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US20180337301A1 - Monolithic multijunction power converter - Google Patents

Monolithic multijunction power converter Download PDF

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Publication number
US20180337301A1
US20180337301A1 US16/051,109 US201816051109A US2018337301A1 US 20180337301 A1 US20180337301 A1 US 20180337301A1 US 201816051109 A US201816051109 A US 201816051109A US 2018337301 A1 US2018337301 A1 US 2018337301A1
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power converter
multijunction
semiconductor layer
gainnassb
certain embodiments
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US16/051,109
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Ferran Suarez Arias
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Cactus Materials Inc
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Solar Junction Corp
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Priority to US16/051,109 priority Critical patent/US20180337301A1/en
Assigned to SOLAR JUNCTION CORPORATION reassignment SOLAR JUNCTION CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SUAREZ ARIAS, Ferran
Publication of US20180337301A1 publication Critical patent/US20180337301A1/en
Priority to US16/521,458 priority patent/US11233166B2/en
Assigned to ARRAY PHOTONICS, INC. reassignment ARRAY PHOTONICS, INC. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: SOLAR JUNCTION CORPORATION
Priority to US17/547,171 priority patent/US20220102569A1/en
Assigned to CACTUS MATERIALS, INC. reassignment CACTUS MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ARRAY PHOTONICS, INC.
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    • H01L31/0725
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/161Photovoltaic cells having only PN heterojunction potential barriers comprising multiple PN heterojunctions, e.g. tandem cells
    • H01L31/02168
    • H01L31/022433
    • H01L31/03046
    • H01L31/03048
    • H01L31/054
    • H01L31/0547
    • H01L31/0687
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/142Photovoltaic cells having only PN homojunction potential barriers comprising multiple PN homojunctions, e.g. tandem cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/124Active materials comprising only Group III-V materials, e.g. GaAs
    • H10F77/1248Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/124Active materials comprising only Group III-V materials, e.g. GaAs
    • H10F77/1248Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP
    • H10F77/12485Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP comprising nitride compounds, e.g. InGaN
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells
    • H10F77/215Geometries of grid contacts
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/311Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/42Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/42Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
    • H10F77/488Reflecting light-concentrating means, e.g. parabolic mirrors or concentrators using total internal reflection
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/544Solar cells from Group III-V materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the disclosure relates to the field of power conversion.
  • Power converters may be used in a number of applications to charge electronic devices, such as cell phones, audio systems, home theaters, or any other electronic devices, from a power source. It is well known in the field that Ohmic losses are inversely related to an increase in voltage and directly related to an increase in current. It is advantageous, then, to increase the fill factor of power converter devices by increasing the voltage of the devices.
  • Prior art power converters in the field include monolithically series-connected single layer converters made of semiconductor wafers, such as GaAs. Such power converters may be connected in series by wiring or sectored off by manufacturing the converter on a semi-insulating substrate using insulating trenches to provide electrical insulation between each sectored converter.
  • the energy source for such power converters is a monochromatic light, such as a laser operating at a particular wavelength or energy. In this particular application, the monochromatic light is between 1 micron to 1.55 microns, in the infrared region of the spectrum.
  • the invention comprises a compact, monolithic multijunction power converter, with two or more epitaxial layers of the same material stacked on top of one another with tunnel junctions in between each epitaxial layer. Because the epitaxial layers are stacked on top of one another, each epitaxial layer is thinned to collect a maximum amount of light and converts power in series to increase the fill factor by increasing voltage of the overall device and decreasing Ohmic losses (which increase with current increase). Given the stacked epitaxial layers, light which is not absorbed in one layer is absorbed in the next layer directly beneath the first layer and so on. The power converter may reach an overall efficiency of approximately 50%. There are minimal current losses in these devices given that complex circuitry is avoided using the vertical stacking of the epitaxial layers, compared to the prior art, which requires interconnections between the semiconductor light absorbing sectors.
  • power converters comprising one or more GaInNAsSb junctions; a first semiconductor layer overlying the one or more GaInNAsSb junctions; and a second semiconductor layer underlying the one or more GaInNAsSb junctions; wherein a thickness of the one or more GaInNAsSb junctions, the first semiconductor layer and the second semiconductor layer are selected to provide a resonant cavity at an irradiated wavelength.
  • FIG. 1 shows an embodiment of a monolithic multijunction power converter in which E 1 , E 2 , and E 3 represent semiconductor materials having the same bandgap.
  • FIGS. 2A and 2B show single junction and triple junction resonant power converters, respectively, with dual distributed Bragg reflectors (DBR), according to certain embodiments.
  • DBR distributed Bragg reflector
  • FIGS. 3A and 3B show single junction and triple junction resonant power converters, respectively, with single DBRs, according to certain embodiments.
  • FIGS. 4A and 4B show single junction and triple junction resonant power converters, respectively, with a top DBR and a back mirror, according to certain embodiments.
  • FIGS. 5A and 5B show single junction and triple junction resonant power converters, respectively, with a back mirror, according to certain embodiments.
  • FIGS. 6A and 6B show single junction and triple junction resonant power converters, respectively, with two DBRs and a top substrate, according to certain embodiments.
  • FIGS. 7A and 8B show single junction and triple junction resonant power converters, respectively, with a substrate overlying a top DBR and a back mirror, according to certain embodiments.
  • FIGS. 8A and 8B show single junction and triple junction resonant power converters, respectively, with two DBRs and etched back contacts to lateral conducting layers (LCL), according to certain embodiments.
  • FIG. 9 shows a top view of a Pi structure having multiple power converters interconnected in series, according to certain embodiments.
  • FIGS. 10A and 10B show triple-junction power converters having a double pass configuration and characterized by a single area ( FIG. 10A ) or four quadrant area ( FIG. 10B ), according to certain embodiments.
  • FIGS. 11A and 11B show photographs of the top view of the triple-junction power converters shown schematically in FIGS. 10A and 10B , respectively.
  • FIG. 12 shows the efficiency, power output, and voltage at maximum power point (Mpp) as a function of laser input power for single, double, and triple lattice-matched GaInNAsSb junction power converters.
  • FIG. 13 shows the normalized density of current (J) as a function of voltage for several laser input power levels for single, double and triple lattice-matched GaInNAsSb junction power converters.
  • two or more epitaxial layers of the same semiconductor material grown on a substrate are stacked on top of one another with tunnel junctions in between each epitaxial layer.
  • FIG. 1 shows an embodiment of a monolithic multijunction power converter in which E 1 , E 2 , and E 3 represent semiconductor materials having the same bandgap.
  • Each epitaxial layer has the same bandgap, which is roughly matched to the energy of the monochromatic light source to minimize minority carrier and thermal losses.
  • the light source reaches the uppermost epitaxial layer furthest from the substrate.
  • the epitaxial layer material may be a dilute-nitride material, such as GaInNAs or GaInNAsSb, or other dilute nitride known in the art.
  • the monochromatic light source is between 1 micron and up to 1.55 microns, and in certain embodiments, the light source is approximately 1.3 microns. While some current may be lost through light absorption by the tunnel junction(s), light that is not collected in the first epitaxial layer is collected in the second epitaxial layer, and so on.
  • the overall efficiency of such a device may reach at least 50% power efficiency, such as from 50% to 60% or from 50% to 70%.
  • the power conversion efficiency of a single junction power converter is at least 20% such as from 20% to 40%.
  • the power conversion efficiency of a single junction power converter is at least 30% such as from 30% to 50%.
  • three junction devices provided by the present disclosure exhibit a conversion efficiency from about 23% to about 25% over an input power from about 0.6 W to about 6 W when irradiated with 1.32 micron radiation.
  • three or more epitaxial layers of the same semiconductor material grown on a substrate such as GaInNAs, GaInNAsSb, GaAs, Ge, GaSb, InP or other substrate known in the art, are stacked on top of one another with tunnel junctions in between each epitaxial layer.
  • a substrate such as GaInNAs, GaInNAsSb, GaAs, Ge, GaSb, InP or other substrate known in the art.
  • Voc open circuit voltage
  • Jsc short circuit current
  • Each epitaxial layer has the same bandgap, which is roughly matched to the energy of the monochromatic light source to minimize minority carrier and thermal losses.
  • the light source reaches the bottom most epitaxial layer closet to the substrate first.
  • the substrate has a bandgap that is higher than the bandgap of the epitaxial layers. Given that the substrate has a higher bandgap than that of the epitaxial layers, the light source passes through the substrate and the light is absorbed by the epitaxial layers.
  • An example of this employs GaInNAs epitaxial layers (bandgap of 0.95 eV) and a GaAs substrate (bandgap 1.42 eV).
  • the light source in this example will not be absorbed by the GaAs substrate and will be absorbed by the GaInNAs active region.
  • a heat sink can be coupled to the top of the uppermost epitaxial layer, and can serve to cool the device and prevent defects caused by overheating.
  • the epitaxial layer material may be a dilute-nitride material, such as GaInNAs or GaInNAsSb, or other dilute nitride known in the art.
  • the monochromatic light source has a wavelength between 1 micron and up to 1.55 microns, in certain embodiments, from 1 micron to 1.4 micron, and in certain embodiments the light source is approximately 1.3 microns. While some current may be lost through light absorption by the tunnel junction(s), light that is not collected in the first epitaxial layer can becollected in the second epitaxial layer, and so on. The overall efficiency of such a device may reach at least 50% power efficiency.
  • the light absorbing layer(s) comprise GaInNAsSb.
  • a GaInNAsSb junction comprises Ga 1 ⁇ x In x N y As 1 ⁇ y ⁇ z Sb z , in which values for x, y, and z are 0 ⁇ x ⁇ 0.24, 0.01 ⁇ y ⁇ 0.07 and 0.001 ⁇ z ⁇ 0.20; in certain embodiments, 0.02 ⁇ x ⁇ 0.24, 0.01 ⁇ y ⁇ 0.07 and 0.001 ⁇ z ⁇ 0.03; in certain embodiments, 0.02 ⁇ x ⁇ 0.18, 0.01 ⁇ y ⁇ 0.04 and 0.001 ⁇ z ⁇ 0.03; in certain embodiments, 0.08 ⁇ x ⁇ 0.18, 0.025 ⁇ y ⁇ 0.04 and 0.001 ⁇ z ⁇ 0.03; and in certain embodiments, 0.06 ⁇ x ⁇ 0.20, 0.02 ⁇ y ⁇ 0.05 and 0.005 ⁇ z ⁇ 0.02.
  • a GaInNAsSb junction comprises Ga 1 ⁇ x In x N y As 1 ⁇ y ⁇ z Sb z , in which values for x, y, and z are 0 ⁇ x ⁇ 0.18, 0.001 ⁇ y ⁇ 0.05 and 0.001 ⁇ z ⁇ 0.15, and in certain embodiments, 0 ⁇ x ⁇ 0.18, 0.001 ⁇ y ⁇ 0.05 and 0.001 ⁇ z ⁇ 0.03; in certain embodiments, 0.02 ⁇ x ⁇ 0.18, 0.005 ⁇ y ⁇ 0.04 and 0.001 ⁇ z ⁇ 0.03; in certain embodiments, 0.04 ⁇ x ⁇ 0.18, 0.01 ⁇ y ⁇ 0.04 and 0.001 ⁇ z ⁇ 0.03; in certain embodiments, 0.06 ⁇ x ⁇ 0.18, 0.015 ⁇ y ⁇ 0.04 and 0.001 ⁇ z ⁇ 0.03; and in certain embodiments, 0.08 ⁇ x ⁇ 0.18, 0.025 ⁇ y ⁇ 0.04 and 0.001 ⁇ z ⁇ 0.03.
  • a GaInNAsSb junction is characterized by a bandgap of 0.92 eV and comprises Ga 1 ⁇ x In x N y As 1 ⁇ y ⁇ z Sb z , in which values for x, y, and z are: x is 0.175, y is 0.04, and 0.012 ⁇ z ⁇ 0.019.
  • a GaInNAsSb junction is characterized by a bandgap of 0.90 eV and comprises Ga 1 ⁇ x In x N y As 1 ⁇ y ⁇ z Sb z , in which values for x, y, and z are: x is 0.18, y is 0.045, and 0.012 ⁇ z ⁇ 0.019.
  • a GaInNAsSb junction is comprises Ga 1 ⁇ x In x N y As 1 ⁇ y ⁇ z Sb z , in which values for x, y, and z are: 0.13 ⁇ x ⁇ 0.19, 0.03 ⁇ y ⁇ 0.048, and 0.007 ⁇ z ⁇ 0.02.
  • a GaInNAsSb junction comprises Ga 1 ⁇ x In x N y As 1 ⁇ y ⁇ z Sb z , in which values for x, y, and z are selected to have a band gap that matches or closely matches the energy of the radiation used to deliver power to the device.
  • the GaInNAsSb junction is substantially lattice matched to a GaAs substrate. It is to be noted that the general understanding of “substantially lattice matched” is that the in-plane lattice constants of the materials in their fully relaxed states differ by less than 0.6% when the materials are present in thicknesses greater than 100 nm.
  • subcells that are substantially lattice matched to each other as used herein means that all materials in the subcells that are present in thicknesses greater than 100 nm have in-plane lattice constants in their fully relaxed states that differ by less than 0.6%.
  • each of the epitaxial layers in the power converter is lattice matched to a GaAs substrate.
  • the use of layering materials of different refractive indices can produce distributed Bragg reflectors (DBR) within the structure and is used to increase the efficiency of the power converter.
  • DBR distributed Bragg reflectors
  • a dilute nitride material which in certain embodiments is a GaInNAsSb material, as the absorbing material in the epitaxial stack of the structure.
  • a cavity can be grown using a material such as GaAs/AlGaAs as a DBR below the dilute nitride layer and above the substrate, and another DBR grown above the dilute nitride layer, that can be made of semiconductors or a number of oxides.
  • a back-side metal can be used as structured mirror, allowing unabsorbed light to be reflected from the back metal to be reabsorbed in the epitaxial layers above.
  • FIGS. 2A and 2B Examples of resonant cavity power converters using the double pass configuration are shown in FIGS. 2A and 2B .
  • FIG. 2A shows a single junction resonant cavity with a top DBR and a bottom DBR.
  • a single GaInNAsSb junction is disposed between the two DBRs and separated from the DBRs by semiconductor layers d 1 and d 2 .
  • Semiconductor layers may be formed from a material that does not appreciably absorb the incident radiation and that can be lattice matched to GaAs and the absorbing layer, and in certain embodiments can be GaAs.
  • the thickness of d 1 , d 2 and a GaInNAsSb junction can be selected to provide a standing wave at the wavelength of the incident radiation.
  • FIG. 2B shows a similar configuration as shown in FIG. 2A but includes multiple GaInNAsSb junctions with each of the junctions separated by a tunnel junction.
  • the thickness of the GaInNAsSb junction can be from about 100 nm to about 1 micron.
  • the substrate is a semi-insulating or n-doped GaAs substrate with a back-metal as the bottom-most layer of the structure.
  • the mirror layer can be, for example, gold or gold/nickel alloys.
  • the power converter structure uses one DBR instead of two.
  • Resonant power converters employing a single DBR are shown in FIGS. 3A and 3B .
  • FIG. 3A shows a single GaInNAsSb junction disposed between two semiconductor layers d 1 and d 2 . These layers overly a bottom DBR, which overlies a substrate.
  • the upper surface of the device, such as the upper surface of layer d 1 facing the incident radiation may be coated with an antireflection coating.
  • the antireflection coating may be optimized for the wavelength of the incident radiation to reduce scatteing.
  • FIG. 3B shows a single DBR resonant cavity configuration having multiple GaInNAsSb junctions.
  • the power converter structure includes one DBR and a back mirror below the substrate.
  • DBR Downlink Biharmonic Device
  • FIGS. 4A, 4B, 5A, and 5B show power converters having a top DBR a resonant cavity including a single GaInNAsSb junction between two semiconductor layers d 1 and d 2 , and a back mirror beneath semiconductor layer d 2 .
  • the back mirror can also serve as an electrical contact.
  • a multi-junction power converter is shown in FIG. 4B in which multiple GaInNAsSb junctions are disposed between a top DBR and a back mirror.
  • both a DBR and a back mirror are used at the bottom of the device.
  • the thickness of the DBR can be reduced compared to a configuration with a bottom DBR without the back mirror.
  • the upper surface of layer D 1 may include an antireflection coating.
  • the substrate is removed and a metal is used it its place as a back mirror. In such structures, the light passes through the top DBR, then through the epitaxial layers, then through the bottom DBR and finally hits the back mirror.
  • the epitaxial layer comprises GaInNAsSb as one or more absorbing layers.
  • the upper most layer of the structure comprises an interface air-semiconductor above the epitaxial layers, which may comprise of one or more layers of GaInNAsSb.
  • a bottom DBR which overlays a back mirror.
  • the substrate can be GaAs such as n-type GaAs and can have a thickness from about 150 microns to about 250 microns, such as from 175 microns to 225 microns.
  • the thickness of the substrate can be thinned, for example, by grinding or etching to minimize absorption and in such embodiments can be 50 microns or less.
  • the bottom DBR can be bonded to a heatsink. Bonding the DBR directly to the heatsink can reduce the temperature of the power converter.
  • FIGS. 7A and 7B shown device configurations similar to those shown in FIGS. 6A and 6B but with the bottom DBR replaced with a back mirror.
  • the structure has intra-cavity contacts to avoid resistivity from the DBR structures.
  • the contact is made in the cavity through lateral transport conducting layers (LCL) bypassing the DBR structures.
  • Power converters having intra-cavity contacts are shown in FIGS. 8A and 8B .
  • the epitaxial layers are etched down to either an LCL overlying the bottom DBR or to an LCL overlying semiconductor layer d 1 .
  • the LCLs improve carrier mobility to the electrical contacts (back contact and top contact) and can be formed, for example, from doped GaAs such as n-type GaAs. LCLs and similar etch back electrical contacts can be employed with other device structures provided by the present disclosure.
  • the structure can be grown inverted.
  • the substrate can be thinned down to a certain thickness or removed after growth using a variety of lift off techniques.
  • the light passes through the substrate first before passing through the epitaxy layers.
  • the bandgap of the substrate is greater than the bandgap of the epitaxial layers.
  • Multiple photovoltaic converters comprised of a number of subcells connected in series can be constructed to increase the output voltage.
  • the subcells can be connected in parallel for increasing output current.
  • An example is a Pi structure as shown in FIG. 9 .
  • Infrared absorbers are typically characterized by low voltage; however, in certain application it is desirable to increase the voltage of the power converter. This can be accomplished by connecting multiple power converters in series.
  • One such configuration, of which a top-down view is shown in FIG. 9 is referred to as a Pi structure in which multiple power converter cells are disposed in concentric rings around a central axis, where each cell is separated by an insulator and the multiple cells or subsets of the multiple cells are connected in series.
  • Such structures can be fabricated using single junctions and provide a high density of cells.
  • the higher voltages provide improved DC-DC converter efficiencies and lower Ohmic losses.
  • later currents can produce Ohmic losses this can be offset because the increased number of sub-cells results in lower currents.
  • FIGS. 10A and 10B Other device structures are shown in FIGS. 10A and 10B .
  • FIG. 10A shows single a triple-junction double pass power converter.
  • FIG. 10B shows a four quadrant triple-junction double pass power converter.
  • the dimensions of the devices are 300 microns by 300 microns.
  • the four converters can be interconnected in series to increase the voltage and/or decrease the current.
  • the series interconnection can also reduce the sensitivity to spatial orientation of the incident radiation.
  • separating the collection area into quadrants or other sub-areas can reduce the Ohmic losses by bringing the electrical contacts closer to the power generating surfaces. Photographs of the single and four quadrant devices are shown in FIGS. 11A and 11B .
  • the power converters shown in FIGS. 10A, 10B, 11A, and 11B were fabricated using GaInNAsSb junctions. All epitaxial layers were lattice matched to a GaAs substrate. A back mirror is disposed at the bottom of the GaAs substrate. The resonant cavity of the three-junction structures was configured to support a standing wave at about 1.3 microns, such as at 1.32 microns or at 1.342 microns. The bandgap of the GaInNAsSb junctions was about 0.92 eV for devices configured for power conversion at 1.32 microns.
  • Certain of such devices exhibited a fill factor from about 65% to about 75%, a Voc of from about 1.4 7V to about 1.5 V and a Jsc from about 0.6 A to about 1.4 A.
  • the power conversion efficiency was from about 23% to 25% at an input power from about 0.6 W to about 6 W.
  • the two or more epitaxial layers of the same semiconductor material are of varying thicknesses.
  • the epitaxial layers can decrease in thickness the further away from the light source.
  • the thicknesses of each of the epitaxial layers are the same.
  • the thicknesses of the epitaxial layers are varied, either increasing nor decreasing depending on the light source location.
  • the thickness, or height, of the entire device may be between 1 micron and up to 10 microns.
  • the area of the power converter can be, for example, between 100 microns ⁇ 100 microns, and up to 1 cm ⁇ 1 cm, or more. For example the total area is from 10 ⁇ 4 cm 2 to 1 cm 2 .
  • the thickness of each epitaxial layer may be between a few hundred nanometers up to a few microns.
  • FIG. 12 shows the efficiency, power output and voltage at maximum power point (Mpp) as a function of laser input power for single (open circle), double (square), and triple (plus) GaInNAsSb junction power converters.
  • FIG. 13 shows the normalized current density (J) as a function of voltage for several laser input power levels for single (open circle), double (square), and triple (plus) GaInNAsSb junction power converters.

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Abstract

Resonant cavity power converters for converting radiation in the wavelength range from 1 micron to 1.55 micron are disclosed. The resonant cavity power converters can be formed from one or more lattice matched GaInNAsSb junctions and can include distributed Bragg reflectors and/or mirrored surfaces for increasing the power conversion efficiency.

Description

  • This application is a Continuation of U.S. application Ser. No. 14/614,601, filed on Feb. 5, 2015, which claims the benefit under 35 U.S.C. § 119(e) of U.S. Provisional Application No. 61/936,222, filed on Feb. 5, 2014, which is incorporated by reference in its entirety.
  • FIELD
  • The disclosure relates to the field of power conversion.
  • BACKGROUND
  • Power converters may be used in a number of applications to charge electronic devices, such as cell phones, audio systems, home theaters, or any other electronic devices, from a power source. It is well known in the field that Ohmic losses are inversely related to an increase in voltage and directly related to an increase in current. It is advantageous, then, to increase the fill factor of power converter devices by increasing the voltage of the devices.
  • Prior art power converters in the field include monolithically series-connected single layer converters made of semiconductor wafers, such as GaAs. Such power converters may be connected in series by wiring or sectored off by manufacturing the converter on a semi-insulating substrate using insulating trenches to provide electrical insulation between each sectored converter. The energy source for such power converters is a monochromatic light, such as a laser operating at a particular wavelength or energy. In this particular application, the monochromatic light is between 1 micron to 1.55 microns, in the infrared region of the spectrum. Closer to 1 micron is less advantageous for home use due to the potential dangers of the light source to the human eye, so the focus of the embodiments disclosed herein is on light sources between 1.3-1.55 microns, and in certain embodiments, around 1.3 microns. However, those skilled in the field may easily modify the invention disclosed herein to convert light of a number of wavelengths.
  • SUMMARY
  • The invention comprises a compact, monolithic multijunction power converter, with two or more epitaxial layers of the same material stacked on top of one another with tunnel junctions in between each epitaxial layer. Because the epitaxial layers are stacked on top of one another, each epitaxial layer is thinned to collect a maximum amount of light and converts power in series to increase the fill factor by increasing voltage of the overall device and decreasing Ohmic losses (which increase with current increase). Given the stacked epitaxial layers, light which is not absorbed in one layer is absorbed in the next layer directly beneath the first layer and so on. The power converter may reach an overall efficiency of approximately 50%. There are minimal current losses in these devices given that complex circuitry is avoided using the vertical stacking of the epitaxial layers, compared to the prior art, which requires interconnections between the semiconductor light absorbing sectors.
  • In a first aspect, power converters are provided, comprising one or more GaInNAsSb junctions; a first semiconductor layer overlying the one or more GaInNAsSb junctions; and a second semiconductor layer underlying the one or more GaInNAsSb junctions; wherein a thickness of the one or more GaInNAsSb junctions, the first semiconductor layer and the second semiconductor layer are selected to provide a resonant cavity at an irradiated wavelength.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The drawings described herein are for illustration purposes only. The drawings are not intended to limit the scope of the present disclosure.
  • FIG. 1 shows an embodiment of a monolithic multijunction power converter in which E1, E2, and E3 represent semiconductor materials having the same bandgap.
  • FIGS. 2A and 2B show single junction and triple junction resonant power converters, respectively, with dual distributed Bragg reflectors (DBR), according to certain embodiments.
  • FIGS. 3A and 3B show single junction and triple junction resonant power converters, respectively, with single DBRs, according to certain embodiments.
  • FIGS. 4A and 4B show single junction and triple junction resonant power converters, respectively, with a top DBR and a back mirror, according to certain embodiments.
  • FIGS. 5A and 5B show single junction and triple junction resonant power converters, respectively, with a back mirror, according to certain embodiments.
  • FIGS. 6A and 6B show single junction and triple junction resonant power converters, respectively, with two DBRs and a top substrate, according to certain embodiments.
  • FIGS. 7A and 8B show single junction and triple junction resonant power converters, respectively, with a substrate overlying a top DBR and a back mirror, according to certain embodiments.
  • FIGS. 8A and 8B show single junction and triple junction resonant power converters, respectively, with two DBRs and etched back contacts to lateral conducting layers (LCL), according to certain embodiments.
  • FIG. 9 shows a top view of a Pi structure having multiple power converters interconnected in series, according to certain embodiments.
  • FIGS. 10A and 10B show triple-junction power converters having a double pass configuration and characterized by a single area (FIG. 10A) or four quadrant area (FIG. 10B), according to certain embodiments.
  • FIGS. 11A and 11B show photographs of the top view of the triple-junction power converters shown schematically in FIGS. 10A and 10B, respectively.
  • FIG. 12 shows the efficiency, power output, and voltage at maximum power point (Mpp) as a function of laser input power for single, double, and triple lattice-matched GaInNAsSb junction power converters.
  • FIG. 13 shows the normalized density of current (J) as a function of voltage for several laser input power levels for single, double and triple lattice-matched GaInNAsSb junction power converters.
  • Reference is now made in detail to embodiments of the present disclosure. While certain embodiments of the present disclosure are described, it will be understood that it is not intended to limit the embodiments of the present disclosure to the disclosed embodiments. To the contrary, reference to embodiments of the present disclosure is intended to cover alternatives, modifications, and equivalents as may be included within the spirit and scope of the embodiments of the present disclosure as defined by the appended claims.
  • DETAILED DESCRIPTION
  • In certain embodiments provided by the present disclosure, two or more epitaxial layers of the same semiconductor material grown on a substrate, such as GaInNAs, GaInNAsSb, GaAs, Ge, GaSb, InP or other substrate known in the art, are stacked on top of one another with tunnel junctions in between each epitaxial layer. FIG. 1 shows an embodiment of a monolithic multijunction power converter in which E1, E2, and E3 represent semiconductor materials having the same bandgap. Each epitaxial layer has the same bandgap, which is roughly matched to the energy of the monochromatic light source to minimize minority carrier and thermal losses. In certain embodiments, the light source reaches the uppermost epitaxial layer furthest from the substrate. In some embodiments, the epitaxial layer material may be a dilute-nitride material, such as GaInNAs or GaInNAsSb, or other dilute nitride known in the art. In some embodiments, the monochromatic light source is between 1 micron and up to 1.55 microns, and in certain embodiments, the light source is approximately 1.3 microns. While some current may be lost through light absorption by the tunnel junction(s), light that is not collected in the first epitaxial layer is collected in the second epitaxial layer, and so on. The overall efficiency of such a device may reach at least 50% power efficiency, such as from 50% to 60% or from 50% to 70%. In certain embodiments, the power conversion efficiency of a single junction power converter is at least 20% such as from 20% to 40%. In certain embodiments, the power conversion efficiency of a single junction power converter is at least 30% such as from 30% to 50%. In certain embodiments, three junction devices provided by the present disclosure exhibit a conversion efficiency from about 23% to about 25% over an input power from about 0.6 W to about 6 W when irradiated with 1.32 micron radiation.
  • In certain embodiments, three or more epitaxial layers of the same semiconductor material grown on a substrate such as GaInNAs, GaInNAsSb, GaAs, Ge, GaSb, InP or other substrate known in the art, are stacked on top of one another with tunnel junctions in between each epitaxial layer. Increasing the number of junctions in a power converter device can result in increased fill factor, increased open circuit voltage (Voc) and decreased short circuit current (Jsc). Each epitaxial layer has the same bandgap, which is roughly matched to the energy of the monochromatic light source to minimize minority carrier and thermal losses. In certain embodiments, the light source reaches the bottom most epitaxial layer closet to the substrate first. The substrate has a bandgap that is higher than the bandgap of the epitaxial layers. Given that the substrate has a higher bandgap than that of the epitaxial layers, the light source passes through the substrate and the light is absorbed by the epitaxial layers. An example of this employs GaInNAs epitaxial layers (bandgap of 0.95 eV) and a GaAs substrate (bandgap 1.42 eV). The light source in this example will not be absorbed by the GaAs substrate and will be absorbed by the GaInNAs active region. A heat sink can be coupled to the top of the uppermost epitaxial layer, and can serve to cool the device and prevent defects caused by overheating. In some embodiments, the epitaxial layer material may be a dilute-nitride material, such as GaInNAs or GaInNAsSb, or other dilute nitride known in the art. In some embodiments, the monochromatic light source has a wavelength between 1 micron and up to 1.55 microns, in certain embodiments, from 1 micron to 1.4 micron, and in certain embodiments the light source is approximately 1.3 microns. While some current may be lost through light absorption by the tunnel junction(s), light that is not collected in the first epitaxial layer can becollected in the second epitaxial layer, and so on. The overall efficiency of such a device may reach at least 50% power efficiency.
  • In certain embodiments, the light absorbing layer(s) comprise GaInNAsSb. In certain of the embodiments, a GaInNAsSb junction comprises Ga1−xInxNyAs1−y−zSbz, in which values for x, y, and z are 0≤x≤0.24, 0.01≤y≤0.07 and 0.001≤z≤0.20; in certain embodiments, 0.02≤x≤0.24, 0.01≤y≤0.07 and 0.001≤z≤0.03; in certain embodiments, 0.02≤x≤0.18, 0.01≤y≤0.04 and 0.001≤z≤0.03; in certain embodiments, 0.08≤x≤0.18, 0.025≤y≤0.04 and 0.001≤z≤0.03; and in certain embodiments, 0.06≤x≤0.20, 0.02≤y≤0.05 and 0.005≤z≤0.02.
  • In certain of the embodiments, a GaInNAsSb junction comprises Ga1−xInxNyAs1−y−z Sbz, in which values for x, y, and z are 0≤x≤0.18, 0.001≤y≤0.05 and 0.001≤z≤0.15, and in certain embodiments, 0≤x≤0.18, 0.001≤y≤0.05 and 0.001≤z≤0.03; in certain embodiments, 0.02≤x≤0.18, 0.005≤y≤0.04 and 0.001≤z≤0.03; in certain embodiments, 0.04≤x≤0.18, 0.01≤y≤0.04 and 0.001≤z≤0.03; in certain embodiments, 0.06≤x≤0.18, 0.015≤y≤0.04 and 0.001≤z≤0.03; and in certain embodiments, 0.08≤x≤0.18, 0.025≤y≤0.04 and 0.001≤z≤0.03.
  • In certain embodiments, a GaInNAsSb junction is characterized by a bandgap of 0.92 eV and comprises Ga1−xInxNyAs1−y−zSbz, in which values for x, y, and z are: x is 0.175, y is 0.04, and 0.012≤z≤0.019.
  • In certain embodiments, a GaInNAsSb junction is characterized by a bandgap of 0.90 eV and comprises Ga1−xInxNyAs1−y−zSbz, in which values for x, y, and z are: x is 0.18, y is 0.045, and 0.012≤z≤0.019.
  • In certain embodiments, a GaInNAsSb junction is comprises Ga1−xInxNyAs1−y−z Sbz, in which values for x, y, and z are: 0.13≤x≤0.19, 0.03≤y≤0.048, and 0.007≤z≤0.02.
  • In certain embodiments, a GaInNAsSb junction comprises Ga1−xInxNyAs1−y−zSbz, in which values for x, y, and z are selected to have a band gap that matches or closely matches the energy of the radiation used to deliver power to the device. In certain embodiments, the GaInNAsSb junction is substantially lattice matched to a GaAs substrate. It is to be noted that the general understanding of “substantially lattice matched” is that the in-plane lattice constants of the materials in their fully relaxed states differ by less than 0.6% when the materials are present in thicknesses greater than 100 nm. Further, subcells that are substantially lattice matched to each other as used herein means that all materials in the subcells that are present in thicknesses greater than 100 nm have in-plane lattice constants in their fully relaxed states that differ by less than 0.6%.
  • In certain embodiments, each of the epitaxial layers in the power converter is lattice matched to a GaAs substrate.
  • In certain embodiments, the use of layering materials of different refractive indices can produce distributed Bragg reflectors (DBR) within the structure and is used to increase the efficiency of the power converter. One such example uses a dilute nitride material, which in certain embodiments is a GaInNAsSb material, as the absorbing material in the epitaxial stack of the structure. A cavity can be grown using a material such as GaAs/AlGaAs as a DBR below the dilute nitride layer and above the substrate, and another DBR grown above the dilute nitride layer, that can be made of semiconductors or a number of oxides.
  • In certain embodiments, where the substrate has a higher bandgap than the absorbing material, a back-side metal can be used as structured mirror, allowing unabsorbed light to be reflected from the back metal to be reabsorbed in the epitaxial layers above. Examples of resonant cavity power converters using the double pass configuration are shown in FIGS. 2A and 2B. FIG. 2A shows a single junction resonant cavity with a top DBR and a bottom DBR. A single GaInNAsSb junction is disposed between the two DBRs and separated from the DBRs by semiconductor layers d1 and d2. Semiconductor layers may be formed from a material that does not appreciably absorb the incident radiation and that can be lattice matched to GaAs and the absorbing layer, and in certain embodiments can be GaAs. The thickness of d1, d2 and a GaInNAsSb junction can be selected to provide a standing wave at the wavelength of the incident radiation. FIG. 2B shows a similar configuration as shown in FIG. 2A but includes multiple GaInNAsSb junctions with each of the junctions separated by a tunnel junction. The thickness of the GaInNAsSb junction can be from about 100 nm to about 1 micron. In certain embodiments, the substrate is a semi-insulating or n-doped GaAs substrate with a back-metal as the bottom-most layer of the structure.
  • For use with 1 micron to 1.55 micron radiation, the mirror layer can be, for example, gold or gold/nickel alloys.
  • In certain embodiments, the power converter structure uses one DBR instead of two. Resonant power converters employing a single DBR are shown in FIGS. 3A and 3B. FIG. 3A shows a single GaInNAsSb junction disposed between two semiconductor layers d1 and d2. These layers overly a bottom DBR, which overlies a substrate. The upper surface of the device, such as the upper surface of layer d1 facing the incident radiation may be coated with an antireflection coating. The antireflection coating may be optimized for the wavelength of the incident radiation to reduce scatteing. FIG. 3B shows a single DBR resonant cavity configuration having multiple GaInNAsSb junctions.
  • In certain embodiments, the power converter structure includes one DBR and a back mirror below the substrate. Such device configurations are shown in FIGS. 4A, 4B, 5A, and 5B. FIGS. 4A and 4B show power converters having a top DBR a resonant cavity including a single GaInNAsSb junction between two semiconductor layers d1 and d2, and a back mirror beneath semiconductor layer d2. In certain embodiments, the back mirror can also serve as an electrical contact. A multi-junction power converter is shown in FIG. 4B in which multiple GaInNAsSb junctions are disposed between a top DBR and a back mirror.
  • In the power converters shown in FIGS. 5A and 5B both a DBR and a back mirror are used at the bottom of the device. In this configuration the thickness of the DBR can be reduced compared to a configuration with a bottom DBR without the back mirror. As with other devices, the upper surface of layer D1 may include an antireflection coating. In certain embodiments, the substrate is removed and a metal is used it its place as a back mirror. In such structures, the light passes through the top DBR, then through the epitaxial layers, then through the bottom DBR and finally hits the back mirror. In these embodiments, the epitaxial layer comprises GaInNAsSb as one or more absorbing layers.
  • In certain embodiments, the upper most layer of the structure comprises an interface air-semiconductor above the epitaxial layers, which may comprise of one or more layers of GaInNAsSb. Below the epitaxial layer is a bottom DBR which overlays a back mirror. In these embodiments, the light hits the upper most layer of the interface air-semiconductor and moves to the epitaxial layer, then the DBR and finally reflects back through the structure after being reflected by the back mirror.
  • Resonant cavity configurations with two DBRs and a top substrate layer are shown in FIGS. 6A and 6B. The top substrate layer is substantially transparent to the incident radiation used to generate the power. In certain embodiments, the substrate can be GaAs such as n-type GaAs and can have a thickness from about 150 microns to about 250 microns, such as from 175 microns to 225 microns. The thickness of the substrate can be thinned, for example, by grinding or etching to minimize absorption and in such embodiments can be 50 microns or less. In certain embodiments, the bottom DBR can be bonded to a heatsink. Bonding the DBR directly to the heatsink can reduce the temperature of the power converter.
  • FIGS. 7A and 7B shown device configurations similar to those shown in FIGS. 6A and 6B but with the bottom DBR replaced with a back mirror.
  • In certain embodiments, the structure has intra-cavity contacts to avoid resistivity from the DBR structures. The contact is made in the cavity through lateral transport conducting layers (LCL) bypassing the DBR structures. Power converters having intra-cavity contacts are shown in FIGS. 8A and 8B. In these device structures the epitaxial layers are etched down to either an LCL overlying the bottom DBR or to an LCL overlying semiconductor layer d1. The LCLs improve carrier mobility to the electrical contacts (back contact and top contact) and can be formed, for example, from doped GaAs such as n-type GaAs. LCLs and similar etch back electrical contacts can be employed with other device structures provided by the present disclosure.
  • In certain embodiments, the structure can be grown inverted. In such cases, the substrate can be thinned down to a certain thickness or removed after growth using a variety of lift off techniques. The light passes through the substrate first before passing through the epitaxy layers. In such structures, the bandgap of the substrate is greater than the bandgap of the epitaxial layers.
  • Multiple photovoltaic converters comprised of a number of subcells connected in series can be constructed to increase the output voltage. The subcells can be connected in parallel for increasing output current. An example is a Pi structure as shown in FIG. 9. Infrared absorbers are typically characterized by low voltage; however, in certain application it is desirable to increase the voltage of the power converter. This can be accomplished by connecting multiple power converters in series. One such configuration, of which a top-down view is shown in FIG. 9, is referred to as a Pi structure in which multiple power converter cells are disposed in concentric rings around a central axis, where each cell is separated by an insulator and the multiple cells or subsets of the multiple cells are connected in series. Such structures can be fabricated using single junctions and provide a high density of cells. The higher voltages provide improved DC-DC converter efficiencies and lower Ohmic losses. Although later currents can produce Ohmic losses this can be offset because the increased number of sub-cells results in lower currents.
  • Other device structures are shown in FIGS. 10A and 10B. FIG. 10A shows single a triple-junction double pass power converter. FIG. 10B shows a four quadrant triple-junction double pass power converter. The dimensions of the devices are 300 microns by 300 microns. The four converters can be interconnected in series to increase the voltage and/or decrease the current. The series interconnection can also reduce the sensitivity to spatial orientation of the incident radiation. Furthermore, for large area power converters, separating the collection area into quadrants or other sub-areas can reduce the Ohmic losses by bringing the electrical contacts closer to the power generating surfaces. Photographs of the single and four quadrant devices are shown in FIGS. 11A and 11B.
  • The power converters shown in FIGS. 10A, 10B, 11A, and 11B were fabricated using GaInNAsSb junctions. All epitaxial layers were lattice matched to a GaAs substrate. A back mirror is disposed at the bottom of the GaAs substrate. The resonant cavity of the three-junction structures was configured to support a standing wave at about 1.3 microns, such as at 1.32 microns or at 1.342 microns. The bandgap of the GaInNAsSb junctions was about 0.92 eV for devices configured for power conversion at 1.32 microns. Certain of such devices exhibited a fill factor from about 65% to about 75%, a Voc of from about 1.4 7V to about 1.5 V and a Jsc from about 0.6 A to about 1.4 A. The power conversion efficiency was from about 23% to 25% at an input power from about 0.6 W to about 6 W.
  • In certain embodiments, the two or more epitaxial layers of the same semiconductor material are of varying thicknesses. In particular, the epitaxial layers can decrease in thickness the further away from the light source. In certain embodiments, the thicknesses of each of the epitaxial layers are the same. In certain embodiments, the thicknesses of the epitaxial layers are varied, either increasing nor decreasing depending on the light source location.
  • In some embodiments, there is a window layer on top of the upper most epitaxial layer.
  • In certain embodiments, the thickness, or height, of the entire device may be between 1 micron and up to 10 microns. The area of the power converter can be, for example, between 100 microns×100 microns, and up to 1 cm×1 cm, or more. For example the total area is from 10−4 cm2 to 1 cm2. The thickness of each epitaxial layer may be between a few hundred nanometers up to a few microns.
  • FIG. 12 shows the efficiency, power output and voltage at maximum power point (Mpp) as a function of laser input power for single (open circle), double (square), and triple (plus) GaInNAsSb junction power converters.
  • FIG. 13 shows the normalized current density (J) as a function of voltage for several laser input power levels for single (open circle), double (square), and triple (plus) GaInNAsSb junction power converters.
  • Finally, it should be noted that there are alternative ways of implementing the embodiments disclosed herein. Accordingly, the present embodiments are to be considered as illustrative and not restrictive. Furthermore, the claims are not to be limited to the details given herein, and are entitled their full scope and equivalents thereof.

Claims (15)

1-11. (canceled)
12. A multijunction power converter, comprising:
two or more GaInNAsSb junctions, wherein each of the two or more GaInNAsSb junctions is lattice matched to GaAs or to Ge and has a bandgap configured to absorb at a monochromatic wavelength, wherein the monochromatic wavelength is within a range from 1.3 microns to 1.55 microns;
a tunnel junction separating each of the two or more GaInNAsSb junctions;
a first semiconductor layer overlying the two or more GaInNAsSb junctions, wherein the first semiconductor layer does not absorb at the monochromatic wavelength and is lattice matched to GaAs or to Ge and to each of the two or more GaInNAsSb junctions; and
a second semiconductor layer underlying the two or more GaInNAsSb junctions, wherein the second semiconductor layer does not absorb at the monochromatic wavelength and is lattice matched to GaAs or to Ge and to each of the two or more GaInNAsSb junctions;
wherein when irradiated with radiation at the monochromatic wavelength, the multijunction power converter is characterized by a constant power conversion efficiency of at least 18% for an input power within a range from 0.6 W to 6 W.
13. The multijunction power converter of claim 12, wherein the multijunction power converter is characterized by a power conversion efficiency of at least 20% for an input power within a range from 0.6 W to 6 W.
14. The multijunction power converter of claim 12, wherein the multijunction power converter is characterized by a conversion efficiency within a range from 18% to 25% for an input power within a range from 0.6 W to 6 W.
15. The multijunction power converter of claim 12, wherein each of the two or more GaInNAsSb Junctions independently has a thickness within a range from 100 nm to 1 micron.
16. The multijunction power converter of claim 12, wherein each of the two or more GaInNAsSb junctions has a bandgap that is matched to an energy of the monochromatic wavelength.
17. The multijunction power converter of claim 12, wherein each of the first semiconductor layer and the second semiconductor layer comprises GaAs.
18. The multijunction power converter of claim 12, comprising a substrate underlying the second semiconductor layer, wherein the substrate comprises GaAs.
19. The multijunction power converter of claim 12, comprising a substrate underlying the second semiconductor layer, wherein the substrate comprises Ge.
20. The multijunction power converter of claim 12, comprising a back mirror underlying the second semiconductor layer.
21. The multijunction power converter of claim 12, comprising an antireflection coating overlying the first semiconductor layer.
22. The multijunction power converter of claim 12, wherein, the monochromatic wavelength is 1.32 microns.
23. The multijunction power converter of claim 12, comprising:
a first electrical contact to the first semiconductor layer; and
a second electrical contact to the second semiconductor layer.
24. A multijunction power converter device, comprising a plurality of the multijunction power converters of claim 12 configured in a Pi structure in which the plurality of multijunction power converters are disposed in concentric rings around a central axis, wherein each of the multiple multijunction power converters is separated by an insulator and is connected in series.
25. A multijunction power converter device, comprising a plurality of the multijunction power converters of claim 12 interconnected in series.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11233166B2 (en) 2014-02-05 2022-01-25 Array Photonics, Inc. Monolithic multijunction power converter
US11271122B2 (en) 2017-09-27 2022-03-08 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having a dilute nitride layer

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2416254B1 (en) 2009-02-09 2014-12-29 Semprius, Inc. PHOTOVOLTAIC MODULES OF CONCENTRATOR TYPE (CPV), RECEPTORS AND SUB-RECEIVERS AND METHODS TO FORM THE SAME
DE102015012007A1 (en) * 2015-09-19 2017-03-23 Azur Space Solar Power Gmbh Scalable voltage source
US20170110613A1 (en) * 2015-10-19 2017-04-20 Solar Junction Corporation High efficiency multijunction photovoltaic cells
DE102016013749A1 (en) * 2016-11-18 2018-05-24 Azur Space Solar Power Gmbh Stack-shaped semiconductor structure
US10930808B2 (en) 2017-07-06 2021-02-23 Array Photonics, Inc. Hybrid MOCVD/MBE epitaxial growth of high-efficiency lattice-matched multijunction solar cells
US20190280143A1 (en) * 2018-03-12 2019-09-12 Solar Junction Corporation Chirped distributed bragg reflectors for photovoltaic cells and other light absorption devices
US10797197B2 (en) 2018-06-18 2020-10-06 Alta Devices, Inc. Thin-film, flexible optoelectronic devices incorporating a single lattice-matched dilute nitride junction and methods of fabrication
CN113272960A (en) * 2018-08-30 2021-08-17 阵列光子学公司 Multi-junction solar cells and multi-color photodetectors with integrated edge filters
WO2020185528A1 (en) 2019-03-11 2020-09-17 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having graded or stepped dilute nitride active regions
WO2021011705A1 (en) * 2019-07-15 2021-01-21 Slt Technologies, Inc. Power photodiode structures, methods of making, and methods of use
US11569398B2 (en) 2019-07-15 2023-01-31 SLT Technologies, Inc Power photodiode structures and devices
US11575055B2 (en) 2019-07-15 2023-02-07 SLT Technologies, Inc Methods for coupling of optical fibers to a power photodiode
US11670735B2 (en) * 2020-12-14 2023-06-06 Lumileds Llc Monolithic electrical power converter formed with layers
CN118103996A (en) * 2021-10-15 2024-05-28 艾迈斯-欧司朗国际有限责任公司 Optoelectronic devices

Family Cites Families (159)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4127862A (en) 1977-09-06 1978-11-28 Bell Telephone Laboratories, Incorporated Integrated optical detectors
US4179702A (en) 1978-03-09 1979-12-18 Research Triangle Institute Cascade solar cells
US4404421A (en) 1982-02-26 1983-09-13 Chevron Research Company Ternary III-V multicolor solar cells and process of fabrication
GB2132016B (en) 1982-12-07 1986-06-25 Kokusai Denshin Denwa Co Ltd A semiconductor device
JPS6061516A (en) 1983-09-14 1985-04-09 Sansho Seiyaku Kk The first solution for permanent wave
JPS6061513A (en) 1983-09-14 1985-04-09 Sansho Seiyaku Kk Cosmetic
US4547622A (en) 1984-04-27 1985-10-15 Massachusetts Institute Of Technology Solar cells and photodetectors
US4881979A (en) 1984-08-29 1989-11-21 Varian Associates, Inc. Junctions for monolithic cascade solar cells and methods
JPS63100781A (en) 1986-10-17 1988-05-02 Nippon Telegr & Teleph Corp <Ntt> Semiconductor element
US5016562A (en) 1988-04-27 1991-05-21 Glasstech Solar, Inc. Modular continuous vapor deposition system
US4935384A (en) 1988-12-14 1990-06-19 The United States Of America As Represented By The United States Department Of Energy Method of passivating semiconductor surfaces
JPH02218174A (en) 1989-02-17 1990-08-30 Mitsubishi Electric Corp Photoelectric conversion semiconductor device
US5223043A (en) 1991-02-11 1993-06-29 The United States Of America As Represented By The United States Department Of Energy Current-matched high-efficiency, multijunction monolithic solar cells
US5166761A (en) 1991-04-01 1992-11-24 Midwest Research Institute Tunnel junction multiple wavelength light-emitting diodes
US5330585A (en) 1992-10-30 1994-07-19 Spectrolab, Inc. Gallium arsenide/aluminum gallium arsenide photocell including environmentally sealed ohmic contact grid interface and method of fabricating the cell
US5342453A (en) 1992-11-13 1994-08-30 Midwest Research Institute Heterojunction solar cell
US5316593A (en) 1992-11-16 1994-05-31 Midwest Research Institute Heterojunction solar cell with passivated emitter surface
US5800630A (en) 1993-04-08 1998-09-01 University Of Houston Tandem solar cell with indium phosphide tunnel junction
US5376185A (en) 1993-05-12 1994-12-27 Midwest Research Institute Single-junction solar cells with the optimum band gap for terrestrial concentrator applications
US5405453A (en) 1993-11-08 1995-04-11 Applied Solar Energy Corporation High efficiency multi-junction solar cell
US5689123A (en) 1994-04-07 1997-11-18 Sdl, Inc. III-V aresenide-nitride semiconductor materials and devices
FR2722612B1 (en) 1994-07-13 1997-01-03 Centre Nat Rech Scient METHOD FOR MANUFACTURING A PHOTOVOLTAIC MATERIAL OR DEVICE, MATERIAL OR DEVICE THUS OBTAINED AND PHOTOPILE COMPRISING SUCH A MATERIAL OR DEVICE
JPH1012905A (en) 1996-06-27 1998-01-16 Hitachi Ltd Solar cell and method of manufacturing the same
KR19980046586A (en) 1996-12-12 1998-09-15 양승택 Polymer photodetector with resonant wavelength control
US5911839A (en) 1996-12-16 1999-06-15 National Science Council Of Republic Of China High efficiency GaInP NIP solar cells
JP3683669B2 (en) 1997-03-21 2005-08-17 株式会社リコー Semiconductor light emitting device
US6281426B1 (en) 1997-10-01 2001-08-28 Midwest Research Institute Multi-junction, monolithic solar cell using low-band-gap materials lattice matched to GaAs or Ge
US5944913A (en) 1997-11-26 1999-08-31 Sandia Corporation High-efficiency solar cell and method for fabrication
US6150603A (en) 1999-04-23 2000-11-21 Hughes Electronics Corporation Bilayer passivation structure for photovoltaic cells
US6252287B1 (en) 1999-05-19 2001-06-26 Sandia Corporation InGaAsN/GaAs heterojunction for multi-junction solar cells
US6340788B1 (en) 1999-12-02 2002-01-22 Hughes Electronics Corporation Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications
JP4064592B2 (en) 2000-02-14 2008-03-19 シャープ株式会社 Photoelectric conversion device
AU2002216611A1 (en) 2000-09-29 2002-04-08 Board Of Regents, The University Of Texas System A theory of the charge multiplication process in avalanche photodiodes
US7345327B2 (en) 2000-11-27 2008-03-18 Kopin Corporation Bipolar transistor
US6815736B2 (en) 2001-02-09 2004-11-09 Midwest Research Institute Isoelectronic co-doping
US7233028B2 (en) 2001-02-23 2007-06-19 Nitronex Corporation Gallium nitride material devices and methods of forming the same
US6787385B2 (en) 2001-05-31 2004-09-07 Midwest Research Institute Method of preparing nitrogen containing semiconductor material
US6586669B2 (en) 2001-06-06 2003-07-01 The Boeing Company Lattice-matched semiconductor materials for use in electronic or optoelectronic devices
US20030070707A1 (en) 2001-10-12 2003-04-17 King Richard Roland Wide-bandgap, lattice-mismatched window layer for a solar energy conversion device
US7119271B2 (en) 2001-10-12 2006-10-10 The Boeing Company Wide-bandgap, lattice-mismatched window layer for a solar conversion device
US6764926B2 (en) 2002-03-25 2004-07-20 Agilent Technologies, Inc. Method for obtaining high quality InGaAsN semiconductor devices
US6660928B1 (en) 2002-04-02 2003-12-09 Essential Research, Inc. Multi-junction photovoltaic cell
US6756325B2 (en) 2002-05-07 2004-06-29 Agilent Technologies, Inc. Method for producing a long wavelength indium gallium arsenide nitride(InGaAsN) active region
US8067687B2 (en) 2002-05-21 2011-11-29 Alliance For Sustainable Energy, Llc High-efficiency, monolithic, multi-bandgap, tandem photovoltaic energy converters
US8173891B2 (en) 2002-05-21 2012-05-08 Alliance For Sustainable Energy, Llc Monolithic, multi-bandgap, tandem, ultra-thin, strain-counterbalanced, photovoltaic energy converters with optimal subcell bandgaps
US20060162768A1 (en) 2002-05-21 2006-07-27 Wanlass Mark W Low bandgap, monolithic, multi-bandgap, optoelectronic devices
US6967154B2 (en) 2002-08-26 2005-11-22 Micron Technology, Inc. Enhanced atomic layer deposition
US7255746B2 (en) 2002-09-04 2007-08-14 Finisar Corporation Nitrogen sources for molecular beam epitaxy
US7122733B2 (en) 2002-09-06 2006-10-17 The Boeing Company Multi-junction photovoltaic cell having buffer layers for the growth of single crystal boron compounds
US6765238B2 (en) 2002-09-12 2004-07-20 Agilent Technologies, Inc. Material systems for semiconductor tunnel-junction structures
US7126052B2 (en) 2002-10-02 2006-10-24 The Boeing Company Isoelectronic surfactant induced sublattice disordering in optoelectronic devices
US7122734B2 (en) 2002-10-23 2006-10-17 The Boeing Company Isoelectronic surfactant suppression of threading dislocations in metamorphic epitaxial layers
US7071407B2 (en) 2002-10-31 2006-07-04 Emcore Corporation Method and apparatus of multiplejunction solar cell structure with high band gap heterojunction middle cell
WO2004054003A1 (en) 2002-12-05 2004-06-24 Blue Photonics, Inc. High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same
US7161170B1 (en) 2002-12-12 2007-01-09 Triquint Technology Holding Co. Doped-absorber graded transition enhanced multiplication avalanche photodetector
JP2004296658A (en) 2003-03-26 2004-10-21 Sharp Corp Multijunction solar cell and current matching method thereof
US7812249B2 (en) 2003-04-14 2010-10-12 The Boeing Company Multijunction photovoltaic cell grown on high-miscut-angle substrate
US7123638B2 (en) 2003-10-17 2006-10-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Tunnel-junction structure incorporating N-type layer comprising nitrogen and a group VI dopant
GB2409572B (en) 2003-12-24 2006-02-15 Intense Photonics Ltd Generating multiple bandgaps using multiple epitaxial layers
CA2551123A1 (en) 2004-01-20 2005-07-28 Cyrium Technologies Incorporated Solar cell with epitaxially grown quantum dot material
US7807921B2 (en) 2004-06-15 2010-10-05 The Boeing Company Multijunction solar cell having a lattice mismatched GrIII-GrV-X layer and a composition-graded buffer layer
US20060048811A1 (en) * 2004-09-09 2006-03-09 Krut Dimitri D Multijunction laser power converter
DE102005000767A1 (en) 2005-01-04 2006-07-20 Rwe Space Solar Power Gmbh Monolithic multiple solar cell
JP5008874B2 (en) 2005-02-23 2012-08-22 住友電気工業株式会社 Receiving module for optical communication using light receiving element and light receiving element, and measuring instrument using light receiving element
WO2006099171A2 (en) 2005-03-11 2006-09-21 The Arizona Boar Of Regents, A Body Corporate Acting On Behalf Of Arizona State University NOVEL GeSiSn-BASED COMPOUNDS, TEMPLATES, AND SEMICONDUCTOR STRUCTURES
US7473941B2 (en) 2005-08-15 2009-01-06 Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. Structures for reducing operating voltage in a semiconductor device
US20070113887A1 (en) * 2005-11-18 2007-05-24 Lih-Hong Laih Material system of photovoltaic cell with micro-cavity
CN1979901A (en) * 2005-12-02 2007-06-13 中国科学院半导体研究所 Efficient adjustable optical detector with double absorbing region structure
US11211510B2 (en) 2005-12-13 2021-12-28 The Boeing Company Multijunction solar cell with bonded transparent conductive interlayer
US20070227588A1 (en) 2006-02-15 2007-10-04 The Regents Of The University Of California Enhanced tunnel junction for improved performance in cascaded solar cells
CN101443888B (en) 2006-03-13 2011-03-16 内诺格雷姆公司 Thin silicon or germanium sheets and photovoltaics formed from thin sheets
US20100229926A1 (en) 2009-03-10 2010-09-16 Emcore Solar Power, Inc. Four Junction Inverted Metamorphic Multijunction Solar Cell with a Single Metamorphic Layer
US20090078310A1 (en) 2007-09-24 2009-03-26 Emcore Corporation Heterojunction Subcells In Inverted Metamorphic Multijunction Solar Cells
US7872252B2 (en) 2006-08-11 2011-01-18 Cyrium Technologies Incorporated Method of fabricating semiconductor devices on a group IV substrate with controlled interface properties and diffusion tails
US7842881B2 (en) 2006-10-19 2010-11-30 Emcore Solar Power, Inc. Solar cell structure with localized doping in cap layer
US20080149173A1 (en) 2006-12-21 2008-06-26 Sharps Paul R Inverted metamorphic solar cell with bypass diode
US20100116318A1 (en) * 2007-03-08 2010-05-13 Hrl Laboratories, Llc Pixelated photovoltaic array method and apparatus
JP5515162B2 (en) 2007-03-23 2014-06-11 住友電気工業株式会社 Manufacturing method of semiconductor wafer
US7825328B2 (en) 2007-04-09 2010-11-02 Taiwan Semiconductor Manufacturing Company, Ltd. Nitride-based multi-junction solar cell modules and methods for making the same
US20080257405A1 (en) 2007-04-18 2008-10-23 Emcore Corp. Multijunction solar cell with strained-balanced quantum well middle cell
JP2009010175A (en) 2007-06-28 2009-01-15 Sumitomo Electric Ind Ltd Light receiving element and manufacturing method thereof
WO2009009111A2 (en) * 2007-07-10 2009-01-15 The Board Of Trustees Of The Leland Stanford Junior University GaInNAsSB SOLAR CELLS GROWN BY MOLECULAR BEAM EPITAXY
JP5260909B2 (en) 2007-07-23 2013-08-14 住友電気工業株式会社 Light receiving device
JP5417694B2 (en) 2007-09-03 2014-02-19 住友電気工業株式会社 Semiconductor device and method for manufacturing epitaxial wafer
US8895342B2 (en) 2007-09-24 2014-11-25 Emcore Solar Power, Inc. Heterojunction subcells in inverted metamorphic multijunction solar cells
GB0719554D0 (en) 2007-10-05 2007-11-14 Univ Glasgow semiconductor optoelectronic devices and methods for making semiconductor optoelectronic devices
TW200924214A (en) 2007-11-16 2009-06-01 Univ Nat Chunghsing Solar cell
US20090155952A1 (en) 2007-12-13 2009-06-18 Emcore Corporation Exponentially Doped Layers In Inverted Metamorphic Multijunction Solar Cells
US20090188561A1 (en) 2008-01-25 2009-07-30 Emcore Corporation High concentration terrestrial solar array with III-V compound semiconductor cell
JP5303962B2 (en) * 2008-02-28 2013-10-02 三菱電機株式会社 Semiconductor photo detector
US20090255575A1 (en) 2008-04-04 2009-10-15 Michael Tischler Lightweight solar cell
US20090255576A1 (en) 2008-04-04 2009-10-15 Michael Tischler Window solar cell
US20090272438A1 (en) 2008-05-05 2009-11-05 Emcore Corporation Strain Balanced Multiple Quantum Well Subcell In Inverted Metamorphic Multijunction Solar Cell
US20090288703A1 (en) 2008-05-20 2009-11-26 Emcore Corporation Wide Band Gap Window Layers In Inverted Metamorphic Multijunction Solar Cells
US8202788B2 (en) 2008-06-26 2012-06-19 Nanyang Technological University Method for fabricating GaNAsSb semiconductor
WO2011011864A1 (en) 2009-07-29 2011-02-03 Cyrium Technologies Incorporated Solar cell and method of fabrication thereof
US9080425B2 (en) * 2008-10-17 2015-07-14 Foro Energy, Inc. High power laser photo-conversion assemblies, apparatuses and methods of use
WO2010042577A2 (en) 2008-10-07 2010-04-15 Applied Materials, Inc. Advanced platform for processing crystalline silicon solar cells
US20110254052A1 (en) 2008-10-15 2011-10-20 Arizona Board of Regents, a body corporate acting for and on behalf of Arizona State University Hybrid Group IV/III-V Semiconductor Structures
US7915639B2 (en) 2008-10-20 2011-03-29 Aerius Photonics Llc InGaAsSbN photodiode arrays
US8912428B2 (en) 2008-10-22 2014-12-16 Epir Technologies, Inc. High efficiency multijunction II-VI photovoltaic solar cells
US8093559B1 (en) 2008-12-02 2012-01-10 Hrl Laboratories, Llc Methods and apparatus for three-color infrared sensors
US9018521B1 (en) 2008-12-17 2015-04-28 Solaero Technologies Corp. Inverted metamorphic multijunction solar cell with DBR layer adjacent to the top subcell
US20100147366A1 (en) * 2008-12-17 2010-06-17 Emcore Solar Power, Inc. Inverted Metamorphic Multijunction Solar Cells with Distributed Bragg Reflector
US20150357501A1 (en) 2008-12-17 2015-12-10 Solaero Technologies Corp. Four junction inverted metamorphic solar cell
KR20100084843A (en) 2009-01-19 2010-07-28 삼성전자주식회사 Multijunction solar cell
US9105783B2 (en) 2009-01-26 2015-08-11 The Aerospace Corporation Holographic solar concentrator
US20100282305A1 (en) 2009-05-08 2010-11-11 Emcore Solar Power, Inc. Inverted Multijunction Solar Cells with Group IV/III-V Hybrid Alloys
US20100282306A1 (en) 2009-05-08 2010-11-11 Emcore Solar Power, Inc. Multijunction Solar Cells with Group IV/III-V Hybrid Alloys
EP2251912A1 (en) 2009-05-11 2010-11-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Tunnel diodes from strain-compensated compound semiconductor layers
US20100319764A1 (en) 2009-06-23 2010-12-23 Solar Junction Corp. Functional Integration Of Dilute Nitrides Into High Efficiency III-V Solar Cells
IT1394853B1 (en) 2009-07-21 2012-07-20 Cesi Ct Elettrotecnico Sperimentale Italiano Giacinto Motta S P A PHOTOVOLTAIC CELL WITH HIGH CONVERSION EFFICIENCY
JP5649157B2 (en) 2009-08-01 2015-01-07 住友電気工業株式会社 Semiconductor device and manufacturing method thereof
JP5444994B2 (en) * 2009-09-25 2014-03-19 三菱電機株式会社 Semiconductor photo detector
US20110114163A1 (en) 2009-11-18 2011-05-19 Solar Junction Corporation Multijunction solar cells formed on n-doped substrates
US8895838B1 (en) 2010-01-08 2014-11-25 Magnolia Solar, Inc. Multijunction solar cell employing extended heterojunction and step graded antireflection structures and methods for constructing the same
TWI436488B (en) 2010-03-12 2014-05-01 Epistar Corp A solar cell having a graded buffer layer
US20110232730A1 (en) 2010-03-29 2011-09-29 Solar Junction Corp. Lattice matchable alloy for solar cells
US8269223B2 (en) 2010-05-27 2012-09-18 The United States Of America As Represented By The Secretary Of The Army Polarization enhanced avalanche photodetector and method thereof
US20110303268A1 (en) 2010-06-15 2011-12-15 Tan Wei-Sin HIGH EFFICIENCY InGaAsN SOLAR CELL AND METHOD OF MAKING
US8642883B2 (en) 2010-08-09 2014-02-04 The Boeing Company Heterojunction solar cell
US20190013430A1 (en) 2010-10-28 2019-01-10 Solar Junction Corporation Optoelectronic devices including dilute nitride
US20170338357A1 (en) 2016-05-23 2017-11-23 Solar Junction Corporation Exponential doping in lattice-matched dilute nitride photovoltaic cells
US9214580B2 (en) 2010-10-28 2015-12-15 Solar Junction Corporation Multi-junction solar cell with dilute nitride sub-cell having graded doping
TWI412149B (en) 2010-12-16 2013-10-11 Univ Nat Central Laser energy conversion device
TWI430491B (en) * 2010-12-31 2014-03-11 Au Optronics Corp Stacked photovoltaic cell module
US8962991B2 (en) 2011-02-25 2015-02-24 Solar Junction Corporation Pseudomorphic window layer for multijunction solar cells
US8927857B2 (en) 2011-02-28 2015-01-06 International Business Machines Corporation Silicon: hydrogen photovoltaic devices, such as solar cells, having reduced light induced degradation and method of making such devices
US20120255600A1 (en) 2011-04-06 2012-10-11 International Business Machines Corporation Method of bonding and formation of back surface field (bsf) for multi-junction iii-v solar cells
US20130112239A1 (en) * 2011-04-14 2013-05-09 Cool Earh Solar Solar energy receiver
US8766087B2 (en) 2011-05-10 2014-07-01 Solar Junction Corporation Window structure for solar cell
WO2013043875A2 (en) 2011-09-22 2013-03-28 Rosestreet Labs Energy, Inc. Compositionally graded dilute group iii-v nitride cell with blocking layers for multijunction solar cell
FR2981195B1 (en) 2011-10-11 2024-08-23 Soitec Silicon On Insulator MULTI-JUNCTIONS IN A SEMICONDUCTOR DEVICE FORMED BY DIFFERENT DEPOSITION TECHNIQUES
WO2013074530A2 (en) * 2011-11-15 2013-05-23 Solar Junction Corporation High efficiency multijunction solar cells
EP2618385A1 (en) 2012-01-20 2013-07-24 AZUR SPACE Solar Power GmbH Semi-finished product of a multiple solar cell and method for manufacturing a multiple solar cell
US9153724B2 (en) 2012-04-09 2015-10-06 Solar Junction Corporation Reverse heterojunctions for solar cells
US8951827B2 (en) 2012-06-22 2015-02-10 Epiworks, Inc. Manufacturing semiconductor-based multi-junction photovoltaic devices
US8636844B1 (en) 2012-07-06 2014-01-28 Translucent, Inc. Oxygen engineered single-crystal REO template
GB2504977B (en) 2012-08-16 2017-10-04 Airbus Defence & Space Gmbh Laser power converter
CN102829884B (en) * 2012-09-10 2014-10-08 清华大学 High-speed SNSPD with strong absorption structure and its preparation method
US20140182667A1 (en) 2013-01-03 2014-07-03 Benjamin C. Richards Multijunction solar cell with low band gap absorbing layer in the middle cell
TWI602315B (en) 2013-03-08 2017-10-11 索泰克公司 Photosensitive element having low band gap active layer with better composition and related method
US20140290737A1 (en) 2013-04-02 2014-10-02 The Regents Of The University Of California Thin film vls semiconductor growth process
US20160300973A1 (en) 2013-05-24 2016-10-13 U.S. Army Research Laboratory Attn: Rdrl-Loc-I Variable range photodetector with enhanced high photon energy response and method thereof
ITMI20131297A1 (en) 2013-08-01 2015-02-02 Cesi Ct Elettrotecnico Sperim Entale Italian PHOTOVOLTAIC CELL WITH VARIABLE PROHIBITED BAND
US8957376B1 (en) 2013-08-07 2015-02-17 Bah Holdings, Llc Optopairs with temperature compensable electroluminescence for use in optical gas absorption analyzers
CN103426965B (en) * 2013-08-16 2016-12-28 中国科学院苏州纳米技术与纳米仿生研究所 Solaode and preparation method thereof
US10388817B2 (en) 2013-12-09 2019-08-20 Avago Technologies International Sales Pte. Limited Transducer to convert optical energy to electrical energy
TWI656651B (en) 2014-02-05 2019-04-11 美商太陽光電公司 Single-chip multi-joint transducer
CN104282793A (en) 2014-09-30 2015-01-14 中山大学 Three-mesa p-Pi-n structured III-nitride semiconductor avalanche photodetector and preparation method thereof
JP2018518848A (en) 2015-06-22 2018-07-12 アイキューイー ピーエルシーIQE plc Photoelectron detector with a dilute nitride layer on a substrate with a lattice parameter that closely matches GaAs.
US9669740B2 (en) 2015-08-04 2017-06-06 Toyota Motor Engineering & Manufacturing North America, Inc. Vehicle having interchangeably storable and mountable stowable folding seat and center console
US20170110613A1 (en) 2015-10-19 2017-04-20 Solar Junction Corporation High efficiency multijunction photovoltaic cells
US9954128B2 (en) 2016-01-12 2018-04-24 The Boeing Company Structures for increased current generation and collection in solar cells with low absorptance and/or low diffusion length
GB2555409B (en) 2016-10-25 2020-07-15 Iqe Plc Photovoltaic Device
CN106711253B (en) 2016-12-14 2018-07-27 江苏华功第三代半导体产业技术研究院有限公司 A kind of III nitride semiconductor avalanche photodiode detector
EP3669402A1 (en) 2017-09-27 2020-06-24 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having a dilute nitride layer
CN107644921B (en) 2017-10-18 2023-08-29 五邑大学 A novel avalanche diode photodetector and its preparation method
TW202114242A (en) 2019-06-04 2021-04-01 美商太陽結公司 Dilute nitride optical absorption layers having graded doping

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11233166B2 (en) 2014-02-05 2022-01-25 Array Photonics, Inc. Monolithic multijunction power converter
US11271122B2 (en) 2017-09-27 2022-03-08 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having a dilute nitride layer

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Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ARRAY PHOTONICS, INC.;REEL/FRAME:063788/0001

Effective date: 20221004

Owner name: CACTUS MATERIALS, INC., ARIZONA

Free format text: ASSIGNMENT OF ASSIGNOR'S INTEREST;ASSIGNOR:ARRAY PHOTONICS, INC.;REEL/FRAME:063788/0001

Effective date: 20221004