WO1997002920A1 - System for automated hermetic sealing of casings - Google Patents
System for automated hermetic sealing of casings Download PDFInfo
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- WO1997002920A1 WO1997002920A1 PCT/AT1996/000121 AT9600121W WO9702920A1 WO 1997002920 A1 WO1997002920 A1 WO 1997002920A1 AT 9600121 W AT9600121 W AT 9600121W WO 9702920 A1 WO9702920 A1 WO 9702920A1
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- welding
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- welding chamber
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K11/00—Resistance welding; Severing by resistance heating
- B23K11/002—Resistance welding; Severing by resistance heating specially adapted for particular articles or work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
- B23K2101/40—Semiconductor devices
Definitions
- the invention relates to a system for the automated, hermetic sealing of housings, preferably metal housings, in which electronic components, in particular in an oxygen and steam-free atmosphere, are arranged, optionally with a welding chamber operated with nitrogen overpressure or underpressure, which has at least one with two to one another Movable electrodes trained welding head and corresponding feed and discharge devices for the housing to and from the welding head.
- Such systems are mainly used in the manufacture of electronic components.
- each of these drives also has disadvantages.
- the pneumatic drive is flexible in the opening travel and pressure setting, the opening and closing times are extremely long.
- the eccentric drive has a high closing speed, but is extremely inflexible in its movement.
- the object of the invention is to provide a system which avoids the disadvantages mentioned above and which also ensures a higher quality in production.
- a quality standard for such systems is that a hermetic sealing of the housing is possible, the interior of the housing should be absolutely free of oxygen and water vapor.
- the system according to the invention cited at the beginning is characterized in that the welding chamber can be evacuated and the welding head has at least one electrode which can be moved via a servo drive.
- the servo drive allows a high cycle frequency in the production line.
- the welding chamber is sealed and evacuated, with this evacuation being carried out in an average of 15 minutes. All atmospheric gases are extracted and then the welding chamber is filled with inert gas. The system is ready for operation again in no time.
- the welding chamber is connected to a gas drying circuit.
- This gas drying circuit essentially consists of two drying cartridges which contain a gas drying agent and each drying cartridge is connected separately to the welding chamber. A cartridge dries the inert gas from the welding chamber in operation. In the other cartridge, the moisture absorbed is extracted from the drying agent via vacuum and temperature. Through this alternating procedure, the operability of the system is always guaranteed.
- the welding space located in the welding head which surrounds the housing provided for welding, can be evacuated when the electrodes are closed. In order to obtain an even higher freedom from gas in the interior of the housing to be closed, evacuation is carried out shortly before welding in the welding head with the electrodes closed. Vacuum values of the order of 10 torr can be achieved.
- At least one electrode of the welding head has a channel for evacuation and a sealing ring for sealing off the second electrode.
- the procedure in the welding head is as follows: After inserting the housing into an electrode, the second electrode is closed until the O-ring seals. After a few seconds of evacuation, the electrodes are closed on the welding position. After the welding process, the electrodes are opened and the housing is removed using the ejector.
- the simple evacuation facility has resulted in a significant improvement in quality.
- the drying chamber is preceded by a drying oven and optionally a subsequent prechamber for the intermediate storage of the housing to be closed, the
- Entry opening into the welding chamber can be closed by a lock flap.
- the lock flap ensures that the welding chamber operates properly.
- the housings coming out of the drying oven must no longer come into contact with the environmental atmosphere. This means that housings that are delivered from the drying oven can also be used for service work in the
- Welding chamber are upstream. In addition, only the welding chamber has to be evacuated through the lock flap after the service work.
- an outlet lock chamber which can be both evacuated and flushed with inert gas, and the inlet and outlet openings of which each have a lock flap are reproduced in the welding chamber is lockable.
- the exit lock chamber 8 with its two lock flaps is of particular advantage.
- helium gas is added to the nitrogen for operating the welding chamber.
- This added helium gas is an indicator of the welding quality. If a housing leaks after the welding process, the gas flows out and is detected by a sensor.
- a quick method for quality control is preferably provided for random samples.
- the servo drive consists of an electronically controlled electric motor that drives a spindle, preferably a ball screw. This simple drive for closing and opening the electrode has proven its worth. Above all through the adjustability of the
- the electrode is preferably supported vertically by a spring assembly. This resilient
- the purpose of the support is that during the actual welding process, the flanging of the housing becomes practically zero, and the electrode has to be moved to a minimum in order to enable an optimal closure.
- the sealing necessary for the evacuation takes place on the rotating spindle part.
- Such a seal is to be carried out with conventional machine components, a high level of operational safety being guaranteed.
- FIG. 1 shows the schematic structure of the Complete system
- FIG. 2 the welding head with the servo drive
- FIG. 3 an evacuable electrode
- FIG. 4 the movement sequence during welding.
- the system for closing the metal housing consists of several chambers.
- the core of this system is the welding chamber 1, in which the welding head 2 is also arranged
- the welding chamber 1 Since electronic components are provided in the metal housings, these metal housings must be sealed in an atmosphere free of oxygen and water vapor. In order for this atmosphere to exist, the welding chamber 1 is operated in operation with a nitrogen overpressure, possibly also with a negative pressure.
- the welding head 2, which will be described later consists of electrodes that can be moved towards each other. Since these electrodes have to be serviced at regular intervals, the welding chamber 1 must be opened forcibly. In order to achieve a clean atmosphere in the welding chamber 1 for the welding after this maintenance work, the welding chamber 1 can be evacuated. The welding chamber is sealed tightly after the service or maintenance work and evacuated The atmospheric gases are extracted and then the welding chamber 1 is optionally filled with inert gas so that it is ready for operation again in the shortest possible time
- a drying oven 3 and a pre-chamber 4 are pre-built for the welding chamber 1.
- the welding chamber 1 also has an exit lock chamber 5. It is certainly extremely important with this system. that at least the openings of the welding chamber 1, i.e. the inlet opening from the pre-chamber 4 into the welding chamber 1 and also the opening from the welding chamber 1 into the outlet lock chamber 5, can be closed by means of lock flaps 6, 7.
- the connection opening from drying oven 3 to prechamber 4 is provided with a connecting lock 9
- the metal housings provided with the electronic components are dried in the drying oven 3, temporarily stored in the antechamber 4, sealed in the welding chamber 1 and discharged via the exit lock chamber 5.
- the welding chamber 1 is connected to a gas drying circuit.
- the welding head 2 has a servo drive 11 for moving the electrode 10.
- a servo drive 11 for moving the electrode 10.
- the housing 12 of the welding head 2 is a servo drive 11 for moving the electrode 10.
- the spindle 14 is provided with a spindle nut 16, which in turn moves the electrode 10 via at least two bolts 17.
- the bolts 17 have a suspension 19.
- the suspension 18 can also be a spring assembly
- the welding head 2 is closed shortly before the welding
- the metal housing 20 to be welded lies in a corresponding recess in the lower electrodes.
- the upper electrode 10a has a sealing ring 21 for sealing off the second electrode 10b. After the electrodes 10a, 10b have been closed and before welding, evacuation is carried out; this additional evacuation has brought about a clear improvement in quality.
- Diagram 4 the sequence of movements in the course of the welding process is shown over time.
- Diagram a shows the build-up of force during the welding process
- diagram b the spring travel of the suspension 18
- diagram c the movement of the electrode 10a
- diagram d the movement sequence of the servo drive
- diagram me the summation of the movement sequences or the speed of the overall system.
- the servo drive is started at maximum speed up to the first point of contact with the element to be welded. Shortly before reaching the touchdown point
- the electrode is returned to the starting position at maximum speed (diagram e position 34).
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- Resistance Welding (AREA)
Abstract
Description
Anlage zum automatisierten, hermetischen Verschließen von GehäusenSystem for automated, hermetic sealing of housings
Die Erfindung betrifft eine Anlage zum automatisierten, hermetischen Verschließen von Gehäusen, vorzugsweise von Metallgehäusen, in denen insbesondere in Sauerstoff- und wasserdampffreier Atmosphäre befindliche elektronische Bauteile angeordnet sind, wobei gegebenenfalls eine mit Stickstoffüberdruck oder Unterdruck betriebene Schweißkammer vorgesehen ist, die mindestens einen mit zwei zueinander bewegbare Elektroden ausgebildeten Schweißkopf und entsprechende Zu- und Abführeinrichtungen für die Gehäuse zum und vom Schweißkopf aufweist.The invention relates to a system for the automated, hermetic sealing of housings, preferably metal housings, in which electronic components, in particular in an oxygen and steam-free atmosphere, are arranged, optionally with a welding chamber operated with nitrogen overpressure or underpressure, which has at least one with two to one another Movable electrodes trained welding head and corresponding feed and discharge devices for the housing to and from the welding head.
Derartige Anlagen finden vorwiegend in der Herstellung von Elektronikbauteilen ihre Anwendung.Such systems are mainly used in the manufacture of electronic components.
Bei herkömmlichen Maschinen wurden bisher sogenannte „Glove-Boxen" eingebaut. Dies sind Kammern, die mit reinem Stickstoff gespült und mit leichten Innendruck betrieben werden, um ein Eindringen der Umweltatmosphäre bei eventuellen Undichtheiten zu verhindern. Servicearbeiten mußten mit Gummihandschuhen von außen durchgeführt werden. Ist eine derartige Wartung nicht möglich, mußte die Box bzw. Kammer geöffnet werden. Um wieder eine saubere Atmosphäre für die Schweißung zu erreichen, mußte die Kammer lange, unter Umständen länger als einen Tag, mit reinem Stickstoff gespült werden.So-called "glove boxes" have so far been installed in conventional machines. These are chambers which are flushed with pure nitrogen and operated with a slight internal pressure in order to prevent penetration of the environmental atmosphere in the event of any leaks. Service work had to be carried out with rubber gloves from the outside such a maintenance was not possible, the box or chamber had to be opened .. In order to get a clean atmosphere for the welding again, the chamber had to be purged with pure nitrogen for a long time, possibly longer than a day.
Zeitraubende Betriebsunterbrechnungen wirken sich natürlich in der industriellenTime-consuming business interruptions naturally have an impact on industrial ones
Massenfertigung äußerst nachteilig aus.Mass production extremely disadvantageous.
Darüber hinaus wurden die Elektroden entweder über großvolumige Pneumatikzylinder oder über Exzenterantriebe bewegt. Jeder dieser Antriebe hat jedoch auch Nachteile. So ist zwar der Pneumatikantrieb flexibel im Öffnungsweg und bei der Druckeinstellung, jedoch die Öffnungs- und Schließzeiten sind außerordentlich lang. Der Exzenterantrieb weist zwar hohe Schließgeschwindigkeit auf, ist aber äußerst unflexibel im Bewegungsablauf. Aufgabe der Erfindung ist es, eine Anlage zu schaffen, die die oben genannten Nachteile vermeidet und die darüber hinaus eine höhere Qualität in der Fertigung gewährleistet. Ein Qualitätsmaßstab für derartige Anlagen ist es, daß ein hermetisches dichtes Verschließen der Gehäuse möglich ist, wobei der Innenraum der Gehäuse absolut frei von Sauerstoff und Wasserdampf sein soll.In addition, the electrodes were moved either by large-volume pneumatic cylinders or by eccentric drives. However, each of these drives also has disadvantages. Although the pneumatic drive is flexible in the opening travel and pressure setting, the opening and closing times are extremely long. The eccentric drive has a high closing speed, but is extremely inflexible in its movement. The object of the invention is to provide a system which avoids the disadvantages mentioned above and which also ensures a higher quality in production. A quality standard for such systems is that a hermetic sealing of the housing is possible, the interior of the housing should be absolutely free of oxygen and water vapor.
Die eingangs zitierte erfindungsgemäße Anlage ist dadurch gekennzeichnet, daß die Schweißkammer evakuierbar ist und der Schweißkopf mindestens eine über einen Servoantrieb bewegbare Elektrode aufweist. Mit der Erfindung ist es erstmals möglich, Servicearbeiten wie beispielsweise das regelmäßige Wechseln der Elektroden in kürzester Zeit durchzuführen. Darüber hinaus erlaubt der Servoantrieb, durch seine kurzen Schließzeiten, eine hohe Taktfrequenz in der Fertigungsstraße. Ein weiterer Vorteil der Erfindung ist darin zu sehen, daß die Anlage in Kompaktbauweise gebaut werden kann, sodaß ein möglichst geringes Evakuiervolumen auftritt.The system according to the invention cited at the beginning is characterized in that the welding chamber can be evacuated and the welding head has at least one electrode which can be moved via a servo drive. With the invention, it is possible for the first time to carry out service work, such as regularly changing the electrodes, in the shortest possible time. In addition, thanks to its short closing times, the servo drive allows a high cycle frequency in the production line. Another advantage of the invention is the fact that the system can be built in a compact design, so that the lowest possible evacuation volume occurs.
So wird die Schweißkammer nach den Service- oder Wartungsarbeiten dicht verschlossen und evakuiert, wobei diese Evakuierung in durchschnittlich 15 Minuten durchgeführt ist. Alle atmosphärischen Gase werden abgesaugt und anschließend wird die Schweißkammer mit inertem Gas gefüllt. In kürzester Zeit ist die Anlage wieder betriebsbereit.After the service or maintenance work, the welding chamber is sealed and evacuated, with this evacuation being carried out in an average of 15 minutes. All atmospheric gases are extracted and then the welding chamber is filled with inert gas. The system is ready for operation again in no time.
Nach einem besonderen Merkmal der Erfindung ist die Schweißkammer an einen Gastrocknungskreislauf angeschlossen. Dieser Gastrocknungskreislauf besteht im wesentlichen aus zwei Trocknungspatronen, die ein Gastrocknungsmittel beinhalten und wobei jede Trocknungspatrone separat an die Schweißkammer angeschlossen ist. Eine Patrone trocknet das Inertgas der im Betrieb befindlichen Schweißkammer. Bei der anderen Patrone wird dem Trocknungsmittel über Vaeuum und Temperatur die aufgenommene Feuchtigkeit entzogen. Durch diese alternierende Vorgangsweise ist die Betriebsfähigkeit der Anlage immer gewährleistet. Gemäß einer weiteren Ausgestaltung der Erfindung ist der im Schweißkopf befindliche Schweißraum, der das zum Verschweißen vorgesehene Gehäuse umgibt, bei geschlossenen Elektroden evakuierbar. Um eine noch höhere Gasfreiheit im Innenraum des zu verschließenden Gehäuses zu erhalten, wird kurz vor dem Verschweißen im Schweißkopf bei geschlossenen Elektroden evakuiert. Dabei sind Vacuumwerte in der Größenordnung von 10 Torr zu erreichen.According to a special feature of the invention, the welding chamber is connected to a gas drying circuit. This gas drying circuit essentially consists of two drying cartridges which contain a gas drying agent and each drying cartridge is connected separately to the welding chamber. A cartridge dries the inert gas from the welding chamber in operation. In the other cartridge, the moisture absorbed is extracted from the drying agent via vacuum and temperature. Through this alternating procedure, the operability of the system is always guaranteed. According to a further embodiment of the invention, the welding space located in the welding head, which surrounds the housing provided for welding, can be evacuated when the electrodes are closed. In order to obtain an even higher freedom from gas in the interior of the housing to be closed, evacuation is carried out shortly before welding in the welding head with the electrodes closed. Vacuum values of the order of 10 torr can be achieved.
Nach einer besonderen Ausgestaltung der Erfindung weist mindestens eine Elektrode des Schweißkopfes einen Kanal zur Evakuierung und einen Dichtring für die Abdichtung zur zweiten Elektrode auf. Der Vorgang im Schweißkopf ist folgender: Nach dem Einlegen des Gehäuses in eine Elektrode wird die zweite Elektrode geschlossen, bis der O-Ring abdichtet. Nach einigen Sekunden des Evakuierens werden die Elektroden auf die Schweißposition geschlossen. Nach dem Schweißvorgang werden die Elektroden geöffnet, und das Gehäuse mittels des Auswerfers ausgebracht. Die einfache Einrichtung zum Evakuieren hat eine deutliche Qualitätsverbesserung nach sich gezogen.According to a special embodiment of the invention, at least one electrode of the welding head has a channel for evacuation and a sealing ring for sealing off the second electrode. The procedure in the welding head is as follows: After inserting the housing into an electrode, the second electrode is closed until the O-ring seals. After a few seconds of evacuation, the electrodes are closed on the welding position. After the welding process, the electrodes are opened and the housing is removed using the ejector. The simple evacuation facility has resulted in a significant improvement in quality.
Gemäß einem besonderen Merkmal der Erfindung sind der Schweißkammer ein Trocknungsofen und gegebenenfalls eine nachfolgende Vorkammer zur Zwischenlagerung der zu verschließenden Gehäuse vorgebaut, wobei dieAccording to a particular feature of the invention, the drying chamber is preceded by a drying oven and optionally a subsequent prechamber for the intermediate storage of the housing to be closed, the
Eintrittsöffnung in die Schweißkammer über eine Schleusenklappe verschließbar ist. Durch die Schleusenklappe ist der einwandfreie Betrieb der Schweißkammer sichergestellt. Die aus dem Trocknungsofen kommenden Gehäuse dürfen mit der Umweltatmosphäre nicht mehr in Berührung kommen. So können also Gehäuse, die aus dem Trocknungsofen angeliefert werden, auch bei Servicearbeiten in derEntry opening into the welding chamber can be closed by a lock flap. The lock flap ensures that the welding chamber operates properly. The housings coming out of the drying oven must no longer come into contact with the environmental atmosphere. This means that housings that are delivered from the drying oven can also be used for service work in the
Schweißkammer vorgelagert werden. Darüber hinaus muß durch die Schleusenklappe nach den Servicearbeiten nur die Schweißkammer evakuiert werden.Welding chamber are upstream. In addition, only the welding chamber has to be evacuated through the lock flap after the service work.
Gemäß einem weiteren Merkmal der Erfindung ist der Schweißkammer eine Ausgangsschleusenkammer nachgebaut, die sowohl evakuierbar als auch mit Inert- Gas spülbar ist, und deren Ein- und Austrittsöffnung mit je einer Schleusenklappe verschließbar ist. Um eine Verunreinigung der Inertgas-Atmosphäre in der Schweißkammer bei der Ausbringung der Gehäuse zu verhindern, ist die Ausgangsschleusenkammer 8mit ihren zwei Schleusenklappen vom besonderen Vorteil.According to a further feature of the invention, an outlet lock chamber, which can be both evacuated and flushed with inert gas, and the inlet and outlet openings of which each have a lock flap are reproduced in the welding chamber is lockable. In order to prevent contamination of the inert gas atmosphere in the welding chamber when the housings are being brought out, the exit lock chamber 8 with its two lock flaps is of particular advantage.
Nach einer besonderen Ausgestaltung der Erfindung ist dem Stickstoff zum Betrieb der Schweißkammer Helium-Gas zugesetzt. Dieses zugesetzte Heliumgas ist ein Indikator für die Schweißqualität. Ist nämlich ein Gehäuse nach dem Schweißvorgang undicht, so strömt das Gas aus und wird mit einem Sensor erfaßt. Eine schnelle Methode zur Qualitätskontrolle ist vorzugsweise bei Stichproben damit gegeben.According to a special embodiment of the invention, helium gas is added to the nitrogen for operating the welding chamber. This added helium gas is an indicator of the welding quality. If a housing leaks after the welding process, the gas flows out and is detected by a sensor. A quick method for quality control is preferably provided for random samples.
Gemäß einem besonderen Merkmal der Erfindung besteht der Servoantrieb aus einem elektronisch gesteuerten Elektromotor, der eine Spindel, vorzugsweise eine Kugelumlaufspindel antreibt. Dieser einfache Antrieb für die Schließung und Öffnung der Elektrode hat sich bestens bewährt. Vor allem durch die Einstellbarkeit derAccording to a special feature of the invention, the servo drive consists of an electronically controlled electric motor that drives a spindle, preferably a ball screw. This simple drive for closing and opening the electrode has proven its worth. Above all through the adjustability of the
Geschwindigkeit und auch des Beschleunigungsvorganges kann die Taktfrequenz der Fertigung enorm erhöht werden.Speed and also the acceleration process, the cycle frequency of production can be increased enormously.
Nach einer weiteren Ausgestaltung der Erfindung ist die Elektrode über eine Federung vorzugsweise ein Federnpaket vertikal abgestützt. Diese federndeAccording to a further embodiment of the invention, the electrode is preferably supported vertically by a spring assembly. This resilient
Abstützung hat den Zweck, daß beim eigentlichen Schweißvorgang die Bördelung des Gehäuses praktisch null wird, und die Elektrode minimal nachfahren muß, um eine optimale Verschließung zu ermöglichen.The purpose of the support is that during the actual welding process, the flanging of the housing becomes practically zero, and the electrode has to be moved to a minimum in order to enable an optimal closure.
Gemäß einem weiteren Merkmal der Erfindung erfolgt die zur Evakuierung notwendige Abdichtung am rotierenden Spindelteil. Eine derartige Abdichtung ist mit herkömmlichen Maschinenbauelementen durchzufühen, wobei eine hohe Betriebssicherheit gewährleistet ist.According to a further feature of the invention, the sealing necessary for the evacuation takes place on the rotating spindle part. Such a seal is to be carried out with conventional machine components, a high level of operational safety being guaranteed.
Die Erfindung wird an Hand von Ausfuhrungsbeispielen, die in der Zeichnung dargestellt sind, näher erläutert. Die Fig. 1 zeigt den schematischen Aufbau der Gesamtanlage, Fig. 2 den Schweißkopf mit dem Servoantrieb, Fig. 3 eine evakuierbare Elektrode und Fig. 4 den Bewegungsablauf beim Schweißen.The invention is explained in more detail with reference to exemplary embodiments which are shown in the drawing. Fig. 1 shows the schematic structure of the Complete system, FIG. 2 the welding head with the servo drive, FIG. 3 an evacuable electrode and FIG. 4 the movement sequence during welding.
Gemäß der Fig. 1 besteht die Anlage zum Verschließen der Metallgehäuse aus mehreren Kammern. Das Kernstuck dieser Anlage ist die Schweißkammer 1, in der auch der Schweißkopf 2 angeordnet ist1, the system for closing the metal housing consists of several chambers. The core of this system is the welding chamber 1, in which the welding head 2 is also arranged
Da in den Metallgehäusen elektronische Bauteile vorgesehen sind, müssen diese Metallgehäuse in Sauerstoff- und wasserdampffreier Atmosphäre verschlossen werden Damit diese Atmosphäre gegeben ist, wird die Schweißkammer 1 im Betrieb mit einem Stickstoffüberdruck, gegebenenfalls auch mit einen Unterdruck, betrieben Der später noch näher beschriebene Schweißkopf 2 besteht aus zueinander bewegbaren Elektroden. Da diese Elektroden in regelmäßigen Abständen gewartet werden müssen, muß die Schweißkammer 1 zwangsweise geöffnet werden Um nach diesen Wartungsarbeiten wieder eine saubere Atmosphäre in der Schweißkammer 1 für die Schweißung zu erreichen, ist diese evakuierbar So wird die Schweißkammer nach den Service- oder Wartungsarbeiten dicht verschlossen und evakuiert Die atmosphärischen Gase werden abgesaugt und anschließend wird die Schweißkammer 1 gegebenenfalls mit inertem Gas gefüllt, sodaß sie wieder in kürzester Zeit betriebsbereit istSince electronic components are provided in the metal housings, these metal housings must be sealed in an atmosphere free of oxygen and water vapor. In order for this atmosphere to exist, the welding chamber 1 is operated in operation with a nitrogen overpressure, possibly also with a negative pressure. The welding head 2, which will be described later consists of electrodes that can be moved towards each other. Since these electrodes have to be serviced at regular intervals, the welding chamber 1 must be opened forcibly. In order to achieve a clean atmosphere in the welding chamber 1 for the welding after this maintenance work, the welding chamber 1 can be evacuated. The welding chamber is sealed tightly after the service or maintenance work and evacuated The atmospheric gases are extracted and then the welding chamber 1 is optionally filled with inert gas so that it is ready for operation again in the shortest possible time
Der Schweißkammer 1 sind ein Trocknungsofen 3 und eine Vorkammer 4 vorgebaut Darüber hinaus weist die Schweißkammer 1 auch eine Ausgangsschleusenkammer 5 auf. Sicherlich äußerst wichtig bei dieser Anlage ist es. daß mindestens die Offnungen der Schweißkammer 1 also die Eintrittsoffnung von der Vorkammer 4 in die Schweißkammer 1 sowie auch die Öffnung von der Schweißkammer 1 in die Austrittsschleusenkammer 5 über Schleusenklappen 6, 7 verschließbar sind Die Ausgangsschleusenkammer 5 ist auch ausgangsseitig mit einer Schleusenklappe 8 versehen. Darüber hinaus ist auch die Verbindungsoffnung von Trocknungsofen 3 zur Vorkammer 4 mit einer Verbindungsschleuse 9 versehen Die mit den elektronischen Bauteilen versehenen Metallgehäuse werden im Trocknungsofen 3 getrocknet, in der Vorkammer 4 zwischengelagert, in der Schweißkammer 1 verschlossen und über die Ausgangsschleusenkammer 5 ausgebracht.A drying oven 3 and a pre-chamber 4 are pre-built for the welding chamber 1. In addition, the welding chamber 1 also has an exit lock chamber 5. It is certainly extremely important with this system. that at least the openings of the welding chamber 1, i.e. the inlet opening from the pre-chamber 4 into the welding chamber 1 and also the opening from the welding chamber 1 into the outlet lock chamber 5, can be closed by means of lock flaps 6, 7. In addition, the connection opening from drying oven 3 to prechamber 4 is provided with a connecting lock 9 The metal housings provided with the electronic components are dried in the drying oven 3, temporarily stored in the antechamber 4, sealed in the welding chamber 1 and discharged via the exit lock chamber 5.
Um in der Schweißkammer 1 immer eine für das Verschließen optimale Atmosphäre zu haben, ist die Schweißkammer 1 an einen Gastrocknungskreislauf angeschlossen.In order to always have an optimal atmosphere for sealing in the welding chamber 1, the welding chamber 1 is connected to a gas drying circuit.
Gemäß der Fig. 2 weist der Schweißkopf 2 zum Bewegen der Elektrode 10 einen Servoantrieb 11 auf. Im Gehäuse 12 des Schweißkopfes 2 ist über eineAccording to FIG. 2, the welding head 2 has a servo drive 11 for moving the electrode 10. In the housing 12 of the welding head 2 is a
Spindellagerung 13 die Spindel 14 gelagert. Außerhalb des Gehäuses 12 ist über einen Antriebsriemen 15 der Servoantrieb 1 1 mit der Spindel 14 verbunden. Natürlich ist sowohl die Spindellagerung 13 wie auch die Welle des Servoantriebes 11 vakuumabgedichtet .Spindle bearing 13, the spindle 14 is mounted. Outside the housing 12, the servo drive 11 is connected to the spindle 14 via a drive belt 15. Of course, both the spindle bearing 13 and the shaft of the servo drive 11 are vacuum sealed.
Die Spindel 14 ist mit einer Spindelmutter 16 versehen, die wiederum über mindestens zwei Bolzen 17 die Elektrode 10 bewegt. Die Bolzen 17 weisen eine Federung 19 auf. Die Federung 18 kann auch ein Federnpaket seinThe spindle 14 is provided with a spindle nut 16, which in turn moves the electrode 10 via at least two bolts 17. The bolts 17 have a suspension 19. The suspension 18 can also be a spring assembly
Mit diesem einfachen Antrieb, der sich durch die Einstellbarkeit der Geschwindigkeit und des Beschleunigungsvorganges auszeichnet, kann die Taktfrequenz der Fertigung enorm erhöht werden.With this simple drive, which is characterized by the adjustability of the speed and the acceleration process, the cycle frequency of production can be increased enormously.
Um eine noch höhere Gasfreiheit im Innenraum des zu verschließenden Gehäuses zu erhalten, wird kurz vor dem Verschweißen im Schweißkopf 2 bei geschlossenenIn order to obtain an even greater freedom from gas in the interior of the housing to be closed, the welding head 2 is closed shortly before the welding
Elektroden 10 evakuiert. Gemäß Fig. 3 weist dazu sowohl die obere Elektrode 10a als auch die untere Elektrode 10b je einen Kanal 19 zur Absaugung bzw. Evakuierung auf. Das zu verschweißende Metallgehäuse 20 liegt in einer entsprechenden Ausnehmung der unteren ElektrodelOb. Die obere Elektrode 10a weist für die Abdichtung zur zweiten Elektrode 10b einen Dichtring 21 auf. Nach dem Schließen der Elektroden 10a, 10b und vor dem Verschweißen wird evakuiert, diese zusätzliche Evakuierung hat eine deutliche Qualitätsverbesserung gebracht.Electrodes 10 evacuated. 3, both the upper electrode 10a and the lower electrode 10b each have a channel 19 for suction or evacuation. The metal housing 20 to be welded lies in a corresponding recess in the lower electrodes. The upper electrode 10a has a sealing ring 21 for sealing off the second electrode 10b. After the electrodes 10a, 10b have been closed and before welding, evacuation is carried out; this additional evacuation has brought about a clear improvement in quality.
Gemäß der Fig. 4 ist der Bewegungsablauf im Zuge des Schweißvorganges über die Zeit dargestellt. Das Diagramm a zeigt den Kraftaufbau während des Schweißvorganges, das Diagramm b den Federweg der Federung 18, das Diagramm c die Bewegung der Elektrode 10a, das Diagramm d den Bewegungsablauf des Servoantriebes und das Diagrammm e die Summation der Bewegungsabläufe bzw. die Geschwindigkeit des Gesamtsystems.4, the sequence of movements in the course of the welding process is shown over time. Diagram a shows the build-up of force during the welding process, diagram b the spring travel of the suspension 18, diagram c the movement of the electrode 10a, diagram d the movement sequence of the servo drive and diagram me the summation of the movement sequences or the speed of the overall system.
Nach dem Einlegen des Gehäuses 20 mit dem zu verschweißenden Element in der unteren Elektrode 10b wird, wie aus dem Diagramm e ersichtlich, der Servoantrieb mit maximaler Geschwindigkeit bis zum ersten Berührungspunkt mit dem zu verschweißenden Element gestartet. Kurz vor Erreichen des AufsetzpunktesAfter inserting the housing 20 with the element to be welded into the lower electrode 10b, as can be seen from the diagram e, the servo drive is started at maximum speed up to the first point of contact with the element to be welded. Shortly before reaching the touchdown point
(Diagramm e Punkt 30) wird abgebremst und danach mit reduzierter Geschwindigkeit des Servoantriebes ein Kraftaufbau zwischen den beiden zu verschweißenden Teilen bis zu einer Maximalkraft. Während dieser letzten Phase wird die Federung 18 endgültig gespannt (Diagramm b), wobei die Elektrode 10a die maximale Anpreßkraft im Punkt 31 erreicht hat (Diagramm a). Im Zeitpunkt 32 erfolgt der Schweißvorgang, wobei die Verformung der zu verschweißenden Elemente durch die Federung 18 ausgeglichen wir (Diagramm b Punkt 33)(Diagram e point 30) is braked and then with reduced speed of the servo drive a force build-up between the two parts to be welded up to a maximum force. During this last phase, the suspension 18 is finally tensioned (diagram b), the electrode 10a having reached the maximum contact force at point 31 (diagram a). The welding process takes place at time 32, the deformation of the elements to be welded being compensated for by the suspension 18 (diagram b point 33).
Nach Abschluß des Schweißvorganges erfolgt eine Rückführung der Elektrode in die Ausgangsposition mit maximaler Geschwindigkeit (Diagramm e Position 34). After the welding process has been completed, the electrode is returned to the starting position at maximum speed (diagram e position 34).
Claims
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP96921811A EP0837751A1 (en) | 1995-07-11 | 1996-07-11 | System for automated hermetic sealing of casings |
| AU62930/96A AU6293096A (en) | 1995-07-11 | 1996-07-11 | System for automated hermetic sealing of casings |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA1170/95 | 1995-07-11 | ||
| AT0117095A AT402617B (en) | 1995-07-11 | 1995-07-11 | SYSTEM FOR AUTOMATED, HERMETIC SYSTEM FOR AUTOMATED, HERMETIC LOCKING OF HOUSINGS LOCKING OF HOUSINGS |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1997002920A1 true WO1997002920A1 (en) | 1997-01-30 |
Family
ID=3508128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/AT1996/000121 Ceased WO1997002920A1 (en) | 1995-07-11 | 1996-07-11 | System for automated hermetic sealing of casings |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0837751A1 (en) |
| AT (1) | AT402617B (en) |
| AU (1) | AU6293096A (en) |
| WO (1) | WO1997002920A1 (en) |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3190952A (en) * | 1963-02-21 | 1965-06-22 | Bitko Sheldon | Welded hermetic seal |
| JPS59147785A (en) * | 1983-02-09 | 1984-08-24 | Origin Electric Co Ltd | Resistance welding method |
| GB2164794A (en) * | 1984-09-17 | 1986-03-26 | Lohja Ab Oy | Method for encapsulating semiconductor components mounted on a carrier tape |
-
1995
- 1995-07-11 AT AT0117095A patent/AT402617B/en not_active IP Right Cessation
-
1996
- 1996-07-11 WO PCT/AT1996/000121 patent/WO1997002920A1/en not_active Ceased
- 1996-07-11 EP EP96921811A patent/EP0837751A1/en not_active Withdrawn
- 1996-07-11 AU AU62930/96A patent/AU6293096A/en not_active Abandoned
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3190952A (en) * | 1963-02-21 | 1965-06-22 | Bitko Sheldon | Welded hermetic seal |
| JPS59147785A (en) * | 1983-02-09 | 1984-08-24 | Origin Electric Co Ltd | Resistance welding method |
| GB2164794A (en) * | 1984-09-17 | 1986-03-26 | Lohja Ab Oy | Method for encapsulating semiconductor components mounted on a carrier tape |
Non-Patent Citations (1)
| Title |
|---|
| PATENT ABSTRACTS OF JAPAN vol. 8, no. 276 (M - 346)<1713> 18 December 1984 (1984-12-18) * |
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Also Published As
| Publication number | Publication date |
|---|---|
| AT402617B (en) | 1997-07-25 |
| ATA117095A (en) | 1996-11-15 |
| AU6293096A (en) | 1997-02-10 |
| EP0837751A1 (en) | 1998-04-29 |
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