TWM578219U - Multi-gripper holding arm - Google Patents

Abstract

The present invention relates to a multi-claw clamping arm comprising a mechanical arm seat, a lifting device, a photographic device, a plurality of claws and a control device; the lifting device transmits the gear set, the rotating disk body and the plural A combination of components such as a cable mechanism causes a plurality of claws to rotate. When the wafer cassette is clamped, the flipping mechanism flips the clamping claws downward to avoid the clamping portion of the wafer cassette. When the claw is positioned, the gripping claw is turned back to the original position to be clamped to the clamping portion of the wafer cassette.

Description

Multi-claw grip arm

The present invention relates to a multi-claw gripping arm, in particular to a gripping arm having a plurality of claws, and the claws can provide a flipping, and when the object is gripped, the gripping arm is lowered, and the gripper is lowered. The clamping portion of the target can be avoided, and when the positioning is to be performed, the claw is turned back to the original position to just clamp the clamping portion of the target.

According to the manufacturing process of the integrated circuit, a plurality of wafers are placed in a wafer cassette and then transported. Since the price of the wafer is not cheap, in order to avoid wafer damage, the wafer cassette is usually used. The internal load space will be designed according to the size of the wafer to prevent wafer collision and friction, and reduce the chance of contamination of the wafer; Republic of China Patent Notice No. TW M553052 "wafer carrier and use The lower holding member of the wafer carrier box discloses a state of a wafer cassette, which is fixed by a wafer carrier and an internal design to prevent adjacent wafers from colliding and rubbing each other. things happen.

Moreover, in the current manufacturing process, most of the plants are moving in the direction of automation, so many of the handling work in the plant will be carried out by robotic arm or unmanned van; general wafer cassettes will be concentrated in open On the storage rack, when it is taken, it is extended by the robot arm into the storage rack and taken up by the bottom of the wafer cassette; however, if the wafer cassette is not placed on the storage rack, the mechanical arm Or when the unmanned van is going to take out the wafer cassette, the wafer cassette will not be stable on the robot arm or the unmanned transport vehicle, and may even drop the wafer cassette to the ground during the transport process, causing damage to the internal wafer. .

In this way, how to provide a gripping arm that can hold the target object, and to judge the current state of the target object, so that the target object can be firmly grasped, this becomes the direction that the creator thinks.

Nowadays, the creator is still in the spirit of tirelessness in view of the above-mentioned existing clamping device, and it is improved by its rich professional knowledge and years of practical experience. And based on this research and creation of this creation.

The main purpose of the present invention is to provide a multi-claw clamping arm having a plurality of claws, and each of the claws can be turned over by a cable mechanism; generally, when the object is clamped, the clamping arm is lowered, and the inverted arm is inverted. The claws can avoid the clamping portion of the target, and when the positioning is performed, the claws are turned back to the original position to clamp the clamping portion of the target, and the plurality of claws can firmly hold the target. .

In order to achieve the above-mentioned implementation purpose, the present invention provides a multi-claw clamping arm comprising a mechanical arm seat; a lifting device having a base, a gear set disposed on the base, and a rotating disk body coupled to the gear set a plurality of cable mechanisms disposed on the rotating disk body and a plurality of connecting mechanisms respectively connected to the plurality of cable mechanisms, wherein one end of the base is disposed on the mechanical arm seat; a photographing device having a base and a setting The photographic lens of the pedestal, wherein the pedestal is disposed on the base of the lifting device; the plurality of claws have a plurality of turning mechanisms respectively connected to the plurality of engaging mechanisms, and the plurality of claws are respectively disposed on the plurality of turning mechanisms a clamping device; and a control device having a processing module, a driving module connected to the gear set, and a plurality of position sensing modules respectively disposed on the plurality of clamping jaws and the plurality of clamping jaws respectively disposed in the plurality of clamping jaws The limiting module of the connecting mechanism, wherein the processing module is electrically connected to the driving module, the plurality of position sensing modules, the at least one limiting module and the photographic mirror .

In one embodiment of the present invention, the robot arm set is disposed on a robot arm.

In one embodiment of the present invention, the gear set of the lifting device has a first bevel gear coupled to the drive module and a second bevel gear coupled to the first bevel gear.

In one embodiment of the present invention, the base of the photographic device extends to the outside of the base of the hoisting device such that the photographic lens is disposed at a portion of the base that extends.

In one embodiment of the present invention, each of the cable mechanisms has a first cable, a second cable, and a spring that connects the first cable to the second cable.

In one embodiment of the present invention, the rotating disk system secures one end of the first cable of the plurality of cable mechanisms, and one end of the second cable is secured to one of the plurality of engaging mechanisms.

In an embodiment of the present invention, each of the engaging mechanisms has a first connecting plate fixed to one end of the second cable and a second connecting plate disposed on the first connecting plate, and the second connecting plate has at least one positioning portion. .

In one embodiment of the present invention, each of the turning mechanisms has a movable plate body and a pivot rod that is disposed in the movable plate body.

The purpose of this creation and its structural and functional advantages will be explained in accordance with the structure shown in the following figure, in conjunction with specific examples, so that the review committee can have a deeper and more specific understanding of the creation.

Referring to the first to fourth figures, the present invention creates a multi-claw clamping arm that includes a mechanical arm seat (1) that is assembled on a robotic arm;

A lifting device (2) has a base (21) disposed at one end of the mechanical arm seat (1), a gear set (22) disposed on the base (21), and a rotation of a connecting gear set (22) a disk body (23), a plurality of cable mechanisms (24) disposed on the rotating disk body (23), and a plurality of connecting mechanisms (25) respectively connected to the plurality of cable mechanisms (24), wherein the gear set (22) has a first bevel gear (221) connected to the driving module (52) and a second bevel gear (222) connected to the first bevel gear (221), each of the cable mechanisms (24) having a first cable (241), a second cable (242) and a spring (243) connecting the first cable (241) and the second cable (242), and the rotating disk body (23) fixes the first cable (241) One end, one end of the second cable (242) is fixed to the first connecting plate (251) of one of the connecting mechanisms (25), the second connecting plate (252) of the connecting mechanism (25) and the first connecting plate (251) Connected to each other and have at least one positioning portion (253);

A photographic device (3) has a pedestal (31) and a photographic lens (32) disposed on the pedestal (31), wherein the pedestal (31) is disposed on the base of the hoisting device (2) ( 21) upper and extending to the outside of the base (21), and the photographic lens (32) is disposed at a portion of the base (31) extending;

a plurality of claws (4) having a plurality of inverting mechanisms (41) respectively connected to the plurality of engaging mechanisms (25) and a plurality of clamping claws respectively disposed on the plurality of inverting mechanisms (41), and each flipping The mechanism (41) has a movable plate body (411) and a pivoting rod (412) disposed in the movable plate body (411), and the clamping claw is disposed on the movable plate body (411);

And a control device (5) having a processing module (51), a driving module (52) connected to the gear set (22), and a plurality of position sensing modules (53) respectively disposed in the plurality of clips And a plurality of position sensing modules (54) respectively disposed on the plurality of connecting mechanisms (25), wherein the processing module (51) is electrically connected to the driving module (52) and the plurality of position sensing modules ( 53) at least one limit module (54) and a photographic lens (32).

In addition, the scope of the present invention may be further limited by the following specific embodiments, but is not intended to limit the scope of the present invention in any way.

Please continue to refer to the first figure. This is a multi-claw clamping arm, which is mainly driven by a mechanical arm set on the robot arm connector. The robot arm can drive the creation to move and let the wafer cassette move to the bottom. a workstation, and providing a plurality of claws (4) accurately clamped to the target, that is, a wafer cassette; the present invention uses four claws (4) as an implementation, and is rolled up in the following embodiment. The device (2) corresponds to the number of four claws (4), and is provided with four cable mechanisms (24) and a connecting mechanism (25);

Generally, a wafer cassette containing a plurality of wafers is placed on an open storage shelf. When the wafer cassette is to be gripped, the robot arm drives the creation into the storage rack and is located directly above the wafer cassette. Since the photographic device (3) pedestal (31) extends to the outside of the base (21) of the hoisting device (2), the photographic lens (32) will just face the direction of the wafer cassette and is not occupied by other components. Masking, at this time, the processing module (51) of the control device (5) sends a signal to the photographic lens (32), so that it captures the image of the position of the wafer cassette, and returns it to the processing module (51) for identification and processing. The module (51) analyzes the image to determine the current placement state of the wafer cassette;

When the processing module (51) acquires the position of the wafer cassette, the processing module (51) sends a signal to the driving module (52), and the driving module (52) outputs power to the gear unit (22). The bevel gear (221), after the first bevel gear (221) starts to rotate, the second bevel gear (222) that is assembled is rotated together, and the rotating disk body (23) connected to the second bevel gear (222) is also Will start to rotate, at this time, the first cable (241) fixed to the cable mechanism (24) of the rotating disk body (23) will be scrolled clockwise or counterclockwise, as shown in the second figure, A cable (241) first pulls the spring (243), and then pulls the second cable (242), and the second cable (242) transmits the horizontal pulling force to a vertical pulling force through a pulley, thus fixing the second cable (242) The connecting mechanism (25) is displaced upwards. Since the second connecting plate (252) of the embodiment has two positioning portions (253), the control device (5) also sets two limiting modes corresponding to the positioning portion (253). The group (54) is on the connecting mechanism (25), so that when the first connecting plate (251) and the second connecting plate (252) of the engaging mechanism (25) are displaced upward, one of the positioning portions (253) will be separated from the same. The sensing area of a limiting module (54); the turning mechanism (41) of the four claws (4) is also driven by the engaging mechanism (25) to move the movable plate (411) along the pivoting rod ( 412) Flip down, as shown in the third to sixth figures, so that the claws (42) of the claws (4) are in a state of being parallel to the ground.

When the other positioning portion (253) of the second connecting plate (252) of the connecting mechanism (25) enters the sensing area of the other limiting module (54), the limiting module (54) senses The received signal is transmitted to the processing module (51) of the control device (5), and the processing module (51) can determine that the claw device (4) is flipped over and sends the signal driving module (52) to drive The module (52) stops outputting power to the first bevel gear (221) of the gear set (22), such that the gear set (22), the rotating disc body (23), the cable mechanism (24) and the engaging mechanism (25) are both Suspend action. At this time, the processing module (51) sends a signal to the robot arm, so that the mechanical arm drives the lifting device (2), the four claws (4) and other components to descend together, so that the claws of the claws (4) are 42) is located at the clamping portion of the outer edge of the wafer cassette, and then the processing module (51) sends a signal to the driving module (52), the gear set (22), the rotating disk body (23), the cable The mechanism (24) and the connecting mechanism (25) are reversely actuated, that is, the first bevel gear (221), the second bevel gear (222) and the rotating disk body (23) are rotated in opposite directions to release the cable mechanism (24). The first cable (241) is wound up, the first connecting plate (251) of the connecting mechanism (25) and the second connecting plate (252) are displaced downward, and the turning device (4) is turned over (41) The movable plate body (411) returns to the original position along the pivot rod (412), and the clamping claw (42) will just fix the clamping portion of the outer edge of the wafer cassette when the second connecting plate (252) When one of the positioning portions (253) enters the sensing area of one of the limiting modules (54), it means that the turning mechanism (41) and the clamping claw (42) have been turned back to the original position, and the driving module (52) , gear set (22), rotating disc body (23), cable mechanism (24 And the connection mechanism (25) will stop the operation again, and the position sensing module (53) disposed on the clamping claw (42) senses the object of the wafer cassette by the infrared sensor, thereby The processing module (51) can also know that the claw (4) has been clamped to the wafer cassette, so that the signal is sent to the robot arm to drive the creation together, and the wafer cassette is moved to the target position, that is, the clamping is completed. Homework.

It can be seen from the above description that the present creation has the following advantages compared with the prior art:

1. The gripping arm of the multi-claw has a lifting device, which can drive the turning mechanism of the claw to perform the flipping action, so that the clamping claw is turned downward, and the target can be avoided when the mechanical arm drives the whole component to descend. When the clamping portion is reached, the clamping is turned back to the original position to clamp the target.

2. The gripping arm of the present multi-claw has a plurality of claws, which are clamped by the gripping claws of the claws from above the target object, and the plurality of claws firmly hold the target object to avoid the target falling. Fall to the ground and cause damage.

In summary, the gripping arm of the present invention can achieve the intended use effect by the above disclosed embodiments, and the creation has not been disclosed before the application, and has completely complied with the patent law. Regulations and requirements. If you apply for a new type of patent in accordance with the law, you are welcome to review it and grant a patent.

However, the illustrations and descriptions disclosed above are only preferred embodiments of the present invention, and are not intended to limit the scope of protection of the present invention; those who are familiar with the skill are otherwise characterized by the scope of the creation. Equivalent changes or modifications shall be considered as not departing from the design of this creation.

(1)‧‧‧Mechanical arm seat

(2) ‧‧‧Lifting device

(21)‧‧‧Base

(22)‧‧‧ Gear Set

(221)‧‧‧First bevel gear

(222)‧‧‧Second bevel gear

(23)‧‧‧Rotating disk

(24) ‧‧‧Cable mechanism

(241)‧‧‧First cable

(242)‧‧‧Second cable

(243) ‧ ‧ spring

(25) ‧‧‧Connecting institutions

(251) ‧‧‧First connecting plate

(252) ‧‧‧Second interface

(253) ‧ ‧ Positioning Department

(3) ‧‧‧Photographic devices

(31) ‧ ‧ pedestal

(32)‧‧‧Photographic lens

(4)‧‧‧ claws

(41)‧‧‧ Turning mechanism

(411)‧‧‧ movable panels

(412) ‧‧‧ pivot rod

(42)‧‧‧Clamping claws

(5) ‧‧‧Control devices

(51)‧‧‧Processing module

(52)‧‧‧Drive Module

(53) ‧‧‧ position sensing module

(54)‧‧‧ Limiting Module

First Figure: The overall appearance of the preferred embodiment of the present invention.

Second: A schematic diagram of the operation of the winding device of the preferred embodiment of the present invention.

Third figure: Schematic diagram (1) of the flipping mechanism of the preferred embodiment of the present invention.

Figure 4: Schematic diagram of the actuation mechanism of the preferred embodiment of the present invention (2).

Fig. 5 is a side view (1) of the flipping mechanism of the preferred embodiment of the present invention.

Figure 6 is a side view (2) of the flipping mechanism of the preferred embodiment of the present invention.

Claims (8)

A multi-claw gripping arm comprising:  a mechanical arm seat;  A lifting device has a base, a gear set disposed on the base, a rotating disk body connected to the gear set, a plurality of cable mechanisms disposed on the rotating disk body, and a plurality of cables respectively connected to the plurality of a connecting mechanism of the cable mechanism, wherein one end of the base is disposed on the mechanical arm seat;  a photographic device having a pedestal and a photographic lens disposed on the pedestal, wherein the pedestal is disposed on a base of the hoisting device;  a plurality of claws having a plurality of turning mechanisms respectively connected to the plurality of engaging mechanisms and a plurality of clamping jaws respectively disposed on the plurality of turning mechanisms;  A control device has a processing module, a driving module connected to the gear set, and a plurality of position sensing modules respectively disposed on the plurality of clamping jaws and a plurality of respectively arranged on the plurality of engaging mechanisms The limiting module is electrically connected to the driving module, the plurality of position sensing modules, the at least one limiting module and the photographic lens.   The gripper arm of the multi-claw according to the first aspect of the patent application, wherein the robot arm seat is set on a robot arm. The gripper arm of the multi-claw of claim 1, wherein the gear set of the lifting device has a first bevel gear connected to the driving module and a second umbrella connected to the first bevel gear gear. The multi-claw clamping arm according to claim 1, wherein the base of the photographing device extends to the outside of the base of the lifting device, so that the photographing lens is disposed at a portion where the base extends. The multi-claw clamping arm of claim 1, wherein each of the plurality of cable mechanisms has a first cable, a second cable, and a spring connecting the first cable and the second cable. The gripping arm of the multi-claw of claim 5, wherein the rotating disc system fixes one end of the first cable of the plurality of cable mechanisms, and one end of the second cable is fixed to one of the plurality of connecting ends mechanism. The gripping arm of the multi-claw of claim 6, wherein each of the plurality of engaging mechanisms has a first connecting plate fixing one end of the second cable and a set of the first connecting plate The second connecting plate has at least one positioning portion. The multi-claw clamping arm of claim 1, wherein each of the plurality of turning mechanisms has a movable plate body and a pivoting rod disposed in the movable plate body.