WO1998007989A1 - Friction vacuum pump - Google Patents
Friction vacuum pump Download PDFInfo
- Publication number
- WO1998007989A1 WO1998007989A1 PCT/EP1997/003477 EP9703477W WO9807989A1 WO 1998007989 A1 WO1998007989 A1 WO 1998007989A1 EP 9703477 W EP9703477 W EP 9703477W WO 9807989 A1 WO9807989 A1 WO 9807989A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stage
- pump
- thread
- blades
- pump stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the invention relates to a friction vacuum pump with at least one turbomolecular pump stage and a threaded pump stage adjoining it on the pressure side.
- turbomolecular vacuum pumps can be improved in that a threaded pump stage is arranged after their turbomolecular pump stages.
- the problem of an effective use of the thread pump stage is that an effective suction capacity at the entry of the thread (suction-side end of the thread) that is as dependent on pressure as possible cannot be ensured.
- the reason for this is that the flow behavior of the extracted gases in the transition area between turbomolecular pump stages and thread pump stages changes from molecular (at pressures ⁇ 10-3 mbar) to laminar (from about 10-2 mbar upwards).
- Known designs of the transition area between turbomolecular pump stages and threaded pump stages have the disadvantage that the flow is cut off. These significantly affect the pumping speed of the pump.
- a friction vacuum pump of the type concerned here is known.
- a threaded pump stage follows the turbomolecular pump stage.
- the entry of the thread pump stage has one special design not on.
- the thread depth does not change over the length of the thread pump stage.
- the present invention has for its object to increase the pumping speed of a friction vacuum pump of the type mentioned by an improvement in the inlet area of the threaded pump stage.
- the measures according to the invention have the effect that the transition area between the turbomolecular pump stage and the threaded pump stage has a geometry adapted to the flow shape.
- the flow that transitions from molecular to laminar in this transition area is only slightly disturbed.
- the flow does not stop.
- the properties of the full stage are adapted to the mass flow, the compression achieved and the absolute pressure.
- the wings of the full step are wing-shaped end sections of the webs of the threaded step. The production of full level and thread level is thereby simplified.
- FIG. 1 and 2 partial sections through a pump according to the invention with a total of four design variants of threaded pump stage and full stage.
- - Figure 3 enlarges the variant of Figure 1, right, in which a thread bridge of the thread pump stage merges into a wing of the filling stage.
- FIGS. 4 to 6 are partial views of the transition area between the turbomolecular pump stage and the threaded pump stage of rotors designed according to the invention.
- FIGS. 1 and 2 show that the pump 1 according to the invention comprises a turbomolecular pump stage 2, a filling stage 3 and a screw pump stage 4.
- the gas delivery takes place between a rotor 5 (rotor sections 5a and 5b) and a stator 6.
- the axis of rotation of the rotor is designated 7.
- Rotor 5 and / or stator 6 carry the structures which effect the gas production.
- Components of the turbomolecular pump stage 2 are stator blade rows 11 and rotor blade rows 12.
- the filling stage 3 comprises several vanes 13.
- the thread pump stage 4 is characterized by a thread 14.
- Figures 1 and 2 show a total of four variants with regard to the design of filling level 3 and thread pump level 4:
- Thread 14 part of the stator 6.
- a wing 13 does not have to be assigned to each web of the thread 14.
- fewer or more vanes 13 can be present as threaded webs 14.
- FIG. 3 shows how the wings 13 are designed.
- This embodiment involves wing-shaped end sections of the thread 14 which are practically characterized by a large increase in the thread depth t. This increase begins at the level of the dashed line 16 and extends over a relatively short length section of the rotor 5, denoted by h.
- the thread depth t increases in the direction of the suction side to an amount which corresponds approximately to the active length of the blades of the stator blade row 11 or rotor blade row 12 of the turbomolecular pump stage 2 located on the suction side.
- This sharp increase in the thread depth t expediently takes place over a length section h of the rotor 5 which is less than the length of the blades of the turbomolecular pump stage 2 on the suction side, preferably even less than half the length 1 of these blades.
- the thread depth t increases by a factor of 4 to 8, preferably about 6. In the direction of the pressure side, the thread depth t continues to decrease, however, as was previously the case, relatively slowly.
- the angle of attack of the vanes 13 lies between the angle of attack of the adjacent blades of the turbomolecular pump stage 2 and the inclination of the adjacent thread webs 14 (web angle ⁇ ).
- a stator vane row 11 is located in the assembled state immediately above the vanes 13.
- the rotor vane row 12 above the turbomolecular pump stage 2 can still fill and fill the rotor 5b of the thread pump stage 3, 4, which can be seen in particular from FIGS. 4 to 6.
- Figures 4 to 6 show that the thread pump stage 4 has several thread webs 14, e.g. between four and sixteen, preferably eight.
- the web angle (to the horizontal) is between approximately 10 ° and 20 °.
- blades 12 of the last row of blades of the turbomolecular pump stage 2 on the pressure side are shown, which — as described for FIGS. 1 to 3 — are still attached to the rotor section 5b of the filling stage 3 and the threaded stage 4.
- the number of blades 12 exceeds the number of blades 13 by a factor of 1.5 to 5, preferably 4.
- the number of wings 13 is greater than the number of threaded webs 14. Between each end section 13 of the threaded webs 14 designed on the suction side in the manner of a wing, there is a further wing 13.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
Reibungsva ux-impurapeFrictional ux-impurape
Die Erfindung bezieht sich auf eine Reibungsvakuumpumpe mit mindestens einer Turbomolekularpumpenstufe und einer sich daran druckseitig anschließenden Gewindepumpenstufe.The invention relates to a friction vacuum pump with at least one turbomolecular pump stage and a threaded pump stage adjoining it on the pressure side.
Es ist bekannt, daß die Vorvakuumbeständigkeit von Turbomolekularvakuumpumpen dadurch verbessert werden kann, daß ihren Turbomolekularpumpenstufen eine Gewindepumpenstufe nachgeordnet wird. Das Problem einer effektiven Nutzung der Gewindepumpenstufe besteht darin, daß ein möglichst druckungabhängiges effektives Saugvermögen am Eintritt des Gewindes (saugseitiges Ende des Gewindes) nicht sichergestellt werden kann. Der Grund dafür liegt darin, daß sich das Strömungsverhalten der geförderten Gase im Übergangsbereich zwischen Turbomolekularpumpen- stufen und Gewindepumpenstufen von molekular (bei Drük- ken < 10-3 mbar) auf laminar (von etwa 10-2 mbar aufwärts) ändert. Bekannte Gestaltungen des Übergangsbereichs zwischen Turbomolekularpumpenstufen und Gewindepumpenstufen haben den Nachteil, daß es zu Abrissen der Strömung kommt. Diese beeinträchtigen in erheblichem Maße das Saugvermögen der Pumpe.It is known that the fore-vacuum resistance of turbomolecular vacuum pumps can be improved in that a threaded pump stage is arranged after their turbomolecular pump stages. The problem of an effective use of the thread pump stage is that an effective suction capacity at the entry of the thread (suction-side end of the thread) that is as dependent on pressure as possible cannot be ensured. The reason for this is that the flow behavior of the extracted gases in the transition area between turbomolecular pump stages and thread pump stages changes from molecular (at pressures <10-3 mbar) to laminar (from about 10-2 mbar upwards). Known designs of the transition area between turbomolecular pump stages and threaded pump stages have the disadvantage that the flow is cut off. These significantly affect the pumping speed of the pump.
Aus der DE-A-36 27 642 (Anspruch 4) ist eine Reibungsvakuumpumpe der hier betroffenen Art bekannt. An die Turbomolekularpumpenstufe schließt sich eine Gewindepumpenstufe an. Der Eintritt der Gewindepumpenstufe weist eine besondere Gestaltung nicht auf. Die Gewindetiefe ändert sich über die Lange der Gewindepumpenstufe nicht.From DE-A-36 27 642 (claim 4) a friction vacuum pump of the type concerned here is known. A threaded pump stage follows the turbomolecular pump stage. The entry of the thread pump stage has one special design not on. The thread depth does not change over the length of the thread pump stage.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, das Saugvermögen einer ReibungsVakuumpumpe der eingangs genannten Art durch eine Verbesserung im Eintrittsbereich der Gewindepumpenstufe zu erhohen.The present invention has for its object to increase the pumping speed of a friction vacuum pump of the type mentioned by an improvement in the inlet area of the threaded pump stage.
Erfindungsgemaß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelost.According to the invention, this object is achieved by the characterizing features of the claims.
Die Maßnahmen nach der Erfindung haben die Wirkung, daß der Ubergangsbereich zwischen der Turbomolekularpumpen- stufe und der Gewindepumpenstufe eine der Stromungsform angepasste Geometrie hat . Die in diesem Übergangsbereich von molekular auf laminar übergehende Stomung wird nur unwesentlich gestört. Zu einem Abriss der Strömung kommt es nicht. Die Eigenschaften der Fullstufe sind dem Massenfluß, der realisierten Verdichtung und dem Absolutdruck angepaßt.The measures according to the invention have the effect that the transition area between the turbomolecular pump stage and the threaded pump stage has a geometry adapted to the flow shape. The flow that transitions from molecular to laminar in this transition area is only slightly disturbed. The flow does not stop. The properties of the full stage are adapted to the mass flow, the compression achieved and the absolute pressure.
Bei einer vorteilhaften Ausfuhrungsform sind mehrere oder alle Flügel der Fullstufe flαgelartig gestaltete Endabschnitte der Stege der Gewindestufe. Die Herstellung von Fullstufe und Gewindestufe ist dadurch vereinfacht .In an advantageous embodiment, several or all of the wings of the full step are wing-shaped end sections of the webs of the threaded step. The production of full level and thread level is thereby simplified.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 6 dargestellten Ausfuhrungsbeispielen erläutert werden. Es zeigen:Further advantages and details of the invention will be explained with reference to exemplary embodiments shown in Figures 1 to 6. Show it:
- Figuren 1 und 2 Teilschnitte durch eine Pumpe nach der Erfindung mit insgesamt vier Gestaltungsvarianten von Gewindepumpenstufe und Fullstufe. - Figur 3 vergrößert die Variante nach Figur 1, rechts, bei der ein Gewindesteg der Gewindepumpenstufe in einen Flügel der Füllstufe übergeht.- Figures 1 and 2 partial sections through a pump according to the invention with a total of four design variants of threaded pump stage and full stage. - Figure 3 enlarges the variant of Figure 1, right, in which a thread bridge of the thread pump stage merges into a wing of the filling stage.
- Figuren 4 bis 6 Teilansichten des Übergangsbereichs zwischen Turbomolekularpumpenstufe und Gewindepumpenstufe von erfindungsgemäß gestalteten Rotoren.FIGS. 4 to 6 are partial views of the transition area between the turbomolecular pump stage and the threaded pump stage of rotors designed according to the invention.
Die Figuren 1 und 2 zeigen, daß die erfindungsgemäße Pumpe 1 eine Turbomolekularpumpenstufe 2, eine Füllstufe 3 und eine Gewindepumpenstufe 4 umfaßt. Die Gasförderung findet zwischen einem Rotor 5 (Rotorabschnitte 5a und 5b) und einem Stator 6 statt. Die Drehachse des Rotors ist mit 7 bezeichnet. Rotor 5 und /oder Stator 6 tragen die die Gasförderung bewirkenden Strukturen.FIGS. 1 and 2 show that the pump 1 according to the invention comprises a turbomolecular pump stage 2, a filling stage 3 and a screw pump stage 4. The gas delivery takes place between a rotor 5 (rotor sections 5a and 5b) and a stator 6. The axis of rotation of the rotor is designated 7. Rotor 5 and / or stator 6 carry the structures which effect the gas production.
Bestandteile der Turbomolekularpumpenstufe 2 sind Statorschaufelreihen 11 und Rotorschaufelreihen 12. Die Füllsstufe 3 umfaßt mehrere Flügel 13. Die Gewindepumpenstufe 4 ist durch ein Gewinde 14 gekennzeichnet.Components of the turbomolecular pump stage 2 are stator blade rows 11 and rotor blade rows 12. The filling stage 3 comprises several vanes 13. The thread pump stage 4 is characterized by a thread 14.
Die Figuren 1 und 2 lassen insgesamt vier Varianten in Bezug auf die Gestaltung von Füllstufe 3 und Gewindepumpenstufe 4 erkennen:Figures 1 and 2 show a total of four variants with regard to the design of filling level 3 and thread pump level 4:
Fig. 1, links: Flügel 13 und Gewinde 141, left: wing 13 and thread 14
Bestandteil des Stators 6.Part of the stator 6.
Fig. 1, rechts: Flügel 13 und Gewinde 141, right: wing 13 and thread 14
Bestandteil des Rotors 5.Part of the rotor 5.
Fig. 2, links: Flügel 13 Bestandteil des Stators 6,2, left: wing 13 part of the stator 6,
Gewinde 14 Bestandteil des Rotors 5.Thread 14 part of the rotor 5.
Fig. 2, rechts: Flügel 13 Bestandteil des Rotors 5,2, right: wing 13 part of the rotor 5,
Gewinde 14 Bestandteil des Stators 6. Nicht jedem Steg des Gewindes 14 muß ein Flügel 13 zugeordnet sein. Je nach Anwendungsfall können weniger oder mehr Flügel 13 als Gewindestege 14 vorhanden sein. Zwischen Rotor 5 und Stator 6 befindet sich der Spalt 15, der möglichst klein sein soll und üblicherweise kleiner als ein Milimeter ist.Thread 14 part of the stator 6. A wing 13 does not have to be assigned to each web of the thread 14. Depending on the application, fewer or more vanes 13 can be present as threaded webs 14. Between the rotor 5 and the stator 6 there is the gap 15, which should be as small as possible and is usually smaller than one millimeter.
Insbesondere Figur 3 (vergrößerte Darstellung der Ausführungsform nach Fig. 1, rechts) läßt erkennen, wie die Flügel 13 gestaltet sind. Es handelt sich bei dieser Ausführung um flügelartig gestaltete Endabschnitte des Gewindes 14, die praktisch durch eine starke Zunahme der Gewindetiefe t gekennzeichnet sind. Diese Zunahme beginnt in Höhe der gestrichelten Linie 16 und erstreckt sich über einen relativ kurzen, mit h bezeichneten Längenabschnitt des Rotors 5.In particular, FIG. 3 (enlarged illustration of the embodiment according to FIG. 1, right) shows how the wings 13 are designed. This embodiment involves wing-shaped end sections of the thread 14 which are practically characterized by a large increase in the thread depth t. This increase begins at the level of the dashed line 16 and extends over a relatively short length section of the rotor 5, denoted by h.
Die Gewindetiefe t nimmt in Richtung Saugseite auf einen Betrag zu, der etwa der aktiven Länge der Schaufeln der saugseitig gelegenen Statorschaufelreihe 11 bzw. Rotorschaufelreihe 12 der Turbomolekularpumpenstufe 2 entspricht. Diese starke Zunahme der Gewindetiefe t erfolgt zweckmäßig über einen Längenabschnitt h des Rotors 5, der kleiner ist als die Länge der saugseitig gelegenen Schaufeln der Turbomolekularpumpstufe 2, vorzugsweise sogar kleiner als die Hälfte der Länge 1 dieser Schaufeln. In diesem Bereich nimmt die Gewindetiefe t um den Faktor 4 bis 8, vorzugsweise etwa 6 zu. In Richtung Druckseite nimmt die Gewindetiefe t weiterhin ab, allerdings - wie bisher üblich - relativ langsam. Der Anstellwinkel der Flügel 13 liegt zwischen dem Anstellwinkel der benachbarten Schaufeln der Turbomolekularpumpenstufe 2 und der Neigung der benachbarten Gewindestege 14 (Stegwinkel α) . Bei der Ausführungsform, bei der die Flügel 13 rotieren (Figuren 1 und 2, rechts), befindet sich im montierten Zustand unmittelbar oberhalb der Flügel 13 eine Statorschaufelreihe 11. Die darüber befindliche Rotorschaufelreihe 12 der Turbemolekularpumpenstufe 2 kann noch am Rotor 5b der Füll- und der Gewindepumpenstufe 3, 4 befestigt sein, was insbesondere aus den Figuren 4 bis 6 ersichtlich ist.The thread depth t increases in the direction of the suction side to an amount which corresponds approximately to the active length of the blades of the stator blade row 11 or rotor blade row 12 of the turbomolecular pump stage 2 located on the suction side. This sharp increase in the thread depth t expediently takes place over a length section h of the rotor 5 which is less than the length of the blades of the turbomolecular pump stage 2 on the suction side, preferably even less than half the length 1 of these blades. In this area, the thread depth t increases by a factor of 4 to 8, preferably about 6. In the direction of the pressure side, the thread depth t continues to decrease, however, as was previously the case, relatively slowly. The angle of attack of the vanes 13 lies between the angle of attack of the adjacent blades of the turbomolecular pump stage 2 and the inclination of the adjacent thread webs 14 (web angle α). In the embodiment in which the vanes 13 rotate (FIGS. 1 and 2, right), a stator vane row 11 is located in the assembled state immediately above the vanes 13. The rotor vane row 12 above the turbomolecular pump stage 2 can still fill and fill the rotor 5b of the thread pump stage 3, 4, which can be seen in particular from FIGS. 4 to 6.
Bei den Ausführungsformen, bei denen die Flügel 13 ruhen (Figuren 1 und 2, links), liegt eine Rotorschaufelreihe mit ihren Schaufeln 12 unmittelbar über den ruhenden Flügeln 13. Auch bei dieser Ausführung ist die Schaufelreihe 12 noch am Rotor 5b der Füll- und der Gewindepumpenstufe 3, 4 befestigt.In the embodiments in which the vanes 13 are resting (FIGS. 1 and 2, left), a row of rotor blades with their vanes 12 lies directly above the stationary vanes 13. Also in this embodiment, the row of blades 12 is still the rotor 5b of the filling and the Thread pump stage 3, 4 attached.
Die Figuren 4 bis 6 lassen erkennen, daß die Gewindepumpenstufe 4 mehrere Gewindestege 14 aufweist, z.B. zwischen vier und sechzehn, vorzugsweise acht. Der Stegwinkel (zur Horizontalen) liegt zwischen etwa 10° und 20°. Außerdem sind Schaufeln 12 der letzten, druckseitig gelegenen Schaufelreihe der Turbomolekularpumpenstufe 2 dargestellt, die - wie zu den Figuren 1 bis 3 beschrieben - noch am Rotorabschnitt 5b der Füllstufe 3 und der Gewindestufe 4 befestigt sind. Die Anzahl der Schaufeln 12 übersteigt die Anzahl der Flügel 13 um etwa den Faktor 1,5 bis 5, vorzugsweise 4.Figures 4 to 6 show that the thread pump stage 4 has several thread webs 14, e.g. between four and sixteen, preferably eight. The web angle (to the horizontal) is between approximately 10 ° and 20 °. In addition, blades 12 of the last row of blades of the turbomolecular pump stage 2 on the pressure side are shown, which — as described for FIGS. 1 to 3 — are still attached to the rotor section 5b of the filling stage 3 and the threaded stage 4. The number of blades 12 exceeds the number of blades 13 by a factor of 1.5 to 5, preferably 4.
Bei den Ausführungen nach den Figuren 5 und 6 ist die Anzahl der Flügel 13 größer als die Anzahl der Gewindestege 14. Zwischen jedem saugseitig nach Art eines Flügels gestaltetem Endabschnitt 13 der Gewindestege 14 befindet sich ein weiterer Flügel 13. In the embodiments according to FIGS. 5 and 6, the number of wings 13 is greater than the number of threaded webs 14. Between each end section 13 of the threaded webs 14 designed on the suction side in the manner of a wing, there is a further wing 13.
Claims
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP51030298A JP3957761B2 (en) | 1996-08-16 | 1997-07-02 | Friction vacuum pump |
| US09/242,004 US6168374B1 (en) | 1996-08-16 | 1997-07-02 | Friction vacuum pump |
| DE59706325T DE59706325D1 (en) | 1996-08-16 | 1997-07-02 | FRICTION VACUUM PUMP |
| EP97931744A EP0918938B1 (en) | 1996-08-16 | 1997-07-02 | Friction vacuum pump |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19632874A DE19632874A1 (en) | 1996-08-16 | 1996-08-16 | Friction vacuum pump |
| DE19632874.8 | 1996-08-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1998007989A1 true WO1998007989A1 (en) | 1998-02-26 |
Family
ID=7802684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP1997/003477 Ceased WO1998007989A1 (en) | 1996-08-16 | 1997-07-02 | Friction vacuum pump |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6168374B1 (en) |
| EP (1) | EP0918938B1 (en) |
| JP (1) | JP3957761B2 (en) |
| DE (2) | DE19632874A1 (en) |
| WO (1) | WO1998007989A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001248587A (en) * | 1999-12-28 | 2001-09-14 | Kashiyama Kogyo Kk | Composite vacuum pump |
| JP2004510100A (en) * | 2000-09-21 | 2004-04-02 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | Compound / friction vacuum pump |
| CN103477082A (en) * | 2011-06-17 | 2013-12-25 | 埃地沃兹日本有限公司 | Vacuum pump and rotor therefor |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE29717079U1 (en) | 1997-09-24 | 1997-11-06 | Leybold Vakuum GmbH, 50968 Köln | Compound pump |
| JP3788558B2 (en) | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | Turbo molecular pump |
| US6514035B2 (en) * | 2000-01-07 | 2003-02-04 | Kashiyama Kougyou Industry Co., Ltd. | Multiple-type pump |
| DE10111525A1 (en) * | 2001-03-09 | 2002-09-12 | Leybold Vakuum Gmbh | Screw vacuum pump with rotor inlet and rotor outlet |
| GB0229355D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement |
| US6957801B2 (en) * | 2003-09-30 | 2005-10-25 | Honeywell International, Inc. | Valve having an integrated actuator assembly |
| US20090081022A1 (en) * | 2007-09-21 | 2009-03-26 | Honeywell International Inc. | Radially Staged Microscale Turbomolecular Pump |
| DE202011002809U1 (en) * | 2011-02-17 | 2012-06-12 | Oerlikon Leybold Vacuum Gmbh | Stator element and high vacuum pump |
| JP6692635B2 (en) | 2015-12-09 | 2020-05-13 | エドワーズ株式会社 | Connectable thread groove spacer and vacuum pump |
| EP3462036B1 (en) * | 2017-10-02 | 2024-04-03 | Pfeiffer Vacuum Gmbh | Turbomolecular vacuum pump |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2224009A5 (en) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
| EP0142208A1 (en) * | 1983-11-16 | 1985-05-22 | Ultra-Centrifuge Nederland N.V. | High-vacuum molecular pump |
| EP0159464A1 (en) * | 1984-03-24 | 1985-10-30 | Leybold Aktiengesellschaft | Molecular vacuum pump |
| DE3627642A1 (en) * | 1985-08-14 | 1987-02-26 | Rikagaku Kenkyusho | VACUUM PUMP WITH THREADED CHANNEL |
| FR2611818A1 (en) * | 1987-02-26 | 1988-09-09 | Cit Alcatel | ROTARY MOLECULAR VACUUM PUMP OF THE GAEDE CHANNEL TYPE |
| FR2629877A1 (en) * | 1987-12-25 | 1989-10-13 | Sholokhov Valery | VACUUM MOLECULAR PUMP |
| WO1993023672A1 (en) * | 1992-05-16 | 1993-11-25 | Leybold Aktiengesellschaft | Gas friction vacuum pump |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
| JPS6172896A (en) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | high speed rotation pump |
| US5217346A (en) * | 1988-07-13 | 1993-06-08 | Osaka Vacuum, Ltd. | Vacuum pump |
| DE58905785D1 (en) | 1989-07-20 | 1993-11-04 | Leybold Ag | GAS FRICTION PUMP WITH AT LEAST ONE OUTLET THREAD LEVEL. |
| US5238362A (en) * | 1990-03-09 | 1993-08-24 | Varian Associates, Inc. | Turbomolecular pump |
| DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
-
1996
- 1996-08-16 DE DE19632874A patent/DE19632874A1/en not_active Withdrawn
-
1997
- 1997-07-02 US US09/242,004 patent/US6168374B1/en not_active Expired - Lifetime
- 1997-07-02 WO PCT/EP1997/003477 patent/WO1998007989A1/en not_active Ceased
- 1997-07-02 JP JP51030298A patent/JP3957761B2/en not_active Expired - Fee Related
- 1997-07-02 DE DE59706325T patent/DE59706325D1/en not_active Expired - Lifetime
- 1997-07-02 EP EP97931744A patent/EP0918938B1/en not_active Expired - Lifetime
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2224009A5 (en) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
| EP0142208A1 (en) * | 1983-11-16 | 1985-05-22 | Ultra-Centrifuge Nederland N.V. | High-vacuum molecular pump |
| EP0159464A1 (en) * | 1984-03-24 | 1985-10-30 | Leybold Aktiengesellschaft | Molecular vacuum pump |
| DE3627642A1 (en) * | 1985-08-14 | 1987-02-26 | Rikagaku Kenkyusho | VACUUM PUMP WITH THREADED CHANNEL |
| FR2611818A1 (en) * | 1987-02-26 | 1988-09-09 | Cit Alcatel | ROTARY MOLECULAR VACUUM PUMP OF THE GAEDE CHANNEL TYPE |
| FR2629877A1 (en) * | 1987-12-25 | 1989-10-13 | Sholokhov Valery | VACUUM MOLECULAR PUMP |
| WO1993023672A1 (en) * | 1992-05-16 | 1993-11-25 | Leybold Aktiengesellschaft | Gas friction vacuum pump |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001248587A (en) * | 1999-12-28 | 2001-09-14 | Kashiyama Kogyo Kk | Composite vacuum pump |
| JP2004510100A (en) * | 2000-09-21 | 2004-04-02 | ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング | Compound / friction vacuum pump |
| CN103477082A (en) * | 2011-06-17 | 2013-12-25 | 埃地沃兹日本有限公司 | Vacuum pump and rotor therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000516321A (en) | 2000-12-05 |
| US6168374B1 (en) | 2001-01-02 |
| EP0918938A1 (en) | 1999-06-02 |
| DE19632874A1 (en) | 1998-02-19 |
| EP0918938B1 (en) | 2002-02-06 |
| JP3957761B2 (en) | 2007-08-15 |
| DE59706325D1 (en) | 2002-03-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE602004001531T2 (en) | Stator scoop with double curvature | |
| EP0846867B1 (en) | Turbomachine with a transsonic compression stage | |
| WO1998007989A1 (en) | Friction vacuum pump | |
| EP0906514B1 (en) | Rotor for a turbomachine with blades insertable into grooves and blades for a rotor | |
| DE2744366A1 (en) | IMPELLER FOR A RADIAL TURBO COMPRESSOR | |
| EP1252445B1 (en) | Turbomolecular pump | |
| EP2761137B1 (en) | Blade of a row of rotor blades or stator blades for use in a turbomachine | |
| DE4136541A1 (en) | SPIRAL COMPRESSOR WITH OPTIMIZED CLUTCH | |
| DE10327574A1 (en) | Impeller for a fuel pump | |
| EP0990090A1 (en) | Rotor blade of an axial-flow engine | |
| EP1998049A2 (en) | Flow processing machine blade with multi-profile configuration | |
| EP2933497A2 (en) | Vacuum pump | |
| EP1970542B1 (en) | Throttle-dependent blade adjustment for turbo machines | |
| DE102010052892A1 (en) | Bearing arrangement for a shaft of a turbine wheel | |
| WO2005106207A1 (en) | Compressor blade and compressor | |
| DE102019120816B3 (en) | Compressor impeller with split main blades | |
| EP1335136A1 (en) | Flow guiding system along the walls of the flow canal of a compressor | |
| EP0363503A1 (en) | Pump stage for a high vacuum pump | |
| EP1457642A2 (en) | Device for fixing blades to the rotor | |
| DE19920524C2 (en) | Centrifugal compressors | |
| EP3088743B1 (en) | Side-channel vacuum pump stage with a stripper that is slanted on the suction side | |
| EP1119709B1 (en) | Friction vacuum pump with a stator and a rotor | |
| DE10008691B4 (en) | Gas friction pump | |
| EP3032107B1 (en) | Turbomolecular pump | |
| DE10103230A1 (en) | Turbomolecular vacuum pump with rotor and stator blades |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A1 Designated state(s): JP US |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
| DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| WWE | Wipo information: entry into national phase |
Ref document number: 1997931744 Country of ref document: EP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 09242004 Country of ref document: US |
|
| ENP | Entry into the national phase |
Ref country code: JP Ref document number: 1998 510302 Kind code of ref document: A Format of ref document f/p: F |
|
| WWP | Wipo information: published in national office |
Ref document number: 1997931744 Country of ref document: EP |
|
| WWG | Wipo information: grant in national office |
Ref document number: 1997931744 Country of ref document: EP |