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TWM640968U - Non-contact automatic compensation tool device - Google Patents

Non-contact automatic compensation tool device Download PDF

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Publication number
TWM640968U
TWM640968U TW111214094U TW111214094U TWM640968U TW M640968 U TWM640968 U TW M640968U TW 111214094 U TW111214094 U TW 111214094U TW 111214094 U TW111214094 U TW 111214094U TW M640968 U TWM640968 U TW M640968U
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TW
Taiwan
Prior art keywords
diode
diode ray
tool
work piece
tool device
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TW111214094U
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Chinese (zh)
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陳俊雄
劉正義
陳啟賢
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陳俊雄
劉正義
陳啟賢
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Priority to TW111214094U priority Critical patent/TWM640968U/en
Publication of TWM640968U publication Critical patent/TWM640968U/en

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Abstract

本創作係提供一種非接觸式自動補償刀具裝置,所述該刀具裝置包括有:一工作平台、一工作件以及一刀具,所述該工作平台上分別電性連接各設置有:一控制部、一二極體射線發射部以及一二極體射線接收部,所述該刀具係設置於所述該工作件之一容置槽中,所述該工作件上有一量測部,且所述該刀具上具有一標線部,該量測部以及該標線部係位於同一水平基準線上,藉此,當該二極體射線發射部發射一二極體射線至所述該刀具上且反射回該二極體射線接收部後,該控制部會依據所偵測到之數值自動補償所述該工作件之距離,將所述該刀具調整到適當之工作深淺高度。 This creation system provides a non-contact automatic compensation tool device. The tool device includes: a working platform, a work piece and a tool. The working platform is electrically connected and each is provided with: a control part, A diode ray emitting part and a diode ray receiving part, the tool is set in a receiving groove of the work piece, there is a measuring part on the work piece, and the There is a marking part on the tool, and the measuring part and the marking part are located on the same horizontal reference line, whereby when the diode ray emitting part emits a diode ray to the tool and reflects it back After the diode ray receiving part, the control part will automatically compensate the distance of the workpiece according to the detected value, and adjust the cutter to an appropriate working depth and height.

Description

非接觸式自動補償刀具裝置 Non-contact automatic compensation tool device

本創作係有關於一種刀具裝置,尤指一種可自動補償距離位置以及調整適當工作深淺高度之非接觸式自動補償刀具裝置。 The invention relates to a tool device, especially a non-contact automatic compensation tool device that can automatically compensate the distance position and adjust the appropriate working depth and height.

按,隨著科技日新月異的進步以及發展,帶來了各項產業快速的變化,當中就以工業的改變最為驚人,因為大至大型機具或是微小的零組件以及晶圓等等都需要有工業的製造或是加工才能夠完成,近年來更有人提出當前正處於「工業4.0」的年代,許多的產業都必須要自動化甚至於智能化,才能夠達到增加生產力或者是提升效率,也就是要不斷地創新以及改造才會有進步的空間,就以一般傳統的切割機具而言也必須要有突破性的先進技術才能夠追上,切割機具的用途相當廣泛,如果是使用在已經大部分使用人工智慧的晶圓產業上時,當晶圓在貼膜完成後必須藉由切割機具切除不必要的薄膜餘料,這部分通常還是依靠人力的目視以及經驗來完成,經驗可以由實際上的操作或是過往的工作記錄取得一個參考值來比對,但是,目視就相當地主觀以及難以控制了,關係到使用者對於公差的定義到哪裡?以及對於切割機具的瞭解程度有多少等問題上,種種的問題都會直接反映在晶圓是否為良率上,以及後續該如何處理晶圓等等的 問題。 By the way, with the rapid progress and development of science and technology, it has brought about rapid changes in various industries, among which the industrial changes are the most amazing, because large machines or tiny components and wafers require industrial In recent years, some people have suggested that in the era of "Industry 4.0", many industries must be automated or even intelligent in order to increase productivity or improve efficiency, that is, to continuously There will be room for improvement only through ground innovation and transformation. As far as general traditional cutting tools are concerned, breakthrough advanced technology must also be able to catch up. Cutting tools have a wide range of uses. In the smart wafer industry, after the film is attached to the wafer, the unnecessary film residue must be cut off by a cutting machine. This part is usually completed by human vision and experience. Experience can be obtained from actual operation or Past work records are compared with a reference value. However, visual inspection is quite subjective and difficult to control. What is the user's definition of tolerance? As well as how much you know about cutting tools, all kinds of problems will be directly reflected in whether the wafer is yield, and how to deal with the wafer in the future, etc. question.

故,如何將上述缺失問題加以改進,乃為本案創作人所欲解決之技術困難點之所在。 Therefore, how to improve the above-mentioned missing problems is the technical difficulty that the author of this case wants to solve.

爰此,為達上述之目的,本創作係提供一種非接觸式自動補償刀具裝置,所述該刀具裝置其包括有:一工作平台、一工作件以及一刀具,所述該工作平台上分別各設置有:一控制部、一二極體射線發射部以及一二極體射線接收部,透過該控制部係分別可與該二極體射線發射部以及該二極體射線接收部互相電性連接,所述該工作件係與該控制部呈現電性連接,並所述該工作件上具有一夾固部,該夾固部於內側處形成有一容置槽,且該夾固部於一端緣處上具有一量測部,並所述該刀具係設置於該容置槽中,且該容置槽以及所述該刀具係無縫緊密貼齊,並所述該刀具於一端緣處上具有一標線部,該量測部以及該標線部係位於同一水平基準線上,藉此,由於該容置槽以及所述該刀具係無縫緊密貼齊,且透過該量測部以及該標線部係位於同一水平基準線上,因此,不會有所述該刀具尺寸過大或是尺寸過小與該夾固部不合之問題產生,當該二極體射線發射部發射一二極體射線至所述該刀具上且反射回該二極體射線接收部後,該控制部會依據由該二極體射線接收部所偵測到該二極體射線之數值自動補償所述該工作件之距離位置,將所述該刀具調整到適當之工作深淺高度。 Therefore, in order to achieve the above-mentioned purpose, this creation system provides a non-contact automatic compensation tool device, which includes: a working platform, a work piece and a tool. It is provided with: a control part, a diode ray emitting part and a diode ray receiving part, through which the control part can be electrically connected with the diode ray emitting part and the diode ray receiving part respectively , the working part is electrically connected to the control part, and the working part has a clamping part, and the clamping part forms a receiving groove on the inner side, and the clamping part is on an end edge There is a measuring part on the center, and the said tool is set in the accommodating groove, and the accommodating groove and the said tool are seamlessly and tightly fitted together, and said said tool has a A marking part, the measuring part and the marking part are located on the same horizontal reference line, thereby, since the accommodating groove and the said tool are seamlessly and closely aligned, and through the measuring part and the marking The line parts are located on the same horizontal reference line, so there will be no problem that the tool is too large or too small to fit the clamping part. When the diode ray emitting part emits a diode ray to the After being reflected on the tool and reflected back to the diode ray receiving part, the control part will automatically compensate the distance position of the workpiece according to the value of the diode ray detected by the diode ray receiving part , adjust the cutter to the appropriate working depth.

1:刀具裝置 1: Tool device

2:工作平台 2: Working platform

21:控制部 21: Control Department

22:二極體射線發射部 22: Diode ray emission department

221:二極體射線 221:Diode rays

23:二極體射線接收部 23: Diode ray receiving unit

3:工作件 3: Work piece

31:夾固部 31: clamping part

32:容置槽 32: storage tank

33:量測部 33: Measurement Department

4:刀具 4: Knife

41:標線部 41: Marking Department

第1圖係本創作之立體外觀圖。 Picture 1 is the three-dimensional appearance picture of this creation.

第2圖係本創作之局部示意圖。 Figure 2 is a partial schematic diagram of this creation.

第3圖係本創作之較佳實施例示意圖一。 Fig. 3 is a schematic diagram one of a preferred embodiment of the creation.

第4圖係本創作之較佳實施例示意圖二。 Fig. 4 is the preferred embodiment schematic diagram II of this creation.

請同時參閱第1圖、第2圖、第3圖與第4圖所示,係為本創作之立體外觀圖、局部示意圖與較佳實施例示意圖一至二,由圖中可清楚看出,其中,所述該刀具裝置1係具有: Please refer to Fig. 1, Fig. 2, Fig. 3 and Fig. 4 at the same time, which are three-dimensional appearance diagrams, partial schematic diagrams and schematic diagrams 1 to 2 of this creation. It can be clearly seen from the figures that , the cutter device 1 has:

一工作平台2,所述該工作平台2上分別各設置有:一控制部21、一二極體射線發射部22以及一二極體射線接收部23,透過該控制部21分別可與該二極體射線發射部22以及該二極體射線接收部23互相電性連接,該二極體射線發射部22係可以發射出一二極體射線221,且該二極體射線接收部23係可以接收該二極體射線221; A working platform 2, said working platform 2 is respectively provided with: a control part 21, a diode ray emitting part 22 and a diode ray receiving part 23, through which the control part 21 can communicate with the two The polar body ray emitting part 22 and the diode ray receiving part 23 are electrically connected to each other, the diode ray emitting part 22 can emit a diode ray 221, and the diode ray receiving part 23 can receiving the diode ray 221;

一工作件3,所述該工作件3係與該控制部21呈現電性連接,並所述該工作件3係位於所述該工作平台2上方位置處,且所述該工作件3上具有一夾固部31,該夾固部31於內側處形成有一容置槽32,且該夾固部31於一端緣處上具有一量測部33; A work piece 3, the work piece 3 is electrically connected to the control part 21, and the work piece 3 is located above the work platform 2, and the work piece 3 has A clamping part 31, the clamping part 31 is formed with a receiving groove 32 at the inner side, and the clamping part 31 has a measuring part 33 on one end edge;

一刀具4,所述該刀具4係設置於該容置槽32中,並所述該刀具4於一端緣處上具有一標線部41; A cutter 4, the cutter 4 is arranged in the accommodating groove 32, and the cutter 4 has a marking portion 41 on an end edge;

其中,該容置槽32以及所述該刀具4係無縫緊密貼齊; Wherein, the accommodating groove 32 and the cutter 4 are closely aligned seamlessly;

其中,該量測部33以及該標線部41係位於同一水平基準線上; Wherein, the measurement part 33 and the marking part 41 are located on the same horizontal reference line;

其中,該二極體射線發射部22發射該二極體射線221至所述該刀具4上且反射被該二極體射線接收部23所接收; Wherein, the diode ray emitting part 22 emits the diode ray 221 onto the tool 4 and is reflected and received by the diode ray receiving part 23;

其主要是,所述該工作平台2上分別各設置有:該控制部21、該二極體射線發射部22以及該二極體射線接收部23,透過該控制部21分別可與該二極體射線發射部22以及該二極體射線接收部23互相電性連接,且該二極體射線發射部22係可以發射出該二極體射線221,且該二極體射線接收部23係可以接收該二極體射線221,並所述該工作件3係與該控制部21呈現電性連接,所述該工作件3係位於所述該工作平台2上方位置處,並所述該工作件3上具有該夾固部31,該夾固部31於內側處形成有該容置槽32,且該夾固部31於一端緣處上具有該量測部33,並所述該刀具4係設置於該容置槽32中,且該容置槽32以及所述該刀具4係無縫緊密貼齊,並所述該刀具4於一端緣處上具有該標線部41,且該量測部33以及該標線部41係位於同一水平基準線上,其中,該二極體射線發射部22發射該二極體射線221至所述該刀具4上且反射後被該二極體射線接收部23所接收,藉此,由於該容置槽32以及所述該刀具4係無縫緊密貼齊,且透過該量測部33以及該標線部41係位於同一水平基準線上,因此,不會有所述該刀具4尺寸過大或是尺寸過小與該夾固部31不匹配之問題產生,使用者在當下即可立即視測判斷出所述該刀具4係相容於該容置槽32中,且該量測部33以及該標線部41應該位於同一水平基準線上,也就是該量測部33以及該標線部41應該重疊且平行於同一水平基準線上,且在所述該刀具裝置1下刀工作前,該二極體射線發射部22發射出該二極體射線221至所述該刀具4上,所述該刀具4會反射該二極體射線221至該二極體射線接收部23,由於該控制部21分別可與該二極體射線發射部22以及該二極體射 線接收部23互相電性連接,且所述該工作件3係與該控制部21呈現電性連接,該控制部21會依據由該二極體射線接收部23所偵測到該二極體射線221之數值自動補償所述該工作件3之距離位置,且所述該工作件3係位於所述該工作平台2上方位置處,利用該控制部21自動補償所述該工作件3之距離位置後將所述該刀具4調整到適當之工作深淺高度,所述該刀具裝置1在不接觸任何工件之情況下會自動補償所述該工作件3之距離位置將所述該刀具4調整到適當之工作深淺高度。 It is mainly that the said working platform 2 is respectively provided with: the control part 21, the diode ray emitting part 22 and the diode ray receiving part 23, through which the control part 21 can communicate with the diode ray respectively. The body ray emitting part 22 and the diode ray receiving part 23 are electrically connected to each other, and the diode ray emitting part 22 can emit the diode ray 221, and the diode ray receiving part 23 can Receive the diode ray 221, and the work piece 3 is electrically connected to the control part 21, the work piece 3 is located above the work platform 2, and the work piece 3 has the clamping portion 31, the clamping portion 31 is formed with the accommodation groove 32 at the inner side, and the clamping portion 31 has the measuring portion 33 on one end edge, and the tool 4 is It is arranged in the accommodating groove 32, and the accommodating groove 32 and the said cutter 4 are seamlessly and tightly aligned, and said said cutter 4 has the marking part 41 on one end edge, and the measuring The part 33 and the marking part 41 are located on the same horizontal reference line, wherein the diode ray emitting part 22 emits the diode ray 221 onto the tool 4 and is reflected by the diode ray receiving part 23 received, whereby, because the accommodating groove 32 and the said tool 4 are seamlessly and closely aligned, and the measuring portion 33 and the marking portion 41 are located on the same horizontal reference line, therefore, no If the tool 4 is too large or too small to match the clamping portion 31 , the user can immediately visually judge that the tool 4 is compatible with the accommodating groove 32 , and the measuring portion 33 and the marking portion 41 should be located on the same horizontal reference line, that is, the measuring portion 33 and the marking portion 41 should overlap and be parallel to the same horizontal reference line, and in the tool device 1. Before the cutting operation, the diode ray emitting part 22 emits the diode ray 221 to the cutter 4, and the cutter 4 will reflect the diode ray 221 to the diode ray receiver. part 23, since the control part 21 can be connected with the diode ray emitting part 22 and the diode ray emitting part respectively The line receiving parts 23 are electrically connected to each other, and the work piece 3 is electrically connected to the control part 21, and the control part 21 will detect the diode according to the diode ray receiving part 23. The value of the ray 221 automatically compensates the distance position of the work piece 3, and the work piece 3 is located at the position above the work platform 2, and the distance of the work piece 3 is automatically compensated by the control part 21 After adjusting the tool 4 to the appropriate working depth, the tool device 1 will automatically compensate the distance between the workpiece 3 and adjust the tool 4 to the position without touching any workpiece. Appropriate working depth and height.

本創作所述該刀具裝置1中之該容置槽32以及所述該刀具4係無縫緊密貼齊,且透過該量測部33以及該標線部41係位於同一水平基準線上,不會有所述該刀具4尺寸過大或是尺寸過小與該夾固部31不合之問題產生,當該二極體射線發射部22發射該二極體射線221至所述該刀具4上且反射回該二極體射線接收部23後,該控制部21會依據由該二極體射線接收部23所偵測到該二極體射線221之數值自動補償所述該工作件3之距離位置,將所述該刀具4調整到適當之工作深淺高度。 The accommodating groove 32 in the cutter device 1 described in the present invention and the cutter 4 are seamlessly and closely aligned, and the measuring portion 33 and the marking portion 41 are located on the same horizontal reference line, so there is no There is the problem that the size of the tool 4 is too large or too small to fit the clamping part 31. When the diode ray emitting part 22 emits the diode ray 221 to the tool 4 and reflects it back to the After the diode ray receiving part 23, the control part 21 will automatically compensate the distance position of the workpiece 3 according to the value of the diode ray 221 detected by the diode ray receiving part 23, and Said that the cutter 4 is adjusted to the appropriate working depth.

上述所列舉之實施例係用以闡明本創作之一較佳可行實施例,並非用以限定本創作之範圍,任何熟習此技藝者,在不脫離本創作之精神和範圍內,當可做些許更動與潤飾,因此本創作之保護範圍當視後附之申請專利範圍所界定者為準。 The above-mentioned embodiment is used to illustrate one of the preferred implementations of this creation, not to limit the scope of this creation. Any person who is familiar with this technology should be able to do a little without departing from the spirit and scope of this creation. Changes and modifications, so the scope of protection of this creation should be defined by the scope of the attached patent application.

1:刀具裝置 1: Tool device

2:工作平台 2: Working platform

21:控制部 21: Control Department

22:二極體射線發射部 22: Diode ray emission department

23:二極體射線接收部 23: Diode ray receiving unit

3:工作件 3: Work piece

31:夾固部 31: clamping part

4:刀具 4: Knife

Claims (4)

一種非接觸式自動補償刀具裝置,所述該刀具裝置其包括有: A non-contact automatic compensation tool device, said tool device includes: 一工作平台,所述該工作平台上分別各設置有:一控制部、一二極體射線發射部以及一二極體射線接收部,透過該控制部分別可與該二極體射線發射部以及該二極體射線接收部互相電性連接,該二極體射線發射部係可以發射出一二極體射線,且該二極體射線接收部係可以接收該二極體射線; A working platform, the working platform is respectively provided with: a control part, a diode ray emitting part and a diode ray receiving part, through which the control part can communicate with the diode ray emitting part and the diode ray emitting part respectively. The diode ray receiving parts are electrically connected to each other, the diode ray emitting part can emit a diode ray, and the diode ray receiving part can receive the diode ray; 一工作件,所述該工作件係與該控制部呈現電性連接,並所述該工作件係位於所述該工作平台上方位置處,且所述該工作件上具有一夾固部,該夾固部於內側處形成有一容置槽,且該夾固部於一端緣處上具有一量測部; A work piece, the work piece is electrically connected to the control part, and the work piece is located above the work platform, and there is a clamping part on the work piece, the An accommodating groove is formed on the inner side of the clamping part, and a measuring part is formed on an end edge of the clamping part; 一刀具,所述該刀具係設置於該容置槽中,並所述該刀具於一端緣處上具有一標線部。 A cutter, the cutter is arranged in the accommodating groove, and the cutter has a marking portion on an end edge. 如申請專利範圍第1項所述之非接觸式自動補償刀具裝置,其中,該容置槽以及所述該刀具係無縫緊密貼齊。 The non-contact automatic compensation tool device described in item 1 of the scope of the patent application, wherein, the accommodating groove and the tool are closely aligned seamlessly. 如申請專利範圍第1項所述之非接觸式自動補償刀具裝置,其中,該量測部以及該標線部係位於同一水平基準線上。 The non-contact automatic compensation tool device described in item 1 of the scope of the patent application, wherein the measuring part and the marking part are located on the same horizontal reference line. 如申請專利範圍第1項所述之非接觸式自動補償刀具裝置,其中,該二極體射線發射部發射該二極體射線至所述該刀具上且反射被該二極體射線接收部所接收。 The non-contact automatic compensation tool device described in item 1 of the scope of the patent application, wherein the diode ray emitting part emits the diode ray to the tool and the reflection is received by the diode ray receiving part take over.
TW111214094U 2022-12-20 2022-12-20 Non-contact automatic compensation tool device TWM640968U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117102959A (en) * 2023-10-25 2023-11-24 宁波经纬数控股份有限公司 Cutting height control method and cutting equipment of cutting machine head

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117102959A (en) * 2023-10-25 2023-11-24 宁波经纬数控股份有限公司 Cutting height control method and cutting equipment of cutting machine head

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