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US20190080137A1 - Flat-panel display embedded with a fingerprint sensor and a method of forming the same - Google Patents

Flat-panel display embedded with a fingerprint sensor and a method of forming the same Download PDF

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Publication number
US20190080137A1
US20190080137A1 US15/857,248 US201715857248A US2019080137A1 US 20190080137 A1 US20190080137 A1 US 20190080137A1 US 201715857248 A US201715857248 A US 201715857248A US 2019080137 A1 US2019080137 A1 US 2019080137A1
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layer
dielectric layer
lens region
photo sensor
flat
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US15/857,248
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US10248831B1 (en
Inventor
Ilin WU
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Himax Technologies Ltd
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Himax Technologies Ltd
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    • G06V40/1318—Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing
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    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
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    • H10F71/1221—The active layers comprising only Group IV materials comprising polycrystalline silicon
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    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6741—Group IV materials, e.g. germanium or silicon carbide
    • H10D30/6743—Silicon
    • H10D30/6745—Polycrystalline or microcrystalline silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/451—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs characterised by the compositions or shapes of the interlayer dielectrics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/842—Containers
    • H10K50/8428—Vertical spacers, e.g. arranged between the sealing arrangement and the OLED
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/131—Interconnections, e.g. wiring lines or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]

Definitions

  • the present invention generally relates to a fingerprint sensor, and more particularly to a flat-panel display embedded with a fingerprint sensor.
  • a mobile device such as a smartphone, is a computing device small enough to hold and operate in the hand.
  • the mobile device typically has a touchscreen that occupies substantial front surface (e.g., 70%) of the mobile device.
  • Modern mobile devices may have or be able to perform many functions adaptable to wide variety of purposes such as social interaction, financial transactions, and personal or business communications.
  • fingerprint is one of many forms of biometrics used to identify individuals and verify their identity in order to protect confidential or sensitive data stored in the mobile devices. Fingerprint recognition is not only a secure way of identifying individuals, but also a quick means for accessing the mobile device.
  • fingerprint recognition is typically implemented with a physical button disposed on the front surface, for example, below and external to the touchscreen. Placing a fingerprint button on the front surface of the mobile devices is unfortunately in contradiction with the trend toward a bigger touchscreen that can accommodate more functions as the mobile devices become more powerful.
  • a flat-panel display such as liquid crystal display (LCD) or organic light-emitting diode (OLED) display, embedded with a fingerprint sensor.
  • LCD liquid crystal display
  • OLED organic light-emitting diode
  • a flat-panel display includes a substrate, a photo sensor, a lens region and a light barrier.
  • the photo sensor is formed on a bottom surface of the substrate.
  • the lens region is disposed above and substantially aligned with the photo sensor vertically.
  • the light barrier is substantially aligned with the photo sensor vertically and disposed between the photo sensor and the lens region.
  • FIG. 1 shows a cross-sectional view of a liquid crystal display (LCD) embedded with a fingerprint sensor according to a first embodiment of the present invention
  • FIG. 2 shows a schematic diagram functionally illustrating the fingerprint sensor of the embodiment
  • FIG. 3A to FIG. 3G show cross-sectional views illustrated of a method of forming the LCD of FIG. 1 ;
  • FIG. 4 shows a cross-sectional view of a liquid crystal display (LCD) embedded with a fingerprint sensor according to a second embodiment of the present invention
  • FIG. 5A to FIG. 5B show cross-sectional views illustrated of a method of forming the LCD of FIG. 4 ;
  • FIG. 6 shows a cross-sectional view of a light-emitting diode (LED) display embedded with a fingerprint sensor according to a third embodiment of the present invention
  • FIG. 7A to FIG. 7G show cross-sectional views illustrated of a method of forming the LED display of FIG. 6 ;
  • FIG. 8 shows a cross-sectional view of a light-emitting diode (LED) display embedded with a fingerprint sensor according to a fourth embodiment of the present invention
  • FIG. 9A to FIG. 9B show cross-sectional views illustrated of a method of forming the LED display of FIG. 8 ;
  • FIG. 10 shows a cross-sectional view of a light-emitting diode (LED) display embedded with a fingerprint sensor according to a fifth embodiment of the present invention.
  • FIG. 11A to FIG. 11B show cross-sectional views illustrated of a method of forming the LED display of FIG. 10 .
  • FIG. 1 shows a cross-sectional view of a liquid crystal display (LCD) 100 embedded with a fingerprint sensor, which is integrated in an active area of the LCD 100 , according to a first embodiment of the present invention.
  • the LCD 100 may, for example, a thin-film transistor (TFT) LCD.
  • TFT thin-film transistor
  • the LCD 100 may include a TFT substrate 11 , on a top surface of which a first dielectric layer 12 is formed.
  • the first dielectric layer 12 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN).
  • a plurality of TFTs 13 are formed in the first dielectric layer 12 .
  • the TFT 13 may include a polysilicon (abbreviated as poly) layer (as a channel) 131 , a first metal layer (as a gate) 132 disposed above the polysilicon layer 131 , and a second metal layer (as source and drain) 133 disposed on the polysilicon layer 131 and enclosing the first metal layer 132 , where the first metal layer (M 1 ) 132 is insulated from the second metal layer (M 2 ) 133 by the first dielectric layer 12 .
  • a polysilicon abbreviated as poly
  • At least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11 .
  • the photo sensor 14 may include a complementary metal-oxide-semiconductor (CMOS) image sensor.
  • CMOS complementary metal-oxide-semiconductor
  • the LCD 100 of the embodiment may include a light source such as backlight module (not shown) disposed below the TFT substrate 11 .
  • the light source of the LCD 100 may emit a visible or invisible light beam.
  • a light barrier 10 substantially aligned with the photo sensor 14 vertically is formed in the first dielectric layer 12 .
  • the light barrier 10 may include the polysilicon layer 131 , the first metal layer 132 and the second metal layer 133 that surround a passage.
  • a light beam representing a fingerprint passes the lens region 20 and the passage, and is then detected by the photo sensor 14 .
  • the light barrier 10 may be utilized to block or shield (oblique) light coming from directions other than the passage direction leading to the photo sensor 14 .
  • the LCD 100 of the embodiment may include a transparent planarization (PLN) layer 15 , with a substantially smooth top surface, formed over the first dielectric layer 12 .
  • the planarization layer 15 is made of a transparent material such as resin, through which light is allowed to transmit.
  • the LCD 100 of the embodiment may include a second dielectric layer 16 formed on the planarization layer 15 .
  • the second dielectric layer 16 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN).
  • At least one conductive layer is formed in the second dielectric layer 16 .
  • the at least one conductive layer may include a first indium tin oxide (ITO) layer 161 formed at the bottom of the second dielectric layer 16 (e.g., formed on the planarization layer 15 ) and a second ITO layer 162 formed at the top of the second dielectric layer 16 (e.g., formed over the first ITO layer 161 ).
  • the first ITO layer 161 is insulated from the second ITO layer 162 by the second dielectric layer 16 .
  • the LCD 100 of the embodiment may include a liquid crystal (LC) layer 17 formed over the second dielectric layer 16 . At least one transparent photo spacer 171 is disposed in the LC layer 17 to isolate adjacent LC regions from each other.
  • the photo spacer 171 of the LCD 100 may be made of a transparent material such as resin.
  • the LCD 100 may further include a color filter (CF) layer 18 formed over the LC layer 17 .
  • the CF layer 18 is disposed on a bottom surface of a CF substrate 19 .
  • the CF layer 18 may include a plurality of color filters such as red, green and blue filters, through which red, green and blue lights can transmit, respectively.
  • the CF layer 18 may also include at least one black filter, through which no light can transmit.
  • the areas not covered by the black filter constitute a display area. As shown in FIG. 1 , the black filter is substantially aligned with the underlying photo spacer 171 . In the embodiment, the photo sensor 14 is in an active display area not overlapping with a back filter of the CF layer 18 .
  • the LCD 100 may include at least one lens region 20 disposed above and substantially aligned with the photo sensor 14 vertically.
  • the lens region 20 is protruded upwards from, and connected to, a top surface of the planarization layer 15 .
  • the lens region 20 may include a transparent material, which may be the same as or different from the planarization layer 15 .
  • the lens region 20 is elongated vertically and passes through, from bottom to top, the second dielectric layer 16 , the LC layer 17 and the CF layer 18 .
  • the LCD 100 is embedded with a fingerprint sensor composed of the light source, the lens region 20 and the photo sensor 14 .
  • FIG. 2 shows a schematic diagram functionally illustrating the fingerprint sensor of the embodiment. Specifically, a light source 21 emits a light beam towards a finger 22 .
  • the lens region 20 acts as a rod lens 23 that focuses the light beam reflected from a fingerprint.
  • the light beam representing the fingerprint is then detected by the photo sensor 14 , which acts a photo detector 24 that converts light into an electrical signal.
  • FIG. 3A to FIG. 3G show cross-sectional views illustrated of a method of forming the LCD 100 of FIG. 1 . It is appreciated that the method of forming the LCD 100 may be performed in sequences other than that exemplified in FIG. 3A to FIG. 3G .
  • a first layer 12 _ 1 of a first dielectric layer 12 is formed on a top surface of a TFT substrate 11 , followed by forming a polysilicon layer 131 in the first layer 12 _ 1 of the first dielectric layer 12 .
  • At least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11 .
  • a second layer 12 _ 2 of the first dielectric layer 12 is formed on the first layer 12 _ 1 of the first dielectric layer 12 , followed by forming a first metal layer (M 1 ) 132 in the second layer 12 _ 2 of the first dielectric layer 12 .
  • M 1 first metal layer
  • a third layer 12 _ 3 of the first dielectric layer 12 is formed on the second layer 12 _ 2 of the first dielectric layer 12 , followed by forming a second metal layer (M 2 ) 133 in the third layer 12 _ 3 of the first dielectric layer 12 . Accordingly, the TFT 13 and the light barrier 10 are formed in the first dielectric layer 12 .
  • a planarization (PLN) layer 15 is formed over the first dielectric layer 12 .
  • a first layer 16 _ 1 of a second dielectric layer 16 is formed on the planarization layer 15 , followed by forming a first indium tin oxide (ITO) layer 161 in the first layer 16 _ 1 of the second dielectric layer 16 .
  • ITO indium tin oxide
  • a second layer 16 _ 2 of the second dielectric layer 16 is formed on the first layer 16 _ 1 of the second dielectric layer 16 , followed by forming a second ITO layer 162 in the second layer 16 _ 2 of the second dielectric layer 16 .
  • a liquid crystal (LC) layer 17 is formed over the second dielectric layer 16 , and at least one transparent photo spacer 171 is formed in the LC layer 17 to isolate adjacent LC regions from each other.
  • a color filter (CF) layer 18 is formed over the LC layer 17 .
  • at least one lens region 20 is formed in the CF layer 18 , the LC layer 17 and the second dielectric layer 16 .
  • the lens region 20 is connected to a top surface of the planarization layer 15 , and is substantially aligned with the photo sensor 14 vertically.
  • a CF substrate 19 is formed to cover the CF layer 18 .
  • FIG. 4 shows a cross-sectional view of a liquid crystal display (LCD) 300 embedded with a fingerprint sensor, which is integrated in an active area of the LCD 300 , according to a second embodiment of the present invention.
  • the present embodiment is similar to the first embodiment ( FIG. 1 ) with the exceptions that will be described below.
  • the lens region 20 is disposed in the LC layer 17 , and is substantially parallel to the photo spacer 171 .
  • the lens region 20 may include a transparent material, which may be the same as or different from the photo spacer 171 .
  • the lens region 20 is elongated vertically and passes through, from bottom to top, the LC layer 17 and the CF layer 18 .
  • FIG. 5A to FIG. 5B show cross-sectional views illustrated of a method of forming the LCD 300 of FIG. 4 . It is appreciated that the method of forming the LCD 300 may be performed in sequences other than that exemplified in FIG. 5A to FIG. 5B .
  • the method of the embodiment may include same steps as shown in FIG. 3A to FIG. 3E .
  • a color filter (CF) layer 18 is formed over the LC layer 17 .
  • at least one lens region 20 is formed in the CF layer 18 and the LC layer 17 .
  • the lens region 20 is connected to a top surface of the second dielectric layer 16 , and is substantially aligned with the photo sensor 14 vertically.
  • a CF substrate 19 is formed to cover the CF layer 18 .
  • FIG. 6 shows a cross-sectional view of a light-emitting diode (LED) display 400 embedded with a fingerprint sensor, which is integrated in an active area of the LED display 400 , according to a third embodiment of the present invention.
  • the LED display 400 may, for example, an active-matrix organic light-emitting diode (AMOLED) display.
  • AMOLED active-matrix organic light-emitting diode
  • the LED display 400 may include a TFT substrate 11 , upon which a first dielectric layer 12 is formed.
  • the first dielectric layer 12 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN).
  • a plurality of TFTs 13 are formed in the first dielectric layer 12 and on the TFT substrate 11 .
  • the TFT 13 may include a polysilicon (abbreviated as poly) layer (as a channel) 131 , a first metal layer (as a gate) 132 disposed above the polysilicon layer 131 , and a second metal layer (as source and drain) 133 disposed on the polysilicon layer 131 and enclosing the first metal layer 132 , where the first metal layer (M 1 ) 132 is insulated from the second metal layer (M 2 ) 133 by the first dielectric layer 12 .
  • a polysilicon abbreviated as poly
  • At least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11 .
  • the photo sensor 14 may include a complementary metal-oxide-semiconductor (CMOS) image sensor.
  • CMOS complementary metal-oxide-semiconductor
  • the LCD 400 of the embodiment may include a light source such as backlight module (not shown) disposed below the TFT substrate 11 .
  • the light source of the LCD 100 may emit a visible or invisible light beam.
  • a light barrier 10 substantially aligned with the photo sensor 14 vertically is formed in the first dielectric layer 12 .
  • the light barrier 10 may include the polysilicon layer 131 , the first metal layer 132 and the second metal layer 133 that surround a passage.
  • the light barrier 10 may be utilized to block or shield (oblique) light coming from directions other than the passage direction leading to the photo sensor 14 .
  • the LED display 400 of the embodiment may include a planarization (PLN) layer 15 , with a substantially smooth top surface, formed over the first dielectric layer 12 .
  • the planarization layer 15 is made of a transparent material such as resin, through which light is allowed to transmit.
  • the LED display 400 of the embodiment may include a second dielectric layer 16 formed on the planarization layer 15 .
  • the second dielectric layer 16 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN).
  • the second dielectric layer 16 may include a transparent pixel define layer (PDL) 160 , for example, formed on the planarization layer 15 . At least one conductive layer is formed in the second dielectric layer 16 . As exemplified in FIG.
  • the at least one conductive layer may include an anode layer 161 B formed at the bottom of the second dielectric layer 16 (e.g., formed on the planarization layer 15 ) and a cathode layer 162 B formed at the top of the second dielectric layer 16 (e.g., formed over the anode layer 161 B).
  • the anode layer 161 B is insulated from the cathode layer 162 B by the second dielectric layer 16 .
  • the LED display 400 may further include a color filter (CF) layer 18 formed in the second dielectric layer 16 (e.g., formed between the anode layer 161 B and the cathode layer 162 B).
  • CF color filter
  • the CF layer 18 may include a plurality of color filters such as red, green and blue filters, through which red, green and blue lights can transmit, respectively.
  • the photo sensor 14 is in an active display area not overlapping with a back filter of the CF layer 18 .
  • the LED display 400 of the embodiment may include an encapsulation layer 61 formed over the second dielectric layer 16 . At least one transparent photo spacer 171 is disposed in the encapsulation layer 61 to isolate adjacent pixels from each other.
  • the photo spacer 171 of the LED display 400 may be made of a transparent material such as resin.
  • the LED display 400 may include at least one lens region 20 disposed above and substantially aligned with the photo sensor 14 vertically.
  • the lens region 20 is protruded upwards from, and connected to, a top surface of the planarization layer 15 .
  • the lens region 20 may include a transparent material, which may be the same as or different from the planarization layer 15 .
  • the lens region 20 is elongated vertically and passes through the second dielectric layer 16 and the encapsulation layer 61 .
  • the LED display 400 may further include a cover glass 62 that covers the encapsulation layer 61 , the photo spacer 171 and the lens region 20 .
  • FIG. 7A to FIG. 7G show cross-sectional views illustrated of a method of forming the LED display 400 of FIG. 6 . It is appreciated that the method of forming the LED display 400 may be performed in sequences other than that exemplified in FIG. 7A to FIG. 7G .
  • a first layer 12 _ 1 of a first dielectric layer 12 is formed on a top surface of a TFT substrate 11 , followed by forming a polysilicon layer 131 in the first layer 12 _ 1 of the first dielectric layer 12 .
  • At least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11 .
  • FIG. 7A a first layer 12 _ 1 of a first dielectric layer 12 is formed on a top surface of a TFT substrate 11 , followed by forming a polysilicon layer 131 in the first layer 12 _ 1 of the first dielectric layer 12 .
  • At least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT
  • a second layer 12 _ 2 of the first dielectric layer 12 is formed on the first layer 12 _ 1 of the first dielectric layer 12 , followed by forming a first metal layer (M 1 ) 132 in the second layer 12 _ 2 of the first dielectric layer 12 .
  • a third layer 12 _ 3 of the first dielectric layer 12 is formed on the second layer 12 _ 2 of the first dielectric layer 12 , followed by forming a second metal layer (M 2 ) 133 in the third layer 12 _ 3 of the first dielectric layer 12 . Accordingly, the TFT 13 and the light barrier 10 are formed in the first dielectric layer 12 .
  • FIG. 1 first metal layer
  • a planarization (PLN) layer 15 is formed over the first dielectric layer 12 .
  • a first layer 16 _ 1 of a second dielectric layer 16 is formed on the planarization layer 15 , followed by forming an anode layer 161 B in the first layer 16 _ 1 of the second dielectric layer 16 .
  • the second dielectric layer 16 may include a transparent pixel define layer (PDL) 160 .
  • a second layer 16 _ 2 of the second dielectric layer 16 is formed on the first layer 16 _ 1 of the second dielectric layer 16 , followed by forming a color filter (CF) layer 18 in the second layer 16 _ 2 of the second dielectric layer 16 .
  • CF color filter
  • a cathode layer 162 B is formed on the second layer 16 _ 2 of the second dielectric layer 16 .
  • An encapsulation layer 61 is formed over the second dielectric layer 16 , and at least one transparent photo spacer 171 is formed in the encapsulation layer 61 to isolate adjacent pixels from each other.
  • at least one lens region 20 is formed in the encapsulation layer 61 and the second dielectric layer 16 .
  • the lens region 20 is connected to a top surface of the planarization layer 15 , and is substantially aligned with the photo sensor 14 vertically.
  • a cover glass 62 is formed to cover the encapsulation layer 61 , the photo spacer 171 and the lens region 20 .
  • FIG. 8 shows a cross-sectional view of a light-emitting diode (LED) display 500 embedded with a fingerprint sensor, which is integrated in an active area of the LED display 500 , according to a fourth embodiment of the present invention.
  • the present embodiment is similar to the third embodiment ( FIG. 6 ) with the exceptions that will be described below.
  • the lens region 20 is disposed above the second dielectric layer 16 (e.g., on the cathode layer 162 B), and is substantially parallel to the photo spacer 171 .
  • the lens region 20 may include a transparent material, which may be the same as or different from the photo spacer 171 .
  • FIG. 9A to FIG. 9B show cross-sectional views illustrated of a method of forming the LED display 500 of FIG. 8 . It is appreciated that the method of forming the LED display 500 may be performed in sequences other than that exemplified in FIG. 9A to FIG. 9B .
  • the method of the embodiment may include same steps as shown in FIG. 7A to FIG. 7E .
  • FIG. 9A at least one lens region 20 is formed in the encapsulation layer 61 .
  • the lens region 20 is connected to a top surface of the second dielectric layer 16 , and is substantially aligned with the photo sensor 14 vertically.
  • a cover glass 62 is formed to cover the encapsulation layer 61 , the photo spacer 171 and the lens region 20 .
  • FIG. 10 shows a cross-sectional view of a light-emitting diode (LED) display 600 embedded with a fingerprint sensor, which is integrated in an active area of the LED display 600 , according to a fifth embodiment of the present invention.
  • the present embodiment is similar to the third embodiment ( FIG. 6 ) with the exceptions that will be described below.
  • the lens region 20 is protruded upwards from, and connected to, a top surface of the pixel define layer (PDL) 160 .
  • the lens region 20 may include a transparent material, which may be the same as or different from the PDL layer 160 .
  • the lens region 20 is elongated vertically and passes through the second dielectric layer 16 and above.
  • FIG. 11A to FIG. 11B show cross-sectional views illustrated of a method of forming the LED display 600 of FIG. 10 . It is appreciated that the method of forming the LED display 600 may be performed in sequences other than that exemplified in FIG. 11A to FIG. 11B .
  • the method of the embodiment may include same steps as shown in FIG. 7A to FIG. 7E .
  • FIG. 11A at least one lens region 20 is formed in the encapsulation layer 61 and the second dielectric layer 16 .
  • the lens region 20 is connected to the PDL layer 160 , and is substantially aligned with the photo sensor 14 vertically.
  • a cover glass 62 is formed to cover the encapsulation layer 61 , the photo spacer 171 and the lens region 20 .

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Abstract

A flat-panel display embedded with a fingerprint sensor includes a substrate, a photo sensor formed on a bottom surface of the substrate, a lens region disposed above and substantially aligned with the photo sensor vertically, and a light barrier substantially aligned with the photo sensor vertically and disposed between the photo sensor and the lens region.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application claims the benefit of U.S. Provisional Application No. 62/556,129, filed on Sep. 8, 2017, the entire content of which is hereby incorporated by reference.
    • BACKGROUND OF THE INVENTION 1. Field of the Invention
  • The present invention generally relates to a fingerprint sensor, and more particularly to a flat-panel display embedded with a fingerprint sensor.
    • 2. Description of Related Art
  • A mobile device, such as a smartphone, is a computing device small enough to hold and operate in the hand. The mobile device typically has a touchscreen that occupies substantial front surface (e.g., 70%) of the mobile device.
  • Modern mobile devices may have or be able to perform many functions adaptable to wide variety of purposes such as social interaction, financial transactions, and personal or business communications. With this concern, fingerprint is one of many forms of biometrics used to identify individuals and verify their identity in order to protect confidential or sensitive data stored in the mobile devices. Fingerprint recognition is not only a secure way of identifying individuals, but also a quick means for accessing the mobile device.
  • Many mobile devices (e.g., smartphones) have been equipped with fingerprint recognition, which is typically implemented with a physical button disposed on the front surface, for example, below and external to the touchscreen. Placing a fingerprint button on the front surface of the mobile devices is unfortunately in contradiction with the trend toward a bigger touchscreen that can accommodate more functions as the mobile devices become more powerful.
  • For the reason that expandability of the conventional mobile devices is hindered by placing a fingerprint button on the mobile devices, a need has thus arisen to propose a novel scheme to effectively provide fingerprint recognition in mobile devices.
    • SUMMARY OF THE INVENTION
  • In view of the foregoing, it is an object of the embodiment of the present invention to provide a flat-panel display, such as liquid crystal display (LCD) or organic light-emitting diode (OLED) display, embedded with a fingerprint sensor.
  • According to one embodiment, a flat-panel display includes a substrate, a photo sensor, a lens region and a light barrier. The photo sensor is formed on a bottom surface of the substrate. The lens region is disposed above and substantially aligned with the photo sensor vertically. The light barrier is substantially aligned with the photo sensor vertically and disposed between the photo sensor and the lens region.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 shows a cross-sectional view of a liquid crystal display (LCD) embedded with a fingerprint sensor according to a first embodiment of the present invention;
  • FIG. 2 shows a schematic diagram functionally illustrating the fingerprint sensor of the embodiment;
  • FIG. 3A to FIG. 3G show cross-sectional views illustrated of a method of forming the LCD of FIG. 1;
  • FIG. 4 shows a cross-sectional view of a liquid crystal display (LCD) embedded with a fingerprint sensor according to a second embodiment of the present invention;
  • FIG. 5A to FIG. 5B show cross-sectional views illustrated of a method of forming the LCD of FIG. 4;
  • FIG. 6 shows a cross-sectional view of a light-emitting diode (LED) display embedded with a fingerprint sensor according to a third embodiment of the present invention;
  • FIG. 7A to FIG. 7G show cross-sectional views illustrated of a method of forming the LED display of FIG. 6;
  • FIG. 8 shows a cross-sectional view of a light-emitting diode (LED) display embedded with a fingerprint sensor according to a fourth embodiment of the present invention;
  • FIG. 9A to FIG. 9B show cross-sectional views illustrated of a method of forming the LED display of FIG. 8;
  • FIG. 10 shows a cross-sectional view of a light-emitting diode (LED) display embedded with a fingerprint sensor according to a fifth embodiment of the present invention; and
  • FIG. 11A to FIG. 11B show cross-sectional views illustrated of a method of forming the LED display of FIG. 10.
    •  DETAILED DESCRIPTION OF THE INVENTION
  • FIG. 1 shows a cross-sectional view of a liquid crystal display (LCD) 100 embedded with a fingerprint sensor, which is integrated in an active area of the LCD 100, according to a first embodiment of the present invention. The LCD 100 may, for example, a thin-film transistor (TFT) LCD. For better understanding the present invention, only elements pertinent to aspects of the embodiment have been shown.
  • In the embodiment, the LCD 100 may include a TFT substrate 11, on a top surface of which a first dielectric layer 12 is formed. The first dielectric layer 12 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN). A plurality of TFTs 13 are formed in the first dielectric layer 12. The TFT 13 may include a polysilicon (abbreviated as poly) layer (as a channel) 131, a first metal layer (as a gate) 132 disposed above the polysilicon layer 131, and a second metal layer (as source and drain) 133 disposed on the polysilicon layer 131 and enclosing the first metal layer 132, where the first metal layer (M1) 132 is insulated from the second metal layer (M2) 133 by the first dielectric layer 12.
  • According to one aspect of the embodiment, at least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11. The photo sensor 14 may include a complementary metal-oxide-semiconductor (CMOS) image sensor. The LCD 100 of the embodiment may include a light source such as backlight module (not shown) disposed below the TFT substrate 11. The light source of the LCD 100 may emit a visible or invisible light beam.
  • According to another aspect of the embodiment, a light barrier 10 substantially aligned with the photo sensor 14 vertically is formed in the first dielectric layer 12. In the embodiment, the light barrier 10 may include the polysilicon layer 131, the first metal layer 132 and the second metal layer 133 that surround a passage. A light beam representing a fingerprint passes the lens region 20 and the passage, and is then detected by the photo sensor 14. The light barrier 10 may be utilized to block or shield (oblique) light coming from directions other than the passage direction leading to the photo sensor 14.
  • The LCD 100 of the embodiment may include a transparent planarization (PLN) layer 15, with a substantially smooth top surface, formed over the first dielectric layer 12. The planarization layer 15 is made of a transparent material such as resin, through which light is allowed to transmit.
  • The LCD 100 of the embodiment may include a second dielectric layer 16 formed on the planarization layer 15. The second dielectric layer 16 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN). At least one conductive layer is formed in the second dielectric layer 16. As exemplified in FIG. 1, the at least one conductive layer may include a first indium tin oxide (ITO) layer 161 formed at the bottom of the second dielectric layer 16 (e.g., formed on the planarization layer 15) and a second ITO layer 162 formed at the top of the second dielectric layer 16 (e.g., formed over the first ITO layer 161). The first ITO layer 161 is insulated from the second ITO layer 162 by the second dielectric layer 16.
  • The LCD 100 of the embodiment may include a liquid crystal (LC) layer 17 formed over the second dielectric layer 16. At least one transparent photo spacer 171 is disposed in the LC layer 17 to isolate adjacent LC regions from each other. The photo spacer 171 of the LCD 100 may be made of a transparent material such as resin. The LCD 100 may further include a color filter (CF) layer 18 formed over the LC layer 17. The CF layer 18 is disposed on a bottom surface of a CF substrate 19. The CF layer 18 may include a plurality of color filters such as red, green and blue filters, through which red, green and blue lights can transmit, respectively. The CF layer 18 may also include at least one black filter, through which no light can transmit. The areas not covered by the black filter constitute a display area. As shown in FIG. 1, the black filter is substantially aligned with the underlying photo spacer 171. In the embodiment, the photo sensor 14 is in an active display area not overlapping with a back filter of the CF layer 18.
  • According to a further aspect of the embodiment, the LCD 100 may include at least one lens region 20 disposed above and substantially aligned with the photo sensor 14 vertically. In the embodiment, the lens region 20 is protruded upwards from, and connected to, a top surface of the planarization layer 15. The lens region 20 may include a transparent material, which may be the same as or different from the planarization layer 15. Specifically, the lens region 20 is elongated vertically and passes through, from bottom to top, the second dielectric layer 16, the LC layer 17 and the CF layer 18.
  • According to the embodiment disclosed above, the LCD 100 is embedded with a fingerprint sensor composed of the light source, the lens region 20 and the photo sensor 14. FIG. 2 shows a schematic diagram functionally illustrating the fingerprint sensor of the embodiment. Specifically, a light source 21 emits a light beam towards a finger 22. The lens region 20 acts as a rod lens 23 that focuses the light beam reflected from a fingerprint. The light beam representing the fingerprint is then detected by the photo sensor 14, which acts a photo detector 24 that converts light into an electrical signal.
  • FIG. 3A to FIG. 3G show cross-sectional views illustrated of a method of forming the LCD 100 of FIG. 1. It is appreciated that the method of forming the LCD 100 may be performed in sequences other than that exemplified in FIG. 3A to FIG. 3G.
  • Specifically, in FIG. 3A, a first layer 12_1 of a first dielectric layer 12 is formed on a top surface of a TFT substrate 11, followed by forming a polysilicon layer 131 in the first layer 12_1 of the first dielectric layer 12. At least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11. In FIG. 3B, a second layer 12_2 of the first dielectric layer 12 is formed on the first layer 12_1 of the first dielectric layer 12, followed by forming a first metal layer (M1) 132 in the second layer 12_2 of the first dielectric layer 12. In FIG. 3C, a third layer 12_3 of the first dielectric layer 12 is formed on the second layer 12_2 of the first dielectric layer 12, followed by forming a second metal layer (M2) 133 in the third layer 12_3 of the first dielectric layer 12. Accordingly, the TFT 13 and the light barrier 10 are formed in the first dielectric layer 12. In FIG. 3D, a planarization (PLN) layer 15 is formed over the first dielectric layer 12. Next, a first layer 16_1 of a second dielectric layer 16 is formed on the planarization layer 15, followed by forming a first indium tin oxide (ITO) layer 161 in the first layer 16_1 of the second dielectric layer 16. In FIG. 3E, a second layer 16_2 of the second dielectric layer 16 is formed on the first layer 16_1 of the second dielectric layer 16, followed by forming a second ITO layer 162 in the second layer 16_2 of the second dielectric layer 16. Next, a liquid crystal (LC) layer 17 is formed over the second dielectric layer 16, and at least one transparent photo spacer 171 is formed in the LC layer 17 to isolate adjacent LC regions from each other. In FIG. 3F, a color filter (CF) layer 18 is formed over the LC layer 17. Next, at least one lens region 20 is formed in the CF layer 18, the LC layer 17 and the second dielectric layer 16. The lens region 20 is connected to a top surface of the planarization layer 15, and is substantially aligned with the photo sensor 14 vertically. Finally, in FIG. 3G, a CF substrate 19 is formed to cover the CF layer 18.
  • FIG. 4 shows a cross-sectional view of a liquid crystal display (LCD) 300 embedded with a fingerprint sensor, which is integrated in an active area of the LCD 300, according to a second embodiment of the present invention. The present embodiment is similar to the first embodiment (FIG. 1) with the exceptions that will be described below.
  • In the embodiment, the lens region 20 is disposed in the LC layer 17, and is substantially parallel to the photo spacer 171. The lens region 20 may include a transparent material, which may be the same as or different from the photo spacer 171. Specifically, the lens region 20 is elongated vertically and passes through, from bottom to top, the LC layer 17 and the CF layer 18.
  • FIG. 5A to FIG. 5B show cross-sectional views illustrated of a method of forming the LCD 300 of FIG. 4. It is appreciated that the method of forming the LCD 300 may be performed in sequences other than that exemplified in FIG. 5A to FIG. 5B. The method of the embodiment may include same steps as shown in FIG. 3A to FIG. 3E. Subsequently, in FIG. 5A, a color filter (CF) layer 18 is formed over the LC layer 17. Next, at least one lens region 20 is formed in the CF layer 18 and the LC layer 17. The lens region 20 is connected to a top surface of the second dielectric layer 16, and is substantially aligned with the photo sensor 14 vertically. Finally, in FIG. 5B, a CF substrate 19 is formed to cover the CF layer 18.
  • FIG. 6 shows a cross-sectional view of a light-emitting diode (LED) display 400 embedded with a fingerprint sensor, which is integrated in an active area of the LED display 400, according to a third embodiment of the present invention. The LED display 400 may, for example, an active-matrix organic light-emitting diode (AMOLED) display. For better understanding the present invention, only elements pertinent to aspects of the embodiment have been shown.
  • In the embodiment, the LED display 400 may include a TFT substrate 11, upon which a first dielectric layer 12 is formed. The first dielectric layer 12 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN). A plurality of TFTs 13 are formed in the first dielectric layer 12 and on the TFT substrate 11. The TFT 13 may include a polysilicon (abbreviated as poly) layer (as a channel) 131, a first metal layer (as a gate) 132 disposed above the polysilicon layer 131, and a second metal layer (as source and drain) 133 disposed on the polysilicon layer 131 and enclosing the first metal layer 132, where the first metal layer (M1) 132 is insulated from the second metal layer (M2) 133 by the first dielectric layer 12.
  • According to one aspect of the embodiment, at least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11. The photo sensor 14 may include a complementary metal-oxide-semiconductor (CMOS) image sensor. The LCD 400 of the embodiment may include a light source such as backlight module (not shown) disposed below the TFT substrate 11. The light source of the LCD 100 may emit a visible or invisible light beam.
  • According to another aspect of the embodiment, a light barrier 10 substantially aligned with the photo sensor 14 vertically is formed in the first dielectric layer 12. In the embodiment, the light barrier 10 may include the polysilicon layer 131, the first metal layer 132 and the second metal layer 133 that surround a passage. The light barrier 10 may be utilized to block or shield (oblique) light coming from directions other than the passage direction leading to the photo sensor 14.
  • The LED display 400 of the embodiment may include a planarization (PLN) layer 15, with a substantially smooth top surface, formed over the first dielectric layer 12. The planarization layer 15 is made of a transparent material such as resin, through which light is allowed to transmit.
  • The LED display 400 of the embodiment may include a second dielectric layer 16 formed on the planarization layer 15. The second dielectric layer 16 may, for example, be made of silicon oxide (SiO) and/or silicon nitride (SiN). The second dielectric layer 16 may include a transparent pixel define layer (PDL) 160, for example, formed on the planarization layer 15. At least one conductive layer is formed in the second dielectric layer 16. As exemplified in FIG. 6, the at least one conductive layer may include an anode layer 161B formed at the bottom of the second dielectric layer 16 (e.g., formed on the planarization layer 15) and a cathode layer 162B formed at the top of the second dielectric layer 16 (e.g., formed over the anode layer 161B). The anode layer 161B is insulated from the cathode layer 162B by the second dielectric layer 16. The LED display 400 may further include a color filter (CF) layer 18 formed in the second dielectric layer 16 (e.g., formed between the anode layer 161B and the cathode layer 162B). The CF layer 18 may include a plurality of color filters such as red, green and blue filters, through which red, green and blue lights can transmit, respectively. In the embodiment, the photo sensor 14 is in an active display area not overlapping with a back filter of the CF layer 18.
  • The LED display 400 of the embodiment may include an encapsulation layer 61 formed over the second dielectric layer 16. At least one transparent photo spacer 171 is disposed in the encapsulation layer 61 to isolate adjacent pixels from each other. The photo spacer 171 of the LED display 400 may be made of a transparent material such as resin.
  • According to another aspect of the embodiment, the LED display 400 may include at least one lens region 20 disposed above and substantially aligned with the photo sensor 14 vertically. In the embodiment, the lens region 20 is protruded upwards from, and connected to, a top surface of the planarization layer 15. The lens region 20 may include a transparent material, which may be the same as or different from the planarization layer 15. Specifically, the lens region 20 is elongated vertically and passes through the second dielectric layer 16 and the encapsulation layer 61. The LED display 400 may further include a cover glass 62 that covers the encapsulation layer 61, the photo spacer 171 and the lens region 20.
  • FIG. 7A to FIG. 7G show cross-sectional views illustrated of a method of forming the LED display 400 of FIG. 6. It is appreciated that the method of forming the LED display 400 may be performed in sequences other than that exemplified in FIG. 7A to FIG. 7G. Specifically, in FIG. 7A, a first layer 12_1 of a first dielectric layer 12 is formed on a top surface of a TFT substrate 11, followed by forming a polysilicon layer 131 in the first layer 12_1 of the first dielectric layer 12. At least one photo sensor (or photo detector) 14 is formed on a bottom surface of the TFT substrate 11. In FIG. 7B, a second layer 12_2 of the first dielectric layer 12 is formed on the first layer 12_1 of the first dielectric layer 12, followed by forming a first metal layer (M1) 132 in the second layer 12_2 of the first dielectric layer 12. In FIG. 7C, a third layer 12_3 of the first dielectric layer 12 is formed on the second layer 12_2 of the first dielectric layer 12, followed by forming a second metal layer (M2) 133 in the third layer 12_3 of the first dielectric layer 12. Accordingly, the TFT 13 and the light barrier 10 are formed in the first dielectric layer 12. In FIG. 7D, a planarization (PLN) layer 15 is formed over the first dielectric layer 12. Next, a first layer 16_1 of a second dielectric layer 16 is formed on the planarization layer 15, followed by forming an anode layer 161B in the first layer 16_1 of the second dielectric layer 16. In the embodiment, the second dielectric layer 16 may include a transparent pixel define layer (PDL) 160. In FIG. 7E, a second layer 16_2 of the second dielectric layer 16 is formed on the first layer 16_1 of the second dielectric layer 16, followed by forming a color filter (CF) layer 18 in the second layer 16_2 of the second dielectric layer 16. Next, a cathode layer 162B is formed on the second layer 16_2 of the second dielectric layer 16. An encapsulation layer 61 is formed over the second dielectric layer 16, and at least one transparent photo spacer 171 is formed in the encapsulation layer 61 to isolate adjacent pixels from each other. In FIG. 7F, at least one lens region 20 is formed in the encapsulation layer 61 and the second dielectric layer 16. The lens region 20 is connected to a top surface of the planarization layer 15, and is substantially aligned with the photo sensor 14 vertically. Finally, in FIG. 7G, a cover glass 62 is formed to cover the encapsulation layer 61, the photo spacer 171 and the lens region 20.
  • FIG. 8 shows a cross-sectional view of a light-emitting diode (LED) display 500 embedded with a fingerprint sensor, which is integrated in an active area of the LED display 500, according to a fourth embodiment of the present invention. The present embodiment is similar to the third embodiment (FIG. 6) with the exceptions that will be described below.
  • In the embodiment, the lens region 20 is disposed above the second dielectric layer 16 (e.g., on the cathode layer 162B), and is substantially parallel to the photo spacer 171. The lens region 20 may include a transparent material, which may be the same as or different from the photo spacer 171.
  • FIG. 9A to FIG. 9B show cross-sectional views illustrated of a method of forming the LED display 500 of FIG. 8. It is appreciated that the method of forming the LED display 500 may be performed in sequences other than that exemplified in FIG. 9A to FIG. 9B.
  • The method of the embodiment may include same steps as shown in FIG. 7A to FIG. 7E. Subsequently, in FIG. 9A, at least one lens region 20 is formed in the encapsulation layer 61. The lens region 20 is connected to a top surface of the second dielectric layer 16, and is substantially aligned with the photo sensor 14 vertically. Finally, in FIG. 9B, a cover glass 62 is formed to cover the encapsulation layer 61, the photo spacer 171 and the lens region 20.
  • FIG. 10 shows a cross-sectional view of a light-emitting diode (LED) display 600 embedded with a fingerprint sensor, which is integrated in an active area of the LED display 600, according to a fifth embodiment of the present invention. The present embodiment is similar to the third embodiment (FIG. 6) with the exceptions that will be described below.
  • In the embodiment, the lens region 20 is protruded upwards from, and connected to, a top surface of the pixel define layer (PDL) 160. The lens region 20 may include a transparent material, which may be the same as or different from the PDL layer 160. Specifically, the lens region 20 is elongated vertically and passes through the second dielectric layer 16 and above.
  • FIG. 11A to FIG. 11B show cross-sectional views illustrated of a method of forming the LED display 600 of FIG. 10. It is appreciated that the method of forming the LED display 600 may be performed in sequences other than that exemplified in FIG. 11A to FIG. 11B. The method of the embodiment may include same steps as shown in FIG. 7A to FIG. 7E. Subsequently, in FIG. 11A, at least one lens region 20 is formed in the encapsulation layer 61 and the second dielectric layer 16. The lens region 20 is connected to the PDL layer 160, and is substantially aligned with the photo sensor 14 vertically. Finally, in FIG. 11B, a cover glass 62 is formed to cover the encapsulation layer 61, the photo spacer 171 and the lens region 20.
  • Although specific embodiments have been illustrated and described, it will be appreciated by those skilled in the art that various modifications may be made without departing from the scope of the present invention, which is intended to be limited solely by the appended claims.

Claims (20)

1. A flat-panel display embedded with a fingerprint sensor, comprising:
a substrate;
a photo sensor formed on a bottom surface of the substrate;
a lens region disposed above and substantially aligned with the photo sensor vertically; and
a light barrier substantially aligned with the photo sensor vertically and disposed between the photo sensor and the lens region;
wherein a liquid crystal layer for constructing a liquid crystal display or an encapsulation layer for constructing a light-emitting diode display is disposed above the light barrier, the lens region vertically passing through the liquid crystal layer or the encapsulation layer.
2. The flat-panel display of claim 1, further comprising a first dielectric layer formed on a top surface of the substrate, wherein the light barrier is formed in the first dielectric layer.
3. The flat-panel display of claim 2, wherein the light barrier comprises:
a polysilicon layer;
a first metal layer formed above the polysilicon layer; and
a second metal layer formed on the first metal layer;
wherein the polysilicon layer, the first metal layer and the second metal layer surround a passage;
wherein a light beam representing a fingerprint passes the lens region and the passage, and is then detected by the photo sensor.
4. The flat-panel display of claim 2, further comprising a transparent planarization layer with a substantially smooth top surface, formed over the first dielectric layer.
5. The flat-panel display of claim 4, wherein the lens region is protruded upwards from, and connected to, a top surface of the planarization layer.
6. The flat-panel display of claim 4, further comprising:
a second dielectric layer formed on the planarization layer; and
a photo spacer disposed above the second dielectric layer.
7. The flat-panel display of claim 6, wherein the lens region is disposed on the second dielectric layer, and is substantially parallel to the photo spacer.
8. The flat-panel display of claim 6, wherein the second dielectric layer comprises a transparent pixel define layer.
9. The flat-panel display of claim 8, wherein the lens region is protruded upwards from, and connected to, a top surface of the pixel define layer.
10. The flat-panel display of claim 1, further comprising a color filter layer, wherein the photo sensor is in an active display area not overlapping with a black filter of the color filter layer.
11. A method of forming a flat-panel display embedded with a fingerprint sensor, comprising the following steps:
providing a substrate;
forming a photo sensor on a bottom surface of the substrate;
forming a lens region above and substantially aligned with the photo sensor vertically; and
forming a light barrier substantially aligned with the photo sensor vertically and disposed between the photo sensor and the lens region;
wherein a liquid crystal layer for constructing a liquid crystal display or an encapsulation layer for constructing a light-emitting diode display is disposed above the light barrier, the lens region vertically passing through the liquid crystal layer or the encapsulation layer.
12. The method of claim 11, further comprising a step of forming a first dielectric layer on a top surface of the substrate, wherein the light barrier is formed in the first dielectric layer.
13. The method of claim 12, wherein the light barrier comprises:
a polysilicon layer; P1 a first metal layer formed above the polysilicon layer; and
a second metal layer formed on the first metal layer;
wherein the polysilicon layer, the first metal layer and the second metal layer surround a passage;
wherein a light beam representing a fingerprint passes the lens region and the passage, and is then detected by the photo sensor.
14. The method of claim 12, further comprising a step of forming a transparent planarization layer with a substantially smooth top surface, over the first dielectric layer.
15. The method of claim 14, wherein the lens region is protruded upwards from, and connected to, a top surface of the planarization layer.
16. The method of claim 14, further comprising:
forming a second dielectric layer on the planarization layer; and
forming a photo spacer above the second dielectric layer.
17. The method of claim 16, wherein the lens region is disposed on the second dielectric layer, and is substantially parallel to the photo spacer.
18. The method of claim 16, wherein the second dielectric layer comprises a transparent pixel define layer.
19. The method of claim 18, wherein the lens region is protruded upwards from, and connected to, a top surface of the pixel define layer.
20. The method of claim 11, further comprising a step of forming a color filter layer, wherein the photo sensor is in an active display area not overlapping with a black filter of the color filter layer.
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