[go: up one dir, main page]

WO1997049998B1 - Accelerometre sans masselottes - Google Patents

Accelerometre sans masselottes

Info

Publication number
WO1997049998B1
WO1997049998B1 PCT/CA1997/000442 CA9700442W WO9749998B1 WO 1997049998 B1 WO1997049998 B1 WO 1997049998B1 CA 9700442 W CA9700442 W CA 9700442W WO 9749998 B1 WO9749998 B1 WO 9749998B1
Authority
WO
WIPO (PCT)
Prior art keywords
primary
wires
heater
auxiliary
electrically conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CA1997/000442
Other languages
English (en)
Other versions
WO1997049998A1 (fr
Filing date
Publication date
Application filed filed Critical
Priority to AU31622/97A priority Critical patent/AU3162297A/en
Publication of WO1997049998A1 publication Critical patent/WO1997049998A1/fr
Publication of WO1997049998B1 publication Critical patent/WO1997049998B1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Abstract

L'invention porte sur un accéléromètre fait d'un substrat comportant une cavité, un fil chauffant s'étendant au dessus de la cavité, une paire de fils détecteurs de température s'étendant au dessus de la cavité et équidistants du fil chauffant un moyen d'alimentation en courant du fil chauffant pour créer dans un fluide un gradient de température symétrique partant du fil chauffant en direction des deux détecteurs de température. Ledit fluide peut être un liquide ou un gaz entourant le fil chauffant et les détecteurs de température. L'application d'une accélération modifie la symétrie et produit entre les deux détecteurs de température un différentiel de température proportionnel à l'accélération.
PCT/CA1997/000442 1996-06-26 1997-06-24 Accelerometre sans masselottes Ceased WO1997049998A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU31622/97A AU3162297A (en) 1996-06-26 1997-06-24 Accelerometer without proof mass

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US67373396A 1996-06-26 1996-06-26
US08/673,733 1996-06-26
US80058897A 1997-02-18 1997-02-18
US08/800,588 1997-02-18

Publications (2)

Publication Number Publication Date
WO1997049998A1 WO1997049998A1 (fr) 1997-12-31
WO1997049998B1 true WO1997049998B1 (fr) 1998-03-12

Family

ID=27100999

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CA1997/000442 Ceased WO1997049998A1 (fr) 1996-06-26 1997-06-24 Accelerometre sans masselottes

Country Status (3)

Country Link
US (1) US6666088B2 (fr)
AU (1) AU3162297A (fr)
WO (1) WO1997049998A1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19810286A1 (de) * 1998-03-10 1999-09-23 Siemens Ag Mikrosensor, Verfahren zu seiner Herstellung und Verfahren zum Betreiben eines Mikrosensors
WO1999046559A1 (fr) * 1998-03-12 1999-09-16 Honeywell Inc. Detecteur d'attitude/orientation
DE19847455A1 (de) 1998-10-15 2000-04-27 Bosch Gmbh Robert Verfahren zur Bearbeitung von Silizium mittels Ätzprozessen
DE59905866D1 (de) * 1999-12-20 2003-07-10 Heinz Ploechinger Sensor zur Erfassung einer Drehbewegung oder einer Drehbeschleunigung
JP2003518259A (ja) * 1999-12-20 2003-06-03 プレヒンガー、ハインツ 回転運動又は角加速度を検知するためのセンサ
DE10111840C2 (de) 2001-03-13 2003-06-05 Bosch Gmbh Robert Verfahren zur Vermeidung von Verschmutzungen auf einem Sensorchip und Verwendung eines Zusatzheizers auf einem Sensorchip
DE10230198A1 (de) * 2002-07-05 2004-01-22 Robert Bosch Gmbh Sensor mit einer Heizeinrichtung und Verfahren
WO2005078458A1 (fr) 2004-02-05 2005-08-25 Analog Devices, Inc. Capteur protege
KR100552480B1 (ko) * 2004-07-08 2006-02-15 삼성전자주식회사 마이크로 가속도계
US20060179940A1 (en) * 2005-02-11 2006-08-17 Finemems Inc. Ultra-small Profile, Low Cost Chip Scale Accelerometers of Two and Three Axes Based on Wafer Level Packaging
US7424826B2 (en) * 2005-11-10 2008-09-16 Memsic, Inc. Single chip tri-axis accelerometer
DE602006019548D1 (de) * 2006-03-31 2011-02-24 Sensirion Holding Ag Durchflusssensor mit Thermoelementen
WO2008052306A1 (fr) * 2006-09-28 2008-05-08 Simon Fraser University Microstructures tridimensionnelles et procédé de fabrication de celles-ci
CN100453972C (zh) * 2007-06-01 2009-01-21 北京沃尔康科技有限责任公司 气体摆式惯性传感器
JP5178598B2 (ja) * 2009-03-24 2013-04-10 日立オートモティブシステムズ株式会社 熱式流量計
EP2435789B1 (fr) * 2009-05-27 2015-04-08 King Abdullah University Of Science And Technology Système masse-ressort-amortisseur de système microélectromécanique (mems) utilisant un schéma de suspension hors-plan
US8517605B2 (en) * 2009-09-18 2013-08-27 Northwestern University Bimetallic integrated on-chip thermocouple array
EP2762864B1 (fr) 2013-01-31 2018-08-08 Sensirion AG Dispositif de capteur à membrane et son procédé de fabrication
EP2930475B1 (fr) 2014-12-22 2017-11-15 Sensirion AG Agencement de capteur de débit
CN110134164B (zh) * 2019-04-29 2020-10-30 淮南万泰电气有限公司 一种用于恒温车间的温度控制系统
CN111060715B (zh) * 2019-12-24 2022-02-08 中国航空工业集团公司北京长城航空测控技术研究所 一种基于热电堆的加速度传感器

Family Cites Families (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2455394A (en) 1943-06-29 1948-12-07 Sperry Corp Accelerometer
US2440189A (en) 1945-04-13 1948-04-20 Rca Corp Convection current responsive instrument
US2650496A (en) 1948-05-17 1953-09-01 Phillips Petroleum Co Fluid flowmeter with heated resistance bridge circuit
US2709365A (en) 1949-07-18 1955-05-31 Phillips Petroleum Co Flowmeter
US2726546A (en) 1952-03-26 1955-12-13 Jr Robert W King Apparatus for measuring fluid flow
US2947938A (en) 1954-04-09 1960-08-02 Victory Engineering Corp Electrothermal measuring apparatus and method for the calibration thereof
US3114261A (en) 1959-09-03 1963-12-17 Richard C Dillon Strain wire flowmeter
US3241374A (en) 1962-07-13 1966-03-22 G V Controls Inc Sensing of acceleration
US3247723A (en) * 1964-07-20 1966-04-26 Raphael O Yavne Accelerometer, gravity meter and gas flow responsive instrument
US3429178A (en) 1965-01-07 1969-02-25 Enoch J Durbin Measuring system
US3677085A (en) 1970-04-08 1972-07-18 Yugen Kaisha Tsukasa Sokken Tandem-type hot-wire velocity meter probe
US3800592A (en) 1972-01-13 1974-04-02 Westerbeke J Corp Flowmeter
US3995481A (en) 1973-02-07 1976-12-07 Environmental Instruments, Inc. Directional fluid flow transducer
US3881181A (en) 1973-02-22 1975-04-29 Rca Corp Semiconductor temperature sensor
US3992940A (en) 1973-11-02 1976-11-23 Chrysler Corporation Solid state fluid flow sensor
ZA75704B (en) 1974-02-16 1976-01-28 Hoechst Ag Process and apparatus for calcining pellet-shaped calcium hydroxide
US3975951A (en) 1974-03-21 1976-08-24 Nippon Soken, Inc. Intake-air amount detecting system for an internal combustion engine
US3996799A (en) 1975-09-29 1976-12-14 Putten Antonius Ferdinandus Pe Device for measuring the flow velocity of a medium
US4232553A (en) * 1979-01-12 1980-11-11 Kbg Corporation Angular acceleration sensing apparatus
US4624137A (en) 1981-10-09 1986-11-25 Honeywell Inc. Semiconductor device
US4472239A (en) 1981-10-09 1984-09-18 Honeywell, Inc. Method of making semiconductor device
DE3142325C2 (de) 1981-10-24 1983-08-25 Hewlett-Packard GmbH, 7030 Böblingen Brückenschaltung für Messzwecke
US4501144A (en) 1982-09-30 1985-02-26 Honeywell Inc. Flow sensor
US4478077A (en) 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4548078A (en) 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
US4651564A (en) 1982-09-30 1987-03-24 Honeywell Inc. Semiconductor device
US4478076A (en) 1982-09-30 1984-10-23 Honeywell Inc. Flow sensor
US4677850A (en) 1983-02-11 1987-07-07 Nippon Soken, Inc. Semiconductor-type flow rate detecting apparatus
US4686856A (en) 1983-02-28 1987-08-18 Vavra Randall J Mass flow meter
US4522058A (en) 1983-06-15 1985-06-11 Mks Instruments, Inc. Laminar-flow channeling in thermal flowmeters and the like
JPS601525A (ja) 1983-06-20 1985-01-07 Nippon Soken Inc 半導体式流量検出装置
JPS6013220A (ja) 1983-07-04 1985-01-23 Esutetsuku:Kk ガス流量センサ−及びその製造方法
US4487063A (en) 1983-07-11 1984-12-11 General Motors Corporation Solid state mass air flow sensor
US4542650A (en) 1983-08-26 1985-09-24 Innovus Thermal mass flow meter
US4502325A (en) 1983-09-08 1985-03-05 General Motors Corporation Measurement of mass airflow into an engine
JPS60151517A (ja) 1984-01-18 1985-08-09 Nippon Soken Inc 半導体式流量検出装置
US4693115A (en) 1984-04-24 1987-09-15 Nippon Soken, Inc. Device for measuring flow rate of air
JPS60236025A (ja) 1984-05-09 1985-11-22 Nippon Soken Inc 空気流量センサ
US4637253A (en) 1984-05-22 1987-01-20 Kabushiki Kaisha Toshiba Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
FR2574538B1 (fr) 1984-12-07 1988-02-26 Air Liquide Montage electronique et methode d'etalonnage pour debitmetre a fil chaud
JPS61170618A (ja) 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc 流速検出用半導体センサ
US4685331A (en) 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
DE3512960C2 (de) 1985-04-11 1987-03-05 Intra-Automation GmbH Meß- und Regelinstrumente, 4053 Jüchen Differenzdruckströmungssonde
DE3539015A1 (de) 1985-11-02 1987-05-07 Vdo Schindling Anordnung mit einem luftmassenmesser fuer eine brennkraftmaschine
DE3539013A1 (de) 1985-11-02 1987-05-07 Vdo Schindling Anordnung mit einem luftmassenmesser fuer eine brennkraftmaschine
US4744246A (en) 1986-05-01 1988-05-17 Busta Heinz H Flow sensor on insulator
US4739651A (en) 1986-07-28 1988-04-26 Air Sensors, Inc. Throttle body with internally mounted anemometer
DE3818385A1 (de) 1987-06-04 1988-12-22 Mazda Motor Hitzdraht-stroemungsmengensensor
US4739657A (en) 1987-06-22 1988-04-26 Honeywell Inc. Resistance with linear temperature coefficient
US4735086A (en) 1987-06-26 1988-04-05 Ford Motor Company Thick film mass airflow meter with minimal thermal radiation loss
JP2992660B2 (ja) 1991-06-19 1999-12-20 本田技研工業株式会社 ガスレートセンサ
DE69510569T2 (de) * 1994-01-20 1999-10-28 Honda Giken Kogyo K.K., Tokio/Tokyo Beschleunigungsmessaufnehmer
JP3244208B2 (ja) 1994-02-07 2002-01-07 本田技研工業株式会社 ガスレート検出器
JP3312227B2 (ja) 1994-02-23 2002-08-05 本田技研工業株式会社 ガス式角速度センサ
US5786744A (en) * 1994-03-24 1998-07-28 Honda Giken Kogyo Kabushiki Kaisha Hybrid sensor
US5808197A (en) * 1995-01-13 1998-09-15 Remec, Inc. Vehicle information and control system
US5581034A (en) * 1995-01-13 1996-12-03 Remec, Inc. Convective accelerometer and inclinometer

Similar Documents

Publication Publication Date Title
WO1997049998B1 (fr) Accelerometre sans masselottes
EP0376721B1 (fr) Feuchtigkeitsdetektor
US5801070A (en) High sensitivity, silicon-based, Microcalorimetric gas sensor and fabrication method
JP3542614B2 (ja) 温度センサおよび該温度センサの製造方法
US4345465A (en) Probe for measuring flow rate and/or temperature of a flowing medium
AU2012200191B2 (en) Sensor with improved thermal stability
US6589433B2 (en) Accelerometer without proof mass
US6666088B2 (en) Accelerometer without proof mass
EP1298420A1 (fr) Détecteur thermique de débit massique
JP3949771B2 (ja) 半導体素子および半導体素子の形成方法
JP2000088671A (ja) 少なくとも一つの凹所を有するサブストレ―ト上に配置された少なくとも二つの接続接触フィ―ルドを具備する電気抵抗体及びその製造方法
JPH04269628A (ja) 流動媒体の速度及び流量を測定するためのセンサー、及びその製造方法
KR101992022B1 (ko) 반도체식 가스센서
US5251481A (en) Direct-intake air measuring apparatus
JP3649412B2 (ja) Ｃｏセンサ
JPH0428023Y2 (fr)
JP3668921B2 (ja) 流量検出素子
KR100362010B1 (ko) 열형 마이크로 유량/유속센서의 제조 방법
JP3345695B2 (ja) 加速度センサ
JP2000146656A (ja) フロ―センサおよびその製造方法
Matsuura et al. Deformation control of microbridges for flow sensors
JP2602117B2 (ja) 流速センサ
JPH08264844A (ja) フローティングメンブレン
JP2001153704A (ja) フローセンサ
JP2518352B2 (ja) 半導体流速センサ