TWM644162U - Photomask inner box carrier device for reducing dust pollution and optical inspection equipment for photomask inner box - Google Patents

Abstract

A photomask inner box carrying device for reducing dust pollution, comprising: an isolation plate, a plurality of feet, a first positioning module and a second positioning module, the isolation plate divides the space into a built-in space and a carrying space, and the plurality of feet are set In the carrying space, the first positioning module includes a first driving member and at least one first positioning member. The first driving member is arranged in the built-in space and is configured to move along the first direction. The top of the first positioning member The second positioning module includes a second driving member and at least one second positioning member. The second driving member is arranged in the built-in space and is configured to move along the second direction. The second positioning member The top protrudes to the carrying space. The invention also provides an optical inspection device for a photomask inner box with the aforementioned photomask inner box carrying device. The invention prevents undesired contamination of the reticle inner pod during the inspection process.

Description

Photomask inner box carrier device for reducing dust pollution and optical inspection equipment for photomask inner box

This creation is about a photomask carrier, more particularly about a photomask inner box carrying device that reduces dust pollution and optical inspection equipment for the photomask inner box.

In the advanced lithography process in the semiconductor field, especially the EUV (extreme ultraviolet) lithography process, the cleanliness of the process environment is extremely high. If dust particles (particles) contaminate the photomask, it will cause defects in the lithography process. In order to meet the requirements of cleanliness and protection of the mask, a mask box is generally used to block external dust particles. Therefore, the cleanliness of the photomask pods in the EUV lithography process, especially the photomask inner boxes directly contacting the photomasks, becomes very important.

In order to ensure that the reticle inner box is clean and sound, it is necessary to perform an inspection of the reticle inner box. However, in the necessary process of inspection such as moving and positioning the inner box of the photomask, the movement of the inspection equipment may also generate frictional dust, causing further damage to the inner box of the photomask.

Therefore, in order to solve various problems of conventional photomask inner box inspection, this invention proposes a photomask inner box carrying device that reduces dust pollution.

In order to achieve the above purpose and other purposes, this creation proposes a photomask inner box carrying device that reduces dust pollution, which includes: a partition board that divides the space into a built-in space and a load space; In the carrying space, the respective bottoms of the plurality of feet are connected to the isolation plate, and the positions of the respective tops of the plurality of feet are coplanar; a first positioning module includes a first driving member and at least one first positioning member, The first driving member is disposed in the built-in space and configured to move along a first direction, the bottom of the first positioning member is connected to the first driving member, and the top of the first positioning member protrudes to the bearing space; and a second positioning module, including a second driving member and at least one second positioning member, the second driving member is arranged in the built-in space and is configured to move along a second direction, the first The bottoms of the two positioning members are connected to the second driving member, and the tops of the second positioning members protrude to the bearing space, wherein the co-plane of the first direction and the second direction is parallel to the co-plane of the tops of the plurality of feet .

In one embodiment of the invention, an alignment center is further included in the bearing space.

In one embodiment of the invention, a touch sensor is further included in the bearing space.

In one embodiment of the invention, an optical sensor is further included in the bearing space.

This creation also proposes an optical inspection device for a photomask inner box, which includes: the photomask inner box carrying device for reducing dust pollution as mentioned above; an optical photography device facing the carrying space; and a control device, which is signally connected to the optical A photographing device, the first driving component and the second driving component.

In this way, the photomask inner box carrying device and the optical inspection equipment for the photomask inner box that reduce dust pollution in this invention divide the space into a built-in space and a carrying space by means of the isolation plate, and the photomask inner box to be inspected is set in the In the carrying space, the movable parts of the dust particles that may cause pollution, that is, the first driving member and the second driving member are buried in the inner space to reduce unnecessary pollution to the inner box of the photomask and lift the inner box of the photomask Cleanliness and reliability of inspections.

In order to fully understand this creation, this creation will be described in detail by the following specific examples and accompanying drawings. Those skilled in the art can understand the purpose, features and effects of this creation from the content disclosed in this specification. It should be noted that this creation can be implemented or applied through other different specific embodiments, and various modifications and changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of this creation. The following embodiments will further describe the relevant technical content of this creation in detail, but the disclosed content is not intended to limit the patent scope of this creation. The instructions are as follows:

As shown in Fig. 1A and Fig. 1B, the photomask inner box carrying device 100 for reducing dust pollution in the embodiment of the invention includes: a separation plate 1, a plurality of feet 2, a first positioning module 3 and a second positioning module Mod 4.

The isolation board 1 divides the space into a built-in space S1 and a carrying space S2. Preferably, the storage space S1 is located below the gravity direction of the isolation board 1 , and the bearing space S2 is located above the gravity direction of the isolation board 1 , but the present invention is not limited thereto. In this embodiment, the isolation board 1 is a planar plate, but the invention is not limited thereto. In other embodiments, the isolation board 1 may have other undulations on the surface, or may be a box to cover the The first positioning module 3 and the second positioning module 4.

A plurality of feet 2 are disposed in the bearing space S2. The respective bottoms 21 of the plurality of feet 2 are connected to the isolation board 1 , and the positions of the respective tops 22 of the plurality of feet 2 are coplanar. As shown in FIG. 1B , the top 22 is the main location for contacting the pod P, which is located on the same plane to be supported by the feet 2 . The plurality of feet 2 must be at least three, and in this embodiment, the number is four, so as to support the four corners of the inner box P of the photomask respectively. However, the present invention is not limited thereto, and in other embodiments, the number and arrangement positions of the plurality of feet 2 can be changed as required.

The first positioning module 3 includes a first driving component 31 and at least one first positioning component 32 . The first driving member 31 is disposed in the storage space S1 and configured to move along a first direction d1. The first driving member 31 is, for example, a servo motor, a cylinder, or a mechanism for transmitting linear power. The first positioning member 32 is elongated, the bottom of the first positioning member 32 is connected to the first driving member 31 , and the top of the first positioning member 32 protrudes to the bearing space S2. The purpose of the first positioning member 32 is to assist the positioning of the photomask inner box P in the first direction d1, through the first driving member 31 to adjust the position in the first direction d1, so that the first positioning member 32 is positioned out of the photomask inner box P's position. In this embodiment, the first positioning module 3 includes two first positioning members 32 , the bottoms of the two first positioning members 32 are connected to the first driving member 31 and driven by the first driving member 31 . The two first positioning members 32 are arranged parallel to each other, so as to effectively limit the inner box P of the photomask. However, the invention is not limited thereto, and in other embodiments, the type and quantity of the first positioning members 32 can be changed. In this embodiment, the first positioning module 3 is provided on one side of the isolation plate 1 , but in other embodiments, the first positioning modules 3 may be respectively provided on both sides of the isolation plate 1 .

Similarly, the second positioning module 4 includes a second driving component 41 and at least one second positioning component 42 . The second driving member 41 is disposed in the storage space S1 and configured to move along a second direction d2. The second driving member 41 is, for example, a servo motor, a cylinder, or a mechanism for transmitting linear power. The second positioning member 42 is elongated, the bottom of the second positioning member 42 is connected to the second driving member 41 , and the top of the second positioning member 42 protrudes to the bearing space S2. The purpose of the second positioning member 42 is to assist the positioning of the photomask inner box P in the second direction d2, through the second driving member 41 to adjust the position in the second direction d2, so that the second positioning member 42 is positioned out of the photomask inner box P's position. In this embodiment, the second positioning module 4 includes two second positioning members 42 , the bottoms of the two second positioning members 42 are connected to the second driving member 41 and driven by the second driving member 41 . The two second positioning members 42 are arranged parallel to each other, so as to effectively limit the inner box P of the photomask. However, the invention is not limited thereto, and in other embodiments, the type and quantity of the second positioning members 42 can be changed. In this embodiment, the second positioning module 4 is provided on one side of the isolation plate 1 , but in other embodiments, the second positioning modules 4 may be respectively provided on both sides of the isolation plate 1 .

The aforementioned co-planes of the first direction d1 and the second direction d2 are parallel to the co-planes of the tops 22 of the plurality of bases 2, that is to say, the moving/positioning directions of the first positioning module 3 and the second positioning module 4 are both It is on the plane where the inner box P of the photomask is located, and the first positioning module 3 and the second positioning module 4 cooperate to limit the inner box P of the photomask in two directions of the plane. In this embodiment, the first direction d1 and the second direction d2 are perpendicular to each other, which may be the X axis and the Y axis respectively, and the Z axis is the aforementioned gravity direction. However, the invention is not limited thereto. In other embodiments, the first direction d1 and the second direction d2 are not necessarily perpendicular, and the first direction d1 and the second direction d2 are not necessarily perpendicular to the gravity direction.

To sum up, the space is divided into the built-in space S1 and the carrying space S2 by the isolation plate 1, and the photomask inner box P to be tested is set in the carrying space S2, and the movable parts of dust particles that may cause pollution, namely The first driving member 31 and the second driving member 41 are buried in the inner space S1 to reduce unnecessary pollution to the photomask inner box P and improve the cleanliness of the photomask inner box and the reliability of inspection.

Further, in this embodiment, the photomask-in-box carrying device 100 for reducing dust pollution further includes an alignment center 5 disposed in the carrying space S2. The alignment center 5 is used for reading by an external device to determine whether to align the reticle-in-box carrying device 100 or whether to move the position of the reticle-in-box carrying device 100 to reduce dust pollution. In this embodiment, the alignment center 5 is a cross, and the extension directions of the cross match the first direction d1 and the second direction d2 respectively, but the present invention is not limited thereto.

Further, in this embodiment, the photomask-in-box carrying device 100 for reducing dust pollution further includes a contact sensor 6 disposed in the carrying space S2. The contact sensor 6 is used for contacting the bottom of the photomask inner box P to determine whether the photomask inner box P has been placed. The touch sensor 6 can be a mechanical sensor or an electromagnetic or piezoelectric sensor, and the present invention is not limited thereto.

Further, in this embodiment, the photomask-in-box carrying device 100 for reducing dust pollution further includes an optical sensor 7 disposed in the carrying space S2. The optical sensor 7 optically judges whether the box P has been placed. The optical sensor 7 can use the reflected light or incident light of components such as infrared detectors to determine whether the pod P exists in the carrying space S2.

Further, as shown in FIG. 2 , the present invention also proposes an optical inspection device for a photomask inner box, which includes the aforementioned photomask inner box carrying device 100 for reducing dust pollution, an optical photography device 8 and a control device 9 .

The lens of the optical photography device 8 is directed towards the carrying space S2 to capture the image of the box P in the mask.

The control device 9 is signal-connected to the optical photography device 8 , the first driving component 31 and the second driving component 41 . The control device 9 is, for example, a control chip or a control circuit with a judgment logic circuit. The control device 9 controls the optical photography device 8 to align with the photomask inner box P on the loading space S2 to take images and perform optical inspection. d1, movement in the second direction d2, to adjust the positioning of the inner box P of the photomask.

The invention has been disclosed in the above embodiments, but those skilled in the art should understand that the embodiments are only used to describe the invention, and should not be construed as limiting the scope of the invention. It should be noted that all changes and replacements equivalent to the embodiments should be included in the scope of this creation. Therefore, the scope of protection of this creation should be defined by the scope of the patent application.

100: Photomask Inner Box Carrying Device for Reducing Dust Pollution 1: Isolation board 2: foot seat 21: Bottom 22: top 3: The first positioning module 31: the first driving member 32: The first positioning member 4: The second positioning module 41: second driving member 42: Second positioning member 5: Align the center 6: Contact sensor 7: Optical sensor 8: Optical photography device 9: Control device d1: the first direction d2: second direction P: Reticle inner box S1: Built-in space S2: carrying space

FIG. 1A is a three-dimensional schematic diagram of a photomask-in-box carrying device for reducing dust pollution according to an embodiment of the present invention. FIG. 1B is a schematic diagram of an inner box carrying a photomask according to an embodiment of the present invention. FIG. 2 is a three-dimensional schematic diagram of an optical inspection device for a photomask inner box according to an embodiment of the present invention.

100: Photomask Inner Box Carrying Device for Reducing Dust Pollution

1: Isolation board

2: foot seat

21: Bottom

22: top

3: The first positioning module

31: the first driving member

32: The first positioning member

4: The second positioning module

41: second driving member

42: Second positioning member

5: Align the center

6: Contact sensor

7: Optical sensor

d1: the first direction

d2: second direction

S1: Built-in space

S2: carrying space

Claims (5)

A photomask inner box carrying device for reducing dust pollution, comprising: A separation board divides the space into a built-in space and a load-bearing space; A plurality of feet are arranged in the load-bearing space, the respective bottoms of the plurality of feet are connected to the isolation plate, and the positions of the respective tops of the plurality of feet are in the same plane; A first positioning module, including a first driving member and at least one first positioning member, the first driving member is arranged in the built-in space and configured to move along a first direction, the first positioning member The bottom of the first driving member is connected to the first driving member, and the top of the first positioning member protrudes to the carrying space; and A second positioning module, including a second driving member and at least one second positioning member, the second driving member is arranged in the built-in space and configured to move along a second direction, the second positioning member The bottom of the second driving member is connected to the second driving member, and the top of the second positioning member protrudes to the carrying space, Wherein the co-plane of the first direction and the second direction is parallel to the co-plane of the tops of the plurality of feet. The photomask inner box carrying device for reducing dust pollution as described in Claim 1 further includes an alignment center disposed in the carrying space. The photomask inner box carrying device for reducing dust pollution as described in claim 1 further includes a contact sensor disposed in the carrying space. The photomask-in-box carrying device for reducing dust pollution as described in Claim 1 further includes an optical sensor disposed in the carrying space. An optical inspection device for a photomask inner box, comprising: The photomask inner box carrying device for reducing dust pollution as described in any one of claims 1 to 4; an optical photographing device facing the carrying space; and A control device, signally connected to the optical photography device, the first driving component and the second driving component.

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