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WO1986001626A1 - Dispositifs binaires a volets, disposes en panneaux et actionnes electrostatiquement - Google Patents

Dispositifs binaires a volets, disposes en panneaux et actionnes electrostatiquement Download PDF

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Publication number
WO1986001626A1
WO1986001626A1 PCT/US1985/001585 US8501585W WO8601626A1 WO 1986001626 A1 WO1986001626 A1 WO 1986001626A1 US 8501585 W US8501585 W US 8501585W WO 8601626 A1 WO8601626 A1 WO 8601626A1
Authority
WO
WIPO (PCT)
Prior art keywords
shutter
stator
electrode regions
binary element
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1985/001585
Other languages
English (en)
Inventor
George R. Simpson
Herbert W. Sullivan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of WO1986001626A1 publication Critical patent/WO1986001626A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F05C2225/08—Thermoplastics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H2059/009—Electrostatic relays; Electro-adhesion relays using permanently polarised dielectric layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Definitions

  • This invention relates to electrostatically controllable electromechanical binary devices for use as an array in visual displays, switching matrices, memories and the like.
  • U.S. 1,984,683 and 3,553,364 includes light valves having flaps extending parallel with the approaching light, with each flap electrostatically divertable to an oblique angle across the light path for either a transmissive or reflective display.
  • U.S. 3,897,997 discloses an electrode which is electrostatically wrapped about a curved fixed electrode to affect the light reflective character of the fixed electrode. Further prior art such as is described in ELECTRONICS, 7 December 1970, pp. 78-83 "and I.B.M. Technical Disclosure Bulletin, Vol. 13, No.
  • the present invention provides an electrostatically controllable electromechanical binary device for use in display arrays, switching arrays, memories, and the like. The invention will be' described in the context of a visual display wherein each element in the array can be controlled individually to enable the production of a variety of visual displays, including black and white and multi-color alpha-numeric and pictorial displays.
  • a display element (pixel) of the invention has upper and lower parallel, spaced stators each including stationary electrodes and an interposed hinged moveable flap or shutter electrostatically controllable between a first position generally parallel with the stators and a second position generally perpendicular to the stators.
  • the stators have flat surfaces normal to the light path, with a hinged flap or shutter, controllable electrostatically between positions normal to and parallel to the light path.
  • the display element can control light transmission or can affect light reflection qualities for a light reflective device. It is useable as an alpha-numeric display for such applications as watches and calculators. It is two-state or binary. It can be latched in either state.
  • the display elements or pixels of the present invention are provided with conductive electrode regions for purposes of individual pixel addressing and latching.
  • one of the regions is designated as an X electrode, and another is designated as a Y electrode.
  • All X electrodes in a row are connected together as are Y electrodes in a column. That pixel at the intersection of the column and the row is actuated to change status.
  • Further electrode regions, designated hold-down serve to latch the actuated pixel in the actuated status after the X and Y electrodes are de-energized.
  • Arrays of a myriad of small pixels or binary elements, each independently addressable, are producible with a variety of known techniques such as selective deposition, photo-etching, direct printing with conductive inks, etc. A method of manufacture is disclosed in our copending application SN 642,997.
  • Figure 1 is a cross-sectional, elevational view taken along line I-I of Figure 2 showing a portion of an array of display elements according to the present invention.
  • Figure 2 is a plan view of a portion of an array of display elements according to Figure 1.
  • Figure 3 is a perspective view of a further embodiment of a display element of the present invention.
  • Figure 4 is a perspective view of a portion of an array of display elements showing a further embodiment of the present invention.
  • Figure 5 is a plan view of a portion of an array of display elements showing a further embodiment of the present invention.
  • Figure 6 is a cross-sectional, elevational view of a display element according to a further embodiment of the present invention.
  • Figure 7 is a cross-sectional, elevational view of a display element according to a further embodiment of the present invention.
  • Figures 1 and 2 illustrate a portion of an array which is a basic execution of the present invention.
  • a first insulative substrate 10 of glass or plastic has formed thereon a plurality of parallel conductive stripes YlO, Yll, Y12, etc.
  • a second insulative substrate 12 has formed thereon a similar plurality of parallel conductive stripes X20, X21, X22, etc.
  • the two sets of stripes are orthogonal to each other.
  • a thin membrane 14 extends between and parallel to the substrates.
  • the membrane 14 contains a plurality of flaps or shutters 31-39 freed on three sides by a slot 16.
  • the fourth side provides a torsional hinge for the shutter.
  • the flaps or shutters are located at the crossings-
  • membrane 14 is opaque and if one or both of the substrates 10, 12, and one or both of the sets of conductive X, Y stripes are transparent, the open shutter 32 will allow the passage of light or will alter the reflection of impinged light to change the appearance of the pixel area occupied by shutter 32.
  • X and Y conductive stripes particular shutters will be opened to create a pattern of pixels for a character or other graphic.
  • Figure 3 illustrates a pixel 340 of an embodiment in which the large, single shutters of
  • Figures 1 and 2 are replaced by a plurality of narrow shutters 341-345 which hinge on the small torsional straps or webs 347 which remain after cutting slots in the membrane 314 to define the shutters. Because each shutter 341-345 is narrow, the electrical force required to open the shutters is less than in the embodiment of Figures 1 and 2.
  • Figure 3 shows a portion of an X stripe, X 320.
  • the shutters can be cut from a membrane of a polymer such as polyethylene terephthalate (PET) sold as MYLAR.
  • PET film has a dielectric constant on the order of 6 to 9 which differs significantly from that of air.
  • the shutters can be conductive or have a conductive surface layer, as for example, aluminum vapor deposited onto a PET film. Either high dielectric or conductive shutters will swing toward alignment with the electrical field.
  • Figure 4 illustrates in perspective a portion of a pixel array which is a variation of that of Figures 1 and 2 wherein the X conductive stripes are eliminated and their function taken by a conductive surface coating on the membrane 414 in which the shutters are formed.
  • the membrane 414 is PET film upon which aluminum is vapor deposited. Gaps 452 are etched to divide the membrane into parallel stripes, X21, X22, etc. of the remaining aluminum. The shutters 432-436 are cut along these stripes such that all shutters in each X column of the array are electrically connected through the aluminum coating.
  • the Y stripes YlO, Yll, etc. are formed as before on a substrate 10 spaced away from the shutters to accomodate the swing.
  • Figure 4 shows shutter 432 opened as a result of application of an electrical potential between the conductive stripe for row X21, which includes shutter 432, and the conductive stripe for column YlO.
  • the shutters tend to align with the electrical field when addressed. Closure is effected by a restorative mechanical bias or spring effect of the hinge or strap. This mechanical bias opposes the effect of the electrical field. The opened shutter will assume an open angle which is the resultant of the opposing strengths of the electrical field and the restorative mechanical bias.
  • Figure 5 shows a portion of a pattern of the conductive stripes. This kind of pattern can be used for both the X and the Y conductors for the previously described embodiments.
  • the Y conductor pattern is shown in figure 5. Electrodes 531, 532, 533, etc. are ' each connected to a lead YlO and are each energized when lead YlO is connected to a source of electrical potential. Similarly, electrodes 534-536 are connected to Yll and 537-539 to Y12. Separated from each of the electrodes 531-539 by a chevron shaped gap are electrodes 550, each of which is connected to a lead HD and the leads HD are connected in common. The electrodes 550 serve as latches.
  • Figure 6 is a sectional schematic view showing the hold-down or latch electrodes and the X and Y electrodes for a pixel having a shutter 632 cut from a membrane 614.
  • the upper substrate 610 carries the X electrode and two latch electrode areas, LD and LU.
  • the lower substrate 612 carries the Y electrode and two latch electrode areas, LD and LU.
  • the lower latch electrodes are connected to one side of a voltage source (arbitrarily designated (-) negative) and the upper latch electrodes are connected to the opposite side • of the voltage source (designated (+) positive).
  • the shutter 632 remains essentially closed.
  • Figure 7 shows an embodiment in which the X, Y, and latch up (LU) electrodes are located on upper stator 710.
  • the membrane 714 including the shutters, is provided with a conductive surface such as vapor deposited aluminum.
  • a latch-down electrode LD may be provided on lower stator 712 or may be located on membrane 714 adjacent the edge of the shutter aperture. The latch-down electrode is desired if the array is also to be addressed in reverse, that is, selective closing of open shutters.
  • all latch-down electrodes LD in the array are turned off, that is, switched to the potential of the shutters.
  • All latch-up electrodes LU in the array are energized. Energization of the particular X row and Y column will cause the selected shutter (732 in Figure 7) to swing open and to latch open as it reaches proximity to latch-up electrode LU, allowing extinction of the X and Y drive. Reverse addressing can be accomplished to swing closed shutters that are open. Energization of latch-down electrodes LD latches closed all shutters that were closed or are closed by reverse addressing.
  • Latch elect ⁇ rodes which make use of permanently charged electrets function in the absence of power thereby sustaining the status of the array.
  • Electrode patterns of the types described in connection with Figures 5-7 also may be formed on the shutters and their membrane.
  • the electrodes can be on one or both stators, on one stator and the shutters, or on all three.
  • the elements illustrated in Figures 6 and 7 have two independently controllable stationary electrode regions (X, Y) in addition to the hold-down regions.
  • Increasing the number of independently controllable conductive regions in each display element permits a significant increase in the number of elements in an array without a concomitant increase in the number of switch devices required.
  • the number of switch elements S required is d
  • S d ⁇
  • N 390,625 individually controlled picture elements
  • a single conductive region per element would require 390,625 switches, or one switch per element. If each element has two conductive regions, 1250 switches are needed to control and address each element individually. If the elements have four regions, only 100 switches are required.
  • the switch devices and all other switch devices referred to in this specification can be mechanical or electronic switches such as se iconduct- or elements. Their function is to apply potential between a common electrode and the control electrode of the element to be controlled.
  • the array is a field of binary gating elements, either open or closed, either reflective of light or not, either a hole or not. Consequently, the array can be used as a memory for computer purposes. Once programmed with selected pixels open or closed, the status will. remain unchanged until a change is desired. In that form it is a read-write memory capable of editing or erasure.
  • the invention has been described showing planar stators. Curved or cylindrical surfaces may be employed to dispose electrode regions proximate the edge of the shutter as it is driven open or closed. Similarly, the invention has been described with shutters having a mechanical bias or spring effect for closure. No bias is needed for shutters which are driven closed as by reverse addressing.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

Des dispositifs binaires disposés en panneaux et actionnés électrostatiquement, possèdent des volets ou battants pouvant être attirés pour effectuer un changement d'état. Une pluralité de volets peut être utilisée pour chaque dispositif. Plusieurs régions à électrodes permettent la commande en X, Y du dispositif et d'autres électrodes enclenchent les dispositifs dans l'état activé.
PCT/US1985/001585 1984-08-21 1985-08-19 Dispositifs binaires a volets, disposes en panneaux et actionnes electrostatiquement Ceased WO1986001626A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64299684A 1984-08-21 1984-08-21
US642,996 1984-08-21

Publications (1)

Publication Number Publication Date
WO1986001626A1 true WO1986001626A1 (fr) 1986-03-13

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1985/001585 Ceased WO1986001626A1 (fr) 1984-08-21 1985-08-19 Dispositifs binaires a volets, disposes en panneaux et actionnes electrostatiquement

Country Status (3)

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EP (1) EP0192702A1 (fr)
JP (1) JPS61503056A (fr)
WO (1) WO1986001626A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0548965A1 (fr) * 1991-12-23 1993-06-30 Texas Instruments Incorporated Méthode et dispositif pour dévier la lumière
US5280277A (en) * 1990-06-29 1994-01-18 Texas Instruments Incorporated Field updated deformable mirror device
WO1994010669A1 (fr) * 1992-11-05 1994-05-11 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Ecran de visualisation a haute resolution
EP1243902A1 (fr) * 2001-03-23 2002-09-25 C.R.F. Società Consortile per Azioni Spectrophotomètre comportant des micro-obturateurs
EP1022598A3 (fr) * 1999-01-20 2003-10-01 Fuji Photo Film Co., Ltd. Dispositif de modulation de la lumiére, sa méthode de commande, et dispositif d'affichage à panneau plat
EP1480068A1 (fr) * 1999-01-20 2004-11-24 Fuji Photo Film Co., Ltd. Dispositif de modulation de la lumiére du type réseau, sa méthode de commande, et dispositif d'affichage à panneau plat
EP1320781A4 (fr) * 2000-08-29 2010-07-21 New Visual Media Group L L C Procede de fabrication d'un reseau et d'un produit a condensateurs a modulation de lumiere

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201633B1 (en) * 1999-06-07 2001-03-13 Xerox Corporation Micro-electromechanical based bistable color display sheets

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319246A (en) * 1964-06-01 1967-05-09 Electronix Ten Inc Signalling device
FR2318474A1 (fr) * 1975-07-17 1977-02-11 Thomson Csf Dispositif d'affichage par electrophorese
US4091382A (en) * 1976-09-27 1978-05-23 Willis J. Ball Display system
US4248501A (en) * 1978-06-16 1981-02-03 Bos-Knox, Ltd. Light control device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3319246A (en) * 1964-06-01 1967-05-09 Electronix Ten Inc Signalling device
FR2318474A1 (fr) * 1975-07-17 1977-02-11 Thomson Csf Dispositif d'affichage par electrophorese
US4091382A (en) * 1976-09-27 1978-05-23 Willis J. Ball Display system
US4248501A (en) * 1978-06-16 1981-02-03 Bos-Knox, Ltd. Light control device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Elektronics International, Volume 56, Nr. 14, July 1983, pages 81-82 GALLAGHER: "Microshutters Flip to Form Characters in dot-Matrix Display", see page 81, centre column (cited in the application) *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5280277A (en) * 1990-06-29 1994-01-18 Texas Instruments Incorporated Field updated deformable mirror device
EP0548965A1 (fr) * 1991-12-23 1993-06-30 Texas Instruments Incorporated Méthode et dispositif pour dévier la lumière
WO1994010669A1 (fr) * 1992-11-05 1994-05-11 Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. Ecran de visualisation a haute resolution
EP1022598A3 (fr) * 1999-01-20 2003-10-01 Fuji Photo Film Co., Ltd. Dispositif de modulation de la lumiére, sa méthode de commande, et dispositif d'affichage à panneau plat
EP1480068A1 (fr) * 1999-01-20 2004-11-24 Fuji Photo Film Co., Ltd. Dispositif de modulation de la lumiére du type réseau, sa méthode de commande, et dispositif d'affichage à panneau plat
EP1320781A4 (fr) * 2000-08-29 2010-07-21 New Visual Media Group L L C Procede de fabrication d'un reseau et d'un produit a condensateurs a modulation de lumiere
EP1243902A1 (fr) * 2001-03-23 2002-09-25 C.R.F. Società Consortile per Azioni Spectrophotomètre comportant des micro-obturateurs

Also Published As

Publication number Publication date
JPS61503056A (ja) 1986-12-25
EP0192702A1 (fr) 1986-09-03

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