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US3303320A - Vapor-coating apparatus - Google Patents

Vapor-coating apparatus Download PDF

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Publication number
US3303320A
US3303320A US562066A US56206666A US3303320A US 3303320 A US3303320 A US 3303320A US 562066 A US562066 A US 562066A US 56206666 A US56206666 A US 56206666A US 3303320 A US3303320 A US 3303320A
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United States
Prior art keywords
plates
electron
crucibles
magnetic field
electron guns
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Expired - Lifetime
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US562066A
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English (en)
Inventor
Muller Paul
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WC Heraus GmbH and Co KG
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WC Heraus GmbH and Co KG
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Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching

Definitions

  • the present invention relates to a vapor-coating apparatus in which a material is heated and vaporized in a vacuum chamber by an electron beam and the vapor is deposited upon an object, and this application is a continuation of my co-pending application Serial No. 307,954 which was filed September 10, 1963.
  • Apparatus of this general type employing electron beams for heating the material to be vaporized are known for some time. They have several very important advantages over vapor-coating apparatus which employ other heating means, for example, by electric resistance.
  • Heating the material to be vaporized by resistance heating in long vaporizer crucibles strong heating currents are passed through the liquid material and the outer circuit exerts electrodynamic forces upon the material which very easily cause the liquid material to creep upwardly along the walls and then to flow out of the crucible. Since these electrodynamic forces do not occur when the material is heated in the long vaporizer crucibles by means of electron beams, such spilling of material is avoided.
  • the localized, spotlight heating of the material by means of an electron beam results in a very quick vaporization which tends to prevent a dissociation or disproportionation of certain compounds which occurs when the heating occurs slowly by resistance heating and which may be very undesirable in the coating produced.
  • the electron beams which are used for vaporizing apparatus are generally focused so as to be of a substantially cylindrical cross section. Such an electron beam heats practically only the relatively small spot where it hits upon the material to be vaporized so that a vaporization also occurs only at this small spot.
  • transverse electron guns In order to heat a larger surface area of the material, so-called transverse electron guns have already been developed which instead of substantially cylindrical electron beams produce beams of a substantially rectangular ribbonlike cross section for heating metals to the melting point.
  • Such ribbonlike beams are superior to the cylindrical beams insofar as they permit a vaporizer crucible to be heated longitudinally for a certain distance. These distances are, however, still insufiicient for properly coating wider bands of material by vapor-deposition.
  • the invention essentially consists in mounting a plurality of transverse electron guns in a row in a magnetic field which is formed by a pair of long plates which form or are provided with pole pieces. These electron guns are spaced at relatively short distances from each other for shooting electron beams either into a corresponding number of elongated vaporizer crucibles or into one long vaporizer tray.
  • FIGURE 1 shows a plan view of an apparatus according to the invention in which the beam tension or beam velocity in electron-volts and the strength of the magnetic flux are coordinated in such a manner that each electron beam will impinge upon the material in the vaporizer crucible adjacent to the respective electron gun;
  • FIGURE 2 shows a cross section which is taken along the line aa of FIGURE 1;
  • FIGURE 3 shows a modification of the invention in which each electron beam impinges upon the material in the vaporizer crucible following the next crucible;
  • FIGURE 4 shows a view, partly in cross section, of an apparatus with exchangeable pole pieces
  • FIGURE 5 shows a preferred embodiment of the invention with inclined magnetic pole plates
  • FIGURE 6 shows a partial elevation of an apparatus with arcuate control elements
  • FIGURE 7 shows a cross section which is taken along the line b-b of FIGURE 6; while FIGURE 8 shows the application of the invention to a single long vaporizer tray.
  • the apparatus essentially comprises a rotatable roller 1 which is mounted within the outer housing of a vaporizing chamber, not shown, which may be evacuated and opened in a conventional manner.
  • This roller 1 carries the band or web of material 2 which is to be coated by vapor-deposition and which is conveyed by a mechanism which may also be of a conventional type and is therefore not illustrated.
  • Underneath the roller 1 a series of vaporizer crucibles 4 are located, the longitudinal axes of which extend transverse to the longitudinal axis of roller 1.
  • the crucibles 4 are preferably spaced from the roller 1 at a distance which is at least equal to the distance between the adjacent crucibles.
  • transverse electron guns 5 are mounted from which electron beams 6 emerge first in the general direction toward roller 1. These ribbon-like beams 6 are then deflected by the magnetic field H in a manner so as to impinge upon the material in the crucible 4 adjacent to the respective gun 5 and thus to heat and vaporize this material.
  • the magnetic field H is produced by a pair of plates 7 which consist, for example, of soft iron and are magnetized by the coils 8 and the magnet yokes 9. These magnet yokes 9 are connected to the plates 7 by yoke arms 10 which may be provided at different points and of different cross-sectional sizes so as to insure that the magnetic field will be uniform.
  • the magnetic field and the beam tension or the beam velocity in electron-volts may also be coordinated in the manner as illustrated in FIGURE 3 so that the electron beam 12 of each gun 5 will impinge upon the material in the vaporizer crucible 4 following the next crucible or in a crucible which is still more remote from the respective gun 5.
  • An apparatus for coating wide bands of materials by vapor deposition in a vacuum comprising a plurality of elongated transversely disposed electron guns and a like number of transversely disposed elongated crucibles, each of which is adapted to contain a certain material to be vaporized, said electron guns and said crucibles being alternately arranged in spaced relation to each other in a longitudinally extending row, means for producing a magnetic field comprising a pair of magnetic yoke means and a pair of elongated plates forming pole pieces, said plates being disposed in spaced opposed relation to each other one on each side of said longitudinally extending row and extending from end to end of said row, connecting means by which said plates are connected to said yokes, said plates and said connecting means being effective to produce a substantially uniform magnetic field between said plates throughout the length thereof, each of said electron guns being adapted to shoot a ribbon-like electron beam into one of said crucibles to heat and vaporize the
  • said connecting means comprises a plurality of spaced parallel yoke arms, one of said arms being connected to and between the mid-section of each of said plates and one of said yokes, and other of said arms being connected to and between each of said plates and one of said yokes between the mid-section of each plate and each end thereof, the cross-sectional area of the said other of said arms being less than the cross-sectional area of the said one of said arms.
  • said connecting means comprises a pair of yoke arms one of which is connected between the mid-section of each of said plates and one of said yokes; and in which said plates converge between the mid-sections thereof and each of the ends thereof.
  • An apparatus for coating wide bands of material by vapor deposition in a vacuum comprising a plurality of transversely disposed electron guns which are arranged in spaced relation to each other in a longitudinally extending row, means which is disposed in spaced relation to said electron guns and is adapted to contain a certain material to be vaporized, means for producing a magnetic field comprising a pair of magnetic yoke means and a pair of elongated plates forming pole pieces, said plates being disposed in spaced opposed relation to each other one on each side of said longitudinally extending row and extending from end to end of said row, connecting means by which said plates are connected to said yokes, said plates and said connecting means being effective to produce a uniform magnetic field between said plates throughout the length thereof, each of said electron guns being adapted to shoot a ribbon-like electron beam into said container means to heat and vaporize the material therein, the velocity of said electron beams and the strength of said magnetic field being coordinated in such a manner that the electron beam of each gun is deflected so as
  • An apparatus for coating wide bands of material by vapor deposition in a vacuum comprising a plurality of transversely disposed electron guns which are arranged in spaced relation to each other in a longitudinally extending row, an elongated longitudinally extending tray which is disposed below said longitudinally extending row of electron guns in vertically spaced relation thereto and extends from end to end of said row and is adapted to contain a certain material to be vaporized, means for producing a magnetic field comprising a pair of magnetic yoke means and a pair of elongated plates forming pole pieces, said plates being disposed in spaced relation to each other one on each side of said longitudinally extending row and extending from end to end of said row, connecting means by which said plates are connected to said yokes, said plates and said connecting means being effective to produce a substantially uniform magnetic field between said plates throughout the length thereof, each of said electron guns being adapted to shoot a ribbonlike electron beam into said container means to heat and vaporize the material therein, the velocity of said electron beams
  • said connecting means comprises a plurality of spaced parallel yoke arms, one of said arms being connected to and between the mid-section of each of said plates and one of said yokes, and other of said arms being connected to and between each of said plates and one of said yokes between the mid-section of each plate and each end thereof, the cross-sectional area of the said other of said arms being less than the cross-sectional area of the said one of said arms.
  • said connecting means comprises a pair of yoke arms one of which is connected between the mid-section of each of said plates and one of said yokes; and in which said plates converge between the mid-sections thereof and each of the ends thereof.
  • An apparatus for coating wide bands of material by vapor deposition as defined by claim 1 in which the opposed faces of said pair of plates are each provided with a plurality of pairs of spaced concentric control elements by which the electron beams emitted by each of said electron guns is guided into an adjacent crucible.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
US562066A 1962-09-25 1966-06-21 Vapor-coating apparatus Expired - Lifetime US3303320A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH46998A DE1199097B (de) 1962-09-25 1962-09-25 Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen

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US3303320A true US3303320A (en) 1967-02-07

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US562066A Expired - Lifetime US3303320A (en) 1962-09-25 1966-06-21 Vapor-coating apparatus

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US (1) US3303320A (de)
DE (1) DE1199097B (de)
FR (1) FR1369712A (de)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379819A (en) * 1966-09-15 1968-04-23 Filmtech Associates Inc Electron gun for evaporating or sublimating material in a vacuum environment
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3450824A (en) * 1966-12-16 1969-06-17 Air Reduction Method and apparatus for producing and directing an electron beam
US3467057A (en) * 1966-07-27 1969-09-16 Hitachi Ltd Electron beam evaporator
US3474218A (en) * 1966-01-10 1969-10-21 Air Reduction Electron beam conditioning ingot and slab surfaces
US3488426A (en) * 1966-05-03 1970-01-06 Bayer Ag Apparatus for uniform vaporisation of high melting materials in particular quartz
US3535489A (en) * 1968-05-03 1970-10-20 Smith Corp A O Electron beam welding apparatus
US3575132A (en) * 1968-10-25 1971-04-13 Bethlehem Steel Corp Vapor deposition apparatus
US4524717A (en) * 1982-04-20 1985-06-25 Bakish Materials Corp. Electron beam strip-coating apparatus
US4835789A (en) * 1987-11-16 1989-05-30 Hanks Charles W Electron-beam heated evaporation source
WO1990014682A1 (en) * 1989-05-22 1990-11-29 Hanks Charles W Magnetic structure for electron-beam heated evaporation source
US5622564A (en) * 1995-01-20 1997-04-22 Compu-Vac Systems, Inc. Metallizing apparatus
US6175585B1 (en) * 1999-07-15 2001-01-16 Oregon Metallurgical Corporation Electron beam shielding apparatus and methods for shielding electron beams
US20050092253A1 (en) * 2003-11-04 2005-05-05 Venkat Selvamanickam Tape-manufacturing system having extended operational capabilites

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
US3036549A (en) * 1957-05-08 1962-05-29 Sumitomo Electric Industries Apparatus for vacuum evaporation of metals
US3043728A (en) * 1958-03-17 1962-07-10 Nat Res Corp Apparatus and process for metallic vapor coating
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3170019A (en) * 1962-01-15 1965-02-16 Stauffer Chemical Co Electron beam furnace
US3172007A (en) * 1962-01-15 1965-03-02 Stauffer Chemical Co Folded filament beam generator
US3183563A (en) * 1962-06-05 1965-05-18 Temescal Metallurgical Corp Apparatus for continuous foil production by vapor deposition

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1072451B (de) * 1955-07-06 1960-06-02 English Electric Valve Company Limited, London Vorrichtung zur Herstellung von Überzügen durch Vakuumaufdampfen

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
US3036549A (en) * 1957-05-08 1962-05-29 Sumitomo Electric Industries Apparatus for vacuum evaporation of metals
US3043728A (en) * 1958-03-17 1962-07-10 Nat Res Corp Apparatus and process for metallic vapor coating
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
US3170019A (en) * 1962-01-15 1965-02-16 Stauffer Chemical Co Electron beam furnace
US3172007A (en) * 1962-01-15 1965-03-02 Stauffer Chemical Co Folded filament beam generator
US3183563A (en) * 1962-06-05 1965-05-18 Temescal Metallurgical Corp Apparatus for continuous foil production by vapor deposition

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
US3474218A (en) * 1966-01-10 1969-10-21 Air Reduction Electron beam conditioning ingot and slab surfaces
US3488426A (en) * 1966-05-03 1970-01-06 Bayer Ag Apparatus for uniform vaporisation of high melting materials in particular quartz
US3467057A (en) * 1966-07-27 1969-09-16 Hitachi Ltd Electron beam evaporator
US3379819A (en) * 1966-09-15 1968-04-23 Filmtech Associates Inc Electron gun for evaporating or sublimating material in a vacuum environment
US3450824A (en) * 1966-12-16 1969-06-17 Air Reduction Method and apparatus for producing and directing an electron beam
US3497602A (en) * 1966-12-16 1970-02-24 Air Reduction Apparatus for producing and directing an electron beam in an electron beam furnace
US3446934A (en) * 1968-01-30 1969-05-27 Air Reduction Electron beam heating apparatus
US3535489A (en) * 1968-05-03 1970-10-20 Smith Corp A O Electron beam welding apparatus
US3575132A (en) * 1968-10-25 1971-04-13 Bethlehem Steel Corp Vapor deposition apparatus
US4524717A (en) * 1982-04-20 1985-06-25 Bakish Materials Corp. Electron beam strip-coating apparatus
US4835789A (en) * 1987-11-16 1989-05-30 Hanks Charles W Electron-beam heated evaporation source
WO1990014682A1 (en) * 1989-05-22 1990-11-29 Hanks Charles W Magnetic structure for electron-beam heated evaporation source
US5622564A (en) * 1995-01-20 1997-04-22 Compu-Vac Systems, Inc. Metallizing apparatus
US6175585B1 (en) * 1999-07-15 2001-01-16 Oregon Metallurgical Corporation Electron beam shielding apparatus and methods for shielding electron beams
WO2001006537A1 (en) * 1999-07-15 2001-01-25 Ati Properties, Inc. Electron beam shielding apparatus and methods for shielding electron beams
AU776095B2 (en) * 1999-07-15 2004-08-26 Ati Properties, Inc. Electron beam shielding apparatus and methods for shielding electron beams
US20050092253A1 (en) * 2003-11-04 2005-05-05 Venkat Selvamanickam Tape-manufacturing system having extended operational capabilites
US20060231033A1 (en) * 2003-11-04 2006-10-19 Superpower, Inc. Tape-manufacturing system having extended operational capabilities
US7914848B2 (en) 2003-11-04 2011-03-29 Superpower, Inc. Tape-manufacturing system having extended operational capabilities

Also Published As

Publication number Publication date
DE1199097B (de) 1965-08-19
FR1369712A (fr) 1964-08-14

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