US20080095651A1 - Diaphragm pump and thin channel structure - Google Patents
Diaphragm pump and thin channel structure Download PDFInfo
- Publication number
- US20080095651A1 US20080095651A1 US11/872,225 US87222507A US2008095651A1 US 20080095651 A1 US20080095651 A1 US 20080095651A1 US 87222507 A US87222507 A US 87222507A US 2008095651 A1 US2008095651 A1 US 2008095651A1
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- United States
- Prior art keywords
- channel
- plate
- outlet
- inlet
- inlet channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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- 239000007788 liquid Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 description 7
- 239000012530 fluid Substances 0.000 description 4
- 238000005086 pumping Methods 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910020294 Pb(Zr,Ti)O3 Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
- F04B53/1065—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its centre
Definitions
- the present invention relates to a diaphragm pump using a vibrating diaphragm to produce a pumping action, and in particular, to a diaphragm pump and a thin channel structure that can be reduced in size and thickness.
- a diaphragm pump piezoelectric pump
- a notebook PC has a limited space for storing parts, so a smaller and thinner pump is increasingly demanded.
- a technique for providing such a pump is disclosed in, for example, U.S. Patent Application Publication No. 2005-0231914 A1 and Japanese Unexamined Patent Application Publication Nos. 2005-229038 and 2005-282386.
- an inlet port and an outlet port for a piezoelectric pump are each formed as a protrusion protruding from a housing, and a flexible tube is used as a duct connected to both ports.
- the inlet and outlet ports as a protrusion and the structure of connection including the tube connected to both ports and its surroundings prevent size and thickness reduction in the entire system, even when the piezoelectric pump is reduced in size and thickness in itself.
- the present invention provides a diaphragm pump that has a duct structure capable of connecting a duct to an inlet port and an outlet port without using a tube.
- a diaphragm pump includes a vibrating diaphragm, an inlet channel hole in which an inlet check valve is disposed, an outlet channel hole in which an outlet check valve is disposed, an inlet channel, and an outlet channel.
- the diaphragm is supported between a pair of housings, has a sealed edge to prevent leakage of liquid, and forms a pump chamber.
- the inlet channel hole and the outlet channel hole are formed through at least a first housing of the pair of housings so as to communicate with the pump chamber.
- the inlet channel has a first inlet channel plate and a second inlet channel plate laminated together with the first inlet channel plate.
- the first inlet channel plate includes a tubular protrusion communicating with the inlet channel hole.
- the second inlet channel plate forms an inlet channel communicating with the tubular protrusion.
- the outlet channel has a first outlet channel plate and a second outlet channel plate laminated together with the first outlet channel plate.
- the first outlet channel plate includes a tubular protrusion communicating with the outlet channel hole.
- the second outlet channel plate forms an outlet channel communicating with the tubular protrusion.
- the inlet channel hole and the outlet channel hole may be substantially parallel to each other.
- the first inlet channel plate and the first outlet channel plate may be made of a single plate material, and the second inlet channel plate and the second outlet channel plate may be made of a single plate material. Therefore, the number of parts can be reduced, and assembly can be facilitated.
- a thin channel structure includes a channel block in which a channel hole is formed, a first plate having a tubular protrusion communicating with the channel hole of the channel block, and a second plate laminated together with the first plate and forming a liquid channel communicating with the tubular protrusion.
- FIG. 1 is a plan view of a piezoelectric pump to which the disclosed structure is applied, with a part of the surface being removed to show the inside thereof.
- FIG. 2 is a cross-sectional view taken along the line II-II in FIG. 1 .
- FIG. 3 is an exploded perspective view of the piezoelectric pump.
- the disclosed pump is applied to a two-valve piezoelectric pump 20 .
- the piezoelectric pump 20 includes a lower housing 21 and an upper housing 22 in sequence from the bottom.
- the lower housing 21 has an inlet channel hole 24 and an outlet channel hole 25 for allowing cooling water (liquid) to pass therethrough.
- the inlet channel hole 24 and the outlet channel hole 25 are substantially perpendicular to the through-thickness plane of the lower housing 21 and are preferably substantially parallel to each other.
- a piezoelectric vibrator (diaphragm) 28 is supported between the lower housing 21 and the upper housing 22 via an O ring 29 so as to be sealed against leakage of liquid.
- a pump chamber P is formed between the piezoelectric vibrator 28 and the lower housing 21 .
- An air chamber A is formed between the piezoelectric vibrator 28 and the upper housing 22 .
- the axis of the inlet channel hole 24 and that of the outlet channel hole 25 are preferably substantially perpendicular to the piezoelectric vibrator 28 .
- the piezoelectric vibrator 28 may be of a unimorph type and may have a central shim 28 a and a piezoelectric element 28 b laminated on one of both sides of the shim 28 a (in FIG. 2 , on the upper surface).
- the shim 28 a is made of a conductive metal sheet, for example, a metal sheet having a thickness of approximately about 50 ⁇ m to about 300 ⁇ m made of stainless steel, 42 alloy, or other materials.
- the piezoelectric element 28 b is made of lead zirconate titanate (PZT) (Pb(Zr,Ti)O 3 ) and has a thickness of the order of about 300 ⁇ m.
- the piezoelectric element 28 b is poled in the direction of both sides thereof. Such a piezoelectric vibrator is well known.
- the inlet channel hole 24 and the outlet channel hole 25 of the lower housing 21 are provided with (umbrella) check valves 32 and 33 , respectively.
- the check valve 32 is disposed adjacent to the pump chamber P and is an inlet check valve for permitting a fluid to flow from the inlet channel hole 24 to the pump chamber P and preventing reverse flow of the fluid.
- the check valve 33 is disposed adjacent to the outlet channel and is an outlet check valve for permitting a fluid to flow from the pump chamber P to the outlet channel hole 25 and preventing reverse flow of the fluid.
- the check valves 32 and 33 have the same form.
- the check valves 32 and 33 have perforated substrates 32 a and 33 a and elastic umbrellas 32 b and 33 b attached thereto, respectively.
- Such umbrella check valves are well known.
- the perforated substrates 32 a and 33 a are separated from the lower housing 21 . However, they may be integrally molded with the lower housing 21 .
- the lower housing 21 has the inlet channel hole 24 and the outlet channel hole 25 , as described above.
- the inlet channel hole 24 and the outlet channel hole 25 are connected to an inlet channel 26 and an outlet channel 27 , respectively. Both the inlet channel 26 and the outlet channel 27 are formed by a first channel plate 40 and a second channel plate 50 .
- the lower housing 21 includes annular grooves 24 a and 25 a whose outer surfaces are opened (see FIG. 2 ).
- the annular grooves 24 a and 25 a are concentric with the inlet channel hole 24 and the outlet channel hole 25 , respectively.
- the annular grooves 24 a and 25 a may be eccentric as needed.
- the first channel plate 40 serves as both a first channel plate for the inlet side and that for the outlet side and is formed as a plate in which both the first channel plates are integrated with each other.
- the first channel plate 40 includes an inlet tubular protrusion 41 to be fit in the annular groove 24 a , an outlet tubular protrusion 42 to be fit in the annular groove 25 a , an inlet channel recess 43 communicating with the inlet tubular protrusion 41 , an outlet channel recess 44 communicating with the outlet tubular protrusion 42 , and a partition 45 separating the inlet channel recess 43 and the outlet channel recess 44 .
- the second channel plate 50 serves as both a second channel plate for the inlet side and that for the outlet side and is formed as a plate in which both the second channel plates are integral with each other, as in the case of the first channel plate 40 .
- the second channel plate 50 includes an inlet channel recess 53 (which corresponds to the inlet channel recess 43 in the first channel plate 40 ), an outlet channel recess 54 (which corresponds to the outlet channel recess 44 ), and a partition 55 (which corresponds to the partition 45 ).
- the first channel plate 40 and the second channel plate 50 are joined together by joining of a joint surface 46 including the partition 45 and a joint surface 56 including the partition 55 by, for example, brazing using solder, thereby forming the inlet channel 26 extending to the inlet tubular protrusion 41 and the outlet channel 27 extending to the outlet tubular protrusion 42 .
- Each of the first channel plate 40 and the second channel plate 50 is constructed of a sheet made of, for example, aluminum, copper, or stainless steel and having a thickness of approximately 0.1 mm to 0.3 mm, and the thickness of the channel is equal to or smaller than 1 mm. Therefore, the thickness of the entire pump can be reduced.
- the inlet channel 26 and the outlet channel 27 are noncircular in cross section.
- the inlet channel 26 has a flat shape that has a greater width in a direction substantially perpendicular to the protruding direction of the inlet tubular protrusion 41 .
- the outlet channel 27 has flat shape that has a greater width in a direction substantially perpendicular to the protruding direction of the outlet tubular protrusion 42 .
- One of the outlet channel recesses 44 and 54 may be omitted such that only one of the first channel plate 40 and the second channel plate 50 has an outlet channel recess.
- the inlet tubular protrusion 41 is fit into the annular groove 24 a such that an O ring 47 is disposed between the outer surface of the inlet tubular protrusion 41 and the inner surface of the annular groove 24 a .
- the outlet tubular protrusion 42 is fit into the annular groove 25 a such that an O ring 57 is disposed between the outer surfaces of the outlet tubular protrusion 42 and the inner surface of the annular groove 25 a . This maintains sealing to prevent leakage of liquid.
- the inlet tubular protrusion 41 and the outlet tubular protrusion 42 include internal flanges 41 a and 42 a at the respective ends such that the inlet tubular protrusion 41 and the outlet tubular protrusion 42 are mechanically strengthened to avoid both protrusions from becoming flattened easily.
- the internal flanges 41 a and 42 a project toward the inside of the end of the inlet tubular protrusion 41 and that of the outlet tubular protrusion 42 , respectively.
- the internal flanges 41 a and 42 a may outwardly project. In this case, the O rings 47 and 57 are prevented from falling when the lower housing 21 and the first channel plate 40 are attached or detached from each other.
- both the channel from the inlet channel 26 to the pump chamber P and the channel from the pump chamber P to the outlet channel 27 are formed by the first channel plate 40 and the second channel plate 50 , and the first channel plate 40 includes the inlet tubular protrusion 41 and the outlet tubular protrusion 42 , which are fit in the annular grooves 24 a and 25 a being concentric with the inlet channel hole 24 and the outlet channel hole 25 , respectively.
- the size and the thickness of the entire system can be reduced. That is, the lower housing 21 and the upper housing 22 do not have a protrusion for connecting the pump chamber P to the inlet channel 26 and the outlet channel 27 , and a flexible tube also is not present.
- the first channel plate 40 and the second channel plate 50 form both the inlet and outlet channels.
- the first channel plate and the second channel plate can be provided for each of the inlet channels and the outlet channels, i.e., the first channel plate 40 and the second channel plate 50 can be separated by the partition 45 and the partition 55 , respectively, into different portions.
- the arrangement of the inlet channel hole 24 and the outlet channel hole 25 and the orientations thereof can be designed more flexibly.
- the unimorph piezoelectric vibrator 28 is illustrated as a diaphragm.
- a bimorph piezoelectric vibrator can also be used.
- the present invention is applied to a two-valve diaphragm pump in which the pump chamber P is disposed on only one side of the piezoelectric vibrator 28 .
- the present invention is applicable to a diaphragm pump in which a pump chamber is disposed on each of both sides of a piezoelectric vibrator.
- the present invention is applicable to general diaphragm pumps, which produce a pumping action by causing the volume of a pump chamber to increase and decrease in cycles.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A diaphragm pump includes a duct structure capable of connecting an inlet port and an outlet port without using a tube. In the diaphragm pump, each of an inlet channel hole and an outlet channel hole is formed as a depression without the provision of inlet and outlet ports each formed as a protrusion on a housing, and a tubular protrusion provided on a plate forming a channel is fit in the depression.
Description
- This application claims benefit of the Japanese Patent Application No. 2006-285842 filed on Oct. 20, 2006, which is hereby incorporated by reference.
- 1. Field of the Invention
- The present invention relates to a diaphragm pump using a vibrating diaphragm to produce a pumping action, and in particular, to a diaphragm pump and a thin channel structure that can be reduced in size and thickness.
- 2. Description of the Related Art
- The applicant is developing a diaphragm pump (piezoelectric pump) for use as, for example, a cooling-water circulating pump for a water-cooled notebook personal computer (PC). A notebook PC has a limited space for storing parts, so a smaller and thinner pump is increasingly demanded. A technique for providing such a pump is disclosed in, for example, U.S. Patent Application Publication No. 2005-0231914 A1 and Japanese Unexamined Patent Application Publication Nos. 2005-229038 and 2005-282386.
- However, according to typical known techniques, an inlet port and an outlet port for a piezoelectric pump are each formed as a protrusion protruding from a housing, and a flexible tube is used as a duct connected to both ports. The inlet and outlet ports as a protrusion and the structure of connection including the tube connected to both ports and its surroundings prevent size and thickness reduction in the entire system, even when the piezoelectric pump is reduced in size and thickness in itself.
- The present invention provides a diaphragm pump that has a duct structure capable of connecting a duct to an inlet port and an outlet port without using a tube.
- According to a first aspect, a diaphragm pump includes a vibrating diaphragm, an inlet channel hole in which an inlet check valve is disposed, an outlet channel hole in which an outlet check valve is disposed, an inlet channel, and an outlet channel. The diaphragm is supported between a pair of housings, has a sealed edge to prevent leakage of liquid, and forms a pump chamber. The inlet channel hole and the outlet channel hole are formed through at least a first housing of the pair of housings so as to communicate with the pump chamber. The inlet channel has a first inlet channel plate and a second inlet channel plate laminated together with the first inlet channel plate. The first inlet channel plate includes a tubular protrusion communicating with the inlet channel hole. The second inlet channel plate forms an inlet channel communicating with the tubular protrusion. The outlet channel has a first outlet channel plate and a second outlet channel plate laminated together with the first outlet channel plate. The first outlet channel plate includes a tubular protrusion communicating with the outlet channel hole. The second outlet channel plate forms an outlet channel communicating with the tubular protrusion.
- In one embodiment, the inlet channel hole and the outlet channel hole may be substantially parallel to each other.
- In one embodiment, the first inlet channel plate and the first outlet channel plate may be made of a single plate material, and the second inlet channel plate and the second outlet channel plate may be made of a single plate material. Therefore, the number of parts can be reduced, and assembly can be facilitated.
- According to a second aspect of the present invention, a thin channel structure includes a channel block in which a channel hole is formed, a first plate having a tubular protrusion communicating with the channel hole of the channel block, and a second plate laminated together with the first plate and forming a liquid channel communicating with the tubular protrusion.
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FIG. 1 is a plan view of a piezoelectric pump to which the disclosed structure is applied, with a part of the surface being removed to show the inside thereof. -
FIG. 2 is a cross-sectional view taken along the line II-II inFIG. 1 . -
FIG. 3 is an exploded perspective view of the piezoelectric pump. - According to the present embodiment, the disclosed pump is applied to a two-valve
piezoelectric pump 20. As illustrated inFIGS. 1 to 3 , thepiezoelectric pump 20 includes alower housing 21 and anupper housing 22 in sequence from the bottom. - The
lower housing 21 has aninlet channel hole 24 and anoutlet channel hole 25 for allowing cooling water (liquid) to pass therethrough. Theinlet channel hole 24 and theoutlet channel hole 25 are substantially perpendicular to the through-thickness plane of thelower housing 21 and are preferably substantially parallel to each other. A piezoelectric vibrator (diaphragm) 28 is supported between thelower housing 21 and theupper housing 22 via anO ring 29 so as to be sealed against leakage of liquid. A pump chamber P is formed between thepiezoelectric vibrator 28 and thelower housing 21. An air chamber A is formed between thepiezoelectric vibrator 28 and theupper housing 22. According to the present embodiment, the axis of theinlet channel hole 24 and that of theoutlet channel hole 25 are preferably substantially perpendicular to thepiezoelectric vibrator 28. - The
piezoelectric vibrator 28 may be of a unimorph type and may have acentral shim 28 a and apiezoelectric element 28 b laminated on one of both sides of theshim 28 a (inFIG. 2 , on the upper surface). Theshim 28 a is made of a conductive metal sheet, for example, a metal sheet having a thickness of approximately about 50 μm to about 300 μm made of stainless steel, 42 alloy, or other materials. Thepiezoelectric element 28 b is made of lead zirconate titanate (PZT) (Pb(Zr,Ti)O3) and has a thickness of the order of about 300 μm. Thepiezoelectric element 28 b is poled in the direction of both sides thereof. Such a piezoelectric vibrator is well known. - The
inlet channel hole 24 and theoutlet channel hole 25 of thelower housing 21 are provided with (umbrella) 32 and 33, respectively. Thecheck valves check valve 32 is disposed adjacent to the pump chamber P and is an inlet check valve for permitting a fluid to flow from theinlet channel hole 24 to the pump chamber P and preventing reverse flow of the fluid. Thecheck valve 33 is disposed adjacent to the outlet channel and is an outlet check valve for permitting a fluid to flow from the pump chamber P to theoutlet channel hole 25 and preventing reverse flow of the fluid. - The
32 and 33 have the same form. Thecheck valves 32 and 33 have perforatedcheck valves 32 a and 33 a andsubstrates 32 b and 33 b attached thereto, respectively. Such umbrella check valves are well known. In the present embodiment, theelastic umbrellas 32 a and 33 a are separated from theperforated substrates lower housing 21. However, they may be integrally molded with thelower housing 21. - According to the present embodiment, the
lower housing 21 has theinlet channel hole 24 and theoutlet channel hole 25, as described above. In addition, theinlet channel hole 24 and theoutlet channel hole 25 are connected to aninlet channel 26 and anoutlet channel 27, respectively. Both theinlet channel 26 and theoutlet channel 27 are formed by afirst channel plate 40 and asecond channel plate 50. Thelower housing 21 includes 24 a and 25 a whose outer surfaces are opened (seeannular grooves FIG. 2 ). The 24 a and 25 a are concentric with theannular grooves inlet channel hole 24 and theoutlet channel hole 25, respectively. The 24 a and 25 a may be eccentric as needed. Theannular grooves first channel plate 40 serves as both a first channel plate for the inlet side and that for the outlet side and is formed as a plate in which both the first channel plates are integrated with each other. Thefirst channel plate 40 includes an inlettubular protrusion 41 to be fit in theannular groove 24 a, an outlettubular protrusion 42 to be fit in theannular groove 25 a, an inlet channel recess 43 communicating with the inlettubular protrusion 41, an outlet channel recess 44 communicating with the outlettubular protrusion 42, and apartition 45 separating theinlet channel recess 43 and the outlet channel recess 44. - The
second channel plate 50 serves as both a second channel plate for the inlet side and that for the outlet side and is formed as a plate in which both the second channel plates are integral with each other, as in the case of thefirst channel plate 40. Thesecond channel plate 50 includes an inlet channel recess 53 (which corresponds to the inlet channel recess 43 in the first channel plate 40), an outlet channel recess 54 (which corresponds to the outlet channel recess 44), and a partition 55 (which corresponds to the partition 45). Thefirst channel plate 40 and thesecond channel plate 50 are joined together by joining of ajoint surface 46 including thepartition 45 and ajoint surface 56 including thepartition 55 by, for example, brazing using solder, thereby forming theinlet channel 26 extending to the inlettubular protrusion 41 and theoutlet channel 27 extending to the outlettubular protrusion 42. Each of thefirst channel plate 40 and thesecond channel plate 50 is constructed of a sheet made of, for example, aluminum, copper, or stainless steel and having a thickness of approximately 0.1 mm to 0.3 mm, and the thickness of the channel is equal to or smaller than 1 mm. Therefore, the thickness of the entire pump can be reduced. Theinlet channel 26 and theoutlet channel 27 are noncircular in cross section. Theinlet channel 26 has a flat shape that has a greater width in a direction substantially perpendicular to the protruding direction of the inlettubular protrusion 41. Similarly, theoutlet channel 27 has flat shape that has a greater width in a direction substantially perpendicular to the protruding direction of the outlettubular protrusion 42. One of the outlet channel recesses 44 and 54 may be omitted such that only one of thefirst channel plate 40 and thesecond channel plate 50 has an outlet channel recess. - The inlet
tubular protrusion 41 is fit into theannular groove 24 a such that anO ring 47 is disposed between the outer surface of the inlettubular protrusion 41 and the inner surface of theannular groove 24 a. Similarly, the outlettubular protrusion 42 is fit into theannular groove 25 a such that anO ring 57 is disposed between the outer surfaces of the outlettubular protrusion 42 and the inner surface of theannular groove 25 a. This maintains sealing to prevent leakage of liquid. The inlettubular protrusion 41 and the outlettubular protrusion 42 include 41 a and 42 a at the respective ends such that the inletinternal flanges tubular protrusion 41 and the outlettubular protrusion 42 are mechanically strengthened to avoid both protrusions from becoming flattened easily. In the present embodiment, the 41 a and 42 a project toward the inside of the end of the inletinternal flanges tubular protrusion 41 and that of the outlettubular protrusion 42, respectively. However, the 41 a and 42 a may outwardly project. In this case, the O rings 47 and 57 are prevented from falling when theinternal flanges lower housing 21 and thefirst channel plate 40 are attached or detached from each other. - For the
piezoelectric pump 20 having the above described structure, when thepiezoelectric vibrator 28 is elastically deformed (vibrated) in forward and reverse directions, on a stroke for increasing the volume of the pump chamber P, because theinlet check valve 32 is opened and theoutlet check valve 33 is closed, liquid flows from theinlet channel 26 and theinlet channel hole 24 into the pump chamber P; on a stroke for reducing the volume of the pump chamber P, because theoutlet check valve 33 is opened and theinlet check valve 32 is closed, the liquid flows from the pump chamber P to theoutlet channel hole 25 and theoutlet channel 27. Therefore, a pumping action is produced by continuously causing thepiezoelectric vibrator 28 to be elastically deformed (vibrated) in forward and reverse directions. - In the present embodiment, both the channel from the
inlet channel 26 to the pump chamber P and the channel from the pump chamber P to theoutlet channel 27 are formed by thefirst channel plate 40 and thesecond channel plate 50, and thefirst channel plate 40 includes the inlettubular protrusion 41 and the outlettubular protrusion 42, which are fit in the 24 a and 25 a being concentric with theannular grooves inlet channel hole 24 and theoutlet channel hole 25, respectively. As a result, the size and the thickness of the entire system can be reduced. That is, thelower housing 21 and theupper housing 22 do not have a protrusion for connecting the pump chamber P to theinlet channel 26 and theoutlet channel 27, and a flexible tube also is not present. - In the embodiment described above, the
first channel plate 40 and thesecond channel plate 50 form both the inlet and outlet channels. However, the first channel plate and the second channel plate can be provided for each of the inlet channels and the outlet channels, i.e., thefirst channel plate 40 and thesecond channel plate 50 can be separated by thepartition 45 and thepartition 55, respectively, into different portions. In this case, the arrangement of theinlet channel hole 24 and theoutlet channel hole 25 and the orientations thereof can be designed more flexibly. - In the embodiment described above, the unimorph
piezoelectric vibrator 28 is illustrated as a diaphragm. However, a bimorph piezoelectric vibrator can also be used. In the embodiment described above, the present invention is applied to a two-valve diaphragm pump in which the pump chamber P is disposed on only one side of thepiezoelectric vibrator 28. However, the present invention is applicable to a diaphragm pump in which a pump chamber is disposed on each of both sides of a piezoelectric vibrator. In addition, the present invention is applicable to general diaphragm pumps, which produce a pumping action by causing the volume of a pump chamber to increase and decrease in cycles.
Claims (8)
1. A diaphragm pump comprising:
a vibrating diaphragm supported between a pair of housings, having a sealed edge to prevent leakage of liquid, and forming a pump chamber;
an inlet channel hole in which an inlet check valve is disposed and an outlet channel hole in which an outlet check valve is disposed, the inlet channel hole and the outlet channel hole being formed through at least a first housing of the pair of housings so as to communicate with the pump chamber;
an inlet channel having a first inlet channel plate and a second inlet channel plate laminated together with the first inlet channel plate, the first inlet channel plate including a tubular protrusion communicating with the inlet channel hole, the second inlet channel plate forming an inlet channel communicating with the tubular protrusion; and
an outlet channel having a first outlet channel plate and a second outlet channel plate laminated together with the first outlet channel plate, the first outlet channel plate including a tubular protrusion communicating with the outlet channel hole, the second outlet channel plate forming an outlet channel communicating with the tubular protrusion.
2. The diaphragm pump according to claim 1 , wherein the inlet channel hole and the outlet channel hole are substantially parallel to each other.
3. The diaphragm pump according to claim 1 , wherein the first inlet channel plate and the first outlet channel plate are made of a single plate material, and the second inlet channel plate and the second outlet channel plate are made of a single plate material.
4. The diaphragm pump according to claim 1 , wherein the first housing includes an annular groove used for receiving each of the tubular protrusions and being concentric with the each of the inlet channel hole and the outlet channel hole, and an O ring is disposed between an inner surface of the annular groove and an outer surface of the tubular protrusion fit in the annular groove.
5. The diaphragm pump according to claim 1 , wherein each of the tubular protrusions has a flange at an end thereof.
6. The diaphragm pump according to claim 1 , wherein each of the inlet channel and the outlet channel is non-circular in cross section, the inlet channel has a flat shape that has a greater width in a direction substantially perpendicular to a protruding direction of the tubular protrusion of the first inlet channel plate, and the outlet channel has a flat shape that has a greater width in a direction substantially perpendicular to a protruding direction of the tubular protrusion of the first outlet channel plate.
7. The diaphragm pump according to claim 1 , wherein the diaphragm is a piezoelectric vibrator in which a piezoelectric element is disposed on at least one of both sides of a shim made of a conductive metal sheet.
8. A thin channel structure comprising:
a channel block in which a channel hole is formed;
a first plate having a tubular protrusion communicating with the channel hole of the channel block; and
a second plate laminated together with the first plate and forming a liquid channel communicating with the tubular protrusion.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006-285842 | 2006-10-20 | ||
| JP2006285842A JP4405997B2 (en) | 2006-10-20 | 2006-10-20 | Diaphragm pump and low-profile channel structure of diaphragm pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20080095651A1 true US20080095651A1 (en) | 2008-04-24 |
Family
ID=39318107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US11/872,225 Abandoned US20080095651A1 (en) | 2006-10-20 | 2007-10-15 | Diaphragm pump and thin channel structure |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20080095651A1 (en) |
| JP (1) | JP4405997B2 (en) |
| TW (1) | TW200821470A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102678534A (en) * | 2011-10-27 | 2012-09-19 | 蔡应麟 | Tunnel pump head cover of constant pressure diaphragm pump |
| CN103968103A (en) * | 2010-02-03 | 2014-08-06 | 凯希特许有限公司 | Singulation of valves |
| US9169837B2 (en) | 2010-12-21 | 2015-10-27 | Pentair Flow Technologies, Llc | Diaphragm pump and motor system and method |
| CN108167167A (en) * | 2017-12-25 | 2018-06-15 | 上海交通大学 | A kind of miniature viberation membrane compressor of Combined Electrostatic and Piezoelectric Driving |
| US20190249656A1 (en) * | 2016-10-27 | 2019-08-15 | Nitto Kohki Co., Ltd. | Liquid pump |
| CN111591038A (en) * | 2019-02-20 | 2020-08-28 | 东芝泰格有限公司 | Piezoelectric pump and liquid ejection device |
| CN112689521A (en) * | 2018-09-11 | 2021-04-20 | 大研医器株式会社 | Connecting member, pump housing and injection device provided with same, and liquid confirmation method using same |
| US20220056900A1 (en) * | 2019-06-27 | 2022-02-24 | Murata Manufacturing Co., Ltd. | Pump device |
| US20220243715A1 (en) * | 2021-01-29 | 2022-08-04 | Microjet Technology Co., Ltd. | Thin gas transportation device |
| DE112020000737B4 (en) | 2019-03-18 | 2023-05-25 | Murata Manufacturing Co., Ltd. | pump unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201144604A (en) * | 2010-06-08 | 2011-12-16 | Shang-Neng Wu | Improved membrane structure preventing reversing airflow on pump |
| CN102338072B (en) * | 2011-08-31 | 2016-05-11 | 胡军 | Piezoelectric ceramic driven ultra-micro air pump |
| CN103291590B (en) * | 2013-06-13 | 2015-06-24 | 中国第一汽车股份有限公司无锡油泵油嘴研究所 | Double-diaphragm pump |
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| US20040080159A1 (en) * | 2002-05-20 | 2004-04-29 | Schroeder Fred Georg | Air conditioning block fitting with two surface sealing |
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| US7291960B2 (en) * | 2004-12-28 | 2007-11-06 | Seiko Epson Corporation | Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument |
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| US3467020A (en) * | 1967-06-27 | 1969-09-16 | Peters & Russell Inc | Pump |
| US6261066B1 (en) * | 1997-05-12 | 2001-07-17 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Micromembrane pump |
| US6126410A (en) * | 1998-02-12 | 2000-10-03 | Gast Manufacturing Corporation | Head cover assembly for reciprocating compressor |
| US20040080159A1 (en) * | 2002-05-20 | 2004-04-29 | Schroeder Fred Georg | Air conditioning block fitting with two surface sealing |
| US20050231914A1 (en) * | 2002-08-16 | 2005-10-20 | Kazuyuki Mikubo | Cooling device for electronic apparatus |
| US7291960B2 (en) * | 2004-12-28 | 2007-11-06 | Seiko Epson Corporation | Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument |
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| CN103968103A (en) * | 2010-02-03 | 2014-08-06 | 凯希特许有限公司 | Singulation of valves |
| US11231027B2 (en) | 2010-12-21 | 2022-01-25 | Pentair Flow Technologies, Llc | Diaphragm pump and motor system and method |
| US9169837B2 (en) | 2010-12-21 | 2015-10-27 | Pentair Flow Technologies, Llc | Diaphragm pump and motor system and method |
| US12031534B2 (en) | 2010-12-21 | 2024-07-09 | Pentair Flow Technologies, Llc | Diaphragm pump and motor system and method |
| CN102678534A (en) * | 2011-10-27 | 2012-09-19 | 蔡应麟 | Tunnel pump head cover of constant pressure diaphragm pump |
| US20190249656A1 (en) * | 2016-10-27 | 2019-08-15 | Nitto Kohki Co., Ltd. | Liquid pump |
| US11085434B2 (en) * | 2016-10-27 | 2021-08-10 | Nitto Kohki Co., Ltd. | Liquid pump |
| CN108167167A (en) * | 2017-12-25 | 2018-06-15 | 上海交通大学 | A kind of miniature viberation membrane compressor of Combined Electrostatic and Piezoelectric Driving |
| CN112689521A (en) * | 2018-09-11 | 2021-04-20 | 大研医器株式会社 | Connecting member, pump housing and injection device provided with same, and liquid confirmation method using same |
| US12220554B2 (en) | 2018-09-11 | 2025-02-11 | Daiken Medical Co., Ltd. | Connection member, injection device and pump casing equipped with connection member, and liquid verification method using connection member |
| CN111591038A (en) * | 2019-02-20 | 2020-08-28 | 东芝泰格有限公司 | Piezoelectric pump and liquid ejection device |
| US11333144B2 (en) * | 2019-02-20 | 2022-05-17 | Toshiba Tec Kabushiki Kaisha | Piezoelectric pump and liquid ejection device |
| DE112020000737B4 (en) | 2019-03-18 | 2023-05-25 | Murata Manufacturing Co., Ltd. | pump unit |
| US20220056900A1 (en) * | 2019-06-27 | 2022-02-24 | Murata Manufacturing Co., Ltd. | Pump device |
| US12180954B2 (en) * | 2019-06-27 | 2024-12-31 | Murata Manufacturing Co., Ltd. | Piezoelectric pump casing and space arrangement |
| US20220243715A1 (en) * | 2021-01-29 | 2022-08-04 | Microjet Technology Co., Ltd. | Thin gas transportation device |
| US11703045B2 (en) * | 2021-01-29 | 2023-07-18 | Microjet Technology Co., Ltd. | Thin gas transportation device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4405997B2 (en) | 2010-01-27 |
| TW200821470A (en) | 2008-05-16 |
| JP2008101566A (en) | 2008-05-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
Owner name: ALPS ELECTRIC CO., LTD., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ONISHI, HITOSHI;REEL/FRAME:019962/0807 Effective date: 20071010 |
|
| STCB | Information on status: application discontinuation |
Free format text: EXPRESSLY ABANDONED -- DURING EXAMINATION |