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WO1994005032A1 - Systeme d'optique ionique pour une source d'ions a decharge dans un gaz - Google Patents

Systeme d'optique ionique pour une source d'ions a decharge dans un gaz Download PDF

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Publication number
WO1994005032A1
WO1994005032A1 PCT/RU1992/000163 RU9200163W WO9405032A1 WO 1994005032 A1 WO1994005032 A1 WO 1994005032A1 RU 9200163 W RU9200163 W RU 9200163W WO 9405032 A1 WO9405032 A1 WO 9405032A1
Authority
WO
WIPO (PCT)
Prior art keywords
rollers
elements
optical system
sτρun
eleκτροda
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/RU1992/000163
Other languages
English (en)
Russian (ru)
Inventor
Valery Ivanovich Minakov
Vladimir Grantovich Grigoryan
Vladimir Alexeevich Obukhov
Petr Petrovich Ogadzhanov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Societe Europeenne de Propulsion SEP SA
Original Assignee
Societe Europeenne de Propulsion SEP SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Societe Europeenne de Propulsion SEP SA filed Critical Societe Europeenne de Propulsion SEP SA
Priority to PCT/RU1992/000163 priority Critical patent/WO1994005032A1/fr
Priority to KR1019940701354A priority patent/KR940703073A/ko
Priority to PCT/FR1993/000823 priority patent/WO1994005033A1/fr
Priority to DE69310132T priority patent/DE69310132T2/de
Priority to JP50596894A priority patent/JP3524093B2/ja
Priority to EP93919396A priority patent/EP0611482B1/fr
Publication of WO1994005032A1 publication Critical patent/WO1994005032A1/fr
Priority to US08/211,676 priority patent/US5444258A/en
Priority claimed from US08/211,676 external-priority patent/US5444258A/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H01J27/024—Extraction optics, e.g. grids

Definitions

  • the area of technology The existing invention is not available in the gas sector.
  • 35 is ⁇ lz ⁇ va ⁇ ⁇ l ⁇ schad with ⁇ izvle ⁇ ayu ⁇ sya i ⁇ ny, ⁇ dna ⁇ , ⁇ l ⁇ n ⁇ s ⁇ ⁇ a ⁇ us ⁇ aem ⁇ g ⁇ i ⁇ nn ⁇ - ⁇ iches ⁇ y sis ⁇ em ⁇ y PE- dae ⁇ with increasing diame ⁇ a ( ⁇ ) ⁇ ve ⁇ s ⁇ y, ⁇ e ⁇ mu zhela ⁇ el- n ⁇ ⁇ mi ⁇ a ⁇ ele ⁇ dy dis ⁇ ami low ⁇ ve ⁇ s ⁇ iyami and HUMAN RESPONSE.
  • the thickness (PH between the holes would be less than 0.5 mm, which is difficult and economically unprofitable.
  • n ⁇ g ⁇ is ⁇ chni ⁇ a i ⁇ n ⁇ v
  • s ⁇ de ⁇ z haschaya us ⁇ yayuschy and emissi ⁇ nny ele ⁇ dy, ⁇ b ⁇ az ⁇ vannye ⁇ am ⁇ ami and sis ⁇ em ⁇ y ⁇ a ⁇ allelny ⁇ s ⁇ un, za ⁇ e ⁇ lenny ⁇ on ⁇ am ⁇ a ⁇ with ⁇ m ⁇ schyu ⁇ uzhinny ⁇ elements ⁇ and ⁇ b ⁇ azuyuschi ⁇ vy ⁇ dnye slit and ⁇ a ⁇ zhe iz ⁇ lya ⁇ nye narrow well, on ⁇ y ⁇ us ⁇ an ⁇ vleny ⁇ azhi (z ⁇ , ⁇ , 472396) .
  • the posed problem is solved by the fact that the foreign-system of a gaseous-discharged source of ions, which contains emissive and accelerating electrons, is disintegrated
  • rollers of the facilities for the regulation of the movement of the strings in connection with the variant of the invention, is the result of the failure to accept this.
  • the system for regulating the transmissions to the electrical equipment is removed from the roller by its own eccentricity.
  • rollers make it possible to get the use of the drive for each electric device, as well as for the occasional use - 4 -
  • the electric power section can be made from two bypassed parts, from outside it is out of operation
  • the width of the unit corresponds to the step of the unit. This simplifies the storage of the strings with the removal of their separate installation, and also makes it possible to run all the electrical strings
  • the electronic elements are located on each electric element, and there are several electric elements in the adjacent
  • the 25th system ensures reliable operation of the gas source and is stable at the same time as well as increasing the energy supply of the whole system.
  • ⁇ directional elements 12 are located at the strings of 5 (6) electrics I (2), but directional elements 12 are made either in the form of ring rings 13 (Fig. 30) or in the form of an outdoor unit (step 30, 4) whether the step is a step (not shown) or less than a step is a whole number, which means that it is a safe choice
  • Kalik II (FIG. 2).
  • Unit 9 in each of the elec- for this, in accordance with one of the variants of the penance from the - 7 - li ⁇ v II ⁇ dnim sv ⁇ im ⁇ nts ⁇ m za ⁇ e ⁇ len on ⁇ azhe s ⁇ ve ⁇ s ⁇ - vuyuscheg ⁇ ele ⁇ da I and 2 ⁇ s ⁇ eds ⁇ v ⁇ m izves ⁇ n ⁇ g ⁇ sha ⁇ ni ⁇ a 15 ( ⁇ ig.5) and d ⁇ ugim ⁇ nts ⁇ m us ⁇ an ⁇ vlen in e ⁇ stsen ⁇ i ⁇ v ⁇ G ⁇ ⁇ ul- ⁇ e 16 ( ⁇ ig.6) za ⁇ e ⁇ lenn ⁇ y in ⁇ azhe 3 (4 ) optionally
  • each of its rollers II (Fig. 7) is installed
  • step 5 step 6 accelerating power 2 ? ⁇ a ⁇ , ch ⁇ ⁇ as- s ⁇ yanie: 5 n s ⁇ un emissi ⁇ nn ⁇ g ⁇ ele ⁇ da I d ⁇ ⁇ l ⁇ s- ⁇ s ⁇ i SH- ⁇ ⁇ azmescheniya s ⁇ un 6 us ⁇ yayuscheg ⁇ ele ⁇ da 2 ⁇ ⁇ azhd ⁇ m of uchas ⁇ v v ⁇ z ⁇ as ⁇ ae ⁇ d ⁇ ⁇ ⁇ ⁇ i ⁇ e ⁇ de ⁇ eg ⁇ ⁇ e ⁇ i ⁇ e ⁇ ii ⁇ s ⁇ edine uchas ⁇ a.
  • the spring elements in adjacent rows are shifted to a different friend at a position of £, a quick step b to the directional elements of 12 rollers II.
  • Each of the 21 genuine elements is made in the form of a flat 24 element, secured by one final end for
  • the width of the flat arm 24 is a step of 12 - 9 - the strings with the given step, for example, less than I ml, and also take the strings into the electric elements I and 2 from the continuous output.
  • each electric device is achieved by rotating the excenter of sleeve 16 (Fig. 2). At this point, the traffic is directed in the direction of
  • the 10th ELIA section in the new application is operated by the wedge element 20.
  • the installation of the mutual use of the control unit is controlled by the optical system.
  • the use of a cat- egmeter of 6 mm ensures the accuracy of the parameters of the ICS at a level of +0.01 mm.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)

Abstract

Un système optique ionique pour source d'ions à décharge dans les gaz comprend une électrode d'émission (1) ainsi qu'une électrode d'accélération (2) constituées par des cadres (3, 4) et un système de fils parallèles (5, 6) fixés sur les cadres au moyen de ressorts (21), ainsi qu'un dispositif (19) destiné à régler le mouvement des fils dans chacune des électrodes. Un dispositif (9) comprend des rouleaux (11) perpendiculaires aux fils et dotés d'éléments de guidage (12) où sont placés les fils. Les rouleaux (11) se trouvant dans chacune des électrodes (1 et 2) sont montés sur les cadres (3, 4) avec la possibilité de tourner autour de leur axe et de changer de position dans l'espace conjointement avec les fils. Cet agencement permet de fixer lesdits fils dans chacune des électrodes, avec l'espacement voulu dans une position axialement parallèle permettant d'augmenter la stabilité de fonctionnement de la source d'ions.
PCT/RU1992/000163 1992-08-24 1992-08-24 Systeme d'optique ionique pour une source d'ions a decharge dans un gaz Ceased WO1994005032A1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
PCT/RU1992/000163 WO1994005032A1 (fr) 1992-08-24 1992-08-24 Systeme d'optique ionique pour une source d'ions a decharge dans un gaz
KR1019940701354A KR940703073A (ko) 1992-08-24 1993-08-24 개스속으로 디스차아지되는 이온의 소오스를 위한 이온광학 시스템
PCT/FR1993/000823 WO1994005033A1 (fr) 1992-08-24 1993-08-24 Systeme d'optique ionique pour source d'ions a decharge dans un gaz
DE69310132T DE69310132T2 (de) 1992-08-24 1993-08-24 Ionenoptiksystem für eine gasentladungsionenquelle
JP50596894A JP3524093B2 (ja) 1992-08-24 1993-08-24 ガス放電により形成されるイオンの源のためのイオン光学装置
EP93919396A EP0611482B1 (fr) 1992-08-24 1993-08-24 Systeme d'optique ionique pour source d'ions a decharge dans un gaz
US08/211,676 US5444258A (en) 1992-08-24 1994-04-12 Ion-optics system for a source of ions to be discharged into a gas

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/RU1992/000163 WO1994005032A1 (fr) 1992-08-24 1992-08-24 Systeme d'optique ionique pour une source d'ions a decharge dans un gaz
US08/211,676 US5444258A (en) 1992-08-24 1994-04-12 Ion-optics system for a source of ions to be discharged into a gas

Publications (1)

Publication Number Publication Date
WO1994005032A1 true WO1994005032A1 (fr) 1994-03-03

Family

ID=26653614

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/RU1992/000163 Ceased WO1994005032A1 (fr) 1992-08-24 1992-08-24 Systeme d'optique ionique pour une source d'ions a decharge dans un gaz
PCT/FR1993/000823 Ceased WO1994005033A1 (fr) 1992-08-24 1993-08-24 Systeme d'optique ionique pour source d'ions a decharge dans un gaz

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/FR1993/000823 Ceased WO1994005033A1 (fr) 1992-08-24 1993-08-24 Systeme d'optique ionique pour source d'ions a decharge dans un gaz

Country Status (2)

Country Link
JP (1) JP3524093B2 (fr)
WO (2) WO1994005032A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2118868C1 (ru) * 1997-12-09 1998-09-10 Федеральное государственное унитарное предприятие "Исследовательский центр им.М.В.Келдыша" Рамочный электрод

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3457405A (en) * 1966-10-11 1969-07-22 Xerox Corp Corona wire mounting means which compensates for wire expansion due to heat
US4080546A (en) * 1974-10-16 1978-03-21 Steigerwald Strahltechnik Gmbh Beam splitter for electron beam machines
FR2482777A1 (fr) * 1980-05-16 1981-11-20 Kernforschungsanlage Juelich Grille acceleratrice, notamment de faisceaux ioniques
US4437034A (en) * 1981-10-26 1984-03-13 The United States Of America As Represented By The United States Department Of Energy Parallel-wire grid assembly with method and apparatus for construction thereof
EP0247316A2 (fr) * 1986-05-01 1987-12-02 International Business Machines Corporation Analyseur sphérique avec grille de décélération

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3922578A (en) * 1974-05-01 1975-11-25 Gte Sylvania Inc Large area cathode
JPS62113345A (ja) * 1985-11-09 1987-05-25 Nippon Telegr & Teleph Corp <Ntt> イオンガン用１枚グリツド装置
EP0406441B1 (fr) * 1989-01-06 1995-11-08 Matsushita Electric Industrial Co., Ltd. Dispositif d'affichage d'images

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3457405A (en) * 1966-10-11 1969-07-22 Xerox Corp Corona wire mounting means which compensates for wire expansion due to heat
US4080546A (en) * 1974-10-16 1978-03-21 Steigerwald Strahltechnik Gmbh Beam splitter for electron beam machines
FR2482777A1 (fr) * 1980-05-16 1981-11-20 Kernforschungsanlage Juelich Grille acceleratrice, notamment de faisceaux ioniques
US4437034A (en) * 1981-10-26 1984-03-13 The United States Of America As Represented By The United States Department Of Energy Parallel-wire grid assembly with method and apparatus for construction thereof
EP0247316A2 (fr) * 1986-05-01 1987-12-02 International Business Machines Corporation Analyseur sphérique avec grille de décélération

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2118868C1 (ru) * 1997-12-09 1998-09-10 Федеральное государственное унитарное предприятие "Исследовательский центр им.М.В.Келдыша" Рамочный электрод

Also Published As

Publication number Publication date
WO1994005033A1 (fr) 1994-03-03
JP3524093B2 (ja) 2004-04-26
JPH07500697A (ja) 1995-01-19

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