US20180277552A1 - Floating memristor - Google Patents
Floating memristor Download PDFInfo
- Publication number
- US20180277552A1 US20180277552A1 US15/674,206 US201715674206A US2018277552A1 US 20180277552 A1 US20180277552 A1 US 20180277552A1 US 201715674206 A US201715674206 A US 201715674206A US 2018277552 A1 US2018277552 A1 US 2018277552A1
- Authority
- US
- United States
- Prior art keywords
- floating gate
- nano
- battery
- electrode
- floating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H01L27/11521—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/04—Architecture, e.g. interconnection topology
- G06N3/049—Temporal neural networks, e.g. delay elements, oscillating neurons or pulsed inputs
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
- G06N3/00—Computing arrangements based on biological models
- G06N3/02—Neural networks
- G06N3/06—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons
- G06N3/063—Physical realisation, i.e. hardware implementation of neural networks, neurons or parts of neurons using electronic means
- G06N3/065—Analogue means
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/54—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using elements simulating biological cells, e.g. neuron
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/56—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency
- G11C11/5614—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using storage elements with more than two stable states represented by steps, e.g. of voltage, current, phase, frequency using conductive bridging RAM [CBRAM] or programming metallization cells [PMC]
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
-
- H01L27/10802—
-
- H01L27/1156—
-
- H01L29/42324—
-
- H01L29/7841—
-
- H01L29/788—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/20—DRAM devices comprising floating-body transistors, e.g. floating-body cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/70—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates the floating gate being an electrode shared by two or more components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
- H10B63/34—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors of the vertical channel field-effect transistor type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/80—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays
- H10B63/84—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays
- H10B63/845—Arrangements comprising multiple bistable or multi-stable switching components of the same type on a plane parallel to the substrate, e.g. cross-point arrays arranged in a direction perpendicular to the substrate, e.g. 3D cell arrays the switching components being connected to a common vertical conductor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/68—Floating-gate IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/68—Floating-gate IGFETs
- H10D30/6891—Floating-gate IGFETs characterised by the shapes, relative sizes or dispositions of the floating gate electrode
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/711—Insulated-gate field-effect transistors [IGFET] having floating bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/70—Resistive array aspects
- G11C2213/77—Array wherein the memory element being directly connected to the bit lines and word lines without any access device being used
Definitions
- the present invention relates to a nanoscale floating gate memristor, which belongs to the general field of on memristors in neural morphological calculations and, more particularly, to an ion type synaptic memory based memristor formed by nanowires and transistor floating gates.
- the memristor is a two-terminal passive device with a variable internal resistance. This resistance depends on the amount of charge which passed through the memristor by a bias applied before. As soon as the desired internal resistance is adjusted, this biasing is interrupted. The memristor will thus maintain exactly this internal resistance until the next biasing is applied. Recently, the memristor was discussed in literature in connection with synapses and neuro-morphological systems.
- Memristors made of various materials and structures have been researched. Synaptic transistors made of nano batteries have also archived quite impressive results. However, the performance of these synaptic devices are not sufficient for practical neuromorphic computing. For example, memristors with metal-insulator-metal structures have unstable, uncontrollable, read/write noise resistive behaviors. Synaptic transistors decouple the electron and ion to reduce the read/write noise and have presented improved results, but the transistor structures have a scaling up problem since there are approximately 1.5 ⁇ 10 14 synapses, connecting 19-23 billion neurons in human brain.
- Synaptic plasticity an ability for synapses to strengthen or weaken, is a fundamental mechanism how synapses learn and adapt over time.
- a synaptic device is an electronic switch which can simulate a biological synapse in both function and structure, and a synaptic device is essential for neuromorphic computing, including brain-like computing and brain-inspired computing.
- a synapse is used to convert electric signals to chemical signals in pre-synapses and reverse chemical signals into electric signals by post-synapses.
- Synapses have two terminal structures that permits a neuron to pass an electrical or chemical signal to another neuron.
- Nanobatteries can regulate the ionic concentration in anodes and cathodes by an external electric field through electrochemical reactions.
- FIG. 1 shows the schematic technical illustration of a floating memristor analog to a biological synapse.
- FIGS. 2A and 2B shows schematic illustration of a floating memristor and an example embodiment floating memristor.
- FIG. 3 shows a top plan-view of a floating memristor with a top electrode cross with a bottom electrode in accordance with embodiments of the present invention.
- FIGS. 4A, 4B and 4C show an isometric view of a floating memristor crossbar configured in accordance with embodiments of the present invention.
- FIGS. 5A and 5B show a floating memristor crossbar based neural network, where each cross junction is a floating memristor to simulate a plastic synapse.
- FIGS. 6A, 6B and 6C show a cross-sectional views of device structures formed at a process stage to illustrate process flows of forming an example embodiment floating memristor.
- a floating memristor can simulate biological synapses and can be used in the field of neuromorphic computing and brain-like computing.
- Memristors are nonvolatile two-terminal nano scale solid state resistive switching devices, which can be used as a component in a wide range of electronic circuits, especially synaptic devices in neuromorphic computing, including brain-like computing and brain-inspired computing.
- synaptic devices in neuromorphic computing, including brain-like computing and brain-inspired computing.
- researchers have made great progress to improve the performance of the synaptic devices, including two-terminal memristors and three-terminal transistors.
- This invention discloses a floating memristor, which can model biological synapses, and can be used as a basic device in neuromorphic computing systems. Example embodiments are described with reference to FIGS. 1-6C .
- a description of a floating memristor device is demonstrated in the first subsection. Different sizes and various materials of a floating memristor are provided. A description of floating memristor crossbars are provided in the second subsection. A floating memristor crossbar based neural network is described in the third subsection. An implemented example of a floating memristor is provided in the last subsection.
- FIG. 1 the schematic perspective view a floating memristor 100 analog to a biological synapse 300 is illustrated.
- FIG. 2A the basic structure of a floating memristor 100 comprises a nanobattery 130 between a top floating gate assembly 140 and a bottom floating gate assembly 120 .
- FIG. 2B shows an embodiment of a floating memristor device 100 , including top electrode 151 , top floating gate tunneling layer 143 , top floating gate electrode 142 , top floating gate barrier layer 141 , nano-battery anode 133 , nano-battery electrolyte 132 , nano-battery cathode 131 , bottom floating gate barrier layer 123 , bottom floating gate electrode 122 , bottom floating gate tunneling layer 121 , and bottom electrode 111 .
- the nano-battery cathode 131 and the nano-battery anode 133 can exchange.
- the thickness of nano-battery electrolyte 132 can also be zero.
- the top electrode 151 , the top floating gate tunneling layer 143 , the top floating gate electrode 142 , the top floating gate barrier layer 141 and the nano-battery anode 133 are used to simulate the presynaptic membrane 301 . Electron tunneling effects and electric field effect are used to convert electronic signals into ionic signals.
- the nano-battery electrolyte 132 is used as an ion channel to simulate the synaptic cleft 302 .
- the nano-battery cathode 131 , bottom floating gate barrier layer 123 , bottom floating gate electrode 122 , bottom floating gate tunneling layer 121 , and bottom electrode 111 are used to simulate the post synaptic membrane 301 , which convert an ionic signal into an electronic signal.
- a floating memristor simulates a synapse 300 , in which, the ion migration history of nano-battery 130 which records as the number of electrons stored in the top floating gate electrode 142 and bottom floating gate electrode 122 represents the synaptic connectivity strength, in term of synaptic weights.
- a floating memristor 100 utilizes the electrochemical reaction in the nano-battery 130 to migrate the alkali metal or alkaline earth metal ions at the nano-battery anode 133 and nano-battery cathode 131 .
- Floating gate assemblies 120 and 140 borrowed from the transistor causes alkali or alkaline earth metal ions of the nano-battery migrate by field effect; write and read the ion migration history of nano-battery through electron tunneling mechanism.
- a floating memristor 100 utilizes ions in the nano-battery 130 and electrons in the floating gate assemblies 122 and 142 both for write and read operations.
- a voltage or current spike is applied on the top and bottom electrodes 151 and 111 to charge or discharge the nano-battery 130 by a tunneling effect and a field effect.
- a voltage or current is applied on the electrodes 151 and 111 , electrons tunnel from top electrode 151 to the top floating gate electrode 142 , or escape from bottom floating gate electrode 122 to the bottom electrode 111 , and the ion distribution in nano-battery 130 will change because of electrochemical reaction.
- the mechanism In a read operation, the mechanism is the same as that in the write operation, while the difference is that the read signal is smaller to promise the state of the floating memristor 100 unconverted.
- the floating memristor 100 simulates a biological synapse 300 .
- a floating memristor 100 comprises the top and bottom electrodes 151 and 111 , each having a thickness of 20 nm to 40 nm, being made of an inert electrode such as platinum (Pt) or gold (Au).
- the top and bottom electrodes 151 and 111 are used to connect to an external power source.
- the top and bottom electrodes 151 and 111 have a width of 5 nm to few mm as shown in FIG. 3 , and top electrode 151 can be oriented asymmetrically along its width direction with the bottom electrode 111 .
- the top and bottom floating gate layers 140 and 120 are used to store electrons tunneling from the top and bottom electrodes 151 and 111 , and also provide an electric field to induce migration of alkali or alkaline earth metal ions in the nano-battery 130 .
- the top and bottom floating gate electrodes 142 and 122 have a thickness from 2 nm to ⁇ 100 nm, respectively.
- the materials made into the top and bottom floating gate electrodes 142 and 122 include inert metals, metal nitrides or doped semiconductors, such as platinum (Pt), gold (Au), doped polysilicon (Si), tantalum nitride (TaN), and the like.
- the top floating gate and bottom floating gate electron tunneling layers 143 and 121 are used to transport electrons from the top and bottom electrode 151 and 111 to the top floating gate electrode 142 and bottom floating gate electrode 122 , so that an electronic field is formed between the nano-battery anode 133 and the nano-battery cathode 131 .
- the bottom electrode 111 and the bottom floating gate electrode 121 produce tunneling current through the electric field effect tunneling.
- the top floating gate tunneling layer 143 and bottom floating gate tunneling layer 121 have a thickness of 2 nm to 8 nm. Further, both top floating gate tunneling layer 143 and bottom floating gate tunneling layer 121 can be placed in the device structure in a symmetry or asymmetry fashion.
- the top floating gate barrier layer 141 and bottom floating gate barrier layer 123 are used to stop electrons transport between the nano-battery 130 and the top floating gate electrode 142 and bottom floating gate electrode 122 to achieve a non-volatile memory, and these two layers also can be placed asymmetric to each other in the device structure with respect to materials and size.
- the thickness of the top floating gate barrier layer 141 and bottom floating gate barrier layer 123 can vary from 6 nm to 12 nm.
- the top floating gate barrier layer 141 , the bottom floating gate barrier layer 123 , the top floating gate tunneling layer 143 , and the bottom floating gate tunneling layer 121 may be formed of dielectric materials including various high-K media such as titanium dioxide (TiO 2 ), silicon nitride (Si 3 N 4 ), hafnium oxide (HfO 2 ), tantalum pentoxide (Ta 2 O 5 ), zirconium oxide (ZrO 2 ), alumina Al 2 O 3 ), silica (SiO 2 ), and the like.
- the nanobattery anode 133 is a temporary storage region for an alkali metal or alkaline earth metal ion, and the nanobattery anode 133 has a thickness of ⁇ 3 nm to ⁇ 100 nm, and the materials of the nanobattery anode 133 include an alkali metal element compound, an alkaline earth metal element compound or a semiconductor oxide such as lithium titanate (Li 4 Ti 5 O 12 ), polycrystalline silicon (Si), titanium oxide (TiO 2 ), and vanadium oxide (V 2 O 5 ).
- a semiconductor oxide such as lithium titanate (Li 4 Ti 5 O 12 ), polycrystalline silicon (Si), titanium oxide (TiO 2 ), and vanadium oxide (V 2 O 5 ).
- the nano-battery electrolyte 132 is used as a transport channel of an alkali metal or alkaline earth metal ion where ions are easily passed and electrons are difficult to pass.
- the nano-battery electrolyte 132 has a thickness of 0 nm to ⁇ 100 nm and the nano-battery electrolyte 132 can be mad of materials includes an alkali metal or alkaline earth metal compound such as lithium phosphorus (LiPON), lithium tantalate (LiTaO 3 ), lithium niobate (LiNiO 3 ), etc.
- a floating memristor 100 wherein the nano-battery cathode 131 is an alkali metal or an alkaline earth metal ion source and is driven by an electrochemical reaction under the induction of the electric field between top floating gate electrode 142 and bottom floating gate electrode 122 such that ions migrate to the nano-battery anode 133 .
- the nano-battery cathode 131 has a thickness of 10 nm to ⁇ 100 nm, and the material includes alkali metal or alkaline earth metal element compounds such as lithium cobalt oxide LiCoO 2 , lithium nickelate (LiNiO 2 ), lithium manganate (LiMn 2 O 4 ), lithium iron phosphate (LiFePO 4 ), and the like.
- FIG. 2B is explained further.
- the ion transport history of the nano-battery 130 is recorded by electrons in the top floating gate electrode 142 and bottom floating gate electrode 122 .
- the top floating gate electrode 142 and bottom floating gate electrode 122 connect with the top electrode 151 and the bottom electrode 111 through the top floating gate tunneling layer 143 and the bottom floating gate tunneling layer 121 to achieve electron transport, while the top bottom floating gate barrier layer 123 and the top floating gate barrier layer 141 help the bottom floating gate electrode 122 and top floating gate electrode 142 maintain an electrical field to drive the electrochemical reaction of the ion transport.
- the electrons from the top electrode 151 tunnel into the top floating gate electrode 142 makes the nano-battery anode 133 charged, specifically, the nano-battery anode 133 needs additional cations to neutralize the top floating gate electrode electron field, therefore, the cations are induced from the nano-battery cathode 131 to the nano-battery anode 133 , and the electrons in the bottom floating gate electrode 122 tunnel into the bottom electrode 111 due to the discharge of the nano-battery cathode 131 .
- a positive voltage pulse is applied to the top electrode 151 that electrons tunnel into the top floating gate electrode 142 to redistribute the alkali metal ion or alkaline earth metal ion in the nano-battery 130 , and the activation is performed if the bottom electrode can output tunneling current.
- the concentration of the alkali metal ion or alkaline earth metal ion in the nano-battery cathode 131 and nano-battery anode 133 , and the concentration of the electrons in the bottom floating gate electrode 122 and top floating gate electrode 142 will change each time the activation is completed.
- the invention utilizes the electrochemical reaction of the nano-battery 130 and the tunneling effect of the floating gate assemblies 120 and 140 to decouple the electron and ion, eliminating the influence of electron and ion coupling on the read and write process of the memristor, and improves the controllability of the memristor.
- the invention combines the nano-battery 130 and two transistor floating gate assemblies 120 and 140 to simulate synaptic plasticity, and the mechanism is more close to the biological synapses 300 , which can effectively promote a neural network based learning system.
- the floating memristor described above can be implemented at nanowire intersection of a nanowire crossbar.
- the top electrode assembly 150 and bottom electrode assembly 110 can form the nanowire of a crossbar, as shown in FIG. 4B , and this crossbar is compatible with CMOS technology.
- This crossbar is composed of a first layer of conductive nanowires as the top electrode assembly 150 , a second layer of conductive nanowires as the bottom electrode assembly 110 , and each cross point of the crossbar is a floating memristor 100 .
- each individual nanowire of the first layer nanowires is placed substantially parallel to each other
- each individual nanowire of the second layer nanowires is placed substantially parallel to each other as well.
- the nano-battery in the invention has been widely used in the battery industry, and the semiconductor floating gate technology has been widely used in flash memory technology, which is beneficial to the large-scale production and industrial application of floating gate memristors.
- a floating memristor crossbar can implement a neural network, wherein, each floating memristor in the memristor crossbar represents a synapse between neurons.
- a 6 ⁇ 5 crossbar can implement a neural network with 6 input neurons and 5 output neurons. Each cross-point of the crossbar corresponds to a synapse between neurons of the input layer and output layer.
- a floating gate memristor structure is an ion type synaptic memory based on a nano-battery with top and bottom floating gates.
- the basic structure of the device includes a bottom electrode assembly 110 , a bottom floating gate assembly 120 , a nano-battery 130 , a top floating gate assembly 140 , and a top electrode assembly 150 .
- the bottom electrode assembly 110 is made of 30 nanometers of Pt.
- the bottom floating gate tunneling layer 121 is made of Al 2 O 3 with a thickness of 4 nm.
- the bottom floating gate barrier layer 123 is made of Al 2 O 3 with a thickness of 10 nm.
- the bottom floating gate electrode 122 uses 6 nm of TaN.
- the nano-battery cathode 131 is 20 nm of LiCoO 2 .
- the nano-battery electrolyte 132 uses 20 nm LiPON.
- the nano-battery anode 133 is 10 nm of Li 4 Ti 5 O 12 .
- the top floating gate barrier layer 141 is Al 2 O 3 , having a thickness of 8 nm.
- the top floating gate tunneling layer is Al 2 O 3 at 3 nm.
- the top floating gate electrode 142 employs 5 nm of TaN.
- the top electrode assembly 150 employs 30 nm of platinum.
- Experimental devices are fabricated by using pulsed laser deposition (PLD) technique, ultrahigh vacuum magnetron sputtering with multiple semiconductor lithography process or the like in combination, prepared from the bottom up layer by layer on a substrate.
- PLD pulsed laser deposition
- a layer of Pt is prepared by magnetron sputtering as the bottom electrode assembly 110 , and then an Al 2 O 3 film is deposited on the upper surface of the bottom electrode 110 as a bottom floating gate tunneling layer 121 by PLD.
- the electron tunneling layer, a layer of TaN is prepared by magnetron sputtering and the floating gate electrode 122 is prepared by photolithography and wet etching, and then an Al 2 O 3 film is deposited on the floating gate electrode 122 as a bottom floating gate barrier layer 123 using PLD.
- the bottom floating gate assembly 120 is complete as shown in FIG. 6A .
- a LiCoO 2 thin film is prepared on the bottom floating gate barrier layer 123 as a nano-battery cathode 131 .
- a layer of LiPON film is prepared by PLD on the nano-battery cathode 131 as a nano-battery electrolyte 132 .
- a layer of Li 4 Ti 5 O 12 is prepared as a nano-battery anode 133 by PLD on the nano-battery electrolyte 132 .
- the nano-battery layer 130 is complete as shown in FIG. 6B .
- a thin film of Al2O3 is prepared by PLD on the nano-battery anode 133 as a top barrier layer.
- the top floating gate electrode 142 is formed by depositing a layer of TaN by magnetron sputtering, followed by wet etching and photolithography. Then a film of Al 2 O 3 is deposited on the floating gate electrode 142 as the top floating gate tunneling layer 143 . After that, the top floating gate assembly 140 is completed. Finally, a layer of Pt as the top electrode assembly 150 is formed on the top floating gate tunneling layer 143 by magnetron sputtering.
- a positive voltage pulse is applied to the top electrode 151 such that electron tunneling into the top floating gate electrode 142 , and the Li ion in the nano-battery 130 is induced by the field effect of the top floating gate electrode 142 from LiCoO 2 to Li 4 Ti 5 O 12 , redistributing the Li ion in nano-battery.
- the surplus electrons in the LiCoO 2 allow the electrons to enter the bottom electrode assembly 110 from the bottom floating gate electrode 122 by field effect, such that the bottom electrode assembly 110 outputs current to complete the activation.
- the concentration of Li ions in the nano-battery anode and nano-battery cathode 133 and 131 , and the electron concentration in the top and bottom floating gate electrodes 122 and 142 are changed whenever activations complete, and each ion and electron concentration distribution is recorded as a state. With the increase in the number of activations, the device will become more and more easily activated. To inhibit the device, a negative voltage pulse will be applied to the top electrode 151 to discharge the top floating gate electrode.
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biomedical Technology (AREA)
- Health & Medical Sciences (AREA)
- Biophysics (AREA)
- General Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Artificial Intelligence (AREA)
- General Physics & Mathematics (AREA)
- Computational Linguistics (AREA)
- Data Mining & Analysis (AREA)
- Evolutionary Computation (AREA)
- Computing Systems (AREA)
- General Engineering & Computer Science (AREA)
- Software Systems (AREA)
- Mathematical Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Neurology (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
- The present invention relates to a nanoscale floating gate memristor, which belongs to the general field of on memristors in neural morphological calculations and, more particularly, to an ion type synaptic memory based memristor formed by nanowires and transistor floating gates.
- Significant research and development efforts are currently directed toward designing and implementing artificial synapses for neural network based learning systems, such as memristors and synaptic transistors. The memristor is a two-terminal passive device with a variable internal resistance. This resistance depends on the amount of charge which passed through the memristor by a bias applied before. As soon as the desired internal resistance is adjusted, this biasing is interrupted. The memristor will thus maintain exactly this internal resistance until the next biasing is applied. Recently, the memristor was discussed in literature in connection with synapses and neuro-morphological systems.
- Memristors made of various materials and structures have been researched. Synaptic transistors made of nano batteries have also archived quite impressive results. However, the performance of these synaptic devices are not sufficient for practical neuromorphic computing. For example, memristors with metal-insulator-metal structures have unstable, uncontrollable, read/write noise resistive behaviors. Synaptic transistors decouple the electron and ion to reduce the read/write noise and have presented improved results, but the transistor structures have a scaling up problem since there are approximately 1.5×1014 synapses, connecting 19-23 billion neurons in human brain.
- Synaptic plasticity, an ability for synapses to strengthen or weaken, is a fundamental mechanism how synapses learn and adapt over time. A synaptic device is an electronic switch which can simulate a biological synapse in both function and structure, and a synaptic device is essential for neuromorphic computing, including brain-like computing and brain-inspired computing. In biology, a synapse is used to convert electric signals to chemical signals in pre-synapses and reverse chemical signals into electric signals by post-synapses. Synapses have two terminal structures that permits a neuron to pass an electrical or chemical signal to another neuron. Nanobatteries can regulate the ionic concentration in anodes and cathodes by an external electric field through electrochemical reactions. However, to read out the conductance of the nanobattery in a two-terminal device is a formidable challenge because the electrolyte of the nanobattery is made of highly electrical resistive materials. To achieve a synaptic memristor, a suitable physical effect and novel structure are needed.
- The detailed description will make reference to the following drawings, by way of example. For the sake of brevity, reference numerals having a previously described function may or may not be described in connection with the drawing in which they appear.
-
FIG. 1 shows the schematic technical illustration of a floating memristor analog to a biological synapse. -
FIGS. 2A and 2B shows schematic illustration of a floating memristor and an example embodiment floating memristor. -
FIG. 3 shows a top plan-view of a floating memristor with a top electrode cross with a bottom electrode in accordance with embodiments of the present invention. -
FIGS. 4A, 4B and 4C show an isometric view of a floating memristor crossbar configured in accordance with embodiments of the present invention. -
FIGS. 5A and 5B show a floating memristor crossbar based neural network, where each cross junction is a floating memristor to simulate a plastic synapse. -
FIGS. 6A, 6B and 6C show a cross-sectional views of device structures formed at a process stage to illustrate process flows of forming an example embodiment floating memristor. - Reference is now made in detail to specific examples of the disclosed floating memristor. A floating memristor can simulate biological synapses and can be used in the field of neuromorphic computing and brain-like computing.
- In the following detailed description, reference is made to the drawings accompanying this disclosure, which illustrate specific examples in which this disclosure may be practiced. It is to be understood that other examples in which this disclosure may be practiced exist, and structural or logical changes may be made without departing from the scope of the present disclosure. Therefore, the following detailed description is not to be taken in a limiting sense. Instead, the scope of the present disclosure is defined by the appended claims.
- Memristors are nonvolatile two-terminal nano scale solid state resistive switching devices, which can be used as a component in a wide range of electronic circuits, especially synaptic devices in neuromorphic computing, including brain-like computing and brain-inspired computing. When used as a synaptic device, throughout last few years, researchers have made great progress to improve the performance of the synaptic devices, including two-terminal memristors and three-terminal transistors. This invention discloses a floating memristor, which can model biological synapses, and can be used as a basic device in neuromorphic computing systems. Example embodiments are described with reference to
FIGS. 1-6C . - The detailed description is organized as the following. A description of a floating memristor device is demonstrated in the first subsection. Different sizes and various materials of a floating memristor are provided. A description of floating memristor crossbars are provided in the second subsection. A floating memristor crossbar based neural network is described in the third subsection. An implemented example of a floating memristor is provided in the last subsection.
- Referring to
FIG. 1 , the schematic perspective view a floatingmemristor 100 analog to a biological synapse 300 is illustrated. - Referring to
FIG. 2A , the basic structure of a floatingmemristor 100 comprises ananobattery 130 between a top floatinggate assembly 140 and a bottom floatinggate assembly 120.FIG. 2B shows an embodiment of a floatingmemristor device 100, includingtop electrode 151, top floatinggate tunneling layer 143, top floatinggate electrode 142, top floatinggate barrier layer 141, nano-battery anode 133, nano-battery electrolyte 132, nano-battery cathode 131, bottom floatinggate barrier layer 123, bottom floatinggate electrode 122, bottom floatinggate tunneling layer 121, andbottom electrode 111. In other embodiments, the nano-battery cathode 131 and the nano-battery anode 133 can exchange. The thickness of nano-battery electrolyte 132 can also be zero. Wherein, thetop electrode 151, the top floatinggate tunneling layer 143, the top floatinggate electrode 142, the top floatinggate barrier layer 141 and the nano-battery anode 133 are used to simulate thepresynaptic membrane 301. Electron tunneling effects and electric field effect are used to convert electronic signals into ionic signals. The nano-battery electrolyte 132 is used as an ion channel to simulate thesynaptic cleft 302. The nano-battery cathode 131, bottom floatinggate barrier layer 123, bottom floatinggate electrode 122, bottom floatinggate tunneling layer 121, andbottom electrode 111 are used to simulate the postsynaptic membrane 301, which convert an ionic signal into an electronic signal. A floating memristor simulates a synapse 300, in which, the ion migration history of nano-battery 130 which records as the number of electrons stored in the top floatinggate electrode 142 and bottom floatinggate electrode 122 represents the synaptic connectivity strength, in term of synaptic weights. - A
floating memristor 100 according to the present invention utilizes the electrochemical reaction in the nano-battery 130 to migrate the alkali metal or alkaline earth metal ions at the nano-battery anode 133 and nano-battery cathode 131. Floating 120 and 140 borrowed from the transistor causes alkali or alkaline earth metal ions of the nano-battery migrate by field effect; write and read the ion migration history of nano-battery through electron tunneling mechanism.gate assemblies - A floating
memristor 100 utilizes ions in the nano-battery 130 and electrons in the floating 122 and 142 both for write and read operations. During a write operation for changing the state of floatinggate assemblies memristor 100, a voltage or current spike is applied on the top and 151 and 111 to charge or discharge the nano-bottom electrodes battery 130 by a tunneling effect and a field effect. After a voltage or current is applied on the 151 and 111, electrons tunnel fromelectrodes top electrode 151 to the top floatinggate electrode 142, or escape from bottom floatinggate electrode 122 to thebottom electrode 111, and the ion distribution in nano-battery 130 will change because of electrochemical reaction. In a read operation, the mechanism is the same as that in the write operation, while the difference is that the read signal is smaller to promise the state of the floatingmemristor 100 unconverted. By using electrons and ions both for read and write operations, the floatingmemristor 100 simulates a biological synapse 300. - Referring to
FIG. 2B , the detailed description of components in this embodiment is described as following: - A floating
memristor 100, comprises the top and 151 and 111, each having a thickness of 20 nm to 40 nm, being made of an inert electrode such as platinum (Pt) or gold (Au). The top andbottom electrodes 151 and 111 are used to connect to an external power source.bottom electrodes - In the floating
memristor 100 as described herein, the top and 151 and 111 have a width of 5 nm to few mm as shown inbottom electrodes FIG. 3 , andtop electrode 151 can be oriented asymmetrically along its width direction with thebottom electrode 111. - In the floating
memristor 100 as described herein, the top and bottom floating gate layers 140 and 120 are used to store electrons tunneling from the top and 151 and 111, and also provide an electric field to induce migration of alkali or alkaline earth metal ions in the nano-bottom electrodes battery 130. The top and bottom floating 142 and 122 have a thickness from 2 nm to ˜100 nm, respectively. And the materials made into the top and bottom floatinggate electrodes 142 and 122 include inert metals, metal nitrides or doped semiconductors, such as platinum (Pt), gold (Au), doped polysilicon (Si), tantalum nitride (TaN), and the like.gate electrodes - In the floating
memristor 100 as described herein, the top floating gate and bottom floating gate electron tunneling layers 143 and 121 are used to transport electrons from the top and 151 and 111 to the top floatingbottom electrode gate electrode 142 and bottom floatinggate electrode 122, so that an electronic field is formed between the nano-battery anode 133 and the nano-battery cathode 131. Thebottom electrode 111 and the bottom floatinggate electrode 121 produce tunneling current through the electric field effect tunneling. The top floatinggate tunneling layer 143 and bottom floatinggate tunneling layer 121 have a thickness of 2 nm to 8 nm. Further, both top floatinggate tunneling layer 143 and bottom floatinggate tunneling layer 121 can be placed in the device structure in a symmetry or asymmetry fashion. - In the floating
memristor 100 as described herein, the top floatinggate barrier layer 141 and bottom floatinggate barrier layer 123 are used to stop electrons transport between the nano-battery 130 and the top floatinggate electrode 142 and bottom floatinggate electrode 122 to achieve a non-volatile memory, and these two layers also can be placed asymmetric to each other in the device structure with respect to materials and size. The thickness of the top floatinggate barrier layer 141 and bottom floatinggate barrier layer 123 can vary from 6 nm to 12 nm. - The top floating
gate barrier layer 141, the bottom floatinggate barrier layer 123, the top floatinggate tunneling layer 143, and the bottom floatinggate tunneling layer 121 may be formed of dielectric materials including various high-K media such as titanium dioxide (TiO2), silicon nitride (Si3N4), hafnium oxide (HfO2), tantalum pentoxide (Ta2O5), zirconium oxide (ZrO2), alumina Al2O3), silica (SiO2), and the like. - In the floating
memristor 100 as described herein, thenanobattery anode 133 is a temporary storage region for an alkali metal or alkaline earth metal ion, and thenanobattery anode 133 has a thickness of ˜3 nm to ˜100 nm, and the materials of thenanobattery anode 133 include an alkali metal element compound, an alkaline earth metal element compound or a semiconductor oxide such as lithium titanate (Li4Ti5O12), polycrystalline silicon (Si), titanium oxide (TiO2), and vanadium oxide (V2O5). - In the floating
memristor 100 as described herein, the nano-battery electrolyte 132 is used as a transport channel of an alkali metal or alkaline earth metal ion where ions are easily passed and electrons are difficult to pass. The nano-battery electrolyte 132 has a thickness of 0 nm to ˜100 nm and the nano-battery electrolyte 132 can be mad of materials includes an alkali metal or alkaline earth metal compound such as lithium phosphorus (LiPON), lithium tantalate (LiTaO3), lithium niobate (LiNiO3), etc. - A floating
memristor 100, wherein the nano-battery cathode 131 is an alkali metal or an alkaline earth metal ion source and is driven by an electrochemical reaction under the induction of the electric field between top floatinggate electrode 142 and bottom floatinggate electrode 122 such that ions migrate to the nano-battery anode 133. The nano-battery cathode 131 has a thickness of 10 nm to ˜100 nm, and the material includes alkali metal or alkaline earth metal element compounds such as lithium cobalt oxide LiCoO2, lithium nickelate (LiNiO2), lithium manganate (LiMn2O4), lithium iron phosphate (LiFePO4), and the like. - In order to provide a more detail description of the mechanism and operation of a floating memristor,
FIG. 2B is explained further. The ion transport history of the nano-battery 130 is recorded by electrons in the top floatinggate electrode 142 and bottom floatinggate electrode 122. The top floatinggate electrode 142 and bottom floatinggate electrode 122 connect with thetop electrode 151 and thebottom electrode 111 through the top floatinggate tunneling layer 143 and the bottom floatinggate tunneling layer 121 to achieve electron transport, while the top bottom floatinggate barrier layer 123 and the top floatinggate barrier layer 141 help the bottom floatinggate electrode 122 and top floatinggate electrode 142 maintain an electrical field to drive the electrochemical reaction of the ion transport. - The electrons from the
top electrode 151 tunnel into the top floatinggate electrode 142, makes the nano-battery anode 133 charged, specifically, the nano-battery anode 133 needs additional cations to neutralize the top floating gate electrode electron field, therefore, the cations are induced from the nano-battery cathode 131 to the nano-battery anode 133, and the electrons in the bottom floatinggate electrode 122 tunnel into thebottom electrode 111 due to the discharge of the nano-battery cathode 131. - During the write operation, a positive voltage pulse is applied to the
top electrode 151 that electrons tunnel into the top floatinggate electrode 142 to redistribute the alkali metal ion or alkaline earth metal ion in the nano-battery 130, and the activation is performed if the bottom electrode can output tunneling current. The concentration of the alkali metal ion or alkaline earth metal ion in the nano-battery cathode 131 and nano-battery anode 133, and the concentration of the electrons in the bottom floatinggate electrode 122 and top floatinggate electrode 142 will change each time the activation is completed. Those concentrations of the floatingmemristor 100 are recorded as one state, then, with the increase in the number of activation, the device will become more and more easily activated, if the reverse voltage applied to thetop electrode 151, it will inhibit the next electrode after the tunneling current, this mechanism is a simulation of the synaptic plasticity. - The invention utilizes the electrochemical reaction of the nano-
battery 130 and the tunneling effect of the floating 120 and 140 to decouple the electron and ion, eliminating the influence of electron and ion coupling on the read and write process of the memristor, and improves the controllability of the memristor.gate assemblies - The invention combines the nano-
battery 130 and two transistor floating 120 and 140 to simulate synaptic plasticity, and the mechanism is more close to the biological synapses 300, which can effectively promote a neural network based learning system.gate assemblies - Referring to
FIGS. 4A, 4B and 4C , the floating memristor described above can be implemented at nanowire intersection of a nanowire crossbar. Thetop electrode assembly 150 andbottom electrode assembly 110 can form the nanowire of a crossbar, as shown inFIG. 4B , and this crossbar is compatible with CMOS technology. This crossbar is composed of a first layer of conductive nanowires as thetop electrode assembly 150, a second layer of conductive nanowires as thebottom electrode assembly 110, and each cross point of the crossbar is a floatingmemristor 100. In a floating memristor crossbar as shown inFIG. 4C , within thetop electrode assembly 150, each individual nanowire of the first layer nanowires is placed substantially parallel to each other, and within thebottom electrode assembly 110, each individual nanowire of the second layer nanowires is placed substantially parallel to each other as well. - The nano-battery in the invention has been widely used in the battery industry, and the semiconductor floating gate technology has been widely used in flash memory technology, which is beneficial to the large-scale production and industrial application of floating gate memristors.
- Referring to
FIGS. 5A and 5B , a floating memristor crossbar can implement a neural network, wherein, each floating memristor in the memristor crossbar represents a synapse between neurons. As show inFIGS. 5A and 5B , a 6×5 crossbar can implement a neural network with 6 input neurons and 5 output neurons. Each cross-point of the crossbar corresponds to a synapse between neurons of the input layer and output layer. - Referring to
FIGS. 6A, 6B and 6C , the composition of the present invention will now be described in further detail with reference to the accompanying drawings, which are intended to facilitate the understanding of the invention, and specific structural details and functional details thereof are merely illustrative of the purpose of describing exemplary embodiments without any limitation. Accordingly, the invention may be practiced in many alternative forms and the invention should not be construed as being limited to the exemplary embodiments set forth herein, but rather encompasses all changes, equivalents, and equivalents which fall within the scope of the invention. - As shown in
FIG. 2B , a floating gate memristor structure according to the present embodiment is an ion type synaptic memory based on a nano-battery with top and bottom floating gates. The basic structure of the device includes abottom electrode assembly 110, a bottom floatinggate assembly 120, a nano-battery 130, a top floatinggate assembly 140, and atop electrode assembly 150. Thebottom electrode assembly 110 is made of 30 nanometers of Pt. The bottom floatinggate tunneling layer 121 is made of Al2O3 with a thickness of 4 nm. The bottom floatinggate barrier layer 123 is made of Al2O3 with a thickness of 10 nm. The bottom floatinggate electrode 122 uses 6 nm of TaN. The nano-battery cathode 131 is 20 nm of LiCoO2. The nano-battery electrolyte 132 uses 20 nm LiPON. The nano-battery anode 133 is 10 nm of Li4Ti5O12. The top floatinggate barrier layer 141 is Al2O3, having a thickness of 8 nm. The top floating gate tunneling layer is Al2O3 at 3 nm. The top floatinggate electrode 142 employs 5 nm of TaN. Thetop electrode assembly 150 employs 30 nm of platinum. - Experimental devices are fabricated by using pulsed laser deposition (PLD) technique, ultrahigh vacuum magnetron sputtering with multiple semiconductor lithography process or the like in combination, prepared from the bottom up layer by layer on a substrate. First, on the
flat substrate 201, a layer of Pt is prepared by magnetron sputtering as thebottom electrode assembly 110, and then an Al2O3 film is deposited on the upper surface of thebottom electrode 110 as a bottom floatinggate tunneling layer 121 by PLD. The electron tunneling layer, a layer of TaN is prepared by magnetron sputtering and the floatinggate electrode 122 is prepared by photolithography and wet etching, and then an Al2O3 film is deposited on the floatinggate electrode 122 as a bottom floatinggate barrier layer 123 using PLD. The bottom floatinggate assembly 120 is complete as shown inFIG. 6A . A LiCoO2 thin film is prepared on the bottom floatinggate barrier layer 123 as a nano-battery cathode 131. A layer of LiPON film is prepared by PLD on the nano-battery cathode 131 as a nano-battery electrolyte 132. A layer of Li4Ti5O12 is prepared as a nano-battery anode 133 by PLD on the nano-battery electrolyte 132. The nano-battery layer 130 is complete as shown inFIG. 6B . A thin film of Al2O3 is prepared by PLD on the nano-battery anode 133 as a top barrier layer. The top floatinggate electrode 142 is formed by depositing a layer of TaN by magnetron sputtering, followed by wet etching and photolithography. Then a film of Al2O3 is deposited on the floatinggate electrode 142 as the top floatinggate tunneling layer 143. After that, the top floatinggate assembly 140 is completed. Finally, a layer of Pt as thetop electrode assembly 150 is formed on the top floatinggate tunneling layer 143 by magnetron sputtering. - During the write operation, a positive voltage pulse is applied to the
top electrode 151 such that electron tunneling into the top floatinggate electrode 142, and the Li ion in the nano-battery 130 is induced by the field effect of the top floatinggate electrode 142 from LiCoO2 to Li4Ti5O12, redistributing the Li ion in nano-battery. The surplus electrons in the LiCoO2 allow the electrons to enter thebottom electrode assembly 110 from the bottom floatinggate electrode 122 by field effect, such that thebottom electrode assembly 110 outputs current to complete the activation. The concentration of Li ions in the nano-battery anode and nano- 133 and 131, and the electron concentration in the top and bottom floatingbattery cathode 122 and 142 are changed whenever activations complete, and each ion and electron concentration distribution is recorded as a state. With the increase in the number of activations, the device will become more and more easily activated. To inhibit the device, a negative voltage pulse will be applied to thegate electrodes top electrode 151 to discharge the top floating gate electrode. - The Elements in the embodiments are:
- 151 top electrode
- 140 top floating gate assembly
- 141 top floating gate barrier layer
- 142 top floating gate electrode
- 143 top floating gate tunneling layer
- 133 nano-battery anode
- 132 nano-battery electrolyte
- 131 nano-battery cathode
- 130 nano-battery
- 120 bottom floating gate assembly
- 123 bottom floating gate barrier layer
- 122 bottom floating gate electrode
- 121 bottom floating gate tunneling layer
- 111 bottom electrode
- 150 top electrode assembly (150 is top electrode of crossbar, while 151 is top electrode of a device, and 110 is the same, as shown in
FIG. 4C ) - 110 bottom electrode assembly
- 100 floating memristor embodiment (a device embodiment made of
111, 120, 130, 140, and 151, as shown inelements FIG. 4A .) - 400 neurons in a neural network (as shown in
FIG. 4A ) - 500 synapses in a neural network (synapses in a neural network, as shown in
FIG. 4A ) - 201 substrate
- 301 presynaptic membrane
- 302 synaptic cleft
- 303 postsynaptic membrane
Claims (16)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710177991.4 | 2017-03-23 | ||
| CN201710177991 | 2017-03-23 | ||
| CN201710177991.4A CN107068708B (en) | 2017-03-23 | 2017-03-23 | A floating gate memristor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US10083974B1 US10083974B1 (en) | 2018-09-25 |
| US20180277552A1 true US20180277552A1 (en) | 2018-09-27 |
Family
ID=59620309
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US15/674,206 Expired - Fee Related US10083974B1 (en) | 2017-03-23 | 2017-08-10 | Floating memristor |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US10083974B1 (en) |
| CN (1) | CN107068708B (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20200274065A1 (en) * | 2019-02-22 | 2020-08-27 | Massachusetts Institute Of Technology | Resistive switching devices containing lithium titanate, and associated systems and methods |
| US10886124B2 (en) | 2017-11-30 | 2021-01-05 | International Business Machines Corporation | Multi-state device based on ion trapping |
| US10903420B2 (en) | 2019-04-16 | 2021-01-26 | International Business Machines Corporation | Lithium-compound based solid state memristor device for neuromorphic computing |
| WO2021083690A1 (en) * | 2019-10-29 | 2021-05-06 | International Business Machines Corporation | Electrochemical device of variable electrical conductance |
| US11133063B1 (en) | 2020-06-22 | 2021-09-28 | International Business Machines Corporation | Suppressing undesired programming at half-selected devices in a crosspoint array of 3-terminal resistive memory |
| WO2021262730A1 (en) * | 2020-06-25 | 2021-12-30 | Rain Neuromorphics Inc. | Lithographic memristive array |
| US11227212B2 (en) | 2019-04-08 | 2022-01-18 | International Business Machines Corporation | Non-volatile resistive processing unit |
| KR20220121160A (en) * | 2021-02-24 | 2022-08-31 | 가부시끼가이샤 도시바 | non-volatile memory device |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10429343B1 (en) * | 2017-02-09 | 2019-10-01 | National Technology & Engineering Solutions Of Sandia, Llc | Tunable ionic electronic transistor |
| FR3066043B1 (en) * | 2017-05-04 | 2019-06-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | MEMORY SEMICONDUCTOR COMPONENT INCORPORATING A NANO-BATTERY, SEMICONDUCTOR DEVICE COMPRISING SUCH A COMPONENT AND METHOD USING SUCH A DEVICE |
| US11003981B2 (en) * | 2017-05-25 | 2021-05-11 | International Business Machines Corporation | Two-terminal metastable mixed-conductor memristive devices |
| US10340447B2 (en) * | 2017-06-07 | 2019-07-02 | International Business Machines Corporation | Three-terminal metastable symmetric zero-volt battery memristive device |
| FR3076052B1 (en) * | 2017-12-22 | 2021-12-31 | Commissariat Energie Atomique | RESISTIVE MEMORY IN THREE DIMENSIONS AND METHOD FOR OBTAINING SUCH A MEMORY |
| US10467524B1 (en) | 2018-06-06 | 2019-11-05 | International Business Machines Corporation | Three-terminal neuromorphic vertical sensing |
| CN108962316B (en) * | 2018-06-25 | 2020-09-08 | 华中科技大学 | Memristor and CMOS-based Content Addressable Memory Cell and Data Search and Matching Method |
| CN109148686B (en) * | 2018-08-24 | 2020-01-31 | 中国科学院化学研究所 | Biomimetic adaptive sensor based on organic transistor and its preparation method and application |
| US11823808B2 (en) | 2018-09-19 | 2023-11-21 | University Of Massachusetts | Conductive composite materials fabricated with protein nanowires |
| WO2020069523A1 (en) | 2018-09-28 | 2020-04-02 | University Of Massachusetts | Electric power generation from ambient humidity using protein nanowires |
| CN109978019B (en) * | 2019-03-07 | 2023-05-23 | 东北师范大学 | Image pattern recognition analog and digital hybrid memristive equipment and its preparation, realizing STDP learning rules and image pattern recognition methods |
| WO2020191281A1 (en) | 2019-03-20 | 2020-09-24 | University Of Massachusetts | Microbial nanowires modified to contain peptides and methods of making |
| US11201284B2 (en) | 2020-03-24 | 2021-12-14 | International Business Machines Corporation | Magnesium ion based synaptic device |
| US11631824B2 (en) * | 2020-04-08 | 2023-04-18 | University Of Massachusetts | Memristor device comprising protein nanowires |
| US11982637B2 (en) | 2020-04-22 | 2024-05-14 | University Of Massachusetts | Sensors comprising electrically-conductive protein nanowires |
| CN111628078B (en) * | 2020-06-02 | 2022-09-06 | 西安电子科技大学 | Synaptic transistor based on two-dimensional and three-dimensional perovskite composite structure and preparation method thereof |
| CN111785828B (en) * | 2020-07-03 | 2022-09-09 | 北京航空航天大学 | Skyrmion-Based Artificial Synaptic Devices |
| CN112634959B (en) * | 2020-11-30 | 2025-01-07 | 光华临港工程应用技术研发(上海)有限公司 | Deep neural network weight storage device and preparation method thereof, and electronic device |
| CN113113535B (en) * | 2021-03-30 | 2023-05-26 | 天津理工大学 | MoS-based 2 All-solid-state electrolyte memristor and preparation method thereof |
| CN114551721B (en) * | 2022-01-17 | 2025-11-18 | 中国科学院宁波材料技术与工程研究所 | A memristor unit based on dual-ion modulation and its fabrication method |
| CN115835769B (en) * | 2022-10-18 | 2026-01-20 | 苏州科技大学 | Hydrogen bond organic frame nanocomposite and preparation method and application thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8001491B2 (en) * | 2008-10-20 | 2011-08-16 | Industrial Technology Research Institute | Organic thin film transistor and method of fabricating the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8586961B2 (en) * | 2008-05-09 | 2013-11-19 | The Board Of Trustees Of The University Of Illinois | Resistive changing device |
| CN101593810B (en) * | 2009-07-02 | 2011-04-06 | 黑龙江大学 | Nano structure quick-switch memristor and manufacturing method thereof |
| US8737113B2 (en) * | 2010-02-08 | 2014-05-27 | Hewlett-Packard Development Company, L.P. | Memory resistor having multi-layer electrodes |
| US8415652B2 (en) * | 2010-06-21 | 2013-04-09 | Hewlett-Packard Development Company, L.P. | Memristors with a switching layer comprising a composite of multiple phases |
| CN106299114A (en) * | 2016-09-09 | 2017-01-04 | 中国科学院宁波材料技术与工程研究所 | A kind of memristor |
-
2017
- 2017-03-23 CN CN201710177991.4A patent/CN107068708B/en not_active Expired - Fee Related
- 2017-08-10 US US15/674,206 patent/US10083974B1/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8001491B2 (en) * | 2008-10-20 | 2011-08-16 | Industrial Technology Research Institute | Organic thin film transistor and method of fabricating the same |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10886124B2 (en) | 2017-11-30 | 2021-01-05 | International Business Machines Corporation | Multi-state device based on ion trapping |
| US20200274065A1 (en) * | 2019-02-22 | 2020-08-27 | Massachusetts Institute Of Technology | Resistive switching devices containing lithium titanate, and associated systems and methods |
| US11825758B2 (en) * | 2019-02-22 | 2023-11-21 | Massachusetts Institute Of Technology | Resistive switching devices containing lithium titanate, and associated systems and methods |
| US11227212B2 (en) | 2019-04-08 | 2022-01-18 | International Business Machines Corporation | Non-volatile resistive processing unit |
| US10903420B2 (en) | 2019-04-16 | 2021-01-26 | International Business Machines Corporation | Lithium-compound based solid state memristor device for neuromorphic computing |
| CN114600129A (en) * | 2019-10-29 | 2022-06-07 | 国际商业机器公司 | Variable conductance electrochemical devices |
| WO2021083690A1 (en) * | 2019-10-29 | 2021-05-06 | International Business Machines Corporation | Electrochemical device of variable electrical conductance |
| US11250315B2 (en) * | 2019-10-29 | 2022-02-15 | International Business Machines Corporation | Electrochemical device of variable electrical conductance |
| US11133063B1 (en) | 2020-06-22 | 2021-09-28 | International Business Machines Corporation | Suppressing undesired programming at half-selected devices in a crosspoint array of 3-terminal resistive memory |
| US11599781B2 (en) | 2020-06-25 | 2023-03-07 | Rain Neuromorphics Inc. | Lithographic memristive array |
| WO2021262730A1 (en) * | 2020-06-25 | 2021-12-30 | Rain Neuromorphics Inc. | Lithographic memristive array |
| KR20220121160A (en) * | 2021-02-24 | 2022-08-31 | 가부시끼가이샤 도시바 | non-volatile memory device |
| JP2022129104A (en) * | 2021-02-24 | 2022-09-05 | 株式会社東芝 | Nonvolatile memory device |
| US11777006B2 (en) | 2021-02-24 | 2023-10-03 | Kabushiki Kaisha Toshiba | Nonvolatile memory device |
| KR102685665B1 (en) * | 2021-02-24 | 2024-07-15 | 가부시끼가이샤 도시바 | Nonvolatile memory device |
| JP7532284B2 (en) | 2021-02-24 | 2024-08-13 | 株式会社東芝 | Non-volatile Memory Devices |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107068708A (en) | 2017-08-18 |
| CN107068708B (en) | 2019-08-06 |
| US10083974B1 (en) | 2018-09-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10083974B1 (en) | Floating memristor | |
| Hadke et al. | Two-dimensional materials for brain-inspired computing hardware | |
| US10854812B2 (en) | Systems and methods for gated-insulator reconfigurable non-volatile memory devices | |
| CN104347520B (en) | Non-volatile memory transistor and equipment including the memory transistor | |
| US4839700A (en) | Solid-state non-volatile electronically programmable reversible variable resistance device | |
| Fuller et al. | Redox transistors for neuromorphic computing | |
| KR102167125B1 (en) | Neuromorphic device using crossbar memory | |
| Lee et al. | Two-terminal structured synaptic device using ionic electrochemical reaction mechanism for neuromorphic system | |
| US20190214082A1 (en) | High speed thin film two terminal resistive memory | |
| Liu et al. | Proton-assisted redox-based three-terminal memristor for synaptic device applications | |
| Wan et al. | Neuromorphic system for edge information encoding: Emulating retinal center-surround antagonism by Li-ion-mediated highly interactive devices | |
| US10586591B2 (en) | High speed thin film two terminal resistive memory | |
| Kim et al. | Mimicking synaptic behaviors with cross-point structured TiOx/TiOy-based filamentary RRAM for neuromorphic applications | |
| Marukame et al. | Lithium-ion-based resistive devices of LiCoO 2/LiPON/Cu with ultrathin interlayers of titanium oxide for neuromorphic computing | |
| Wan et al. | Neuromorphic Devices for Brain-inspired Computing: Artificial Intelligence, Perception, and Robotics | |
| US10777267B2 (en) | High speed thin film two terminal resistive memory | |
| Lee et al. | Integrate-and-fire neuron with Li-based electrochemical random access memory using native linear current integration characteristics | |
| Gao et al. | Ultralow energy consumption and fast neuromorphic computing based on La0. 1Bi0. 9FeO3 ferroelectric tunnel junctions | |
| CN114843345B (en) | Neuron transistor and preparation method thereof | |
| CN117279398A (en) | Vertical electrolyte gated transistor, electronic device, preparation method and operating method | |
| He et al. | Two‐Terminal Neuromorphic Memristors | |
| KR102487733B1 (en) | Neuromophic circuits | |
| Das et al. | FETs for analog neural MACs | |
| JP2023043142A (en) | Variable resistance element, storage device and neural network apparatus | |
| KR20230058819A (en) | capacitor device for synapse, synapse and synaptic array based on capacitor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
Owner name: BEIHANG UNIVERSITY, CHINA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HUANG, ANPING;ZHANG, XINGJIANG;REEL/FRAME:043263/0619 Effective date: 20170723 |
|
| FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO SMALL (ORIGINAL EVENT CODE: SMAL); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
| STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
| FEPP | Fee payment procedure |
Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
| LAPS | Lapse for failure to pay maintenance fees |
Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
| STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
| FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20220925 |