TWM573004U - Precision alignment system - Google Patents

Abstract

A precision alignment system includes a controller and an image capturing module. The image capturing module is connected to the controller, and captures an image and transmits the image to the controller for determining a position and a type of a sealing cap on the image.

Description

Precision alignment system

The novel relates to a aligning system. In particular, there is a precise alignment system.

With the booming domestic and international semiconductor markets in recent years due to the demand for materials for computers and their peripheral products, the semiconductor industry has continued to expand, creating a large amount of foreign exchange income for the country.

The fabrication process of semiconductor components is very complicated, and the technology involved covers almost all the most important and key technologies and inventions in the development of modern human science. Therefore, the production of semiconductor components is not only a cutting-edge technology industry, but also a need for huge funds to sustain development.

However, due to the increasingly complex design of semiconductor components, the manufacturing technology of semiconductor components is becoming more sophisticated and complicated, and the potential occupational hazards and property losses are becoming more and more complicated. In the semiconductor process, epitaxy, diffusion, ion implantation, Chemicals commonly used in process units such as chemical vapor deposition, etching, and lithography, although their storage and usage are much smaller than those processed by the chemical or petrochemical industry, they are flammable, flammable, toxic, and corrosive. Sexual characteristics, such as leakage or abnormal operation, also caused casualties, and may even cause significant property damage.

In semiconductor factories, chemical solutions are stored in chemical storage tanks, When in use, connect to the supply line in the factory. When the chemical solution is used, the chemical storage tank needs to be replaced.

How to easily replace the chemical storage tank will help improve the safety of the semiconductor factory and help increase the overall capacity of the semiconductor plant.

The novel content is intended to provide a simplified summary of the disclosure in order to provide a basic understanding of the disclosure. This Summary is not an extensive overview of the disclosure, and is not intended to identify key/critical elements of the novel embodiments or the scope of the invention.

One of the contents of the present invention is to provide a precise alignment system that can accurately align the opener to the sealing cover of the chemical storage bucket, thereby effectively improving the safety and convenience of replacing the chemical storage bucket.

To achieve the above objective, one aspect of the present invention relates to a precision alignment system including a controller and an image capture module. The image capturing module is connected to the controller and captures an image to the controller for the controller to determine the position and form of one of the sealing covers on the image.

In one embodiment, the image capture module includes a charge-coupled device (CCD) image sensor.

In one embodiment, the image capture module includes a Complementary Metal Oxide Semiconductor (CMOS) image sensor.

In one embodiment, the controller includes a groove identifier to be in the form of a groove that visually identifies the sealing cover.

In one embodiment, the controller further includes a position calculator coupled to the groove identifier to calculate an opposite coordinate of the sealing cover from the image.

In one embodiment, the controller further includes an angle calculator coupled to the position calculator to calculate a rotation angle of the sealing cover from the image.

In an embodiment, the precision alignment system further includes a robot arm coupled to the controller, and a cap opener coupled to the controller. Wherein, when the image capturing module recognizes the position and form of the sealing cover, the controller controls the mechanical arm, moves the opener to the position of the sealing cover, and couples the opener to the sealing cover.

In an embodiment, the controller further includes a cap opener position determiner coupled to the position calculator to cause the controller to control the robot arm, move the opener to the position of the seal cover, and couple the opener to the seal cover To open the sealing cover.

In one embodiment, the cap opener includes a triangular swivel joint, a quadrangular swivel joint, or a cross-shaped swivel joint.

In summary, the aforementioned precise alignment system can accurately and correctly align the appropriate opener to the correct position of the sealing cover of the chemical storage tank, and open the sealing cover, and at the same time extract the required fluid for the production line. use.

100‧‧‧Exact alignment system

110‧‧‧ Controller

112‧‧‧ Groove recognizer

114‧‧‧Location Calculator

116‧‧‧Angle Calculator

118‧‧‧Opener position determiner

120‧‧‧Image capture module

130‧‧‧ Robotic arm

140‧‧‧Opener

150‧‧‧chemical storage tank

152‧‧‧First sealing cover

154‧‧‧Second sealing cover

156‧‧‧ storage bin body

170‧‧‧Signal transmission line

180‧‧‧Signal transmission line

190‧‧‧Signal transmission line

210‧‧‧ coordinates

220‧‧‧relative coordinates

230‧‧‧Rotation angle

240‧‧‧relative coordinates

250‧‧‧Rotation angle

The above and other objects, features, advantages and embodiments of the present disclosure will become more apparent and understood. FIG. 1 is a schematic diagram of an image capturing module of a precise alignment system according to an embodiment of the invention.

2 is a schematic diagram of relative coordinates and rotation angles of a sealing cover of a precision alignment system according to an embodiment of the invention.

3 is a schematic view of a robotic arm moving opener of an accurate alignment system and aligned with a sealing cover according to an embodiment of the present invention.

4 is a schematic view showing the size of a sealing cover of a precision alignment system according to an embodiment of the present invention.

FIG. 5 is a schematic diagram of a precise alignment system according to an embodiment of the invention.

FIG. 6 is a schematic diagram of a controller component of a precision alignment system according to an embodiment of the invention.

The following is a detailed description of the embodiments, but the embodiments are not intended to limit the scope of the disclosure, and the description of the structural operation is not intended to limit the order of execution, and any components are recombined. The structure and the device with equal efficiency are all covered by the disclosure. In addition, the drawings are for illustrative purposes only and are not drawn to the original dimensions. For the sake of understanding, the same or similar elements in the following description will be denoted by the same reference numerals.

In addition, the terms used in the entire specification and the scope of the patent application, unless otherwise specified, usually have the usual meaning of each word used in the field, in the content disclosed herein and in the special content. . Certain terms used to describe this disclosure will be discussed below or elsewhere in this specification. Additional guidance is provided by those skilled in the art in the description of the present disclosure.

In the scope of the embodiments and patent applications, unless the context specifically dictates the articles, "a" and "the" may mean a single or plural. The numbers used in the steps are merely used to indicate steps for explanation, and are not intended to limit the order and the embodiments.

Secondly, the terms "including", "including", "having", "containing", and the like, as used herein, are all open terms, meaning, but not limited to.

Referring to FIG. 1 , it is a schematic diagram of an image capturing module of a precise alignment system according to an embodiment of the invention. Figure 2 is a schematic diagram of the relative coordinates and rotation angle of the sealing cover of the precision alignment system. Figure 3 is a schematic diagram of the robotic arm moving the opener of the precision alignment system and aligning the sealing cover. Figure 4 is a schematic view of the size of the sealing cover of the precision alignment system. Figure 5 is a schematic diagram of a precision alignment system. Figure 6 is a schematic diagram of the controller components of the precision alignment system.

As shown in FIG. 5, the precision alignment system 100 includes a controller 110, an image capturing module 120, a robot arm 130, and at least one opener 140.

The image capturing module 120, the robot arm 130, and the lid opener 140 are coupled to the controller 110. For example, the image capturing module 120 is connected to the controller 110 by using the signal transmission line 180 to transmit the image signal received by the image capturing module 120 to the controller 110, and utilizes the controller 110 to perform the chemical storage bucket 150. A determination of the position and form of the first sealing cover 152.

Referring also to FIG. 2, the controller 110 includes a groove identifier 112, in the form of a groove for identifying the first sealing cover 152 by an image.

In addition, the controller 110 further includes a position calculator 114 coupled to the groove identifier 112 to calculate an opposite coordinate 220 of the first sealing cover 152 from the image, which is a relative position on the coordinate 210. In addition, the controller 110 further includes an angle calculator 116 coupled to the position calculator 114 to calculate a rotation angle 230 of the first sealing cover 152 from the image, for example, calculating the Y' axis of the apex of the triangular groove. The angular difference of the Y axis of the coordinates 210.

In addition, the chemical storage tub 150 further includes a second sealing cover 154. The first sealing cover 152 and the second sealing cover 154 may be different types of sealing covers to facilitate matching different types of rotary joints. The position calculator 114 and the angle calculator 116 can calculate the opposing coordinates 240 of the cross-shaped recess of the second sealing cover 154, which is another relative position on the coordinate 210. In addition, the angle calculator 116 calculates an angle of rotation 250 of the second sealing cover 154 from the image, for example, by calculating the angular difference between the Y' axis of the extending foot and the Y axis of the coordinate 210 through the cross recess.

The controller 110 can select an appropriate opener 140 according to the position and form of the first sealing cover 152 or the second sealing cover 154.

In addition, the controller 110 further includes a cap opener position determiner 118 coupled to the position calculator 114 for recording and detecting the form and position of each of the cap openers 140 so that the controller 110 can control the robot arm 130. The opener 140 is clamped. Referring then to FIG. 3, the robot arm 130 moves the opener 140 to the position of the first seal cover 152 or the second seal cover 154 to align the opener 140 with the first seal cover 152 or the second seal cover 154 and Coupling to open the first sealing cover 152 or the second sealing cover 154.

The robot arm 130 uses the signal transmission line 190 to connect to the controller 110 to move the appropriate opener 140 to the position of the first sealing cover 152 in accordance with the signal transmitted by the controller 110.

The opener 140 is coupled to the controller 110 by means of a signal transmission line 170 for transmitting the position and form of the opener 140 to the controller 110.

In an embodiment, the opener 140 can be a triangular swivel joint, a quadrangular swivel joint, or a cross-shaped swivel joint. However, the present invention is not limited thereto, and the opener 140 may be a corresponding type of rotary joint required to open the sealing cover without departing from the spirit and scope of the present invention.

In an embodiment, after the image capturing module 120 recognizes the position and form of a first sealing cover 152 of the chemical storage tub 150, the controller 110 controls the robot arm 130 and moves the opener 140 by using the robot arm 130. a suitable opener to the position of the first sealing cover 152 of the chemical storage tub 150, and coupling the opener of the opener 140 with the first sealing cover 152 to open the first sealing cover 152 and extract chemical storage The liquid in the tub body 156 of the tub 150 is used by a semiconductor component production line. However, the present invention is not limited thereto, and the precise alignment system can also accurately align any electronic component or container without departing from the spirit and scope of the present invention.

In an embodiment, the first sealing cover 152 and the second sealing cover 154 may have triangular grooves, quadrangular grooves, cross-shaped grooves or other shaped grooves, all without departing from the spirit and scope of the present invention.

The sealing cap of Figure 4 has a cross-shaped recess for opening and extracting liquid or gas from the corresponding rotary joint. In addition, the cross-shaped recess of the sealing cover can also have a large size, such as a large cross recess such as size 510, or a small cross recess of size 520, which does not deviate from the spirit of the present invention. With scope.

In some embodiments, the dimension 510 can range from 55 mm to 58 mm, while the dimension 520 can range from 22 mm to 24 mm without departing from the spirit and scope of the present invention. Similarly, triangular grooves, quadrangular grooves, cross-shaped grooves or other shaped grooves may also be of different sizes to match the rotary joint of the opener 140 without departing from the spirit and scope of the present invention.

In addition, the image capturing module 120 may include a Charge-coupled Device (CCD) image sensor or a Complementary Metal Oxide Semiconductor (CMOS) image sensor.

In summary, the precision alignment system can safely and reliably move the rotary joint of the line conveying the fluid to the correct position of the sealing cover of the chemical storage tank, and open the sealing cover while extracting the required fluid for the purpose. Production line use.

The present disclosure has been disclosed in the above embodiments, and is not intended to limit the disclosure. Any one of ordinary skill in the art can make various changes and refinements without departing from the spirit and scope of the disclosure. The scope of protection is subject to the definition of the scope of the patent application.

Claims (10)

An accurate alignment system comprising: a controller; and an image capturing module connected to the controller, the image capturing module capturing an image and transmitting the image to the controller for the controller to determine The position and form of one of the seals on the image. The precision alignment system of claim 1, wherein the image capturing module comprises a charge-coupled device (CCD) image sensor. The precision alignment system of claim 1, wherein the image capture module comprises a complementary metal oxide semiconductor (CMOS) image sensor. The precision alignment system of claim 1, wherein the controller includes a groove identifier for recognizing the groove of the sealing cover from the image. The precision alignment system of claim 4, wherein the controller further comprises a position calculator coupled to the groove identifier to calculate an opposite coordinate of the sealing cover from the image. The precise alignment system of claim 5, wherein the The controller further includes an angle calculator coupled to the position calculator to calculate a rotation angle of the sealing cover from the image. The precision alignment system of claim 6 further includes a robot arm coupled to the controller. The precision alignment system of claim 7, further comprising a cap opener connected to the controller, wherein the controller controls the machine after the image capturing module recognizes the position and form of the sealing cover The arm moves the cap opener to the position of the sealing cap and couples the cap opener to the sealing cap. The precision alignment system of claim 8, wherein the controller further comprises a cap opener position determiner coupled to the position calculator to cause the controller to control the robot arm and move the cap opener to the The lid is sealed and the cap opener is coupled to the seal cap to open the seal cap. The precision alignment system of claim 9, wherein the opener comprises a triangular rotary joint, a quadrangular rotary joint or a cross-shaped rotary joint.