US20140175613A1 - Chip Positioning in Multi-Chip Package - Google Patents
Chip Positioning in Multi-Chip Package Download PDFInfo
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- US20140175613A1 US20140175613A1 US13/724,897 US201213724897A US2014175613A1 US 20140175613 A1 US20140175613 A1 US 20140175613A1 US 201213724897 A US201213724897 A US 201213724897A US 2014175613 A1 US2014175613 A1 US 2014175613A1
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- H10W46/00—
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
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- H10W90/00—
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- H10W46/101—
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- H10W46/301—
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- H10W46/607—
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- H10W72/07523—
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- H10W72/5366—
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- H10W72/884—
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- H10W90/24—
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- H10W90/732—
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- H10W90/734—
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- H10W90/736—
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- H10W90/752—
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- H10W90/754—
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- H10W90/756—
Definitions
- Embodiments included herein generally relate to chip packaging. More particular, embodiments relate to positioning multiple ICs relative to one another and/or an underlying substrate in a multi-chip package.
- Wire bonding is a method of providing interconnections between an integrated circuit (IC) and an underlying substrate (e.g., printed circuit board).
- the interconnections are provided between pads on the IC and corresponding pads on the underlying substrate. It is important to accurately position the IC on the underlying substrate such that, for example, interconnections from adjacent pads on the IC and underlying substrate donot cross or short with one another. The proper alignment of the IC on the underlying substrate also impacts IC packaging requirements such as, for example, wire bond angle, wire length, and wireloops.
- An embodiment of the present invention includes a substrate package.
- the substrate package includes a first set of reference markers and a second set of reference markers.
- the first set of reference markers provides a first alignment for positioning a first integrated circuit (IC) and a second alignment for positioning a second IC on the substrate package.
- the second set of reference markers provides confirmation of the first alignment and the second alignment, where the second set of reference markers is disposed at a different location on the substrate package than the first set of reference markers.
- Another embodiment includes a method for multi-chip packaging.
- the method includes positioning a first integrated circuit (IC) on a substrate package based on a first set of reference markers; confirming a first alignment of the first IC based on a second set of reference markers; positioning a second IC on the substrate package based on the first set of reference markers, where the second IC is stacked onto the first IC; and, confirming a second alignment of the second IC based on the second set of reference markers, where the second set of reference markers is disposed at a different location on the substrate package than the first set of reference markers.
- IC integrated circuit
- a further embodiment includes a multi-chip package.
- the multi-chip package includes a first plurality of integrated circuits (ICs), a second plurality of ICs, and a substrate with the first and second plurality of ICs disposed thereon.
- the substrate includes a first set of reference markers to provide a first alignment for positioning at least one of the first plurality of ICs and a second alignment for positioning at least one of the second plurality of ICs on the substrate.
- a second set of reference markers provide confirmation of the first alignment and the second alignment, where the second set of reference markers is disposed at a different location on the substrate than the first set of reference markers.
- FIG. 1 is an illustration of an embodiment of a substrate package with a first set of reference markers and a second set of reference markers.
- FIG. 2 is an illustration of an embodiment of a multi-chip packaging process that uses a first set of reference markers and a second set of reference markers.
- FIGS. 3A-3D are illustrations of example integrated circuits positioned on a substrate in a diagonal stack arrangement.
- FIG. 4 is an illustration of a side view of an example multi-chip package with four integrated circuits.
- FIG. 5 is an illustration of a side view of an example multi-chip package with integrated circuits in a straight stack (or “ladder”) arrangement.
- FIG. 6 is an illustration of a side view of an example multi-chip package with integrated circuits in a side-by-side arrangement.
- FIGS. 7A-7D are illustrations of embodiments of shapes and sizes for a set of reference markers.
- FIGS. 8A and 8B are illustrations of an embodiment of a four-block package substrate with matrix teaching fiducials.
- FIG. 9 is an illustration of an embodiment of a full-block package substrate with matrix teaching fiducials.
- FIG. 10 is an illustration of an embodiment of offset full-block package substrate with matrix teaching fiducials.
- FIG. 1 is an illustration of an embodiment of a substrate package 100 .
- Substrate package 100 includes a first set of reference markers 110 , a second set of reference markers 120 , a clamping surface 130 , and a mold cavity surface 140 .
- Substrate package 100 can be, for example and without limitation, a lead frame package, a small-outline integrated circuit (SOIC) package, or a ball grid array (BGA) array package.
- SOIC small-outline integrated circuit
- BGA ball grid array
- first set of reference markers 110 and second set of reference markers 120 are disposed in mold cavity surface 140 of FIG. 1 .
- first set of reference markers 110 is configured to provide a first alignment for positioning a first integrated circuit (IC) and a second alignment for positioning a second IC on substrate package 100 .
- Second set of reference markers 120 is disposed at a different location on substrate package 100 than first set of reference markers 110 , according to an embodiment of the present invention. Further, second set of reference markers 120 is configured to provide confirmation of the first alignment and the second alignment.
- FIG. 2 is an illustration of an embodiment of a multi-chip packaging process 200 that uses first set of reference markers 110 and second set of reference markers 120 .
- a first IC is positioned in mold cavity surface 140 of FIG. 1 based on first set of reference markers 110 .
- FIG. 3A is an illustration of an embodiment of an IC 310 positioned in mold cavity 140 of substrate package 100 .
- IC 310 can be positioned in mold cavity surface 140 using an IC placement machine, which is well known to a p erson of ordinary skill in the relevant art.
- the IC placement machine can position IC 310 in a predetermined area within mold cavity surface 140 based on first set of reference markers 110 , acco ding to an embodiment of the present invention.
- the IC placement machine can align IC 310 with respect to a predetermined x-distance 320 and a predetermined y-distance 325 from first set of reference markers 110 .
- first set of reference markers 110 can be used in conjunction with first set of reference markers 110 to align IC 310 such as, for example and without limitation, a logo printed on substrate package 100 , indexing holes at an edge of substrate package 100 , or other markings on package substrate 100 that are not designed for deliberate IC offset.
- these other references are not shown in FIGS. 3A-3D .
- second set of reference markers 120 is used to confirm the alignment of IC 310 within mold cavity surface 140 .
- second set of reference markers 120 is used to inspect an alignment of one or more edges of IC 310 .
- the alignment of IC 310 can be confirmed using second set of reference markers 120 located in the upper left corner of mold cavity surface 140 —e.g., imaginary dotted lines 330 and 335 can be used to inspect if IC 310 is in alignment.
- the inspection of the alignment of IC 310 based on second set of reference markers 120 can be performed by the human eye.
- the inspection of the alignment of IC 310 can be performed by an inspection tool such as, for example and without limitation, a scanner. Based on the description herein, a person of ordinary skill in the relevant art will recognize that other inspection tools can be used. These other inspection tools are within the spirit and scope of the present invention.
- a second IC is positioned in mold cavity surface 140 of FIG. 1 based on first set of reference markers 110 .
- the second IC is positioned (or “stacked”) on top of the first IC (from step 210 ).
- FIG. 3C is an illustration of an embodiment of an IC 340 in mold cavity 140 of FIG. 1 , where IC 340 is stacked on top of IC 310 .
- IC 340 is stacked onto IC 310 in a diagonal stack arrangement.
- an IC placement machine can position IC 340 in a predetermined area within mold cavity surface 140 (and on top of IC 310 ) based on first set of reference markers 110 , according to an embodiment of the present invention.
- an IC placement machine can align IC 340 with respect to a predetermined x-distance 350 and a predetermined y-distance 355 from first set of markers 110 , according to an embodiment of the present invention.
- second set of reference markers 120 is used to confirm the alignment of IC 340 within mold cavity surface 140 .
- second set of reference markers 120 is used to inspect an alignment of one or more edges of IC 340 .
- the alignment of IC 340 can be confirmed using second set of markers 120 located in the lower left corner and the upper right corner of mold cavity surface 140 —e.g., imaginary dotted lines 360 and 365 can be used to inspect if IC 340 is in alignment.
- the inspection of the alignment of IC 340 based on second set of reference markers 120 can be performed by the human eye.
- the inspection of the alignment of IC 340 can be performed by an inspection tool such as, for example and without limitation, a scanner.
- FIG. 4 is an illustration of a side view of an example MCP 400 with four ICs, in which each of the four ICs is positioned on a substrate package 100 using the steps from method 200 .
- MCP 400 includes IC 340 stacked onto IC 310 , which is disposed on substrate package 100 .
- ICs 410 and 420 are disposed on substrate package 100 in a similar manner as IC 310 and IC 340 , respectively.
- ICs 310 , 340 , 410 , and 420 are wire-bonded to substrate package 100 via wires 430 , 440 , 450 , and 460 , respectively.
- An advantage, among others, of method 200 of FIG. 2 is the confirmation of alignment that the second set of reference markers (e.g., second set of markers 120 of FIG. 1 ) provides to MCP 400 .
- the confirmation from the second set of reference markers can provide assurances that the manufacture of MCP 400 meets product requirements such as, for example and without limitation, wire bond angle, wire length, wireloops, proper wire embedment, proximity and separation of wires, and proper IC die to IC die spacing.
- wire crossing/shorting can be avoided due to the inaccurate positioning of ICs in MCPs.
- FIG. 5 is an illustration of a side view of an example MCP 500 with ICs in a straight stack (or “ladder”) arrangement that can be manufactured using the steps of method 200 .
- MCP 500 includes ICs 510 - 540 in a straight stack (or “ladder”) arrangement, in which ICs 510 - 540 are wire-bonded to substrate package 100 via wires 550 - 580 , respectively.
- FIG. 5 is an illustration of a side view of an example MCP 500 with ICs in a straight stack (or “ladder”) arrangement that can be manufactured using the steps of method 200 .
- MCP 500 includes ICs 510 - 540 in a straight stack (or “ladder”) arrangement, in which ICs 510 - 540 are wire-bonded to substrate package 100 via wires 550 - 580 , respectively.
- MCP 600 includes two diagonal stack arrangements, where a first arrangement includes Its 610 - 640 and a second arrangement includes ICs 650 - 680 .
- the first arrangement of ICs is wire-bonded to substrate package 100 via wires 615 , 625 , 635 , and 645 .
- the second arrangement of ICs is wire-bonded to substrate package 100 via wires 655 , 665 , 675 , and 685 .
- first set of reference markers 110 and second set of reference markers 120 can be located in various areas of substrate package 100 to position and confirm the alignment of the ICs in FIGS. 4-6 .
- first set of reference markers 110 and second set of reference markers 120 can have various shapes and sizes.
- FIGS. 7A-7D are illustrations of embodiments of shapes and sizes for first set of reference markers 110 and second set of reference markers 120 .
- FIG. 7A is an illustration of an embodiment of a triangle-shaped reference marker 710 .
- at least one side of the triangle is at least 0.15 mm.
- the 0.15 mm dimension is selected based on a minimum dimension that is both visible and accurate for the human eye to confirm an alignment of an IC disposed on a package substrate (e.g., alignment of IC 310 on substrate package 100 in FIG. 3 ), according to an embodiment of the present invention.
- triangle-shaped reference marker 710 can be set to a minimum dimension based on the accuracy of the inspection tool (e.g., less than 0.15 mm).
- FIGS. 7B-7D are illustrations of additional embodiments of shapes and sizes for first set of reference markers 110 and second set of reference markers 120 .
- first set of reference markers 110 and second set of reference markers 120 can have a “T-shaped” structure 720 , in which at least one dimension of the structure is 0.2 mm.
- first set of reference markers 110 and second set of reference markers 120 can have a “cross-shaped” structure 730 , in which at least one dimension of the structure is 0.4 mm.
- first set of reference markers 110 and second set of reference markers 120 can have an “L-shaped” structure 740 , in which at least one dimension is 0.2 mm.
- first set of reference markers 110 and second set of reference markers 120 can be used for first set of reference markers 110 and second set of reference markers 120 .
- These other types of structures with varying dimensions include, but are not limited to, symbols (e.g., asterisk, dollar sign, ampersand, “@” symbol, pound sign, and caret symbol) and alphanumeric characters (e.g., digits 0-9 and letters A-Z).
- the symbols and alphanumeric characters can vary in size and dimension.
- structures 710 - 740 of FIGS. 7A-7D respectively, the symbols, and the alphanumeric characters can be positioned at various locations of a package substrate (e.g., substrate package 100 of FIG.
- first set of reference markers 110 and second set of reference markers 120 can be positioned at corner regions of substrate package 100 , non-corner regions of substrate package 100 , or a combination thereof.
- the embodiments aLove describe an MCP with a single base IC (e.g., IC 310 of FIGS. 3A-3D ) disposed on a substrate package (e.g., substrate package 100 ), in which one or more additional ICs are positioned (or “stacked”) on the single base IC.
- a single base IC arrangement e.g., IC 310 of FIGS. 3A-3D
- substrate package e.g., substrate package 100
- one or more additional ICs are positioned (or “stacked”) on the single base IC.
- embodiments of the present, invention can also be applied to arrangements with multiple base ICs such as, for example and without limitation, a matrix arrangement of ICs.
- a set of, reference markers can be used during a setup procedure for placement of the multiple base ICs on a substrate package. This set of reference markers is also referred to herein as “matrix teaching fiducials.”
- FIG. 8A is an illustration of an embodiment of a portion of a four-block package substrate 800 with matrix teaching fiducials 810 .
- FIG. 8A illustrates one-quarter of four-block package substrate 800 .
- Four-block package substrate 800 includes matrix teaching fiducials 810 , a matrix arrangement of ICs 820 11-0 , a clamping surface 830 , a mold cavity surface 840 , and a divider portion 850 that separates each quarter portion of substrate package 800 .
- matrix teaching fiducials 810 are disposed in mold cavity surface 840 and can be used to align the matrix arrangement of ICs 820 11-0 within mold cavity surface 840 .
- matrix teaching fiducials 810 can include four reference markers that can be used to align the matrix arrangement of ICs 820 11-0 with respect to x- and y-axes of package substrate 800 .
- imaginary dotted lines 860 , 870 , 880 , and 890 define four corners within mold cavity surface 840 that can be used to confirm the alignment of the matrix arrangement of ICs 820 11-0 .
- the alignment of the matrix arrangement of ICs 820 11-0 can be confirmed by inspecting that the top left corner formed by imaginary dotted lines 860 and 880 intersects at or proximate to the center of IC 820 0 ; the top right corner formed by imaginary dotted lines 860 and 890 intersects at or proximate to the center of IC 820 2 ; the bottom left corner formed by imaginary dotted lines 870 and 880 intersects at or proximate to the center of IC 820 9 ; and, the bottom right corner formed by imaginary lines 870 and 890 intersects at or proximate to the center of IC 820 11 .
- the inspection can be performed by the human eye, according to an embodiment of the present invention. In another embodiment, the inspection can be performed by an inspection tool such as, for example and without limitation, a scanner.
- FIG. 9 is an illustration of an embodiment of a full-block package substrate 900 with matrix teaching fiducials 910 .
- FIG. 9 illustrates a portion of full-block package substrate 900 .
- Full-block package substrate 900 includes matrix teaching fiducials 910 , a matrix arrangement of ICs 920 19-0 , a clamping surface 930 , and a mold cavity surface 940 .
- matrix teaching fiducials 910 are disposed in mold cavity surface 940 and can be used to align the matrix arrangement of ICs 920 19-0 within mold cavity surface 940 .
- matrix teaching fiducials 910 can include four reference markers that can be used to align the matrix arrangement of ICs 920 19-0 with respect to x- and y-axes of package substrate 900 .
- three matrix teaching fiducials 910 are illustrated in FIG. 9 .
- FIG. 9 For example, in reference to FIG.
- imaginary dotted lines 950 and 960 can be used to confirm the alignment of the matrix arrangement of ICs 920 19-0 such that the top row of the matrix (e.g., ICs 920 0 , 920 1 , 920 2 , and 920 3 ) is spaced from the top edge of package substrate 900 in substantially an equidistant manner as the bottom row of the matrix (e.g., ICs 920 16 , 920 17 , 920 18 , and 920 19 ) is spaced from the bottom edge of package substrate 900 .
- the top row of the matrix e.g., ICs 920 0 , 920 1 , 920 2 , and 920 3
- the bottom row of the matrix e.g., ICs 920 16 , 920 17 , 920 18 , and 920 19
- imaginary dotted line 970 can be used to confirm the alignment of the matrix arrangement of ICs 920 19-0 such that the left column of the matrix (e.g., ICs 920 0 , 920 4 , 920 8 , 920 12 , and 920 16 ) is spaced from the left edge of package substrate 900 in substantially an equidistant manner as the right column of the matrix is spaced from the right edge of package substrate 900 (not illustrated in FIG. 9 ).
- the left column of the matrix e.g., ICs 920 0 , 920 4 , 920 8 , 920 12 , and 920 16
- the alignment of the matrix arrangement of ICs 920 19-0 can be confirmed by inspecting that imaginary dotted line 950 intersects through the center or is proximate to the center of ICs 920 0 , 920 1 , 920 2 , and 920 3 .
- the alignment can be confirmed by inspecting that imaginary dotted line 960 intersects through the center or is proximate to the center of ICs 920 16 , 920 17 , 920 18 , and 920 19 , according to an embodiment of the present invention.
- the alignment can be confirmed by inspecting that imaginary dotted line 970 intersects through the center or is substantially proximate to the center of ICs 920 0 , 920 4 , 920 8 , 920 12 , and 920 16 .
- the alignment of ICs along the right edge of the matrix arrangement of ICs can be confirmed in a similar manner as the inspection of imaginary dotted line 970 .
- the inspection can be performed by the human eye, according to an embodiment of the present invention. In another embodiment, the inspection can be performed by an inspection tool such as, for example and without limitation, a scanner.
- FIG. 10 is an illustration of an offset full-block package substrate 1000 with matrix teaching fiducials 1010 .
- FIG. 10 illustrates a portion of offset full-block package substrate 1010 .
- Offset full-block package substrate 1000 includes matrix teaching fiducials 1010 , a matrix arrangement of ICs 1020 15-0 , a clamping surface 1030 , and a mold cavity surface 1040 .
- matrix teaching fiducials 1010 are disposed in mold cavity surface 1040 and can be used to align the matrix arrangement of ICs 1020 15-0 within mold cavity surface 1040 .
- matrix teaching fiducials 1010 can include four reference markers that can be used to align the matrix arrangement of ICs 1020 15-0 with respect to a y-axis of package substrate 1000 .
- three matrix teaching fiducials 1010 are illustrated in FIG. 10 .
- FIG. 10 For example, in reference to FIG.
- imaginary dotted lines 1050 and 1060 can be used to confirm the alignment of the matrix arrangement of ICs 1020 15-0 such that the top row of the matrix (e.g., ICs 1020 0 , 1020 1 , 1020 2 , and 1020 3 ) is spaced from the top edge of package substrate 1000 in an offset (or unequal) manner as the bottom row of the matrix (e.g., ICs 1020 12 , 1020 13 , 1020 14 , and 1020 15 ) is spaced from the bottom edge of package substrate 1000 .
- the top row of the matrix e.g., ICs 1020 0 , 1020 1 , 1020 2 , and 1020 3
- the bottom row of the matrix e.g., ICs 1020 12 , 1020 13 , 1020 14 , and 1020 15
- imaginary dotted line 1070 can be used to confirm the alignment of the matrix arrangement of ICs 1020 15-0 such that the left column of the matrix (e.g., ICs 1020 0 , 1020 4 , 1020 8 , and 1020 12 ) is spaced from the left edge of package substrate 1000 in substantially an equidistant manner as the right column of the matrix is spaced from the right edge of package substrate 1000 (not illustrated in FIG. 10 ).
- the left column of the matrix e.g., ICs 1020 0 , 1020 4 , 1020 8 , and 1020 12
- the alignment of the matrix arrangement of ICs 1020 15-0 can be confirmed by inspecting that imaginary dotted line 1050 intersects through the center or is proximate to the center of ICs 1020 0 , 1020 1 , 1020 2 , and 1020 3 .
- the alignment can be confirmed by inspecting that imaginary dotted line 1060 intersects through the center or is proximate to the center of ICs 1020 12 , 1020 13 , 1020 14 , and 1020 15 , according to an embodiment of the present invention.
- the alignment can be confirmed by inspecting that imaginary dotted line 1070 intersects through the center or is substantially proximate to the center of ICs 1020 0 , 1020 4 , 1020 8 , and 1020 12 .
- the alignment of ICs along the right edge of the matrix arrangement of ICs can be confirmed in a similar manner as the inspection of imaginary dotted line 1070 .
- the inspection can be performed by the human eye, according to an embodiment of the present invention. In another embodiment, the inspection can be performed by an inspection tool such as, for example and without limitation, a scanner.
- matrix teaching fiducials 810 , 910 , and 1010 can have various shapes and sizes such as, for example and without limitations, the shapes and sizes described above with respect to FIGS. 7A-7D .
- a person of ordinary skill in the relevant art will recognize that other types of structures with varying dimensions can be used for matrix teaching fiducials 810 , 910 , and 1010 .
- These other types of structures with varying dimensions include, but are not limited to, symbols (e.g., asterisk, dollar sign, ampersand, “@” symbol, pound sign, and caret symbol) and alphanumeric characters (e.g., digits 0-9 and letters A-Z).
- the symbols and alphanumeric characters can vary in size and dimension. Further, structures 710 - 740 of FIGS. 7A-7D , respectively, the symbols, and the alphanumeric characters can be positioned at various locations of a package substrate (e.g., package substrate 800 of FIG. 8 , package substrate 900 of FIG. 9 , and package substrate 1000 of FIG. 10 ) and are not limited to corner regions of the package substrate. For example, in reference to FIGS. 8 , matrix teaching fiducials 810 can be positioned at corner regions of package substrate 800 , non-corner regions of package substrate package 800 , or a combination thereof.
- a package substrate e.g., package substrate 800 of FIG. 8 , package substrate 900 of FIG. 9 , and package substrate 1000 of FIG. 10
- matrix teaching fiducials 810 can be positioned at corner regions of package substrate 800 , non-corner regions of package substrate package 800 , or a combination thereof.
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Abstract
Description
- 1. Field
- Embodiments included herein generally relate to chip packaging. More particular, embodiments relate to positioning multiple ICs relative to one another and/or an underlying substrate in a multi-chip package.
- 2. Background
- Wire bonding is a method of providing interconnections between an integrated circuit (IC) and an underlying substrate (e.g., printed circuit board). Typically, the interconnections are provided between pads on the IC and corresponding pads on the underlying substrate. It is important to accurately position the IC on the underlying substrate such that, for example, interconnections from adjacent pads on the IC and underlying substrate donot cross or short with one another. The proper alignment of the IC on the underlying substrate also impacts IC packaging requirements such as, for example, wire bond angle, wire length, and wireloops.
- The above design considerations in IC/substrate alignment are further exacerbated in multi-chip packages. In multi-chip packages, multiple ICs in the package are oftentimes required to maintain proper alignment between one another as well as the underlying substrate to avoid issues such as, for example, interconnects crossing or shorting with one another. Inaccurate positioning of at least one IC in the multi-chip package can result in an inoperable and/or unreliable packaged IC chip.
- Therefore, there is a need to accurately position multiple ICs relative to one another and/or an underlying substrate in a multi-chip package.
- An embodiment of the present invention includes a substrate package. The substrate package includes a first set of reference markers and a second set of reference markers. The first set of reference markers provides a first alignment for positioning a first integrated circuit (IC) and a second alignment for positioning a second IC on the substrate package. Further, the second set of reference markers provides confirmation of the first alignment and the second alignment, where the second set of reference markers is disposed at a different location on the substrate package than the first set of reference markers.
- Another embodiment includes a method for multi-chip packaging. The method includes positioning a first integrated circuit (IC) on a substrate package based on a first set of reference markers; confirming a first alignment of the first IC based on a second set of reference markers; positioning a second IC on the substrate package based on the first set of reference markers, where the second IC is stacked onto the first IC; and, confirming a second alignment of the second IC based on the second set of reference markers, where the second set of reference markers is disposed at a different location on the substrate package than the first set of reference markers.
- A further embodiment includes a multi-chip package. The multi-chip package includes a first plurality of integrated circuits (ICs), a second plurality of ICs, and a substrate with the first and second plurality of ICs disposed thereon. The substrate includes a first set of reference markers to provide a first alignment for positioning at least one of the first plurality of ICs and a second alignment for positioning at least one of the second plurality of ICs on the substrate. Further, a second set of reference markers provide confirmation of the first alignment and the second alignment, where the second set of reference markers is disposed at a different location on the substrate than the first set of reference markers.
- Further features and advantages of the invention, as well as the structure and operation of various embodiments of the present invention, are described in detail below with reference to the accompanying drawings. It is noted that the invention is not limited to the specific embodiments described herein. Such embodiments are presented herein for illustrative purposes only. Additional embodiments will be apparent to person of ordinary skill in the relevant art based on the teachings contained herein.
- The accompanying drawings, which are incorporated herein and form a part of the specification, ill ustrate embodiments of the present invention and, together with the description, further serve to explain the principles of the invention and to enable a person skilled in the relevant art to intake and use the invention.
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FIG. 1 is an illustration of an embodiment of a substrate package with a first set of reference markers and a second set of reference markers. -
FIG. 2 is an illustration of an embodiment of a multi-chip packaging process that uses a first set of reference markers and a second set of reference markers. -
FIGS. 3A-3D are illustrations of example integrated circuits positioned on a substrate in a diagonal stack arrangement. -
FIG. 4 is an illustration of a side view of an example multi-chip package with four integrated circuits. -
FIG. 5 is an illustration of a side view of an example multi-chip package with integrated circuits in a straight stack (or “ladder”) arrangement. -
FIG. 6 is an illustration of a side view of an example multi-chip package with integrated circuits in a side-by-side arrangement. -
FIGS. 7A-7D are illustrations of embodiments of shapes and sizes for a set of reference markers. -
FIGS. 8A and 8B are illustrations of an embodiment of a four-block package substrate with matrix teaching fiducials. -
FIG. 9 is an illustration of an embodiment of a full-block package substrate with matrix teaching fiducials. -
FIG. 10 is an illustration of an embodiment of offset full-block package substrate with matrix teaching fiducials. - The following detailed description refers to the accompanying drawings that illustrate exemplary embodiments consistent with this invention. Other embodiments are possible, and modifications can be made to the embodiments within the spirit and scope of the invention. Therefore, the detailed description is not meant to limit the scope of the invention. Rather, the scope of the invention is defined by the appended claims.
- It would be apparent to a person of ordinary skill in the relevant art that the present invention, as described below, can be implemented in many different embodiments of software, hardware, firmware, and/or the entities illustrated in the figures. Thus, the operational behavior of embodiments of the present invention will be described with the understanding that modifications and variations of the embodiments are possible, given the level of detail presented herein.
- This specification discloses one or more embodiments that incorporate the features of this invention. The disclosed embodiment(s) merely exemplify the invention. The scope of the invention is not limited to the disclosed embodiment(s). The invention is defined by the claims appended hereto.
- The embodiment(s) described, and references in the specification to “one embodiment”, “an embodiment”, “an example embodiment”, etc., indicate that the embodiment(s) described may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an embodiment, it is understood that it is within the knowledge of one of ordinary skill in the art to effect such feature, structure, or characteristic in connection with other embodiments whether or not explicitly described.
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FIG. 1 is an illustration of an embodiment of asubstrate package 100.Substrate package 100 includes a first set ofreference markers 110, a second set ofreference markers 120, aclamping surface 130, and amold cavity surface 140.Substrate package 100 can be, for example and without limitation, a lead frame package, a small-outline integrated circuit (SOIC) package, or a ball grid array (BGA) array package. Based on the description herein, a person of ordinary skill in the relevant art will recognize that other types of packaging technologies can be implemented with the embodiments disclosed herein. These other types of packaging technologies are within the spirit and scope of the present invention. - In reference to
FIG. 1 , first set ofreference markers 110 and second set ofreference markers 120 are disposed inmold cavity surface 140 ofFIG. 1 . In an embodiment, first set ofreference markers 110 is configured to provide a first alignment for positioning a first integrated circuit (IC) and a second alignment for positioning a second IC onsubstrate package 100. Second set ofreference markers 120 is disposed at a different location onsubstrate package 100 than first set ofreference markers 110, according to an embodiment of the present invention. Further, second set ofreference markers 120 is configured to provide confirmation of the first alignment and the second alignment. -
FIG. 2 is an illustration of an embodiment of amulti-chip packaging process 200 that uses first set ofreference markers 110 and second set ofreference markers 120. Instep 210, a first IC is positioned inmold cavity surface 140 ofFIG. 1 based on first set ofreference markers 110.FIG. 3A is an illustration of an embodiment of anIC 310 positioned inmold cavity 140 ofsubstrate package 100.IC 310 can be positioned inmold cavity surface 140 using an IC placement machine, which is well known to a person of ordinary skill in the relevant art. The IC placement machine can positionIC 310 in a predetermined area withinmold cavity surface 140 based on first set ofreference markers 110, acco ding to an embodiment of the present invention. In an embodiment, the IC placement machine can alignIC 310 with respect to apredetermined x-distance 320 and a predetermined y-distance 325 from first set ofreference markers 110. As would be understood by a person of ordinary skill in the relevant art, other references onsubstrate package 100 can be used in conjunction with first set ofreference markers 110 to alignIC 310 such as, for example and without limitation, a logo printed onsubstrate package 100, indexing holes at an edge ofsubstrate package 100, or other markings onpackage substrate 100 that are not designed for deliberate IC offset. For the sake of clarity and ease of explanation, these other references are not shown inFIGS. 3A-3D . - In reference to
method 200 ofFIG. 2 , instep 220, second set ofreference markers 120 is used to confirm the alignment ofIC 310 withinmold cavity surface 140. In an embodiment, second set ofreference markers 120 is used to inspect an alignment of one or more edges ofIC 310. For example, in reference toFIG. 3B , the alignment ofIC 310 can be confirmed using second set ofreference markers 120 located in the upper left corner ofmold cavity surface 140—e.g., imaginary dotted 330 and 335 can be used to inspect iflines IC 310 is in alignment. In an embodiment, the inspection of the alignment ofIC 310 based on second set ofreference markers 120 can be performed by the human eye. In another embodiment, the inspection of the alignment ofIC 310 can be performed by an inspection tool such as, for example and without limitation, a scanner. Based on the description herein, a person of ordinary skill in the relevant art will recognize that other inspection tools can be used. These other inspection tools are within the spirit and scope of the present invention. - In
step 230 ofFIG. 2 , a second IC is positioned inmold cavity surface 140 ofFIG. 1 based on first set ofreference markers 110. In an embodiment, the second IC is positioned (or “stacked”) on top of the first IC (from step 210).FIG. 3C is an illustration of an embodiment of anIC 340 inmold cavity 140 ofFIG. 1 , whereIC 340 is stacked on top ofIC 310. Here,IC 340 is stacked ontoIC 310 in a diagonal stack arrangement. - Similar to
IC 310, an IC placement machine can positionIC 340 in a predetermined area within mold cavity surface 140 (and on top of IC 310) based on first set ofreference markers 110, according to an embodiment of the present invention. In reference toFIG. 3C , an IC placement machine can alignIC 340 with respect to apredetermined x-distance 350 and a predetermined y-distance 355 from first set ofmarkers 110, according to an embodiment of the present invention. - In
step 240 ofFIG. 2 , second set ofreference markers 120 is used to confirm the alignment ofIC 340 withinmold cavity surface 140. In an embodiment, second set ofreference markers 120 is used to inspect an alignment of one or more edges ofIC 340. For example, in reference toFIG. 3D , the alignment ofIC 340 can be confirmed using second set ofmarkers 120 located in the lower left corner and the upper right corner ofmold cavity surface 140—e.g., imaginary dotted 360 and 365 can be used to inspect iflines IC 340 is in alignment. In an embodiment, the inspection of the alignment ofIC 340 based on second set ofreference markers 120 can be performed by the human eye. In another embodiment, the inspection of the alignment ofIC 340 can be performed by an inspection tool such as, for example and without limitation, a scanner. - Based on the description herein, a person of ordinary skill in the relevant art will recognize that
method 200 can be applied to multi-chip packages (MCPs) with more than two ICs disposed on a substrate package. For example,FIG. 4 is an illustration of a side view of anexample MCP 400 with four ICs, in which each of the four ICs is positioned on asubstrate package 100 using the steps frommethod 200.MCP 400 includesIC 340 stacked ontoIC 310, which is disposed onsubstrate package 100. In addition, using the steps ofmethod 200, 410 and 420 are disposed onICs substrate package 100 in a similar manner asIC 310 andIC 340, respectively. - In reference to
FIG. 4 , 310, 340, 410, and 420 are wire-bonded toICs substrate package 100 via 430, 440, 450, and 460, respectively. An advantage, among others, ofwires method 200 ofFIG. 2 is the confirmation of alignment that the second set of reference markers (e.g., second set ofmarkers 120 ofFIG. 1 ) provides toMCP 400. The confirmation from the second set of reference markers can provide assurances that the manufacture ofMCP 400 meets product requirements such as, for example and without limitation, wire bond angle, wire length, wireloops, proper wire embedment, proximity and separation of wires, and proper IC die to IC die spacing. As a result, wire crossing/shorting can be avoided due to the inaccurate positioning of ICs in MCPs. - Although the description of
method 200 is described in the context of a diagonal stack arrangement, a person of ordinary skill in the art will recognize thatmethod 200 is also applicable to other arrangements such as, for example and without limitation, a straight stack (o “ladder”) arrangement and a side-by-side arrangement.FIG. 5 is an illustration of a side view of anexample MCP 500 with ICs in a straight stack (or “ladder”) arrangement that can be manufactured using the steps ofmethod 200.MCP 500 includes ICs 510-540 in a straight stack (or “ladder”) arrangement, in which ICs 510-540 are wire-bonded tosubstrate package 100 via wires 550-580, respectively.FIG. 6 is an illustration of a side view of anexample MCP 600 with ICs in a side-by-side arrangement.MCP 600 includes two diagonal stack arrangements, where a first arrangement includes Its 610-640 and a second arrangement includes ICs 650-680. The first arrangement of ICs is wire-bonded tosubstrate package 100 via 615, 625, 635, and 645. Similarly, the second arrangement of ICs is wire-bonded towires substrate package 100 via 655, 665, 675, and 685. In reference towires FIG. 1 , based on the description herein, a person of ordinary skill in the relevant art will recognize that first set ofreference markers 110 and second set ofreference markers 120 can be located in various areas ofsubstrate package 100 to position and confirm the alignment of the ICs inFIGS. 4-6 . - Further, in reference to
FIG. 1 , first set ofreference markers 110 and second set ofreference markers 120 can have various shapes and sizes.FIGS. 7A-7D are illustrations of embodiments of shapes and sizes for first set ofreference markers 110 and second set ofreference markers 120.FIG. 7A is an illustration of an embodiment of a triangle-shapedreference marker 710. In an embodiment, at least one side of the triangle is at least 0.15 mm. The 0.15 mm dimension is selected based on a minimum dimension that is both visible and accurate for the human eye to confirm an alignment of an IC disposed on a package substrate (e.g., alignment ofIC 310 onsubstrate package 100 inFIG. 3 ), according to an embodiment of the present invention. One or more dimensions of the triangle-shapedreference marker 710 inFIG. 7A can be less than 0.15 mm. For example, if an inspection tool (e.g., scanner) is used to confirm the alignment of the IC, then one or more dimensions of triangle-shapedreference marker 710 can be set to a minimum dimension based on the accuracy of the inspection tool (e.g., less than 0.15 mm). -
FIGS. 7B-7D are illustrations of additional embodiments of shapes and sizes for first set ofreference markers 110 and second set ofreference markers 120. InFIG. 7B , first set ofreference markers 110 and second set ofreference markers 120 can have a “T-shaped”structure 720, in which at least one dimension of the structure is 0.2 mm.FIG. 7C , first set ofreference markers 110 and second set ofreference markers 120 can have a “cross-shaped”structure 730, in which at least one dimension of the structure is 0.4 mm. Further, inFIG. 7D , first set ofreference markers 110 and second set ofreference markers 120 can have an “L-shaped”structure 740, in which at least one dimension is 0.2 mm. Based on the description herein, a person of ordinary skill in the relevant art will recognize that other types of structures with varying dimensions can be used for first set ofreference markers 110 and second set ofreference markers 120. These other types of structures with varying dimensions include, but are not limited to, symbols (e.g., asterisk, dollar sign, ampersand, “@” symbol, pound sign, and caret symbol) and alphanumeric characters (e.g., digits 0-9 and letters A-Z). The symbols and alphanumeric characters can vary in size and dimension. Further, structures 710-740 ofFIGS. 7A-7D , respectively, the symbols, and the alphanumeric characters can be positioned at various locations of a package substrate (e.g.,substrate package 100 ofFIG. 1 ) and are not limited to corner regions of the package substrate. For example, in reference toFIG. 1 , first set ofreference markers 110 and second set ofreference markers 120 can be positioned at corner regions ofsubstrate package 100, non-corner regions ofsubstrate package 100, or a combination thereof. - The embodiments aLove describe an MCP with a single base IC (e.g.,
IC 310 ofFIGS. 3A-3D ) disposed on a substrate package (e.g., substrate package 100), in which one or more additional ICs are positioned (or “stacked”) on the single base IC. In addition to the single base IC arrangement, embodiments of the present, invention can also be applied to arrangements with multiple base ICs such as, for example and without limitation, a matrix arrangement of ICs. In an embodiment, a set of, reference markers can be used during a setup procedure for placement of the multiple base ICs on a substrate package. This set of reference markers is also referred to herein as “matrix teaching fiducials.” -
FIG. 8A is an illustration of an embodiment of a portion of a four-block package substrate 800 withmatrix teaching fiducials 810. For the sake of clarity and ease of explanation,FIG. 8A illustrates one-quarter of four-block package substrate 800. Four-block package substrate 800 includesmatrix teaching fiducials 810, a matrix arrangement ofICs 820 11-0, a clampingsurface 830, amold cavity surface 840, and adivider portion 850 that separates each quarter portion ofsubstrate package 800. - In an embodiment,
matrix teaching fiducials 810 are disposed inmold cavity surface 840 and can be used to align the matrix arrangement ofICs 820 11-0 withinmold cavity surface 840. In an embodiment,matrix teaching fiducials 810 can include four reference markers that can be used to align the matrix arrangement ofICs 820 11-0 with respect to x- and y-axes ofpackage substrate 800. For example, in reference toFIG. 8B , imaginary dotted 860, 870, 880, and 890 define four corners withinlines mold cavity surface 840 that can be used to confirm the alignment of the matrix arrangement ofICs 820 11-0. - In an embodiment, the alignment of the matrix arrangement of
ICs 820 11-0 can be confirmed by inspecting that the top left corner formed by imaginary dotted 860 and 880 intersects at or proximate to the center oflines IC 820 0; the top right corner formed by imaginary dotted 860 and 890 intersects at or proximate to the center oflines IC 820 2; the bottom left corner formed by imaginary dotted 870 and 880 intersects at or proximate to the center oflines IC 820 9; and, the bottom right corner formed by 870 and 890 intersects at or proximate to the center ofimaginary lines IC 820 11. The inspection can be performed by the human eye, according to an embodiment of the present invention. In another embodiment, the inspection can be performed by an inspection tool such as, for example and without limitation, a scanner. - Matrix teaching fiducials can be used in other types of matrix arrangement of ICs disposed on a substrate package. For example,
FIG. 9 is an illustration of an embodiment of a full-block package substrate 900 withmatrix teaching fiducials 910. For the sake of clarity and ease of explanation,FIG. 9 illustrates a portion of full-block package substrate 900. Full-block package substrate 900 includesmatrix teaching fiducials 910, a matrix arrangement ofICs 920 19-0, a clampingsurface 930, and amold cavity surface 940. - In an embodiment,
matrix teaching fiducials 910 are disposed inmold cavity surface 940 and can be used to align the matrix arrangement ofICs 920 19-0 withinmold cavity surface 940. In an embodiment,matrix teaching fiducials 910 can include four reference markers that can be used to align the matrix arrangement ofICs 920 19-0 with respect to x- and y-axes ofpackage substrate 900. For the sake of clarity and ease of explanation, threematrix teaching fiducials 910 are illustrated inFIG. 9 . For example, in reference toFIG. 9 , imaginary dotted 950 and 960 can be used to confirm the alignment of the matrix arrangement oflines ICs 920 19-0 such that the top row of the matrix (e.g., 920 0, 920 1, 920 2, and 920 3) is spaced from the top edge ofICs package substrate 900 in substantially an equidistant manner as the bottom row of the matrix (e.g., 920 16, 920 17, 920 18, and 920 19) is spaced from the bottom edge ofICs package substrate 900. Further, imaginary dottedline 970 can be used to confirm the alignment of the matrix arrangement ofICs 920 19-0 such that the left column of the matrix (e.g., 920 0, 920 4, 920 8, 920 12, and 920 16) is spaced from the left edge ofICs package substrate 900 in substantially an equidistant manner as the right column of the matrix is spaced from the right edge of package substrate 900 (not illustrated inFIG. 9 ). - In an embodiment, the alignment of the matrix arrangement of
ICs 920 19-0 can be confirmed by inspecting that imaginary dottedline 950 intersects through the center or is proximate to the center of 920 0, 920 1, 920 2, and 920 3. Similarly, the alignment can be confirmed by inspecting that imaginary dottedICs line 960 intersects through the center or is proximate to the center of 920 16, 920 17, 920 18, and 920 19, according to an embodiment of the present invention. Further, the alignment can be confirmed by inspecting that imaginary dottedICs line 970 intersects through the center or is substantially proximate to the center of 920 0, 920 4, 920 8, 920 12, and 920 16. Although not illustrated inICs FIG. 9 , the alignment of ICs along the right edge of the matrix arrangement of ICs (proximate to the right edge of package substrate 900) can be confirmed in a similar manner as the inspection of imaginary dottedline 970. The inspection can be performed by the human eye, according to an embodiment of the present invention. In another embodiment, the inspection can be performed by an inspection tool such as, for example and without limitation, a scanner. -
FIG. 10 is an illustration of an offset full-block package substrate 1000 withmatrix teaching fiducials 1010. For the sake of clarity and ease of explanation,FIG. 10 illustrates a portion of offset full-block package substrate 1010. Offset full-block package substrate 1000 includesmatrix teaching fiducials 1010, a matrix arrangement ofICs 1020 15-0, aclamping surface 1030, and amold cavity surface 1040. - In an embodiment,
matrix teaching fiducials 1010 are disposed inmold cavity surface 1040 and can be used to align the matrix arrangement ofICs 1020 15-0 withinmold cavity surface 1040. In an embodiment,matrix teaching fiducials 1010 can include four reference markers that can be used to align the matrix arrangement ofICs 1020 15-0 with respect to a y-axis ofpackage substrate 1000. For the sake of clarity and ease of explanation, threematrix teaching fiducials 1010 are illustrated inFIG. 10 . For example, in reference toFIG. 10 , imaginary 1050 and 1060 can be used to confirm the alignment of the matrix arrangement ofdotted lines ICs 1020 15-0 such that the top row of the matrix (e.g., 1020 0, 1020 1, 1020 2, and 1020 3) is spaced from the top edge ofICs package substrate 1000 in an offset (or unequal) manner as the bottom row of the matrix (e.g., 1020 12, 1020 13, 1020 14, and 1020 15) is spaced from the bottom edge ofICs package substrate 1000. Further, imaginary dottedline 1070 can be used to confirm the alignment of the matrix arrangement ofICs 1020 15-0 such that the left column of the matrix (e.g., 1020 0, 1020 4, 1020 8, and 1020 12) is spaced from the left edge ofICs package substrate 1000 in substantially an equidistant manner as the right column of the matrix is spaced from the right edge of package substrate 1000 (not illustrated inFIG. 10 ). - In an embodiment, the alignment of the matrix arrangement of
ICs 1020 15-0 can be confirmed by inspecting that imaginary dottedline 1050 intersects through the center or is proximate to the center of 1020 0, 1020 1, 1020 2, and 1020 3. Similarly, the alignment can be confirmed by inspecting that imaginary dottedICs line 1060 intersects through the center or is proximate to the center of 1020 12, 1020 13, 1020 14, and 1020 15, according to an embodiment of the present invention. Further, the alignment can be confirmed by inspecting that imaginary dottedICs line 1070 intersects through the center or is substantially proximate to the center of 1020 0, 1020 4, 1020 8, and 1020 12. Although not illustrated inICs FIG. 10 , the alignment of ICs along the right edge of the matrix arrangement of ICs (proximate to the right edge of package substrate 1000) can be confirmed in a similar manner as the inspection of imaginary dottedline 1070. The inspection can be performed by the human eye, according to an embodiment of the present invention. In another embodiment, the inspection can be performed by an inspection tool such as, for example and without limitation, a scanner. - Further, in reference to
FIGS. 8-10 , 810, 910, and 1010 can have various shapes and sizes such as, for example and without limitations, the shapes and sizes described above with respect tomatrix teaching fiducials FIGS. 7A-7D . Based on the description herein, a person of ordinary skill in the relevant art will recognize that other types of structures with varying dimensions can be used for 810, 910, and 1010. These other types of structures with varying dimensions include, but are not limited to, symbols (e.g., asterisk, dollar sign, ampersand, “@” symbol, pound sign, and caret symbol) and alphanumeric characters (e.g., digits 0-9 and letters A-Z). The symbols and alphanumeric characters can vary in size and dimension. Further, structures 710-740 ofmatrix teaching fiducials FIGS. 7A-7D , respectively, the symbols, and the alphanumeric characters can be positioned at various locations of a package substrate (e.g.,package substrate 800 ofFIG. 8 ,package substrate 900 ofFIG. 9 , andpackage substrate 1000 ofFIG. 10 ) and are not limited to corner regions of the package substrate. For example, in reference toFIGS. 8 ,matrix teaching fiducials 810 can be positioned at corner regions ofpackage substrate 800, non-corner regions ofpackage substrate package 800, or a combination thereof. - It is to be appreciated that the Detailed Description section, and not the Summary and Abstract sections, is intended to be used to interpret the claims. The Summary and Abstract sections may set forth one or more but not all exemplary embodiments of the present invention as contemplated by the inventors, and thus, are not intended to limit the present invention and the appended claims in any way.
- Embodiments of the present invention have been described above with the aid of functional building blocks illustrating the implementation of specified functions and relationships thereof. The boundaries of these functional building blocks have been arbitrarily defined herein for the convenience of the description. Alternate boundaries can be defined so long as the specified functions and relationships thereof are appropriately performed.
- The foregoing description of the specific embodiments will so fully reveal the general nature of the invention that others can, by applying knowledge within the skill of the relevant art, readily modify and/or adapt for various applications such specific embodiments, without undue experimentation, without departing from the general concept of the present invention. Therefore, such adaptations and modifications are intended to be within the meaning and range of equivalents of the disclosed embodiments, based on the teaching and guidance presented herein. It is to be understood that the phraseology or terminology herein is for the purpose of description and not of limitation, such that the terminology or phraseology of the present specification is to be interpreted by the skilled artisan in light of the teachings and guidance.
- The breadth and scope of the present invention should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.
Claims (21)
Priority Applications (3)
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| PCT/US2013/076154 WO2014100197A1 (en) | 2012-12-21 | 2013-12-18 | Chip positioning in multi-chip package |
| US14/532,039 US9196608B2 (en) | 2012-12-21 | 2014-11-04 | Method of chip positioning for multi-chip packaging |
Applications Claiming Priority (1)
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| US13/724,897 US8901756B2 (en) | 2012-12-21 | 2012-12-21 | Chip positioning in multi-chip package |
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| US20140175613A1 true US20140175613A1 (en) | 2014-06-26 |
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|---|---|---|---|---|
| US9698093B2 (en) * | 2015-08-24 | 2017-07-04 | Nxp Usa,Inc. | Universal BGA substrate |
| CN115954289A (en) * | 2022-12-28 | 2023-04-11 | 沛顿科技(深圳)有限公司 | A Multi-chip Stacking Distance Measurement Method Based on RDL Identification Points |
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| KR102728190B1 (en) | 2019-09-10 | 2024-11-08 | 삼성전자주식회사 | Package on package(POP) type semiconductor package |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH03276740A (en) | 1990-03-27 | 1991-12-06 | Fujitsu Ltd | Method for inspecting semiconductor device |
| US5777392A (en) * | 1995-03-28 | 1998-07-07 | Nec Corporation | Semiconductor device having improved alignment marks |
| JP3677426B2 (en) | 2000-02-21 | 2005-08-03 | Necエレクトロニクス株式会社 | Alignment accuracy measurement mark |
| JP2002252157A (en) * | 2001-02-22 | 2002-09-06 | Sony Corp | MASK MANUFACTURING MEMBER AND ITS MANUFACTURING METHOD, MASK, MANUFACTURING METHOD, EXPOSURE METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD |
| US6853064B2 (en) * | 2003-05-12 | 2005-02-08 | Micron Technology, Inc. | Semiconductor component having stacked, encapsulated dice |
| JP4467318B2 (en) * | 2004-01-28 | 2010-05-26 | Necエレクトロニクス株式会社 | Semiconductor device, chip alignment method for multi-chip semiconductor device, and method for manufacturing chip for multi-chip semiconductor device |
| US7928591B2 (en) | 2005-02-11 | 2011-04-19 | Wintec Industries, Inc. | Apparatus and method for predetermined component placement to a target platform |
| US20080268350A1 (en) | 2007-04-30 | 2008-10-30 | Macronix International Co., Ltd. | Semiconductor structure |
| KR100809726B1 (en) | 2007-05-14 | 2008-03-06 | 삼성전자주식회사 | An alignment mark, a semiconductor chip having the alignment mark, a semiconductor package including the semiconductor chip, and methods of manufacturing the semiconductor chip and the semiconductor package |
| JP5466820B2 (en) * | 2007-10-18 | 2014-04-09 | ピーエスフォー ルクスコ エスエイアールエル | Semiconductor substrate and method for manufacturing semiconductor device |
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- 2012-12-21 US US13/724,897 patent/US8901756B2/en active Active
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- 2013-12-18 WO PCT/US2013/076154 patent/WO2014100197A1/en not_active Ceased
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9698093B2 (en) * | 2015-08-24 | 2017-07-04 | Nxp Usa,Inc. | Universal BGA substrate |
| CN115954289A (en) * | 2022-12-28 | 2023-04-11 | 沛顿科技(深圳)有限公司 | A Multi-chip Stacking Distance Measurement Method Based on RDL Identification Points |
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| WO2014100197A1 (en) | 2014-06-26 |
| US9196608B2 (en) | 2015-11-24 |
| US20150056726A1 (en) | 2015-02-26 |
| US8901756B2 (en) | 2014-12-02 |
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