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WO1997013889B1 - Boues de polissage ameliorees et leurs procedes d'utilisation - Google Patents

Boues de polissage ameliorees et leurs procedes d'utilisation

Info

Publication number
WO1997013889B1
WO1997013889B1 PCT/US1996/016425 US9616425W WO9713889B1 WO 1997013889 B1 WO1997013889 B1 WO 1997013889B1 US 9616425 W US9616425 W US 9616425W WO 9713889 B1 WO9713889 B1 WO 9713889B1
Authority
WO
WIPO (PCT)
Prior art keywords
alumina
slurry
work piece
alpha
aqueous slurry
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1996/016425
Other languages
English (en)
Other versions
WO1997013889A1 (fr
Filing date
Publication date
Priority claimed from US08/541,898 external-priority patent/US5693239A/en
Application filed filed Critical
Priority to JP9515279A priority Critical patent/JPH11511394A/ja
Priority to KR1019980702579A priority patent/KR19990064098A/ko
Priority to EP96936459A priority patent/EP0868543A4/fr
Publication of WO1997013889A1 publication Critical patent/WO1997013889A1/fr
Publication of WO1997013889B1 publication Critical patent/WO1997013889B1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Abstract

Boue aqueuse utilisée pour polir ou aplanir une pièce qui contient un métal, les solides de la boue constituant environ 1 à environ 50 % en poids d'alumine alpha submicronique, le reste de ces solides présentant une composition sensiblement moins abrasive choisie dans au moins un groupe constitué par des hydrates d'aluminium, des hydroxydes d'aluminium, l'alumine gamma, l'alumine delta, l'alumine amorphe et la silice amorphe. L'invention se rapporte également à un procédé de polissage de la surface d'une pièce qui contient un métal, procédé dans lequel une boue aqueuse est utilisée comme composition de polissage au cours d'une opération de polissage chimico-mécanique.
PCT/US1996/016425 1995-10-10 1996-10-04 Boues de polissage ameliorees et leurs procedes d'utilisation Ceased WO1997013889A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP9515279A JPH11511394A (ja) 1995-10-10 1996-10-04 改良研磨スラリー及びその使用方法
KR1019980702579A KR19990064098A (ko) 1995-10-10 1996-10-04 개선된 연마용 슬러리 및 이의 사용 방법
EP96936459A EP0868543A4 (fr) 1995-10-10 1996-10-04 Boues de polissage ameliorees et leurs procedes d'utilisation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/541,898 1995-10-10
US08/541,898 US5693239A (en) 1995-10-10 1995-10-10 Polishing slurries comprising two abrasive components and methods for their use

Publications (2)

Publication Number Publication Date
WO1997013889A1 WO1997013889A1 (fr) 1997-04-17
WO1997013889B1 true WO1997013889B1 (fr) 1997-05-22

Family

ID=24161560

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1996/016425 Ceased WO1997013889A1 (fr) 1995-10-10 1996-10-04 Boues de polissage ameliorees et leurs procedes d'utilisation

Country Status (7)

Country Link
US (1) US5693239A (fr)
EP (1) EP0868543A4 (fr)
JP (1) JPH11511394A (fr)
KR (1) KR19990064098A (fr)
CN (1) CN1087870C (fr)
TW (1) TW365028B (fr)
WO (1) WO1997013889A1 (fr)

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