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US20160313268A1 - Urea concentration identification device and urea concentration identification method - Google Patents

Urea concentration identification device and urea concentration identification method Download PDF

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Publication number
US20160313268A1
US20160313268A1 US14/854,008 US201514854008A US2016313268A1 US 20160313268 A1 US20160313268 A1 US 20160313268A1 US 201514854008 A US201514854008 A US 201514854008A US 2016313268 A1 US2016313268 A1 US 2016313268A1
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US
United States
Prior art keywords
urea
identification device
concentration identification
urea concentration
identified
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/854,008
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English (en)
Inventor
Tzu-Yu Liu
Kuo-Chuang Chiu
Hung Tien
Shiou-Lan Hu
Yeh-Chyang Huang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etian Technology Ltd
Industrial Technology Research Institute ITRI
Original Assignee
Etian Technology Ltd
Industrial Technology Research Institute ITRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etian Technology Ltd, Industrial Technology Research Institute ITRI filed Critical Etian Technology Ltd
Assigned to ETIAN TECHNOLOGY LTD., INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE reassignment ETIAN TECHNOLOGY LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHIU, KUO-CHUANG, HU, SHIOU-LAN, HUANG, YEH-CHYANG, LIU, TZU-YU, TIEN, HUNG
Publication of US20160313268A1 publication Critical patent/US20160313268A1/en
Priority to US15/835,467 priority Critical patent/US10274443B2/en
Abandoned legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/026—Dielectric impedance spectroscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/06—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a liquid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/18—Water
    • G01N33/1886—Water using probes, e.g. submersible probes, buoys

Definitions

  • the technical field relates to a urea concentration identification device and a urea concentration identification method.
  • liquid concentration identification devices are needed in various fields, such as etchant formulation in a wafer manufacturing process or vehicle emission in an environment protection field.
  • an SCR system includes a vehicle urea and an SCR device.
  • the vehicle urea is injected into combusted exhaust gases from a urea tank and decomposes into ammonia (NH 3 ), such that a chemical reduction occurs to NO x by NH 3 in the SCR device to transform the NO x into nitrogen and water which cause no influence to the natural environment.
  • a reactant i.e., the vehicle urea
  • a vehicle urea solution is a solution of approximately 32.5% urea in water, where the concentration of the urea solution is strictly restricted, otherwise the NO x emission of a vehicle will exceed the standard and the SCR system of the vehicle may also be damaged.
  • the disclosure introduces a urea concentration identification device and a method applied for identifying a concentration of urea.
  • a sine-wave AC signal is applied to a urea concentration identification device. Since urea solutions of different concentrations have different electrical interactions with electrodes of the urea concentration identification device, if an identical sine-wave AC signal is provided to the urea concentration identification devices placed in urea solutions of different concentrations, different impedance values are output by the urea concentration identification device, and differences between the output impedance values are used as a reference for identifying the concentrations of the urea solutions.
  • the urea concentration identification device has a three-dimensional structure including a substrate, two electrodes and a dielectric layer that are stacked in the thickness direction, wherein a capacitor structure is formed on the substrate.
  • the capacitor structure includes a circular lower electrode, a dielectric layer and a patterned upper electrode, wherein the patterned upper electrode provides an accommodating space for containing a solution, so as to increase the possibility as well as strength of electrical interaction between the urea solution and the electrode, for obtaining a spectrum of impedance characteristics.
  • FIG. 1 is a schematic view of a urea concentration identification device according to a first embodiment.
  • FIG. 2 is a cross-sectional view of the urea concentration identification device in FIG. 1 along section line A-A.
  • FIG. 3 is a schematic view of another pattern of a patterned upper electrode of the urea concentration identification device in FIG. 2 .
  • FIG. 4 is a schematic view of still another pattern of the patterned upper electrode of the urea concentration identification device in FIG. 2 .
  • FIG. 5 is a flowchart illustrating steps of a method for performing urea concentration identification using the urea concentration identification device.
  • FIG. 6 is a schematic view illustrating that a portion of a urea solution flows into the accommodating space of the patterned upper electrode of the urea concentration identification device so as to be identified.
  • FIG. 7 is a schematic view of an RC parallel equivalent circuit generated during identification by the urea concentration identification device.
  • FIG. 8 illustrates the electric characteristics measured by the urea concentration identification device in urea solutions of different concentrations, wherein the horizontal axis indicates resistance and the vertical axis indicates reactance.
  • FIG. 9 is a schematic view of a urea concentration identification device according to a second embodiment.
  • FIG. 10 is a schematic view of an RC series equivalent circuit generated during identification by the urea concentration identification device.
  • FIG. 11 illustrates a result of application of the urea concentration identification device according to the second embodiment to identification of different fluids.
  • Coupled/coupled used in this specification (including claims) may refer to any direct or indirect connection means.
  • a first device is coupled to a second device should be interpreted as “the first device is directly connected to the second device” or “the first device is indirectly connected to the second device through other devices or connection means.”
  • elements/components/steps with the same reference numerals represent the same or similar parts. Elements/components/steps with the same reference numerals or names in different embodiments may be cross-referenced.
  • Terminologies used in the disclosure such as “first” and “second” used to describe each element, component, location, layer or section etc. should not be construed as limiting these elements, components, locations, layers or sections. These terminologies are merely used to differentiate between one element, component, location, layer or section, and another element, component, location, layer or section. Therefore, without departing from the teachings of the embodiments, the first element, component, location, layer or section referred in the disclosure below may also be referred as the second element, component, location, layer or section.
  • spatially relative terms such as “beneath”, “below”, “lower”, “under”, “above,” “upper,” “over” and the like, may be used herein for ease of description to describe one element or structural feature's relationship to another element(s) or structural feature(s) as illustrated in the drawings. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the drawings. For example, if the device in the drawings is turned over, elements described as “below” or “beneath” or “under” other elements or structural features would then be oriented “above” or “over” the other elements or structural features. Thus, the exemplary terms “below” and “under” can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
  • Example embodiments are described herein with reference to cross-sectional illustrations that are schematic illustrations of idealized embodiments (and intermediate structures) of example embodiments. As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, example embodiments should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. Therefore, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of example embodiments.
  • the disclosure introduces a urea concentration identification device and a method for performing urea concentration identification using the urea concentration identification device. Two embodiments will be illustrated as follows.
  • FIG. 1 is a schematic view of a urea concentration identification device according to a first embodiment.
  • FIG. 2 is a cross-sectional view of the urea concentration identification device in FIG. 1 along section line A-A.
  • a urea concentration identification device 100 of the present embodiment is adapted to be placed in a urea solution for identifying a concentration of urea in the urea solution.
  • This urea solution is a vehicle urea solution for use in an SCR system.
  • the urea concentration identification device 100 includes a substrate 110 ; a lower electrode 120 , disposed on the substrate 110 and having a substantially circular shape in a planar direction; a patterned upper electrode 140 , disposed above the lower electrode 120 ; and a dielectric layer 130 , disposed between the lower electrode 120 and the patterned upper electrode 140 .
  • the patterned upper electrode 140 includes a plurality of accommodating spaces 142 , and a portion of the urea solution is contained in the accommodating spaces 142 .
  • the urea concentration identification device 100 has a three-dimensional capacitor C structure in a thickness direction, and a resistance R is generated in the planar direction.
  • the substrate 110 is a substrate made of, e.g., but not limited to, ceramics.
  • the substrate 110 may be made of any material having insulation properties, sufficient strength and urea corrosion resistance.
  • a pattern of the patterned upper electrode 140 may be a meander line pattern (as shown in FIG. 1 ), a grid pattern (as shown in FIG. 3 ), a spiral pattern (as shown in FIG. 4 ) or any other pattern. Persons skilled in the art may select a pattern according to actual needs.
  • the patterned upper electrode 140 has a linewidth in a range of, but not limited to, 50 ⁇ m to 500 ⁇ m.
  • an identification resolution of the urea concentration identification device 100 may be adjusted by changing a linewidth D, line distance, thickness and area (not denoted) of the patterned upper electrode 140 . Therefore, the linewidth, line distance, thickness and area of the patterned upper electrode 140 may be changed according to needs.
  • FIG. 5 is a flowchart illustrating steps of a method for performing urea concentration identification using the urea concentration identification device.
  • a database is established, wherein steps of establishing the database are as follows.
  • steps of establishing the database are as follows.
  • a plurality of the urea concentration identification devices 100 are placed in a plurality of urea solutions, or the urea concentration identification device 100 is sequentially placed in a plurality of urea solutions for performing identification, wherein each urea concentration identification device 100 is electrically connected to an analysis unit (not illustrated) (e.g., a computer), so that a result identified by the urea concentration identification device 100 is transmitted to the analysis unit for analysis and storage of data.
  • an analysis unit not illustrated
  • each of the urea solutions to be identified has a different concentration.
  • a portion of the urea solutions flows into the accommodating spaces 142 of the patterned upper electrode 140 (as shown in FIG. 6 ). Then, a sine-wave AC signal is provided to the urea concentration identification device 100 .
  • the urea concentration identification device 100 is not placed in the vehicle urea solution in the SCR system, but in the urea solutions of predetermined concentrations that are deliberately formulated.
  • step S 114 frequency scanning is performed with respect to the urea solutions so as to obtain electric characteristics of the urea solutions.
  • a sine-wave AC signal having a frequency ranging from 10 0 to 10 6 Hz is sequentially provided to the urea concentration identification device 100 in the urea solutions. Due to electrical interaction between the urea solutions flowing into the accommodating spaces 142 and the patterned upper electrode 140 , an RC parallel equivalent circuit as shown in FIG. 7 is generated. Under different frequencies, the urea concentration identification device 100 obtains, and outputs through the lower electrode 120 , different results of electric characteristics.
  • the results of electric characteristics include, e.g., impedance, wherein the impedance includes information of a resistance R (denoted in FIG.
  • Step S 114 is repeated so that frequency scanning is performed with respect to the urea solutions of different concentrations.
  • different results of electric characteristics are output by the urea concentration identification device 100 , and the obtained results are built in the database.
  • a DC signal is further provided to the urea concentration identification device 100 so as to suppress noise.
  • FIG. 8 illustrates the electric characteristics measured by the urea concentration identification device in urea solutions of different concentrations, wherein the horizontal axis indicates resistance and the vertical axis indicates reactance.
  • FIG. 8 a relationship between reactance and resistance when the urea solutions have different concentrations (such as 0%, 20% and 40%) is illustrated. From FIG. 8 , it is known that, due to the different concentrations of the urea solutions, the interaction between the urea solutions and the electrode has different strengths, and thus distributions of the electric characteristics of the urea solutions of different concentrations are distinguishable from each other.
  • the database has been established. Accordingly, when the urea concentration identification device 100 is applied in the SCR system, a result of electric characteristics corresponding to the concentration of the identified vehicle urea solution may be retrieved from the database.
  • the urea concentration identification device 100 is placed in the vehicle urea solution.
  • step S 120 an impedance of the vehicle urea solution identified by the urea concentration identification device 100 is analyzed, and a concentration of the identified urea solutions corresponding to the impedance is found in the database.
  • the step of finding the concentration of the identified urea solutions corresponding to the impedance in the database includes step S 122 .
  • a linear relationship between electric signal and concentration of the urea solutions of different concentrations is defined with reference to an impedance spectrum as shown in FIG.
  • the linear relationship between electric signal and concentration is defined by selecting points that are more distinguishable (i.e., frequencies with respect to the reactance distribution of the urea solutions with different concentrations do not overlap with each other, or frequencies at which electric signals are distributed farther from each other).
  • points that are more distinguishable i.e., frequencies with respect to the reactance distribution of the urea solutions with different concentrations do not overlap with each other, or frequencies at which electric signals are distributed farther from each other.
  • step S 124 similarly to step S 112 , a sine-wave AC signal is applied to the urea concentration identification device 100 . Due to electrical interaction between the urea solution flowing into the accommodating spaces 142 and the patterned upper electrode 140 , a result of the electric characteristics of the urea solution is obtained by the urea concentration identification device 100 .
  • step S 126 according to the electric characteristics of the urea solution identified by the urea concentration identification device 100 placed in the vehicle urea solution, after calculation and analysis, the concentration of the identified urea solution is found from the data built in the database or through the linear relationship between electric signal and concentration.
  • the urea concentration identification device 100 of the present embodiment is fabricated to have a stacked structure in the thickness direction, which is different from some conventional urea concentration identification devices having an identification structure formed in the planar direction. Due to this structural difference, a contact area between the urea solution and the electrode is increased by the accommodating space 142 of the patterned upper electrode 140 for containing the urea solution, so that quality of identification is improved. In addition, through the establishment of the database and the definition of the linear relationship between electric signal and concentration, the concentration of the identified vehicle urea solution is easily retrieved from the identified result.
  • FIG. 9 is a schematic view of a urea concentration identification device 100 A according to a second embodiment.
  • the present embodiment is roughly the same as the first embodiment.
  • a difference lies in that the urea concentration identification device 100 A according to the present embodiment further includes a porous layer 150 disposed above the patterned upper electrode 140 , and the urea solution to be identified is adapted to enter the accommodating spaces 142 through the porous layer 150 .
  • a method of identifying the urea solution using the urea concentration identification device 100 A according to the present embodiment is roughly the same as the identification method described in the first embodiment and is thus omitted.
  • a microcavity is formed by the porous layer 150 and the patterned upper electrode 140 .
  • the urea solution is absorbed into the microcavity through the porous layer 150 to contact the electrode, so as to change a dielectric environment around the electrode, leading to a change in the impedance.
  • Such structure generates, e.g., an RC series equivalent circuit (as shown in FIG. 10 ), and a signal difference between different urea concentrations is mainly attributed to capacitance.
  • the urea concentration identification devices 100 and 100 A according to the first and the second embodiments may be applied to, not only urea solution, but also different fluids, as shown in FIG. 11 .
  • FIG. 11 illustrates a result of application of the urea concentration identification device 100 A according to the second embodiment to identification of different fluids.
  • the identified different fluids shown in FIG. 11 include, e.g., air, 40% urea, and water. Since each substance has its own electric characteristics, the different fluids have different electrical interactions with a device electrode, and thus different impedances are output.
  • the concentration identification device of the disclosure may be used to identify not only concentration of urea but also concentration of other fluids (gases or liquids).
  • the structure of the urea concentration identification device disclosed in the above embodiments is for use in a relatively simple identification environment (such as an environment where an object to be identified is a urea aqueous solution, air or fuel oil).
  • a relatively simple identification environment such as an environment where an object to be identified is a urea aqueous solution, air or fuel oil.
  • the structure of the concentration identification device may be modified according to needs, e.g., by a surface treatment of the electrode.
  • the urea concentration identification device and the urea identification method using the same according to the disclosure at least have the following advantages.
  • a urea concentration identification device different from some conventional structures wherein the urea concentration identification device has a three-dimensional capacitor structure including a substrate, an electrode and a dielectric layer stacked in the thickness direction, and thus a signal response rate is improved.
  • the accommodating space in the patterned upper electrode accommodates a portion of a solution to be identified, so that chances of electrical interaction between the solution to be identified and the electrode and strength of the electrical interaction are increased.
  • a porous layer is further disposed above the patterned upper electrode so as to form a microcavity to avoid external interference, so that identification accuracy is improved.

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US14/854,008 2015-04-27 2015-09-14 Urea concentration identification device and urea concentration identification method Abandoned US20160313268A1 (en)

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WO2016022998A2 (en) 2014-08-08 2016-02-11 Quantum-Si Incorporated Integrated device for temporal binning of received photons
US20180143128A1 (en) * 2016-11-18 2018-05-24 Industrial Technology Research Institute Residual toxicant detection device
CA3108295A1 (en) 2018-06-22 2019-12-26 Quantum-Si Incorporated Integrated photodetector with charge storage bin of varied detection time
CN110374724A (zh) * 2019-07-26 2019-10-25 珠海格力智能装备有限公司 尿素机系统、尿素溶液浓度的检测方法及装置

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US20140134607A1 (en) * 2011-07-29 2014-05-15 The Trustees Of Columbia University In The City Of New York Mems affinity sensor for continuous monitoring of analytes

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US20010051109A1 (en) * 1998-09-18 2001-12-13 Carter R. Anderson Enzymatic analysis system
US20090266719A1 (en) * 2004-11-08 2009-10-29 Shen-Kan Hsiung Potentiometric Urea Sensor Based on Ion-Selective Electrode
US20140134607A1 (en) * 2011-07-29 2014-05-15 The Trustees Of Columbia University In The City Of New York Mems affinity sensor for continuous monitoring of analytes

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US20180100820A1 (en) 2018-04-12
US10274443B2 (en) 2019-04-30
TWI569008B (zh) 2017-02-01
CN106198638A (zh) 2016-12-07

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