US20160268204A1

US20160268204A1 - Semiconductor device with transistor local interconnects

Info

Publication number: US20160268204A1
Application number: US15/164,114
Authority: US
Inventors: Mahbub Rashed; Irene Y. Lin; Steven Soss; Jeff Kim; Chinh Nguyen; Marc Tarabbia; Scott Johnson; Subramani Kengeri; Suresh Venkatesan
Original assignee: GlobalFoundries Inc
Current assignee: GlobalFoundries Inc
Priority date: 2011-12-13
Filing date: 2016-05-25
Publication date: 2016-09-15
Also published as: TWI574411B; US20220367360A1; US20130146986A1; SG191459A1; US20190326219A1; KR20130067214A; DE102012219375B4; CN103165570A; CN103165570B; KR101609330B1; US10833018B2; DE202012013694U1; DE102012219375A1; TW201324777A; US20210013150A1; SG10201504427WA; US11444031B2; US20250038111A1; US12148702B2; US9355910B2

Abstract

A semiconductor device is provided for implementing at least one logic element. The semiconductor device includes a semiconductor substrate with a first transistor and a second transistor formed on the semiconductor substrate. Each of the transistors comprises a source, a drain, and a gate. A trench silicide layer electrically connects one of the source or the drain of the first transistor to one of the source or the drain of the second transistor.

Description

FIELD OF THE INVENTION

The present invention generally relates to semiconductor devices, and more particularly relates to local interconnects between transistors in semiconductor devices.

BACKGROUND OF THE INVENTION

As the size of semiconductor devices continues to decrease, the ability to create standard cell library logic devices, such as scan-D flip-flops and multiplexers, becomes more difficult. This is particularly the case at the 20 nm node, where lithographic limitation results in a lack of scaling of standard cell library devices. Cross-coupling of transistors is critical to the scaling of key stand cell library devices. Without cross-coupling, logic scaling will take up more area of the semiconductor device. Furthermore, traditional cross-coupling utilizing a standard metal layer will also occupy large amounts of area. Either of these conditions is obviously undesirable, leading to a larger semiconductor device or less functionality in the semiconductor device.
Accordingly, it is desirable to provide cross-coupling of transistors without reliance on a standard metal layer to produce standard cell library devices while conserving semiconductor device area. Furthermore, other desirable features and characteristics of the present invention will become apparent from the subsequent detailed description of the invention and the appended claims, taken in conjunction with the accompanying drawings and this background of the invention.

BRIEF SUMMARY OF THE INVENTION

A semiconductor device is provided for implementing at least one logic element. In one aspect of the invention, the semiconductor device includes a semiconductor substrate with a first transistor and a second transistor formed on the semiconductor substrate. Each of the transistors comprises a source, a drain, and a gate. A trench silicide layer electrically connects one of the source or the drain of the first transistor to one of the source or the drain of the second transistor.
In another aspect of the invention, the semiconductor device includes a semiconductor substrate with a first transistor and a second transistor disposed on the substrate. Each of the transistors comprises a source, a drain, and a gate. A first CB layer is electrically connected to the gate of the first transistor A second CB layer is electrically connected to the gate of the second transistor. A CA layer extends longitudinally between a first end and a second end. The first CB layer is electrically connected adjacent the first end of the CA layer. The second CB layer is electrically connected adjacent the second end of the CA layer.
In yet another aspect of the invention, a semiconductor device includes a semiconductor substrate with a first transistor and a second transistor disposed on the substrate. Each of the transistors comprises a gate, wherein the gates extend longitudinally and generally parallel to one another. A CB layer electrically connects the gates of the first and second transistors and forms a zig-zag shape.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will hereinafter be described in conjunction with the following drawing FIG.s, wherein like numerals denote like elements, and

FIG. 1 is a cross-sectional side view of a portion of a semiconductor device;

FIG. 2 is a top view of one embodiment of the semiconductor device showing gates of transistors, various local interconnect layers, and trench silicide layers;

FIG. 3 is a top view of another embodiment of the semiconductor device showing a metal layer disposed above the gates of the transistors and the various local interconnect layers;

FIG. 4 is a top view of a portion of a first embodiment of the semiconductor device;

FIG. 5 is a top view of a portion of a second embodiment of the semiconductor device;

FIG. 6 is a top view of a portion of a fourth embodiment of the semiconductor device;

FIG. 7 is a cross-sectional side view the fourth embodiment of the semiconductor according to the line 7-7 shown in shown in FIG. 6;

FIG. 8 is a top view of a portion of a fifth embodiment of the semiconductor device;

FIG. 9 is a top view of a portion of a sixth embodiment of the semiconductor device; and

FIG. 10 is a side view of a portion of a seventh embodiment of the semiconductor device according to the line 10-10 shown in FIG. 2.

DETAILED DESCRIPTION

The following detailed description of the invention is merely exemplary in nature and is not intended to limit the invention or the application and uses of the invention. Furthermore, there is no intention to be bound by any theory presented in the preceding background of the invention or the following detailed description of the invention.
Referring to the figures, wherein like numerals indicate like parts throughout the several views, a semiconductor device 20 is shown and described herein. The semiconductor device 20 may be part of an integrated circuit (not separately numbered) as is well recognized by those skilled in the art.
Referring to FIG. 1, the semiconductor device 20 includes a semiconductor substrate 22. The semiconductor device 20 includes a plurality of transistors 24. Specifically, in the illustrated embodiments, the transistors 24 are field-effect transistors (FETs) and more specifically, metal-oxide-semiconductor field-effect transistors (MOSFETs). Each of the transistors 24 includes a source 26, a drain 28, and a gate 30.
The sources 26 and drains 28 are formed in and/or on the substrate 22 using techniques that are well known to those skilled in the art. In the illustrated embodiments, the sources 26 and drains 28 are formed as raised sources 26 and drains 28, i.e., at least a portion of the sources 26 and drains 28 are formed above the substrate 22. In the configuration shown in FIG. 1, the raised source 26 and drain 28 each extend about 15 nm above the substrate 22. However, other dimensions may be alternatively realized. The raised sources 26 and drains 28 may be formed using embedded silicon germanium (eSiGe) techniques as is appreciated by those skilled in the art. Of course, other techniques to may be implemented to form the raised sources 26 and drains 28. Furthermore, in other embodiments (not shown), the sources 26 and drains 28 may not be raised above the substrate 22.
The gates 30 are typically formed above the substrate 22 using techniques well known to those skilled in the art. In the illustrated embodiments, the gates 30 are formed primarily of polycrystalline silicon, commonly referred to as polysilicon or simply PolySi, disposed above the substrate 22. However, the gates 30 may also be formed from other materials, e.g., a high-κ metal. In the configuration shown in FIG. 1, the gate 30 extends about 35 nm above the substrate 22. However, other dimensions for the gates 30 may be alternatively realized.
As can be seen with reference to FIG. 2, the gates 30 are formed as linear strips 31 generally parallel to one another. Gaps 32 may be formed in the strips 31 such that more than one transistor 30 may be disposed longitudinally along each strip 31. Such gaps 32 may be formed using cut mask techniques as readily appreciated by those skilled in the art.
Referring to FIGS. 1 and 3, the semiconductor device 20 includes at least one metal layer 33 disposed above the sources 26, drains 28, and gates 30 of the transistors 24 as is appreciated by those skilled in the art. The metal layers 33 facilitate electrical communication between the various logic elements of the device 20 and other logic elements of the device 20 as well as other systems apart from the device 20. The metal layers 33 are routinely labeled and referred to as M1, M2, etc., as is also appreciated by those skilled in the art. In the configuration shown in FIG. 1, one metal layer 33 is disposed about 165 nm above the substrate 22. However, other distances and dimensions for the metal layer 33 may be alternatively realized.
The semiconductor device 20 further includes at least one local interconnect layer 34, 36 to selectively connect the sources 26, drains 28, and gates 30 of the transistors 24 to other sources 26, drains 28, and gates 30 of other transistors 24. The at least one local interconnect layer 34, 36 may also be selectively connected to the at least one metal layer 33. The at least one local interconnect layer 34, 36 is disposed between the at least one metal layer 33 and the substrate 22. Said another way, the metal layer 33 is disposed above the at least one local interconnect layer 34, 36 with respect to the substrate 22. The at least one local interconnect layer 34 of the illustrated embodiments is formed primarily of tungsten. In other embodiments, the at least one local interconnect layer 34, 36 is formed primarily of copper. However, the local interconnect layers 34, 36 may be formed of or include other elements or compounds.
Various embodiments of the semiconductor device 20 showing different shapes, arrangements, and electrical connections of the at least one local interconnect layer 34, 36 are shown in the various figures and described below. A first local interconnect layer 34 is referred to herein as a CA layer 34 and a second local interconnect layer 36 is referred to herein as a CB layer 36. Of course, multiple CA layers 34 and multiple CB layers 36 may be implemented in the semiconductor device 20 and other local interconnect layers (not shown) may also be implemented. Typically, the CA layer(s) 34 electrically connect to sources 26 or drains 28 while the CB layer(s) 36 electrically connect to gates 30. However, such typical configuration should certainly not be viewed as limiting. In fact, in some of the embodiments described below, CA layer(s) 34 and/or CB layer(s) 36 may not be connected to sources 26, drains 28, or gates 30.
The use of the CA and CB layers 34, 36 in the illustrated embodiments may be utilized to produce a variety of standard cells, such as, for example, scan-D flip-flops. In the prior art, a metal layer is typically utilized in to provide the connection for scan-D flip-flops. By utilizing the CA and CB layers 34, 36, which are disposed closer to the substrate than the typical metal layer, the resulting scan-D flip-flops have a reduced area when compared to prior art devices.
The semiconductor device 20 may further include one or more trench silicide layers 37. The trench silicide layer 37 may be utilized to electrically connect the source 26 and/or drain 28 of the transistor 24 to one of the CA or CB layers 34, 36, and typically the CA layer, as shown in FIG. 1. As such, the trench silicide layer 37 is sandwiched between one of the CA or CB layers 34, 36 and the at least one of the source 26 or the drain 28 of the transistor 24. The trench silicide layer 37 is formed by cutting a trench (not separately numbered) in a dielectric (not shown) to the depth of the substrate 22 and filling the trench with a salicide material. For example, the salicide material may be a metal, such as nickel, cobalt, or tungsten.
The trench silicide layer 37 of the configuration shown in FIG. 1 has a height of about 50 nm. The CA layer 34 of FIG. 1 is supported by the trench silicide layer 34 and has a height of about 40 nm. The CB layer 36 of FIG. 1 has a height of about 70 nm. The CA layer 34 and CB layer 36 of FIG. 1 are generally level with one another with respect to the substrate 22. Furthermore, as can be seen in FIG. 1, the CA and CB layers 34, 36 of the illustrated embodiments do not extend more than 105 nm above the substrate 22. Of course, the heights and dimensions of the trench silicide layer 37, the CA layer 34, and the CB layer 36 may be different in alterative embodiments depending on any number of factors.
The semiconductor device 20 may include a plurality of vias 38 to selectively provide electrical connections between the CA or CB layers 34, 36 and the at least one metal layer 33. As such, one of the vias 38 may be disposed between the at least one metal layer 33, and one of the CA or CB layers 34, 36. The vias 38 are formed primarily of a metal, such as copper. However, other metals or electrically conductive materials may also be suitable. The vias 38 of the configuration shown in FIG. 1 have a height of about 60 nm.
In a first embodiment, as shown in FIG. 4, the semiconductor device 20 includes at least a first transistor 24 a and a second transistor 24 b. The semiconductor device 20 includes a CA layer 34 and a CB layer 36. The CA layer 34 is electrically connected to at least one of the source 26 a or the drain 28 a of the first transistor 24 a. A CB layer 36 is electrically connected to at least one of the gates 30 of the transistors 24 a, 24 b. Depending on the particular application, the CB layer 36 may be electrically connected to both of the gates 30 of the transistors 24 a, 24 b. The first and CB layers 34, 36 are also electrically connected to one another.
In the first embodiment, the CA layer 34 extends between a first end 40 and a second end 42. The CB layer 36 is disposed generally at a center 44 of the CA layer 34 between the ends 40, 42. More specifically, an end 46 of the CB layer 36 is disposed generally at the center 44 of the CA layer 34. As such, when viewed from above, the first and CB layers 34, 36 form a long ‘T’ shape.
A second embodiment of the semiconductor device 20, is substantially similar to the first embodiment, but further includes a trench silicide layer 37 disposed between the CA layer 34 at least one of the source 26 or the drain 28 of the first transistor 24 a. Such an arrangement can be seen with reference again to FIG. 1.
In a third embodiment, as shown in FIG. 5, the semiconductor device 20 includes at least the first transistor 24 a and the second transistor 24 b. The semiconductor device 20 includes a first CA layer 34 a and a CB layer 36. The first CA layer 34 a is electrically connected to at least one of the source 26 a or the drain 28 a of the first transistor 24 a. The CB layer 36 is electrically connected to at least one of the gates 30 a, 30 b of the transistors 24 a, 24 b. Depending on the particular application, the CB layer 36 may be electrically connected to both of the gates 30 a, 30 b of the transistors 24 a, 24 b. The first and CB layers 34, 36 are also electrically connected to one another.
In the third embodiment, like the first embodiment, the CA layer 34 extends between the first end 40 and the second end 42. However, in the third embodiment, the CB layer 36 is disposed adjacent one of the ends 40, 42. As such, when viewed from above, the first and CB layers 34, 36 form a long shape. The long shape of the third embodiment allows the CB layer 36 to be disposed apart from a second CA layer 48 to prevent electrical conductivity between the CB layer 36 and the second CA layer 48.
Referring to FIGS. 6 and 7, a fourth embodiment of the semiconductor device 20 includes a first transistor 24 a, a second transistor 24 b, and a third transistor 24 c formed on the substrate 22. The transistors 24 are disposed sequentially from the first transistor 24 a through the third transistor 24 c. The device 20 may further include a fourth transistor 24 d wherein the transistors 24 are disposed sequentially from the first transistor 24 a through the fourth transistor 24 d.
A first CB layer 36 a is electrically connected to the gate 30 a of the first transistor 24 a and a second CB layer 36 b is electrically connected to the gate 30 c of the third transistor 24 c. A CA layer 34 electrically connects the first CB layer 36 a and the second CB layer 36 b to one another. As such, the gate 30 of the first transistor 24 a and the gate 30 c of the third transistor 24 c are electrically connected to one another through the CB layers 36 a, 36 b and the CA layer 34.
The CA layer 34 is electrically insulated from the gate 30 b of the second transistor 24 b. As such, the CA layer 34 forms a “bridge” or a “jumper” over the gate 30 b of the second transistor 24 b. One or more insulating layers 44 may be sandwiched between the CA layer 34 and the gate 30 of the second transistor 24 b. The one or more insulating layers 44 may also be sandwiched between the CA layer 36 and the substrate 22.
Depending on the particular logic element needs, the second CB layer 36 b may also be electrically connected to the gate 30 of the fourth transistor 24 d. Furthermore, the CA layer 34 may also be electrically connected to at least one of the source 26 or the drain 28 of one of the transistors 24 a, 24 b, 24 c. As is shown in FIGS. 6 and 7, the CA layer 34 and the CB layers 34 a, 34 b are disposed above the gates 30 of the transistors 24 a, 24 b, 24 c, 24 d with respect to the substrate 22.
In a fifth embodiment, the semiconductor device 20 includes a semiconductor substrate 22 with a first transistor 24 a and a second transistor 24 b disposed on the substrate 22, as illustrated in FIG. 8. A first CB layer 36 a is electrically connected to the gate 30 a of the first transistor 24 a and a second CB layer 36 b is electrically connected to the gate 30 a of the second transistor 24 b. A CA layer 34 extends longitudinally between a first end 40 and a second end 42. The first CB layer 36 a is electrically connected to the CA layer 34 adjacent the first end 40 of the CA layer 34. The second CB layer 36 b is electrically connected to the CA layer 34 adjacent the second end 42 of the CA layer 34.
The gate 30 a of the first transistor 24 a extends longitudinally as part of a first linear strip 31 a and the gate 30 b of the second transistor 24 b extends longitudinally as part of a second linear strip 31 b. The first and second strips 31 a, 31 b are generally parallel to one another and spaced apart from one another. The CA layer 34 is generally perpendicular to the first and second CB layers 36 a, 36 b. As such, the CA layer 34 extends generally parallel to the strips 31 a, 31 b and is disposed between the strips 31 a, 31 b. Accordingly, the CA layer 34 and the CB layers 36 a, 36 b collectively form a zig-zag or generally S-shape when viewed from above.
The semiconductor device 20 of the fifth embodiment may further include a third transistor 24 c and a fourth transistor 24 d. The gate 30 c of the third transistor 24 c extends longitudinally as part of the first strip 31 a and the gate 30 d of the fourth transistor 24 d extends longitudinally as part of the second strip 31 b. A gap 32 separates the gate 30 a of the first transistor 24 a from the gate 30 c of the third transistor 24 c and the gate 30 of the second transistor 24 b from the gate 30 of the fourth transistor 24 d. As such, the gates 30 of the first and second transistors 24 a, 24 b are cater-corner from one another and that the CA layer 34 extends across the gap 32.
In a sixth embodiment, as shown in FIG. 9, the semiconductor device 20 includes a semiconductor substrate 22 with a first transistor 24 a and a second transistor 24 b disposed on the substrate 22. The gates 30 a, 30 b of the transistors 24 a, 24 b extend longitudinally and generally parallel to one another. The first gate 30 a is formed as part of a first linear strip 31 a and the second gate 30 b is formed as part of second linear strip 31 b. A single CB layer 36 is electrically connected to both of the gates 30 of the first and second transistors 24 a, 24 b. The gates 30 a, 30 b of the transistors 24 a, 24 b may not be directly adjacent one another. As such, the CB layer 36 forms a zig-zag shape to electrically connect both transistors 24 a, 24 b.
Specifically, as shown in FIG. 9, the device 20 includes a third transistor 24 c and a fourth transistor 24 d. The gate 30 c of the third transistor 24 c extends longitudinally as part of the first strip 31 a and the gate 30 d of the fourth transistor 24 d extends longitudinally as part of the second strip 31 b. A first gap 32 a separates the gate 30 a of the first transistor 24 a from the gate 30 c of the third transistor 24 c. A second gap 32 b separates the gate 30 b of the second transistor 24 b from the gate 30 d of the fourth transistor 24 d. The gaps 32 a, 32 b of the sixth embodiment are not aligned with one another.
Referring to FIGS. 2 and 10, the semiconductor device 20 of a seventh embodiment includes a first transistor 24 a and a second transistor 24 b. A trench silicide layer 37 electrically connects the source 26 a or the drain 28 a of the first transistor 24 a to the source 26 b or the drain 28 b of the second transistor 24 b. Specifically, FIG. 10 shows the first transistor 24 a being an n-type FET and the second transistor 24 b being a p-type FET and that the raised drains 28 a, 28 b of the transistors 24 a, 24 b are electrically connected to one another via the trench silicide layer 37.
The gate 30 a of the first transistor 24 a and the gate 30 b of the second transistor 24 b are formed from a common linear strip 31. As such, the gates 30 a, 30 b extend linearly with respect to one another. The trench silicide layer 37 is disposed on one side of the gates 30 a, 30 b. That is, the trench silicide layer 37 does not cross over the gates 30 a, 30 b or the common linear strip 31 while still electrically connecting the drains 28 a, 28 b of the transistors 24 a, 24 b. Said another way, the trench silicide layer 37 need not cross a “poly boundary” formed by the linear strip 31. This arrangement may be utilized to produce scan scan-D flip-flops. The resulting scan-D flip-flops have a reduced area when compared to prior art devices. Of course, the arrangement may be utilized in producing logic devices other than the scan-D flip-flops, as will be realized by those skilled in the art.
The semiconductor device 20 of the seventh embodiment may also include a single-sided contact (not shown) electrically connected to each gate 30 a, 30 b of the transistors 24 a, 24 b. By utilizing a single-sided contact, i.e., a contact that does not extend over the entire width of the gates 30 a, 30 b, the risk of dielectric breakdown between the trench silicide layer 37 and the gates 30 a, 30 b is reduced.
While at least one exemplary embodiment has been presented in the foregoing detailed description of the invention, it should be appreciated that a vast number of variations exist. It should also be appreciated that the exemplary embodiment or exemplary embodiments are only examples, and are not intended to limit the scope, applicability, or configuration of the invention in any way. Rather, the foregoing detailed description will provide those skilled in the art with a convenient road map for implementing an exemplary embodiment of the invention, it being understood that various changes may be made in the function and arrangement of elements described in an exemplary embodiment without departing from the scope of the invention as set forth in the appended claims and their legal equivalents.

Claims

1-20. (canceled)

21. A semiconductor device comprising:

a semiconductor substrate;

a plurality of transistors formed on the semiconductor substrate, each of the transistors comprising a source, a drain, and a gate;

a trench silicide layer electrically connecting one of the source or the drain of one of the transistors to one of the source or the drain of another of the transistors;

a CA layer electrically connected to the trench silicide layer; and

a CB layer electrically connected to a gate of one of the transistors and the CA layer.

22. The semiconductor device as set forth in claim 21, wherein the trench silicide layer is sandwiched between the CA layer and the source or the drain of the transistor.

23. The semiconductor device as set forth in claim 21, wherein the trench silicide layer is formed in a trench within a dielectric over the substrate.

24. The semiconductor device as set forth in claim 21, wherein the salicide material comprises a metal chosen from nickel, cobalt, or tungsten.

25. The semiconductor device as set forth in claim 21, wherein an upper surface of the CA layer and CB layer are generally level with one another with respect to the substrate.

26. The semiconductor device as set forth in claim 25, further comprising a plurality of vias disposed over the CA or CB layers to selectively provide electrical connections to the respective CA or CB layers.

27. The semiconductor device as set forth in claim 26, further comprising a metal layer disposed over the plurality of vias, wherein the plurality of vias provide electrical connections between the respective CA or CB layers and the metal layer.

28. The semiconductor device as set forth in claim 21, wherein the plurality of transistors comprises a first transistor and a second transistor, and wherein the trench silicide layer electrically connects the source or the drain of the first transistor to the source or the drain of the second transistor.

29. The semiconductor device as set forth in claim 28, wherein the first transistor is an n-type FET and the second transistor is a p-type FET.

30. The semiconductor device as set forth in claim 29, wherein the drains of the transistors are electrically connected to one another via the trench silicide layer.

31. The semiconductor device as set forth in claim 30, wherein the trench silicide layer does not cross over the gates while still electrically connecting the drains of the transistors.

32. The semiconductor device as set forth in claim 28, wherein the gate of the first transistor and the gate of the second transistor are formed from a common linear strip.

33. The semiconductor device as set forth in claim 28, wherein

the gate of the first transistor extends linearly with the gate of the second transistor; and

the trench silicide layer is disposed on one side of the gates.

34. The semiconductor device as set forth in claim 21, wherein the CA and CB layers are utilized to produce a scan-D flip-flop cell.

35. A method of forming a semiconductor device, wherein the method comprises:

providing a semiconductor substrate;

forming a plurality of transistors formed on the semiconductor substrate, each of the transistors comprising a source, a drain, and a gate;

forming a trench silicide layer electrically connecting one of the source or the drain of one of the transistors to one of the source or the drain of another of the transistors;

forming a CA layer electrically connected to the trench silicide layer and a CB layer electrically connected to a gate of one of the transistors and the CA layer.

36. A method of forming a semiconductor device as set forth in claim 35, wherein an upper surface of the CA layer and the CB layer are generally level with one another with respect to the substrate, and wherein the method further comprises forming a metal layer over the CA layer and the CB to electrically connect the CA layer and the CB layer.

37. A method of forming a semiconductor device as set forth in claim 35, further comprising depositing a dielectric over the transistors prior to forming the trench silicide layer.

38. A method of forming a semiconductor device as set forth in claim 37, further comprising cutting a trench in the dielectric to the depth of the source or the drain of the transistors.

39. A method of forming a semiconductor device as set forth in claim 38 wherein forming the trench silicide layer comprises filling the trench with a metal.

40. A semiconductor device comprising:

a semiconductor substrate;

a CA layer electrically connected to the trench silicide layer, wherein the trench silicide layer is sandwiched between the CA layer and the source or the drain of the transistor;

a CB layer electrically connected to a gate of one of the transistors and the CA layer;

a plurality of vias disposed over the CA or CB layers to selectively provide electrical connections to the respective CA or CB layers; and

a metal layer disposed over the plurality of vias, wherein the plurality of vias provide electrical connections between the respective CA or CB layers and the metal layer.