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WO1993017453A3 - Ammonia plasma treatment of silicide contact surfaces in semiconductor devices - Google Patents

Ammonia plasma treatment of silicide contact surfaces in semiconductor devices Download PDF

Info

Publication number
WO1993017453A3
WO1993017453A3 PCT/US1993/001507 US9301507W WO9317453A3 WO 1993017453 A3 WO1993017453 A3 WO 1993017453A3 US 9301507 W US9301507 W US 9301507W WO 9317453 A3 WO9317453 A3 WO 9317453A3
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor devices
contact surfaces
plasma treatment
ammonia plasma
silicide contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1993/001507
Other languages
French (fr)
Other versions
WO1993017453A2 (en
Inventor
Bruce A Sommer
Eric C Eichman
Michael J Churley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Materials Research Corp
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Publication of WO1993017453A2 publication Critical patent/WO1993017453A2/en
Publication of WO1993017453A3 publication Critical patent/WO1993017453A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02041—Cleaning
    • H01L21/02057—Cleaning during device manufacture
    • H01L21/0206—Cleaning during device manufacture during, before or after processing of insulating layers
    • H01L21/02063—Cleaning during device manufacture during, before or after processing of insulating layers the processing being the formation of vias or contact holes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31105—Etching inorganic layers
    • H01L21/31111—Etching inorganic layers by chemical means
    • H01L21/31116—Etching inorganic layers by chemical means by dry-etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31127—Etching organic layers
    • H01L21/31133—Etching organic layers by chemical means
    • H01L21/31138—Etching organic layers by chemical means by dry-etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

Methods are disclosed for treating semiconductor devices with an ammonia (NH3) plasma subsequent to freon/O2 etching to remove native oxide layers. Freon/O2 etching leaves a fluoridated polymer residue which is removed by the ammonia plasma, thereby resulting in improved contact resistanc of the final semiconductor device product.
PCT/US1993/001507 1992-02-26 1993-02-22 Ammonia plasma treatment of silicide contact surfaces in semiconductor devices Ceased WO1993017453A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US84208892A 1992-02-26 1992-02-26
US07/842,088 1992-02-26

Publications (2)

Publication Number Publication Date
WO1993017453A2 WO1993017453A2 (en) 1993-09-02
WO1993017453A3 true WO1993017453A3 (en) 1993-10-28

Family

ID=25286498

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1993/001507 Ceased WO1993017453A2 (en) 1992-02-26 1993-02-22 Ammonia plasma treatment of silicide contact surfaces in semiconductor devices

Country Status (2)

Country Link
AU (1) AU3726593A (en)
WO (1) WO1993017453A2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7144606B2 (en) 1999-06-18 2006-12-05 Applied Materials, Inc. Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
US7229911B2 (en) 2004-04-19 2007-06-12 Applied Materials, Inc. Adhesion improvement for low k dielectrics to conductive materials

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100218728B1 (en) * 1995-11-01 1999-09-01 김영환 Metal wire manufacturing method of semiconductor device
US5852915A (en) * 1996-09-26 1998-12-29 R. R. Donnelley & Sons Company Method of making compact disc product
US6140243A (en) * 1996-12-12 2000-10-31 Texas Instruments Incorporated Low temperature process for post-etch defluoridation of metals
US6492266B1 (en) * 1998-07-09 2002-12-10 Advanced Micro Devices, Inc. Method of forming reliable capped copper interconnects
US6613681B1 (en) 1998-08-28 2003-09-02 Micron Technology, Inc. Method of removing etch residues
US20010049181A1 (en) * 1998-11-17 2001-12-06 Sudha Rathi Plasma treatment for cooper oxide reduction
US6355571B1 (en) 1998-11-17 2002-03-12 Applied Materials, Inc. Method and apparatus for reducing copper oxidation and contamination in a semiconductor device
GB9904427D0 (en) 1999-02-26 1999-04-21 Trikon Holdings Ltd Method treating an insulating layer
US6313042B1 (en) * 1999-09-03 2001-11-06 Applied Materials, Inc. Cleaning contact with successive fluorine and hydrogen plasmas
US20080045030A1 (en) 2006-08-15 2008-02-21 Shigeru Tahara Substrate processing method, substrate processing system and storage medium
US9614045B2 (en) 2014-09-17 2017-04-04 Infineon Technologies Ag Method of processing a semiconductor device and chip package

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4357203A (en) * 1981-12-30 1982-11-02 Rca Corporation Plasma etching of polyimide
US4731156A (en) * 1987-02-25 1988-03-15 Itt Avionics, A Division Of Itt Corporation Plasma processes for surface modification of fluoropolymers using ammonia
EP0376252A2 (en) * 1988-12-27 1990-07-04 Kabushiki Kaisha Toshiba Method of removing an oxide film on a substrate
EP0485802A1 (en) * 1990-10-30 1992-05-20 Nec Corporation Method of preventing corrosion of aluminium alloys
US5174856A (en) * 1991-08-26 1992-12-29 Applied Materials, Inc. Method for removal of photoresist over metal which also removes or inactivates corrosion-forming materials remaining from previous metal etch

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4357203A (en) * 1981-12-30 1982-11-02 Rca Corporation Plasma etching of polyimide
US4731156A (en) * 1987-02-25 1988-03-15 Itt Avionics, A Division Of Itt Corporation Plasma processes for surface modification of fluoropolymers using ammonia
EP0376252A2 (en) * 1988-12-27 1990-07-04 Kabushiki Kaisha Toshiba Method of removing an oxide film on a substrate
EP0485802A1 (en) * 1990-10-30 1992-05-20 Nec Corporation Method of preventing corrosion of aluminium alloys
US5174856A (en) * 1991-08-26 1992-12-29 Applied Materials, Inc. Method for removal of photoresist over metal which also removes or inactivates corrosion-forming materials remaining from previous metal etch

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7144606B2 (en) 1999-06-18 2006-12-05 Applied Materials, Inc. Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers
US7229911B2 (en) 2004-04-19 2007-06-12 Applied Materials, Inc. Adhesion improvement for low k dielectrics to conductive materials

Also Published As

Publication number Publication date
AU3726593A (en) 1993-09-13
WO1993017453A2 (en) 1993-09-02

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