TWM600060U - Spray disc inspection system - Google Patents

Abstract

The plural spray discs of this creation are connected to a main pipe in parallel with a plurality of auxiliary pipelines. The detection system is installed on the auxiliary pipeline and the main pipeline. The detection system at least includes: pumps, frequency converters, and multiple first automatics. Switches, pressure gauges, first flowmeters, and controllers use multiple first automatic switches to open the connection between the main pipe and multiple auxiliary pipes and input liquid to obtain a standard fluid pressure value and a standard fluid flow value in the main pipe. The ratio of the standard fluid pressure value to the standard fluid flow value is used to obtain a standard resistance value, and then a plurality of second automatic switches are used to only open the connection between one of the auxiliary pipelines and the main pipeline, and close the other auxiliary pipelines to obtain a fluid from the main pipeline The pressure value and a fluid flow value are used to obtain a resistance value by the ratio of the two. If the resistance value is higher than the quasi-resistance value, it is determined that one of the nozzles is blocked.

Description

Spray disc inspection system

This creation is related to a detection system that automatically detects whether the spray plate is clogged or not.

According to the general circuit board or wafer manufacturing process, such as electroplating, etching and other wet processes, it may be necessary to spray various solutions evenly on the processed objects; the prior art liquid spraying device for the circuit board manufacturing process includes a Circulation tank and multiple spray discs; the circulating tank contains the liquid to be sprayed, such as electroplating solution, etching solution, photoresist liquid, cleaning solution, etc.; the spray disc contains multiple nozzles; the spray disc and the circulation tank are connected by a single pipe , The pipeline is equipped with a pump, which is used to push the liquid in the circulation tank to the spray plate, and then the liquid is sprayed from the nozzles of the spray plate into the circulation groove.

When the wet process is performed in the circulation tank, the sludge or debris remaining after the wet process will be blocked in the nozzle, resulting in abnormal pressure in the nozzle and process abnormality. Therefore, the performance of each spray plate will be different, and the production yield will be reduced. Furthermore, because the spray plate and pipes are installed in the machine, the machine operator cannot view the spray plate in real time. Therefore, it is impossible to effectively confirm whether the nozzles of the spray plate are blocked. Therefore, the machine operator cannot respond immediately. The machine cannot be repaired immediately.

In view of this, this creation provides a detection system that automatically detects whether the spray disc is clogged, and is its main purpose.

In this creation, a plurality of spray discs are connected in parallel with a main pipe via a plurality of auxiliary pipelines. The plurality of spray discs are provided with at least one nozzle. The detection system is installed on the auxiliary pipeline and the main pipeline. It at least includes: a pump Pu, is connected to the main pipe and can provide liquid to the multiple pipes via the main pipe and the multiple auxiliary pipes. The spray plate is sprayed from the nozzle; a frequency converter is connected to the pump to control the operation frequency of the pump; the plural first automatic switches are respectively arranged on the plural spray plates and the plural auxiliary pipelines A pressure gauge is arranged in the main pipe to obtain a fluid pressure value; a first flow meter is arranged in the main pipe to obtain a fluid flow value; and a controller, respectively and The plurality of first automatic switches, the pressure gauge, and the first flow meter are connected to control the opening or closing of the first automatic switch, and receive the fluid pressure value and the fluid flow value to determine whether the plural nozzles are blocked and no.

In a preferred aspect, a detection pipeline and a second and third automatic switches are further provided. The second automatic opening relationship is arranged on the main pipeline, and the third automatic opening relationship is arranged on the detection pipeline. The main pipeline and the second automatic opening relationship are connected in parallel with the detection pipeline and the third automatic switch between the pump and the plurality of auxiliary pipelines.

In a preferred aspect, a second flow meter is further provided in the detection pipeline, and the second flow meter is connected to the controller.

In a preferred aspect, the diameter of the detection pipeline is smaller than the diameter of the main pipeline.

In a preferred aspect, a plurality of spray discs are provided in a circulation tank, the circulation tank is filled with liquid, and a circulation pipeline is connected to the circulation tank and the pump. The liquid in the circulation tank is supplied to the main pipe.

In a preferred aspect, a fourth automatic switch is arranged on the circulation pipeline.

1: spray plate

11: Nozzle

2: Secondary pipeline

3: Supervisor Road

41: Pump

42: frequency converter

431: The first automatic switch

432: second automatic switch

433: third automatic switch

434: fourth automatic switch

44: pressure gauge

451: first flow meter

452: second flow meter

46: Controller

47: detection pipeline

51: Circulating tank

52: Circulation line

Figure 1 is a schematic diagram of the structure of the first embodiment of the detection system in creation; Figure 2 is a schematic diagram of the structure of the first embodiment of the detection system in creation; and Figure 3 is a schematic diagram of the detection in creation Schematic diagram of the first embodiment of the system.

Unless otherwise specified, the following terms used in the specification of this application and the scope of the patent application have the definitions given below. Please note that this application specification and the scope of the patent application The singular term "a" used in is intended to cover one and more than one contained item, for example at least one, at least two, or at least three, but does not mean that there is only a single contained item. In addition, the open-ended conjunctions such as "include" and "have" used in the scope of the patent application mean that the combination of elements or components described in the claim does not exclude other components or components not specified in the claim. It should also be noted that the term "or" generally also includes "and/or" in its meaning, unless the content clearly indicates otherwise. The term "about" used in the specification of this application and the scope of the patent application is used to modify any slightly variable errors, but such slight changes will not change its essence.

Please refer to Figure 1. The plural spray discs 1 of this creation are connected in parallel to a main pipe 3 with plural auxiliary pipes 2 respectively. The plural spray discs 1 are provided with at least one nozzle 11, and the detection system is installed in the auxiliary For the pipeline 2 and the main pipeline 3, the detection system at least includes: a pump 41, a frequency converter 42, a plurality of first automatic switches 431, a pressure gauge 44, a first flow meter 451, and a controller 46.

The pump 41 is connected to the main pipe 3 and can provide liquid to the multiple spray discs 1 through the main pipe 3 and the plurality of auxiliary pipes 2 to be sprayed from the nozzle 11. The plurality of spray discs 1 are configured to be arranged in a circulation tank 51, the circulation tank 51 is filled with liquid, and a circulation pipe 52 is connected to the circulation tank 51 and the pump 41, and the pump 41 connects The liquid in the circulating tank body 51 is supplied to the main pipe 3.

The frequency converter 42 is connected to the pump 41 to control the operating frequency of the pump 41.

The plurality of second automatic switches 432 are respectively arranged between the plurality of spray discs 1 and the plurality of auxiliary pipes 2.

The pressure gauge 44 is arranged on the main pipe 3 to obtain a fluid pressure value; the first flow meter 451 is arranged on the main pipe 3 to obtain a fluid flow value; and the controller 46 is respectively connected with The plurality of first automatic switches 431, the pressure gauge 44, and the first flow meter 451 are connected to control the opening or closing of the plurality of first automatic switches 431, and receive the fluid pressure value and the fluid flow value.

Because the pipe diameter of the main pipe used for the general spray plate is about 2 inches or more, and the flowmeter cannot measure the small flow under the large pipe diameter, it needs to be connected with a small pipe diameter detection pipe, as shown in Figure 2. As shown, a detection pipeline 47, a second flow meter 452, and a second and third automatic switches 432, 433 are further provided. The second automatic switch 432 is disposed on the main line 3, and the third automatic switch 433 is Disposed in the detection pipeline 47, the main pipeline 3 and the second automatic switch 432 are connected in parallel with the detection pipeline 47 and the third automatic switch 433 between the pump 41 and the plurality of auxiliary pipelines 2, The second flow meter 452 is disposed in the detection pipeline 47, and the second and third automatic switches 432, 433 and the second flow meter 452 are respectively connected to the controller 46.

When used as a whole, the plural spray discs 1 are arranged in a circulation tank 51, the circulation pipe 52 is connected to the circulation tank 51 and the pump 41, and the circulation pipe 52 is equipped with a fourth automatic switch 434, the The fourth automatic switch 434 is connected to the controller 46; first, turn on the first, second, and fourth automatic switches 431, 432, and 434 and turn off the third automatic switch 433 to turn on the main line 3 and the plurality of sub The connection of the pipeline 2; the pump 41 is used to provide the liquid in the circulation tank 51 to the main pipeline 3, the plurality of auxiliary pipelines 2, the plurality of nozzles 1 and sprayed from the nozzle 11; using the pressure table 44 and acquires the first flow meter 451, respectively, one of the main pipe 3 standard fluid pressure value P _S and a standard value of the fluid flow rate Q _S, and the controller 46 places the fluid pressure of the standard value and the standard value of the fluid flow The ratio gives a standard resistance value (P _S /Q _S ).

Turn on the connection between the main pipe 3 and one of the secondary pipes 2, and close the other secondary pipes. As shown in Figure 3, turn on the leftmost first automatic switch 431 and the third and fourth automatic switches 433, 434 to turn on Other first automatic switch 431 and second automatic switch 432; use the pump 41 to provide the liquid in the circulation tank 51 to the input liquid in the detection pipeline 47, one of the sub-pipes 2, and one of the The spray plate 1 and the nozzle 11 are sprayed; the pressure gauge 44 and the second flow meter 452 are used to obtain a fluid pressure value P1 and a fluid flow value Q1 of the detection pipe 47, and the controller 46 uses the fluid The ratio of the pressure value to the fluid flow value is a resistance value (P1/Q1); and the controller 46 is used to compare the resistance value (P1/Q1) with the standard resistance value (P _S /Q _S ), if the If the resistance value (P1/Q1) is higher than the standard resistance value (P _S /Q _S ), it is determined that the nozzle 11 of one of the spray plates 1 is blocked. If the resistance value (P1/Q1) is smaller than the The standard resistance value (P _S /Q _S ) indicates that the nozzle 11 of one of the spray plates 1 is not blocked.

After that, only one set of pipelines are connected to the main pipeline to be opened, and the obtained resistance value is compared with the standard resistance value, and then it can be judged whether the spray plate connected to the opening of a set of pipelines is blocked; The invention uses a controller to automatically control the opening and closing of each automatic switch, and uses the value measured by a pressure gauge and a flow meter as a basis for detecting whether the nozzle of the spray plate is blocked, so as to achieve the purpose of automatic detection.

In addition, when the nozzle 11 of at least one spray plate 1 needs to be fixedly closed due to production requirements, the fluid pressure of the main pipe will increase and the overall flow rate will decrease, resulting in different production conditions and affecting the production yield. The frequency converter 42 controls the operating frequency of the pump 41 to adjust the fluid pressure to a constant value so that the flow rate will not be affected by it, and the production is stable.

The above embodiments are only for the purpose of illustrating the creation, and are not a limitation to the creation. Various changes or changes made by those skilled in the relevant fields without departing from the technical scope of the creation should also be protected by this creation.

1: spray plate

11: Nozzle

2: Secondary pipeline

3: Supervisor Road

41: Pump

42: frequency converter

431: The first automatic switch

432: second automatic switch

44: pressure gauge

451: first flow meter

46: Controller

51: Circulating tank

52: Circulation line

Claims (8)

A spray disc detection system. A plurality of spray discs are respectively connected in parallel with a main pipe via a plurality of auxiliary pipelines. The plurality of spray discs are provided with at least one nozzle. The detection system is installed on the auxiliary pipeline and the main pipeline. : A pump, connected to the main pipe, can provide liquid to the multiple spray discs through the main pipe and the multiple auxiliary pipes, and spray it out from the nozzle; A frequency converter connected to the pump to control the operating frequency of the pump; A plurality of first automatic switches are respectively arranged between the plurality of spray plates and the plurality of auxiliary pipelines; A pressure gauge is arranged on the main pipe to obtain a fluid pressure value; A first flow meter is arranged on the main pipe to obtain a fluid flow rate value; and A controller is respectively connected with the plurality of first automatic switches, the pressure gauge, and the first flow meter, and can control the opening or closing of the first automatic switch, and receive the fluid pressure value and the fluid flow value to Determine whether the plural nozzles are blocked or not. The spray plate inspection system according to claim 1, wherein a detection pipeline and a second and third automatic switches are further provided, the second automatic opening relationship is arranged on the main pipe, and the third automatic opening relationship is arranged on The detection pipeline, the main pipeline, and the second automatic opening relationship are connected in parallel with the detection pipeline and the third automatic switch between the pump and the plurality of auxiliary pipelines. The spray disk detection system according to claim 2, wherein the second and third automatic opening relationships are connected to the controller. The spray disc inspection system according to claim 2, wherein a second flow meter is further arranged in the inspection pipeline. The spray disk detection system according to claim 4, wherein the second flow meter is connected to the controller. The spray disc inspection system of claim 4, wherein the diameter of the inspection pipeline is smaller than the diameter of the main pipeline. The spray disc inspection system according to any one of claims 1 to 6, wherein the plurality of spray discs are configured to be arranged in a circulation tank, the circulation tank is filled with liquid, and a circulation pipeline is connected to the circulation tank Body and the pump, and the pump provides the liquid in the circulation tank to the main pipe. The spray plate detection system according to claim 7, wherein a fourth automatic switch is arranged on the circulation pipeline, and the fourth automatic switch is connected to the controller.

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