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US3898040A - Recuperative form of thermal-catalytic incinerator - Google Patents

Recuperative form of thermal-catalytic incinerator Download PDF

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Publication number
US3898040A
US3898040A US428640A US42864073A US3898040A US 3898040 A US3898040 A US 3898040A US 428640 A US428640 A US 428640A US 42864073 A US42864073 A US 42864073A US 3898040 A US3898040 A US 3898040A
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United States
Prior art keywords
housing
catalyst
gas
section
combustion section
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Expired - Lifetime
Application number
US428640A
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English (en)
Inventor
Fernando Tabak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universal Oil Products Co
Original Assignee
Universal Oil Products Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00267328A external-priority patent/US3806322A/en
Application filed by Universal Oil Products Co filed Critical Universal Oil Products Co
Priority to US428640A priority Critical patent/US3898040A/en
Priority to BE143447A priority patent/BE814000A/fr
Application granted granted Critical
Publication of US3898040A publication Critical patent/US3898040A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/07—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases in which combustion takes place in the presence of catalytic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
    • B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F23G7/066—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel preheating the waste gas by the heat of the combustion, e.g. recuperation type incinerator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B01J2208/00477—Controlling the temperature by thermal insulation means
    • B01J2208/00495—Controlling the temperature by thermal insulation means using insulating materials or refractories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
    • B01J2208/00008—Controlling the process
    • B01J2208/00017—Controlling the temperature
    • B01J2208/00504—Controlling the temperature by means of a burner
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/18—Details relating to the spatial orientation of the reactor
    • B01J2219/182—Details relating to the spatial orientation of the reactor horizontal

Definitions

  • ABSTRACT 1 Notice: The Portion of the term of this A special form of incinerator design provides for ei- Patem f q f to 1991 ther a catalytic or thennal operation, or simultaneous has been dlsclalmedconversions, in that burner means is provided for initi- [22] Filed; 26, 1973 ating catalytic oxidation or for discharging hot combustion gases into an elongated central combustion [21] PP N05 4282640 section to thermally oxidize the combustibles in the Related Appficafion Data fume stream.
  • the invention involves an elongated l 63] Continuatiomimpan of Sen N0 267328, June 29 outer housmg, internal cyllndrlcal-form partltlomng 1972 Pm No. 3 806 322' spaced inwardly thereof to define an annular gas flow space therein, an internal combustion section, burner 52 us. 01 23/277 c; 23/288 R; 110/8 A; means 3 end of the housing i inlet 423/210; 431/5 means into sa1d housing to the cornbustlon sectlon, gas 51 Int. Cl.
  • the present invention relates to a special form of fume incinerator which provides for either a thermal or catalytic type of operation, or both at the same time.
  • An improved and preferred embodiment of the present invention also provides for a heat recuperative operation by having the incoming fume stream pass through an annular form heat exchange zone in heat exchange relationship with the resulting purified high temperature discharge stream.
  • thermal and catalytic incinerators have been designed and are in commercial usage to effect the oxidation and purification of noxious waste gas streams; however, the present design provides a compact and novel design and arrangement which permits the insertion, or removal, of catalyst elements to switch from one type of operation to the other.
  • the burner means can be readily operated at a sufficiently high temperature to have a thermal incinerator type operation while the catalyst elements remain in place or are removed.
  • a preferred form of incineration unit will also use a 100% secondary air burner, such that no primary air need be supplied, to thereby provide a high efficiency operation
  • the present design is related to that disclosed in my earlier application, Ser. No. 267,328, and also somewhat related to my now issued US. Pat. No. 3,549,333; however, in this instance, the inner cylindrical partitioning is comprised in part of gas pervious catalyst means such that a preheated gas stream can flow radially through the catalyst and be catalytically oxidized to remove noxious components.
  • the catalyst may be a thin bed of impregnated refractory particles or pellets; a catalytic agent impregnated onto a honeycomb" type ceramic support; or, preferably, will be of an all-metal construction such as may be provided by catalytically coated ribbon or wire in mat form between retaining screens.
  • thermal-catalytic fume incinerator unit with burner means and catalyst elements being suitably placed such that the unit can readily operate either thermally or catalytically without any necessary modification.
  • the fume stream will be in heat recuperative, heat exchange relationship with the oxidized stream and also be subjected to an elongated passage through the burner section and catalyst means to provide a greater overall length of combustion section for reaping the benefits of time, temperature and turbulence in carrying out the fume incineration.
  • the present invention provides a thermal-catalytic fume incineration unit, which comprises in combination, an elongated outer housing, internal cylindrical-form partitioning spaced inwardly from the wall of said housing and extending for at least a portion of the internal length thereof to define an annular gas flow space therebetween and an internal combustion section, burner means positioned at the end of said housing and means to discharge hot burner gases axially into said combustion section, fume inlet means into said housing and to said combustion section with passageway means to the latter entirely surrounding said means discharging the hot burner gases, gas pervious catalyst means in at least a peripheral portion of the downstream section of said cylindrical-form partitioning, and open passageway means to one face of the catalyst means from the combustion section whereby the fume stream being treated may be passed in a radial type flow through said catalyst means, and treated gas outlet means from the opposing face of the latter and from said housing.
  • the present invention provides a recuperative form of fum'e incineration unit, which comprises in combination, an elongated outer housing, inner partitioning spaced from the outer housing and terminating short of one end of said housing to provide an external annular heat exchange section and a central gas combustion section, a transverse partition positioned across the internal end of said inner partitioning to provide a preheated gas inlet section in the end of said housing and an end closure for said annular heat exchange section, a burner means connective with the end of said housing at the preheated gas inlet section and burner gas passageway means therefrom for discharging of hot flames and gases into said combustion section, additional transverse partitioning that is positioned a spaced distance from the other end of said housing to provide a gas inlet section and a second end closure for said annular heat exchange section, a plurality of open-ended tubular members extending between and through said transversely positioned partitions to define inlet gas passageway means through said heat exchange section from said gas inlet section to said preheated gas
  • the catalyst elements or catalyst means may comprise an all-metal construction such as high temperature resistant wire or ribbon plated or otherwise coated with platinum, palladium, or other active metal, whereby there is an active oxidizing catalyst to effect the incineration of combustible fumes in the gas stream to be treated.
  • the catalyst section may comprise one or more elements utilizing coated refractory pills or other subdivided particles which havea catalytic coating suitable to effect the desired oxidation reactions.
  • spherical-form alumina particles may be impregnated or otherwise coated with a suitable oxidizing catalyst agent and such particles retained between perforate screens so that there is permeability for the radial inward or outward flow of the gas stream passing from the inlet and burner zones of the incinerator unit.
  • FIG. 1 of the drawing is a longitudinal sectional elevational view of one embodiment of the present thermal-catalytic fume incineration unit.
  • FIG. 2 of the drawing shows a partial cross-sectional view, as indicated by the line 2-2 in FIG. 1.
  • FIG. 3 of the drawing is a diagrammatic partial longitudinal sectional view indicating radial outward flow through a catalyst section positioned primarily downstream in the combustion zone.
  • FIG. 4 of the drawing is also a partial longitudinal sectional view through an incinerator unit where there is radial inward flow through the catalyst section and also a modification in the gas outlet positioning.
  • an outer shell or housing 1 arranged to have a contaminated gas stream inlet 2 connective with an internal gas distribution section 3, which in turn, passes the stream through a plurality of spaced open-ended tubular members 4 within a heat exchange section 5, hereinafter described in further detail.
  • a partitioning sheet or tube sheet 6 Positioned across the inlet end of the housing is a partitioning sheet or tube sheet 6 which defines the inlet section 3 as well as an end for the heat exchange section 5.
  • a burner means defined by a perforated frusta-conical member 9 and a fuel inlet line 10.
  • a preferred type of burner will be of the 100% secondary air type having only fuel introduced into the interior of the burner cone means 9 from line 10 and the air, or oxygen content, required to sustain combustion will be supplied by way of the contaminated air stream entering the incinerator unit from inlet means 2 and the heat exchange tubes 4.
  • the cone means 9 will have a plurality of holes in order to permit air and gases into the interior thereof and mix with the fuel being injected by way of line 10.
  • there will be passageway means around burner cone means 9 to provide for the flow of the entire fume stream into an internally positioned combustion zone 11.
  • an interiorly positioned cylindrical-form partitioning wall is provided longitudinally at a spaced distance from housing 1 so as to define the heat exchange section 5 as well as the internal combustion section 11.
  • Such wall may be comprised primarily of one or more catalyst sections 12, such as shown in the drawing. along with a short cylindrical end portion 13 or, alternatively, as will be more fully explained hereinafter, there may be a longer non-perforate wall section 13 in combination with one or more catalyst sections which are of more shorter lengths.
  • catalyst element(s) 12 are supported at the burner end from suitable flange means 14 from wall cylindrical section 13 as well as from transverse tube sheet 6 at the opposing end of the incinerator unit. Support angles 15 or other suitable means that may be attached to partitioning wall 6 can be provided to removably hold the end of the catalyst unit.
  • the catalyst 12 is preferably constructed and mounted to be removable by utilizing a plurality of cylinder-like sections or a plurality of arcuate-like longitudinal pieces held by suitable support means, such that the catalyst can be removed or replaced in the event that it needs replacement or regeneration. Also, there may be an operation where the present form of convertible incinerator unit will be entirely thermal such that all or a part of the catalyst sections may be removed or, if desired, replaced with perforate partitioning to in turn permit a thermally incinerated fume stream to pass radially outwardly through such partitioning into the heat exchange section 5 and then be discharged from the housing by way of outlet means 16.
  • the present incinerator unit will normally operate either thermally or catalytically, it is to be noted that the present embodiment also lends itself to a combination type of operation or the fume stream.
  • the fumes can be primarily thermally converted from hot combustion gases supplied by the fuel and burner means at the preheated gas inlet end of the unit, and then there can be a further combustion and clean-up of the fume stream by the second stage catalytic contact of such stream prior to its leaving the incinerator unit.
  • the burner means will normally supply only sufficient heat input to insure that the contaminated gas stream is brought up to an oxidizing temperature for catalytic incineration as it passes through the one or more elements 12.
  • the burner means will supply sufficient fuel, flame, and hot combustion gases to insure substantially complete incineration of oxidizable components in the contaminated air stream.
  • the catalyst elements 12 will normally have been removed from the incinerator although, as heretofore noted, such elements may be left in the unit.
  • catalyst support means as well as catalyst element configurations, may be utilized to form the catalyst section in the cylindrical-form partitioning wall as well as the separating wall means between combustion zone 11 and heat annularform heat exchange section 5.
  • various types of baffling and tube support means may be utilized in the latter section and it is not intended to limit the present invention to any one type of construction.
  • baffle member 17. which will assist in providing turbulent flow and the channeling of the hot combustion gases around tubular members 4 after the outward radial gas flow through catalyst means 12.
  • FIG. 3 of the drawing there is indicated a slight modification to the incinerator unit design and construction in that a longer internal non-perforate partitioning section 13 is provided at the burner end or fume inlet end to an internal combustion section 11' and a shorter overall length is provided for catalyst means 12 at the downstream end of the partitioning wall defining the wall means between combustion zone 11' and a heat exchange section 5'.
  • a transverse partitioning member 18 within combustion section 11' so that hot flames and combustion gases will necessarily be caused to pass therearound and through an annular space 19 prior to reaching a downstream combustion section 11 prior to the radial outward flow of gases into the annular heat exchange section 5.
  • a treated gas stream outlet means 16' adjacent the downstream end of heat exchange section 5 and tube plate 7' such that there is a resulting reversal of flow in the hot treated gas stream with respect to gas flow within combustion zone 11.
  • the fume inlet end to the incinerator unit of FIG. 3 may well be similar to that shown in FIG. 1 of the drawing or, alternatively, may be into the side of housing to communicate with the internal gas distribution section.
  • FIG. 4 of the drawing where an incinerator housing 20 is provided with only partial longitudinal internal partitioning wall means in the downstream end portion thereof with respect to combustion gases as defined by cylindrical-form partitioning means 21 and catalyst means 22.
  • FIG. 4 also indicates that a plurality of tubular members 29 will be provided in the heat exchange section 24, with such tubes extending between a transverse tube sheet 30 at the fume inlet end of the incinerator and a similar transverse tube sheet (not shown) which will be at the opposing end of the incinerator in a means similar to the embodiments of FlGS. l and 3.
  • the multiplicity of tubes 29 will serve to pass the contaminated air stream being introduced at inlet means 31 and from a gas distribution section 32 to the burner end of the incinerator unit to then pass in a reverse flow around a suitable burner means into a central combustion section 33, ahead of transverse partitioning 23, to then flow into the annular-form heat exchange section 24.
  • catalyst 22 comprises a plurality of spaced segments which may be alternated with non-perforate segments 22.
  • the catalyst means be one continuous cylindrical form member as long as the catalyst is provided in a gas pervious form between suitable support plates and will, in turn, provide for the desired generally radial flow of gases therethrough in order to obtain substantially uniform flow through the entire internal portion of the incinerator unit.
  • thermal-catalytic incinerator unit is con structed and arranged such that the unit may be operated either as a thermal conversion unit, a catalytic conversion unit, or as a combination unit.
  • the catalyst will be utilized primarily as a second stage clean-up section while in a strictly thermal operation there can be the removal of the one or more catalyst elements making up the catalyst portion of the internal cylindrical-form partitioning wall.
  • each of the drawings are merely diagrammatic and that various modifications may be made with respect to the general shapes and configurations of the housings and inlets or outlets, as well as with respect to modifications in partitioning and baffling to effect the desired flow for the contaminated gas stream and a radial flow through one or more catalyst elements. Also, it is not intended to limit the invention to any one method of supporting, or positioning, for the one or more catalyst elements in combination with the internal cylinder-form partitioning means extending longitudinally to form the interior sections of the incinerator housing. Still further, although not shown in any of the drawings, there may be suitable insulation provided around critical portions of the outer housing or around the heat exchange sections such that there may be an efficient retention of heat within the entire incinerator unit.
  • burner means have been indicated as secondary air burners; however, other forms of burner means may well be used within the scope of the present invention so long as there is a suitable location of the burner means in order to effect the proper mixing with the contaminated gas stream to be preheated, or to be thermally converted at such times as the incinerator will be operating as a purely thermal incinerating device.
  • the burner means may be arranged other than axially with respect to the outer housing as long as the hot combustion gases from the burner are baffled or otherwise channeled to eventually flow into the central portion of the incinerator unit and then permit the radial outward flow, or alternatively, the inward radial flow, with respect to the catalyst portion of the partition so as to provide for the uniform flow through the entire interior portion of the incinerator.
  • a thermal-catalytic fume incineration unit which comprises in combination, an elongated outer housing, internal cylindrical-form partitioning spaced inwardly from the wall of said housing and extending for at least a portion of the internal length thereof to define an annular gas flow space therebetween and an internal combustion section, burner means positioned at the end of said housing and means to discharge hot burner gases axially into said combustion section, fume inlet means into said housing and to said combustion section with passageway means to the latter entirely surrounding said means discharging the hot burner gases, gas pervious catalyst means in at least a peripheral portion of the down-stream section of said cylindrical-form partitioning, and passageway means in interconnection with one face of the catalyst means from the combustion section whereby the fume stream being treated may be passed in a radial type flow through said catalyst means, and treated gas outlet means from the opposing face of the latter and from said housing.
  • the incineration unit of claim 1 further characterized in that an internal transverse partitioning means extends across said combustion section whereby the fume stream and hot combustion gases will be passed radially inward through the gas pervious catalyst means.
  • the incineration unit of claim 1 further characterized in that said internal combustion section is open and coextensive with the interior of said gas pervious catalyst means and the fume stream is passed radially outwardly through said catalyst means.
  • the incineration unit of claim 4 further characterized in that said treated gas outlet means from said heat exchange section and from said housing is peripherally adjacent the preheated gas section of said housing and at the opposite end thereof with respect to the gas stream inlet to said housing whereby there is a flow of the treated gas stream within said heat exchange section which is substantially opposite to the gas flow within'the internal combustion section of the unit.

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  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Incineration Of Waste (AREA)
US428640A 1972-06-29 1973-12-26 Recuperative form of thermal-catalytic incinerator Expired - Lifetime US3898040A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US428640A US3898040A (en) 1972-06-29 1973-12-26 Recuperative form of thermal-catalytic incinerator
BE143447A BE814000A (fr) 1972-06-29 1974-04-22 Incinerateur thermo-catalytique

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US00267328A US3806322A (en) 1972-06-29 1972-06-29 Recuperative form of catalytic-thermal incinerator
US428640A US3898040A (en) 1972-06-29 1973-12-26 Recuperative form of thermal-catalytic incinerator

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Cited By (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4054418A (en) * 1975-11-10 1977-10-18 E. I. Du Pont De Nemours And Company Catalytic abatement system
FR2398260A1 (fr) * 1977-07-21 1979-02-16 Zink Co John Joint moleculaire, notamment pour torches de brulage de gaz residuaires
EP0040690A1 (fr) * 1980-04-14 1981-12-02 KATEC, Katalytische Lufttechnik Betz GmbH & Co. Dispositif pour la combustion de matières oxydables dans les gaz d'échappement
EP0047346A1 (fr) * 1980-09-01 1982-03-17 John Zink Company Elimination d'oxydes azotiques et récupération de chaleur dans un dispositif combiné
US4400356A (en) * 1982-02-01 1983-08-23 United Technologies Corporation Combustion catalyst bed
US4415537A (en) * 1982-02-01 1983-11-15 United Technologies Corporation Catalytic combustor
US4548579A (en) * 1983-08-01 1985-10-22 Blu-Surf, Inc. Compound reducing oven
US4666677A (en) * 1985-10-24 1987-05-19 Continental Thermal Design, Inc Pollution control device
US4771707A (en) * 1983-05-12 1988-09-20 Haden Schweitzer Corporation Fume incineration system for paint drying oven
US4850857A (en) * 1985-09-10 1989-07-25 Katec Betz Gmbh & Co. Apparatus for the combustion of oxidizable substances suspended in a carrier gas
US5145362A (en) * 1990-03-10 1992-09-08 H. Krantz Gmbh & Co. Apparatus for burning pollutants contained in a carrier flow
US5161966A (en) * 1990-03-10 1992-11-10 H. Krantz Gmbh & Co. Method and apparatus for burning a pollutants contained in a carrier flow
USH1189H (en) 1991-07-08 1993-05-04 The United States Of America As Represented By The Secretary Of The Navy Method and apparatus for destroying certain chemical and biological warfare agents
US5275115A (en) * 1993-03-12 1994-01-04 Reagan Houston Fume incinerator with vacuum baffle
US5286459A (en) * 1992-07-30 1994-02-15 Feco Engineered Systems, Inc. Multiple chamber fume incinerator with heat recovery
US5326537A (en) * 1993-01-29 1994-07-05 Cleary James M Counterflow catalytic device
US5460511A (en) * 1994-05-04 1995-10-24 Grahn; Dennis Energy efficient afterburner
US5516499A (en) * 1994-03-08 1996-05-14 W. R. Grace & Co.-Conn. Process for thermal VOC oxidation
US5601789A (en) * 1994-12-15 1997-02-11 W. R. Grace & Co.-Conn. Raw gas burner and process for burning oxygenic constituents in process gas
US5609829A (en) * 1993-04-27 1997-03-11 Comenco Systems Inc. Catalytic/thermal convertor unit
US5609833A (en) * 1994-12-15 1997-03-11 W. R. Grace & Co.-Conn. Process and apparatus for burning oxygenic constituents in process gas
US5643544A (en) * 1995-04-28 1997-07-01 Applied Web Systems, Inc. Apparatus and method for rendering volatile organic compounds harmless
WO1997030275A1 (fr) * 1996-02-15 1997-08-21 Atmi Ecosys Corporation Dispositif et procede d'oxidation catalytique sur le lieu d'utilisation pour le traitement de flux gazeux charges de composes organiques volatiles
US5735680A (en) * 1997-03-13 1998-04-07 Applied Web Systems, Inc. Fume incineration
US5762880A (en) * 1996-12-16 1998-06-09 Megtec Systems, Inc. Operational process and its improved control system of a secondary air burner
WO1998029181A1 (fr) * 1996-12-31 1998-07-09 Atmi Ecosys Corporation Systeme de traitement d'un flux de gaz d'effluent permettant un traitement d'oxydation des gaz d'effluents provenant de la fabrication de semi-conducteurs
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
US6138586A (en) * 1998-03-03 2000-10-31 Utec Luftreinigung + Warmeruckgewinnung-Anlagenbau GmbH Method and device for incineration of exhaust gases
US6146007A (en) * 1998-03-20 2000-11-14 Cedarapids Inc. Asphalt plant having centralized media burner and low fugitive emissions
US6423284B1 (en) 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
US6730272B2 (en) * 1996-08-21 2004-05-04 Ewe Aktiengesellschaft In-line gas pre-heating
US20050145342A1 (en) * 2003-04-10 2005-07-07 Unilever Home & Personal Care Usa, Division Of Conopco, Inc. Process for production of cotton swabs
US20070062423A1 (en) * 2004-05-26 2007-03-22 Rune Johansson Toilet system
US7569193B2 (en) 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7700049B2 (en) 2005-10-31 2010-04-20 Applied Materials, Inc. Methods and apparatus for sensing characteristics of the contents of a process abatement reactor
US7736599B2 (en) 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
US10557391B1 (en) * 2017-05-18 2020-02-11 Advanced Cooling Technologies, Inc. Incineration system and process
CN112344355A (zh) * 2020-11-11 2021-02-09 山东天智信息科技有限公司 一种工业废气处理用催化燃烧装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806322A (en) * 1972-06-29 1974-04-23 Universal Oil Prod Co Recuperative form of catalytic-thermal incinerator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3806322A (en) * 1972-06-29 1974-04-23 Universal Oil Prod Co Recuperative form of catalytic-thermal incinerator

Cited By (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4054418A (en) * 1975-11-10 1977-10-18 E. I. Du Pont De Nemours And Company Catalytic abatement system
FR2398260A1 (fr) * 1977-07-21 1979-02-16 Zink Co John Joint moleculaire, notamment pour torches de brulage de gaz residuaires
US4157239A (en) * 1977-07-21 1979-06-05 John Zink Company Molecular seal improvement action
EP0040690A1 (fr) * 1980-04-14 1981-12-02 KATEC, Katalytische Lufttechnik Betz GmbH & Co. Dispositif pour la combustion de matières oxydables dans les gaz d'échappement
EP0047346A1 (fr) * 1980-09-01 1982-03-17 John Zink Company Elimination d'oxydes azotiques et récupération de chaleur dans un dispositif combiné
US4400356A (en) * 1982-02-01 1983-08-23 United Technologies Corporation Combustion catalyst bed
US4415537A (en) * 1982-02-01 1983-11-15 United Technologies Corporation Catalytic combustor
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