US20190145401A1 - Automated cross-phase pump and controller - Google Patents
Automated cross-phase pump and controller Download PDFInfo
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- US20190145401A1 US20190145401A1 US16/246,264 US201916246264A US2019145401A1 US 20190145401 A1 US20190145401 A1 US 20190145401A1 US 201916246264 A US201916246264 A US 201916246264A US 2019145401 A1 US2019145401 A1 US 2019145401A1
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- pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
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- the present disclosure is generally concerned with fluid systems and fluid system components. More specifically, the disclosed embodiments concern fluid system components including diaphragm pumps and associated pump controllers.
- Diaphragm pumps are well suited for a variety of applications, including semiconductor manufacturing processes for example.
- One of the characteristics of many diaphragm pumps is that they produce a pulsating discharge. While some pulsing of the discharge flow is unavoidable, excessive pulsing can be problematic. In recognition of this, efforts have been made to adjust various pump parameters in an attempt to reduce pulsing of the discharge flow. Such parameters include air supply pressure, vacuum pressure, pump cycle time, phase overlap, and pump head air supply orifice size.
- Embodiments within the scope of this disclosure may include any one or more of the following elements, and features of elements, in any combination: a diaphragm pump; an air-operated diaphragm pump; a diaphragm pump including one or more plastic components; a diaphragm pump including one or more polytetrafluoroethylene (PTFE) components, such as a pump body and/or a pump head; a diaphragm pump controller that automatically controls one or more parameters of a pump control system to achieve a specified pump flow rate and pulsation performance; a pump control system that uses air or another gas as an operating fluid to control pump operation; a diaphragm pump controller operable to automatically control any one or more of various parameters of a pump control system that uses air as an operating fluid, including air supply pressure, vacuum pressure, cycle time, phase overlap, and pump head air supply orifice size; a diaphragm pump controller that implements a closed
- FIG. 1 is a perspective view of an example fluid pump that can be used in at least some embodiments
- FIG. 2 is an exploded view of the example fluid pump of FIG. 1 ;
- FIG. 3 discloses aspects of an example diaphragm and retention system
- FIG. 4 is a diagram of an example pump control system
- FIG. 5 is directed to an example pump controller.
- the present disclosure is generally concerned with fluid systems and fluid system components. More specifically, the disclosed embodiments concern fluid system components including diaphragm pumps and associated pump control systems and pump controllers.
- a pump controller is provided that facilitates closed loop control of a pump, such as a diaphragm pump for example, by automatically controlling one or more parameters of a pump control system that uses air and/or one or more other gases, or other compressible fluids, as an operating fluid.
- air supply pressure such as clean dry air (CDA) pressure
- vacuum pressure such as vacuum pressure
- cycle time of a fluid pump between a suction operation and a discharge operation such as cycle time of a fluid pump between a suction operation and a discharge operation
- phase overlap such as the size of the opening in a flow control valve such as a needle valve for example.
- pump head air supply orifice size such as the size of the opening in a flow control valve such as a needle valve for example.
- fluid system components disclosed herein may be used in a variety of different applications, and may be particularly useful in fluid systems for semiconductor manufacturing processes, although the scope of the invention is not limited to such applications.
- Such fluid systems may employ, for example, deionized (DI) water, corrosive agents and materials including but not limited to acids and bases, gases, other fluids, and combinations of any of the foregoing.
- DI deionized
- Such fluids may be hot, highly pressurized, reactive, and/or pure fluids.
- the temperatures of fluids employed in such systems may be anywhere in the range of about 1 degree C. to about 180 degrees C., or in any sub-range falling within that range including, for example, about 100 degrees C. to about 180 degrees C. These temperatures are provided by way of example, and in some instances may be even higher than about 180 degrees C. For example, some systems may employ process fluids that may reach temperatures as high as about 200 degrees C. to about 220 degrees C., or higher.
- fluid embraces compressible fluids such as gases, incompressible fluids such as liquids, combinations of gases and liquids, and combinations of one or more gases and/or one or more liquids with solids.
- the fluid system components disclosed herein may be constructed with a variety of components and materials including, but not limited to, non-reactive and substantially non-reactive materials, non-metallic and substantially non-metallic materials, rubber, plastics such as polymers, and composites.
- non-reactive and substantially non-reactive materials embrace a variety of materials, including both metals, such as stainless steel for example, as well as non-metallic materials, such as plastics for example.
- examples of the aforementioned polymers may include perfluoroalkoxy (PFA) and polytetrafluoroethylene (PTFE), which can be machined or otherwise formed into various components, such as pump bodies, pump heads, and diaphragms for example.
- Fluoroelastomers (FKM), and perfluoroelastomers (FFKM) may also be employed. These materials may or may not be virgin materials.
- metals such as steel including stainless steel, copper, titanium, brass, nickel, aluminum, and alloys and combinations of any of the foregoing metals, may be used.
- alloys include copper-nickel alloys (CNA), and nickel-copper alloys (NCA).
- embodiments of the invention can be employed in connection with any of a variety of different pumps, such as diaphragm pumps.
- a diaphragm pump with which embodiments of the invention can be employed is the ‘Purus CP’ diaphragm pump manufactured by Trebor (A Unit of IDEX Corporation). Details concerning the structure and operation of the ‘Purus CP’ pump are disclosed in Appendix 1 to the application noted in the ‘Related Applications’ section hereof.
- FIG. 1 discloses an example fluid pump 100 having a pump head 102 which may be connected, permanently or removably, to a pump body 104 that may include a fluid inlet 104 a and a fluid outlet 104 b.
- the fluid inlet 104 a is on the suction side of the fluid pump 100
- the fluid outlet 104 b is on the discharge side of the fluid pump 100 .
- the fluid pump 100 may include a pump base 105 which supports the pump body 104 and pump heads 102 , and to which the pump body 104 is permanently, or removably, attached.
- some embodiments may include one or more union nuts 106 having threads configured to releasably engage corresponding threads of the pump body 104 .
- the union nuts 106 may be employed to removably secure the pump head 102 to the pump body 104 , and a slip ring 107 , which can be made of a low-friction plastic such as PTFE for example, can be provided to reduce friction between the union nut 106 and pump head 102 , and thereby enable a relatively tight diaphragm 200 seal.
- a fluid pump include two pump heads, such as pump head 102 , one attached to either side of a pump body such as pump body 104 .
- the two pump heads 102 may be similar, or substantially identical, to each other in terms of construction and/or operation.
- the pump heads 102 serve to seal the fluid chamber and thus enable air operation of the fluid pump 100 .
- one or more diaphragms 200 may be positioned between the pump head 102 and the pump body 104 .
- a pump such as a pump that includes multiple pump heads, may include multiple diaphragms.
- a plurality of retaining elements 300 such as polypropylene (PP) pins for example, may be provided that aid in retention of the diaphragm 200 in a desired position and orientation. The retaining elements 300 can also help to prevent the pump head 102 from turning during installation.
- the pump head 102 may define a plurality of recesses 102 a, each of which is configured to receive a portion of a retaining element 300 , as discussed in more detail below.
- the retaining elements 300 may help to ensure that the diaphragm 200 does not move out of position relative to the pump head 102 and the pump body 104 during operation of the fluid pump 100 , since withdrawal of the diaphragm 200 from its sealing position between the pump head 102 and pump body 104 could result in leakage of the process fluid and/or operating fluid, as well as contamination of the process fluid.
- the diaphragm(s) 200 can be any suitable type.
- Example diaphragm configurations include, but are not limited to, flat, blousing, pillow, trampoline, convolute, shallow draw, dish, “pie pan,” drop center, offset convolute, deep draw, “top hat,” double taper deep draw, bellows, and double bellows.
- the diaphragm 200 When properly positioned and secured between the pump head 102 and pump body 104 , the diaphragm 200 not only enables the pumping of a process fluid, but also maintains isolation between a process fluid and an operating fluid, discussed in more detail below.
- the example fluid pump 100 may include one or more flow check assemblies 108 , one of which can be placed in a fluid path that includes the fluid inlet 104 a, and another of which can be placed in a fluid path that includes the fluid outlet 104 b.
- the flow check assembly 108 serves to limit fluid flow to a single direction in a fluid path.
- the flow check assembly 108 includes a sealing element 108 a, such as an O-ring, that seals the rest of the flow check assembly 108 with respect to the pump body 104 .
- a check ball 108 b which can be made of plastic for example and resides in a lower check ball cage 108 c, seals against the sealing element 108 a and, in this example, permits flow into, but not out of, the pump body 104 .
- a further sealing element 108 a is provided that seals against the top of the lower check ball cage 108 c, and an additional check ball 108 b is provided that seals against the further sealing element 108 a to permit flow out of, but not into, the pump body 104 .
- An upper check ball cage 108 d is provided within which the additional check ball 108 b resides.
- a gasket 108 e positioned on top of the upper check ball cage 108 d cooperates with a check cap 108 f to seal the fluid path.
- a pressurized operating fluid such as air and/or other gases for example, may be introduced into the fluid pump 100 so as to contact one side of the diaphragm 200 , causing a corresponding displacement of the diaphragm 200 .
- the diaphragm 200 may be in contact with a process fluid such that the process fluid is pumped by the motion of the diaphragm 200 that is induced by the pressurized operating fluid acting on the diaphragm.
- the diaphragm 200 may be configured to cause, either directly or indirectly, the deflection of another diaphragm (not shown) by virtue of a reciprocating shaft and/or other mechanism positioned between the diaphragms.
- the pumping of a process fluid is effected by displacement of one or more diaphragms that are acted upon, either directly or indirectly, by a pressurized operating fluid.
- the pump head 102 and/or the pump body 104 may be constructed from any suitable non-reactive, or substantially non-reactive, material(s) such as PTFE or PFA, for example. Such materials may be machined, molded, or otherwise formed. More generally, the materials for the pump head 102 and pump body 104 may be selected for compatibility with the operating fluids and operating conditions with which the fluid pump 100 is expected to be employed. Other examples of materials that may be used in the construction of the pump head 102 and/or pump body 104 are disclosed elsewhere herein. In some embodiments, the pump head 102 is formed of a single piece of material.
- the pump head 102 and pump body 104 may each include complementary structure(s) that cooperate with each other to aid in the retention of the diaphragm. More particularly, a portion of the diaphragm 200 may be interposed between the respective complementary structures, and the respective complementary structures may be configured so that when they are engaged with each other, they tend to resist, or prevent, withdrawal of the diaphragm from between the pump head 102 and the pump body 104 (see, e.g., FIG. 3 ).
- one or both pump heads 102 may include an annular V-shaped ridge 102 b configured to interface with a corresponding V-shaped groove 104 c of the pump body 104 .
- these respective complementary structures of the pump head 102 and the pump body 104 may aid in the retention of the diaphragm 200 (see, e.g., FIG. 3 ).
- the complementary structure 102 b extends around a substantial portion, or all of, a diameter of a portion of the pump head 102 and has a substantially V-shaped cross section. Other cross-sectional shapes may be alternatively employed however.
- the example pump head 102 includes a single complementary structure, other embodiments of a pump head may include multiple complementary structures, each configured to interface with a respective complementary structure of pump body.
- the engagement of the respective complementary structures with each other, with the diaphragm positioned between the complementary structures, may be referred to herein as the pump seal as it is those complementary structures that cooperate with the diaphragm to substantially prevent leakage of process and/or operating fluid from the interface between the pump head 102 and the pump body 104 .
- the diaphragm 200 is positioned between the pump head 102 and the pump body 104 . Similar to the pump head 102 and pump body 104 , the diaphragm 200 may be substantially constructed as a single piece of material from any suitable non-reactive, or substantially non-reactive, material(s) such as PTFE or PFA, for example. Depending Lu upon considerations such as pump life, operating fluid type, pressure, and temperature, various other materials such as those disclosed herein may alternatively be employed in the construction of the diaphragm 200 .
- the diaphragm 200 may or may not be substantially circular in shape. As well, the diaphragm 200 may be flexible, and the degree of flexibility of the diaphragm 200 may vary from one embodiment to another, depending upon considerations such as the operating conditions to which the diaphragm 200 is expected to be exposed.
- the diaphragm 200 may include an outer portion 202 and an inner portion 204 .
- the outer portion 202 may facilitate the retention of the diaphragm 200 in a desired position and orientation, while the inner portion 204 of the diaphragm 200 may facilitate the pumping of a process fluid, as disclosed elsewhere herein.
- the outer portion 202 may include a grooved portion 202 a configured to receive a structure of the pump head 102 , such as the complementary structure 102 b.
- the outer portion 202 may include a rim portion 202 b.
- one embodiment of the diaphragm 200 includes a relatively flat rim portion 202 b.
- the rim portion 202 b may include a plurality of openings 202 c , each of which may be configured to be substantially aligned with a corresponding recess 102 a when the diaphragm is installed between the pump head 102 and the pump body 104 .
- the openings 202 c may be formed when the diaphragm 200 is manufactured, or the openings 202 c may be formed by the retaining elements 300 when the pump head 102 , pump body 104 and diaphragm 200 are assembled together. As best illustrated in FIG.
- each of the retaining elements 300 extends through a corresponding opening 202 c in the diaphragm 200 .
- the openings 202 c may be reinforced, such as with PFA or PTFE rings or sleeves, for example.
- the reinforcements may be made of other materials as well.
- the pump body 104 may, in some embodiments, be formed of a single piece of material. As indicated in the Figures, the pump body 104 may include a pump head mount 104 d that is generally circular in shape. The pump head mount 104 d may include external threads configured to releasably engage corresponding threads of the union nut 106 (see FIG. 3 ). The pump head mount 104 d may include a plurality of recesses 104 e , whose characteristics may be similar, if not identical, to those of the recesses 102 a defined by the pump head 102 .
- each of the recesses 104 e is configured to receive a portion of a retaining element 300 .
- the recesses 102 a and 104 e are located outside the pump seal. In other embodiments however, the pump seal may be located outside the recesses 102 a and 104 e.
- control CC systems for fluid pumps, such as air-operated diaphragm pumps for example.
- fluid pumps such as air-operated diaphragm pumps for example.
- the control system 400 may operate in connection with one or more fluid pumps, such as the fluid pump 100 , examples of which are disclosed herein.
- a differential pressure measurement device 150 which may be an element of the control system 400 , can be provided for use in conjunction with the control system 400 . Any of a variety of differential pressure measurement device(s) can be used.
- differential pressure measurement devices include, but are not limited to, flow meters, orifice plates, flow nozzles, laminar flow elements, low-loss flow tubes, segmental wedges, V-cones, and venturi tubes.
- a differential pressure measurement device uses one or more pressure transducers to sense pressure and convert the sensed pressure into a signal that can be transmitted by the transducer to another component, such as a pump controller for example.
- a process fluid may be provided to a suction side of the fluid pump 100 , exit a discharge side of the fluid pump 100 , and then monitored by the differential pressure measurement device 150 .
- the control system 400 may include, or operate in connection with, a variety of systems.
- a control air system 500 is provided that is operable to control the performance of the fluid pump 100 .
- the control air system 500 is controlled by way of a pump controller 600 that can take a variety of forms, examples of which include a microcontroller or a programmable logic controller (PLC), which could include one or more field programmable gate arrays (FPGA), and/or application-specific integrated circuits (ASIC) for example.
- PLC programmable logic controller
- FPGA field programmable gate arrays
- ASIC application-specific integrated circuits
- the aforementioned elements may be referred to generally herein as programmable elements.
- the pump controller 600 can be mounted directly to the fluid pump 100 , or alternatively may be a component separate from the fluid pump 100 , or may be integrated into a component of the fluid pump 100 such as the pump base 105 , pump body 104 , or pump head(s) 102 . Further details concerning the configuration of an example pump controller 600 are set forth below in the discussion of FIG. 5 .
- Inputs such as fluid pump 100 flow rate and acceptable pulse values, or pulsation ranges for the fluid pump 100 discharge, can be set in the pump controller 600 .
- the pump controller 600 dictates how each of the connected components, such as the components of the control air system 500 , operates.
- the pump controller 600 controls each side of the fluid pump 100 independently by way of the control air system 500 (see, e.g., Appendix 1 to the ‘Related Application’ at page 8).
- the control air system 500 is also controlled by the pump controller 600 to implement overlap, that is, overlapping pump strokes, in the fluid pump 100 , by adjusting the amount of time each pump head 102 is under positive pressure, and negative pressure, or vacuum.
- the pump controller 600 may, among other things, automatically maintain the fluid pump 100 operation at an acceptable level of pulsation.
- control air system 500 is not limited to use with air and, in other embodiments, can use other gas(es) as an operating fluid, including inert gases such as nitrogen for example.
- the operating fluid is pressurized clean dry air (CDA).
- CDA pressurized clean dry air
- the amount of permissible moisture, or dew point, of the CDA can be dictated by the various components that are employed in the control air system 500 , and the desired dew point can be achieved with a variety of different equipment and components.
- a refrigeration dryer can produce CDA with a dew point in the range of about 37 F. to about 50 F.
- a desiccant dryer can produce CDA with a dew point in the range of about ⁇ 40 F. to about ⁇ 100 F.
- a membrane dryer can produce CDA with a dew point in the range of about ⁇ 40 F. to about +35 F.
- the control air system 500 includes a variety of components.
- any of the control air system 500 components that are controlled by the pump controller 600 may be configured so as to report on any aspect of their performance and configuration to the pump controller 600 , and such reporting information can be used by the pump controller 600 to automatically adjust the corresponding component(s) of the control air system 500 so as to achieve a desired effect, or effects, with respect to the performance of the control air system 500 and/or the fluid pump 100 .
- the control system 400 which may comprise at least the control air system 500 and pump controller 600 , constitutes a closed-loop control system.
- operational parameters for any of the control air system 500 components can be programmed into the pump controller 600 and used as a basis for automatic adjustment of the performance of those components by the pump controller 600 .
- any individual component of the control air system 500 can be configured in a closed-loop feedback arrangement where the pump controller 600 provides a control signal to that component, receives a feedback signal from the component concerning one or more aspects of the configuration and/or performance of that component, and the pump controller 600 can then send an updated control signal to the component based upon the feedback signal received by the pump controller 600 from that component.
- any one or more individual components of the control air system 500 may operate in an open-loop configuration where no feedback is provided from the component(s) to the pump controller 600 .
- a CDA supply 502 provides dry air to an electronically controlled regulator 504 that is used to control fluid pump 100 suction and discharge operations, and a standard regulator 506 that is used to control fluid pump 100 suction and discharge operations.
- the electronically controlled regulator 504 can be automatically controlled by the pump controller 600 , while the standard regulator 506 can be manually controlled.
- the electronically controlled regulator 504 and standard regulator 506 are arranged in parallel with respect to each other.
- the electronically controlled regulator 504 regulates the CDA pressure to a level set by the pump controller 600 .
- the pump controller 600 sends a signal to the electronically controlled regulator 504 to automatically adjust the pressure of the CDA supplied to the fluid pump 100 .
- the CDA pressure affects the output of the fluid pump 100 .
- a relatively higher CDA supply pressure may increase fluid pump 100 output, while a relatively lower CDA supply pressure may result in a decrease in fluid pump 100 output.
- the electronically controlled regulator 504 reports the pressure of the supplied CDA to the pump controller 600 .
- the standard regulator 506 can be used to manually regulate the pressure of the CDA that is supplied to the vacuum generator 508 .
- the CDA supply pressure may be set at a fixed value for optimum vacuum generator 508 performance.
- the vacuum generator 508 operates to cause a fluid pump 100 suction operation by creating a vacuum, or negative pressure, on one side of the diaphragm(s) 200 .
- the vacuum causes a displacement of the diaphragm in the fluid chamber, thereby drawing bulk fluid into the fluid pump 100 .
- the control air system 500 may include a first solenoid valve 510 (“A”) and a second solenoid valve 512 (“B”).
- Each of the first solenoid valve 510 and second solenoid valve 512 is electronically, and automatically, controlled by the pump controller 600 and supplied with CDA pressure and vacuum from the electronically controlled regulator 504 and the standard regulator 506 .
- the first solenoid valve 510 and second solenoid valve 512 alternate between supplying a vacuum and positive pressure to the fluid pump 100 .
- the first solenoid valve 510 can provide positive CDA pressure to one side of the fluid pump 100 , while at the same time, the second solenoid valve 512 can provide a vacuum to the other side of the fluid pump 100 .
- the solenoid valve functions are reversed, and the first solenoid valve 510 can provide a vacuum to one side of the fluid pump 100 , while at the same time, the second solenoid valve 512 can provide a positive CDA pressure to the other side of the fluid pump 100 .
- the first solenoid valve 510 and the second solenoid valve 512 cooperatively operate in a complementary fashion to displace the diaphragm.
- the solenoid valve 510 and second solenoid valve 512 when one of the first solenoid valve 510 and second solenoid valve 512 is switched to vacuum, that solenoid valve causes liquid to be drawn into one side of the pump. When that solenoid valve is switched to pressure, that solenoid valve causes fluid to be pushed out of one side of the fluid pump 100 .
- the provision of two solenoid valves independently connected with different respective sides of the fluid pump 100 allows for specific control of each chamber of the fluid pump 100 .
- the positive and/or negative pressure cycles can be caused to overlap with each other, resulting in a low pulse flow.
- the control air system 500 further includes a muffler 514 that is connected to the first and second solenoid valves 510 / 512 .
- the muffler 514 can reduce the volume of the sound that is produced when compressed air is exhausted to the atmosphere by the first and second solenoid valves 510 / 512 , and by the vacuum generator 508 .
- a flow control valve 516 is located in the discharge line of each of the first and second solenoid valves 510 / 512 .
- the flow control valves 516 take the form of electronically controllable needle valves whose operation can be automatically controlled by the pump controller 600 . Any other suitable electronically controllable flow control valve can alternatively be used however and the scope of the invention is not limited to needle valves.
- the flow control valves 516 regulate the rate at which CDA and vacuum, as applicable, are applied to the two sides of the fluid pump 100 , that is, the respective sides of the diaphragm(s) 200 .
- Automatic adjustments to the position of the flow control valves 516 which can be implemented by way of the pump controller 600 , allow the pulsation in the fluid flow through the fluid pump 100 to be reduced.
- the flow control valves 516 thus enable the pump controller 600 to automatically adjust the response time of the pressure change in one side of the fluid pump 100 .
- the flow control valves 516 are able to report their position, that is, the extent to which they are open or closed, to the pump controller 600 .
- embodiments of the invention may include a power supply system, one example of which is denoted at 700 .
- the power supply system 700 can supply electrical power to various components of the control air system 500 , as well as to the differential pressure measurement device 150 , and the pump controller 600 .
- the power supply system 700 includes a 24 VDC power supply 702 that provides power to various components of the control air system 500 , including the electronically controlled regulator 504 , the first solenoid valve 510 , the second solenoid valve 512 , and the electronically controlled flow control valves 516 .
- power supplies of different types such as AC and DC power supplies, and different voltages, can alternatively be employed. Accordingly, the power supply system 700 is presented by way of example only and is not intended to limit the scope of the invention in any way.
- the pump controller 600 includes a power connection 602 that can be electrically connected to a power supply, a feedback connection 604 that can be electrically connected to a flow meter transducer, and one or more control connections 606 , each of which can be electrically connected to a respective element of the control air system 500 .
- the pump controller 600 includes a number of other elements specifically relating to its various functions, disclosed elsewhere herein.
- the illustrated pump controller 600 can include one or more lookup tables 608 , applications 610 , one or more processors 612 , memory 614 which can include RAM and/or ROM, and any type of non-volatile memory.
- the pump controller 600 may further include one or more programmable elements 616 , and a user interface (UI) 618 by way of which a user can operate and program the pump controller 600 .
- the pump controller 600 can include a housing/mount 620 that houses the various elements of the pump controller 600 and which may be mountable to various structures, including elements of a fluid pump.
- the pump controller 600 can be pre-programmed, or reprogrammed, depending upon the circumstances, with a variety of inputs that can then be used by the pump controller 600 as reference points for making adjustments to one or more elements of the control air system 500 based on feedback received from one or more of the control air system 500 , the differential pressure measurement device 150 , and/or the fluid pump 100 .
- the inputs used by the pump controller 600 include a minimum acceptable flow rate, or range of flow rates, of the fluid pump 100 , and an acceptable pulse value, or pulsation range, for the fluid pump 100 discharge.
- the pulse value can be expressed in terms of a maximum acceptable change in the fluid discharge pressure of the fluid pump 100 that occurs during the time when a first chamber of the fluid pump transitions from a vacuum state to a pressure state and the second chamber of the fluid pump transitions from a pressure state to a vacuum state (see, e.g., Appendix 1 to the ‘Related Application’ at page 8).
- Appendix 1 to the ‘Related Application’ at page 8 can also be programmed into the pump controller 600 , and the scope of the invention is not limited to the aforementioned examples.
- the pump controller 600 can control the operation of a component based on input received not from the controlled component, but from one or more other components.
- the pump controller 600 can include one or more tables, equations, or maps for example, that map particular input values received by the pump controller 600 with corresponding output control signals that will be generated by the pump controller 600 and transmitted to various controlled components.
- the controlled components may include, for example, any one or more of the electronically controlled regulator 504 , the first solenoid valve 510 , the second solenoid valve 512 , and the flow control valves 516 .
- the table or map can correlate various fluid pump 100 discharge flow rates, measured and reported by the differential pressure measurement device 150 , with particular positions of one or both of the flow control valves 516 .
- the pump controller 600 can perform a lookup process using the table or map and determine the output control signal that must be transmitted to the flow control valve(s) 516 in order to achieve the desired flow rate, and the output control signal(s) that must be transmitted to one or more of the electronically controlled regulator 504 and/or the first and second solenoid valves 510 / 512 in order to achieve the desired pulse value.
- the pump controller 600 can then send the control signals to the flow control valve 516 and/or the electronically controlled regulator 504 and/or the first and second solenoid valves 510 / 512 , as appropriate.
- the flow control valves 516 , electronically controlled regulator 504 and/or the first and second solenoid valves 510 / 512 may send an acknowledgement to the pump controller 600 that the control signal has been received and acted upon.
- no acknowledgement signal is sent by the controlled component(s) to the pump controller 600 .
- the same general process discussed in this illustration can be applied as well to any other component controlled by the pump controller 600 .
- the pump controller 600 controls a component based upon input received from one or more other components but does not use input from the controlled component itself. In other embodiments however, the pump controller 600 can control a component based on input received from the controlled component itself, and with or without input received from one or more other components.
- a flow control valve 516 can report its position, that is, the extent to which the flow control valve 516 is open, to the pump controller 600 and the pump controller 600 can compare the received input with data in the table to determine whether an adjustment should be made to the position of the flow control valve 516 . Where an adjustment is required, such as when the input received from the controlled component, the flow control valve 516 in this example, does not fall in a desired range, which can be specified in a map or table in the pump controller 600 , the pump controller 600 can then send a corresponding control signal, which also may be specified in the map or table, to the flow control valve 516 to adjust the configuration and/or performance of the flow control valve 516 .
- Similar processes can be implemented in connection with any other device, or combination of devices, controlled by the pump controller 600 , including any one or more of the electronically controlled regulator 504 , the first solenoid valve 510 , the second solenoid valve 512 , and the flow control valves 516 .
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Abstract
In one example, a pump controller includes a power connection, one or more control signal connections, a feedback signal connection, one or more programmable elements, and one or more processors connected with the programmable elements and the feedback signal connection. When the programmable elements are programmed for automatic control of a fluid pump, the pump controller is operable to automatically control operation of the fluid pump through a closed loop system, and wherein the pump controller is further operable to control a pulse value associated with operation of the fluid pump.
Description
- This application is a divisional of, and hereby claims priority to, United States patent application Ser. No. 15/198,551, entitled AUTOMATED CROSS-PHASE PUMP AND CONTROLLER, and filed Jun. 30, 2016 ('551 Application). The '551 Application claims the benefit of, and priority to, U.S. Patent Application Ser. No. 62/190,599, entitled AUTOMATED CROSS-PHASE PUMP AND CONTROLLER, and filed Jul. 9, 2015. All of the aforementioned applications are incorporated herein in their respective entireties by this reference.
- The present disclosure is generally concerned with fluid systems and fluid system components. More specifically, the disclosed embodiments concern fluid system components including diaphragm pumps and associated pump controllers.
- Diaphragm pumps are well suited for a variety of applications, including semiconductor manufacturing processes for example. One of the characteristics of many diaphragm pumps is that they produce a pulsating discharge. While some pulsing of the discharge flow is unavoidable, excessive pulsing can be problematic. In recognition of this, efforts have been made to adjust various pump parameters in an attempt to reduce pulsing of the discharge flow. Such parameters include air supply pressure, vacuum pressure, pump cycle time, phase overlap, and pump head air supply orifice size.
- While satisfactory pump operation might be attained through adjustment of such parameters, typical adjustment processes are often time-consuming and do not always produce good results. This is due in large part to the fact that adjustment of such parameters is typically performed manually. Thus, a trial and error process is required in order to attain acceptable pump performance. Moreover, pump control systems that take these parameters into account are typically open loop systems. Because no pump performance feedback is provided to the pump control system, continuous monitoring is required, and manual adjustments to the parameters may be required quite often.
- In light of problems and shortcomings such as those noted above, it would be useful to be able to avoid manual adjustment processes for pump parameters. It would also be useful to be able to avoid the need for a trial and error approach to achieving satisfactory pump performance. Finally, it would be useful to be able to use pump performance feedback to automatically adjust the pump performance.
- It should be noted that the embodiments disclosed herein do not constitute an exhaustive summary of all possible embodiments, nor does this brief summary constitute an exhaustive list of all aspects of any particular embodiment(s). Rather, this brief summary simply presents selected aspects of some example embodiments. It should further be noted that nothing herein should be construed as constituting an essential or indispensable element of any invention or embodiment. Rather, various aspects of the disclosed embodiments may be combined in a variety of ways so as to define yet further embodiments. Such further embodiments are considered as being within the scope of this disclosure. As well, none of the embodiments embraced within the scope of this disclosure should be construed as resolving, or being limited to the resolution of, any particular problem(s). Nor should such embodiments be construed to implement, or be limited to implementation of, any particular technical effect(s) or solution(s).
- Disclosed embodiments are generally concerned with fluid systems and associated components and control systems. Embodiments within the scope of this disclosure may include any one or more of the following elements, and features of elements, in any combination: a diaphragm pump; an air-operated diaphragm pump; a diaphragm pump including one or more plastic components; a diaphragm pump including one or more polytetrafluoroethylene (PTFE) components, such as a pump body and/or a pump head; a diaphragm pump controller that automatically controls one or more parameters of a pump control system to achieve a specified pump flow rate and pulsation performance; a pump control system that uses air or another gas as an operating fluid to control pump operation; a diaphragm pump controller operable to automatically control any one or more of various parameters of a pump control system that uses air as an operating fluid, including air supply pressure, vacuum pressure, cycle time, phase overlap, and pump head air supply orifice size; a diaphragm pump controller that implements a closed loop control system; a diaphragm pump controller directly mounted to a diaphragm pump, or integrated into the diaphragm pump; a PTFE diaphragm; a diaphragm pump that includes one or more machined PTFE diaphragms; a diaphragm pump that includes a free-floating diaphragm; a diaphragm pump that includes a pinned free-floating diaphragm and V-groove seal; and, a diaphragm pump operable at pressures up to about 100 psi and temperatures up to about 180 C.
- The appended drawings contain figures of some example embodiments to further clarify various aspects of the present disclosure. It will be appreciated that these drawings depict only some embodiments of the disclosure and are not intended to limit its scope in any way. The disclosure will be described and explained with additional specificity and detail through the use of the accompanying drawings in which:
-
FIG. 1 is a perspective view of an example fluid pump that can be used in at least some embodiments; -
FIG. 2 is an exploded view of the example fluid pump ofFIG. 1 ; -
FIG. 3 discloses aspects of an example diaphragm and retention system; -
FIG. 4 is a diagram of an example pump control system; and -
FIG. 5 is directed to an example pump controller. - The present disclosure is generally concerned with fluid systems and fluid system components. More specifically, the disclosed embodiments concern fluid system components including diaphragm pumps and associated pump control systems and pump controllers. In one particular example, a pump controller is provided that facilitates closed loop control of a pump, such as a diaphragm pump for example, by automatically controlling one or more parameters of a pump control system that uses air and/or one or more other gases, or other compressible fluids, as an operating fluid. Examples of such parameters that can be automatically controlled include, but are not limited to, air supply pressure such as clean dry air (CDA) pressure, vacuum pressure, cycle time of a fluid pump between a suction operation and a discharge operation, phase overlap, and pump head air supply orifice size, such as the size of the opening in a flow control valve such as a needle valve for example.
- In general, fluid system components disclosed herein may be used in a variety of different applications, and may be particularly useful in fluid systems for semiconductor manufacturing processes, although the scope of the invention is not limited to such applications. Such fluid systems may employ, for example, deionized (DI) water, corrosive agents and materials including but not limited to acids and bases, gases, other fluids, and combinations of any of the foregoing. Such fluids may be hot, highly pressurized, reactive, and/or pure fluids.
- The temperatures of fluids employed in such systems, such as acids for example, may be anywhere in the range of about 1 degree C. to about 180 degrees C., or in any sub-range falling within that range including, for example, about 100 degrees C. to about 180 degrees C. These temperatures are provided by way of example, and in some instances may be even higher than about 180 degrees C. For example, some systems may employ process fluids that may reach temperatures as high as about 200 degrees C. to about 220 degrees C., or higher. Note that as used herein, “fluid” embraces compressible fluids such as gases, incompressible fluids such as liquids, combinations of gases and liquids, and combinations of one or more gases and/or one or more liquids with solids.
- The fluid system components disclosed herein may be constructed with a variety of components and materials including, but not limited to, non-reactive and substantially non-reactive materials, non-metallic and substantially non-metallic materials, rubber, plastics such as polymers, and composites. It should be noted that non-reactive and substantially non-reactive materials embrace a variety of materials, including both metals, such as stainless steel for example, as well as non-metallic materials, such as plastics for example. Examples of the aforementioned polymers may include perfluoroalkoxy (PFA) and polytetrafluoroethylene (PTFE), which can be machined or otherwise formed into various components, such as pump bodies, pump heads, and diaphragms for example. Fluoroelastomers (FKM), and perfluoroelastomers (FFKM) may also be employed. These materials may or may not be virgin materials.
- In certain applications, metals such as steel including stainless steel, copper, titanium, brass, nickel, aluminum, and alloys and combinations of any of the foregoing metals, may be used. Examples of such alloys include copper-nickel alloys (CNA), and nickel-copper alloys (NCA).
- In general, embodiments of the invention can be employed in connection with any of a variety of different pumps, such as diaphragm pumps. One particular example of a diaphragm pump with which embodiments of the invention can be employed is the ‘Purus CP’ diaphragm pump manufactured by Trebor (A Unit of IDEX Corporation). Details concerning the structure and operation of the ‘Purus CP’ pump are disclosed in Appendix 1 to the application noted in the ‘Related Applications’ section hereof.
- With particular reference now to
FIGS. 1 and 2 , a brief overview is provided concerning an example fluid system component that includes a diaphragm. More specifically,FIG. 1 discloses anexample fluid pump 100 having apump head 102 which may be connected, permanently or removably, to apump body 104 that may include afluid inlet 104 a and afluid outlet 104 b. Thus, thefluid inlet 104 a is on the suction side of thefluid pump 100, while thefluid outlet 104 b is on the discharge side of thefluid pump 100. Thefluid pump 100 may include apump base 105 which supports thepump body 104 and pump heads 102, and to which thepump body 104 is permanently, or removably, attached. - With brief reference to
FIG. 3 , and as discussed in more detail below, some embodiments may include one ormore union nuts 106 having threads configured to releasably engage corresponding threads of thepump body 104. Theunion nuts 106 may be employed to removably secure thepump head 102 to thepump body 104, and aslip ring 107, which can be made of a low-friction plastic such as PTFE for example, can be provided to reduce friction between theunion nut 106 and pumphead 102, and thereby enable a relativelytight diaphragm 200 seal. It should be noted that while the Figures indicate only asingle pump head 102, some embodiments of a fluid pump include two pump heads, such aspump head 102, one attached to either side of a pump body such aspump body 104. The two pump heads 102 may be similar, or substantially identical, to each other in terms of construction and/or operation. Among other things, the pump heads 102 serve to seal the fluid chamber and thus enable air operation of thefluid pump 100. - As indicated in
FIGS. 2 and 3 , one ormore diaphragms 200 may be positioned between thepump head 102 and thepump body 104. Some embodiments of a pump, such as a pump that includes multiple pump heads, may include multiple diaphragms. A plurality of retainingelements 300, such as polypropylene (PP) pins for example, may be provided that aid in retention of thediaphragm 200 in a desired position and orientation. The retainingelements 300 can also help to prevent thepump head 102 from turning during installation. As further indicated in the Figures, thepump head 102 may define a plurality ofrecesses 102 a, each of which is configured to receive a portion of a retainingelement 300, as discussed in more detail below. Among other things, the retainingelements 300 may help to ensure that thediaphragm 200 does not move out of position relative to thepump head 102 and thepump body 104 during operation of thefluid pump 100, since withdrawal of thediaphragm 200 from its sealing position between thepump head 102 and pumpbody 104 could result in leakage of the process fluid and/or operating fluid, as well as contamination of the process fluid. - The diaphragm(s) 200 can be any suitable type. Example diaphragm configurations include, but are not limited to, flat, blousing, pillow, trampoline, convolute, shallow draw, dish, “pie pan,” drop center, offset convolute, deep draw, “top hat,” double taper deep draw, bellows, and double bellows. When properly positioned and secured between the
pump head 102 and pumpbody 104, thediaphragm 200 not only enables the pumping of a process fluid, but also maintains isolation between a process fluid and an operating fluid, discussed in more detail below. - With continuing attention to
FIG. 2 , theexample fluid pump 100 may include one or moreflow check assemblies 108, one of which can be placed in a fluid path that includes thefluid inlet 104 a, and another of which can be placed in a fluid path that includes thefluid outlet 104 b. In general, theflow check assembly 108 serves to limit fluid flow to a single direction in a fluid path. In the illustrated example, theflow check assembly 108 includes a sealingelement 108 a, such as an O-ring, that seals the rest of theflow check assembly 108 with respect to thepump body 104. Acheck ball 108 b, which can be made of plastic for example and resides in a lowercheck ball cage 108 c, seals against the sealingelement 108 a and, in this example, permits flow into, but not out of, thepump body 104. A further sealingelement 108 a is provided that seals against the top of the lowercheck ball cage 108 c, and anadditional check ball 108 b is provided that seals against thefurther sealing element 108 a to permit flow out of, but not into, thepump body 104. An uppercheck ball cage 108 d is provided within which theadditional check ball 108 b resides. Agasket 108 e positioned on top of the uppercheck ball cage 108 d cooperates with acheck cap 108 f to seal the fluid path. - With regard now to some general aspects of the operation of the
fluid pump 100, a pressurized operating fluid, such as air and/or other gases for example, may be introduced into thefluid pump 100 so as to contact one side of thediaphragm 200, causing a corresponding displacement of thediaphragm 200. In some example embodiments, thediaphragm 200 may be in contact with a process fluid such that the process fluid is pumped by the motion of thediaphragm 200 that is induced by the pressurized operating fluid acting on the diaphragm. In other example embodiments, thediaphragm 200 may be configured to cause, either directly or indirectly, the deflection of another diaphragm (not shown) by virtue of a reciprocating shaft and/or other mechanism positioned between the diaphragms. In either example however, the pumping of a process fluid is effected by displacement of one or more diaphragms that are acted upon, either directly or indirectly, by a pressurized operating fluid. - Directing more particular attention now to
FIGS. 1-3 , further details are provided concerning an example fluid pump and components. With reference now to theexample fluid pump 100, thepump head 102 and/or thepump body 104 may be constructed from any suitable non-reactive, or substantially non-reactive, material(s) such as PTFE or PFA, for example. Such materials may be machined, molded, or otherwise formed. More generally, the materials for thepump head 102 and pumpbody 104 may be selected for compatibility with the operating fluids and operating conditions with which thefluid pump 100 is expected to be employed. Other examples of materials that may be used in the construction of thepump head 102 and/or pumpbody 104 are disclosed elsewhere herein. In some embodiments, thepump head 102 is formed of a single piece of material. - Finally, the
pump head 102 and pumpbody 104 may each include complementary structure(s) that cooperate with each other to aid in the retention of the diaphragm. More particularly, a portion of thediaphragm 200 may be interposed between the respective complementary structures, and the respective complementary structures may be configured so that when they are engaged with each other, they tend to resist, or prevent, withdrawal of the diaphragm from between thepump head 102 and the pump body 104 (see, e.g.,FIG. 3 ). - With reference now to the particular example disclosed in the Figures, and particularly
FIGS. 1 and 2 , one or both pump heads 102 may include an annular V-shapedridge 102 b configured to interface with a corresponding V-shapedgroove 104 c of thepump body 104. As noted herein, these respective complementary structures of thepump head 102 and thepump body 104 may aid in the retention of the diaphragm 200 (see, e.g.,FIG. 3 ). In the example ofFIG. 3 , thecomplementary structure 102 b extends around a substantial portion, or all of, a diameter of a portion of thepump head 102 and has a substantially V-shaped cross section. Other cross-sectional shapes may be alternatively employed however. As well, while theexample pump head 102 includes a single complementary structure, other embodiments of a pump head may include multiple complementary structures, each configured to interface with a respective complementary structure of pump body. - The engagement of the respective complementary structures with each other, with the diaphragm positioned between the complementary structures, may be referred to herein as the pump seal as it is those complementary structures that cooperate with the diaphragm to substantially prevent leakage of process and/or operating fluid from the interface between the
pump head 102 and thepump body 104. - With continued reference to the Figures, particularly
FIG. 2 , thediaphragm 200 is positioned between thepump head 102 and thepump body 104. Similar to thepump head 102 and pumpbody 104, thediaphragm 200 may be substantially constructed as a single piece of material from any suitable non-reactive, or substantially non-reactive, material(s) such as PTFE or PFA, for example. Depending Lu upon considerations such as pump life, operating fluid type, pressure, and temperature, various other materials such as those disclosed herein may alternatively be employed in the construction of thediaphragm 200. Thediaphragm 200 may or may not be substantially circular in shape. As well, thediaphragm 200 may be flexible, and the degree of flexibility of thediaphragm 200 may vary from one embodiment to another, depending upon considerations such as the operating conditions to which thediaphragm 200 is expected to be exposed. - The
diaphragm 200 may include anouter portion 202 and aninner portion 204. In general, theouter portion 202 may facilitate the retention of thediaphragm 200 in a desired position and orientation, while theinner portion 204 of thediaphragm 200 may facilitate the pumping of a process fluid, as disclosed elsewhere herein. Theouter portion 202 may include agrooved portion 202 a configured to receive a structure of thepump head 102, such as thecomplementary structure 102 b. - Additionally, the
outer portion 202 may include arim portion 202 b. As indicated in the Figures, one embodiment of thediaphragm 200 includes a relativelyflat rim portion 202 b. Therim portion 202 b may include a plurality ofopenings 202 c, each of which may be configured to be substantially aligned with acorresponding recess 102 a when the diaphragm is installed between thepump head 102 and thepump body 104. Theopenings 202 c may be formed when thediaphragm 200 is manufactured, or theopenings 202 c may be formed by the retainingelements 300 when thepump head 102,pump body 104 anddiaphragm 200 are assembled together. As best illustrated inFIG. 3 , when thefluid pump 100 is assembled, each of the retainingelements 300 extends through acorresponding opening 202 c in thediaphragm 200. In some embodiments, theopenings 202 c may be reinforced, such as with PFA or PTFE rings or sleeves, for example. The reinforcements may be made of other materials as well. - With continued reference to the Figures, further details are now provided concerning the
example pump body 104. Similar to thepump head 102, thepump body 104 may, in some embodiments, be formed of a single piece of material. As indicated in the Figures, thepump body 104 may include apump head mount 104 d that is generally circular in shape. Thepump head mount 104 d may include external threads configured to releasably engage corresponding threads of the union nut 106 (seeFIG. 3 ). Thepump head mount 104 d may include a plurality ofrecesses 104 e, whose characteristics may be similar, if not identical, to those of therecesses 102 a defined by thepump head 102. Correspondingly, the disclosure herein concerning therecesses 102 a applies equally to therecesses 104 e. As indicated in the Figures, each of therecesses 104 e is configured to receive a portion of a retainingelement 300. As best illustrated inFIG. 3 , the 102 a and 104 e are located outside the pump seal. In other embodiments however, the pump seal may be located outside therecesses 102 a and 104 e.recesses - With attention now to
FIG. 4 , details are provided concerning control CC systems for fluid pumps, such as air-operated diaphragm pumps for example. One example of such a control system is denoted generally at 400. As indicated, thecontrol system 400 may operate in connection with one or more fluid pumps, such as thefluid pump 100, examples of which are disclosed herein. A differentialpressure measurement device 150, which may be an element of thecontrol system 400, can be provided for use in conjunction with thecontrol system 400. Any of a variety of differential pressure measurement device(s) can be used. Some examples of such differential pressure measurement devices include, but are not limited to, flow meters, orifice plates, flow nozzles, laminar flow elements, low-loss flow tubes, segmental wedges, V-cones, and venturi tubes. In at least some embodiments, a differential pressure measurement device uses one or more pressure transducers to sense pressure and convert the sensed pressure into a signal that can be transmitted by the transducer to another component, such as a pump controller for example. In brief, a process fluid may be provided to a suction side of thefluid pump 100, exit a discharge side of thefluid pump 100, and then monitored by the differentialpressure measurement device 150. - The
control system 400 may include, or operate in connection with, a variety of systems. In the example ofFIG. 4 , acontrol air system 500 is provided that is operable to control the performance of thefluid pump 100. Thecontrol air system 500, is controlled by way of apump controller 600 that can take a variety of forms, examples of which include a microcontroller or a programmable logic controller (PLC), which could include one or more field programmable gate arrays (FPGA), and/or application-specific integrated circuits (ASIC) for example. The aforementioned elements may be referred to generally herein as programmable elements. While not required, thepump controller 600 can be mounted directly to thefluid pump 100, or alternatively may be a component separate from thefluid pump 100, or may be integrated into a component of thefluid pump 100 such as thepump base 105,pump body 104, or pump head(s) 102. Further details concerning the configuration of anexample pump controller 600 are set forth below in the discussion ofFIG. 5 . - Inputs such as
fluid pump 100 flow rate and acceptable pulse values, or pulsation ranges for thefluid pump 100 discharge, can be set in thepump controller 600. In general, thepump controller 600 dictates how each of the connected components, such as the components of thecontrol air system 500, operates. As well, thepump controller 600 controls each side of thefluid pump 100 independently by way of the control air system 500 (see, e.g., Appendix 1 to the ‘Related Application’ at page 8). Thecontrol air system 500 is also controlled by thepump controller 600 to implement overlap, that is, overlapping pump strokes, in thefluid pump 100, by adjusting the amount of time eachpump head 102 is under positive pressure, and negative pressure, or vacuum. By automatically adjusting the overlap between pump strokes, thepump controller 600 may, among other things, automatically maintain thefluid pump 100 operation at an acceptable level of pulsation. - It should be noted that while referred to herein as a control air system, the
control air system 500 is not limited to use with air and, in other embodiments, can use other gas(es) as an operating fluid, including inert gases such as nitrogen for example. In at least some embodiments, the operating fluid is pressurized clean dry air (CDA). The amount of permissible moisture, or dew point, of the CDA can be dictated by the various components that are employed in thecontrol air system 500, and the desired dew point can be achieved with a variety of different equipment and components. For example, a refrigeration dryer can produce CDA with a dew point in the range of about 37 F. to about 50 F. As another example, a desiccant dryer can produce CDA with a dew point in the range of about −40 F. to about −100 F. As a final example, a membrane dryer can produce CDA with a dew point in the range of about −40 F. to about +35 F. - As indicated in the example of
FIG. 4 , thecontrol air system 500 includes a variety of components. In general, any of thecontrol air system 500 components that are controlled by thepump controller 600 may be configured so as to report on any aspect of their performance and configuration to thepump controller 600, and such reporting information can be used by thepump controller 600 to automatically adjust the corresponding component(s) of thecontrol air system 500 so as to achieve a desired effect, or effects, with respect to the performance of thecontrol air system 500 and/or thefluid pump 100. As such, thecontrol system 400, which may comprise at least thecontrol air system 500 andpump controller 600, constitutes a closed-loop control system. Moreover, operational parameters for any of thecontrol air system 500 components can be programmed into thepump controller 600 and used as a basis for automatic adjustment of the performance of those components by thepump controller 600. - Further, it will be appreciated that any individual component of the
control air system 500, for example, can be configured in a closed-loop feedback arrangement where thepump controller 600 provides a control signal to that component, receives a feedback signal from the component concerning one or more aspects of the configuration and/or performance of that component, and thepump controller 600 can then send an updated control signal to the component based upon the feedback signal received by thepump controller 600 from that component. In other embodiments, any one or more individual components of thecontrol air system 500 may operate in an open-loop configuration where no feedback is provided from the component(s) to thepump controller 600. - It should be noted that while the example of
FIG. 4 , discussed below, involves the use of CDA as a control medium, the scope of the invention is not limited to CDA, as noted elsewhere herein. Thus, any and all of the components inFIG. 4 can be used with any other suitable control medium, whether in the configuration and arrangement shown inFIG. 4 , or in one or more alternative configurations and arrangements. In the particular example ofFIG. 4 , aCDA supply 502 provides dry air to an electronically controlledregulator 504 that is used to controlfluid pump 100 suction and discharge operations, and astandard regulator 506 that is used to controlfluid pump 100 suction and discharge operations. The electronically controlledregulator 504 can be automatically controlled by thepump controller 600, while thestandard regulator 506 can be manually controlled. - In this example, the electronically controlled
regulator 504 andstandard regulator 506 are arranged in parallel with respect to each other. With regard to their respective functions, the electronically controlledregulator 504 regulates the CDA pressure to a level set by thepump controller 600. More specifically, thepump controller 600 sends a signal to the electronically controlledregulator 504 to automatically adjust the pressure of the CDA supplied to thefluid pump 100. In general, the CDA pressure affects the output of thefluid pump 100. For example, a relatively higher CDA supply pressure may increasefluid pump 100 output, while a relatively lower CDA supply pressure may result in a decrease influid pump 100 output. In at least some embodiments, the electronically controlledregulator 504 reports the pressure of the supplied CDA to thepump controller 600. - The
standard regulator 506 can be used to manually regulate the pressure of the CDA that is supplied to thevacuum generator 508. The CDA supply pressure may be set at a fixed value foroptimum vacuum generator 508 performance. Thevacuum generator 508 operates to cause afluid pump 100 suction operation by creating a vacuum, or negative pressure, on one side of the diaphragm(s) 200. The vacuum causes a displacement of the diaphragm in the fluid chamber, thereby drawing bulk fluid into thefluid pump 100. - As further indicated in
FIG. 4 , thecontrol air system 500 may include a first solenoid valve 510 (“A”) and a second solenoid valve 512 (“B”). Each of thefirst solenoid valve 510 andsecond solenoid valve 512 is electronically, and automatically, controlled by thepump controller 600 and supplied with CDA pressure and vacuum from the electronically controlledregulator 504 and thestandard regulator 506. In general, thefirst solenoid valve 510 andsecond solenoid valve 512 alternate between supplying a vacuum and positive pressure to thefluid pump 100. - For example, in a first part of a pump cycle, the
first solenoid valve 510 can provide positive CDA pressure to one side of thefluid pump 100, while at the same time, thesecond solenoid valve 512 can provide a vacuum to the other side of thefluid pump 100. In the second part of that pump cycle, the solenoid valve functions are reversed, and thefirst solenoid valve 510 can provide a vacuum to one side of thefluid pump 100, while at the same time, thesecond solenoid valve 512 can provide a positive CDA pressure to the other side of thefluid pump 100. Thus, thefirst solenoid valve 510 and thesecond solenoid valve 512 cooperatively operate in a complementary fashion to displace the diaphragm. - More particularly, when one of the
first solenoid valve 510 andsecond solenoid valve 512 is switched to vacuum, that solenoid valve causes liquid to be drawn into one side of the pump. When that solenoid valve is switched to pressure, that solenoid valve causes fluid to be pushed out of one side of thefluid pump 100. Thus, the provision of two solenoid valves independently connected with different respective sides of thefluid pump 100 allows for specific control of each chamber of thefluid pump 100. Moreover, by controlling the amount of time each chamber of thefluid pump 100 is in a vacuum state versus being in a positive pressure state, the positive and/or negative pressure cycles can be caused to overlap with each other, resulting in a low pulse flow. - With continued reference to
FIG. 4 , thecontrol air system 500 further includes amuffler 514 that is connected to the first andsecond solenoid valves 510/512. In general, themuffler 514 can reduce the volume of the sound that is produced when compressed air is exhausted to the atmosphere by the first andsecond solenoid valves 510/512, and by thevacuum generator 508. - As further indicated in
FIG. 4 , aflow control valve 516 is located in the discharge line of each of the first andsecond solenoid valves 510/512. In some embodiments, theflow control valves 516 take the form of electronically controllable needle valves whose operation can be automatically controlled by thepump controller 600. Any other suitable electronically controllable flow control valve can alternatively be used however and the scope of the invention is not limited to needle valves. - In terms of their operation, the
flow control valves 516 regulate the rate at which CDA and vacuum, as applicable, are applied to the two sides of thefluid pump 100, that is, the respective sides of the diaphragm(s) 200. Automatic adjustments to the position of theflow control valves 516, which can be implemented by way of thepump controller 600, allow the pulsation in the fluid flow through thefluid pump 100 to be reduced. Theflow control valves 516 thus enable thepump controller 600 to automatically adjust the response time of the pressure change in one side of thefluid pump 100. In some embodiments at least, theflow control valves 516 are able to report their position, that is, the extent to which they are open or closed, to thepump controller 600. - As further indicated in
FIG. 4 , embodiments of the invention may include a power supply system, one example of which is denoted at 700. In general, thepower supply system 700 can supply electrical power to various components of thecontrol air system 500, as well as to the differentialpressure measurement device 150, and thepump controller 600. In the particular embodiment disclosed inFIG. 4 , thepower supply system 700 includes a 24VDC power supply 702 that provides power to various components of thecontrol air system 500, including the electronically controlledregulator 504, thefirst solenoid valve 510, thesecond solenoid valve 512, and the electronically controlledflow control valves 516. - It will be appreciated that power supplies of different types such as AC and DC power supplies, and different voltages, can alternatively be employed. Accordingly, the
power supply system 700 is presented by way of example only and is not intended to limit the scope of the invention in any way. - With reference now to
FIG. 5 , details are provided concerning an example embodiment of a pump controller, denoted generally at 600. In the illustrated example, thepump controller 600 includes apower connection 602 that can be electrically connected to a power supply, afeedback connection 604 that can be electrically connected to a flow meter transducer, and one ormore control connections 606, each of which can be electrically connected to a respective element of thecontrol air system 500. - As well, the
pump controller 600 includes a number of other elements specifically relating to its various functions, disclosed elsewhere herein. For example, the illustratedpump controller 600 can include one or more lookup tables 608,applications 610, one ormore processors 612,memory 614 which can include RAM and/or ROM, and any type of non-volatile memory. Thepump controller 600 may further include one or moreprogrammable elements 616, and a user interface (UI) 618 by way of which a user can operate and program thepump controller 600. Finally, thepump controller 600 can include a housing/mount 620 that houses the various elements of thepump controller 600 and which may be mountable to various structures, including elements of a fluid pump. - With continued attention to
FIGS. 1-5 , further details are provided concerning operational aspects of some example embodiments. Initially, thepump controller 600 can be pre-programmed, or reprogrammed, depending upon the circumstances, with a variety of inputs that can then be used by thepump controller 600 as reference points for making adjustments to one or more elements of thecontrol air system 500 based on feedback received from one or more of thecontrol air system 500, the differentialpressure measurement device 150, and/or thefluid pump 100. In one particular embodiment, the inputs used by thepump controller 600 include a minimum acceptable flow rate, or range of flow rates, of thefluid pump 100, and an acceptable pulse value, or pulsation range, for thefluid pump 100 discharge. The pulse value, or pulsation range, can be expressed in terms of a maximum acceptable change in the fluid discharge pressure of thefluid pump 100 that occurs during the time when a first chamber of the fluid pump transitions from a vacuum state to a pressure state and the second chamber of the fluid pump transitions from a pressure state to a vacuum state (see, e.g., Appendix 1 to the ‘Related Application’ at page 8). Of course, other inputs can also be programmed into thepump controller 600, and the scope of the invention is not limited to the aforementioned examples. - In more detail, the
pump controller 600 can control the operation of a component based on input received not from the controlled component, but from one or more other components. To this end, thepump controller 600 can include one or more tables, equations, or maps for example, that map particular input values received by thepump controller 600 with corresponding output control signals that will be generated by thepump controller 600 and transmitted to various controlled components. The controlled components may include, for example, any one or more of the electronically controlledregulator 504, thefirst solenoid valve 510, thesecond solenoid valve 512, and theflow control valves 516. - By way of illustration, the table or map can correlate various
fluid pump 100 discharge flow rates, measured and reported by the differentialpressure measurement device 150, with particular positions of one or both of theflow control valves 516. Thus, for example, if the reported flow rate from thefluid pump 100 is unacceptably low/high and/or the pulse value of thefluid pump 100 discharge is unacceptably high, thepump controller 600 can perform a lookup process using the table or map and determine the output control signal that must be transmitted to the flow control valve(s) 516 in order to achieve the desired flow rate, and the output control signal(s) that must be transmitted to one or more of the electronically controlledregulator 504 and/or the first andsecond solenoid valves 510/512 in order to achieve the desired pulse value. Once the appropriate control signals are determined, thepump controller 600 can then send the control signals to theflow control valve 516 and/or the electronically controlledregulator 504 and/or the first andsecond solenoid valves 510/512, as appropriate. In some embodiments at least, one, some, or all of theflow control valves 516, electronically controlledregulator 504 and/or the first andsecond solenoid valves 510/512, may send an acknowledgement to thepump controller 600 that the control signal has been received and acted upon. In other embodiments, no acknowledgement signal is sent by the controlled component(s) to thepump controller 600. The same general process discussed in this illustration can be applied as well to any other component controlled by thepump controller 600. - In the preceding illustrative example, the
pump controller 600 controls a component based upon input received from one or more other components but does not use input from the controlled component itself. In other embodiments however, thepump controller 600 can control a component based on input received from the controlled component itself, and with or without input received from one or more other components. - By way of illustration, a
flow control valve 516 can report its position, that is, the extent to which theflow control valve 516 is open, to thepump controller 600 and thepump controller 600 can compare the received input with data in the table to determine whether an adjustment should be made to the position of theflow control valve 516. Where an adjustment is required, such as when the input received from the controlled component, theflow control valve 516 in this example, does not fall in a desired range, which can be specified in a map or table in thepump controller 600, thepump controller 600 can then send a corresponding control signal, which also may be specified in the map or table, to theflow control valve 516 to adjust the configuration and/or performance of theflow control valve 516. Similar processes can be implemented in connection with any other device, or combination of devices, controlled by thepump controller 600, including any one or more of the electronically controlledregulator 504, thefirst solenoid valve 510, thesecond solenoid valve 512, and theflow control valves 516. - Although this disclosure has been described in terms of certain embodiments, other embodiments apparent to those of ordinary skill in the art are also within the scope of this disclosure. Accordingly, the scope of the disclosure is intended to be defined only by the claims which follow.
Claims (19)
1. A pump controller, comprising:
a power connection;
a plurality of control signal connections;
a feedback signal connection;
one or more programmable elements; and
one or more processors connected with the programmable elements and the feedback signal connection,
wherein when the programmable elements are programmed for automatic control of a fluid pump, the pump controller is operable to automatically control operation of the fluid pump through a closed loop system, and wherein the pump controller is further operable to control a pulse value associated with operation of the fluid pump.
2. The pump controller as recited in claim 1 , wherein the pump controller is configured to be connected with one or more elements of a control air system.
3. The pump controller as recited in claim 1 , wherein the fluid pump is an air-operated diaphragm pump.
4. The pump controller as recited in claim 1 , wherein the pump controller is configured to be directly mounted to the fluid pump.
5. The pump controller as recited in claim 1 , wherein when the programmable elements are programmed for automatic control of a fluid pump, the pump controller is operable to automatically control a regulator, flow control valve, and solenoid valve.
6. The pump controller as recited in claim 1 , wherein the pump controller is responsive to a signal received from a differential pressure measurement device.
7. The pump controller as recited in claim 1 , wherein the fluid pump is a bellows pump.
8. A pump controller, comprising:
a plurality of connections, comprising:
an electrical power input connection;
a fluid feedback connection;
an electronically controlled regulator control connection;
a first solenoid valve control connection;
a second solenoid valve control connection;
a first flow control valve control connection; and
a second flow control valve control connection;
one or more programmable elements; and
one or more processors connected with the programmable elements and the fluid feedback connection,
wherein when the programmable elements are programmed for automatic control of a fluid pump, the pump controller is operable to automatically control, by transmitting and/or receiving signals by way of the connections, a phase overlap associated with suction and discharge operations of the fluid pump.
9. The pump controller as recited in claim 8 , wherein automatic control of the phase overlap comprises automatic control of an amount of time that one or more chambers of the fluid pump are in a positive pressure state and in a vacuum state.
10. The pump controller as recited in claim 8 , wherein automatic control of the phase overlap comprises automatic control of a flow of control fluid to one or more chambers of the fluid pump.
11. The pump controller as recited in claim 8 , wherein automatic control of the phase overlap comprises automatic control of a pulse value associated with operation of the fluid pump.
12. The pump controller as recited in claim 8 , wherein automatic control of phase overlap comprises control of a flow of control fluid to each of first and second chambers of the fluid pump independently of each other.
13. The pump controller as recited in claim 8 , wherein automatic control of phase overlap comprises control of movement of first and second diaphragms of the fluid pump independently of each other.
14. The pump controller as recited in claim 8 , wherein the pump controller is configured to be mounted to, or integrated with, the fluid pump.
15. The pump controller as recited in claim 8 , wherein the pump controller is operable to receive, and act upon, feedback received from a differential pressure measurement device by way of the fluid feedback connection.
16. The pump controller as recited in claim 8 , wherein the programmable elements are programmable to include values for the following: one or more acceptable flow rates; and, one or more acceptable pulse values.
17. The pump controller as recited in claim 8 , wherein the programmable elements are programmable to include values for the following: air supply pressure; vacuum pressure; pump cycle time; phase overlap; and pump head air supply orifice size.
18. The pump controller as recited in claim 8 , wherein the pump controller is operable to facilitate control of any one or more of: control fluid supply pressure to first and second chambers of the fluid pump; vacuum pressure in the first and second chambers; fluid pump cycle time; and, fluid pump head air supply orifice size.
19. The pump controller as recited in claim 8 , wherein the pump controller is operable, in response to feedback received from a differential pressure measurement device, to generate and transmit a control signal to any one or more of: an electronically controlled regulator control; a first solenoid valve; a second solenoid valve; a first flow control valve control; and, a second flow control valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US16/246,264 US20190145401A1 (en) | 2015-07-09 | 2019-01-11 | Automated cross-phase pump and controller |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562190599P | 2015-07-09 | 2015-07-09 | |
| US15/198,551 US10508648B2 (en) | 2015-07-09 | 2016-06-30 | Automated cross-phase pump and controller |
| US16/246,264 US20190145401A1 (en) | 2015-07-09 | 2019-01-11 | Automated cross-phase pump and controller |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US15/198,551 Division US10508648B2 (en) | 2015-07-09 | 2016-06-30 | Automated cross-phase pump and controller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20190145401A1 true US20190145401A1 (en) | 2019-05-16 |
Family
ID=57730601
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US15/198,551 Active 2037-07-07 US10508648B2 (en) | 2015-07-09 | 2016-06-30 | Automated cross-phase pump and controller |
| US16/246,264 Abandoned US20190145401A1 (en) | 2015-07-09 | 2019-01-11 | Automated cross-phase pump and controller |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US15/198,551 Active 2037-07-07 US10508648B2 (en) | 2015-07-09 | 2016-06-30 | Automated cross-phase pump and controller |
Country Status (1)
| Country | Link |
|---|---|
| US (2) | US10508648B2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6478547B1 (en) * | 1999-10-18 | 2002-11-12 | Integrated Designs L.P. | Method and apparatus for dispensing fluids |
| JP4740872B2 (en) * | 2004-11-01 | 2011-08-03 | シーケーディ株式会社 | Chemical supply pump |
| EP1952022B1 (en) * | 2005-11-21 | 2014-11-12 | Entegris, Inc. | System and method for a pump with reduced form factor |
-
2016
- 2016-06-30 US US15/198,551 patent/US10508648B2/en active Active
-
2019
- 2019-01-11 US US16/246,264 patent/US20190145401A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| US20170009763A1 (en) | 2017-01-12 |
| US10508648B2 (en) | 2019-12-17 |
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