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WO1997011849A3 - Tintenstrahldruckkopf und verfahren zum herstellen eines solchen tintenstrahldruckkopfes - Google Patents

Tintenstrahldruckkopf und verfahren zum herstellen eines solchen tintenstrahldruckkopfes Download PDF

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Publication number
WO1997011849A3
WO1997011849A3 PCT/DE1996/001858 DE9601858W WO9711849A3 WO 1997011849 A3 WO1997011849 A3 WO 1997011849A3 DE 9601858 W DE9601858 W DE 9601858W WO 9711849 A3 WO9711849 A3 WO 9711849A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
apertures
printing head
channels
jet printing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE1996/001858
Other languages
English (en)
French (fr)
Other versions
WO1997011849A2 (de
Inventor
Wolfgang Werner
Thomas Zettler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to JP9513083A priority Critical patent/JP3065105B2/ja
Priority to EP96944566A priority patent/EP0852539B1/de
Priority to KR1019980702379A priority patent/KR19990063906A/ko
Priority to DE59602566T priority patent/DE59602566D1/de
Publication of WO1997011849A2 publication Critical patent/WO1997011849A2/de
Publication of WO1997011849A3 publication Critical patent/WO1997011849A3/de
Anticipated expiration legal-status Critical
Priority to US09/052,346 priority patent/US6099106A/en
Priority to US09/528,417 priority patent/US6397467B1/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/016—Method or apparatus with etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Der Tintenstrahldruckkopf nach der Erfindung weist eine Vielzahl von parallel zueinander liegenden Kanälen (K; K1, K2...) auf, die durch Öffnungen (O) einer über den Kanälen (K; K1, K2...) liegende erste Schicht (6) isotrop geätzt werden. Nach dem Ätzvorgang werden die Öffnungen (O) der ersten Schicht (6) verschlossen, in dem auf die erste Schicht (6) eine zweite Schicht (7) abgeschieden wird, welche die Öffnungen (O), die beispielsweise einen Durchmesser von 1 νm aufweisen, überdeckt. Die durch Fotolithographie und anschließendes Trockenätzen in der ersten Schicht (6) erzeugten Öffnungen (O) sind so angeordnet, daß bei dem Ätzvorgang die gewünschten Kanäle (K; K1, K2...) unterhalb der ersten Schicht (5) freigelegt werden. Vorteile: kein Justageaufwand, Erzeugung geschlossener Kanäle ohne Bond- oder Klebetechniken, Integration von Ansteuerschaltung und Druckkopf auf einem Substrat möglich.
PCT/DE1996/001858 1995-09-29 1996-09-27 Tintenstrahldruckkopf und verfahren zum herstellen eines solchen tintenstrahldruckkopfes Ceased WO1997011849A2 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP9513083A JP3065105B2 (ja) 1995-09-29 1996-09-27 インクジェット印字ヘッド及びこのインクジェット印字ヘッドの製造方法
EP96944566A EP0852539B1 (de) 1995-09-29 1996-09-27 Tintenstrahldruckkopf und verfahren zum herstellen eines solchen tintenstrahldruckkopfes
KR1019980702379A KR19990063906A (ko) 1995-09-29 1996-09-27 잉크 젯 프린팅 헤드 및 그 제조 방법
DE59602566T DE59602566D1 (de) 1995-09-29 1996-09-27 Tintenstrahldruckkopf und verfahren zum herstellen eines solchen tintenstrahldruckkopfes
US09/052,346 US6099106A (en) 1995-09-29 1998-03-30 Ink jet print head
US09/528,417 US6397467B1 (en) 1995-09-29 2000-03-17 Ink jet print head and method of producing the ink print head

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19536429A DE19536429A1 (de) 1995-09-29 1995-09-29 Tintenstrahldruckkopf und Verfahren zum Herstellen eines solchen Tintenstrahldruckkopfes
DE19536429.5 1995-09-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/052,346 Continuation US6099106A (en) 1995-09-29 1998-03-30 Ink jet print head

Publications (2)

Publication Number Publication Date
WO1997011849A2 WO1997011849A2 (de) 1997-04-03
WO1997011849A3 true WO1997011849A3 (de) 1997-06-05

Family

ID=7773644

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1996/001858 Ceased WO1997011849A2 (de) 1995-09-29 1996-09-27 Tintenstrahldruckkopf und verfahren zum herstellen eines solchen tintenstrahldruckkopfes

Country Status (6)

Country Link
US (2) US6099106A (de)
EP (1) EP0852539B1 (de)
JP (1) JP3065105B2 (de)
KR (1) KR19990063906A (de)
DE (2) DE19536429A1 (de)
WO (1) WO1997011849A2 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6322201B1 (en) 1997-10-22 2001-11-27 Hewlett-Packard Company Printhead with a fluid channel therethrough
JP3327246B2 (ja) * 1999-03-25 2002-09-24 富士ゼロックス株式会社 インクジェット記録ヘッド及びその製造方法
US6482574B1 (en) 2000-04-20 2002-11-19 Hewlett-Packard Co. Droplet plate architecture in ink-jet printheads
NL1016735C2 (nl) * 2000-11-29 2002-05-31 Ocu Technologies B V Werkwijze voor het vormen van een nozzle in een orgaan voor een inkjet printkop, een nozzle-orgaan, een inkjet printkop voorzien van dit nozzle-orgaan en een inkjet printer voorzien van een dergelijke printkop.
US6698868B2 (en) 2001-10-31 2004-03-02 Hewlett-Packard Development Company, L.P. Thermal drop generator for ultra-small droplets
US6627467B2 (en) 2001-10-31 2003-09-30 Hewlett-Packard Development Company, Lp. Fluid ejection device fabrication
US7125731B2 (en) 2001-10-31 2006-10-24 Hewlett-Packard Development Company, L.P. Drop generator for ultra-small droplets
GB2410465A (en) * 2004-01-29 2005-08-03 Hewlett Packard Development Co Method of making an inkjet printhead
JP4706850B2 (ja) 2006-03-23 2011-06-22 富士フイルム株式会社 ノズルプレートの製造方法、液滴吐出ヘッド及び画像形成装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917434A1 (de) * 1989-05-29 1989-11-09 Siemens Ag Mehrschichtig aufgebauter tintendruckkopf mit durch selektives aetzen erzeugten tintenkanaelen
EP0434946A2 (de) * 1989-12-26 1991-07-03 Xerox Corporation Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen
WO1992009111A1 (en) * 1990-11-20 1992-05-29 Spectra, Inc. Thin-film transducer ink jet head
EP0539804A2 (de) * 1991-10-15 1993-05-05 Canon Kabushiki Kaisha Trägermaterial für Flüssigkeitsaufzeichnungskopf, Herstellungsverfahren dafür, Flüssigkeitsaufzeichnungskopf und Flüssigkeitsaufzeichnungsvorrichtung
JPH05131624A (ja) * 1991-11-12 1993-05-28 Canon Inc インクジエツト記録ヘツド及びインクジエツト記録装置

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Publication number Priority date Publication date Assignee Title
US4463359A (en) * 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
JPS58220754A (ja) 1982-06-18 1983-12-22 Canon Inc インクジエツト記録ヘツド
US4609427A (en) * 1982-06-25 1986-09-02 Canon Kabushiki Kaisha Method for producing ink jet recording head
JPH0613219B2 (ja) 1983-04-30 1994-02-23 キヤノン株式会社 インクジェットヘッド
US4513298A (en) 1983-05-25 1985-04-23 Hewlett-Packard Company Thermal ink jet printhead
US4532530A (en) 1984-03-09 1985-07-30 Xerox Corporation Bubble jet printing device
US4719477A (en) 1986-01-17 1988-01-12 Hewlett-Packard Company Integrated thermal ink jet printhead and method of manufacture
US4863560A (en) * 1988-08-22 1989-09-05 Xerox Corp Fabrication of silicon structures by single side, multiple step etching process
GB8910961D0 (en) * 1989-05-12 1989-06-28 Am Int Method of forming a pattern on a surface
EP0443722B1 (de) * 1990-01-25 1996-05-22 Canon Kabushiki Kaisha Tintenstrahlaufzeichnungssystem
JPH042790A (ja) * 1990-04-18 1992-01-07 Seiko Epson Corp シリコン基板の加工方法
SE9304145D0 (sv) * 1993-12-10 1993-12-10 Pharmacia Lkb Biotech Sätt att tillverka hålrumsstrukturer

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917434A1 (de) * 1989-05-29 1989-11-09 Siemens Ag Mehrschichtig aufgebauter tintendruckkopf mit durch selektives aetzen erzeugten tintenkanaelen
EP0434946A2 (de) * 1989-12-26 1991-07-03 Xerox Corporation Farbstrahldruckkopf mit ionischer Passivierung der elektrischen Schaltungen
WO1992009111A1 (en) * 1990-11-20 1992-05-29 Spectra, Inc. Thin-film transducer ink jet head
EP0539804A2 (de) * 1991-10-15 1993-05-05 Canon Kabushiki Kaisha Trägermaterial für Flüssigkeitsaufzeichnungskopf, Herstellungsverfahren dafür, Flüssigkeitsaufzeichnungskopf und Flüssigkeitsaufzeichnungsvorrichtung
JPH05131624A (ja) * 1991-11-12 1993-05-28 Canon Inc インクジエツト記録ヘツド及びインクジエツト記録装置
US5484075A (en) * 1991-11-12 1996-01-16 Canon Kabushiki Kaisha Method of manufacturing ink jet recording head

Also Published As

Publication number Publication date
JP3065105B2 (ja) 2000-07-12
DE19536429A1 (de) 1997-04-10
US6099106A (en) 2000-08-08
EP0852539A2 (de) 1998-07-15
JPH10512205A (ja) 1998-11-24
DE59602566D1 (de) 1999-09-02
KR19990063906A (ko) 1999-07-26
WO1997011849A2 (de) 1997-04-03
US6397467B1 (en) 2002-06-04
EP0852539B1 (de) 1999-07-28

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