TWM627561U - Alignment apparatus - Google Patents

Abstract

An alignment apparatus adapted to align a first substrate with a second substrate is provided. The alignment apparatus includes a first carrying platform, a support frame, a first carrying element, a second carrying platform and a second carrying element. The first carrying platform is adapted to move and rotate. The support frame is disposed on the first carrying platform and has a first end and a second end opposite to the first end. The first end is connected to the first carrying platform. The first carrying element is connected to the second end and opposite to the first carrying element. The first carrying element can carry the first substrate. The second carrying platform is disposed on the first carrying platform and adapted to move and rotate. The second carrying element is disposed on the second carrying platform and opposite to the first carrying element. The second carrying element is adapted to carry the second substrate. When the first carrying element moves, the support frame, the first carrying element, the carrying platform and the second carrying element are moved accordingly.

Description

Alignment equipment

This creation is about a process equipment, especially about an alignment equipment.

In recent years, due to the rise of the semiconductor industry, many semiconductor-related devices have been derived. In the semiconductor manufacturing process, it is often necessary to align two substrates to facilitate subsequent processing.

The conventional alignment equipment includes two stages, and each stage is used to carry a piece of substrate. During the alignment process, the two carriers can move and rotate the substrates carried by them respectively, so as to align the two substrates. After the alignment is completed, the two carriers move the substrates carried by them synchronously for subsequent processes. However, in the process of moving, it is often easy to cause the two substrates to be unable to be accurately aligned when moving due to the relationship between the precision errors of the two stages.

This creation provides an alignment device to ensure that the aligned two substrates can be continuously and accurately aligned when moving.

An embodiment of the present invention provides an alignment device suitable for aligning a first substrate and a second substrate. The alignment device includes a first carrier, a support frame, a first carrier, a second carrier, and a first carrier. Two carriers. The first stage is suitable for movement and rotation. The support frame is arranged on the first stage and has opposite first and second ends, and the first end is connected to the first stage. The first carrier is connected to the second end and is opposite to the first carrier, and the first carrier is suitable for carrying the first substrate. The second stage is arranged on the first stage and is suitable for movement and rotation. The second carrier is disposed on the second carrier and is opposite to the first carrier, and the second carrier is suitable for carrying the second substrate. When the first carrier moves, the support frame, the first carrier, the second carrier and the second carrier move accordingly.

In an embodiment of the present invention, the above-mentioned first stage includes a first horizontal movement mechanism and a first rotation mechanism. The first rotating mechanism is disposed on the first horizontal moving mechanism, the first rotating mechanism includes a fixed part and a rotating part, and the rotating part surrounds the fixed part. The first end of the support frame is connected to the rotating part. The second stage includes a second horizontal moving mechanism and a second rotating mechanism. The second horizontal moving mechanism is disposed on the fixed portion, the second rotating mechanism is disposed on the second horizontal moving mechanism, and the second carrier is disposed on the second rotating mechanism. institution.

In an embodiment of the present invention, the above-mentioned first horizontal moving mechanism and second horizontal moving mechanism are adapted to move along a first direction and a second direction that are perpendicular to each other.

In an embodiment of the present invention, the above-mentioned second stage further includes a vertical moving mechanism disposed between the second horizontal moving mechanism and the second rotating mechanism.

In an embodiment of the present invention, the above-mentioned first carrier includes an annular fixing element and an annular clamping element. The annular fixing element is connected to the second end of the support frame, and the annular clamping element is fixed to the annular fixing element and is suitable for clamping the first substrate.

In an embodiment of the present invention, the above-mentioned annular fixing element has a first annular portion and a second annular portion. The first annular portion surrounds the second annular portion, the first annular portion is fixed to the second end of the support frame, the second annular portion has a first bearing surface, the first bearing surface is recessed relative to the first annular portion, and the annular portion is annular. The clamping element is fixed on the first bearing surface.

In an embodiment of the present invention, the above-mentioned annular clamping element includes a plurality of locking screws, a plurality of stop screws, a clamping ring and an abutting member. The clamping ring has a third annular portion and a fourth annular portion, and the third annular portion surrounds the fourth annular portion. The third annular portion has a plurality of first screw holes, a plurality of second screw holes and a concave structure, the first bearing surface has a plurality of locking grooves corresponding to the first screw holes, the locking screws pass through the first screw holes and lock Attached to the lock groove, the stop screw passes through the second screw hole and abuts against the first bearing surface. The fourth annular portion has a second bearing surface for bearing the first substrate, and the second bearing surface is recessed relative to the third annular portion. The fourth annular portion has a notch corresponding to the recessed structure. The abutting member is disposed in the recessed structure and extends into the notch to clamp the first substrate together with the inner sidewall of the third annular portion.

In an embodiment of the present invention, the above-mentioned annular clamping element further includes a fixing member and a plurality of elastic members, a fixing hole and a plurality of positioning grooves are arranged at the bottom of the recessed structure, and the abutting member includes a first plate portion and a second plate portion. a plate part, the first plate part is arranged in the concave structure, and the second plate part is connected to the first plate part and protrudes into the notch. The elastic member is arranged in the positioning groove and pushes against the second plate portion along a predetermined direction, the first plate portion has a perforation, and the fixing member passes through the perforation and is fixed to the fixing hole.

In an embodiment of the present invention, the inner sidewall of the third annular portion is provided with a plurality of protruding structures, and the protruding structures and the abutting member jointly clamp the first substrate.

In an embodiment of the present invention, the above-mentioned alignment device further includes a photographing device disposed above the support frame.

In an embodiment of the present invention, the above-mentioned alignment device further includes a driving member, which is connected to the photographing device, so as to drive the photographing device to move in a direction approaching or moving away from the first carrier.

In the alignment device of this creative embodiment, since the second stage is disposed on the first stage, when the first stage moves, the second stage will move along with it. In this way, it can be ensured that the first substrate and the second substrate are continuously and accurately aligned during the moving process.

In order to make the above-mentioned and other objects, features and advantages of the present invention more obvious and easy to understand, the following embodiments are given and described in detail in conjunction with the accompanying drawings.

FIG. 1 is a three-dimensional schematic diagram of an alignment device according to an embodiment of the invention. Referring to FIG. 1 , the alignment apparatus 100 of this embodiment includes a first carrier 110 , a support frame 120 , a first carrier 130 , a second carrier 140 and a second carrier 150 . The first stage 110 is suitable for movement and rotation. The support frame 120 is disposed on the first stage 110 and has a first end 121 and a second end 122 opposite to each other, and the first end 121 is connected to the first stage 110 . The first carrier 130 is connected to the second end 122 and is opposite to the first carrier 110 , and the first carrier 130 is suitable for carrying the first substrate S1 . The second stage 140 is disposed on the first stage 110 and is suitable for movement and rotation. The second carrier 150 is disposed on the second carrier 140 and is opposite to the first carrier 130 . The second carrier 150 is suitable for carrying the second substrate S1 . When the first carrier 110 moves, the support frame 120 , the first carrier 130 , the second carrier 140 and the second carrier 150 move accordingly. The above-mentioned first substrate S1 and second substrate S2 can be any kind of substrates, and the present invention does not limit the types of substrates.

FIG. 2 is a partially exploded schematic view of the alignment device of FIG. 1 . Referring to FIG. 2 , the first stage 110 includes, for example, a first horizontal moving mechanism 111 and a first rotating mechanism 112 . The first rotating mechanism 112 is disposed on the first horizontal moving mechanism 111 . The first rotating mechanism 112 includes a fixed portion 113 and a rotating portion 114 , and the rotating portion 114 surrounds the fixed portion 113 . The first end 121 of the support frame 120 is connected to the rotating portion 114 . The rotation axis (not shown) of the rotation part 114 is parallel to the vertical direction Z. As shown in FIG. In addition, the first horizontal moving mechanism 111 is adapted to move along the first direction X and the second direction Y which are perpendicular to each other, for example. Specifically, the first horizontal moving mechanism 111 includes, for example, moving parts 115 and 116 , the moving part 115 is adapted to move in the first direction X, and the moving part 116 is disposed on the moving part 115 and is adapted to move in the second direction Y .

In this embodiment, the second stage 140 includes, for example, a second horizontal moving mechanism 141 and a second rotating mechanism 142 , the second horizontal moving mechanism 141 is disposed on the fixed portion 113 , and the second rotating mechanism 142 is disposed on the second horizontal moving mechanism 142 . Institution 141. The second carrier 150 is disposed on the second rotating mechanism 142 . Specifically, the rotation axis (not shown) of the second rotation mechanism 142 is parallel to the vertical direction Z. As shown in FIG. The second horizontal moving mechanism 141 includes, for example, moving parts 144 and 145 , the moving part 144 is adapted to move in the first direction X, and the moving part 145 is disposed on the moving part 144 and is adapted to move in the second direction Y. In addition, the second stage 140 may further include a vertical moving mechanism 143 disposed between the second horizontal moving mechanism 141 and the second rotating mechanism 142 . The vertical movement mechanism 143 is adapted to move along the vertical direction Z. In addition, the second stage 140 may include a vacuum suction mechanism (not shown), and the second carrier 150 may be provided with suction holes 151 through which the vacuum suction mechanism fixes the second substrate S2 by vacuum suction. It should be noted that, depending on different design requirements, the second carrier 150 can directly carry the second substrate S2, or, a substrate holder (not shown) can be provided on the second carrier 150, and then the second substrate S2 can be provided on the base plate holder.

During the alignment of the first substrate S1 and the second substrate S2 in the alignment apparatus 100 of this embodiment, the support frame 120 can be moved and rotated by the first stage 110 to drive the first support frame fixed to the support frame 120 The component 130 and the first substrate S1 disposed on the first carrier 130 move and rotate, and the second substrate S2 is driven to move and rotate by the second carrier 140, so that the first substrate S1 and the second substrate S2 can be precisely aligned bit. In addition, the vertical movement mechanism 143 can adjust the distance between the first substrate S1 and the second substrate S2. After the alignment is completed, since the first carrier 110 can move the support frame 120 , the first carrier 130 , the second carrier 140 and the second carrier 150 , the first substrate S1 disposed on the first carrier 130 The second substrate S2 disposed on the second carrier 150 can move synchronously, so that the first substrate S1 and the second substrate S2 can be continuously and accurately aligned during the movement and subsequent processing.

FIG. 3 is a schematic perspective view of a first carrier of an alignment device according to an embodiment of the invention, and FIG. 4 is a perspective view of an annular fixing element of the first carrier of FIG. 3 . Referring first to FIG. 3 , the first carrier 130 of this embodiment includes, for example, an annular fixing element 131 and an annular clamping element 132 . The annular fixing element 131 is connected to the second end 122 of the support frame 120 (as shown in FIG. 1 ). The annular clamping element 132 is fixed to the annular fixing element 131 and is suitable for clamping the first substrate S1 .

3 and FIG. 4, the annular fixing element 131 has a first annular portion 131a and a second annular portion 131b. The first annular portion 131a surrounds the second annular portion 131b, and the first annular portion 131a is fixed to the second end 122 of the support frame 120 (as shown in FIG. 1 ). The second annular portion 131b has a first bearing surface 131c, the first bearing surface 131c is recessed relative to the first annular portion 131a, and the annular clamping element 132 is fixed on the first bearing surface 131c.

FIG. 5 is a perspective view of the annular clamping element of the first carrier of FIG. 3 . Referring to FIG. 4 and FIG. 5 , in this embodiment, the annular clamping element 132 includes a plurality of locking screws 133 , a plurality of stop screws 134 , a clamping ring 135 and an abutting member 136 . The clamping ring 135 has a third annular portion 135a and a fourth annular portion 135b, and the third annular portion 135a surrounds the fourth annular portion 135b (as shown in FIG. 5 ). The third annular portion 135a has a plurality of first screw holes 135c, a plurality of second screw holes 135d and a concave structure 135e. The first bearing surface 131c has a plurality of locking grooves 131d corresponding to the first screw holes 135c (as shown in FIG. 4 ). The locking screws 133 pass through the first screw holes 135c and are locked to the locking grooves 131d, so that the clamping ring 135 is fixed on the first bearing surface 131c. The set screw 134 passes through the second screw hole 135d and abuts against the first bearing surface 131c. In this embodiment, two second screw holes 135d are respectively provided on both sides of each first screw hole 135c, for example. The fourth annular portion 135b has a second supporting surface 135g for supporting the first substrate S1, and the second supporting surface 135g is recessed relative to the third annular portion 135a. The level of the second bearing surface 135g can be adjusted by the stop screw 134, so that the first substrate S1 (as shown in FIG. 3 ) carried by the second bearing surface 135g can be kept horizontal, so that the first substrate S1 and the second substrate can be kept horizontal. A consistent spacing can be maintained between S2 (pictured). In addition, the fourth annular portion 135b has a notch 135h corresponding to the recessed structure 135e. The abutting member 136 is disposed in the recessed structure 135e and protrudes into the notch 135h to clamp the first substrate S1 together with the inner sidewall 135f of the third annular portion 135a.

6 is an enlarged schematic view of the concave structure of the annular clamping element of FIG. 5 , and FIG. 7 is a schematic cross-sectional view of the concave structure and abutting parts of the annular clamping element of FIG. 5 . Referring to FIGS. 6 and 7 , the annular clamping element 132 further includes a fixing member 137 and a plurality of elastic members 138 (as shown in FIGS. 5 and 6 ). The bottom 135i of the recessed structure 135e is provided with a fixing hole 135j and a plurality of positioning grooves 135k . The abutting member 136 includes a first plate portion 136a and a second plate portion 136b, the first plate portion 136a is disposed in the recessed structure 135e, and the second plate portion 136b is connected to the first plate portion 136a and protrudes into the notch 135h. The first plate portion 136a and the second plate portion 136b are connected in an L shape, for example. The elastic member 138 is disposed in the positioning groove 135k and pushes against the second plate portion 136b along the predetermined direction D1. The predetermined direction D1 is a direction toward the center of the clamping ring 135 . The elastic member 138 may be a compression spring, but not limited thereto.

When the first substrate S1 is to be placed on the second bearing surface 135g, the abutting member 136 is first pushed in a direction opposite to the predetermined direction D1, and then the first substrate S1 is placed on the second bearing surface 135g. Next, after the abutting member 136 is released, the elastic restoring force of the elastic member 138 pushes against the second plate portion 136b in the predetermined direction D1, so that the second plate portion 136b abuts against the first substrate S1. The member 136 and the inner sidewall 135f of the third annular portion 135a jointly hold the first substrate S1. In addition, the first plate portion 136a has a through hole 136c. When the second plate portion 136b abuts against the first substrate S1, the fixing member 137 can pass through the through hole 136c and be fixed to the fixing hole 135j (as shown in FIG. The leaning member 136 is fixed in the recessed structure 135 e , so that the first substrate S1 is firmly clamped to the annular clamping element 132 . In this embodiment, the fixing member 137 is, for example, a screw, and the fixing hole 135j is, for example, a screw hole. In addition, the hole diameter of the through hole 136c may be slightly larger than that of the fixing hole 135j, so that the fixing position of the abutting member 136 can be finely adjusted.

In order to improve the clamping effect, the inner sidewall 135f of the third annular portion 135a may be provided with a plurality of protruding structures 135l, and these protruding structures 135l and the abutting member 136 jointly clamp the first substrate S1 (as shown in FIG. 3 ). .

FIG. 8 is a three-dimensional schematic diagram of an alignment device according to another embodiment of the invention. Referring to FIG. 8 , the above-mentioned alignment apparatus 100 further includes a photographing device 160 disposed above the support frame 120 . For example, the first substrate S1 is, for example, a transparent substrate and is fixed in a clamped manner, so that the images of the first substrate S1 and the second substrate S2 can be easily captured by the camera 160 to assist the first substrate Alignment of S1 with the second substrate S2. The above-mentioned transparent substrate is, for example, a transparent wafer, but the present invention is not limited to this.

In this embodiment, the alignment apparatus 100 may further include a driving member 170 connected to the photographing device 160 to drive the photographing device 160 to move in a direction close to or away from the first carrier 130 , that is, along the direction Z as shown in FIG. 8 . The axial direction is moved, so that the photographing device 160 can clearly capture the images of the first substrate S1 and the second substrate S2.

To sum up, in the alignment device of this creative embodiment, since the second stage is disposed on the first stage, when the first stage moves, the second stage will move along with it. In this way, it can be ensured that the first substrate and the second substrate are continuously and accurately aligned during the moving process. In addition, in one embodiment, the annular clamping element of the first carrier can adjust the level of the second carrier surface and then the level of the first substrate by means of a set screw, so that the first substrate and the second substrate can be connected to each other. maintain a consistent spacing.

Although the present creation has been disclosed as above with examples, it is not intended to limit the present creation. Those with ordinary knowledge in the technical field to which the present creation belongs may make some changes and modifications without departing from the spirit and scope of the present creation. Therefore, the scope of protection of this creation should be determined by the scope of the appended patent application.

100: Alignment device 110: The first stage 111: The first horizontal moving mechanism 112: The first rotation mechanism 113: Fixed part 114: Rotation part 115: Mobile Ministry 116: Mobile Ministry 120: Support frame 121: First End 122: Second End 130: The first carrier 131: Ring fixed part 131a: first annular portion 131b: Second annular portion 131c: first bearing surface 131d: lock slot 132: Ring clamping element 133: Locking screws 134: stop screw 135: Clamping ring 135a: Third Ring 135b: Fourth Ring 135c: The first screw hole 135d: Second screw hole 135e: recessed structure 135f: Inner sidewall 135g: The second bearing surface 135h: Notch 135i: Bottom 135j: Fixing hole 135k: Positioning slot 135l: Raised structure 136:Abutting parts 136a: First Board Section 136b: Second plate part 136c: perforated 137: Fixed parts 138: elastic parts 140: Second stage 141: Second horizontal moving mechanism 142: Second rotation mechanism 143: Vertical movement mechanism 144: Mobile Ministry 145: Mobile Ministry 150: Second carrier 151: adsorption hole 160: Photographic Installations 170:Driver S1: the first substrate S2: Second substrate

FIG. 1 is a three-dimensional schematic diagram of an alignment device according to an embodiment of the invention. FIG. 2 is a partially exploded schematic view of the alignment device of FIG. 1 . FIG. 3 is a three-dimensional schematic diagram of a first carrier of an alignment device according to an embodiment of the invention. FIG. 4 is a perspective view of the annular fixing element of the first carrier of FIG. 3 . FIG. 5 is a schematic perspective view of the annular clamping element of the first carrier of FIG. 3 . FIG. 6 is an enlarged schematic view of the concave structure of the annular clamping element of FIG. 5 . FIG. 7 is a schematic cross-sectional view of the concave structure and the abutting member of the annular clamping element of FIG. 5 . FIG. 8 is a three-dimensional schematic diagram of an alignment device according to another embodiment of the invention.

100: Alignment device

110: The first stage

111: The first horizontal moving mechanism

112: The first rotation mechanism

113: Fixed part

114: Rotation part

115: Mobile Ministry

116: Mobile Ministry

120: Support frame

121: First End

122: Second End

130: The first carrier

140: Second stage

141: Second horizontal moving mechanism

150: Second carrier

S1: the first substrate

Claims (11)

An alignment device suitable for aligning a first substrate with a second substrate, the alignment device comprising: a first stage, suitable for movement and rotation; a support frame, disposed on the first stage, and having a first end and a second end opposite to each other, and the first end is connected to the first stage; a first carrier, connected to the second end and opposite to the first carrier, the first carrier is suitable for carrying the first substrate; a second stage, disposed on the first stage, and adapted to move and rotate; and a second carrier, disposed on the second stage and opposite to the first carrier, the second carrier is suitable for carrying the second substrate, Wherein, when the first carrier moves, the support frame, the first carrier, the second carrier and the second carrier move accordingly. The alignment device of claim 1, wherein: The first stage includes a first horizontal moving mechanism and a first rotating mechanism, the first rotating mechanism is disposed on the first horizontal moving mechanism, the first rotating mechanism includes a fixed part and a rotating part, the rotating A portion surrounds the fixed portion, and the first end of the support frame is connected to the rotating portion; and The second stage includes a second horizontal moving mechanism and a second rotating mechanism, the second horizontal moving mechanism is disposed on the fixed portion, the second rotating mechanism is disposed on the second horizontal moving mechanism, and the first horizontal moving mechanism Two bearing members are arranged on the second rotating mechanism. The alignment device according to claim 2, wherein each of the first horizontal moving mechanism and the second horizontal moving mechanism is adapted to move along a first direction and a second direction that are perpendicular to each other. The alignment device according to claim 2, wherein the second stage further comprises a vertical moving mechanism disposed between the second horizontal moving mechanism and the second rotating mechanism. The alignment device of claim 1, wherein the first carrier comprises: an annular fixing element connected to the second end of the support frame; and An annular clamping element is fixed to the annular fixing element and is suitable for clamping the first substrate. The alignment device of claim 5, wherein the annular fixing element has a first annular portion and a second annular portion, the first annular portion surrounds the second annular portion, and the first annular portion The second annular portion has a first bearing surface, the first bearing surface is recessed relative to the first annular portion, and the annular clamping element is fixed to the first bearing surface noodle. The alignment device of claim 6, wherein the annular clamping element comprises: Multiple locking screws and multiple stop screws; A clamping ring has a third annular portion and a fourth annular portion, the third annular portion surrounds the fourth annular portion, and the third annular portion has a plurality of first screw holes, a plurality of The second screw holes and a concave structure, the first bearing surface has a plurality of locking grooves corresponding to the first screw holes, the locking screws pass through the first screw holes and are locked to the locking grooves, The set screws pass through the second screw holes and abut against the first bearing surface, the fourth annular portion has a second bearing surface for bearing the first substrate, , the second bearing surface is recessed relative to the third annular portion, and the fourth annular portion has a notch corresponding to the recessed structure; and An abutting member is disposed in the recessed structure and extends into the notch to clamp the first substrate together with an inner sidewall of the third annular portion. The alignment device according to claim 7, wherein the annular clamping element further comprises a fixing member and a plurality of elastic members, a bottom of the recessed structure is provided with a fixing hole and a plurality of positioning grooves, and the abutting member comprises a a first plate part and a second plate part, the first plate part is arranged in the recessed structure, the second plate part is connected to the first plate part and protrudes into the gap, the elastic parts are arranged in the The second plate portion is pushed into the positioning groove and along a predetermined direction, the first plate portion has a through hole, and the fixing member is fixed to the fixing hole through the through hole. The alignment device according to claim 7, wherein the inner sidewall of the third annular portion is provided with a plurality of protruding structures, and the protruding structures and the abutting member jointly clamp the first substrate. The alignment device according to claim 1, further comprising a photographing device disposed above the support frame. The alignment device according to claim 10, further comprising a driving member connected to the photographing device to drive the photographing device to move in a direction approaching or moving away from the first carrier.

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