assembly for distributing a gas within a reaction chamber |
| US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
| US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US10249524B2 (en) | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
| USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
| KR102491945B1 (en) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| KR102401446B1 (en) | 2017-08-31 | 2022-05-24 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| US10607895B2 (en) | 2017-09-18 | 2020-03-31 | Asm Ip Holdings B.V. | Method for forming a semiconductor device structure comprising a gate fill metal |
| US10677621B1 (en) | 2017-09-20 | 2020-06-09 | Continental Control Systems Llc | Sensor apparatus for two-wire sensor measurement and information read-out system |
| KR102630301B1 (en) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same |
| US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| US10319588B2 (en) | 2017-10-10 | 2019-06-11 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
| US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
| KR102443047B1 (en) | 2017-11-16 | 2022-09-14 | 에이에스엠 아이피 홀딩 비.브이. | Method of processing a substrate and a device manufactured by the same |
| US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
| US11639811B2 (en) | 2017-11-27 | 2023-05-02 | Asm Ip Holding B.V. | Apparatus including a clean mini environment |
| JP7214724B2 (en) | 2017-11-27 | 2023-01-30 | エーエスエム アイピー ホールディング ビー．ブイ． | Storage device for storing wafer cassettes used in batch furnaces |
| US10290508B1 (en) | 2017-12-05 | 2019-05-14 | Asm Ip Holding B.V. | Method for forming vertical spacers for spacer-defined patterning |
| US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| WO2019142055A2 (en) | 2018-01-19 | 2019-07-25 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
| TWI852426B (en) | 2018-01-19 | 2024-08-11 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Deposition method |
| USD903477S1 (en) | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
| US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
| USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
| US10535516B2 (en) | 2018-02-01 | 2020-01-14 | Asm Ip Holdings B.V. | Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
| US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| JP7124098B2 (en) | 2018-02-14 | 2022-08-23 | エーエスエム・アイピー・ホールディング・ベー・フェー | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
| KR102636427B1 (en) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing method and apparatus |
| US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
| US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
| US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
| FI128841B (en) * | 2018-03-22 | 2021-01-15 | Univ Helsinki | Sensor calibration |
| KR102646467B1 (en) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| US10510536B2 (en) | 2018-03-29 | 2019-12-17 | Asm Ip Holding B.V. | Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
| US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
| US11274973B2 (en) | 2018-03-29 | 2022-03-15 | Emerson Digital Cold Chain, Inc. | Systems and methods for smart thermocouple temperature probe |
| US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102501472B1 (en) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing method |
| KR102600229B1 (en) | 2018-04-09 | 2023-11-10 | 에이에스엠 아이피 홀딩 비.브이. | Substrate supporting device, substrate processing apparatus including the same and substrate processing method |
| US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
| KR102709511B1 (en) | 2018-05-08 | 2024-09-24 | 에이에스엠 아이피 홀딩 비.브이. | Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
| US12272527B2 (en) | 2018-05-09 | 2025-04-08 | Asm Ip Holding B.V. | Apparatus for use with hydrogen radicals and method of using same |
| KR20190129718A (en) | 2018-05-11 | 2019-11-20 | 에이에스엠 아이피 홀딩 비.브이. | Methods for forming a doped metal carbide film on a substrate and related semiconductor device structures |
| KR102596988B1 (en) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | Method of processing a substrate and a device manufactured by the same |
| TWI840362B (en) | 2018-06-04 | 2024-05-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Wafer handling chamber with moisture reduction |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
| US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| KR102568797B1 (en) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing system |
| WO2020002995A1 (en) | 2018-06-27 | 2020-01-02 | Asm Ip Holding B.V. | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| TWI873894B (en) | 2018-06-27 | 2025-02-21 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| KR102686758B1 (en) | 2018-06-29 | 2024-07-18 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing a thin film and manufacturing a semiconductor device |
| US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
| US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
| US10483099B1 (en) | 2018-07-26 | 2019-11-19 | Asm Ip Holding B.V. | Method for forming thermally stable organosilicon polymer film |
| US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
| US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
| US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
| US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| DE102018121051A1 (en) * | 2018-08-29 | 2020-03-05 | SIKA Dr. Siebert & Kühn GmbH & Co. KG | Method for calibrating a temperature measuring device |
| KR102707956B1 (en) | 2018-09-11 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | Method for deposition of a thin film |
| US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
| CN109283955B (en) * | 2018-09-20 | 2021-01-29 | 广东美的暖通设备有限公司 | Temperature sampling control method and household appliance |
| CN110970344B (en) | 2018-10-01 | 2024-10-25 | Asmip控股有限公司 | Substrate holding apparatus, system comprising the same and method of using the same |
| US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102592699B1 (en) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and apparatuses for depositing thin film and processing the substrate including the same |
| US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
| US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
| KR102546322B1 (en) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
| KR102605121B1 (en) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and substrate processing method |
| USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
| US10381219B1 (en) | 2018-10-25 | 2019-08-13 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film |
| US12378665B2 (en) | 2018-10-26 | 2025-08-05 | Asm Ip Holding B.V. | High temperature coatings for a preclean and etch apparatus and related methods |
| US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| KR102748291B1 (en) | 2018-11-02 | 2024-12-31 | 에이에스엠 아이피 홀딩 비.브이. | Substrate support unit and substrate processing apparatus including the same |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| US10559458B1 (en) | 2018-11-26 | 2020-02-11 | Asm Ip Holding B.V. | Method of forming oxynitride film |
| US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
| KR102636428B1 (en) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | A method for cleaning a substrate processing apparatus |
| US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| TWI874340B (en) | 2018-12-14 | 2025-03-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming device structure, structure formed by the method and system for performing the method |
| TWI819180B (en) | 2019-01-17 | 2023-10-21 | 荷蘭商Ａｓｍ 智慧財產控股公司 | Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| KR102727227B1 (en) | 2019-01-22 | 2024-11-07 | 에이에스엠 아이피 홀딩 비.브이. | Semiconductor processing device |
| CN111524788B (en) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | Method for forming topologically selective films of silicon oxide |
| KR20200102357A (en) | 2019-02-20 | 2020-08-31 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for plug fill deposition in 3-d nand applications |
| KR102626263B1 (en) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | Cyclical deposition method including treatment step and apparatus for same |
| TWI845607B (en) | 2019-02-20 | 2024-06-21 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| KR102638425B1 (en) | 2019-02-20 | 2024-02-21 | 에이에스엠 아이피 홀딩 비.브이. | Method and apparatus for filling a recess formed within a substrate surface |
| TWI842826B (en) | 2019-02-22 | 2024-05-21 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing apparatus and method for processing substrate |
| US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
| KR102858005B1 (en) | 2019-03-08 | 2025-09-09 | 에이에스엠 아이피 홀딩 비.브이. | Method for Selective Deposition of Silicon Nitride Layer and Structure Including Selectively-Deposited Silicon Nitride Layer |
| KR102782593B1 (en) | 2019-03-08 | 2025-03-14 | 에이에스엠 아이피 홀딩 비.브이. | Structure Including SiOC Layer and Method of Forming Same |
| KR20200116033A (en) | 2019-03-28 | 2020-10-08 | 에이에스엠 아이피 홀딩 비.브이. | Door opener and substrate processing apparatus provided therewith |
| KR102809999B1 (en) | 2019-04-01 | 2025-05-19 | 에이에스엠 아이피 홀딩 비.브이. | Method of manufacturing semiconductor device |
| KR20200123380A (en) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | Layer forming method and apparatus |
| KR20200125453A (en) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Gas-phase reactor system and method of using same |
| KR20200130118A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Method for Reforming Amorphous Carbon Polymer Film |
| KR20200130121A (en) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | Chemical source vessel with dip tube |
| KR20200130652A (en) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing material onto a surface and structure formed according to the method |
| JP7598201B2 (en) | 2019-05-16 | 2024-12-11 | エーエスエム・アイピー・ホールディング・ベー・フェー | Wafer boat handling apparatus, vertical batch furnace and method |
| JP7612342B2 (en) | 2019-05-16 | 2025-01-14 | エーエスエム・アイピー・ホールディング・ベー・フェー | Wafer boat handling apparatus, vertical batch furnace and method |
| USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
| USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
| KR20200141003A (en) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | Gas-phase reactor system including a gas detector |
| KR20200141931A (en) | 2019-06-10 | 2020-12-21 | 에이에스엠 아이피 홀딩 비.브이. | Method for cleaning quartz epitaxial chambers |
| KR20200143254A (en) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming an electronic structure using an reforming gas, system for performing the method, and structure formed using the method |
| USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
| USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
| KR20210005515A (en) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | Temperature control assembly for substrate processing apparatus and method of using same |
| JP7499079B2 (en) | 2019-07-09 | 2024-06-13 | エーエスエム・アイピー・ホールディング・ベー・フェー | Plasma device using coaxial waveguide and substrate processing method |
| CN112216646A (en) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | Substrate supporting assembly and substrate processing device comprising same |
| KR20210010307A (en) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| KR20210010816A (en) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Radical assist ignition plasma system and method |
| US11688603B2 (en) | 2019-07-17 | 2023-06-27 | Asm Ip Holding B.V. | Methods of forming silicon germanium structures |
| US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
| TWI839544B (en) | 2019-07-19 | 2024-04-21 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming topology-controlled amorphous carbon polymer film |
| KR20210010817A (en) | 2019-07-19 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | Method of Forming Topology-Controlled Amorphous Carbon Polymer Film |
| CN112309843A (en) | 2019-07-29 | 2021-02-02 | Asm Ip私人控股有限公司 | Selective Deposition Method for High Dopant Incorporation |
| CN112309899A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| KR20210015655A (en) | 2019-07-30 | 2021-02-10 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus and method |
| CN112309900A (en) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| CN118422165A (en) | 2019-08-05 | 2024-08-02 | Asm Ip私人控股有限公司 | Liquid level sensor for chemical source container |
| KR20210018761A (en) | 2019-08-09 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | heater assembly including cooling apparatus and method of using same |
| USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
| USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
| JP2021031769A (en) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー．ブイ． | Production apparatus of mixed gas of film deposition raw material and film deposition apparatus |
| USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
| KR20210024423A (en) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for forming a structure with a hole |
| USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
| USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
| USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
| KR20210024420A (en) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
| US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| KR102806450B1 (en) | 2019-09-04 | 2025-05-12 | 에이에스엠 아이피 홀딩 비.브이. | Methods for selective deposition using a sacrificial capping layer |
| KR102733104B1 (en) | 2019-09-05 | 2024-11-22 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| KR20220073772A (en) * | 2019-09-20 | 2022-06-03 | 포톤 컨트롤 인코퍼레이티드 | Calibration System for Fiber Optic Temperature Probes |
| US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
| CN112593212B (en) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | Method for forming topologically selective silicon oxide film by cyclic plasma enhanced deposition process |
| TWI846953B (en) | 2019-10-08 | 2024-07-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing device |
| KR20210042810A (en) | 2019-10-08 | 2021-04-20 | 에이에스엠 아이피 홀딩 비.브이. | Reactor system including a gas distribution assembly for use with activated species and method of using same |
| TWI846966B (en) | 2019-10-10 | 2024-07-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming a photoresist underlayer and structure including same |
| US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
| TWI834919B (en) | 2019-10-16 | 2024-03-11 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of topology-selective film formation of silicon oxide |
| US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
| KR102845724B1 (en) | 2019-10-21 | 2025-08-13 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for selectively etching films |
| KR20210050453A (en) | 2019-10-25 | 2021-05-07 | 에이에스엠 아이피 홀딩 비.브이. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
| KR20210054983A (en) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | Structures with doped semiconductor layers and methods and systems for forming same |
| US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
| US11626316B2 (en) | 2019-11-20 | 2023-04-11 | Asm Ip Holding B.V. | Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
| CN112951697B (en) | 2019-11-26 | 2025-07-29 | Asmip私人控股有限公司 | Substrate processing apparatus |
| KR20210065848A (en) | 2019-11-26 | 2021-06-04 | 에이에스엠 아이피 홀딩 비.브이. | Methods for selectivley forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
| CN120432376A (en) | 2019-11-29 | 2025-08-05 | Asm Ip私人控股有限公司 | Substrate processing apparatus |
| CN112885692B (en) | 2019-11-29 | 2025-08-15 | Asmip私人控股有限公司 | Substrate processing apparatus |
| JP7527928B2 (en) | 2019-12-02 | 2024-08-05 | エーエスエム・アイピー・ホールディング・ベー・フェー | Substrate processing apparatus and substrate processing method |
| KR20210070898A (en) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| KR20210078405A (en) | 2019-12-17 | 2021-06-28 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| KR20210080214A (en) | 2019-12-19 | 2021-06-30 | 에이에스엠 아이피 홀딩 비.브이. | Methods for filling a gap feature on a substrate and related semiconductor structures |
| JP7636892B2 (en) | 2020-01-06 | 2025-02-27 | エーエスエム・アイピー・ホールディング・ベー・フェー | Channeled Lift Pins |
| TW202140135A (en) | 2020-01-06 | 2021-11-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Gas supply assembly and valve plate assembly |
| US11993847B2 (en) | 2020-01-08 | 2024-05-28 | Asm Ip Holding B.V. | Injector |
| KR20210093163A (en) | 2020-01-16 | 2021-07-27 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming high aspect ratio features |
| KR102675856B1 (en) | 2020-01-20 | 2024-06-17 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming thin film and method of modifying surface of thin film |
| JP2021115573A (en) | 2020-01-29 | 2021-08-10 | エーエスエム・アイピー・ホールディング・ベー・フェー | Pollutant trap system for reactor system |
| TW202513845A (en) | 2020-02-03 | 2025-04-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Semiconductor structures and methods for forming the same |
| TW202146882A (en) | 2020-02-04 | 2021-12-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of verifying an article, apparatus for verifying an article, and system for verifying a reaction chamber |
| US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
| KR20210103956A (en) | 2020-02-13 | 2021-08-24 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus including light receiving device and calibration method of light receiving device |
| US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
| CN113410160A (en) | 2020-02-28 | 2021-09-17 | Asm Ip私人控股有限公司 | System specially used for cleaning parts |
| KR20210113043A (en) | 2020-03-04 | 2021-09-15 | 에이에스엠 아이피 홀딩 비.브이. | Alignment fixture for a reactor system |
| KR20210116240A (en) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | Substrate handling device with adjustable joints |
| KR20210116249A (en) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | lockout tagout assembly and system and method of using same |
| KR102775390B1 (en) | 2020-03-12 | 2025-02-28 | 에이에스엠 아이피 홀딩 비.브이. | Method for Fabricating Layer Structure Having Target Topological Profile |
| US12173404B2 (en) | 2020-03-17 | 2024-12-24 | Asm Ip Holding B.V. | Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
| KR102755229B1 (en) | 2020-04-02 | 2025-01-14 | 에이에스엠 아이피 홀딩 비.브이. | Thin film forming method |
| KR102719377B1 (en) | 2020-04-03 | 2024-10-17 | 에이에스엠 아이피 홀딩 비.브이. | Method For Forming Barrier Layer And Method For Manufacturing Semiconductor Device |
| US11437241B2 (en) | 2020-04-08 | 2022-09-06 | Asm Ip Holding B.V. | Apparatus and methods for selectively etching silicon oxide films |
| US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
| KR20210128343A (en) | 2020-04-15 | 2021-10-26 | 에이에스엠 아이피 홀딩 비.브이. | Method of forming chromium nitride layer and structure including the chromium nitride layer |
| US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
| KR20210130646A (en) | 2020-04-21 | 2021-11-01 | 에이에스엠 아이피 홀딩 비.브이. | Method for processing a substrate |
| KR20210132600A (en) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
| TW202146831A (en) | 2020-04-24 | 2021-12-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Vertical batch furnace assembly, and method for cooling vertical batch furnace |
| TW202208671A (en) | 2020-04-24 | 2022-03-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Methods of forming structures including vanadium boride and vanadium phosphide layers |
| JP2021172585A (en) | 2020-04-24 | 2021-11-01 | エーエスエム・アイピー・ホールディング・ベー・フェー | Methods and equipment for stabilizing vanadium compounds |
| JP2021172884A (en) | 2020-04-24 | 2021-11-01 | エーエスエム・アイピー・ホールディング・ベー・フェー | Method of forming vanadium nitride-containing layer and structure comprising vanadium nitride-containing layer |
| KR102783898B1 (en) | 2020-04-29 | 2025-03-18 | 에이에스엠 아이피 홀딩 비.브이. | Solid source precursor vessel |
| KR20210134869A (en) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Fast FOUP swapping with a FOUP handler |
| JP7726664B2 (en) | 2020-05-04 | 2025-08-20 | エーエスエム・アイピー・ホールディング・ベー・フェー | Substrate processing system for processing a substrate |
| KR20210137395A (en) | 2020-05-07 | 2021-11-17 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals |
| KR102788543B1 (en) | 2020-05-13 | 2025-03-27 | 에이에스엠 아이피 홀딩 비.브이. | Laser alignment fixture for a reactor system |
| TW202146699A (en) | 2020-05-15 | 2021-12-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming a silicon germanium layer, semiconductor structure, semiconductor device, method of forming a deposition layer, and deposition system |
| KR20210143653A (en) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | Substrate processing apparatus |
| KR102795476B1 (en) | 2020-05-21 | 2025-04-11 | 에이에스엠 아이피 홀딩 비.브이. | Structures including multiple carbon layers and methods of forming and using same |
| KR20210145079A (en) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | Flange and apparatus for processing substrates |
| KR102702526B1 (en) | 2020-05-22 | 2024-09-03 | 에이에스엠 아이피 홀딩 비.브이. | Apparatus for depositing thin films using hydrogen peroxide |
| TW202212650A (en) | 2020-05-26 | 2022-04-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for depositing boron and gallium containing silicon germanium layers |
| TWI876048B (en) | 2020-05-29 | 2025-03-11 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing device |
| TW202212620A (en) | 2020-06-02 | 2022-04-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Apparatus for processing substrate, method of forming film, and method of controlling apparatus for processing substrate |
| TW202208659A (en) | 2020-06-16 | 2022-03-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for depositing boron containing silicon germanium layers |
| TW202218133A (en) | 2020-06-24 | 2022-05-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for forming a layer provided with silicon |
| TWI873359B (en) | 2020-06-30 | 2025-02-21 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing method |
| TW202202649A (en) | 2020-07-08 | 2022-01-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Substrate processing method |
| TWI864307B (en) | 2020-07-17 | 2024-12-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Structures, methods and systems for use in photolithography |
| TWI878570B (en) | 2020-07-20 | 2025-04-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method and system for depositing molybdenum layers |
| KR20220011092A (en) | 2020-07-20 | 2022-01-27 | 에이에스엠 아이피 홀딩 비.브이. | Method and system for forming structures including transition metal layers |
| US12322591B2 (en) | 2020-07-27 | 2025-06-03 | Asm Ip Holding B.V. | Thin film deposition process |
| KR20220021863A (en) | 2020-08-14 | 2022-02-22 | 에이에스엠 아이피 홀딩 비.브이. | Method for processing a substrate |
| US12040177B2 (en) | 2020-08-18 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes |
| TW202228863A (en) | 2020-08-25 | 2022-08-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for cleaning a substrate, method for selectively depositing, and reaction system |
| US11725280B2 (en) | 2020-08-26 | 2023-08-15 | Asm Ip Holding B.V. | Method for forming metal silicon oxide and metal silicon oxynitride layers |
| TW202229601A (en) | 2020-08-27 | 2022-08-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming patterned structures, method of manipulating mechanical property, device structure, and substrate processing system |
| TW202217045A (en) | 2020-09-10 | 2022-05-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Methods for depositing gap filing fluids and related systems and devices |
| USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
| KR20220036866A (en) | 2020-09-16 | 2022-03-23 | 에이에스엠 아이피 홀딩 비.브이. | Silicon oxide deposition method |
| USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
| KR20220041751A (en) | 2020-09-25 | 2022-04-01 | 에이에스엠 아이피 홀딩 비.브이. | Semiconductor processing method |
| US12009224B2 (en) | 2020-09-29 | 2024-06-11 | Asm Ip Holding B.V. | Apparatus and method for etching metal nitrides |
| KR20220045900A (en) | 2020-10-06 | 2022-04-13 | 에이에스엠 아이피 홀딩 비.브이. | Deposition method and an apparatus for depositing a silicon-containing material |
| CN114293174A (en) | 2020-10-07 | 2022-04-08 | Asm Ip私人控股有限公司 | Gas supply unit and substrate processing apparatus including the same |
| TW202229613A (en) | 2020-10-14 | 2022-08-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of depositing material on stepped structure |
| KR20220050048A (en) | 2020-10-15 | 2022-04-22 | 에이에스엠 아이피 홀딩 비.브이. | Method of manufacturing semiconductor device, and substrate treatment apparatus using ether-cat |
| KR20220053482A (en) | 2020-10-22 | 2022-04-29 | 에이에스엠 아이피 홀딩 비.브이. | Method of depositing vanadium metal, structure, device and a deposition assembly |
| TW202223136A (en) | 2020-10-28 | 2022-06-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method for forming layer on substrate, and semiconductor processing system |
| TW202229620A (en) | 2020-11-12 | 2022-08-01 | 特文特大學 | Deposition system, method for controlling reaction condition, method for depositing |
| TW202229795A (en) | 2020-11-23 | 2022-08-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | A substrate processing apparatus with an injector |
| TW202235649A (en) | 2020-11-24 | 2022-09-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Methods for filling a gap and related systems and devices |
| KR20220076343A (en) | 2020-11-30 | 2022-06-08 | 에이에스엠 아이피 홀딩 비.브이. | an injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
| US12255053B2 (en) | 2020-12-10 | 2025-03-18 | Asm Ip Holding B.V. | Methods and systems for depositing a layer |
| TW202233884A (en) | 2020-12-14 | 2022-09-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Method of forming structures for threshold voltage control |
| CN114639631A (en) | 2020-12-16 | 2022-06-17 | Asm Ip私人控股有限公司 | Fixing device for measuring jumping and swinging |
| TW202232639A (en) | 2020-12-18 | 2022-08-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Wafer processing apparatus with a rotatable table |
| TW202231903A (en) | 2020-12-22 | 2022-08-16 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Transition metal deposition method, transition metal layer, and deposition assembly for depositing transition metal on substrate |
| TW202242184A (en) | 2020-12-22 | 2022-11-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Precursor capsule, precursor vessel, vapor deposition assembly, and method of loading solid precursor into precursor vessel |
| TW202226899A (en) | 2020-12-22 | 2022-07-01 | 荷蘭商Ａｓｍ Ｉｐ私人控股有限公司 | Plasma treatment device having matching box |
| CN112816101A (en) * | 2021-02-20 | 2021-05-18 | 河南中烟工业有限责任公司 | Drum temperature calibration device based on high-temperature battery power supply |
| US11988565B2 (en) * | 2021-05-06 | 2024-05-21 | Apple Inc. | Process-insensitive sensor circuit |
| USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
| USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
| USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
| USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
| CN115452197A (en) * | 2021-06-08 | 2022-12-09 | 上海思路迪生物医学科技有限公司 | Temperature detection method, system and device and detection device calibration method |
| USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
| USD1060598S1 (en) | 2021-12-03 | 2025-02-04 | Asm Ip Holding B.V. | Split showerhead cover |
| CN114235205A (en) * | 2021-12-15 | 2022-03-25 | 北京奕斯伟计算技术有限公司 | Temperature detection method and device, electronic equipment and computer readable storage medium |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5479085A (en) * | 1977-12-05 | 1979-06-23 | Matsushita Electric Ind Co Ltd | Temperature measuring apparatus |
| US4303984A (en) * | 1979-12-14 | 1981-12-01 | Honeywell Inc. | Sensor output correction circuit |
| US4443117A (en) * | 1980-09-26 | 1984-04-17 | Terumo Corporation | Measuring apparatus, method of manufacture thereof, and method of writing data into same |
| JPS5868633A (en) * | 1981-10-20 | 1983-04-23 | Citizen Watch Co Ltd | Temperature compensating circuit |
| JPS58120137A (en) * | 1982-01-13 | 1983-07-16 | Terumo Corp | Electronic clinical thermometer |
| US4541734A (en) * | 1982-06-24 | 1985-09-17 | Terumo Kabushiki Kaisha | Electronic clinical thermometer, and method of measuring body temperature |
| JPH076849B2 (en) * | 1984-06-13 | 1995-01-30 | オムロン株式会社 | Electronic thermometer |
| EP0232720A1 (en) * | 1986-01-10 | 1987-08-19 | Omron Tateisi Electronics Co. | Multi channel temperature controller utilizing electronic multiplexer |
| GB8604125D0 (en) * | 1986-02-19 | 1986-03-26 | Rowlands S L | Resistance element simulator |
| US5271407A (en) * | 1988-12-06 | 1993-12-21 | Exergen Corporation | Radiation detector suitable for tympanic temperature measurement |
| US5056048A (en) * | 1989-07-18 | 1991-10-08 | Horst Seperant | Integrated digital standardized precision thermometer |
| US5332315A (en) * | 1991-04-27 | 1994-07-26 | Gec Avery Limited | Apparatus and sensor unit for monitoring changes in a physical quantity with time |
| US5596188A (en) * | 1992-07-01 | 1997-01-21 | Whessoe Varec, Inc. | Clock recovery system and rotational detection circuit |
| US5361218A (en) * | 1992-08-11 | 1994-11-01 | Itt Corporation | Self-calibrating sensor |
| US5347476A (en) * | 1992-11-25 | 1994-09-13 | Mcbean Sr Ronald V | Instrumentation system with multiple sensor modules |
| US5425375A (en) * | 1993-09-09 | 1995-06-20 | Cardiac Pathways Corporation | Reusable medical device with usage memory, system using same |
| US5498079A (en) * | 1994-12-23 | 1996-03-12 | Rosemount Inc. | Temperature transmitter |
| US5655305A (en) * | 1995-04-03 | 1997-08-12 | Fletcher; Taylor C. | High precision electronic digital thermometer |
-
1996
- 1996-09-25 US US08/718,921 patent/US5857777A/en not_active Expired - Lifetime
-
1997
- 1997-09-24 WO PCT/US1997/017068 patent/WO1998013677A1/en active Application Filing
- 1997-09-24 AU AU45911/97A patent/AU4591197A/en not_active Abandoned
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7254518B2 (en) | 1996-03-28 | 2007-08-07 | Rosemount Inc. | Pressure transmitter with diagnostics |
| US7010459B2 (en) | 1999-06-25 | 2006-03-07 | Rosemount Inc. | Process device diagnostics using process variable sensor signal |
| US6970003B2 (en) | 2001-03-05 | 2005-11-29 | Rosemount Inc. | Electronics board life prediction of microprocessor-based transmitters |
| US7321846B1 (en) | 2006-10-05 | 2008-01-22 | Rosemount Inc. | Two-wire process control loop diagnostics |
| US8898036B2 (en) | 2007-08-06 | 2014-11-25 | Rosemount Inc. | Process variable transmitter with acceleration sensor |
| US9207670B2 (en) | 2011-03-21 | 2015-12-08 | Rosemount Inc. | Degrading sensor detection implemented within a transmitter |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO1998013677B1 (en) | Smart temperature sensing device | |
| US5857777A (en) | Smart temperature sensing device | |
| KR101742188B1 (en) | Thermocouple electromotive force voltage to temperature converter with integrated cold-junction compensation and linearization | |
| US6045260A (en) | Switch for selectively coupling a sensor or calibration element to a terminal block | |
| EP0434824B1 (en) | Integrated digital standardized precision thermometer | |
| US7398173B2 (en) | Providing nonlinear temperature compensation for sensing means by use of Padé approximant function emulators | |
| US4418392A (en) | Measuring device | |
| CN102099662B (en) | Arrangement for linearizing non-linear sensor | |
| US6438502B1 (en) | Environmental condition sensor device and method | |
| US7658539B2 (en) | Temperature sensor configuration detection in process variable transmitter | |
| US6065866A (en) | Method of calibrating a radiation thermometer | |
| CA1122027A (en) | Digital thermometer modification for telemetry and analog recording | |
| US8043001B2 (en) | Apparatus and method for determining and/or monitoring temperature | |
| US5295746A (en) | High resolution digital thermometer | |
| EP0178368B1 (en) | Process variable transmitter and method for correcting its output signal | |
| GB2192992A (en) | Force measuring device | |
| JP2000241258A (en) | Temperature measuring device and measuring method | |
| JP4771193B2 (en) | Ear thermometer temperature correction device | |
| CN1952632A (en) | High precision intelligent platinum thermal resistance temperature sensor with correction function | |
| JP2898500B2 (en) | Pressure sensor with temperature characteristic correction | |
| CN217384303U (en) | High-precision underwater temperature and depth measuring device | |
| CN116007775A (en) | Food temperature measurement method and device, storage medium and electronic equipment | |
| JP3829708B2 (en) | Temperature measuring device | |
| JP3254669B2 (en) | Thermoelectric thermometer | |
| JPH09203667A (en) | Temperature detection circuit |