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WO1996034747A1 - Appareil d'exposition a laser - Google Patents

Appareil d'exposition a laser Download PDF

Info

Publication number
WO1996034747A1
WO1996034747A1 PCT/DK1996/000200 DK9600200W WO9634747A1 WO 1996034747 A1 WO1996034747 A1 WO 1996034747A1 DK 9600200 W DK9600200 W DK 9600200W WO 9634747 A1 WO9634747 A1 WO 9634747A1
Authority
WO
WIPO (PCT)
Prior art keywords
bridge
base member
advancing device
counterweight
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DK1996/000200
Other languages
English (en)
Inventor
Flemming Steen Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Krause Danmark AS
Original Assignee
Krause Danmark AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krause Danmark AS filed Critical Krause Danmark AS
Priority to EP96913476A priority Critical patent/EP0824399B1/fr
Priority to AU56444/96A priority patent/AU5644496A/en
Priority to US08/952,317 priority patent/US5909236A/en
Priority to DE69603845T priority patent/DE69603845T2/de
Publication of WO1996034747A1 publication Critical patent/WO1996034747A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • G03F7/24Curved surfaces

Definitions

  • the invention relates to a laser exposure apparatus for exposing exposure material in form of light-sensitive offset printing plates, said apparatus comprising a relatively heavy base member of for instance granite and an optical scanning unit employing a movable mirror deflecting a laser beam, and where the base member comprises a substantially semi-cylindrical exposure surface, on which the exposure material can be placed, and where a bridge is arranged above said base member, said bridge being displaceable along said base member in the longitudinal direction thereof by means of an advancing device, and where the mirror is mounted on said bridge.
  • a laser exposure apparatus which comprises a semi-cylindrical base member, and where a bridge in form of a carriage extends transverse to the base member, said carriage at one side being supported and advanced by an advancing device and at the opposite side resting on a guide.
  • a mounting of the bridge is not quite satisfying due to a lack of accuracy.
  • the object of the invention is to provide a laser exposure apparatus of the above type, which allows an improved accuracy during the exposure of the exposure material, and which furthermore allows an easy access for the mounting of said material on the base member.
  • the laser exposure apparatus is characterised in that the advancing device is placed along one side of the base member, and that the bridge is mounted in a completely or almost completely bal ⁇ anced manner relative to the advancing device by means of a counter ⁇ weight provided on a projecting portion of the bridge, the centre of gravity of said counterweight being placed on the other side of the advancing device, and that the bridge preferably rests on longitudinal supporting surfaces on the base member.
  • the resulting exposure is much more accurate than hitherto known, and as the advancing device is positioned at one side of the base member the access to the semi-cylindrical surface of the base member is easy when the exposure material is to be mounted thereon.
  • the bridge may rest against the longitudinal supporting surfaces of the base member by means of non-contact bearings, such as air-cushion bearings or magnetic bearings, whereby the stability and consequently the position accuracy of the bridge are increased.
  • non-contact bearings such as air-cushion bearings or magnetic bearings
  • At least one of the supporting surfaces may be inclined relative to the longitudinal centre plane of the base member, whereby the stability of the bridge is further increased.
  • the counterweight may be integrally formed with the bridge with the result that a particularly simple manufac- ture of the bridge is obtained.
  • non-contact bearings may be provided between the counterweight and the base member at an inclined supporting surface and/or a substantially vertical supporting surface, respectively, on said base member, while a third non-contact bearing may be provided at the end of the bridge farthest away from the counterweight, said third non-contact bearing co-operating with a substantially horizontal supporting surface on the base member.
  • the advancing device may be a screw drive, a stepping motor advancing device, a brushless DC motor advancing device or an accurate cable or chain drive with a speed control.
  • a particularly reliable advancing is obtained of the bridge along the base member.
  • Fig. 1 is an end view of an embodiment of the laser exposure apparatus according to the invention, whereby, however, a portion of the bridge has been cut,
  • Fig. 2 is a top view of the bridge
  • Fig. 3 illustrates on a rather small scale the laser exposure apparatus, where the exposure area of the base member is indicated in a hatched manner.
  • the laser exposure apparatus of Fig. 1 comprises a relatively heavy base member 1 of for instance granite or metal, and an optical scanning unit 2 employing a movable, preferably rotating mirror for deflecting a laser beam directed towards a substantially semi-cylindrical exposure surface 5 on the base member. Exposure material, such as a light-sensitive offset printing plate, can be placed on the above exposure surface 5.
  • a bridge 7 is arranged above the base member 1 , said bridge carrying the scanning unit and the mirror. The bridge is displaceable along the base member 1 in the longitudinal direction thereof, cf. the double arrow A in Fig. 3, by means of an advancing device 8. The advancing device is arranged along one side 1 a of the base member 1 in the entire length thereof.
  • the bridge is mounted in a completely or almost completely balanced manner relative to the advancing device 8, whereby a projecting counterweight 9 is provided on the portion 7' of the bridge 7 projecting beyond the advancing device 8.
  • the counterweight has a centre of gravity G, cf. Fig. 1 , placed on the other side of the advancing device 8.
  • the bridge 7 can optionally rest on the base member at some longitudinal supporting sur- faces 1 0', 10", 10'" on the latter.
  • the support of the bridge at the supporting surfaces 10', 1 0", 1 0'" can be provided by means of non-contact bearings 1 1 ', 1 1 ", 1 1 '" .
  • These bearings can for instance be air-cushion bearings or magnetic bearings.
  • One or more of the above supporting surfaces can be inclined relative to the longitudinal centre plane L of the base member 1 , only one inclined supporting surface being shown in the embodiment shown in the Figures, viz. the supporting surface 1 0". None prevents the counterweight 9 from being integrally formed with the bridge 7.
  • two non-contact bearings 1 1 “a and 1 1 “b can be provided between the counterweight 9 and the base member 1 at the inclined supporting surface 10"
  • two non-contact bearings 1 1 'a and 1 1 'b can be provided at the substantially vertical supporting surface 10'.
  • the supporting surface 1 0'" is substantially horizontal at the end 7" of the bridge 7 being farthest away from the counterweight.
  • the advancing device 8 can be a screw drive, a stepping motor device, a DC motor without brushes or an accurate cable or chain drive with a speed control.
  • the advance device is a screw drive.
  • the bridge 7 is placed at one end of the base member.
  • the bridge can be moved to the opposite end of the base member as illustrated.
  • the bridge can also be made of steel or granite, and the counterweight can be made of steel.
  • the device of the scanning unit 2 can be built of a rotatable polygonal mirror deflecting a laser beam from a laser fixed on the bridge.
  • the laser beam is turned on and off in a conventional manner.
  • the common centre of gravity of the bridge 7, the exposure equipment and of the counterweight 9 mounted thereon is placed substantially verti ⁇ cally above or below or within the advancing device 8.
  • the invention can be modified in many ways without thereby deviating from the scope thereof.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Semiconductor Lasers (AREA)
  • Laser Surgery Devices (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

Appareil d'exposition à laser servant à exposer un matériau photosensible (6) tel que des plaques offset photosensibles. L'appareil comprend une base relativement lourde et une unité (2) de balayage optique dotée d'un miroir pour défléchir un faisceau laser. La base (1) comporte une surface (5) d'exposition sensiblement semi-cylindrique, sur laquelle on peut placer le matériau photosensible (6). Un pont (7) est agencé au-dessus de la base (1), ce pont pouvant être déplacé le long de la base dans le sens de sa longueur au moyen d'un dispositif (8) de déplacement, le miroir étant placé sur ledit pont. Le dispositif (8) de déplacement est prévu sur un côté de la base et le pont est monté d'une manière entièrement ou partiellement équilibrée par rapport au dispositif (8) de déplacement au moyen d'un contrepoids (9) placé sur une partie saillante (7') du pont (7), le centre de gravité (6) du contrepoids étant situé de l'autre côté du dispositif (8) de déplacement. Le pont (7) peut, facultativement, reposer sur des surfaces porteuses longitudinales (10', 10'', 10''') de la base (1). On atteint ainsi une meilleure précision de l'exposition du matériau photosensible.
PCT/DK1996/000200 1995-05-02 1996-05-01 Appareil d'exposition a laser Ceased WO1996034747A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP96913476A EP0824399B1 (fr) 1995-05-02 1996-05-01 Appareil d'exposition a laser
AU56444/96A AU5644496A (en) 1995-05-02 1996-05-01 Laser exposure apparatus
US08/952,317 US5909236A (en) 1995-05-02 1996-05-01 Laser exposure apparatus
DE69603845T DE69603845T2 (de) 1995-05-02 1996-05-01 Laserbelichtungsgerät

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK9500172U DK9500172U3 (da) 1995-05-02 1995-05-02 Lasereksponeringsapparat
DK9500172 1995-05-02

Publications (1)

Publication Number Publication Date
WO1996034747A1 true WO1996034747A1 (fr) 1996-11-07

Family

ID=8155172

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DK1996/000200 Ceased WO1996034747A1 (fr) 1995-05-02 1996-05-01 Appareil d'exposition a laser

Country Status (7)

Country Link
US (1) US5909236A (fr)
EP (1) EP0824399B1 (fr)
AT (1) ATE183440T1 (fr)
AU (1) AU5644496A (fr)
DE (1) DE69603845T2 (fr)
DK (1) DK9500172U3 (fr)
WO (1) WO1996034747A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7363856B1 (en) * 1999-02-17 2008-04-29 Kodak Polychrome Graphics Gmbh Flat bed platesetter system
EP1231518B1 (fr) * 2001-02-07 2010-08-11 Dainippon Screen Mfg. Co., Ltd. Appareil pour l'enregistrement d'images

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3632207A (en) * 1968-03-16 1972-01-04 Bio Bielefelder Offsetdruckpla Apparatus for image transfer
WO1992004661A1 (fr) * 1990-08-29 1992-03-19 Andersen Allan V Procede de reglage d'unites d'analyse graphique et unite d'analyse munie d'un dispositif de reglage

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099800A (en) * 1977-05-26 1978-07-11 The Bendix Corporation Coordinate measuring machine having auxiliary air bearing
US4455641A (en) * 1978-09-12 1984-06-19 Dennesen Electrostatics, Inc. Linear tracking system
JP2742006B2 (ja) * 1993-09-22 1998-04-22 大日本スクリーン製造株式会社 円筒内面走査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3632207A (en) * 1968-03-16 1972-01-04 Bio Bielefelder Offsetdruckpla Apparatus for image transfer
WO1992004661A1 (fr) * 1990-08-29 1992-03-19 Andersen Allan V Procede de reglage d'unites d'analyse graphique et unite d'analyse munie d'un dispositif de reglage

Also Published As

Publication number Publication date
DE69603845D1 (de) 1999-09-23
AU5644496A (en) 1996-11-21
EP0824399B1 (fr) 1999-08-18
EP0824399A1 (fr) 1998-02-25
DK9500172U3 (da) 1996-08-02
US5909236A (en) 1999-06-01
DE69603845T2 (de) 2000-01-20
ATE183440T1 (de) 1999-09-15

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