US20020069497A1 - Securing an optical component onto a micro bench - Google Patents
Securing an optical component onto a micro bench Download PDFInfo
- Publication number
- US20020069497A1 US20020069497A1 US09/733,967 US73396700A US2002069497A1 US 20020069497 A1 US20020069497 A1 US 20020069497A1 US 73396700 A US73396700 A US 73396700A US 2002069497 A1 US2002069497 A1 US 2002069497A1
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- US
- United States
- Prior art keywords
- component
- groove
- substrate
- laser beam
- securing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 38
- 239000013307 optical fiber Substances 0.000 claims abstract description 10
- 238000003466 welding Methods 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 7
- 239000010703 silicon Substances 0.000 claims abstract description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 238000000708 deep reactive-ion etching Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 3
- 238000011010 flushing procedure Methods 0.000 claims description 2
- 239000011261 inert gas Substances 0.000 claims 2
- 239000000835 fiber Substances 0.000 abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 6
- 230000008018 melting Effects 0.000 abstract description 5
- 238000002844 melting Methods 0.000 abstract description 5
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 241000234295 Musa Species 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
- G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
- G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
- G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1002—Methods of surface bonding and/or assembly therefor with permanent bending or reshaping or surface deformation of self sustaining lamina
- Y10T156/1039—Surface deformation only of sandwich or lamina [e.g., embossed panels]
Definitions
- the present invention relates to a device for securing a component on a substrate, and in particular to a device for securing an optical component, such as an optical fiber, in a groove etched in a silicon substrate.
- MEMS micro-electromechanical systems
- U.S. Pat. No 4,788,406, issued Nov. 29, 1988 to Robert Holman et al, is indicative of another approach used to attach an optical fiber to a substrate.
- a metallic sleeve is coated or mounted on the end of the fiber, so that the sleeve can be welded to a plate of similar material mounted on the substrate.
- U.S. Pat. No. 5,961,849 issued Oct. 5, 1999 to Robert Bostock et al, discloses another mounting method, in which a MEMS device is used to hold down an optical fiber in a groove.
- This device is also relatively complicated to manufacture, requiring the deposition of a special layer onto the substrate.
- many MEMS devices require power to operate.
- the present invention relates to a method of securing a component onto an substrate comprising the steps of:
- FIG. 1 is a cross-sectional view of an optical fiber in a groove in a substrate
- FIG. 2 is a cross-sectional view of the elements of FIG. 1 after being subjected to the securing method of the present invention.
- FIG. 3 is a cross-sectional view of an additional component placed in the groove prior to the optical fiber.
- FIG. 1 illustrates an optical fiber 1 loosely positioned in a groove 2 formed in a substrate 3 .
- the substrate 3 is silicon, and the groove 2 is etched therefrom using one of several, known etching processes.
- One process particularly suited for etching groove 2 is a deep reactive ion etching (DRIE) process.
- DRIE deep reactive ion etching
- other substrate materials are possible, such as ceramic and GaAs.
- the sides 4 and 5 of the groove 2 are vertical and spaced apart by a distance approximating the diameter of the fiber 1 .
- a laser (not shown) is activated, directing a beam 7 at upper portions of the sides 4 and 5 to create areas of localized melting 8 , which deform around the fiber 1 .
- the areas of localized melting 8 easily clamp down on the fiber as shown in FIG. 2. Obviously, other less optimum arrangements are possible, including melting an area 8 on only one side of the groove 2 .
- the wavelength and power of the laser beam 7 are selected to avoid any localized melting of the fiber 1 , whereby a tight mechanical fit is created between the fiber 1 and the areas 8 . In this arrangement, it may still be possible to slide the fiber 1 along the groove 2 . Accordingly, wavelengths to which silica fibers are transparent are preferred. Suitable wavelengths include the ultra-violet up to a wavelength that is not transparent in silicon, i.e. approximately 1.2 microns. For several practical reasons, e.g. availability, cost, and power output, an Yttrium Aluminum Garnet (YAG) laser at a wavelength of 1.064 microns proves to be effective.
- YAG Yttrium Aluminum Garnet
- another component 11 such as a laser, a photodiode, a thermistor, or a lens
- the other component can be fixed to the substrate using one of a variety of methods including adhesive, solder or the laser welding technique according to the present invention.
- the fiber 1 would be aligned with the component 11 using one of a variety of aligning techniques, and then fixed in the groove 2 .
- substrate 3 is a separate mounting substrate that the fiber 1 is initially fixed to, and the subsequent process involves: 1) mounting the component 11 on a main substrate; 2) aligning the fiber 1 with the component 11 ; and 3) fixing the mounting substrate to the main substrate.
- a third option has the other component 11 , having a rectangular base 12 , fixed in a correspondingly rectangular indentation using the laser welding technique according to the present invention.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
A method of attaching a component onto a microbench includes laying the component in a groove in the substrate, and locally deforming a portion of the groove, to thereby hold the component in the groove. Preferably, the microbench is a silicon substrate used for MEMs-type structures in the fiber optics industry. In particular, the method is used for securing an optical fiber in a groove, DRI etched from a silicon substrate, before or after the fiber is aligned with other optical components, i.e. lenses, lasers etc. The local deformation is done using a laser welding device selected to be effective in locally melting the substrate while leaving the component relatively undamaged.
Description
- The present invention relates to a device for securing a component on a substrate, and in particular to a device for securing an optical component, such as an optical fiber, in a groove etched in a silicon substrate.
- Recent demands in the fiber optics industry to increase durability and decrease cost have led to the use of micro-electromechanical systems (MEMS) in key optical components. However, problems arise when other components are to be connected to the substrate. In particular, the positioning of optical fibers and lenses on the substrate has led to a variety of problems.
- In the past these other components have been fixed to the substrate using epoxy resins. For example, U.S. Pat. No. 5,937,132 issued Aug. 10, 1999 in the name of Pierre Labeye et al discloses a process and a system for positioning and holding optical fibers in a groove using an adhesive material introduced therein. Unfortunately, there are several applications in which the use of epoxy resins is not acceptable, e.g. in 980 nm pump laser sources for fiber amplifiers, the use of organic materials such as epoxy resins is undesirable because of the damage to the laser facet.
- Another method of fixing components to a substrate is to solder or weld a separate holder overtop of the fiber. U.S. Pat. Nos. 5,717,803, issued Feb. 10, 1998 in the name of Isao Yoneda et al, and U.S. Pat. No. 5,367,140, issued Nov. 22, 1994 to Musa Jouaneh et al disclose coupling methods utilizing a separate holder requiring welding or soldering to the substrate.
- U.S. Pat. No 4,788,406, issued Nov. 29, 1988 to Robert Holman et al, is indicative of another approach used to attach an optical fiber to a substrate. In this approach, a metallic sleeve is coated or mounted on the end of the fiber, so that the sleeve can be welded to a plate of similar material mounted on the substrate.
- So far, the use of soldering or welding techniques to fix optical components to a substrate is quite labor intensive, requiring several additional steps to modify the elements, whereby they can be connected.
- U.S. Pat. No. 5,961,849, issued Oct. 5, 1999 to Robert Bostock et al, discloses another mounting method, in which a MEMS device is used to hold down an optical fiber in a groove. This device is also relatively complicated to manufacture, requiring the deposition of a special layer onto the substrate. Moreover, many MEMS devices require power to operate.
- It is an object of the present invention to avoid the shortcomings of the prior art by providing a relatively simple mounting device to hold an optical component on a substrate without the need for adhesives, solder, or complicated welding processes.
- Accordingly, the present invention relates to a method of securing a component onto an substrate comprising the steps of:
- positioning the component into a groove formed in the substrate; and
- activating a laser of wavelength and power output capable of locally deforming a portion of one side of the groove for securing the component in the groove without substantially damaging the component.
- The invention will be described in greater detail with reference to the enclosed drawings which illustrate a preferred embodiment of the invention and wherein:
- FIG. 1 is a cross-sectional view of an optical fiber in a groove in a substrate;
- FIG. 2 is a cross-sectional view of the elements of FIG. 1 after being subjected to the securing method of the present invention; and
- FIG. 3 is a cross-sectional view of an additional component placed in the groove prior to the optical fiber.
- FIG. 1 illustrates an
optical fiber 1 loosely positioned in agroove 2 formed in asubstrate 3. Typically, thesubstrate 3 is silicon, and thegroove 2 is etched therefrom using one of several, known etching processes. One process particularly suited foretching groove 2 is a deep reactive ion etching (DRIE) process. However, other substrate materials are possible, such as ceramic and GaAs. - Preferably, the
sides groove 2 are vertical and spaced apart by a distance approximating the diameter of thefiber 1. Moreover, it is advantageous to construct the depth ofgroove 2 shallower than the diameter of the fiber, but higher than the radius of the fiber, for reasons that will become apparent later. - After the
fiber 1 is placed in thegroove 2, a laser (not shown) is activated, directing abeam 7 at upper portions of thesides melting 8, which deform around thefiber 1. By constructing thegroove 2 according to the above-identified dimensions, the areas of localized melting 8 easily clamp down on the fiber as shown in FIG. 2. Obviously, other less optimum arrangements are possible, including melting anarea 8 on only one side of thegroove 2. - In a preferred embodiment, the wavelength and power of the
laser beam 7 are selected to avoid any localized melting of thefiber 1, whereby a tight mechanical fit is created between thefiber 1 and theareas 8. In this arrangement, it may still be possible to slide thefiber 1 along thegroove 2. Accordingly, wavelengths to which silica fibers are transparent are preferred. Suitable wavelengths include the ultra-violet up to a wavelength that is not transparent in silicon, i.e. approximately 1.2 microns. For several practical reasons, e.g. availability, cost, and power output, an Yttrium Aluminum Garnet (YAG) laser at a wavelength of 1.064 microns proves to be effective. The best results, in terms of melt depth, bead formation and particulate generation, have been observed with peak power densities in the range of from 5 to 20 MW/cm2. If the wavelength and the power output of the laser are adjusted, it is possible to create an intimate mechanical bond between thefiber 1 and theareas 8 by locally deforming both the external surface of thefiber 1 and the upper portions of thesides - In order to avoid oxidation of the silicon during welding, it is necessary to carry out the process in an inert atmosphere, e.g. argon. In practice, this may be accomplished by flushing the surface with a flow of argon or by performing the welding process in a sealed chamber.
- Prior to fixing the
fiber 1 in thegroove 2, anothercomponent 11, such as a laser, a photodiode, a thermistor, or a lens, can be located therein. The other component can be fixed to the substrate using one of a variety of methods including adhesive, solder or the laser welding technique according to the present invention. Subsequently, thefiber 1 would be aligned with thecomponent 11 using one of a variety of aligning techniques, and then fixed in thegroove 2. - Alternatively,
substrate 3 is a separate mounting substrate that thefiber 1 is initially fixed to, and the subsequent process involves: 1) mounting thecomponent 11 on a main substrate; 2) aligning thefiber 1 with thecomponent 11; and 3) fixing the mounting substrate to the main substrate. A third option has theother component 11, having arectangular base 12, fixed in a correspondingly rectangular indentation using the laser welding technique according to the present invention.
Claims (19)
1. A method of securing a component onto an integrated circuit substrate comprising the steps of:
a) positioning the component into a groove formed in the substrate; and
b) directing at least one laser beam of wavelength and power capable of locally deforming a portion of one side of the groove for securing the component in the groove without substantially damaging the component.
2. The method according to claim1, further comprising etching a groove out of the substrate prior to step a).
3. The method according to claim 2 , wherein deep reactive ion etching is used to etch the groove out of the substrate.
4. The method according to claim 1 , further comprising:
c) optically aligning the component with another optical component on another substrate; and
d) fixing the substrate to the other substrate with the components in optical alignment.
5. The method according to claim 4 , wherein both of the substrates are silicon; and step d) includes laser welding the two substrates together.
6. The method according to claim 1 , wherein each laser beam locally deforms a portion on each side of the groove.
7. The method according to claim, wherein the groove has substantially vertical sides.
8. The method according to claim 7 , wherein the groove has a width substantially equal to the diameter of the component.
9. The method according to claim 8 , wherein the groove has a height greater than the radius of the component, and less than the diameter of the component.
10. The method according to claim 9 , wherein the deformed portions on each side of the groove are proximate an upper edge thereof.
11. The method according to claim 1 , wherein each laser beam is capable of locally deforming a part of the component proximate the deformed portion of the side of the groove, whereby an intimate bond is formed therebetween.
12. The method according to claim 1 , wherein the component is transparent to each laser beam.
13. The method according to claim 1 , wherein the component is an optical fiber.
14. The method according to claim 1 , wherein each laser beam has a peak power density in the range of 5 to 20 MW/cm2.
15. The method according to claim 1 , wherein each laser beam has a wavelength of up to 1.2 μm.
16. The method according to claim 1 , wherein step b) is executed in an inert atmosphere.
17. The method according to claim 16 , wherein the inert atmosphere comprises argon.
18. The method according to claim 1 , further comprising flushing the substrate with a flow of inert gas.
19. The method according to claim 18 , wherein the inert gas comprises argon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/733,967 US6440776B1 (en) | 2000-12-12 | 2000-12-12 | Securing an optical component onto a micro bench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/733,967 US6440776B1 (en) | 2000-12-12 | 2000-12-12 | Securing an optical component onto a micro bench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20020069497A1 true US20020069497A1 (en) | 2002-06-13 |
| US6440776B1 US6440776B1 (en) | 2002-08-27 |
Family
ID=24949802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/733,967 Expired - Fee Related US6440776B1 (en) | 2000-12-12 | 2000-12-12 | Securing an optical component onto a micro bench |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | US6440776B1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10345533B1 (en) * | 2018-02-15 | 2019-07-09 | Corning Incorporated | Assemblies, optical connectors and methods of bonding optical fibers to substrates |
| US20200057202A1 (en) * | 2018-02-15 | 2020-02-20 | Corning Incorporated | Assemblies, optical connectors and methods of bonding optical elements to substrates |
| US20220043215A1 (en) * | 2020-08-07 | 2022-02-10 | Advanced Semiconductor Engineering, Inc. | Recessed portion in a substrate and method of forming the same |
| US12228772B2 (en) | 2019-11-26 | 2025-02-18 | Corning Research & Development Corporation | Methods for laser bonding optical elements to substrates and optical assemblies fabricated by the same |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020136507A1 (en) * | 2001-02-26 | 2002-09-26 | Musk Robert W. | Laser welding components to an optical micro-bench |
| KR100456468B1 (en) * | 2002-11-15 | 2004-11-10 | (주) 포코 | Light transmitting and receiving module by using laser micro-machining technology |
| US7410088B2 (en) * | 2003-09-05 | 2008-08-12 | Matsushita Electric Industrial, Co., Ltd. | Solder preform for low heat stress laser solder attachment |
| US7021838B2 (en) * | 2003-12-16 | 2006-04-04 | Matsushita Electric Industrial Co., Ltd. | Optimizing alignment of an optical fiber to an optical output port |
| US7140783B2 (en) * | 2004-02-06 | 2006-11-28 | Matsushita Electric Industrial Co., Ltd. | Diamond 2D scan for aligning an optical fiber to an optical output port |
| US7263260B2 (en) * | 2005-03-14 | 2007-08-28 | Matsushita Electric Industrial Co., Ltd. | Low cost, high precision multi-point optical component attachment |
| US11422310B2 (en) * | 2019-05-24 | 2022-08-23 | Corning Incorporated | Methods of bonding an optical fiber to a substrate using a laser and assemblies fabricated by the same |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4033668A (en) | 1976-04-08 | 1977-07-05 | Bell Telephone Laboratories, Incorporated | Solderable glass splices, terminations and hermetic seals |
| US4357072A (en) | 1978-01-28 | 1982-11-02 | Plessey Handel Und Investments Ag | Sealing optical fibres into packages |
| US4788406A (en) | 1987-01-23 | 1988-11-29 | Battelle Memorial Institute | Microattachment of optical fibers |
| US4961768A (en) * | 1989-04-20 | 1990-10-09 | Djeu Nicholas I | Methods for bonding optical fibers to wafers |
| US5173959A (en) | 1991-09-13 | 1992-12-22 | Gte Laboratories Incorporated | Method and apparatus for assembling a fiber array |
| EP0635737A1 (en) | 1993-07-23 | 1995-01-25 | Lucas Industries Public Limited Company | Brazed bonding of optical glass fiber and silicon substrate |
| US5389193A (en) | 1993-12-14 | 1995-02-14 | At&T Corp. | Methods for bonding aluminized optical fiber |
| US5367140A (en) | 1993-12-27 | 1994-11-22 | At&T Bell Laboratories | Method for laser welding of optical packages |
| US5533158A (en) | 1994-09-12 | 1996-07-02 | The Whitaker Corporation | Electrostatic bonding of optical fibers to substrates |
| GB2297626A (en) | 1995-01-27 | 1996-08-07 | Cambridge Consultants | Miniature mounting grooved substrate |
| JPH09138325A (en) | 1995-11-13 | 1997-05-27 | Nec Corp | Optical fiber packaging structure and its production |
| FR2748574B1 (en) | 1996-05-10 | 1998-05-29 | Commissariat Energie Atomique | METHOD AND DEVICE FOR POSITIONING AND HOLDING OPTICAL FIBERS |
-
2000
- 2000-12-12 US US09/733,967 patent/US6440776B1/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10345533B1 (en) * | 2018-02-15 | 2019-07-09 | Corning Incorporated | Assemblies, optical connectors and methods of bonding optical fibers to substrates |
| US10545293B2 (en) * | 2018-02-15 | 2020-01-28 | Corning Incorporated | Assemblies, optical connectors and methods of bonding optical fibers to substrates |
| US20200057202A1 (en) * | 2018-02-15 | 2020-02-20 | Corning Incorporated | Assemblies, optical connectors and methods of bonding optical elements to substrates |
| US10746937B2 (en) * | 2018-02-15 | 2020-08-18 | Corning Incorporated | Assemblies, optical connectors and methods of bonding optical elements to substrates |
| US12228772B2 (en) | 2019-11-26 | 2025-02-18 | Corning Research & Development Corporation | Methods for laser bonding optical elements to substrates and optical assemblies fabricated by the same |
| US20220043215A1 (en) * | 2020-08-07 | 2022-02-10 | Advanced Semiconductor Engineering, Inc. | Recessed portion in a substrate and method of forming the same |
| US11262506B1 (en) * | 2020-08-07 | 2022-03-01 | Advanced Semiconductor Engineering, Inc. | Recessed portion in a substrate and method of forming the same |
| US11886015B2 (en) | 2020-08-07 | 2024-01-30 | Advanced Semiconductor Engineering, Inc. | Recessed portion in a substrate and method of forming the same |
Also Published As
| Publication number | Publication date |
|---|---|
| US6440776B1 (en) | 2002-08-27 |
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