US3198209A - Diffusion vacuum pump system apparatus - Google Patents
Diffusion vacuum pump system apparatus Download PDFInfo
- Publication number
- US3198209A US3198209A US240874A US24087462A US3198209A US 3198209 A US3198209 A US 3198209A US 240874 A US240874 A US 240874A US 24087462 A US24087462 A US 24087462A US 3198209 A US3198209 A US 3198209A
- Authority
- US
- United States
- Prior art keywords
- vacuum
- diffusion
- sealed
- pump
- pumping fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009792 diffusion process Methods 0.000 title claims description 98
- 230000004888 barrier function Effects 0.000 claims description 70
- 239000012530 fluid Substances 0.000 claims description 69
- 238000005086 pumping Methods 0.000 claims description 66
- 238000004891 communication Methods 0.000 claims description 12
- 238000013508 migration Methods 0.000 claims description 12
- 230000005012 migration Effects 0.000 claims description 12
- 239000011343 solid material Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 description 25
- 239000007789 gas Substances 0.000 description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 238000001816 cooling Methods 0.000 description 9
- 239000004809 Teflon Substances 0.000 description 8
- 229920006362 Teflon® Polymers 0.000 description 8
- 239000004215 Carbon black (E152) Substances 0.000 description 6
- 229930195733 hydrocarbon Natural products 0.000 description 6
- 150000002430 hydrocarbons Chemical class 0.000 description 6
- 239000000112 cooling gas Substances 0.000 description 5
- 239000000498 cooling water Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 239000012815 thermoplastic material Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 229920006359 Fluoroplast Polymers 0.000 description 2
- 229920004459 Kel-F® PCTFE Polymers 0.000 description 2
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical compound FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 2
- 238000010943 off-gassing Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004035 construction material Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
- 229920001169 thermoplastic Polymers 0.000 description 1
- 239000004416 thermosoftening plastic Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F9/00—Diffusion pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S55/00—Gas separation
- Y10S55/15—Cold traps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/6851—With casing, support, protector or static constructional installations
- Y10T137/7036—Jacketed
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/85978—With pump
- Y10T137/86083—Vacuum pump
Definitions
- This invention is related to diffusion pump vacuum systems and more particularly to a device for preventing the migration of the diffusion mememping fluid in such vacuum systems.
- cooling traps positioned between the diffusion pump and the vacuum chamber being evacuated. These traps are expected to maintain on the high vacuum side of the system a diffusion pumping fluid vapor partial pressure corresponding to the pumping fluid vapor pressure at the temperature of the cooling traps cooled surfaces. Such partial pressures will in the case of a water cooled trap amount to only 10" Torr While for a condensed gas (for example, nitrogen) cooled trap the partial pressure will be completely negligible with respect to the total pressure produced by outgassing from the vacuum system walls as well as the back diffusion of hydrogen from the diffusion pump.
- condensed gas for example, nitrogen
- an operating diffusion pump vacuum system with a pre heat-ed high vacuum chamber will, after a short period of time, demonstrate a slow rise in pressure despite the fact that the cooling traps are functioning perfectly.
- the rising pressure has been shown to result from an increasing partial pressure of the diffusion pump operating fluid and/or its decomposition products.
- An exacting study of the construction materials used in such high vacuum system-s shows that the creepage of the pumping fluid in a thin film from the diffusion pump walls along the relatively warm internal walls of the cooling traps into the high vacuum chamber is the cause of the rise in pumping fluid partial pressure.
- One feature of this invention is the provision in a diffusion vacuum pump system of a pumping fluid creepage barrier positioned so as to interrupt all wall surface paths between the diffusion pump and the high vacuum chamber wherein the pumping fluid creepage barrier is com- 3,1932% Patented Aug. 3, 1965 posed of a material which will not be wetted by the diffusion pumping fluid.
- Another feature of this invention is the provision of a diffusion vacuum pump system of the above featured type wherein the pumping fluid creepage barrier is composed of a solid material having a surface energy less than that of the diffusion pumping fluid
- Another feature of this invention is the provision of a diffusion vacuum pump system of the above featured type wherein the pumping fluid creepage barrier is composed of a solid material having a surface energy less than 25 dynes per centimeter.
- Another feature of the present invention is the provision of a diffusion vacuum pump system of the above featured type wherein the pumping fluid creepage barrier is composed of a condensed fluorinated hydrocarbon material such as, for example, the materials known by the trade names Teflon, Chemelec-300, Fluoroflex-T, Fluoroplast, Gering TRW, Polypenco-T, and Kel-F.
- a condensed fluorinated hydrocarbon material such as, for example, the materials known by the trade names Teflon, Chemelec-300, Fluoroflex-T, Fluoroplast, Gering TRW, Polypenco-T, and Kel-F.
- FIG. 1 is a schematic sectional elevation view of a diffusion vacuum pump system according to this invention
- FIG. 2 is a partial sectional plan view of the system shown in FIG. 1;
- FIG. 3 is an enlarged partial sectional view of the pumping fluid creepage barrier shown in FIG. 1;
- FIG. 4 is an enlarged partial sectional. view of another pumping fluid creepa-ge barrier embodiment of the subject invention. 1
- FIGS. 1-3 thereis shown a diffusion vacuum pump system 11 having a diffusion pump 12 con nected to a vacuum sealed high vacuum chamber 13 to be evacuated.
- the connections are made in a vacuum tight manner so that the inner walls 16 and 17 of the liqu-id nitrogen 14 and Water cooled trap 15, respectively, form a continuous vacuum wall 20 between the diffusion pump 12 and the high vacuum chamber 13.
- annular gasket 21 Maintaining the annular gasket 21 in position is an annular retaining ring 22 which projects into the internal area joining the liquid nitrogen trap 14 and the water cooled trap 15. Attached to the lower projecting edge 23 of the retaining ring 22 by an annular space-r 24 and a plurality of bolts 25 is the annular pumping fluid creepage barrier 26.
- annular creepage barrier 26 has a rectangular cross section with a width which is several times its height.
- the outer edge of the cree-page barrier 26 is attached to the retaining ring 22 While the inner portion of the barrier extends into the internal area joining the liquid nitrogen trap 14 and the Water cooled trap 15.
- the present invention utilizes for the creepage barrier 26 a material which will not be Wetted by the pumping fluid. In this way the migration or creepage of pumping fluid, along the vacuum systems internal wall can be effectively stopped.
- FIGS. 13 The prefered embodiment of the invention shown in FIGS. 13 is particularly well suited for the function since since the internal projection of rectangular cross sectional creepage barrier 26 considerably lengthens the non- Wettable material path which must be traversed by the creeping pumping fluid. Also the extending spacer ring 24 may also be made of such a material to further extend the barrier length.
- the positioning of the creepage barrier 26 between the condensed gas trap 14 and the water cooled trap is also of considerable advantage. Thi placement provides the barrier in an area where most of the potential barrier bypassing pumping fluid vapor has been obstructed by the water cooled trap 15 while still providing a long arduou path through condensed gas trap 14 for any vapor evaporating from the migrating surface film stopped by the creepage barrier 25.
- FIG. 4 shows a partial view of another preferred embodiment of thi invention wherein components identical to those shown in FIG. 1 are given corresponding identical numbers.
- the continuous annular creepage barrier 31 shown is of L shape with one arm 32 attached to retaining ring 22 and the other arm 33 extending above the retaining ring 22.
- This embodiment has the advantage that projecting arm 33 together with cold surface 34 completely shields the relatively warm internal surface 16 of the condensed gas trap 14 from evaporated pumping fluid vapor.
- Condensed fluorinated hydrocarbon materials have proven particularly effective as diffusion pump oil creepage barriers. These materials include, for example, the products sold under the trade name Teflon, Chemelec-300, Fluoro flex-T, Fluoroplast, Goring TRW, Polypenco-T and Kel-F.
- thermoplastic Teflon which is a registered trade name of E. I. du Pont de Nemours & Co.
- the chemical formula for this material is (-CF CF and it exhibits an extremely low surface energy against air of about 6 dynes per centimeter. This material also offers other good high vacuum properties such as a low vapor pressure and outgassing.
- the creepage barrier 2-6 could be positioned in other parts of the system, the
- barrier could be constructed of other materials and then coated with a non-wettable material, etc.
- a vacuum system apparatus comprising a diffusion vacuum pump adapted to utilize a pumping fluid, a sealed vacuum chamber adapted to be evacuated by said diffusion vacuum pump, a vacuum sealed tubulation connected positioned so, as to interrupt all paths between said diffusion vacuum pump and said sealed vacuum chamber along the internal surface of said vacuum sealed tubulation and wherein said creepage barrier is composed of a solid material not wetted by the pumping fluid utilized in said diffusion pump thereby effectively preventing surface migration of the pumping fluid between said vacuum diffusion pump and said sealed vacuum chamber.
- said creepage barrier is composed of a material having a surface energy in air less than that of the pumping fluid.
- said creepage barrier is composed of a material which has a surface energy in air of less than 25 dynes per centimeter.
- said creepage barrier is composed of the thermoplastic material sold under the trade name Teflon.
- said vaccum sealed tubulation includes a trap adapted for use with compressed cooling gas positioned adjacent said sealed vacuum chamber and a trap adapted for use with cooling water positioned adjacent said vacuum diffusion pump, and said creepage barrier is an annular ring in contact with the internal surface of said vacuum sealed tubulation and positioned between said traps.
- a vacuum system apparatus comprising a diffusion vacuum pump adapted to utilize a pumping fluid, a sealed vacuum chamber adapted to be evacuated by said diffusion vacuum pump, a vacuum sealed tubulation connected between said diffusion vacuum pump and said sealed vacuum chamber so as to provide for gas communication therebetween, a creepage barrier including a three dimensional portion which extends into the volume enclosed by said vacuum sealed tubulation and thereby serves to shield said vacuum chamber from the pumping fluid which evaporates in said diffusion pump, said creepage barrier positioned so as to interrupt all paths between said diffusion vacuum pump and said sealed vacuum chamber v along the internal surface of said vacuum sealed tubulation, and wherein said creepage barrier is composed of the thermoplastic material sold under the trade name Teflon thereby effectively preventing migration of the pumping fluid between said diffusion vacuum pump and said sealed vacuum chamber.
- said vacuum sealed tubulation includes a trap adapted for use with compressed cooling gas positioned adjacent said sealed vacuum chamber and a trap adapted for use with cooling water positioned adjacent said vacuum diffusion pump, and said creepage barrier comprises an annular ring in contact with the internal surface of said vacuum sealed tubulation and positioned between said traps.
- a vacuum system apparatus comprising a diffusion vacuum pump adapted to utilize a pumping fluid, a sealed vacuum chamber adapted to be evacuated by said diffusion vacuum pump, a vacuum sealed tubulation connected between said diffusion vacuum pump and said sealed vacuum chamber so as to provide for gas communication therebetween, a creepage barrier including a three dimensional portion which extends into the volume enclosed .by said vacuum sealed tubulation and thereby serves to shield said vacuumchamber from the pumping fluid which evaporates in said diffusion pump, said creepage barrier positioned so as to interrupt all paths between said diffusion vacuum pump and said sealed vacuum chamber along the internal surface of said vacuum sealed tubulation and wherein said creepage barrier is composed of a compressed fluoronated hydrocarbon material so as to effectively prevent migration of the pumping fluid between said vacuum diffusion pump and said sealed vacuum chamber.
- said vacuum sealed tubulation includes a trap adapted for use with compressed cooling gas positioned adjacent said sealed vacuum chamber and a trap adapted for use with cooling water positioned adjacent said vacuum diffusion pump, and said creepage barrier comprises an annular ring in contact with the internal surface of said vacuum sealed tubulation and positioned between said traps.
- a vacuum system apparatus comprising a diffusion vacuum pump adapted to utilize a pumping fluid, a sealed vacuum chamber adapted to be evacuated by said diffusion vacuum pump, a vacuum sealed tubulation connected between said diffusion vacuum pump and said sealed vacuum chamber so as to provide for gas communication therebetween, a creepage barrier including a three dimensional portion which extends into the volume enclosed by said vacuum sealed tubulation and thereby serves to shield said vacuum chamber from the pumping fluid which evaporates in said diffusion pump, said creepage barrier positioned so as to interrupt all paths between said diffusion vacuum pump and said sealed vacuum chamber along the internal surface of said vacuum sealed tubulation and wherein said creepage barrier is composed of a material having a surface energy of less than 25 dynes per centimeter so as to effectively prevent migration of the pumping fluid between said vacuum diffusion pump and said sealed vacuum chamber.
- said vacuum sealed tubulation includes a trap adapted for use with compressed cooling gas positioned adjacent said sealed vacuum chamber and a trap adapted for use with cooling water positioned adjacent said vacuum diffusion pump, and said creepage barrier comprises an annular ring in contact with the internal surface of said vacuum sealed tubulation and positioned between said traps.
- a vacuum system apparatus comprising a diffusion vacuum pump adapted to utilize a pumping fluid, a sealed vacuum chamber adapted to be evacuated by said diffusion vacuum pump, a vacuum sealed tubulation connected between said diffusion vacuum pump and said sealed vacuum chamber so as to provide for gas communication therebetween, a creepage barrier including a three dimensional portion which extends into the volume enclosed by said vacuum sealed tubulation and thereby serves to shield said vacuum chamber from the pumping fluid which evaporates in said diffusion pump, said creepage barrier positioned so as to interrupt all paths between said diffusion vacuum pump and said sealed vacuum chamber along the internal surface of said vacuum sealed tubulation, and wherein said creepage barrier is composed of a material having a surface energy in air less than that of the pumping fluid so as to effectively prevent migration of the pumping fluid between said diffusion vacuum pump and said sealed vacuum chamber.
- said vacuum sealed tubulation includes a trap adapted for use with compressed cooling gas positioned adjacent said sealed vacuum chamber and a trap adapted for use with cooling water positioned adjacent said vacuum diffusion pump, and said creepage barrier comprises an annular ring in contact with the internal surface of said vacuum sealed tubulation and positioned between said traps.
- a device for use in diffusion vacuum pump systems including a diffusion vacuum pump adapted for use with a pumping fluid, a vacuum chamber to be evacuated, and a vacuum sealed tubulation providing for gas communication therebetween, said device comprising a creepage barrier adapted for placement in the diffusion vacuum pump system in such a manner as to interrupt all paths between the diffusion vacuum pump and the vacuum chamber along the internal surface of the vacuum sealed tubulation, said creepage barrier comprising a three dimensional portion adapted to extend into the volume enclosed by the vacuum sealed tubulation and wherein said creepage barrier is composed of a material not wetted by the pumping fluid.
- a device for use in diffusion vacuum pump systems including a diffusion vacuum pump adapted for use with a pumping fluid, a vacuum chamber to be evacuated, and a vacuum sealed tubulation providing for gas communication therebetween, said device comprising a creepage barrier adapted for placement in the diffusion vacuum pump system in such a manner as to interrupt all paths between the diffusion vacuum pump and the vacuum chamber along the internal surface of the vacuum sealed tubulation, said creepage barrier comprising a three d-imensional portion adapted to extend into the volume enclosed by the vacuum sealed tubulation and wherein said creepage barrier is composed of a material having a surface energy in air less than that of the pumping fluid.
- a device for use in diffusion vacuum pump systems including a diffusion vacuum pump adapted for use with a pumping fluid, a vacuum chamber to be evacuated, and a vacuum sealed tubulation providing for gas communication therebetween, said device comprising a creepage barrier adapted for placement in the diffusion vacuum pump system in such a manner as to interrupt all paths between the diffusion vacuum pump and the vacuum chamber along the internal surfaceof the vacuum sealed tubulation, said creepage barrier comprising a three dimensional portion adapted to extend into the volume enclosed by the vacuum sealed tubulation and wherein said creepage barrier is composed of a material which has a surface energy in air of less than 25 dynes per centimeter.
- a device for use in diffusion vacuum pump systems including a diffusion vacuum pump adapted for use with a pumping fluid, a vacuum chamber to be evacuated, and a Vacuum sealed tubulation providing for gas communication therebetween, said device comprising a creepage barrier adapted for placement in the diffusion vacuum pump system in such a manner as to interrupt all paths between the diffusion vacuum pump and the vacuum chamber along the internal surface of the vacuum sealed tubulation, said creepage barrier comprising a three dimensional portion adapted to extend int-o the volume enclosed by the vacuum sealed tubulation and wherein said creepage barrier is made of a compressed fluorinated hydrocarbon material.
- a device for use in diffusion vacuum pump systems including a diffusion vacuum pump adapted for use with a pumping fluid, a vacuum chamber to be evacuated, and a vacuum sealed tubulation providing for gas communication therebetween, said device comprising a creepage barrier adapted for placement in the diffusion vacuum pump system in such a manner as to interrupt all paths between the diffusion vacuum pump and the vacuum chamber along the internal surface of the-vacuum sealed tubulation, said creepage barrier comprising a three dimensional portion adapted to extend into the volume enclosed by the vacuum sealed tubulation and wherein said creepage barrier is composed of the thermoplastic material sold under the trade name Teflon,
- a vacuum system apparatus comprising a diffusion vacuum pump adapted to utilize a pumping fluid, a sealed vacuum chamber adapted to be evacuated by said diffusion vacuum pump, a vacuum sealed tubulation connected between said diffusion vacuum pump and said sealed vacuum chamber so as to provide for gas communication therebetween, a creepage barrier located entirely within said vacuum sealed tubulation so as to be isolated from the atmosphere during periods in which said tubulation is maintained at reduced pressure, said creepage barrier including a three dimensional portion which extends into the volume enclosed by said vacuum sealed tubulation and positioned so as to interrupt all paths between said diffusion vacuum p ump and said sealed vacuum chamber along the internal surface of said vacuum sealed tubulation, and wherein said creepage barrier is composed of the thermoplastic material sold under the trade name Teflon thereby preventing surface migration of the pumping fluid between said diffusion vacuum pump and said sealed vacuum chamber.
- a creepage barrier located within said vacuum sea-led tubulation, said creepage barrier comprising a three dimensional portion positioned in the volume enclosed by said vacuum sealed tubulati-on thereby serving to shield said vacuum chamber from the pumping fluid which evaporates in said diffusion vacuum pump, and wherein said three dimensional portion is composed of a solid material not wetted by the pumping fluid utilized in said diflusion pump thereby effectively preventing surface migration of the pumping fluid in a direction towards said sealed vacuum chamber.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEL40565A DE1266919B (de) | 1961-11-29 | 1961-11-29 | Kriechbarriere zum Verhindern des Eindringens von Treibmittel und Vakuumanlage unterVerwendung einer solchen Kriechbarriere |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US3198209A true US3198209A (en) | 1965-08-03 |
Family
ID=7269100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US240874A Expired - Lifetime US3198209A (en) | 1961-11-29 | 1962-11-29 | Diffusion vacuum pump system apparatus |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3198209A (de) |
| CH (1) | CH401341A (de) |
| DE (1) | DE1266919B (de) |
| GB (1) | GB996130A (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3296810A (en) * | 1964-08-24 | 1967-01-10 | Nat Res Corp | High conductance cold trap for vacuum systems |
| US3399691A (en) * | 1966-08-15 | 1968-09-03 | Gen Electric | Liquid transfer system |
| US3478954A (en) * | 1967-11-30 | 1969-11-18 | Bendix Corp | Vacuum pump |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1202397A (fr) * | 1958-07-01 | 1960-01-11 | Radiologie Cie Gle | Perfectionnement aux pompes à jet de vapeur |
| FR1254532A (fr) * | 1960-01-14 | 1961-02-24 | Basses Pressions Lab Des | Pompe à diffusion perfectionnée pour ultra-vide |
| US3077638A (en) * | 1959-07-22 | 1963-02-19 | Westinghouse Electric Corp | Method for producing a sealing gasket |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE581133C (de) * | 1930-01-06 | 1933-07-21 | Ass Elect Ind | Kondensations- oder Diffusionsvakuumpumpe mit ringfoermigem Strahl |
| DE1083480B (de) * | 1953-05-26 | 1960-06-15 | Sulzer Ag | Kolbenkompressor |
| DE1028734B (de) * | 1957-02-09 | 1958-04-24 | Leybolds Nachfolger E | Vorrichtung zum Verhindern des Einstroemens von Daempfen in Hochvakuumraeume |
-
1961
- 1961-11-29 DE DEL40565A patent/DE1266919B/de active Pending
-
1962
- 1962-08-13 CH CH967862A patent/CH401341A/de unknown
- 1962-11-14 GB GB43038/62A patent/GB996130A/en not_active Expired
- 1962-11-29 US US240874A patent/US3198209A/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR1202397A (fr) * | 1958-07-01 | 1960-01-11 | Radiologie Cie Gle | Perfectionnement aux pompes à jet de vapeur |
| US3077638A (en) * | 1959-07-22 | 1963-02-19 | Westinghouse Electric Corp | Method for producing a sealing gasket |
| FR1254532A (fr) * | 1960-01-14 | 1961-02-24 | Basses Pressions Lab Des | Pompe à diffusion perfectionnée pour ultra-vide |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3296810A (en) * | 1964-08-24 | 1967-01-10 | Nat Res Corp | High conductance cold trap for vacuum systems |
| US3399691A (en) * | 1966-08-15 | 1968-09-03 | Gen Electric | Liquid transfer system |
| US3478954A (en) * | 1967-11-30 | 1969-11-18 | Bendix Corp | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| GB996130A (en) | 1965-06-23 |
| DE1266919B (de) | 1968-04-25 |
| CH401341A (de) | 1965-10-31 |
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