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US20170354030A1 - High frequency signal transmission structure and method for same - Google Patents

High frequency signal transmission structure and method for same Download PDF

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Publication number
US20170354030A1
US20170354030A1 US15/275,481 US201615275481A US2017354030A1 US 20170354030 A1 US20170354030 A1 US 20170354030A1 US 201615275481 A US201615275481 A US 201615275481A US 2017354030 A1 US2017354030 A1 US 2017354030A1
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US
United States
Prior art keywords
silver
layer
conductive layer
insulating sheet
copper conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/275,481
Other languages
English (en)
Inventor
Ming-Jaan Ho
Hsiao-Ting Hsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hongqisheng Precision Electronics Qinhuangdao Co Ltd
Avary Holding Shenzhen Co Ltd
Original Assignee
Hongqisheng Precision Electronics Qinhuangdao Co Ltd
Avary Holding Shenzhen Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hongqisheng Precision Electronics Qinhuangdao Co Ltd, Avary Holding Shenzhen Co Ltd filed Critical Hongqisheng Precision Electronics Qinhuangdao Co Ltd
Assigned to FUKUI PRECISION COMPONENT (SHENZHEN) CO., LTD., HongQiSheng Precision Electronics (QinHuangDao) Co.,Ltd. reassignment FUKUI PRECISION COMPONENT (SHENZHEN) CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HO, MING-JAAN, HSU, HSIAO-TING
Assigned to AVARY HOLDING (SHENZHEN) CO., LIMITED. reassignment AVARY HOLDING (SHENZHEN) CO., LIMITED. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: FUKUI PRECISION COMPONENT (SHENZHEN) CO., LTD.
Assigned to AVARY HOLDING (SHENZHEN) CO., LIMITED. reassignment AVARY HOLDING (SHENZHEN) CO., LIMITED. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: FUKUI PRECISION COMPONENT (SHENZHEN) CO., LTD.
Publication of US20170354030A1 publication Critical patent/US20170354030A1/en
Priority to US16/577,062 priority Critical patent/US10874016B2/en
Abandoned legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/108Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0237High frequency adaptations
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/02Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/188Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by direct electroplating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0313Organic insulating material
    • H05K1/032Organic insulating material consisting of one material
    • H05K1/0326Organic insulating material consisting of one material containing O
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0388Other aspects of conductors
    • H05K2201/0391Using different types of conductors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/072Electroless plating, e.g. finish plating or initial plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0703Plating
    • H05K2203/0723Electroplating, e.g. finish plating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/244Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base

Definitions

  • the subject matter herein generally relates to a multifunction sensing devices.
  • Metal copper is generally used to manufacturing conductive wire layer. However, when the conductive wire layer is used to transmit a high frequency signal, a large loss is generated.
  • FIG. 1 is a flowchart of a method for manufacturing a high frequency signal transmission structure in accordance with a first embodiment.
  • FIG. 2 is a diagrammatic view of an insulating sheet of the structure of FIG. 1 in accordance with a first embodiment.
  • FIG. 3 is a diagrammatic view of a silver bottom layer formed on the insulating sheet of FIG. 2 .
  • FIG. 4 is a diagrammatic view of a dry film formed on the silver bottom layer of FIG. 3 .
  • FIG. 5 is a diagrammatic view of the dry film being exposed to a lithographic method of FIG. 4 .
  • FIG. 6 is a diagrammatic view of the dry film being developed through a lithographic method of FIG. 5 .
  • FIG. 7 is a diagrammatic view of forming of a copper conductive layer on the silver bottom layer of FIG. 6 .
  • FIG. 8 is a diagrammatic view showing removal of the dry film of FIG. 6 .
  • FIG. 9 is a diagrammatic view showing the silver bottom layer is etched to form a silver conductive layer on the insulating sheet.
  • FIG. 10 is a diagrammatic view of a silver covering layer being formed on the copper conductive layer of FIG. 8 to obtain a high frequency signal transmission structure.
  • substantially is defined to be essentially conforming to the particular dimension, shape, or other feature that the term modifies, such that the component need not be exact.
  • substantially cylindrical means that the object resembles a cylinder, but can have one or more deviations from a true cylinder.
  • comprising when utilized, means “including, but not necessarily limited to”; it specifically indicates open-ended inclusion or membership in the so-described combination, group, series, and the like.
  • the references “a plurality of” and “a number of” mean “at least two.”
  • FIG. 10 illustrates a high frequency signal transmission structure 100 according to a first embodiment.
  • the high frequency signal transmission structure 100 includes an insulating sheet 10 and a conductive wiring layer 40 formed on the insulating sheet 10 .
  • a material of the insulation layer 10 is selected from the group consisting of polynaphthalene dicarboxylic acid glycol ester (PEN), polyimide (PI), and polyterephthalate (PET).
  • the conductive wiring layer 40 includes a silver conductive layer 22 formed on the insulating sheet 10 , a copper conductive layer 20 formed on the silver conductive layer 22 , and a silver covering layer 30 covering a top surface and side surfaces of the copper conductive layer 20 .
  • the copper conductive layer 20 is sandwiched between the silver conductive layer 22 and the silver covering layer 30 .
  • a thickness of the silver conductive layer 22 is about 0.1 ⁇ 2 nanometers.
  • a thickness of the silver conductive layer 22 is same with a thickness of the silver covering layer 30 .
  • FIG. 1 illustrates a flowchart in accordance with a second embodiment.
  • the example method 200 for manufacturing the high frequency signal transmission structure 100 (shown in FIG. 10 ) is provided by way of an example, as there are a variety of ways to carry out the method. Additionally, the illustrated order of blocks is by example only and the order of the blocks can change.
  • the method 200 can begin at block 201 .
  • an insulating sheet 10 is provided and is pre-treated using a plasma method to strength a silver bottom layer 12 combine with the insulating sheet 10 .
  • the insulating sheet 10 is made from polyester polymer, thus the insulating sheet 10 comprised of ester group (—COOR).
  • the pre-treatment method includes steps of first hydrolyzing ester group (—COOR) comprised in the polyester polymer into carboxyl (—COOH), the carboxyl (—COOH) then being changed into ester (—COO ⁇ ) in a slightly alkaline environment.
  • a silver bottom layer 12 is formed on the insulating sheet 10 using a method of vacuum evaporation. Specifically, under a vacuum condition, the insulating sheet 10 is used as a substrate, a metallic silver piece is arranged toward the insulating sheet 10 as a target source. The target source is heated to under a high temperature, the metallic silver piece evaporates to silver ions, and the metal silver ions are gradually deposited on the insulating substrate 10 . Silver ions and ester group (—COO ⁇ ) on a surface of the insulating sheet 10 form ionic bonds (—COO—Ag), and such ionic bonds can reach about 150-400 kJ/mole. The silver ions can thus adhere to the insulating sheet 10 , and the silver bottom layer 12 is thus formed.
  • the heating method can include resistance heating, electron beam heating, laser beam heating, or plasma spray column heating.
  • a copper conductive layer 20 is formed on the silver bottom layer 12 .
  • One portion of the silver bottom layer 12 is covered by the copper conductive layer 20 , and the other portion is exposed by the copper conductive layer 20 .
  • the copper conductive layer 20 is formed using electroplating method, rather than by a traditional wet etching process. Using an electroplating method to form the copper conductive layer 12 reduces use of copper liquids, and is more environmentally friendly.
  • a method for forming the copper conductive layer 20 on the silver bottom layer 12 comprises:
  • a dry film 14 is formed on the silver bottom layer 22 .
  • the dry film 14 is exposed through a lithographic method to a pattern defined on the copper conductive layer 20 . After the step of exposure and development, the dry film 14 then protects the silver bottom layer 12 , and the portion of the silver bottom layer 12 exposed by the dry film 14 can be electroplated with a layer of copper (see next step).
  • a copper layer is electroplated onto the silver bottom layer 12 , and the layer of copper becomes the copper conductive layer 20 , and one portion of the silver bottom layer 12 is covered by the copper conductive layer 20 .
  • the dry film 14 is removed, and the copper conductive layer 20 is in finished form on the silver bottom layer 12 .
  • a fast vertical etching method is used to remove the silver bottom layer 12 exposed by the copper conductive layer 20 . Only the silver bottom layer 12 sandwiched between the insulating sheet 10 and the copper conductive layer 20 is retained. The silver bottom layer 12 sandwiched between the insulating sheet 10 and the copper conductive layer 20 constitute the silver conductive layer 22 .
  • the silver bottom layer 12 is etched using an alkaline solution. Using an alkaline solution to fast-etch the silver bottom layer 12 means that etching only takes place along a direction perpendicular to a surface of the insulating sheet 10 . Any etching which is done to a side of the copper conductive layer 20 can be ignored, so the reliability of the copper conductive layer 20 is high, and cracks or breaks in the copper conductive layer 20 are reduced.
  • a silver covering layer 30 is formed on a top surface and side surfaces of the copper conductive layer 20 . That is to say, the copper conductive layer 20 is sandwiched between the silver covering layer 30 and the silver conductive layer 22 . The silver conductive layer 22 , the copper conductive layer 20 and the silver covering layer 30 together form the conductive wiring layer 40 .
  • the silver covering layer 30 is formed using a sterling silver method. That is to say, in a silver solution, silver ion in the silver solution is replaced with copper comprised in the copper conductive layer 20 , namely 2Ag + +Cu ⁇ 2Ag+Cu 2+ . A silver covering layer 30 is gradually formed on the copper conductive layer 20 , in this way, a thickness of the conductive wiring layer 40 can be better controlled. A high frequency signal transmission structure 100 is thereby obtained.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Laminated Bodies (AREA)
US15/275,481 2016-06-07 2016-09-26 High frequency signal transmission structure and method for same Abandoned US20170354030A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US16/577,062 US10874016B2 (en) 2016-06-07 2019-09-20 Method of manufacturing physical structure for high frequency signal transmission

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201610397198.0A CN107484330A (zh) 2016-06-07 2016-06-07 高频铜银混合导电线路结构及其制作方法
CN201610397198.0 2016-06-07

Related Child Applications (1)

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US16/577,062 Division US10874016B2 (en) 2016-06-07 2019-09-20 Method of manufacturing physical structure for high frequency signal transmission

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US16/577,062 Active US10874016B2 (en) 2016-06-07 2019-09-20 Method of manufacturing physical structure for high frequency signal transmission

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CN (1) CN107484330A (zh)
TW (1) TWI640235B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3842573A1 (en) * 2019-12-26 2021-06-30 Toyota Jidosha Kabushiki Kaisha Method for manufacturing wiring board, and wiring board
US12446163B2 (en) * 2021-12-16 2025-10-14 Samsung Electro-Mechanics Co., Ltd. Printed circuit board and method for manufacturing the same

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CN111182737B (zh) * 2018-11-13 2021-08-03 上海和辉光电股份有限公司 柔性线路板及其制造方法
CN112020229A (zh) * 2019-05-28 2020-12-01 庆鼎精密电子(淮安)有限公司 电路板的制作方法
CN110831343B (zh) * 2019-11-04 2020-10-02 上海申和热磁电子有限公司 一种dbc基板选择性化学沉银的表面处理方法
JP2022039765A (ja) * 2020-08-28 2022-03-10 キオクシア株式会社 プリント配線板、メモリシステム、およびプリント配線板の製造方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3842573A1 (en) * 2019-12-26 2021-06-30 Toyota Jidosha Kabushiki Kaisha Method for manufacturing wiring board, and wiring board
JP2021102806A (ja) * 2019-12-26 2021-07-15 トヨタ自動車株式会社 配線基板の製造方法および配線基板
US11665829B2 (en) 2019-12-26 2023-05-30 Toyota Jidosha Kabushiki Kaisha Method for manufacturing wiring board
JP7310599B2 (ja) 2019-12-26 2023-07-19 トヨタ自動車株式会社 配線基板の製造方法および配線基板
US12446163B2 (en) * 2021-12-16 2025-10-14 Samsung Electro-Mechanics Co., Ltd. Printed circuit board and method for manufacturing the same

Also Published As

Publication number Publication date
TWI640235B (zh) 2018-11-01
US10874016B2 (en) 2020-12-22
US20200015352A1 (en) 2020-01-09
CN107484330A (zh) 2017-12-15
TW201803425A (zh) 2018-01-16

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AS Assignment

Owner name: FUKUI PRECISION COMPONENT (SHENZHEN) CO., LTD., CH

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HO, MING-JAAN;HSU, HSIAO-TING;SIGNING DATES FROM 20160831 TO 20160901;REEL/FRAME:039850/0478

Owner name: HONGQISHENG PRECISION ELECTRONICS (QINHUANGDAO) CO

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:HO, MING-JAAN;HSU, HSIAO-TING;SIGNING DATES FROM 20160831 TO 20160901;REEL/FRAME:039850/0478

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