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US20060081635A1 - Storage container - Google Patents

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Publication number
US20060081635A1
US20060081635A1 US11/245,105 US24510505A US2006081635A1 US 20060081635 A1 US20060081635 A1 US 20060081635A1 US 24510505 A US24510505 A US 24510505A US 2006081635 A1 US2006081635 A1 US 2006081635A1
Authority
US
United States
Prior art keywords
main body
cover member
sealing
container main
sealing member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US11/245,105
Other languages
English (en)
Inventor
Chiaki Matsutori
Tadahiro Obayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Miraial Co Ltd
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Assigned to MIRAIAL CO., LTD. reassignment MIRAIAL CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MATSUTORI, CHIAKI, OBAYASHI, TADAHIRO
Publication of US20060081635A1 publication Critical patent/US20060081635A1/en
Abandoned legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D53/00Sealing or packing elements; Sealings formed by liquid or plastics material
    • B65D53/02Collars or rings
    • H10P72/1916
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D53/00Sealing or packing elements; Sealings formed by liquid or plastics material
    • B65D53/04Discs
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/021Sealings between relatively-stationary surfaces with elastic packing
    • F16J15/022Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
    • F16J15/024Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity
    • F16J15/025Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material the packing being locally weakened in order to increase elasticity and with at least one flexible lip
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/06Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/061Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with positioning means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/02Sealings between relatively-stationary surfaces
    • F16J15/06Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
    • F16J15/062Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces characterised by the geometry of the seat
    • H10P72/34
    • H10P72/3402
    • H10P72/3404

Definitions

  • the present invention relates to a storage container for storing, conveying, and processing an electronic part-mounted board that should be kept clean during storage, such as a semiconductor wafer, a storage disk substrate, or a liquid crystal glass substrate.
  • a variety of devices have been hitherto made on a storage container for storing an electronic part-mounted board such as a semiconductor wafer, a storage disk substrate, or a liquid crystal glass substrate under a clean atmosphere since if any foreign matter or contaminant adheres to such a board in the process of storing, conveying, and processing the board, a thin film or element formed on the surface thereof may be damaged, or element characteristics may be deteriorated.
  • an electronic part-mounted board such as a semiconductor wafer, a storage disk substrate, or a liquid crystal glass substrate under a clean atmosphere since if any foreign matter or contaminant adheres to such a board in the process of storing, conveying, and processing the board, a thin film or element formed on the surface thereof may be damaged, or element characteristics may be deteriorated.
  • sealing means for hermetically sealing a space between a storage container main body and a cover member is the key to preventing any foreign matter or contaminant from entering the storage container from the outside.
  • an airtight container having a sealing member composed of an elastically deformable endless portion fitted into a fit-retention groove, a bendable projection, the leading edge of which extends almost obliquely from the peripheral corner of the endless portion, and a fitting rib recessed in or protruding from at least one of the front and rear sides of the endless portion (see Japanese Patent Laid-Open Publication No. 2002-68364).
  • the airtight container disclosed in Japanese Patent Laid-Open Publication No. 2002-68364 is structured such that the fit-retention groove and the endless portion of the sealing member are fitted only by means of the fitting rib recessed in or protruding from at least one of the front and rear sides of the endless portion, so that the fit between the sealing member and the fit-retention groove only depends on the elasticity of the elastic material forming the endless portion and the fitting dimensional accuracy between the endless portion and the fit-retention groove.
  • the above airtight container is insufficient in terms of the engagement between the endless portion of the sealing member and the fit-retention groove, leading to a problem that the sealing member easily falls off the fit-retention groove.
  • the elasticity of the elastic member forming the endless portion of the sealing member is made too high with a view to enhancing the engagement between the sealing member and the fit-retention groove, there arises a problem that the endless portion is hard to remove from the fit-retention groove.
  • the present invention has been developed in view of the above problems, and accordingly, it is an object of the present invention to provide a storage container whose sealing member is not liable to fall off, and the sealing property of the sealing member is improved.
  • a storage container includes: a container main body which forms a housing portion having an opening; a cover member for closing the opening of the container main body; and a sealing member for hermetically sealing a space between the container main body and the cover member and formed on one of the container main body and the cover member, wherein the sealing member is fitted into a fitting groove formed in one of the container main body and the cover member, and includes a plurality of individually deformable portions disposed opposite to each other through a gap formed along a fitting direction in a sectional view, and a sealing piece for sealing a space in abutment with a wall surface of the other one of the container main body and the cover member.
  • the sealing member is fitted in such a manner that leading edges of the plurality of individually deformable portions fit into a deep portion of the fitting groove.
  • the fitting groove has a protrusion fitted in between the plurality of individually deformable portions of a fitting portion of the sealing member.
  • at least one rib is formed on opposite sides of the plurality of individually deformable portions of the sealing member, which comes in close contact with the protrusion to keep an inner space airtight, or at least one lip is formed on opposite sides of the plurality of individually deformable portions of the sealing member, which comes in close contact with the protrusion to keep an inner space airtight.
  • the plurality of individually deformable portions of the sealing member are continuously formed, and the sealing member is fitted in such a state that leading edges of the plurality of individually deformable portions are directed to a side opposite to the deep portion of the fitting groove.
  • a fitting member is fitted between the plurality of individually deformable portions of the sealing member.
  • At least one rib is formed on the side opposite to the opposite sides of the plurality of individually deformable portions of the sealing member, which comes in close contact with a wall surface of the fitting groove to keep an inner space airtight
  • at least one lip is formed on the side opposite to the opposite sides of the plurality of individually deformable portions of the sealing member, which comes in close contact with a wall surface of the fitting groove to keep an inner space airtight.
  • slippage-preventing means for preventing the sealing member from coming off is provided on an opening side of the fitting groove.
  • the fitting groove is expanded so as to incline at 1 to 6 degrees toward the opening.
  • the wall surface against which the sealing piece of the sealing member abuts is inclined within a bendable range of the leading edge of the sealing piece, and the wall surface against which the sealing piece of the sealing member abuts is one of a horizontal support and a vertical support that is inclined toward the sealing piece at an angle of 2 to 8 degrees to one of the horizontal plane and the vertical plane.
  • the plurality of individually deformable portions of the sealing member are inserted into the fitting groove in an elastically compressed state.
  • a gap of a predetermined capacity is secured between the plurality of individually deformable portions of the sealing member and a wall surface of the fitting groove.
  • the container main body may include a thin-plate supporting portion supporting a plurality of thin plates disposed at a predetermined interval
  • the cover member may include a thin-plate retainer supporting the plurality of thin plates supported by the thin-plate supporting portion under pressure.
  • the storage container includes a sealing member formed on one of a container main body and a cover member to hermetically seal a space therebetween, which is fitted into a fitting groove formed in one of the container main body and the cover member and includes a plurality of individually deformable portions disposed opposite to each other across a gap secured along the fitting direction in a sectional view, and a sealing piece abutting a wall surface of the other one of the container main body and the cover member, whereby the sealing member is not liable to come off and the sealing property of the sealing member is enhanced.
  • FIG. 1 is a schematic sectional view illustrative of an overall storage container according to a first embodiment of the present invention
  • FIG. 2 is a schematic enlarged sectional view of a sealing member of the storage container
  • FIGS. 3A and 3B are schematic sectional views of the sealing member of the storage container
  • FIG. 4 is a schematic enlarged sectional view illustrative of a sealing member according to a second embodiment of the present invention.
  • FIGS. 5A and 5B are schematic sectional views of the sealing member of the storage container
  • FIG. 6 is a schematic enlarged sectional view of a sealing member of a storage container illustrative of a third embodiment of the present invention.
  • FIGS. 7A and 7B are schematic enlarged sectional views illustrative of a sealing member of a storage container according to a fourth embodiment of the present invention.
  • FIG. 8 is a schematic sectional view illustrative of a sealing member of a storage container according to a fifth embodiment of the present invention.
  • FIG. 9 is an enlarged sectional view illustrating the sealing member.
  • FIG. 2 is a sectional view schematically showing the storage container.
  • the storage container includes a container main body 1 forming a housing portion (i.e., inner space) 4 having an opening 1 a , a cover member 2 for covering the opening 1 a of the container main body 1 , and a sealing member 3 for keeping the inner space 4 of the container main body 1 airtight with the opening 1 a of the container main body 1 being closed with the cover member 2 .
  • a housing portion i.e., inner space
  • cover member 2 for covering the opening 1 a of the container main body 1
  • a sealing member 3 for keeping the inner space 4 of the container main body 1 airtight with the opening 1 a of the container main body 1 being closed with the cover member 2 .
  • a thin-plate retainer 6 is attached to the inner side of the cover member 2 .
  • a thin-plate supporting portion 7 is attached to an inner side face of the container main body 1 .
  • the thin-plate retainer 6 and the thin-plate supporting portion 7 are grooved at regular intervals. Thus, when the cover member 2 is put on the container main body while thin plates 8 are held in these grooves, the thin plates 8 can be arrayed in position at predetermined intervals almost in parallel by means of the thin-plate retainer 6 and the thin-plate supporting portion 7 .
  • the container main body 1 and the cover member 2 are preferably formed of a polymer material that generates little gas, for example, polycarbonate.
  • the thin-plate retainer 6 and the thin-plate supporting portion 7 are preferably formed of a polymer material such as polyethylene or polybutelene terephthalate.
  • the sealing member 3 has a closed ring shape as viewed from the left side of FIG. 2 .
  • the sealing member 3 is interposed between the container main body 1 and the cover member 2 to thereby shut out the inflow of the outside air into the inner space 4 of the container main body 1 .
  • a fitting groove 5 is formed in a circular form along the outer periphery of the cover member 2 , and one side of the sealing member 3 is fitted into the fitting groove 5 , while the other side thereof is brought into contact with an inner wall surface 15 of the container main body 1 . In this way, the space between the container main body 1 and the cover member 2 is sealed.
  • the fitting groove 5 is formed on the container main body 1 side in FIG. 2 , but may be formed on the cover member 2 side.
  • FIG. 1 shows an example where the fitting groove 5 is formed on the cover member 2 side.
  • FIG. 1 shows the example where the fitting groove 5 is formed on the cover member 2 side, which is a schematic enlarged sectional view of the sealing member of the cover member 2 .
  • FIG. 3A illustrates the sealing member 3 not fitted into the fitting groove 5 .
  • FIG. 3B illustrates the sealing member 3 fitted into the fitting groove 5 with the cover member 2 put on the container main body 1 .
  • the following description is focused on the sealing member 3 fitted into the fitting groove 5 , so that there is no distinction made about whether the fitting groove 5 is formed on the cover member 2 side or the container main body 1 side.
  • the sealing member 3 is, as shown in FIGS. 3A and 3 B, fitted into the fitting groove 5 formed on either the container main body 1 side or the cover member 2 side, and composed of plural portions (hereinafter, referred to “individually deformable portions) 9 a , 9 b which are individually deformable, and disposed opposite to each other across a gap defined in the fitting direction as viewed in a sectional view, a coupling portion 10 connecting the individually deformable portions 9 a and 9 b , and a sealing piece 11 that abuts against the other wall surface of either the container main body 1 or the cover member 2 for sealing an inner space 4 .
  • the sealing piece 11 is integrated with the coupling portion 10 connecting the individually deformable portions 9 a and 9 b .
  • the individually deformable portions 9 a , 9 b and the coupling portion 10 constitute a main body portion.
  • the main body is fitted into the fitting groove 5 to support the sealing piece 11 .
  • a protrusion 14 projects outwardly from the deep portion (i.e., bottom) of the fitting groove 5 .
  • the protrusion 14 is formed on the bottom of the fitting groove 5 throughout the perimeter thereof, and fitting groove portions 5 a and 5 b are formed between the side walls of the protrusion 14 and the fitting groove 5 . That is, two stripes of sub-groves are formed.
  • the individually deformable portions 9 a and 9 b of the sealing member 3 have two convex ribs 12 each; the two ribs 12 are each formed on the opposite sides of the individually deformable portions 9 a and 9 b facing the protrusion 14 , elastically in close contact with the side faces of the protrusion 14 .
  • the ribs 12 are formed along the perimeter of the side faces of the individually deformable portions 9 a and 9 b in a closed ring shape.
  • the ribs 12 in the individually deformable portions 9 a , 9 b in close contact with the side faces of the protrusion 14 makes it possible to more securely seal the gap and improve the sealing property of the sealing member.
  • the example where the individually deformable portions 9 a and 9 b have the two ribs 12 each is discussed.
  • one rib or three or more ribs may be formed on each portion.
  • the ribs 12 may be formed on not only one side, but also on the other side of the individually deformable portions 9 a , 9 b , that is, the side opposite to the protrusion 14 .
  • the ribs 12 may be formed only on the other side.
  • the fitting area can be increased to enhance the engagement and secure a long seal length.
  • the sealing property of the sealing member can be enhanced.
  • the formation of the ribs 12 in the individually deformable portions 9 a , 9 b , in close contact with the wall surfaces of the protrusion 14 makes it possible to more securely seal the gap and attain a much higher sealing property of the sealing member.
  • the leading edge of the sealing piece 11 of the sealing member 3 elastically bends to abut against the inner wall surface 15 as a close-contact portion of the container main body 1 to shut out the inflow of the outside air into the housing space 4 of the container main body 1 .
  • the sealing piece 11 be tilted with respect to the inner wall surface 15 (also referred to as “close-contact portion”) of the container body 1 so as to secure sufficient adhesion when the leading edge of the sealing piece 11 comes into close contact with the wall surface 15 . That is, the sealing piece 11 is preferably formed at an angle to the wall surface in a deformable range of the leading edge when in close contact therewith. This makes it possible to more securely seal the gap and improve the sealing property of the sealing member.
  • a material for the sealing member 3 is preferably an elastic polymer that generates little gas.
  • polyester elastomer or polyolefin elastomer may be used.
  • Specific examples of polyester elastomer mainly include a copolymer mainly containing a terephthalic acid, 1,4-tetramethylene glycol, and polyoxyethylene glycol, or a polymer compound thereof.
  • the sealing member 3 thus structured is splayed in such a direction as to increase the distance between the individually deformable portions 9 a and 9 b before being fitted into the fitting groove 5 . Also, the sealing piece 11 straightly extends without deforming.
  • the individually deformable portions 9 a and 9 b are fitted into the fitting groove portions 5 a and 5 b between the wall surface of the fitting groove 5 and the wall surface of the protrusion 14 so that the leading edges of the individually deformable portions 9 a and 9 b fit into the deep portion (i.e., bottom) of the fitting groove 5 , and the protrusion 14 is fitted in between the individually deformable portions 9 a and 9 b.
  • the individually deformable portions 9 a and 9 b of the sealing member 3 exert the elastic restoring force to the state of FIG. 3A , but at the same time, they are compressed between the fitting groove 5 and the protrusion 14 and thus come into close contact with the wall surfaces of the fitting groove 5 .
  • the larger pressing force on the fitting groove 5 is attained due to not only the elastic force with which the individually deformable portions 9 a , 9 b are restored to their original state but also the elastic force of a material forming the sealing member 3 .
  • the cover member 1 is put on the container main body 1 , thereby bringing the leading edge of the sealing piece 11 of the seal member 3 into close contact with the wall surface 15 of the container main body 1 to seal the gap between the sealing piece 11 of the sealing member 3 and the container main body 1 . Therefore, the housing space 4 of the container main body 1 is kept airtight by blocking out the outside air.
  • this storage container is provided with the sealing member 3 for hermetically sealing a space between the container main body 1 and the cover member 2 on either one thereof.
  • the sealing member 3 includes the plurality of individually deformable portions, which are fitted into the fitting groove 5 formed on one of the container main body 1 and the cover member 2 , and the sealing piece 11 for sealing the gap in abutment with the wall surface of the other one. This makes it possible to separate or disperse the elastic force at the fitted portion with the fitting groove 5 , and facilitates the adjustment of the adhesion between the sealing member 3 and the fitting groove 5 , and the attachment of the sealing member 3 while preventing the sealing member 3 from coming off, with the result that the sealing property of the sealing member is enhanced.
  • the protrusion 14 is formed with a large thickness to set a large interval between the individually deformable portions 9 a and 9 b in accordance therewith.
  • the interval between the individually deformable portions 9 a and 9 b may be set smaller like a slit, and the protrusion 14 may be formed into a thin wall plate. In this case as well, the sealing property can be enhanced.
  • FIG. 4 is a schematic enlarged sectional view of a sealing member portion of a storage container according to this embodiment.
  • FIG. 5A illustrates the sealing member 3 not fitted into the fitting groove 5 .
  • FIG. 5B illustrates the sealing member 3 fitted into the fitting groove 5 with the cover member 2 put on the container main body 1 .
  • the sealing member 3 of this embodiment is composed of the individually deformable portions 9 a , 9 b fitted into the fitting groove 5 formed on one of the container main body 1 and the cover member 2 , the coupling portion 10 connecting the individually deformable portions 9 a and 9 b and fitted into the fitting groove 5 , and the sealing piece 11 for sealing the gap in abutment with the wall surface of the other one of the container main body 1 and the cover member 2 .
  • the sealing piece 11 is integrated with one of the individually deformable portions, the individually deformable portion 9 a .
  • the position of the coupling portion 10 is the reverse of that of the first embodiment.
  • the individually deformable portions 9 a , 9 b and the coupling portion 10 are formed in a U-shaped sectional view expanded outside.
  • the individually deformable portions 9 a and 9 b of the sealing member 3 not fitted into the fitting groove 5 are also expanded at some distance from each other as shown in FIG. 5A . Further, the ribs 12 are formed on the opposite sides of the individually deformable portions 9 a , 9 b in close contact with the wall surfaces of the fitting groove 5 .
  • convex braces 16 are formed in abutment with the individually deformable portions 9 a , 9 b of the sealing member 3 near the opening of the wall surfaces of the fitting groove 5 .
  • the brace 16 prevents the individually deformable portions 9 a , 9 b of the sealing member 3 from coming off from the fitting groove 5 due to an external force or a difference between external pressure and internal pressure.
  • the brace 16 does not need to be formed throughout the perimeter of the fitting groove 5 , and thus only needs to be formed partially. Further, if the sealing member 3 has sufficient elastic restoring force, the brace 16 may be omitted.
  • the sealing member 3 thus structured is fitted into the fitting groove 5 such that the coupling portion 10 connecting the individually deformable portions 9 a and 9 b fits into the deep portion of the fitting groove 5 , that is, the leading edge of the individually deformable portions 9 a , 9 b are directed to the side opposite to the deep portion of the fitting groove 5 .
  • a gap 19 is defined between the individually deformable portions 9 a and 9 b , and the ribs 12 and 12 b are pressed against the wall surfaces of the fitting groove 5 mainly by means of the elastic restoring force with which the individually deformable portions 9 a , 9 b are restored to the original state, i.e., unfitted state.
  • the fitting force is weakened, but the degree of freedom of the individually deformable portions 9 a and 9 b is increased.
  • the adhesion of the ribs 12 to the wall surfaces of the fitting groove 5 improves, resulting in the high sealing property of the sealing member. That is, the ribs 12 can exert the same function as lips 20 mentioned below.
  • the force of fitting the sealing member 3 into the fitting grooves 5 is small, and accordingly the wear of the fitting portion resulting from the friction due to the externally applied vibration can be suppressed.
  • the fitting force can be adjusted by selecting a suitable size of the gap 19 , a suitable thickness of the individually deformable portions 9 a , 9 b , and a suitable material for the sealing member 3 .
  • the brace 16 formed near the opening of the fitting groove 5 can engage with the ribs 12 a and 12 b , so that the sealing member 3 never comes off from the fitting groove 5 as long as the sealing member 3 is being used ordinally, despite the weak fitting force.
  • the gap 19 is formed, so that the gap is mechanically squashed, whereby the individually deformable portions 9 a and 9 b can be removed together with the coupling portion 10 from the fitting groove while avoiding the brace 16 .
  • the storage container accommodating a semiconductor wafer for storage, conveyance, and processing under a clean atmosphere is repeatedly washed for the purposes of removing contaminants and preventing contamination.
  • the sealing member 3 can be easily removed, the washing step can be simplified, and the washing efficiency can be improved.
  • FIG. 6 is a schematic enlarged sectional view of a sealing member portion of a storage container according to this embodiment.
  • a fitting member 17 is fitted in between the individually deformable portions 9 a and 9 b of the sealing member 3 of the second embodiment.
  • the fitting member 17 includes a bulging portion 18 a inserted between the individually deformable portions 9 a and 9 b , and a retainer 18 b abutting against the end of one of the individually deformable portions 9 a and 9 b , which does not have the integrally formed sealing piece 11 , that is, the individually deformable portion 9 b .
  • the bulging portion 18 a and the retainer 18 b are integrally formed.
  • the bulging portion 18 a of the fitting member 17 is inserted between the individually deformable portions 9 a and 9 b , so the individually deformable portions 9 a and 9 b are pushed outward against the wall surface of the fitting groove 5 . Accordingly, the adhesion between the individually deformable portions 9 a , 9 b and the fitting groove 5 improves.
  • the fitting member 17 may be formed into the closed ring shape. However, in order to facilitate the insertion between the individually deformable portions 9 a and 9 b of the sealing member 3 , a string-like member is preferably used. Further, the retainer 18 b of the fitting member 17 may be omitted.
  • the ribs 12 are optionally provided.
  • the wall surface (i.e., close-contact portion) 15 of the container main body 1 in close contact with the sealing piece 11 of the sealing member 3 is formed in an inclined state at the angle of ⁇ in the direction in which the sealing piece 11 is tilted. That is, when the storage container is placed in a horizontal position during use, the opening 1 a of the container main body 1 opens in a horizontal direction, and thus the wall surface 15 is set upright (i.e., vertical support). The wall surface 15 is inclined toward the sealing piece 11 at the angle ⁇ to the vertical plane.
  • the sealing piece 11 of the sealing member 3 can stably come into close contact with the wall surface 15 .
  • An experiment carried out by the inventors of the present invention revealed that, provided the angle ⁇ is within 2 to 8 degrees, the sealing piece 11 can stably come into close contact with the wall surface 15 as the vertical support even if the cover member 2 is repeatedly attached to/detached from the container main body 1 .
  • the inclination angle ⁇ is set to 2° or more, the pressing force acts on the leading edge of the sealing piece 11 toward the circumferential direction, so that uniform stress can be attained at the leading edge of the sealing piece 11 , thereby enabling the stable adhesion.
  • the inclination angle ⁇ is 80 or more, the adhesion becomes unstable. This is supposedly because the pressing force with which the sealing piece 11 presses the wall surface 15 is lowered.
  • the wall surface 15 extends in a horizontal direction (i.e., horizontal support), and is assumed to tilt toward the sealing piece 11 at the angle ⁇ to the horizontal plane.
  • FIGS. 7A and 7B are schematic enlarged sectional views of a sealing member used in this embodiment, in which FIG. 7A illustrates the sealing member not fitted into a fitting groove and FIG. 7B illustrates the sealing member fitted into the fitting groove with the cover member put on the container main body.
  • the sealing member 3 of this embodiment also includes the individually deformable portions 9 a and 9 b fitted into the fitting groove 5 formed on one of the container main body 1 and the cover member 2 , the coupling portion 10 connecting the individually deformable portions 9 a and 9 b and fitted into the fitting groove 5 , and the sealing piece 11 sealing the gap in abutment with the other one of the container main body 1 and the cover member 2 .
  • the sealing piece 11 is integrally formed with one of the individually deformable portions 9 a and 9 b , the individually deformable portion 9 a.
  • the ribs described in the above embodiments are omitted herein, but needless to say, the ribs may be formed.
  • FIG. 8 is a schematic enlarged sectional view showing a sealing member used in this embodiment, which has not been yet fitted into the fitting groove.
  • the sealing member 3 has the same structure as the sealing member 3 of the first embodiment except that one or more (in this example, one) lips 20 are formed on the opposite sides of the individually deformable portions 9 a and 9 b instead of the ribs 12 .
  • the lip 20 is an elastic deformable portion involving the flexion deformity.
  • the lip 20 is inferior in terms of fitting force to the ribs, but is superior to the ribs in terms of adhesion and sealing property due to its large degree of freedom. Further, the wear of the sealing member resulting from externally applied vibration etc. can be suppressed because of its small fitting force.
  • the protrusion 14 is formed on one side inside the fitting groove 5 .
  • one of the fitting groove portions i.e., the fitting groove portion 5 b matches with one of the individually deformable portions, i.e., the individually deformable portion 9 b .
  • the sealing member 3 is held in the fitting groove 5 mainly by means of this portion and both side faces of the main body.
  • the lip 20 is provided only on the inner side of the individually deformable portion 9 a , but may be optionally provided on the outer side thereof. Alternatively, the lip 20 may be provided only on the outer side of the individually deformable portion 9 a , or on one or both of the sides thereof.
  • FIG. 9 is an enlarged view of a sealing member portion of a storage container using the above sealing member 3 .
  • the sealing member is structured such that the individually deformable portions 9 a and 9 b of the sealing member 3 are fitted into the fitting groove portions 5 a and 5 b of the fitting groove 5 formed in the cover member 2 .
  • the fitting groove portion 5 a is formed in such a manner as to secure a gap 21 between the individually deformable portion 9 a forming the lip 20 and the wall surface of the protrusion 14 , whereby the lip 20 bends to come into close contact with the wall surface of the protrusion 14 due to the elastic deformity, thereby sealing the space.
  • the entire width of the individually deformable portions 9 a and 9 b is set somewhat larger than the width of the fitting groove 5 , whereby the individually deformable portions 9 a and 9 b can come into close contact with the wall surfaces of the fitting groove 5 .
  • the wall surfaces (i.e., outer and inner peripheral surfaces) of the fitting groove 5 are inclined inwardly at the angle of ⁇ to the vertical plane. That is, the fitting groove 5 is so tilted as to expand toward the opening.
  • the angle ⁇ is preferably within a range of 10 to 60, more preferably 30 to 50.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Closures For Containers (AREA)
  • Packaging Frangible Articles (AREA)
US11/245,105 2004-10-14 2005-10-07 Storage container Abandoned US20060081635A1 (en)

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JP2004300587A JP4634772B2 (ja) 2004-10-14 2004-10-14 収納容器

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Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070075084A1 (en) * 2003-07-28 2007-04-05 Gary Englund Shaped sealing gasket
US20090058015A1 (en) * 2007-08-29 2009-03-05 Ti Group Automotive Systems, L.L.C. Ring seal having sealing lobes
US20090226213A1 (en) * 2008-03-06 2009-09-10 Canon Kabushiki Kaisha Optical scanning apparatus
US20090302036A1 (en) * 2006-06-30 2009-12-10 Janny Sarl Container for storing products
US20110259902A1 (en) * 2010-04-23 2011-10-27 Dinesh Nataly Gandhi Overmould for sealing using double overmould
US20120312816A1 (en) * 2011-06-13 2012-12-13 Tervis Tumbler Company Lid for beverage container and beverage container including same
US20140291940A1 (en) * 2012-04-12 2014-10-02 Nok Corporation Gasket
US20150040484A1 (en) * 2011-08-19 2015-02-12 Aerovironment, Inc. Water-tight compartment with removable hatch and two-sided gel seal for multiple conduit access
US9097346B1 (en) * 2013-03-15 2015-08-04 Sypris Technologies, Inc. Closure lip seal relief
US10184583B2 (en) * 2012-07-30 2019-01-22 Eaton Intelligent Power Limited Redundant lip seal for valve
US20190107199A1 (en) * 2017-10-09 2019-04-11 Delphi Technologies, Inc. Perimeter seal
US10436326B2 (en) * 2016-08-15 2019-10-08 Festo Ag & Co. Kg Sealing system and a valve provided therewith
CN111453175A (zh) * 2020-04-26 2020-07-28 广东悦盛日塑科技有限公司 一种密封容器
US11293649B2 (en) * 2015-07-30 2022-04-05 Omar Crespo-Calero Protective seal for coil fins of an air conditioning condenser unit
US11346743B2 (en) 2016-10-12 2022-05-31 Huawei Technologies Co., Ltd. Sealing performance test method, apparatus, and storage medium
US20220291092A1 (en) * 2021-03-11 2022-09-15 Sartorius Bioanalytical Instruments, Inc. Sample shaker system with sealed airflow
US20220341455A1 (en) * 2019-09-06 2022-10-27 Elkamet Kunststofftechnik Gmbh Connection assembly
US11652253B2 (en) * 2018-08-09 2023-05-16 Ford Global Technologies, Llc Enclosure seal and sealing method
US20240191740A1 (en) * 2021-04-08 2024-06-13 Bontaz Centre Device for connecting two components with improved tensile strength
US20250162774A1 (en) * 2022-02-04 2025-05-22 Siemens Healthcare Diagnostics Inc. Sealing system between a manifold and a liquid container
US20250253178A1 (en) * 2024-02-06 2025-08-07 Gudeng Precision Industrial Co., Ltd. Semiconductor workpiece transport pod

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4953690B2 (ja) * 2006-05-18 2012-06-13 信越ポリマー株式会社 収納容器
JP4920387B2 (ja) * 2006-12-01 2012-04-18 信越半導体株式会社 基板収納容器
JP4891853B2 (ja) * 2007-07-11 2012-03-07 信越ポリマー株式会社 基板収納容器
DE102009000010A1 (de) 2009-01-02 2010-07-08 Robert Bosch Gmbh Elektrisch kommutierte elektrische Maschine
KR101252567B1 (ko) * 2010-12-02 2013-04-12 김권우 밀폐 용기
KR101223759B1 (ko) * 2012-02-24 2013-01-17 주식회사 보루인터내셔날 진공용기용 고무밀봉재 및 이를 이용한 진공용기 뚜껑
KR101383668B1 (ko) * 2012-04-27 2014-04-10 주식회사 테라세미콘 실링부재 및 이를 사용한 기판 처리 장치
GB2501774A (en) 2012-05-04 2013-11-06 Control Tech Ltd A sealing element for sealing between planar surfaces
CN103287659B (zh) * 2013-05-08 2015-08-05 广东新宝电器股份有限公司 分段连接式容器
JP6134056B2 (ja) * 2014-03-26 2017-05-24 ミライアル株式会社 基板収納容器
ES2908285T3 (es) * 2014-06-23 2022-04-28 Abate Basilio&C S N C Conjunto de tapa-recipiente fabricado de material plástico
JP6660780B2 (ja) * 2016-03-17 2020-03-11 日本クレア株式会社 小動物用飼育装置
JP6552112B2 (ja) * 2016-03-29 2019-07-31 日本クレア株式会社 小動物用飼育装置
CN107489797A (zh) * 2016-06-13 2017-12-19 张家港市丰乐汽车设备有限公司 防爆阀
CN107489796A (zh) * 2016-06-13 2017-12-19 张家港市丰乐汽车设备有限公司 一种钢渣热焖蒸汽管道的防爆阀
WO2019093012A1 (ja) * 2017-11-10 2019-05-16 Nok株式会社 ガスケット
JP6687660B2 (ja) * 2018-03-27 2020-04-28 ファナック株式会社 シール装着装置およびシール装着方法
KR102069803B1 (ko) * 2018-04-27 2020-01-28 권오선 직수식 정수기
CN113396113B (zh) * 2018-12-12 2023-03-28 未来儿股份有限公司 基板收纳容器
CN116547605A (zh) * 2020-10-13 2023-08-04 恩特格里斯公司 容器的整体密封件
KR102294415B1 (ko) * 2021-06-09 2021-08-26 (주)상아프론테크 웨이퍼 수납 용기
JP7313498B1 (ja) * 2022-02-18 2023-07-24 株式会社協同 フォトマスク収納ケース、及び、フォトマスク収納ケース用のフォトマスク用クッション部材

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3211322A (en) * 1963-03-18 1965-10-12 Rodger D Collons Container and closure therefor
US5112065A (en) * 1991-03-14 1992-05-12 Westinghouse Electric Corp. Double directional gasket
US5568677A (en) * 1993-09-02 1996-10-29 Tobin; Robert A. Environmentally safe and economical burial casket
US5785201A (en) * 1996-05-02 1998-07-28 Container Accessories, Inc. Molded lid with wave configured central portion
US5971191A (en) * 1993-04-27 1999-10-26 Komatsu Electronic Metals Co., Ltd. Gasket for use in a container
US6105781A (en) * 1995-11-16 2000-08-22 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with unitary porous gasket
US6354601B1 (en) * 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
US20020195455A1 (en) * 2001-06-08 2002-12-26 Shin-Etsu Polymer Co., Ltd. Sealing element, hemetic container and sealing method thereof
US20030107187A1 (en) * 2000-12-07 2003-06-12 Toshitsugu Yajima Seal member, and substrate storage container using the same
US6951284B2 (en) * 2001-11-14 2005-10-04 Entegris, Inc. Wafer carrier with wafer retaining system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0346206Y2 (zh) * 1985-05-17 1991-09-30
JPH023069U (zh) * 1988-06-17 1990-01-10
JP3292800B2 (ja) * 1995-10-12 2002-06-17 信越ポリマー株式会社 密封容器のクランプ構造
JPH11150177A (ja) * 1997-11-19 1999-06-02 Dainippon Ink & Chem Inc ウエハ収納容器
JP2000009230A (ja) * 1998-06-22 2000-01-11 Nec Eng Ltd 密閉容器のパッキン構造
US6534014B1 (en) * 2000-05-11 2003-03-18 Irm Llc Specimen plate lid and method of using
JP3556185B2 (ja) 2000-06-13 2004-08-18 信越ポリマー株式会社 シール部材、密封容器及びそのシール方法
JP3968559B2 (ja) * 2001-11-30 2007-08-29 Nok株式会社 ガスケット
JP4087120B2 (ja) * 2002-01-29 2008-05-21 株式会社マーレ フィルターシステムズ シールパッキンおよび吸気系部品のシール構造

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3211322A (en) * 1963-03-18 1965-10-12 Rodger D Collons Container and closure therefor
US5112065A (en) * 1991-03-14 1992-05-12 Westinghouse Electric Corp. Double directional gasket
US5971191A (en) * 1993-04-27 1999-10-26 Komatsu Electronic Metals Co., Ltd. Gasket for use in a container
US5568677A (en) * 1993-09-02 1996-10-29 Tobin; Robert A. Environmentally safe and economical burial casket
US6105781A (en) * 1995-11-16 2000-08-22 Sumitomo Metal Industries, Ltd. Thin-plate supporting container with unitary porous gasket
US5785201A (en) * 1996-05-02 1998-07-28 Container Accessories, Inc. Molded lid with wave configured central portion
US6354601B1 (en) * 1999-01-06 2002-03-12 Fluoroware, Inc. Seal for wafer containers
US20030107187A1 (en) * 2000-12-07 2003-06-12 Toshitsugu Yajima Seal member, and substrate storage container using the same
US7029013B2 (en) * 2000-12-07 2006-04-18 Shin-Etsu Polymer Co., Ltd. Seal member, and substrate storage container using the same
US20020195455A1 (en) * 2001-06-08 2002-12-26 Shin-Etsu Polymer Co., Ltd. Sealing element, hemetic container and sealing method thereof
US6951284B2 (en) * 2001-11-14 2005-10-04 Entegris, Inc. Wafer carrier with wafer retaining system

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7690527B2 (en) * 2003-07-28 2010-04-06 Gary Englund Shaped sealing gasket
US20070075084A1 (en) * 2003-07-28 2007-04-05 Gary Englund Shaped sealing gasket
US8579150B2 (en) * 2006-06-30 2013-11-12 Janny Sarl Container for storing products
US20090302036A1 (en) * 2006-06-30 2009-12-10 Janny Sarl Container for storing products
US20090058015A1 (en) * 2007-08-29 2009-03-05 Ti Group Automotive Systems, L.L.C. Ring seal having sealing lobes
US7975870B2 (en) * 2007-08-29 2011-07-12 Ti Group Automotive Systems, L.L.C. Ring seal having sealing lobes
US20090226213A1 (en) * 2008-03-06 2009-09-10 Canon Kabushiki Kaisha Optical scanning apparatus
US8928719B2 (en) 2008-03-06 2015-01-06 Canon Kabushiki Kaisha Optical scanning apparatus with optical box sealed by a deformable sealing member
US9662816B2 (en) * 2010-04-23 2017-05-30 Psion Inc. Overmould for sealing using double overmould
US20110259902A1 (en) * 2010-04-23 2011-10-27 Dinesh Nataly Gandhi Overmould for sealing using double overmould
US20120312816A1 (en) * 2011-06-13 2012-12-13 Tervis Tumbler Company Lid for beverage container and beverage container including same
US9145238B2 (en) * 2011-06-13 2015-09-29 Tervis Tumbler Company Lid for beverage container and beverage container including same
US10941610B2 (en) 2011-08-19 2021-03-09 Aerovironment, Inc. Water-tight compartment with removable hatch and two-sided gel seal for multiple conduit access
US20150040484A1 (en) * 2011-08-19 2015-02-12 Aerovironment, Inc. Water-tight compartment with removable hatch and two-sided gel seal for multiple conduit access
US9476251B2 (en) * 2011-08-19 2016-10-25 Aerovironment, Inc. Water-tight compartment with removable hatch and two-sided gel seal for multiple conduit access
US10094165B2 (en) 2011-08-19 2018-10-09 Aerovironment, Inc. Water-tight compartment with removable hatch and two-sided gel seal for multiple conduit access
US20140291940A1 (en) * 2012-04-12 2014-10-02 Nok Corporation Gasket
US9426912B2 (en) * 2012-04-12 2016-08-23 Nok Corporation Gasket
US10184583B2 (en) * 2012-07-30 2019-01-22 Eaton Intelligent Power Limited Redundant lip seal for valve
US9097346B1 (en) * 2013-03-15 2015-08-04 Sypris Technologies, Inc. Closure lip seal relief
US11293649B2 (en) * 2015-07-30 2022-04-05 Omar Crespo-Calero Protective seal for coil fins of an air conditioning condenser unit
US10436326B2 (en) * 2016-08-15 2019-10-08 Festo Ag & Co. Kg Sealing system and a valve provided therewith
US11346743B2 (en) 2016-10-12 2022-05-31 Huawei Technologies Co., Ltd. Sealing performance test method, apparatus, and storage medium
US10473218B2 (en) * 2017-10-09 2019-11-12 Aptiv Technologies Limited Perimeter seal
US20190107199A1 (en) * 2017-10-09 2019-04-11 Delphi Technologies, Inc. Perimeter seal
US11652253B2 (en) * 2018-08-09 2023-05-16 Ford Global Technologies, Llc Enclosure seal and sealing method
US20220341455A1 (en) * 2019-09-06 2022-10-27 Elkamet Kunststofftechnik Gmbh Connection assembly
US11892020B2 (en) * 2019-09-06 2024-02-06 Elkamet Kunststofftechnik Gmbh Connection assembly
CN111453175A (zh) * 2020-04-26 2020-07-28 广东悦盛日塑科技有限公司 一种密封容器
US20220291092A1 (en) * 2021-03-11 2022-09-15 Sartorius Bioanalytical Instruments, Inc. Sample shaker system with sealed airflow
US11808354B2 (en) * 2021-03-11 2023-11-07 Sartorius Bioanalytical Instruments, Inc. Sample shaker system with sealed airflow
US20240191740A1 (en) * 2021-04-08 2024-06-13 Bontaz Centre Device for connecting two components with improved tensile strength
US20250162774A1 (en) * 2022-02-04 2025-05-22 Siemens Healthcare Diagnostics Inc. Sealing system between a manifold and a liquid container
US20250253178A1 (en) * 2024-02-06 2025-08-07 Gudeng Precision Industrial Co., Ltd. Semiconductor workpiece transport pod

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JP4634772B2 (ja) 2011-02-16
JP2006111308A (ja) 2006-04-27
CN1760094A (zh) 2006-04-19
EP1648025A1 (en) 2006-04-19
KR20060052189A (ko) 2006-05-19
TW200616870A (en) 2006-06-01

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