USD714371S1 - Wafer paddle - Google Patents
Wafer paddle Download PDFInfo
- Publication number
- USD714371S1 USD714371S1 US29/495,224 US201429495224F USD714371S US D714371 S1 USD714371 S1 US D714371S1 US 201429495224 F US201429495224 F US 201429495224F US D714371 S USD714371 S US D714371S
- Authority
- US
- United States
- Prior art keywords
- wafer paddle
- paddle
- wafer
- depicts
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
The broken lines in the drawings illustrate environmental structure on the article and form no part of the claimed design.
Claims (1)
- The ornamental design for a wafer paddle, as shown and described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/495,224 USD714371S1 (en) | 2011-11-23 | 2014-06-27 | Wafer paddle |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/407,171 USD714369S1 (en) | 2011-11-23 | 2011-11-23 | Wafer paddle |
| US29/495,224 USD714371S1 (en) | 2011-11-23 | 2014-06-27 | Wafer paddle |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/407,171 Division USD714369S1 (en) | 2011-11-23 | 2011-11-23 | Wafer paddle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD714371S1 true USD714371S1 (en) | 2014-09-30 |
Family
ID=51588688
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/407,171 Active USD714369S1 (en) | 2011-11-23 | 2011-11-23 | Wafer paddle |
| US29/495,223 Active USD714370S1 (en) | 2011-11-23 | 2014-06-27 | Wafer paddle |
| US29/495,224 Active USD714371S1 (en) | 2011-11-23 | 2014-06-27 | Wafer paddle |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/407,171 Active USD714369S1 (en) | 2011-11-23 | 2011-11-23 | Wafer paddle |
| US29/495,223 Active USD714370S1 (en) | 2011-11-23 | 2014-06-27 | Wafer paddle |
Country Status (1)
| Country | Link |
|---|---|
| US (3) | USD714369S1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD940212S1 (en) * | 2020-07-06 | 2022-01-04 | Stratasys Ltd. | Wiper assembly |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD818930S1 (en) * | 2016-10-25 | 2018-05-29 | R. Brandon Bell | Paddle |
| USD913940S1 (en) * | 2018-04-12 | 2021-03-23 | Hamamatsu Photonics K.K. | Electrode for X-ray tube |
| USD1001853S1 (en) * | 2021-02-04 | 2023-10-17 | Keyarrow (Taiwan) Co., Ltd. | Wiper blade holder for a protective cover of a machine tool |
Citations (57)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678893A (en) | 1970-05-01 | 1972-07-25 | Stewart Warner Corp | Improved device for supporting semiconductor wafers |
| US3951587A (en) | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
| US4218214A (en) | 1979-02-05 | 1980-08-19 | Rca Corporation | Guide wing for a furnace paddle |
| US4355974A (en) | 1980-11-24 | 1982-10-26 | Asq Boats, Inc. | Wafer boat |
| US4440538A (en) | 1981-12-30 | 1984-04-03 | Atomel Products Corporation | Apparatus for loading and unloading a furnace |
| US4459104A (en) | 1983-06-01 | 1984-07-10 | Quartz Engineering & Materials, Inc. | Cantilever diffusion tube apparatus and method |
| US4471716A (en) | 1981-01-15 | 1984-09-18 | Fluoroware, Inc. | Wafer carrier |
| US4516897A (en) | 1983-05-23 | 1985-05-14 | Berkeley Glasslab | Cantilever paddle for use with wafer boats |
| US4523885A (en) | 1982-04-29 | 1985-06-18 | Heraeus Quarzschmelze Gmbh | Apparatus for loading magazines into furnaces |
| US4543059A (en) | 1984-07-18 | 1985-09-24 | Quartz Engineering & Materials, Inc. | Slotted cantilever diffusion tube system and method and apparatus for loading |
| US4566839A (en) | 1983-05-18 | 1986-01-28 | Microglass, Inc. | Semiconductor wafer diffusion boat and method |
| US4624638A (en) | 1984-11-29 | 1986-11-25 | Btu Engineering Corporation | CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly |
| US4671726A (en) | 1984-11-07 | 1987-06-09 | Breed Corporation | Cantilevered soft landing boat loader for semiconductor processing furnaces |
| US4676008A (en) | 1986-05-16 | 1987-06-30 | Microglass, Inc. | Cage-type wafer carrier and method |
| US4687097A (en) | 1984-12-11 | 1987-08-18 | Empak, Inc. | Wafer processing cassette |
| US4721424A (en) * | 1985-04-03 | 1988-01-26 | Thermco Systems, Inc. | Semiconductor wafer boat loader releaseable mounting |
| US4744712A (en) | 1986-05-06 | 1988-05-17 | Ron Mitchell | Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes |
| US4761134A (en) | 1987-03-30 | 1988-08-02 | Norton Company | Silicon carbide diffusion furnace components with an impervious coating thereon |
| US4767251A (en) | 1986-05-06 | 1988-08-30 | Amtech Systems, Inc. | Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes |
| US4888994A (en) | 1987-11-18 | 1989-12-26 | Tel Sagami Limited | Method of carrying objects into and from a furnace, and apparatus for carrying objects into and from a furnace |
| US4911638A (en) | 1989-05-18 | 1990-03-27 | Direction Incorporated | Controlled diffusion environment capsule and system |
| US4943234A (en) | 1988-02-11 | 1990-07-24 | Soehlbrand Heinrich | Procedure and equipment for the thermal treatment of semiconductor materials |
| US4954079A (en) | 1988-02-05 | 1990-09-04 | Tel Sagami Limited | Heat-treating apparatus and a method for the same |
| JPH0239526B2 (en) | 1981-06-19 | 1990-09-06 | Daicel Chem | |
| USRE33341E (en) | 1983-05-23 | 1990-09-18 | ASQ Technology, Inc. | Wafer transfer apparatus |
| US4976610A (en) | 1988-12-05 | 1990-12-11 | Cryco Twenty-Two, Inc. | Purge cantilevered wafer loading system for LP CVD processes |
| US4979897A (en) | 1988-12-05 | 1990-12-25 | Cryco Twenty-Two, Inc. | Atmospheric door closure |
| US4998879A (en) | 1988-04-29 | 1991-03-12 | Norton Company | High purity diffusion furnace components |
| US5033406A (en) | 1987-06-24 | 1991-07-23 | Asq Boats, Inc. | Side lifting tool wafer-boat assembly |
| US5050534A (en) | 1989-08-03 | 1991-09-24 | Cryco Twenty-Two, Inc. | Mobile injector system |
| US5208961A (en) | 1992-02-28 | 1993-05-11 | National Semiconductor Corporation | Semiconductor processing furnace door alignment apparatus and method |
| US5225375A (en) | 1991-05-20 | 1993-07-06 | Process Technology (1988) Limited | Plasma enhanced chemical vapor processing of semiconductor substrates |
| US5283089A (en) | 1989-11-13 | 1994-02-01 | Norton Company | Non-porous diffusion furnace components |
| JPH0618178Y2 (en) | 1986-09-24 | 1994-05-11 | 東芝ホームテクノ株式会社 | Cold air inflow control device |
| US5354198A (en) | 1988-12-05 | 1994-10-11 | Cyrco Twenty-Two, Inc. | Movable cantilevered purge system |
| US5443649A (en) | 1994-11-22 | 1995-08-22 | Sibley; Thomas | Silicon carbide carrier for wafer processing in vertical furnaces |
| US5476176A (en) | 1994-05-23 | 1995-12-19 | Empak, Inc. | Reinforced semiconductor wafer holder |
| US5505577A (en) | 1990-11-17 | 1996-04-09 | Tokyo Electron Limited | Transfer apparatus |
| US5520205A (en) | 1994-07-01 | 1996-05-28 | Texas Instruments Incorporated | Apparatus for wafer cleaning with rotation |
| US5538230A (en) | 1994-08-08 | 1996-07-23 | Sibley; Thomas | Silicon carbide carrier for wafer processing |
| US5618349A (en) | 1993-07-24 | 1997-04-08 | Yamaha Corporation | Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity |
| US5765982A (en) | 1995-07-10 | 1998-06-16 | Amtech Systems, Inc. | Automatic wafer boat loading system and method |
| US5820367A (en) | 1995-09-20 | 1998-10-13 | Tokyo Electron Limited | Boat for heat treatment |
| US5857576A (en) | 1995-11-27 | 1999-01-12 | Samsung Electronics Co., Ltd. | Wafer carrier with an anti-slip surface |
| US5878889A (en) | 1996-01-23 | 1999-03-09 | Nec Corporation | Semiconductor wafer carrier featuring effective reduction of airborne particles become attached to wafers |
| US5882807A (en) | 1995-12-26 | 1999-03-16 | Asahi Glass Company, Ltd | Jig for heat treatment and process for fabricating the jig |
| US6095806A (en) | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
| US6199564B1 (en) | 1998-11-03 | 2001-03-13 | Tokyo Electron Limited | Substrate processing method and apparatus |
| US6318389B1 (en) | 1999-10-29 | 2001-11-20 | Memc Electronic Materials, Inc. | Apparatus for cleaning semiconductor wafers |
| US6601592B1 (en) | 2000-09-01 | 2003-08-05 | Zhengming Chen | Method of semiconductor substrate batch demounting |
| US6631934B1 (en) | 2000-06-02 | 2003-10-14 | Saint-Gobain Ceramics & Plastics, Inc. | Silicon carbide cantilever paddle |
| US6716027B2 (en) | 2001-01-18 | 2004-04-06 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
| US6811040B2 (en) | 2001-07-16 | 2004-11-02 | Rohm And Haas Company | Wafer holding apparatus |
| US20050148455A1 (en) | 2004-01-06 | 2005-07-07 | Saint-Gobain Ceramics & Plastics, Inc. | High purity silicon carbide articles and methods |
| US20070238062A1 (en) | 2006-03-20 | 2007-10-11 | Satoshi Asari | Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus |
| US20090159897A1 (en) | 2007-12-20 | 2009-06-25 | Saint-Gobain Ceramics & Plastics, Inc. | Method for treating semiconductor processing components and components formed thereby |
| US7762208B2 (en) | 2002-07-19 | 2010-07-27 | Aixtron Ag | Loading and unloading apparatus for a coating device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3679893A (en) | 1970-09-03 | 1972-07-25 | Sylvan R Schemitz And Associat | Luminaire reflector comprising elliptical and parabolic segments |
| US4542059A (en) | 1982-08-23 | 1985-09-17 | Canon Kabushiki Kaisha | Recording medium |
| MY152285A (en) | 2008-02-21 | 2014-09-15 | Saint Gobain Ceramics | Ceramic paddle |
-
2011
- 2011-11-23 US US29/407,171 patent/USD714369S1/en active Active
-
2014
- 2014-06-27 US US29/495,223 patent/USD714370S1/en active Active
- 2014-06-27 US US29/495,224 patent/USD714371S1/en active Active
Patent Citations (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3678893A (en) | 1970-05-01 | 1972-07-25 | Stewart Warner Corp | Improved device for supporting semiconductor wafers |
| US3951587A (en) | 1974-12-06 | 1976-04-20 | Norton Company | Silicon carbide diffusion furnace components |
| US4218214A (en) | 1979-02-05 | 1980-08-19 | Rca Corporation | Guide wing for a furnace paddle |
| US4355974B1 (en) | 1980-11-24 | 1988-10-18 | ||
| US4355974A (en) | 1980-11-24 | 1982-10-26 | Asq Boats, Inc. | Wafer boat |
| US4471716A (en) | 1981-01-15 | 1984-09-18 | Fluoroware, Inc. | Wafer carrier |
| JPH0239526B2 (en) | 1981-06-19 | 1990-09-06 | Daicel Chem | |
| US4440538A (en) | 1981-12-30 | 1984-04-03 | Atomel Products Corporation | Apparatus for loading and unloading a furnace |
| US4523885A (en) | 1982-04-29 | 1985-06-18 | Heraeus Quarzschmelze Gmbh | Apparatus for loading magazines into furnaces |
| US4566839A (en) | 1983-05-18 | 1986-01-28 | Microglass, Inc. | Semiconductor wafer diffusion boat and method |
| US4516897A (en) | 1983-05-23 | 1985-05-14 | Berkeley Glasslab | Cantilever paddle for use with wafer boats |
| USRE33341E (en) | 1983-05-23 | 1990-09-18 | ASQ Technology, Inc. | Wafer transfer apparatus |
| US4459104A (en) | 1983-06-01 | 1984-07-10 | Quartz Engineering & Materials, Inc. | Cantilever diffusion tube apparatus and method |
| US4543059A (en) | 1984-07-18 | 1985-09-24 | Quartz Engineering & Materials, Inc. | Slotted cantilever diffusion tube system and method and apparatus for loading |
| US4671726A (en) | 1984-11-07 | 1987-06-09 | Breed Corporation | Cantilevered soft landing boat loader for semiconductor processing furnaces |
| US4624638A (en) | 1984-11-29 | 1986-11-25 | Btu Engineering Corporation | CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly |
| US4687097A (en) | 1984-12-11 | 1987-08-18 | Empak, Inc. | Wafer processing cassette |
| US4721424A (en) * | 1985-04-03 | 1988-01-26 | Thermco Systems, Inc. | Semiconductor wafer boat loader releaseable mounting |
| US4744712A (en) | 1986-05-06 | 1988-05-17 | Ron Mitchell | Apparatus and method for an improved wafer handling system for cantilever type diffusion tubes |
| US4767251A (en) | 1986-05-06 | 1988-08-30 | Amtech Systems, Inc. | Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes |
| US4676008A (en) | 1986-05-16 | 1987-06-30 | Microglass, Inc. | Cage-type wafer carrier and method |
| JPH0618178Y2 (en) | 1986-09-24 | 1994-05-11 | 東芝ホームテクノ株式会社 | Cold air inflow control device |
| US4761134A (en) | 1987-03-30 | 1988-08-02 | Norton Company | Silicon carbide diffusion furnace components with an impervious coating thereon |
| US4761134B1 (en) | 1987-03-30 | 1993-11-16 | Silicon carbide diffusion furnace components with an impervious coating thereon | |
| US5033406A (en) | 1987-06-24 | 1991-07-23 | Asq Boats, Inc. | Side lifting tool wafer-boat assembly |
| US4888994A (en) | 1987-11-18 | 1989-12-26 | Tel Sagami Limited | Method of carrying objects into and from a furnace, and apparatus for carrying objects into and from a furnace |
| US4954079A (en) | 1988-02-05 | 1990-09-04 | Tel Sagami Limited | Heat-treating apparatus and a method for the same |
| US4943234A (en) | 1988-02-11 | 1990-07-24 | Soehlbrand Heinrich | Procedure and equipment for the thermal treatment of semiconductor materials |
| US4998879A (en) | 1988-04-29 | 1991-03-12 | Norton Company | High purity diffusion furnace components |
| US4976610A (en) | 1988-12-05 | 1990-12-11 | Cryco Twenty-Two, Inc. | Purge cantilevered wafer loading system for LP CVD processes |
| US4979897A (en) | 1988-12-05 | 1990-12-25 | Cryco Twenty-Two, Inc. | Atmospheric door closure |
| US5354198A (en) | 1988-12-05 | 1994-10-11 | Cyrco Twenty-Two, Inc. | Movable cantilevered purge system |
| US4911638A (en) | 1989-05-18 | 1990-03-27 | Direction Incorporated | Controlled diffusion environment capsule and system |
| US5050534A (en) | 1989-08-03 | 1991-09-24 | Cryco Twenty-Two, Inc. | Mobile injector system |
| US5283089A (en) | 1989-11-13 | 1994-02-01 | Norton Company | Non-porous diffusion furnace components |
| US5505577A (en) | 1990-11-17 | 1996-04-09 | Tokyo Electron Limited | Transfer apparatus |
| US5225375A (en) | 1991-05-20 | 1993-07-06 | Process Technology (1988) Limited | Plasma enhanced chemical vapor processing of semiconductor substrates |
| US5208961A (en) | 1992-02-28 | 1993-05-11 | National Semiconductor Corporation | Semiconductor processing furnace door alignment apparatus and method |
| US5618349A (en) | 1993-07-24 | 1997-04-08 | Yamaha Corporation | Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity |
| US5476176A (en) | 1994-05-23 | 1995-12-19 | Empak, Inc. | Reinforced semiconductor wafer holder |
| US5520205A (en) | 1994-07-01 | 1996-05-28 | Texas Instruments Incorporated | Apparatus for wafer cleaning with rotation |
| US5538230A (en) | 1994-08-08 | 1996-07-23 | Sibley; Thomas | Silicon carbide carrier for wafer processing |
| US5776391A (en) | 1994-08-08 | 1998-07-07 | Sibley; Thomas | Silicon carbide carrier for wafer processing and method for making same |
| US5443649A (en) | 1994-11-22 | 1995-08-22 | Sibley; Thomas | Silicon carbide carrier for wafer processing in vertical furnaces |
| US5765982A (en) | 1995-07-10 | 1998-06-16 | Amtech Systems, Inc. | Automatic wafer boat loading system and method |
| US5820367A (en) | 1995-09-20 | 1998-10-13 | Tokyo Electron Limited | Boat for heat treatment |
| US5857576A (en) | 1995-11-27 | 1999-01-12 | Samsung Electronics Co., Ltd. | Wafer carrier with an anti-slip surface |
| US5882807A (en) | 1995-12-26 | 1999-03-16 | Asahi Glass Company, Ltd | Jig for heat treatment and process for fabricating the jig |
| US5878889A (en) | 1996-01-23 | 1999-03-09 | Nec Corporation | Semiconductor wafer carrier featuring effective reduction of airborne particles become attached to wafers |
| US6095806A (en) | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
| US6199564B1 (en) | 1998-11-03 | 2001-03-13 | Tokyo Electron Limited | Substrate processing method and apparatus |
| US6318389B1 (en) | 1999-10-29 | 2001-11-20 | Memc Electronic Materials, Inc. | Apparatus for cleaning semiconductor wafers |
| US6631934B1 (en) | 2000-06-02 | 2003-10-14 | Saint-Gobain Ceramics & Plastics, Inc. | Silicon carbide cantilever paddle |
| US6601592B1 (en) | 2000-09-01 | 2003-08-05 | Zhengming Chen | Method of semiconductor substrate batch demounting |
| US6716027B2 (en) | 2001-01-18 | 2004-04-06 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
| US6811040B2 (en) | 2001-07-16 | 2004-11-02 | Rohm And Haas Company | Wafer holding apparatus |
| US7762208B2 (en) | 2002-07-19 | 2010-07-27 | Aixtron Ag | Loading and unloading apparatus for a coating device |
| US20050148455A1 (en) | 2004-01-06 | 2005-07-07 | Saint-Gobain Ceramics & Plastics, Inc. | High purity silicon carbide articles and methods |
| US7501370B2 (en) | 2004-01-06 | 2009-03-10 | Saint-Gobain Ceramics & Plastics, Inc. | High purity silicon carbide wafer boats |
| US20070238062A1 (en) | 2006-03-20 | 2007-10-11 | Satoshi Asari | Vertical-type heat processing apparatus and method of controlling transfer mechanism in vertical-type heat processing apparatus |
| US20090159897A1 (en) | 2007-12-20 | 2009-06-25 | Saint-Gobain Ceramics & Plastics, Inc. | Method for treating semiconductor processing components and components formed thereby |
Non-Patent Citations (7)
| Title |
|---|
| Chinese Office Action with translation for CN App. 200980104800.5, issued Jul. 15, 2011 (2500.2.62CN). |
| Final Office Action, issued in U.S. Appl. No. 12/389,741, dated Apr. 24, 2014 (2500.2.62). |
| International Preliminary Examination Report for App. PCT/US01/17242, completed Feb. 4, 2004 (2500.2.26PCT). |
| International Preliminary Report on Patentability for App. PCT/US09/34667, issued Sep. 30, 2009 (2500.2.62PCT). |
| Non-Final Office Action dated Oct. 17, 2013, issued in U.S. Appl. No. 12/389,741 (File 2500.2.62). |
| Translation of Notice of Preliminary Rejection for Korean App. 10-2010-7018859, issued Jan. 20, 2012 (2500.2.62KR). |
| Translation of Office Action for Taiwanese App. 098105542, issued Jan. 24, 2013 (2500.2.62TW). |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD940212S1 (en) * | 2020-07-06 | 2022-01-04 | Stratasys Ltd. | Wiper assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| USD714370S1 (en) | 2014-09-30 |
| USD714369S1 (en) | 2014-09-30 |
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