US20090121725A1

US20090121725A1 - Test apparatus and measurement apparatus

Info

Publication number: US20090121725A1
Application number: US11/936,799
Authority: US
Inventors: Yoshihiro Hashimoto
Original assignee: Advantest Corp
Current assignee: Advantest Corp
Priority date: 2007-11-08
Filing date: 2007-11-08
Publication date: 2009-05-14
Also published as: KR101100905B1; US20090121726A1; KR20090048342A; US7825666B2; JP2009115794A

Abstract

There is provided a test apparatus for testing a device under test, which includes a voltage supplying section which supplies a voltage to the device under test through a wire, a first capacitor which is arranged between the wire and a common potential in series, a current detecting section which detects a current flowing through the wire at a location closer to the device under test than the first capacitor is, an integrating section which outputs an integration value obtained by integrating a difference between the current detected by the current detecting section and a predetermined reference current, and a judging section which judges whether the device under test is a pass or a failure based on the integration value.

Description

BACKGROUND

1. Technical Field
The present invention relates to a test apparatus and a measurement apparatus. Particularly, the present invention relates to a test apparatus and a measurement apparatus for measuring an electric current consumed by a device under test (load).
2. Related Art
A test apparatus has a function of measuring an average current to be consumed by a device under test when the device operates. The test apparatus detects a current output from a power source device that supplies a drive voltage to the device under test, and measures the average current consumed by the device under test.
Here, the power source device is slow in responding to any change in the current consumed by the load. Accordingly, the test apparatus has a bypass capacitor having relatively large capacitance, between its power source line and the ground, in order to compensate for any response delay of the current output from the power source device. With this, the test apparatus can supply a drive current to the device under test even in a case where it makes the device under test operate in such a manner as would require the current consumed by the device under test to change quickly.
Here, in a case where the test apparatus has a bypass capacitor, the current to be consumed by the device under test and the current output from the power source device do not coincide. Hence, the test apparatus cannot correctly measure the average current consumed by the device under test, by detecting the output current from the power source device.
Thus, a conceivable test apparatus to overcome this problem is such one that has, near the device under test, an AD converter which samples the drive current to be supplied to the device under test. However, since the drive current supplied to the device under test changes quickly, the test apparatus has to make the AD converter perform sampling quickly. Accordingly, the test apparatus has to be provided with a high-performance AD converter. Further, since there will be a large amount of data that should be taken in, the test apparatus has to be provided with a data memory having a large capacity.
Furthermore, in testing multiple devices under test of about several hundreds or so simultaneously, the test apparatus has to have the same number of current measuring sections as the number of devices under test. Therefore, it is preferred that the test apparatus be structured as a simple circuit in order to be able to measure the average current consumed by the device under test.

SUMMARY

Hence, according to one aspect of the present invention, the object is to provide a test apparatus and a measurement apparatus which can solve the above-described problem. This object is achieved by combinations of features recited in independent claims. Further, dependent claims define additional advantageous specific examples of the present invention.
To solve the above-described problem, according to a first aspect of the present invention, there is provided a test apparatus for testing a device under test, having: a voltage supplying section which supplies a voltage to a device under test through a wire; a first capacitor which is arranged between the wire and a common potential in series; a current detecting section which detects a current flowing through the wire at a location which is closer to the device under test than the first capacitor is; an integrating section which outputs an integration value obtained by integrating a difference between the current detected by the current detecting section and a predetermined reference current; and a judging section which judges whether the device under test is a pass or a failure based on the integration value.
According to a second aspect of the present invention, there is provided a measurement apparatus for measuring a current flowing through a load, having: a first capacitor which is arranged between a wire for supplying a voltage to the load and a common potential in series; a current detecting section which detects a current flowing through the wire at a location closer to the load than the first capacitor is; and an integrating section which outputs an integration value obtained by integrating a difference between the current detected by the current detecting section and a predetermined reference current.
The above summary of the invention is not intended to list all necessary features of the present invention, but sub-combinations of these features can also provide an invention.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows the configuration of a test apparatus 10 according to the present embodiment, together with a device under test (DUT) 200.

FIG. 2 shows the configuration of a measurement apparatus 20 according to the present embodiment, together with a voltage supplying section 18 and the DUT 200.

FIG. 3 shows one example of the configuration of an integrating section 30 and a judging section 32 according to the present embodiment.

FIG. 4 shows one example of a drive current Idd (=a current to be consumed by the DUT 200) to be supplied to the DUT 200 during a test.

FIG. 5 shows a result of simulating an output current I_Poutput from the voltage supplying section 18, in a case where the DUT 200 is controlled to operate as shown in FIG. 4.

FIG. 6 shows a result of simulating a drive voltage Vdd in a case where the DUT 200 is controlled to operate as shown in FIG. 4.

FIG. 7 shows a result of simulating a current I_CL1flowing through a first capacitor 24 in a case where the DUT 200 is controlled to operate as shown in FIG. 4.

FIG. 8 shows a result of simulating a current I_CL2flowing through a second capacitor 26 in a case where the DUT 200 is controlled to operate as shown in FIG. 4.

FIG. 9 shows a result of simulating a current I_RMflowing through a wire 12 between the first capacitor 24 and the second capacitor 26 in a case where the DUT 200 is controlled to operate as shown in FIG. 4.

FIG. 10 shows the configuration of the test apparatus 10 according to a first modification of the present embodiment, together with the DUT 200.

FIG. 11 shows one example of the reference current I_REFset by a search section 82 of the test apparatus 10 according to the first modification.

FIG. 12 shows the configuration of the test apparatus 10 according to a second modification of the present embodiment, together with the DUT 200.

DESCRIPTION OF EXEMPLARY EMBODIMENTS

One aspect of the present invention will be described below through an embodiment of the invention, but the embodiment below is not intended to limit the invention set forth in the claims, or all the combinations explained in the embodiment are not necessarily essential to the means of solving provided by the invention.
FIG. 1 shows the configuration of a test apparatus 10 according to the present embodiment, together with a device under test (DUT) 200. The test apparatus 10 comprises a signal generating section 17, a voltage supplying section 18, a measurement apparatus 20, a reference voltage generating section 21, a signal acquiring section 22, and a system control device 23, and tests the DUT 200.
The DUT 200 is tested by the test apparatus 10, for example, while it is loaded on a performance board or the like. The signal generating section 17 supplies a test signal corresponding to a test pattern to the DUT 200.
The voltage supplying section 18 supplies a voltage to the DUT 200 through a wire 12. The voltage supplying section 18 may, for example, supply a voltage for driving the DUT 200, to a power source terminal of the DUT 200. The voltage supplying section 18 may, for example, detect a voltage (drive voltage Vdd) at a point (a detection end 14) on the wire 12 that is near the DUT 200 and control its output voltage such that the detected drive voltage Vdd becomes a predetermined value.
The measurement apparatus 20 measures an average consumption current of the DUT 200 (for example, an average consumption current when the DUT 200 is in operation). Then, the measurement apparatus 20 judges whether the average consumption current of the DUT 200 is larger or not (or smaller or not) than a predetermined reference current I_REF. Note that the measurement apparatus 20 may, for example, be located at a device interface section such as a socket or the like, into which the performance board and the DUT 200 are inserted.
The reference voltage generating section 21 generates a reference voltage V_REFfor generating the reference current I_REF, and supplies it to the measurement apparatus 20. The reference voltage generating section 21 supplies the reference voltage V_REFto the measurement apparatus 20, for example, prior to a test, in accordance with the control of the system control device 23.
The signal acquiring section 22 judges whether an output signal to be output from the DUT 200 in response to a test signal is a pass or a failure. In addition, the signal acquiring section 22 judges whether the DUT 200 is a pass or a failure based on a result of judgment by the measurement apparatus 20.
The system control device 23 includes a memory which stores a program therein, a CPU which executes the program, etc. The system control device 23 exchanges data with the signal generating section 17, the voltage supplying section 18, the reference voltage generating section 21, and the signal acquiring section 22 to control the testing operation of the test apparatus 10.
FIG. 2 shows the configuration of the measurement apparatus 20 according to the present embodiment, together with the voltage supplying section 18 and the DUT 200. The measurement apparatus 20 comprises a first capacitor 24, a second capacitor 26, a current detecting section 28, an integrating section 30, a judging section 32, a setting section 34, and a control section 36.
The first capacitor 24 is arranged between the wire 12 and a common potential in series. For example, the first capacitor 24 may be connected to the wire 12 at a location closer to the voltage supplying section 18 than the detection end 14 is. The common potential may, for example, be a ground potential, or any other reference potential. When the current to be consumed by the DUT 200 changes quickly and an output current I_Pfrom the voltage supplying section 18 lags behind in responding to that change, the first capacitor 24 can supply the DUT 200 with a current to be consumed that amounts to this change.
The second capacitor 26 is arranged between the wire 12 and the common potential in series at a location closer to the DUT 200 than the first capacitor 24 is. The second capacitor 26 may, for example, be connected to the wire 12 at a location farther from the DUT 200 than the detection end 14 is.
Further, the second capacitor 26 has smaller capacitance than the first capacitor 24. The capacitance of the second capacitor 26 may be, for example, about 1/10 to 1/1000 of the capacitance of the first capacitor 24. When a high-frequency noise such as a ripple or the like gets superimposed on the wire 12, the second capacitor 26 can drop the noise to the common potential (for example, the ground potential). Accordingly, it is preferred that the second capacitor 26 be connected to the wire 12 at a location as close to the DUT 200 as possible.
The current detecting section 28 detects a current I_RMflowing through the wire 12, at a location that is closer to the DUT 200 than the first capacitor 24 is and farther from the DUT 200 than the second capacitor 26 is. That is, the current detecting section 28 detects the current I_RMflowing through the wire 12 at a location between the first capacitor 24 and the second capacitor 26.
Here, since the current detecting section 28 detects the current flowing through the wire 12 at the location closer to the DUT 200 than the first capacitor 24 is, it can detect a current, which is the sum of the current supplied from the voltage supplying section 18 to the DUT 200 and the current supplied from the first capacitor 24 to the DUT 200. That is, the current detecting section 28 can detect a current that coincides with a drive current I_DDto be supplied to the DUT 200. Accordingly, even in a case where the output voltage I_Pfrom the voltage supplying section 18 gets behind in responding to any change in the current to be consumed by the DUT 200 and hence the current to be consumed by the DUT 200 and the output current I_Pfrom the voltage supplying section 18 lose coincidence, the current detecting section 28 can correctly detect the drive current I_DDto be supplied to the DUT 200.
Note that the second capacitor 26 likewise supplies a current to the DUT 200 when the current to be consumed by the DUT 200 changes quickly. However, since the capacitance of the first capacitor 24 is larger than that of the second capacitor 26, the current to be supplied from the first capacitor 24 to the DUT 200 is larger than the current to be supplied from the second capacitor 26 to the DUT 200 (for example, about 10 times to 1000 times larger). Accordingly, the current I_RMflowing through the wire 12 between the first capacitor 24 and the second capacitor 26 can be said to be approximately the same as the drive current I_DDto be supplied to the DUT 200. Thus, the current detecting section 28 can correctly detect the drive current I_DDto be supplied to the DUT 200.
The current detecting section 28 may include, for example, a detection resistor 42 and a potential difference detecting section 44. The detection resistor 42 is arranged so as to intervene in the wire 12 at a location between the first capacitor 24 and the second capacitor 26 in series. The detection resistor 42 may be, for example, a minute resistor of about several milliohms. The potential difference detecting section 44 outputs a detection voltage V_Xwhich is proportional to the potential difference between both the ends of the detection resistor 42. Such a current detecting section 28 can output the detection voltage V_Xwhich is proportional to the current I_RMflowing through the wire 12 between the first capacitor 24 and the second capacitor 26.
Instead of the above, the current detecting section 28 may include a coil arranged intervening in the wire 12 at a location between the first capacitor 24 and the second capacitor 26 in series, and a detecting section which detects the current flowing through that coil. Such a current detecting section 28 can also detect the current I_RMflowing through the wire 12 between the first capacitor 24 and the second capacitor 26.
The integrating section 30 outputs an integration value obtained by integrating the difference between the current I_RMdetected by the current detecting section 28 and the predetermined reference current I_REF. For example, the integrating section 30 may store the charges that correspond to the current indicating the difference between the current I_RMdetected by the current detecting section 28 and the predetermined reference current I_REF, in any capacity element. Then, for example, the integrating section 30 may output an integration voltage that occurs across both the ends of the capacity element in which the charges are stored, as the integration value. An example of a detailed configuration of the integrating section 30 will be explained with reference to FIG. 3.
Since this integrating section 30 integrates the difference between the current I_RMdetected by the current detecting section 28 and the reference current I_REF, it will output an integration value (integration voltage) which is larger than 0 in a case where the average current of the current I_RMis equal to or smaller than the reference current I_REF, and which is equal to or smaller than 0 in a case where the average current of the current I_RMis larger than the reference current I_REF. Here, the current I_RMdetected by the current detecting section 28 coincides with the drive current Idd to be supplied to the DUT 200. That is, the average current of the current I_RMcoincides with the average consumption current of the DUT 200. As known from this, the integrating section 30 can output an integration value (integration voltage) which is larger than 0 when the average consumption current of the DUT 200 is equal to or smaller than the reference current I_REFand which is equal to or smaller than 0 when the average consumption current of the DUT 200 is larger than the reference current I_REF.
The judging section 32 judges whether the DUT 200 is a pass or a failure based on the integration value output from the integrating section 30. The judging section 32 may judge whether the average consumption current of the DUT 200 is larger or not (or smaller or not) than the predetermined reference current I_REF, by, for example, comparing whether the integration value output from the integrating section 30 is larger or not (or smaller or not) than a predetermined threshold (for example, 0). The judging section 32 may, for example, output a judgment which indicates a pass (the average consumption current is equal to or smaller than the predetermined reference current I_REF) in a case where the integration value is positive, and which indicates a failure (the average consumption current is larger than the predetermined reference current I_REF) in a case where the integration value is negative.
The setting section 34 sets the integrating section 30 to be at the reference current I_REF, prior to a test. The setting section 34 may, for example, set the reference current I_REFaccording to the type, grade, or the like of the DUT 200, or the content of the test on the DUT 200 or the like. This allows the measurement apparatus 20 to judge, for example, whether the average consumption current of the DUT 200 exceeds an upper limit (or falls below a lower limit) designated as the specifications of the DUT 200.
The control section 36 controls the integration period of the integrating section 30. For example, the control section 36 controls the integrating section 30 to start integrating at a test start timing and controls the integrating section 30 to terminate integrating at a test end timing.
Further, in a case where the integrating section 30 stores the charges corresponding to the current indicating the difference between the current I_RMdetected by the current detecting section 28 and the reference current I_REFin the capacity element, the control section 36 may, prior to a test, discharge the charges stored in the current detecting section 28 in its capacity element to zero the charges from the capacity element. By doing so, the control section 36 can make a correct integration voltage be output from the integrating section 30.
Since the measurement apparatus 20 as described above stores the integration value, it has only one sampling value that should be retained and does not therefore have to have a data memory or the like. Further, this measurement apparatus 20 can correctly compare the average consumption current of the DUT 200 and the reference current I_REFeven when the current to be consumed by the DUT 200 fluctuates quickly. Furthermore, since the measurement apparatus 20 can be a simply-structured circuit to be able to measure the average consumption current of the DUT 200, a small apparatus scale will suffice even in a case where, for example, several-hundred DUTs 200 are to be tested at a time.
FIG. 3 shows one example of the configuration of the integrating section 30 and the judging section 32 according to the present embodiment. For example, the integrating section 30 may include an integrating circuit 50, a reference current source 52, a current letting-flow section 54, and a discharging section 56. Further, the judging section 32 may include a comparator 58, for example.
The integrating circuit 50 stores the charges corresponding to the current indicating the difference between the current I_RMdetected by the current detecting section 28 and the reference current I_REFin the capacity element, and outputs an integration voltage V_Mthat occurs across both the ends of the capacity element as an integration value. For example, the integrating circuit 50 may include an operating amplifier 60 and an integrating capacitor 62. The operating amplifier 60 has its non-inverting input terminal connected to the common potential. The integrating capacitor 62 is connected between the output terminal and inverting input terminal of the operating amplifier 60.
The integrating circuit 50 having this configuration stores charges corresponding to an input current input to the inverting input terminal of the operating amplifier 60 in the integrating capacitor 62. Then, the integrating circuit 50 can output the integration voltage V_Mthat occurs across both the ends of the integrating capacitor 62 in which the charges are stored. Note that the integrating circuit 50 outputs the integration voltage V_M, which has been inverted in positive/negative characteristic from the result of integrating the input current.
The reference current source 52 gets the reference current I_REFto flow out from the inverting input terminal of the operating amplifier 60. The current letting-flow section 54 makes the current I_RMdetected by the current detecting section 28 flow into the inverting input terminal of the operating amplifier 60. Accordingly, the reference current source 52 and the current letting-flow section 54 can supply the current indicating the difference obtained by subtracting the reference current I_REFfrom the current I_RMdetected by the current detecting section 28 to the inverting input terminal of the operating amplifier 60 as an input current thereto.
The reference current source 52 may, for example, include a first voltage follower circuit 64 and a first reference resistor 66. The first voltage follower circuit 64 has its input terminal supplied with a reference voltage −V_REFfrom the setting section 34 and outputs a voltage equal to the reference voltage −V_REFfrom its output terminal. The first reference resistor 66 is connected between the output terminal of the first voltage follower circuit 64 and the inverting input terminal of the operating amplifier 60, and has a predetermined resistance value R_REF1. The reference current source 52 having this configuration can make the reference current I_REF(=V_REF/R_REF1), which is obtained by dividing the reference voltage V_REFby the resistance value R_REF1, flow out from the inverting input terminal of the operating amplifier 60.
The current letting-flow section 54 may, for example, include a second voltage follower circuit 68 and a second reference resistor 70. The second voltage follower circuit 68 has its input terminal supplied with the detection voltage V_Xfrom the current detecting section 28 and outputs a voltage equal to the detection voltage V_Xfrom its output terminal. The second reference resistor 70 is connected between the output terminal of the second voltage follower circuit 68 and the inverting input terminal of the operating amplifier 60, and has a predetermined resistance value R_REF2. The current letting-flow section 54 having this configuration can make the current I_RM(−V_X/R_REF2), which is obtained by dividing the detection voltage V_Xby the resistance value R_REF2, flow into the inverting input terminal of the operating amplifier 60. The resistance value R_REF2may, for example, be determined beforehand based on the relationship between the detection voltage V_Xfrom the current detecting section 28 and the current I_RMflowing through the wire 12.
The discharging section 56 discharges the charges stored in the integrating capacitor 62 of the integrating circuit 50 prior to a test. For example, the discharging section 56 may include a discharging switch 72, a first switch 74, and a second switch 76. The discharging switch 72 causes a short circuit across both the ends of the integrating capacitor 62 in discharging the integrating capacitor 62. Further, the discharging switch 72 opens both the ends of the integrating capacitor 62 during a test.
The first switch 74 connects the input terminal of the first voltage follower circuit 64 to the common potential in the discharging operation. The first switch 74 connects the input terminal of the first voltage follower circuit 64 to the reference voltage −V_REFduring a test. The second switch 76 connects the input terminal of the second voltage follower circuit 68 to the common potential in the discharging operation. The second switch 76 connects the input terminal of the second voltage follower circuit 68 to the detection voltage V_Xduring a test.
The discharging section 56 having this configuration can discharge the charges stored in the integrating circuit 50 in the discharging operation. Also, the discharging section 56 can store the charges corresponding to the current indicating the difference between the current I_RMdetected by the current detecting section 28 and the reference current I_REFin the integrating circuit 50 during a test.
The comparator 58 compares the integration voltage V_Moutput from the integrating circuit 50 with the common potential (for example, the ground potential), and outputs a judgment corresponding to the result of comparison. That is, the comparator 58 can detect whether the integration voltage V_Moutput from the integrating circuit 50 is positive or negative, and output a judgment corresponding to whether it is positive or negative.
For example, in a case where the integration voltage V_Mis positive (for example, equal to or larger than 0), the comparator 58 may judge that the average consumption current of the DUT 200 is equal to or smaller than the predetermined reference current I_REFand hence output a pass judgment. Further, for example, in a case where the integration voltage V_Mis negative (for example, smaller than 0), the comparator 58 may judge that the average consumption current of the DUT 200 is larger than the predetermined reference current I_REFand output a failure judgment. As such, since the comparator 58 needs only to detect the positive or negative characteristic of the integration voltage V_Moutput from the integrating circuit 50, judging whether a pass or a failure is available with a simple configuration.
FIG. 4 shows one example of the drive current Idd to be supplied to the DUT 200 during a test (which is equal to the current to be consumed by the DUT 200). For example, the test apparatus 10 may control the DUT 200 to operate during a test such that a drive current Idd as shown in FIG. 4 flows through the DUT 200.
That is, the test apparatus 10 may control the DUT 200 to operate during a test such that the drive current Idd switches between 0.50 A and 1.00 A within a 4 μs period (with a duty ratio of 50%) as shown in FIG. 4. As a result, the average consumption current of the DUT 200 after the time (0 μs) is 0.75 A. In the example of FIG. 4, prior to the time (0 μs), the test apparatus 10 controls the DUT 200 to operate such that the average consumption current is 0.50 A.
FIG. 5 shows a result of simulating the output current I_Poutput from the voltage supplying section 18 in a case where the DUT 200 is controlled to operate as shown in FIG. 4. FIG. 5 shows a simulation result under a regulated condition that the first capacitor 24 is 330° F., the second capacitor 26 is 1 μF, a wire resistance from the voltage supplying section 18 to the detection end 14 is 5 mΩ, a wire resistance from the detection end 14 to the DUT 200 is 5 mΩ, and the voltage value of the detection end 14 is 1.20V. FIG. 6 to FIG. 9 show simulation results obtained under the same condition.
As shown in FIG. 5, the voltage supplying section 18 outputs an output current I_Pwhich does not timely respond to the average consumption current of the DUT 200. Specifically, the voltage supplying section 18 outputs an output current I_Pwhich will reach the average consumption current (0.75 A) of the DUT 200 at a time 200 μs.
FIG. 6 shows a result of simulating the drive voltage Vdd in a case where the DUT 200 is controlled to operate as shown in FIG. 4. The voltage supplying section 18 reduces its output voltage during a period in which it increases its output current I_P. Then, the voltage supplying section 18 returns the output voltage to its original after the output voltage I_Pgets stabilized. Accordingly, the drive voltage Vdd gradually decreases until before the output current I_Pbecomes stabilized (time 0 μs to time 200 μs) and gradually increases after the output current I_Pbecomes stabilized (after time 200 μs), as shown in FIG. 6.
FIG. 7 shows a result of simulating a current I_CL1which flows through the first capacitor 24 in a case where the DUT 200 is controlled to operate as shown in FIG. 4. The current I_CL1which flows through the first capacitor 24 changes its amplitude in synchronization with the fluctuations of the drive current Idd.
In a case where the output current I_Plags behind in responding to a change in the average consumption current of the DUT 200, the first capacitor 24 supplies a current to fill the shortage, which is the difference obtained by subtracting the output current I_Pfrom the average consumption current, to the DUT 200. Accordingly, during the period in which the voltage supplying section 18 increases the output current I_P(before time 200 μs), the average value of the current I_CL1takes a negative value. After the time at which the output current I_Pbecomes stabilized (after time 200 μs), the average value of the current I_CL1increases from a negative value toward 0.
FIG. 8 shows a result of simulating a current I_CL2which flows through the second capacitor 26 in a case where the DUT 200 is controlled to operate as shown in FIG. 4. The current I_CL2which flows through the first capacitor 24 changes its amplitude in synchronization with the fluctuations of the drive current Idd. However, since the second capacitor 26 has much smaller capacitance than that of the first capacitor 24, it cannot supply a current enough to fill the shortage, which is the difference obtained by subtracting the output current I_Pfrom the average consumption current, to the DUT 200. Hence, the average value of the current I_CL2takes 0 even when any change occurs in the average consumption current of the DUT 200.
FIG. 9 shows a result of simulating the current I_RMwhich flows through the wire 12 between the first capacitor 24 and the second capacitor 26 in a case where the DUT 200 is controlled to operate as shown in FIG. 4. As shown in FIG. 9, the average value of the current I_RMis 0.75 A all the time. That is, even during the period in which the voltage supplying section 18 increases the output current I_P(before time 200 μs), the average value of the current I_RMcoincides with the average consumption current of the DUT 200.
The test apparatus 10 judges whether the average consumption current of the DUT 200 is larger than the predetermined reference current I_REFor not, based on the integration value obtained by integrating the difference between the current I_RMflowing through the wire 12 between the first capacitor 24 and the second capacitor 26 and the reference current I_REF. Accordingly, the test apparatus 10 can accurately judge whether the average consumption current of the DUT 200 is larger than the reference current I_REFor not at all the times.
FIG. 10 shows the configuration of the test apparatus 10 according to a first modification of the present embodiment, together with the DUT 200. FIG. 11 shows one example of a reference current I_REFwhich is set by a search section 82 of the test apparatus 10 according to the first modification. The test apparatus 10 according to the present modification has generally the same functions and configuration as those of the test apparatus 10 shown in FIG. 1, so those members that have generally the same configuration and function as those of the members shown in FIG. 1 will be denoted by the same reference numerals in the drawing and explanation for such members will be omitted but for any differences.
The test apparatus 10 according to the present modification may further comprise a search section 82. In the present modification, the CPU in the system control device 23 executes a measuring program for measuring the current value of a current flowing through a wire, and hence makes the system control device 23 function as the search section 82. The search section 82 varies the reference current I_REFfrom test to test based on the judgment produced in the previous test by using a binary search method, and determines the current value (absolute value) of the current I_RMflowing through the wire 12.
To be more specific, the search section 82 first sets the reference current I_REF, which takes the center value of a measurement range, which is a range of current values to be measured. Then, the search section 82 makes the test apparatus 10 perform the test. That is, the search section 82 makes the test apparatus 10 judge whether the average consumption current of the DUT 200 is larger than the reference current I_REFor not.
Subsequently, the search section 82 determines to which of the upper and lower ranges within the measurement range that are divided at the level of the reference current I_REFthe current I_RMflowing through the wire 12 belongs. Then, the search section 82 sets the range determined to include the current I_RMas a new measurement range, and sets a new reference current I_REF, which takes the center value of the new measurement range. Then, the search section 82 repeats the above process plural times and narrows down the range to which the current I_RMflowing through the wire 12 belongs to determine the current value (absolute value) of the current I_RMflowing through the wire 12.
As shown in FIG. 11 for example, the search section 82, for example, first sets the center of a first measurement range (for example, 0 A to 1 A) to be the reference current I_REF(for example, 0.5 A). Then, the search section 82 makes the test apparatus 10 perform a first test. The search section 82 determines to which of a lower range (0 A to 0.5 A) and an upper range (0.5 A to 1 A), which are obtained by dividing the measurement range to upper and lower parts at the reference current I_REF, the current I_RMflowing through the wire 12 belongs, based on the judgment (a pass or a failure) obtained from the first test. In the present example, the first test turns out a failure judgment and hence the search section 82 determines that the current I_RMbelongs to the upper range (0.5 A to 1 A).
Then, the search section 82 sets the determined range (0.5 A to 1 A) as a new measurement range, and sets a new reference current I_REF(for example, 0.75 A), which takes the center value of the new measurement range. Then, the search section 82 makes the test apparatus 10 perform a second test and repeats the same process as that in the first test.
The search section 82 do the same things for the third test and thereafter. Then, the search section 82 narrows down the range to which the current I_RMbelongs, and ultimately determines the current value of the current I_RM. As obvious from the above, the test apparatus 10 according to the present modification can measure the absolute value of the average consumption current of the DUT 200.
FIG. 12 shows the configuration of the measurement apparatus 20 according to a second modification of the present embodiment, together with the DUT 200. The measurement apparatus 20 according to the present modification has generally the same functions and configuration as those of the measurement apparatus 20 shown in FIG. 2, and thus those members that have generally the same configuration and function as those of the members shown in FIG. 2 will be denoted by the same reference numerals in the drawing and explanation for such members will be omitted but for any differences.
The measurement apparatus 20 according to the present modification comprises a first integrating section 30-1, a second integrating section 30-2, a first judging section 32-1, a second judging section 32-2, and a selecting outputter 84 instead of the integrating section 30 and the judging section 32. Each of the first integrating section 30-1 and the second integrating section 30-2 stores charges corresponding to a current indicating the difference between the current I_RMdetected by the current detecting section 28 and the predetermined reference current I_REFin a capacity element, and outputs the integration voltage that occurs across both the ends of the capacity element. Each of the first integrating section 30-1 and the second integrating section 30-2 may, for example, have the configuration shown in FIG. 3.
The first judging section 32-1 judges whether the DUT 200 is a pass or a failure based on the integration voltage output from the first integrating section 30. The second judging section 32-2 judges whether the DUT 200 is a pass or a failure based on the integration voltage output from the second integrating section 30. Each of the first judging section 32-1 and the second judging section 32-2 may, for example, have the same configuration and function as those of the judging section 32. The selecting outputter 84 selects and outputs the judgment output from a designated one of the first judging section 32-1 and the second judging section 32-2.
The control section 36 controls the integration period and discharge period of the first integrating section 30-1 and second integrating section 30-2. Further, the control section 36 notifies the selecting outputter 84 of a designated one of the first judging section 32-1 and the second judging section 32-2 from which the judgment should be output.
Here, the control section 36 selects the first integrating section 30-1 and the second integrating section 30-2 alternately from test to test, such that the selected one stores charges and outputs an integration value. Then, the control section 36 controls the second integrating section 30-2 to discharge the stored charges while the first integrating section 30-1 is storing charges. Further, the control section 36 controls the first integrating section 30-1 to discharge the stored charges while the second integrating section 30-2 is storing charges.
The measurement apparatus 20 according to this modification can eliminate time in which no test can be performed for the purposes of discharging. Hence, the test apparatus 10 having this measurement apparatus 20 can shorten the time taken for tests.
One aspect of the present invention has been explained above using an embodiment, but the technical scope of the present invention is not limited to the scope described in the above embodiment. Various modifications or alterations can be made upon the above-described embodiment. It is obvious from the claims that any embodiment upon which such modifications or alterations are made can also be included in the technical scope of the present invention.

Claims

1. A test apparatus for testing a device under test, comprising:

a voltage supplying section which supplies a voltage to a device under test through a wire;

a first capacitor which is arranged between the wire and a common potential in series;

a current detecting section which detects a current flowing through the wire at a location which is closer to the device under test than the first capacitor is;

an integrating section which outputs an integration value obtained by integrating a difference between the current detected by the current detecting section and a predetermined reference current; and

a judging section which judges whether the device under test is a pass or a failure based on the integration value.

2. The test apparatus according to claim 1, further comprising a second capacitor which is arranged between the wire and the common potential in series at a location closer to the device under test than the first capacitor is, and which has capacitance smaller than that of the first capacitor,

wherein the current detecting section detects the current flowing through the wire at a location farther from the device under test than the second capacitor is.

3. The test apparatus according to claim 2,

wherein the judging section judges whether the device under test is a pass or a failure according to whether the integration value is positive or negative.

4. The test apparatus according to claim 3,

wherein the integrating section includes an integrating circuit which stores charges corresponding to a current indicating the difference between the current detected by the current detecting section and the reference current in a capacity element, and outputs an integration voltage that occurs across both ends of the capacity element as the integration value.

5. The test apparatus according to claim 4,

wherein the integrating circuit includes:

an operating amplifier whose non-inverting input terminal is connected to the common potential; and

an integrating capacitor which is connected between an output terminal and inverting input terminal of the operating amplifier, and

the integrating section further includes:

a reference current source which makes the reference current flow out from the inverting input terminal of the operating amplifier; and

a current letting-flow section which makes the current detected by the current detecting section flow into the inverting input terminal of the operating amplifier.

6. The test apparatus according to claim 4,

wherein the integrating section further includes a discharging section which discharges the charges stored in the integrating circuit prior to a test.

7. The test apparatus according to claim 6, further comprising:

the integrating section as a first integrating section, and one more of the integrating section as a second integrating section; and

a control section which controls the second integrating section to discharge the stored charges while the first integrating section is storing the charges.

8. The test apparatus according to claim 1, further comprising a search section which repeats a process of determining, based on a judgment obtained when a reference current is set within a measurement range, to which of an upper range and a lower range obtained by dividing the measurement range at the reference current the current flowing through the wire belongs, and setting the range, to which it is determined that the current flowing through the wire belongs, as a new one of the measurement range to set a new one of the reference current within the new measurement range, thereby to narrow down the range to which the current flowing through the wire belongs and determine a current value of the current flowing through the wire.

9. The test apparatus according to claim 1, further comprising a system control device,

wherein the system control device executes a measuring program for measuring a current value of the current flowing through the wire, thereby to repeat a process of determining, based on a judgment obtained when a reference current is set within a measurement range, to which of an upper range and a lower range obtained by dividing the measurement range at the reference current the current flowing through the wire belongs, and setting the range, to which it is determined that the current flowing through the wire belongs, as a new one of the measurement range to set a new one of the reference current within the new measurement range, thereby to narrow down the range to which the current flowing through the wire belongs and determine a current value of the current flowing through the wire.

10. A measurement apparatus for measuring a current flowing through a load, comprising:

a first capacitor which is arranged between a wire for supplying a voltage to the load and a common potential in series;

a current detecting section which detects a current flowing through the wire at a location closer to the load than the first capacitor is; and

an integrating section which outputs an integration value obtained by integrating a difference between the current detected by the current detecting section and a predetermined reference current.