TWM638873U - Mixed Liquid Supply System - Google Patents

Abstract

A mixed liquid supply system, comprising: a process unit, a premix unit, a communication pipeline and a plurality of liquid supply pipelines, the process unit includes a process tank and a process liquid level sensor arranged in the process tank, pre- The mixing unit includes a pre-mixing tank and a pre-mixing liquid level sensor arranged in the pre-mixing tank. The communication pipeline includes a communication pipe and a communication valve. The communication pipe connects the process tank and the pre-mixing tank. The communication valve is arranged on the communication pipe body, and each liquid supply pipeline includes a liquid supply pipe body and a liquid supply pump arranged on the liquid supply pipe body, and each liquid supply pipe body is respectively connected to the premixing tank body, and each liquid supply pipe body The pumps respectively supply liquid at a specified flow rate. The mixed liquid supply system of the invention solves the problems of unstable mixed liquid ratio and lack of a motorized ratio adjustment mechanism.

Description

Mixed Liquid Supply System

The present invention relates to a liquid delivery system, and more particularly to a mixing liquid supply system.

Various mixed chemical liquids currently used in industry, such as etchant, detergent, etc., are transported by feeding various chemical liquids into pre-mixed tanks, and the mixed chemical liquids are then supplied to the process end for use. This design can effectively shorten the mixing time and improve the process throughput.

However, its pre-mixing mechanism is to add various medicinal liquids to the pre-mixing tank to a specific liquid level or total weight, and its mixing ratio is unstable and lacks a mechanism to dynamically adjust the ratio of various components. In addition, when the liquid level in the process tank is insufficient, the process still needs to be interrupted to wait for the liquid replenishment to be completed.

Therefore, in order to solve various problems of conventional liquid supply in industry, this creation proposes a mixed liquid supply system.

In order to achieve the above purpose and other purposes, this creation proposes a mixed liquid supply system, which includes: a process unit, including a process tank body and a process liquid level sensor arranged in the process tank body; a premixing unit, including A premixing tank and a premixing liquid level sensor arranged in the premixing tank; a communication pipeline, including a communicating pipe and a communicating valve, the connecting pipe communicates with the process tank and the premixing tank body, the communication valve is arranged on the communication pipe body; and a plurality of liquid supply pipelines, each of which includes a liquid supply pipe body and a liquid supply pump arranged on the liquid supply pipe body, each of the The liquid supply pipes respectively communicate with the premixing tanks, wherein each of the liquid supply pumps supplies liquid at a specified flow rate.

In one embodiment of the present invention, it further includes a control module connected to each of the liquid supply pumps, and the control module controls the flow ratio of each of the liquid supply pumps.

In one embodiment of the present invention, the signal of the control module is connected to the process liquid level sensor and the communication valve, and when the liquid level signal detected by the process liquid level sensor is lower than a process low water level, the control module The group controls the communication valve to open.

In one embodiment of the present invention, the control module signal is connected to the premix liquid level sensor, and when the liquid level signal detected by the premix liquid level sensor is lower than a premix low water level, the control module Each of the liquid supply pumps is controlled to supply liquid at the flow ratio.

In one embodiment of the present invention, the premixed liquid level sensor includes an empty sensing element disposed on the communicating pipe body.

In one embodiment of the present invention, the premixed liquid level sensor further includes a high water level sensing element, and the signal is connected to the control module.

In one embodiment of the present invention, the premixing unit further includes a liquid replenishment pump disposed on the communicating tube.

In one embodiment of the present invention, the process unit further includes an output tube and an output pump, one end of the output tube is connected to the process tank, and the output pump is arranged on the output tube.

In this way, the mixed liquid supply system of this creation uses individual independent liquid supply pipelines to precisely control the flow of each liquid, thus enabling multiple liquid supply pipelines to maintain accurate supply ratios to the premix tank for a long time, making the process The fluid composition is stable and does not change, and can maintain the overall It is to maintain a safe liquid level to supply the process, so the process will not be interrupted. Compared with the prior art, the present creation has obvious advantages.

100: mixed liquid supply system

1: Process unit

11: Process tank

12: Process liquid level sensor

121: supply sensor

122: stop the liquid level sensor

13: output pipe body

14: Output pump

2: Premix unit

21: Premix tank

22: Premix liquid level sensor

221: Empty sensor

222: high water level sensor

23: Rehydration pump

24: return pipe body

25: Return valve

3: connecting pipeline

31: connecting pipe body

32: Connecting valve

4: Liquid supply line

41: Liquid supply pipe body

42: Liquid supply pump

5: Control module

FIG. 1 is a schematic diagram of a mixed liquid supply system according to an embodiment of the invention.

FIG. 2 is a block diagram of a mixed liquid supply system according to an embodiment of the invention.

In order to fully understand this creation, this creation will be described in detail by the following specific examples and accompanying drawings. Those skilled in the art can understand the purpose, features and effects of this creation from the content disclosed in this specification. It should be noted that this creation can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of this creation. The following embodiments will further describe the relevant technical content of this creation in detail, but the disclosed content is not intended to limit the patent scope of this creation. The description is as follows: as shown in FIG. 1 , the mixed liquid supply system 100 of the present invention includes: a process unit 1 , a premix unit 2 , a communication pipeline 3 and a plurality of liquid supply pipelines 4 .

The process unit 1 includes a process tank 11 and a process liquid level sensor 12 disposed on the process tank 11 . The process tank body 11 is used to accommodate the mixed process liquid and is ready to be supplied to the process place. The process liquid is, for example, an etchant, a surface treatment liquid, and the like. The process liquid level sensor 12 is used to detect the liquid level of the process tank 11 . The process liquid level sensor 12 can be a liquid level sensor, using optical principles or buoyancy, etc. The liquid level of the process tank body 11 is judged by the mechanical principle. In other examples, the process liquid level sensor 12 can also be a liquid weight sensor, which senses the weight of the process tank body 11 to determine the liquid level in the tank.

The premix unit 2 includes a premix tank 21 and a premix liquid level sensor 22 disposed in the premix tank 21 . The pre-mixing tank 21 is used to accommodate various liquids supplied by a plurality of liquid supply pipelines, and are fully mixed in the pre-mixing tank 21 to prepare for supplying to the process unit 1 . The various liquids supplied by the liquid supply pipeline are, for example, different kinds of acid liquids, deionized water, and the like. The premix liquid level sensor 22 is used to detect the liquid level of the premix tank 21 . The premixed liquid level sensor 22 can be a liquid level sensor, which can judge the liquid level of the premixed tank body 21 by using optical principles or mechanical principles such as buoyancy. In other examples, the premix liquid level sensor 22 can also be a liquid weight sensor, which senses the weight of the premix tank body 21 to determine the liquid level in the tank.

The communication pipeline 3 includes a communication pipe body 31 and a communication valve 32 . The connecting pipe 31 communicates with the process tank 11 and the premixing tank 21 ; the connecting valve 32 is disposed on the connecting pipe 31 to control whether the connecting pipe 31 is connected or not. The communication valve 32 is preferably a pneumatically controllable pneumatic valve.

Each liquid supply pipeline 4 includes a liquid supply pipe body 41 and a liquid supply pump 42 placed on the liquid supply pipe body 41, each liquid supply pipe body 41 communicates with the premix tank body 21 respectively, wherein each liquid supply pump 42 supply liquid at a specified flow rate respectively. The liquid supply pump 42 is preferably a bearingless magnetic levitation motor, which is especially suitable for ultra-clean fluid delivery required by semiconductor, life science and general industries.

That is to say, the mixed liquid supply system 100 of the present invention utilizes individual independent liquid supply pipelines 4 to precisely control the flow rate of each liquid, and its individual liquid supply pumps 42 can pre-set the flow rate, thus making multiple liquid supply The pipeline 4 maintains a precise supply ratio to the pre-mixing tank 21 for a long time, so that the composition of the process fluid is stable and does not change. For example, the flow ratio of the three liquid supply pumps 42 in Figure 1 can be 1:1:8, 2:2:6 or other ratios, and the premix tank 21 can be replenished to the process tank at any time after mixing 11, so the process tank 11 can be kept at a safe liquid level to supply the process forever, so the process will not be interrupted.

Further, as shown in FIG. 2 , the mixed liquid supply system 100 of the present invention further includes a control module 5 , which is signally connected to each liquid supply pump 42 . The control module 5 controls the flow ratio of each liquid supply pump 42 . That is to say, the control module 5 can determine the value of the flow of each liquid supply pump 42 (for example, determine the rotational speed of the liquid supply pump 42 ), and then control the flow ratio. The control module 5 can also provide a man-machine interface (not shown in the figure), so that the user can manually input and adjust the flow of each liquid supply pump 42 . The control module 5 is, for example, a control circuit or a control chip.

Further, the control module 5 is connected to the process liquid level sensor 12 and the communication valve 32 by signal. When the liquid level signal detected by the process liquid level sensor 12 is lower than a process low water level, the control module 5 controls the communication valve 32 to open. The process low water level is, for example, the threshold for replenishing liquid in the process tank 11. When it is lower than this value, the control module 5 controls the communication valve 32 to open, allowing the liquid mixed in the pre-mixing tank 21 to flow into the process tank 11 for replenishment. In this embodiment, the process liquid level sensor 12 has a supply sensor 121 (supply sensor) and a stop liquid level sensor 122 (stop sensor), the signal is connected to the control module 5 and respectively senses the process low water level And a process high water level. The process high water level is, for example, the threshold at which the process tank 11 stops replenishing liquid. When reaching this value, the control module 5 controls the communication valve 32 to close. The supply sensing element 121 and the stop liquid level sensing element 122 can be integrated into one element capable of detecting multiple liquid levels.

Further, the signal of the control module 5 is connected to the premix liquid level sensor 22, when the liquid level signal detected by the premix liquid level sensor 22 is lower than a premix low water level, the control module 5 controls each liquid supply pump 42 supplies liquid at the aforementioned flow ratio. That is to say, if each liquid supply pump 42 is not supplying liquid in a normal operation mode, but is normally in a standby state, then when the premix tank 21 needs to replenish liquid, the control module 5 controls each liquid supply pump 42 respectively flow to the premixing tank 21 with the set flow rate to ensure that the premixing tank The liquid ingredients within 21 are always in exact proportions. In this embodiment, the premix liquid level sensor 22 has an empty sensor 221 (empty sensor) and a high water level sensor 222, the signal is connected to the control module 5 and respectively senses the premix low water level and a premix high water level. The empty sensor 221 is installed in the connecting pipe body 31. When the empty sensor 221 detects that no fluid passes through the connecting pipe 31, it is determined that the water level is lower than the premixed low water level, and the control module 5 controls the liquid supply pumps 42 to The aforementioned flow ratio supplies the liquid and closes the communication valve 32 to block the communication of the communication pipe body 31 . The premix high water level is, for example, the threshold for the premix tank 21 to stop replenishing liquid. When this value is reached, the control module 5 controls each liquid supply pump 42 to shut down.

However, the present invention is not limited thereto, and the empty sensing element 221 can be replaced by other types of sensing elements, for example, disposed in the premix tank body 21 to detect the low water level of the premix. In addition, the empty sensing element 221 and the high water level sensing element 222 can also be integrated into one element capable of detecting multiple liquid levels.

Further, as shown in FIG. 1 , the premixing unit 2 further includes a fluid replenishment pump 23 , which is disposed on the connecting pipe body 31 and connected to the control module 5 for signals. The replenishment pump 23 is used to provide power to push the liquid mixed in the pre-mixing tank 21 to the process tank 11 . The replenishment pump 23 is preferably a bearingless magnetic levitation motor. When the liquid level signal detected by the process liquid level sensor 12 is lower than the low water level of the process, the control module 5 controls the communication valve 32 to open and the replenishment pump 23 to start, so that the mixed liquid in the pre-mixing tank 21 flows into the process tank 11 for supplementation.

Further, as shown in Figure 1, the premixing unit 2 further includes a return pipe body 24, which communicates with the communicating pipe body 31 and the premixing tank body 21, wherein the connection between the returning pipe body 24 and the communicating pipe body 31 is located at the replenishment pump. 23 downstream. Therefore, in addition to pushing the liquid to the process tank 11 , the replenishment pump 23 can also push the liquid to the return pipe 24 and re-enter the pre-mixing tank 21 . In this way, the power of the replenishment pump 23 is used to promote the mixing of the liquid in the premix tank 21 . However, the present invention is not limited thereto. In other embodiments, the premix unit 2 can also be changed to have an agitator or an oscillator (not shown), which is arranged in the premix tank twenty one. The agitator or vibrator is used to make various liquids enter the pre-mix tank 21 and mix them uniformly. The agitator is, for example, a component that rotates in the pre-mixing tank 21 to promote mixing; the oscillator can provide oscillating waves and also promote uniformity of the liquid.

Furthermore, the premixing unit 2 further includes a return valve 25 , which is disposed on the return pipe 24 and connected to the control module 5 for signals. The opening or closing of the return valve 25 can connect or block the return pipe body 24 .

Further, as shown in FIG. 1 , the process unit 1 further includes an output tube 13 and an output pump 14 , one end of the output tube 13 is connected to the process tank 11 , and the output pump 14 is disposed on the output tube 13 . The output pump 14 is used to transport the liquid in the process tank 11 to the process place under pressure.

The invention has been disclosed in the above embodiments, but those skilled in the art should understand that the embodiments are only used to describe the invention, and should not be construed as limiting the scope of the invention. It should be noted that all changes and replacements equivalent to the embodiments should be included in the scope of this creation. Therefore, the scope of protection of this creation should be defined by the scope of the patent application.

100: mixed liquid supply system

1: Process unit

11: Process tank

12: Process liquid level sensor

121: supply sensor

122: stop the liquid level sensor

13: output pipe body

14: Output pump

2: Premix unit

21: Premix tank

22: Premix liquid level sensor

221: Empty sensor

222: high water level sensor

23: Rehydration pump

24: return pipe body

25: Return valve

3: connecting pipeline

31: connecting pipe body

32: Connecting valve

4: Liquid supply line

41: Liquid supply pipe body

42: Liquid supply pump

Claims (10)

A mixed liquid supply system, which includes: a process unit, including a process tank and a process liquid level sensor arranged in the process tank; a pre-mixing unit, including a pre-mix tank and a pre-mix A premix liquid level sensor in the tank body; a communication pipeline, including a communication pipe body and a communication valve, the communication pipe body communicates with the process tank body and the premix tank body, and the communication valve is arranged on the communication pipe body body; and a plurality of liquid supply pipelines, each of which includes a liquid supply pipe body and a liquid supply pump arranged on the liquid supply pipe body, and each of the liquid supply pipe bodies communicates with the premixing tank respectively , wherein each of the liquid supply pumps supplies liquid at a specified flow rate. The mixed liquid supply system as described in Claim 1 further includes a control module, which is signal-connected to each of the liquid supply pumps, and the control module controls the flow ratio of each of the liquid supply pumps. The mixed liquid supply system as described in Claim 2, wherein the signal of the control module is connected to the process liquid level sensor and the connection valve, and the liquid level signal detected by the process liquid level sensor is lower than a process low water level , the control module controls the communication valve to open. The mixed liquid supply system as described in Claim 2, wherein the signal of the control module is connected to the premixed liquid level sensor, and when the liquid level signal detected by the premixed liquid level sensor is lower than a premixed low water level, The control module controls each of the liquid supply pumps to supply liquid at the flow ratio. The mixed liquid supply system as claimed in claim 4, wherein the pre-mixed liquid level sensor includes an empty sensor disposed on the connecting pipe body. The mixed liquid supply system as described in claim 5, wherein the pre-mixed liquid level sensor further includes a high water level sensor, and the signal is connected to the control module. The mixed liquid supply system as described in Claim 2, wherein the pre-mixed unit further includes a replenishment pump disposed on the connecting pipe body. The mixed liquid supply system as described in claim item 7, wherein the premix unit further includes a return pipe connected to the connecting pipe and the premix tank, and the replenishment pump pushes liquid to the process tank and the return tube body. The mixed liquid supply system as described in claim 8, wherein the premixing unit further includes a return valve disposed on the return pipe. The mixed liquid supply system as described in Claim 1, wherein the process unit further includes an output pipe body and an output pump, one end of the output pipe body communicates with the process tank, and the output pump is arranged on the output pipe body .

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