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TWM640019U - Optical inspection module for wafers - Google Patents

Optical inspection module for wafers Download PDF

Info

Publication number
TWM640019U
TWM640019U TW111210084U TW111210084U TWM640019U TW M640019 U TWM640019 U TW M640019U TW 111210084 U TW111210084 U TW 111210084U TW 111210084 U TW111210084 U TW 111210084U TW M640019 U TWM640019 U TW M640019U
Authority
TW
Taiwan
Prior art keywords
wafers
optical inspection
inspection module
module
optical
Prior art date
Application number
TW111210084U
Other languages
Chinese (zh)
Inventor
邱志安
Original Assignee
邱志安
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 邱志安 filed Critical 邱志安
Priority to TW111210084U priority Critical patent/TWM640019U/en
Publication of TWM640019U publication Critical patent/TWM640019U/en

Links

TW111210084U 2022-09-14 2022-09-14 Optical inspection module for wafers TWM640019U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW111210084U TWM640019U (en) 2022-09-14 2022-09-14 Optical inspection module for wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111210084U TWM640019U (en) 2022-09-14 2022-09-14 Optical inspection module for wafers

Publications (1)

Publication Number Publication Date
TWM640019U true TWM640019U (en) 2023-04-21

Family

ID=86944406

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111210084U TWM640019U (en) 2022-09-14 2022-09-14 Optical inspection module for wafers

Country Status (1)

Country Link
TW (1) TWM640019U (en)

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