WO1997035343A1 - Improved solder joint reliability - Google Patents
Improved solder joint reliability Download PDFInfo
- Publication number
- WO1997035343A1 WO1997035343A1 PCT/US1997/003116 US9703116W WO9735343A1 WO 1997035343 A1 WO1997035343 A1 WO 1997035343A1 US 9703116 W US9703116 W US 9703116W WO 9735343 A1 WO9735343 A1 WO 9735343A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- core
- interconnector
- substrate
- providing
- electrically conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/1134—Stud bumping, i.e. using a wire-bonding apparatus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
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- H—ELECTRICITY
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0209—Inorganic, non-metallic particles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0212—Resin particles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10234—Metallic balls
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10954—Other details of electrical connections
- H05K2201/10992—Using different connection materials, e.g. different solders, for the same connection
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/04—Soldering or other types of metallurgic bonding
- H05K2203/0415—Small preforms other than balls, e.g. discs, cylinders or pillars
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- This invention relates generally to integrated circuits and in particular to providing improved interconnection joint reliability in integrated circuit carriers.
- Integrated circuit technology continues to increase semiconductor device density while decreasing device size. Increased semiconductor device density typically leads to increases in device interfaces. Traditional techniques of device packaging cannot effectively accommodate devices with large numbers of interfaces.
- BGA ball grid array
- Solder balls, or bumps, or solder columns provide electrical, thermal, and mechanical interconnection between the terminal interconnections of the BGA chip carrier and a substrate.
- the substrate may be another chip carrier, a printed circuit board, a wafer, or other surface adapted to receive the chip carrier.
- the solder balls or bumps or columns are formed or placed on either the chip carrier or the substrate and slightly melted to connect the chip carrier to the substrate.
- Flip-chips represent another attempt to address large numbers of device connections.
- An array of input/output terminals are located on the active surface of a semiconductor device.
- Solder balls for example, may be used to interconnect the semiconductor device to a substrate.
- Solder bumps may also be used.
- the materials in the chip carrier and the substrate or in the device and the substrate differ in coefficients of thermal expansion or are subject to temperature differentials.
- the interconnection joints which may be formed by balls or columns, between the chip carrier and the substrate suffer stresses and strains. In some instances, the interconnection joints may break or fracture, thus no longer providing mechanical, thermal, or electrical connection between the chip carrier or device and the substrate.
- U.S. Patent No. 5,468,995 issued to Higgins, III provides a columnar electrical connection.
- the column is a core surrounded by a conductive material.
- solder columns provide benefits over solder balls because columns allow a greater stand-off between the device and the substrate.
- the columns suffer from temperature cycling fatigue.
- Higgins sought to improve the reliability of solder columns by replacing the solder column with a column of a polymeric core surrounded by an outer metallic coating along the length.
- Higgins requires, however, that the aspect ratio of the column be greater than 1, that is, its length must be greater than its width to be effective.
- an interconnector for providing electrical, mechanical, and thermal interconnection between a first and second substrate comprises a core of a compliant material surrounded by an outer layer of an electrically conductive material.
- the core is preferably spherical, cylindrical, or cubical in shape. Each shape offers different advantages and features.
- the invention provides a method for improving the reliability in an interconnector between a first and a second substrate, by providing a core of a compliant material surrounded by an electrically conductive layer to create an interconnector and affixing the interconnector between the first and second substrates to mechanically, thermally, and electrically interconnect the first and second substrates.
- the core may be provided as spherical, cylindrical, or cubical in shape. Each shape offers different advantages and features.
- Fig. 1 is ;.. cross section view of a chip carrier or device and a substrate interconnected according to a preferred embodiment of the invention
- Fig. 2 is a cross section of a interconnector according to a preferred embodiment
- FIG. 3 is an illustration of an interconnect column according to another preferred embodiment of the invention
- Fig. 4 is a cross section view of a chip carrier or device and a substrate interconnected using the interconnect column of Fig. 3;
- Fig. 5 is an illustration of a cube interconnector according to the present invention. An improved interconnect will now be described that improves reliability from coefficient of thermal expansion differences between a chip carrier or device and a substrate as well as temperature differentials.
- Fig. 1 An exemplary embodiment of the interconnection joints of the present invention is shown in Fig. 1, the joints designated generally by the reference numeral 10. Although illustrated as a sphere, the interconnection joints may be any other suitable shape including, but not limited to, columns or cubes. Of course, each shape offers different advantages and features. As embodied herein and referring to Fig. 1 spheres 10 include a core 12 and an outer layer 14.
- Spheres 10 which replace solder balls or bumps found in conventional packages, electrically, thermally, and mechanically interconnect a first substrate 16 and a second substrate 18.
- First circuit traces 20 attach to first substrate 16 and second circuit traces 22 attach to second substrate 18.
- Spheres 10 connect first circuit traces 20 to second circuit traces 22.
- Solder masses 24 attach spheres 10 to the first circuit traces 20 and solder masses 26 attach spheres io to the second circuit traces 22.
- Solder masses 24 and 26 may be embodied and preferred as a solder or an electrically conductive glue or adhesive.
- First substrate 16 may be any type of substrate needing connection to another substrate.
- first substrate 16 is a BGA package.
- Second substrate 18 may also be any type of substrate needing connection to another substrate.
- first substrate 18 is a printed circuit board.
- circuit traces 22 provide an electrical connection from one point on the board to another.
- a printed circuit board may contain multiple first substrates 16, described above and connected in a like manner, other types of chip carriers, discrete devices, and interconnection points for electrical components or other printed circuit boards.
- a printed circuit board is just one type of second substrate 18.
- Many other substrates are equally preferred including, flip-chip devices, pad array carriers, chip carriers, discrete devices, integrated circuit devices, and other substrates needing a first substrate 16 electrically connected.
- first substrate 16 and second substrate 18 have different coefficients of thermal expansion. Even if they do not, they may experience different thermal cycles.
- first circuit traces 20 and first solder masses 24 move relative to second circuit traces 22 and second solder masses 26.
- the movement creates stresses in the interconnect joint.
- solder joints i.e., solder ball or bumps, or cylinders
- these stresses may initiate cracks and allow cracks to propagate through the joint.
- These cracks may lead to a failure of the interconnect joint.
- Solder balls or bumps and cylinders are prone to this type of failure because their cores cannot absorb the stresses and strains caused by the differential movement.
- the initial aspect ratio for a sphere is approximately 1. Subsequent processing, however, may result in a compressed sphere in which the width is slightly greater than the height.
- Spheres 10 according to the present invention do not suffer the same fate.
- core 12 is a compliant material that can absorb differential movements caused by thermal coefficient of expansion (TCE) mismatch or differential first and second substrate temperatures.
- TCE thermal coefficient of expansion
- core 12 is a compliant, high temperature polymer, such as polyimide.
- substrate mounting temperatures are from about 180°C to about 300°C.
- Preferred materials for core 12 includes rubbers, polyimides, polysulfones, polyetherimides, liquid crystal polymers, other polymers, epoxies, and metals.
- Core 12 is illustrated as a metal in Fig. 1 by reference 12'.
- any of the preferred materials for core 12 may preferably include fillers or fibers, an example of which is graphite.
- core 12 is a non-compliant fracture resistant material, such as a ceramic. In this embodiment, although a crack may form, it will not propagate as it would in a non-fracture resistant material.
- Core 12 is less than about 0.15 inch in diameter.
- core 12 is from about 0.005 inch to about 0.1 inch in diameter. More preferably, core 12 is from about 0.01 inch to about 0.08 inch in diameter. Most preferred, core 12 is from about 0.02 inch to about 0.05 inch in diameter.
- Outer layer 14 surrounds core 12.
- Outer layer 14 may be any conductive material effective to electrically connect first substrate 16 to second substrate 18.
- outer layer 14 is solderable and resistant to oxidation. Solderable and oxidation resistant metals include, for example, lead, tin, silver, nickel, palladium, gold, and alloys thereof.
- outer layer 14 is a filled polymer that is electrically conductive, an example of which is a silver-filled epoxy.
- outer layer 14 may be multiple layers of the preferred materials described above, for example as illustrated in Fig.
- core 12 may be surrounded by a nickel layer 14a that is surrounded by a silver layer 14b, that is surrounded by a solder layer 14c, or any combination thereof.
- Outer layer 14 may be electroless plated, electro-deposited, electroplated, dipped, spray- electroplated, sputtered, chemical vapor deposited (CVD), or evaporated on core 12.
- outer layer 14 and/or core 12 may contain materials to enhance adhesion between outer layer 14 and core 12.
- an additional layer (not shown) may be provided between core 12 and outer layer 14 to improve adhesion between core 12 and outer layer 14.
- Each layer in outer layer 14 is from about lOOOA to about 0.01 inch thick. Preferably each layer in outer layer 14 is from about lOOOA to about 0.005 inch thick, more preferably, each layer in outer layer 14 is from about lOOOA to about 0.001 inch thick.
- core 12 does not easily crack or propagate cracks, cracks that might develop in outer layer 14 would not necessarily create cracks in core 12 or propagate them through core 12 as they would in a metal core.
- the compliant core 12 absorbs the stresses from TCE mismatch or different thermal first and second substrate temperatures and greatly improves the reliability of the interconnection between first substrate 16 and second substrate 18.
- Spheres are more desirable than other shapes because spheres are more easily dealt with in the bonding process. Other shapes require more accurate placement before soldering. But other shapes are alternatively preferred.
- interconnector 30 is provided in column shape and denoted generally by the reference numeral 30.
- Interconnector 30 is comprised of a core 32 and an outer layer 34.
- Figure 4 illustrates a cross section view of first substrate 16 connected to a second substrate 18 by interconnector 30. Elements from previous preferred embodiments are like numbered.
- Core 32 is similar to core 14 except in shape. Core 32 is less than about 0.15 inch in height. Preferably, core 32 is from about 0.005 inch to about 0.1 inch in height. More preferably, core 32 is from about 0.01 inch to about 0.08 iu.ch in height. Most preferred, core 12 is from about 0.02 inch to about 0.05 inch in height.
- an interconnector according to the present invention is a cube as illustrated in Fig. 5 and denoted generally by the reference numeral 36.
- Cube 36 includes core 38 and outer layer 40.
- Core 36 is similar to core 14 except in shape. Core 36 is less than about 0.1 inch in height and width. Preferably, core 36 is from about 0.005 inch to about 0.1 inch in height and width. More preferably, core 36 is from about 0.01 inch to about 0.08 inch in height and width. Most preferred, core 36 is from about 0.02 inch to about 0.05 inch in height and width. The preferred aspect ratio is approximately 1.
- outer layer 40 is similar to outer layer 14 including materials, thicknesses, and number of layers.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Coupling Device And Connection With Printed Circuit (AREA)
- Connections Effected By Soldering, Adhesion, Or Permanent Deformation (AREA)
Abstract
Description
Claims
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP97907926A EP0970521A1 (en) | 1996-03-18 | 1997-02-27 | Improved solder joint reliability |
| JP9533481A JP2000507047A (en) | 1996-03-18 | 1997-02-27 | Improved solder joint reliability |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US61723396A | 1996-03-18 | 1996-03-18 | |
| US617,233 | 1996-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1997035343A1 true WO1997035343A1 (en) | 1997-09-25 |
Family
ID=24472807
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1997/003116 Ceased WO1997035343A1 (en) | 1996-03-18 | 1997-02-27 | Improved solder joint reliability |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0970521A1 (en) |
| JP (1) | JP2000507047A (en) |
| TW (1) | TW335544B (en) |
| WO (1) | WO1997035343A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1205971A3 (en) * | 2000-11-08 | 2003-01-02 | Sharp Kabushiki Kaisha | Electronic component and method and structure for mounting semiconductor device |
| EP1708258A4 (en) * | 2004-09-08 | 2007-05-09 | Murata Manufacturing Co | COMPOSITE CERAMIC SUBSTRATE |
| WO2008125440A1 (en) * | 2007-04-11 | 2008-10-23 | International Business Machines Corporation | Electrical interconnect structure and method of forming the same |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3505321B2 (en) | 1996-05-07 | 2004-03-08 | 積水化学工業株式会社 | Conductive fine particles and substrate |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4807021A (en) * | 1986-03-10 | 1989-02-21 | Kabushiki Kaisha Toshiba | Semiconductor device having stacking structure |
| JPH02237129A (en) * | 1989-03-10 | 1990-09-19 | Nippon Steel Corp | Semiconductor element connection structure |
| US5235741A (en) * | 1989-08-18 | 1993-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Electrical connection and method for making the same |
| US5468995A (en) * | 1994-07-05 | 1995-11-21 | Motorola, Inc. | Semiconductor device having compliant columnar electrical connections |
-
1997
- 1997-02-05 TW TW086101442A patent/TW335544B/en active
- 1997-02-27 JP JP9533481A patent/JP2000507047A/en active Pending
- 1997-02-27 WO PCT/US1997/003116 patent/WO1997035343A1/en not_active Ceased
- 1997-02-27 EP EP97907926A patent/EP0970521A1/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4807021A (en) * | 1986-03-10 | 1989-02-21 | Kabushiki Kaisha Toshiba | Semiconductor device having stacking structure |
| JPH02237129A (en) * | 1989-03-10 | 1990-09-19 | Nippon Steel Corp | Semiconductor element connection structure |
| US5235741A (en) * | 1989-08-18 | 1993-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Electrical connection and method for making the same |
| US5468995A (en) * | 1994-07-05 | 1995-11-21 | Motorola, Inc. | Semiconductor device having compliant columnar electrical connections |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1205971A3 (en) * | 2000-11-08 | 2003-01-02 | Sharp Kabushiki Kaisha | Electronic component and method and structure for mounting semiconductor device |
| US7038144B2 (en) | 2000-11-08 | 2006-05-02 | Sharp Kabushiki Kaisha | Electronic component and method and structure for mounting semiconductor device |
| EP1708258A4 (en) * | 2004-09-08 | 2007-05-09 | Murata Manufacturing Co | COMPOSITE CERAMIC SUBSTRATE |
| US7820916B2 (en) | 2004-09-08 | 2010-10-26 | Murata Manufacturing Co., Ltd. | Composite ceramic substrate |
| WO2008125440A1 (en) * | 2007-04-11 | 2008-10-23 | International Business Machines Corporation | Electrical interconnect structure and method of forming the same |
| CN101652847B (en) * | 2007-04-11 | 2011-11-02 | 国际商业机器公司 | Electrical interconnect structure and method of forming same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000507047A (en) | 2000-06-06 |
| TW335544B (en) | 1998-07-01 |
| EP0970521A1 (en) | 2000-01-12 |
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