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USD714371S1 - Wafer paddle - Google Patents

Wafer paddle Download PDF

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Publication number
USD714371S1
USD714371S1 US29/495,224 US201429495224F USD714371S US D714371 S1 USD714371 S1 US D714371S1 US 201429495224 F US201429495224 F US 201429495224F US D714371 S USD714371 S US D714371S
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United States
Prior art keywords
wafer paddle
paddle
wafer
depicts
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/495,224
Inventor
Robert Braga
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Coorstek Inc
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Coorstek Inc
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Filing date
Publication date
Application filed by Coorstek Inc filed Critical Coorstek Inc
Priority to US29/495,224 priority Critical patent/USD714371S1/en
Assigned to COORSTEK, INC. reassignment COORSTEK, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BRAGA, ROBERT
Application granted granted Critical
Publication of USD714371S1 publication Critical patent/USD714371S1/en
Assigned to WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT reassignment WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT SECURITY INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: COORSTEK, INC.
Assigned to JPMORGAN CHASE BANK, N.A. reassignment JPMORGAN CHASE BANK, N.A. SECURITY INTEREST Assignors: COORSTEK, INC.
Assigned to COORSTEK, INC. reassignment COORSTEK, INC. NOTICE OF RELEASE OF SECURITY INTEREST IN PATENTS RECORDED AT REEL 050237, FRAME 0557 Assignors: WELLS FARGO BANK, NATIONAL ASSOCIATION
Assigned to CITIBANK, N.A., AS COLLATERAL AGENT reassignment CITIBANK, N.A., AS COLLATERAL AGENT SECURITY INTEREST Assignors: COORSTEK, INC.
Assigned to COORSTEK, INC. reassignment COORSTEK, INC. TERMINATION AND RELEASE OF CONFIRMATORY GRANT OF SECURITY INTEREST IN PATENTS Assignors: JPMORGAN CHASE BANK, N.A.
Active legal-status Critical Current
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Description

FIG. 1 depicts a front perspective view of a first embodiment of a wafer paddle.
FIG. 2 depicts a close-up view labeled in FIG. 1.
FIG. 3 depicts a close-up view labeled in FIG. 1.
FIG. 4 depicts a left elevation view of the wafer paddle of FIG. 1.
FIG. 5 depicts a close-up view labeled in FIG. 4.
FIG. 6 depicts a right elevation view of the wafer paddle of FIG. 1.
FIG. 7 depicts a close-up view labeled in FIG. 6.
FIG. 8 depicts a top plan view of the wafer paddle of FIG. 1.
FIG. 9 depicts a bottom plan view of the wafer paddle of FIG. 1.
FIG. 10 depicts a rear elevation view of the wafer paddle of FIG. 1; and,
FIG. 11 depicts a front elevation view of the wafer paddle of FIG. 1.
The broken lines in the drawings illustrate environmental structure on the article and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a wafer paddle, as shown and described.
US29/495,224 2011-11-23 2014-06-27 Wafer paddle Active USD714371S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/495,224 USD714371S1 (en) 2011-11-23 2014-06-27 Wafer paddle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/407,171 USD714369S1 (en) 2011-11-23 2011-11-23 Wafer paddle
US29/495,224 USD714371S1 (en) 2011-11-23 2014-06-27 Wafer paddle

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US29/407,171 Division USD714369S1 (en) 2011-11-23 2011-11-23 Wafer paddle

Publications (1)

Publication Number Publication Date
USD714371S1 true USD714371S1 (en) 2014-09-30

Family

ID=51588688

Family Applications (3)

Application Number Title Priority Date Filing Date
US29/407,171 Active USD714369S1 (en) 2011-11-23 2011-11-23 Wafer paddle
US29/495,223 Active USD714370S1 (en) 2011-11-23 2014-06-27 Wafer paddle
US29/495,224 Active USD714371S1 (en) 2011-11-23 2014-06-27 Wafer paddle

Family Applications Before (2)

Application Number Title Priority Date Filing Date
US29/407,171 Active USD714369S1 (en) 2011-11-23 2011-11-23 Wafer paddle
US29/495,223 Active USD714370S1 (en) 2011-11-23 2014-06-27 Wafer paddle

Country Status (1)

Country Link
US (3) USD714369S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD940212S1 (en) * 2020-07-06 2022-01-04 Stratasys Ltd. Wiper assembly

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD818930S1 (en) * 2016-10-25 2018-05-29 R. Brandon Bell Paddle
USD913940S1 (en) * 2018-04-12 2021-03-23 Hamamatsu Photonics K.K. Electrode for X-ray tube
USD1001853S1 (en) * 2021-02-04 2023-10-17 Keyarrow (Taiwan) Co., Ltd. Wiper blade holder for a protective cover of a machine tool

Citations (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678893A (en) 1970-05-01 1972-07-25 Stewart Warner Corp Improved device for supporting semiconductor wafers
US3951587A (en) 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components
US4218214A (en) 1979-02-05 1980-08-19 Rca Corporation Guide wing for a furnace paddle
US4355974A (en) 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
US4440538A (en) 1981-12-30 1984-04-03 Atomel Products Corporation Apparatus for loading and unloading a furnace
US4459104A (en) 1983-06-01 1984-07-10 Quartz Engineering & Materials, Inc. Cantilever diffusion tube apparatus and method
US4471716A (en) 1981-01-15 1984-09-18 Fluoroware, Inc. Wafer carrier
US4516897A (en) 1983-05-23 1985-05-14 Berkeley Glasslab Cantilever paddle for use with wafer boats
US4523885A (en) 1982-04-29 1985-06-18 Heraeus Quarzschmelze Gmbh Apparatus for loading magazines into furnaces
US4543059A (en) 1984-07-18 1985-09-24 Quartz Engineering & Materials, Inc. Slotted cantilever diffusion tube system and method and apparatus for loading
US4566839A (en) 1983-05-18 1986-01-28 Microglass, Inc. Semiconductor wafer diffusion boat and method
US4624638A (en) 1984-11-29 1986-11-25 Btu Engineering Corporation CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly
US4671726A (en) 1984-11-07 1987-06-09 Breed Corporation Cantilevered soft landing boat loader for semiconductor processing furnaces
US4676008A (en) 1986-05-16 1987-06-30 Microglass, Inc. Cage-type wafer carrier and method
US4687097A (en) 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4721424A (en) * 1985-04-03 1988-01-26 Thermco Systems, Inc. Semiconductor wafer boat loader releaseable mounting
US4744712A (en) 1986-05-06 1988-05-17 Ron Mitchell Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes
US4761134A (en) 1987-03-30 1988-08-02 Norton Company Silicon carbide diffusion furnace components with an impervious coating thereon
US4767251A (en) 1986-05-06 1988-08-30 Amtech Systems, Inc. Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes
US4888994A (en) 1987-11-18 1989-12-26 Tel Sagami Limited Method of carrying objects into and from a furnace, and apparatus for carrying objects into and from a furnace
US4911638A (en) 1989-05-18 1990-03-27 Direction Incorporated Controlled diffusion environment capsule and system
US4943234A (en) 1988-02-11 1990-07-24 Soehlbrand Heinrich Procedure and equipment for the thermal treatment of semiconductor materials
US4954079A (en) 1988-02-05 1990-09-04 Tel Sagami Limited Heat-treating apparatus and a method for the same
JPH0239526B2 (en) 1981-06-19 1990-09-06 Daicel Chem
USRE33341E (en) 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
US4976610A (en) 1988-12-05 1990-12-11 Cryco Twenty-Two, Inc. Purge cantilevered wafer loading system for LP CVD processes
US4979897A (en) 1988-12-05 1990-12-25 Cryco Twenty-Two, Inc. Atmospheric door closure
US4998879A (en) 1988-04-29 1991-03-12 Norton Company High purity diffusion furnace components
US5033406A (en) 1987-06-24 1991-07-23 Asq Boats, Inc. Side lifting tool wafer-boat assembly
US5050534A (en) 1989-08-03 1991-09-24 Cryco Twenty-Two, Inc. Mobile injector system
US5208961A (en) 1992-02-28 1993-05-11 National Semiconductor Corporation Semiconductor processing furnace door alignment apparatus and method
US5225375A (en) 1991-05-20 1993-07-06 Process Technology (1988) Limited Plasma enhanced chemical vapor processing of semiconductor substrates
US5283089A (en) 1989-11-13 1994-02-01 Norton Company Non-porous diffusion furnace components
JPH0618178Y2 (en) 1986-09-24 1994-05-11 東芝ホームテクノ株式会社 Cold air inflow control device
US5354198A (en) 1988-12-05 1994-10-11 Cyrco Twenty-Two, Inc. Movable cantilevered purge system
US5443649A (en) 1994-11-22 1995-08-22 Sibley; Thomas Silicon carbide carrier for wafer processing in vertical furnaces
US5476176A (en) 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
US5505577A (en) 1990-11-17 1996-04-09 Tokyo Electron Limited Transfer apparatus
US5520205A (en) 1994-07-01 1996-05-28 Texas Instruments Incorporated Apparatus for wafer cleaning with rotation
US5538230A (en) 1994-08-08 1996-07-23 Sibley; Thomas Silicon carbide carrier for wafer processing
US5618349A (en) 1993-07-24 1997-04-08 Yamaha Corporation Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity
US5765982A (en) 1995-07-10 1998-06-16 Amtech Systems, Inc. Automatic wafer boat loading system and method
US5820367A (en) 1995-09-20 1998-10-13 Tokyo Electron Limited Boat for heat treatment
US5857576A (en) 1995-11-27 1999-01-12 Samsung Electronics Co., Ltd. Wafer carrier with an anti-slip surface
US5878889A (en) 1996-01-23 1999-03-09 Nec Corporation Semiconductor wafer carrier featuring effective reduction of airborne particles become attached to wafers
US5882807A (en) 1995-12-26 1999-03-16 Asahi Glass Company, Ltd Jig for heat treatment and process for fabricating the jig
US6095806A (en) 1998-06-24 2000-08-01 Tokyo Electron Limited Semiconductor wafer boat and vertical heat treating system
US6199564B1 (en) 1998-11-03 2001-03-13 Tokyo Electron Limited Substrate processing method and apparatus
US6318389B1 (en) 1999-10-29 2001-11-20 Memc Electronic Materials, Inc. Apparatus for cleaning semiconductor wafers
US6601592B1 (en) 2000-09-01 2003-08-05 Zhengming Chen Method of semiconductor substrate batch demounting
US6631934B1 (en) 2000-06-02 2003-10-14 Saint-Gobain Ceramics & Plastics, Inc. Silicon carbide cantilever paddle
US6716027B2 (en) 2001-01-18 2004-04-06 Samsung Electronics Co., Ltd. Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US6811040B2 (en) 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
US20050148455A1 (en) 2004-01-06 2005-07-07 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide articles and methods
US20070238062A1 (en) 2006-03-20 2007-10-11 Satoshi Asari Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
US20090159897A1 (en) 2007-12-20 2009-06-25 Saint-Gobain Ceramics & Plastics, Inc. Method for treating semiconductor processing components and components formed thereby
US7762208B2 (en) 2002-07-19 2010-07-27 Aixtron Ag Loading and unloading apparatus for a coating device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679893A (en) 1970-09-03 1972-07-25 Sylvan R Schemitz And Associat Luminaire reflector comprising elliptical and parabolic segments
US4542059A (en) 1982-08-23 1985-09-17 Canon Kabushiki Kaisha Recording medium
MY152285A (en) 2008-02-21 2014-09-15 Saint Gobain Ceramics Ceramic paddle

Patent Citations (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678893A (en) 1970-05-01 1972-07-25 Stewart Warner Corp Improved device for supporting semiconductor wafers
US3951587A (en) 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components
US4218214A (en) 1979-02-05 1980-08-19 Rca Corporation Guide wing for a furnace paddle
US4355974B1 (en) 1980-11-24 1988-10-18
US4355974A (en) 1980-11-24 1982-10-26 Asq Boats, Inc. Wafer boat
US4471716A (en) 1981-01-15 1984-09-18 Fluoroware, Inc. Wafer carrier
JPH0239526B2 (en) 1981-06-19 1990-09-06 Daicel Chem
US4440538A (en) 1981-12-30 1984-04-03 Atomel Products Corporation Apparatus for loading and unloading a furnace
US4523885A (en) 1982-04-29 1985-06-18 Heraeus Quarzschmelze Gmbh Apparatus for loading magazines into furnaces
US4566839A (en) 1983-05-18 1986-01-28 Microglass, Inc. Semiconductor wafer diffusion boat and method
US4516897A (en) 1983-05-23 1985-05-14 Berkeley Glasslab Cantilever paddle for use with wafer boats
USRE33341E (en) 1983-05-23 1990-09-18 ASQ Technology, Inc. Wafer transfer apparatus
US4459104A (en) 1983-06-01 1984-07-10 Quartz Engineering & Materials, Inc. Cantilever diffusion tube apparatus and method
US4543059A (en) 1984-07-18 1985-09-24 Quartz Engineering & Materials, Inc. Slotted cantilever diffusion tube system and method and apparatus for loading
US4671726A (en) 1984-11-07 1987-06-09 Breed Corporation Cantilevered soft landing boat loader for semiconductor processing furnaces
US4624638A (en) 1984-11-29 1986-11-25 Btu Engineering Corporation CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly
US4687097A (en) 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4721424A (en) * 1985-04-03 1988-01-26 Thermco Systems, Inc. Semiconductor wafer boat loader releaseable mounting
US4744712A (en) 1986-05-06 1988-05-17 Ron Mitchell Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes
US4767251A (en) 1986-05-06 1988-08-30 Amtech Systems, Inc. Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes
US4676008A (en) 1986-05-16 1987-06-30 Microglass, Inc. Cage-type wafer carrier and method
JPH0618178Y2 (en) 1986-09-24 1994-05-11 東芝ホームテクノ株式会社 Cold air inflow control device
US4761134A (en) 1987-03-30 1988-08-02 Norton Company Silicon carbide diffusion furnace components with an impervious coating thereon
US4761134B1 (en) 1987-03-30 1993-11-16 Silicon carbide diffusion furnace components with an impervious coating thereon
US5033406A (en) 1987-06-24 1991-07-23 Asq Boats, Inc. Side lifting tool wafer-boat assembly
US4888994A (en) 1987-11-18 1989-12-26 Tel Sagami Limited Method of carrying objects into and from a furnace, and apparatus for carrying objects into and from a furnace
US4954079A (en) 1988-02-05 1990-09-04 Tel Sagami Limited Heat-treating apparatus and a method for the same
US4943234A (en) 1988-02-11 1990-07-24 Soehlbrand Heinrich Procedure and equipment for the thermal treatment of semiconductor materials
US4998879A (en) 1988-04-29 1991-03-12 Norton Company High purity diffusion furnace components
US4976610A (en) 1988-12-05 1990-12-11 Cryco Twenty-Two, Inc. Purge cantilevered wafer loading system for LP CVD processes
US4979897A (en) 1988-12-05 1990-12-25 Cryco Twenty-Two, Inc. Atmospheric door closure
US5354198A (en) 1988-12-05 1994-10-11 Cyrco Twenty-Two, Inc. Movable cantilevered purge system
US4911638A (en) 1989-05-18 1990-03-27 Direction Incorporated Controlled diffusion environment capsule and system
US5050534A (en) 1989-08-03 1991-09-24 Cryco Twenty-Two, Inc. Mobile injector system
US5283089A (en) 1989-11-13 1994-02-01 Norton Company Non-porous diffusion furnace components
US5505577A (en) 1990-11-17 1996-04-09 Tokyo Electron Limited Transfer apparatus
US5225375A (en) 1991-05-20 1993-07-06 Process Technology (1988) Limited Plasma enhanced chemical vapor processing of semiconductor substrates
US5208961A (en) 1992-02-28 1993-05-11 National Semiconductor Corporation Semiconductor processing furnace door alignment apparatus and method
US5618349A (en) 1993-07-24 1997-04-08 Yamaha Corporation Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity
US5476176A (en) 1994-05-23 1995-12-19 Empak, Inc. Reinforced semiconductor wafer holder
US5520205A (en) 1994-07-01 1996-05-28 Texas Instruments Incorporated Apparatus for wafer cleaning with rotation
US5538230A (en) 1994-08-08 1996-07-23 Sibley; Thomas Silicon carbide carrier for wafer processing
US5776391A (en) 1994-08-08 1998-07-07 Sibley; Thomas Silicon carbide carrier for wafer processing and method for making same
US5443649A (en) 1994-11-22 1995-08-22 Sibley; Thomas Silicon carbide carrier for wafer processing in vertical furnaces
US5765982A (en) 1995-07-10 1998-06-16 Amtech Systems, Inc. Automatic wafer boat loading system and method
US5820367A (en) 1995-09-20 1998-10-13 Tokyo Electron Limited Boat for heat treatment
US5857576A (en) 1995-11-27 1999-01-12 Samsung Electronics Co., Ltd. Wafer carrier with an anti-slip surface
US5882807A (en) 1995-12-26 1999-03-16 Asahi Glass Company, Ltd Jig for heat treatment and process for fabricating the jig
US5878889A (en) 1996-01-23 1999-03-09 Nec Corporation Semiconductor wafer carrier featuring effective reduction of airborne particles become attached to wafers
US6095806A (en) 1998-06-24 2000-08-01 Tokyo Electron Limited Semiconductor wafer boat and vertical heat treating system
US6199564B1 (en) 1998-11-03 2001-03-13 Tokyo Electron Limited Substrate processing method and apparatus
US6318389B1 (en) 1999-10-29 2001-11-20 Memc Electronic Materials, Inc. Apparatus for cleaning semiconductor wafers
US6631934B1 (en) 2000-06-02 2003-10-14 Saint-Gobain Ceramics & Plastics, Inc. Silicon carbide cantilever paddle
US6601592B1 (en) 2000-09-01 2003-08-05 Zhengming Chen Method of semiconductor substrate batch demounting
US6716027B2 (en) 2001-01-18 2004-04-06 Samsung Electronics Co., Ltd. Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US6811040B2 (en) 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
US7762208B2 (en) 2002-07-19 2010-07-27 Aixtron Ag Loading and unloading apparatus for a coating device
US20050148455A1 (en) 2004-01-06 2005-07-07 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide articles and methods
US7501370B2 (en) 2004-01-06 2009-03-10 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide wafer boats
US20070238062A1 (en) 2006-03-20 2007-10-11 Satoshi Asari Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus
US20090159897A1 (en) 2007-12-20 2009-06-25 Saint-Gobain Ceramics & Plastics, Inc. Method for treating semiconductor processing components and components formed thereby

Non-Patent Citations (7)

* Cited by examiner, † Cited by third party
Title
Chinese Office Action with translation for CN App. 200980104800.5, issued Jul. 15, 2011 (2500.2.62CN).
Final Office Action, issued in U.S. Appl. No. 12/389,741, dated Apr. 24, 2014 (2500.2.62).
International Preliminary Examination Report for App. PCT/US01/17242, completed Feb. 4, 2004 (2500.2.26PCT).
International Preliminary Report on Patentability for App. PCT/US09/34667, issued Sep. 30, 2009 (2500.2.62PCT).
Non-Final Office Action dated Oct. 17, 2013, issued in U.S. Appl. No. 12/389,741 (File 2500.2.62).
Translation of Notice of Preliminary Rejection for Korean App. 10-2010-7018859, issued Jan. 20, 2012 (2500.2.62KR).
Translation of Office Action for Taiwanese App. 098105542, issued Jan. 24, 2013 (2500.2.62TW).

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD940212S1 (en) * 2020-07-06 2022-01-04 Stratasys Ltd. Wiper assembly

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Publication number Publication date
USD714370S1 (en) 2014-09-30
USD714369S1 (en) 2014-09-30

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