USD710062S1 - Roller shaft for semiconductor cleaning

Info

Publication number: USD710062S1
Application number: US29/408,194
Authority: US
Inventors: Tomoatsu Ishibashi; Fumitoshi Oikawa; Hideaki Tanaka; Teruaki HOMBO
Original assignee: Ebara Corp
Current assignee: Ebara Corp
Priority date: 2011-06-09
Filing date: 2011-12-08
Publication date: 2014-07-29
Anticipated expiration: 2028-07-29
Also published as: TWD148170S

FIG. 1 is a front elevational view of a roller shaft for semiconductor cleaning showing our new design;

FIG. 2 is a rear elevation view thereof;

FIG. 3 is a top plan view thereof, the bottom view being a mirror image thereof;

FIG. 4 is a right side view thereof, the left side view being a mirror image thereof;

FIG. 5 is a cross sectional view taken along the line 5-5 of FIG. 1;

FIG. 6 is a front perspective view, at an enlarged scale;

FIG. 7 is a front elevational view thereof, at an enlarged scale;

FIG. 8 is an enlarged view of the area 8 seen in FIG. 3; and,

FIG. 9 is an enlarged view of the area 9 seen in FIG. 4.

The broken line showing depicts environmental subject matter only and forms no part of the claimed design.

CLAIM

We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.