M429094 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種表面電漿感測器，尤指一種多數個 光纖感測單元形成串集式陣列排列表面電漿感測器，其具 備操作簡單'攜帶方便、提高解析度、增加分析靈敏度、 及可應用於表面電漿感測設備之表面電漿感測器。 【先前技術】 現今對於醫療檢測或環境檢測方面，能夠迅速且精確 地檢測出生物分子的種類及測定濃度是非常重要的。尤其 是，當在具有環境毒害的場合中，處理人員必須先檢測出 炎害現場之有害物質的種類及濃度，才能依據檢測結果決 定後續相關的處理程序’並減低處理的風險。因此，如何 提咼分析儀器的精確度、靈敏度、以及操作流程的簡易度 及可攜帶性均非常重要》 圖1係習知之表面電楽_共振感測儀的示意圖，其包含 入射光源11、入射光處理單元12、稜鏡13、金屬層14、光 铺測器15、待測物承載單元16及光譜儀17。其中，光源} j 係為雷射二極體’而入射光處理單元12則包含光束擴大器 121、偏光鏡122、分光鏡123及聚焦鏡124。所以，當光源 11所產生光線經過入射光處理單元12之後，其便具有特定 之頻率、模態及極化方向，以供檢測之用。此外，金屬層 14係位於稜鏡13之背面並係應用蒸鍍或濺錄的方式將金或 銀顆粒沈積於棱鏡13表面而成。當進行檢測時，光源丨1產 M429094 生之光線先通過入射光處理單元丨2,再入射稜鏡13之第一 側面131。此光線接著被金屬層14反射，而從稜鏡π之第二 側面132射出，再進入光偵測器15。最後，光福測器16將其 所接收之光訊號對應轉換為電訊號並將其提供給光譜儀Η 以为析其光譜分佈的變化。但是，由於此種表面電漿共振 感測法之測量儀器的體積龐大，且其各元件之間的相對位 置必須精確地維持，否則從其入射光處理單元所出射的光 便無法正確地被位於其稜鏡背面之金屬層反射，便無法順 利到達其光偵測器。因此，此種表面電漿共振感測儀對於 振動的容忍度極低且容易因意外碰撞而損壞其並不適合 讓災害處理人員隨身攜帶至災害現場。 圖2為另一種表面電漿共振感測儀器2，包括：一光源 22; —具有光纖生物感測單元之樣品槽23; 一光感測器24; 複數條連接此光源、此光纖生物感測單元及此光感測器的 光纖221、222以及一連接此光感測器之運算顯示單元。其 中’此光感測器偵測通過此光纖生物感測單元之光信號並 對應傳遞一信號至此運算顯示單元，此運算顯示單元運算 並將所得之結果顯示於其顯示裝置。於圖2之表面電漿共振 感測儀器具有攜帶較方便、操作亦較簡單且可輕易地更換 其光纖生物感測單元之表面電漿共振感測儀，可使災害處 理人員可以隨身攜帶並在災害現場迅速地進行檢測。然而 對於該表面電漿共振感測儀訊號及精準度之提升，仍是目 前努力的目標。 因此，業界亟需一種除攜帶方便、操作簡單且可輕易 地更換其光纖生物感測單元之表面電楽共振感測設備外， 更需-種可提高測量訊號’増加量測的精準度之表面電漿 感測設備。 【新型内容】 本創作之主要目的係在提供一種表面電漿感測器，主 要能降低光織感測單元非串集式陣列時之雜訊以提高測 量訊號，增加量測的精準度，更具有偵測所需時間短不 需事先對待測物進行標記（lable_free)、所需樣品量少 '可 線上即時偵測待測物與其配位體（Hgand)間的交互作用 及、以及偵測靈敏度高等優點。 本創作之另一目的係提供一種表面電漿感測設備，尤 其是一種樓帶方便、操作簡單且可輕易地更換其光纖生物 感測單元之表面電漿共振感測設備，並具有降低測量雜訊 及增加量測的精準度之表面電漿感測設備。 為達成上述目的’本創作提供一種表面電漿感測器， 包括：一光纖本體；以及多數個光纖感測單元。且每一光 纖感測早元具有一彼覆層、一核心層、及一凹槽，其中， 多數個光纖感測單元形成串集式陣列排列，彼覆層位於核 心層之周緣’凹槽之最大深度係大於披覆層之厚度，且光 纖本體連接光纖感測單元。本創作之光纖本體可為單模光 纖或多模光纖’較佳係使用多模光纖》 =本創作之表面電㈣測器，其光纖本體係連結於 2式陣列之兩端，且光纖本體與光纖感測單元可以炫接 式相連 '或光纖本體與光纖感測單元係為整合為一體。 根據本創作之表面電聚感測器之每一光纖感測單元令 =可利用任何方法製作’較佳為利用光織本體經側邊 磨或钕刻製程而成’且每-光纖感測單S中皆具有一凹 ，表面’其表面較佳是為—研磨面，該研磨面之長度範圍 沒有限制’較佳之長度範圍係為02iL07mm。本創作之表 面電漿感測器之多數個光織感測單元形成串集式陣列排 且於多數個光纖感測單元中各凹槽之最大深度可彼此 冏或不同，較佳的是相鄰凹槽最大深度為相同。根據本 創作之表面電漿感測器’於多數個光纖感測單元中之各凹 =最大深度之平面可為平行或不平行，較佳的是相鄰凹槽 :大深度之平面為平行。根據本創作之表面電聚感測器， 於多數個光纖感測單元中之相鄰凹槽之間距沒有限制，較 佳的是相鄰凹槽每兩相鄰凹槽間之間距相等。 根據本創作之表面電聚感測器，於每一光纖感測單元 中之凹槽衣©’可選擇性地錢有_任意材料之金屬層較 佳之材料am 1於凹槽表面之㈣層厚度沒有限 制’較佳之金屬層厚度範圍為10至60賊，且每兩相鄰凹槽 間之金屬層厚度可為相等或不相等，較佳的為每兩相鄰凹 槽間之金屬層厚度相等/另彳，本創作之表面電聚感測器 之每-光纖感測單元中之凹槽表面可形成一生物分子層， 亦可於本創作之表面錢感測器，於每—光纖感測單元中 M429094 之凹槽表面鍍有金屬層後，在金屬層表面形成一生物分子 層。 本創作亦提供一種表面電漿感測設備，包括：一光源； 一光信號偵測器；多數條光纖；多數個光纖感測單元，每 一光纖感測單元具有一披覆層、一核心層、及一凹槽，其 中’該些光纖感測單元形成串集式陣列排列，披覆層位於 核心層之周緣，凹槽之最大深度係大於披覆層之厚度，光 纖感測單元及光源間以光織連接，與光纖感測單元及光信 號偵測器間亦以光纖連接。本創作之表面電漿感測設備之 光源種類沒有限制，較佳的為雷射二極體或發光二極體。 根據本創作之表面電漿感測設備，於每一光纖感測單 元中之凹槽表面，可選擇性地鍍有一任意材料之金屬層， 較佳之材料為金或銀。另可於本創作之表面電漿感測設備 之每一光纖感測單元中之凹槽表面形成一生物分子層。 【實施方式】 以下’將對本創作之具鱧實施方式作詳細說明如下。 實施例1 圖3係本創作之一較佳實施例之表面電漿感測器的示 意圖。此表面電漿感測器3具有一光纖本體3丨、第一感測單 兀321、及第二感測單元322,其中，該光纖本體31為一多 模光纖’該第一感測單元321及第二感測單元322形成串集 式陣列排列之光纖感測單元，且光纖本體與光纖感測單元 係為整合為一體。在此實施例中之第一感測單元32丨及第二 M429094 感測單元322係將光纖本體3 1經側邊研磨製程，使其具有第 一凹槽331及第二凹槽332之串集式陣列排列，其中各凹槽 之研磨長度約為0.5mm，且各凹槽之最大深度為大於光纖 本體31之披覆層311的厚度，以使得光纖本體31之核心層 312能夠暴露出來。 另須注意的是，本創作具有凹槽形成於光纖本體之光 纖感測單元數量非以此為限，於此較佳實施例中，係形成 第一凹槽331及第二凹槽332之串集式陣列排列，在其他實 施方式中，光纖感測單元數量可依據所需檢測樣品或檢測 環境而有所變化。另外，為了提高表面電漿檢測效應強度 及增加檢測樣品結合的穩定度，可利用濺鍍（sputtering)或 其他方法於第一凹槽331及第二凹槽332之表面沉積一金屬 層34’於本實施例之金屬層中所使用之金屬為金，沉積厚 度約為40nm。再者，本實施例之第一凹槽33丨及第二凹槽 332最大深度之平面是為平行的，且第一凹槽331及第二凹 槽332之最大深度為相同’於其他實施方式中，亦可依據所 需檢測樣品或檢測環境而變化該些凹槽最大深度之平面為 不平行’或變化該些凹槽最大深度為不相同。 實施例2 圖4係本創作之一較佳實施例之表面電漿感測器的示 意圖。此表面電漿感測器4具有一第一光纖本體41、一第二 光纖本體42、第一感測測器421、及第二感測單元422，其 中’該第一光纖本體41及第二光織本體42皆為多模光織， 該第一感測單元421及第二感測單元422分別形成於第一光 M429094 纖本體41及第二光纖本體42構成串集式陣列排列之光纖感 刹單元，與實施例丨不同處為，本實施例中之光纖本體與光 纖感測單元係以熔接方式相連。在此實施例中之第一感測 單兀421及第二感測單元422係將其光織本體經側邊研磨製 程，使其具有第一凹槽431及第二凹槽432,並在熔接後構 成串集式陣列排列，其中各凹槽之研磨長度約為〇 5mm， 且各凹槽之最大深度為大於光纖本體41、42之披覆層411 的厚度’以使得光織本體4卜42之核心層412能夠暴露出來。 須注意的是，本創作具有凹槽形成於光纖本趙之光織 感測單元數量非以此為限’於此較佳實施例中，係形成第 一凹槽431及第二凹槽432之串集式陣列排列，在其他實施 方式中’光纖感測單元數量可依據所需檢測樣品或檢測環 境而有所變化。另外’為了提高表面電漿檢測效應強度及 增加檢測樣品結合的穩定度，可利用濺鍍（sputtering)或其 他方法於第一凹槽431及第二凹槽432之表面沉積一金屬層 44,於本實施例之金屬層中所使用之金屬為金，沉積厚度 約為40nm。再者’本實施例之第一凹槽431及第二凹槽432 最大深度之平面是為平行的，且第一凹槽431及第二凹槽 432之最大深度為相同，於其他實施方式中，亦可依據所需 檢測樣品或檢測環境而變化該些凹槽最大深度之平面為不 平行，或變化該些凹槽最大深度為不相同》 實施例3 在此實施例中’係將本創作之表面電漿感測器應用於 一表面電漿感測設備中’該表面電漿感測設備可為—般習 M429094 去所使用之叹備’以下藉由圖2所示說明本創作之表面電漿 感測λ備本創作之表面電漿感測設備包括一雷射二極體 22作為光源’藉由多模光纖221將雷射光導入含有本創作之 光纖感測器（圖未示）之樣品槽23中，再以另一多模光纖222 連結光纖感測單元（圖未示）及光信號偵測器24，光信號偵 測器24再將此雷射光對應轉換為一電訊號並傳送至運算控 制單元（圖未示）以進行分析運算。 圖5為使用本創作之表面電漿感測器應用於一表面電 漿感測設備中所量測訊號，係以酒精滴測來觀察訊號峰值 的強度變化，其中校正值約為1. 〇之峰值曲線為測量到原始 光線之峰值，校正值約為〇 75之峰值曲線為習知中僅使用 一光纖感測單元所測得之峰值，而校正值約為〇 6之峰值曲 線為使用本案實施例1或2之二階串集式陣列排列之光纖感 測單元所量測到的峰值。因此，由圖5中可清楚得知，使用 本創作之表面電漿感測器，因該些光纖感測單元形成串集 式陣列排列，所測得之訊號在校正後之峰值曲線分布具有 將雜訊有效的降低，並有效地提升了分析之解析度。 綜上所述’表面電聚感測方法具有不需事先對待測物 進行標記、所需樣品量少、並可線上即時偵測待測物與其 配位體間的交互作用、以及偵測靈敏度高等優點。可應用 範圍於包括檢測化學氣體、廢棄之水溶液、具污染物之監 控、免疫醫學、及疾病篩選等。習知技術已有使用一種 Kretschmann-Raether之方法來作為分析，係使用了一棱 鏡、一薄金屬層、及含有待測物的介電層為其特徵。然而 M429094 該方法無法有效提升檢測靈敏度及解析力。本創作之表面 電漿感測器為多數個光纖感測單元形成串集式陣列排列， 具有優於習知感測器的高解析力、可同步快速量測、及降 低雜訊等優點’可大幅缩短所需檢測成本及時間，並克服 以往檢測技術中的繁瑣檢驗步驟及冗長時間。 上述實施例僅係為了方便說明而舉例而已，本創作所 主張之權利範圍自應以申請專利範圍所述為準，而非僅限 於上述實施例。 【圖式簡單說明】 圖1係習知之表面電漿共振感測儀示意圖。 圖2係習知之表面電漿感測器應用於表面電漿感測設備之 不意圖。 圖3係本創作一較佳實施例之表面電漿感測器。 圖4係本創作另一較佳實施例之表面電漿感測器。 圖5係使用本創作之表面電漿感測器應用於一表面電漿感 測設備t所量測訊號示意圖。 【主要元件符號說明】 11光源 12入射光處理單元 15光偵測器 121光束擴大器 124聚焦鏡 14金屬層 】7光譜儀 123分光鏡 132第二側面 13稜鏡 16待測物承載單元 122偏光鏡 13 1第一側面 2表面電漿共振感測儀器22光源M429094 V. New Description: [New Technology Field] This paper is about a surface plasma sensor, especially a multi-fiber sensing unit that forms a string array array surface plasma sensor with operation. Simple 'portable, improved resolution, increased analytical sensitivity, and surface plasma sensors that can be applied to surface plasma sensing equipment. [Prior Art] It is very important to quickly and accurately detect the type and concentration of biomolecules for medical detection or environmental detection. In particular, in the case of environmental poisoning, the handler must first detect the type and concentration of the hazardous substance at the site of the inflammation, and then determine the subsequent relevant processing procedures based on the test results' and reduce the risk of treatment. Therefore, how to improve the accuracy, sensitivity, and ease of operation and portability of the analytical instrument is very important. Figure 1 is a schematic diagram of a conventional surface electrode _ resonance sensor, which includes an incident light source 11, incident The light processing unit 12, the crucible 13, the metal layer 14, the light spreader 15, the object carrying unit 16 and the spectrometer 17. The light source}j is a laser diode' and the incident light processing unit 12 includes a beam expander 121, a polarizer 122, a beam splitter 123, and a focusing mirror 124. Therefore, when the light generated by the light source 11 passes through the incident light processing unit 12, it has a specific frequency, mode and polarization direction for detection. Further, the metal layer 14 is formed on the back surface of the crucible 13 and deposits gold or silver particles on the surface of the prism 13 by vapor deposition or sputtering. When the detection is performed, the light source generated by the light source 4291 passes through the incident light processing unit 丨2, and then enters the first side 131 of the 稜鏡13. This light is then reflected by the metal layer 14 and exits from the second side 132 of the 稜鏡π and enters the photodetector 15. Finally, the optical detector 16 converts the received optical signal corresponding to the electrical signal and provides it to the spectrometer to analyze the change in its spectral distribution. However, since the measuring instrument of the surface plasma resonance sensing method is bulky and the relative position between its components must be accurately maintained, the light emitted from the incident light processing unit cannot be correctly positioned. The metal layer on the back of the crucible reflects the photodetector. Therefore, such a surface plasma resonance sensor has a very low tolerance to vibration and is easily damaged by accidental collision. It is not suitable for the disaster handler to carry it to the disaster site. 2 is another surface plasma resonance sensing apparatus 2, comprising: a light source 22; a sample slot 23 having a fiber optic biosensing unit; a photo sensor 24; a plurality of strips connecting the light source, the fiber optic biosensing The unit and the optical fibers 221 and 222 of the photo sensor and an operation display unit connected to the photo sensor. The light sensor detects the light signal passing through the fiber biosensing unit and transmits a signal to the operation display unit. The operation display unit operates and displays the result on the display device. The surface plasma resonance sensing instrument of FIG. 2 has a surface-plasma resonance sensor that is convenient to carry, simple to operate, and can easily replace its fiber-optic biosensing unit, so that the disaster handler can carry it with him and The disaster site is quickly tested. However, the improvement of the signal and accuracy of the surface plasma resonance sensor is still the goal of the current efforts. Therefore, there is a need in the industry for a surface electro-hydraulic resonance sensing device that is convenient to carry, simple to operate, and can easily replace its fiber-optic biosensing unit, and further requires a surface that can improve the accuracy of the measurement signal's addition measurement. Plasma sensing equipment. [New content] The main purpose of this creation is to provide a surface plasma sensor, which can reduce the noise of the non-collector array of the light-weaving sensing unit to improve the measurement signal and increase the accuracy of the measurement. It has a short detection time, no need to mark the object beforehand (lable_free), and requires less sample amount. It can instantly detect the interaction between the analyte and its ligand (Hgand) and the detection sensitivity. Higher advantages. Another object of the present invention is to provide a surface plasma sensing device, in particular to a surface plasma resonance sensing device which is convenient, simple to operate and can be easily replaced with a fiber optic biosensing unit, and has a reduced measurement miscellaneous Surface and plasma sensing equipment that increases the accuracy of measurement. To achieve the above object, the present invention provides a surface plasma sensor comprising: a fiber body; and a plurality of fiber sensing units. Each of the fiber sensing early elements has a cladding layer, a core layer, and a recess, wherein the plurality of fiber sensing units form a tandem array arrangement, and the cladding layer is located at a periphery of the core layer The maximum depth is greater than the thickness of the cladding layer, and the fiber body is coupled to the fiber sensing unit. The fiber body of the present invention can be a single-mode fiber or a multi-mode fiber. It is better to use a multi-mode fiber. The surface electrical (four) detector of the present invention has a fiber-optic system connected to both ends of the type 2 array, and the fiber body is The fiber sensing unit can be connected in a dazzling manner or the fiber body and the fiber sensing unit are integrated. According to the fiber-optic sensing unit of the surface electro-convex sensor of the present invention, it can be produced by any method, preferably by using a side-grinding or engraving process of the optical woven body, and each fiber-optic sensing list S has a concave surface, and the surface 'is preferably a polished surface, and the length of the polished surface is not limited. The preferred length range is 02iL07mm. The plurality of light-woven sensing units of the surface-plasma sensor of the present invention form a string array array and the maximum depths of the grooves in the plurality of fiber sensing units may be different or different from each other, preferably adjacent The maximum depth of the groove is the same. According to the present invention, the surface of the plasma sensor can be parallel or non-parallel to each of the concave/maximum depths in the plurality of fiber sensing units, preferably adjacent grooves: the plane of the large depth is parallel. According to the surface electro-convergence sensor of the present invention, there is no limitation on the distance between adjacent grooves in a plurality of fiber sensing units, and it is preferable that the distance between each adjacent groove of the adjacent groove is equal. According to the surface electro-convex sensor of the present invention, the groove coating in each of the fiber sensing units can be selectively used. The metal layer of any material is preferably a material layer of the material. There is no limitation that the preferred metal layer thickness ranges from 10 to 60 thieves, and the thickness of the metal layer between each two adjacent grooves may be equal or unequal, preferably the thickness of the metal layer between each two adjacent grooves is equal. / 彳 彳 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽 凹槽After the surface of the groove of M429094 in the unit is plated with a metal layer, a biomolecule layer is formed on the surface of the metal layer. The present invention also provides a surface plasma sensing device, comprising: a light source; an optical signal detector; a plurality of optical fibers; a plurality of optical fiber sensing units, each of the optical fiber sensing units having a cladding layer and a core layer And a groove, wherein the fiber sensing units form a string array arrangement, the coating layer is located at the periphery of the core layer, the maximum depth of the groove is greater than the thickness of the coating layer, and between the fiber sensing unit and the light source The optical fiber connection is also connected to the optical fiber sensing unit and the optical signal detector. There is no limitation on the type of light source of the surface plasma sensing device of the present invention, and preferably a laser diode or a light emitting diode. According to the surface acoustical sensing device of the present invention, the surface of the groove in each of the fiber sensing units can be selectively plated with a metal layer of any material, preferably gold or silver. Further, a biomolecule layer may be formed on the surface of the groove in each of the fiber sensing units of the surface acoustic sensing device of the present invention. [Embodiment] Hereinafter, the specific implementation of the present invention will be described in detail below. Embodiment 1 Figure 3 is a schematic illustration of a surface plasma sensor of a preferred embodiment of the present invention. The surface of the plasma sensor 3 has a fiber optic body 3, a first sensing unit 321 and a second sensing unit 322, wherein the fiber body 31 is a multimode fiber 'the first sensing unit 321 The second sensing unit 322 forms a fiber array sensing unit arranged in a string array, and the optical fiber body and the fiber sensing unit are integrated. In this embodiment, the first sensing unit 32 and the second M429094 sensing unit 322 pass the fiber body 31 through a side grinding process to have a combination of the first groove 331 and the second groove 332. The array array has a grinding length of about 0.5 mm, and the maximum depth of each groove is greater than the thickness of the cladding layer 311 of the fiber body 31, so that the core layer 312 of the fiber body 31 can be exposed. It should be noted that the number of the fiber sensing units having the grooves formed on the fiber body is not limited thereto. In the preferred embodiment, the first groove 331 and the second groove 332 are formed. The array array arrangement, in other embodiments, the number of fiber sensing units may vary depending on the desired test sample or test environment. In addition, in order to increase the surface plasma effect intensity and increase the stability of the test sample combination, a metal layer 34' may be deposited on the surfaces of the first groove 331 and the second groove 332 by sputtering or other methods. The metal used in the metal layer of this embodiment is gold and has a deposition thickness of about 40 nm. Furthermore, the planes of the first recess 33 丨 and the second recess 332 of the present embodiment have a plane of maximum depth, and the maximum depths of the first recess 331 and the second recess 332 are the same 'in other embodiments. The planes of the maximum depths of the grooves may also be non-parallel according to the desired test sample or the detection environment or the maximum depth of the grooves may be different. Embodiment 2 Figure 4 is a schematic illustration of a surface plasma sensor of a preferred embodiment of the present invention. The surface of the plasma sensor 4 has a first fiber body 41, a second fiber body 42, a first sensor 421, and a second sensing unit 422, wherein the first fiber body 41 and the second The optical woven body 42 is a multi-mode optical woven fabric, and the first sensing unit 421 and the second sensing unit 422 are respectively formed on the first optical M429094, and the second optical body 42 forms a fiber array sensation in a string array arrangement. The brake unit is different from the embodiment. The optical fiber body and the optical fiber sensing unit in this embodiment are connected by welding. In this embodiment, the first sensing unit 421 and the second sensing unit 422 pass the optical woven body through a side grinding process to have a first groove 431 and a second groove 432, and are welded. Thereafter, a tandem array arrangement is formed, wherein the grinding length of each groove is about mm5 mm, and the maximum depth of each groove is greater than the thickness of the coating layer 411 of the fiber bodies 41, 42 so that the optical woven body 4 is 42 The core layer 412 can be exposed. It should be noted that the present invention has a groove formed on the optical fiber. The number of the optical sensing unit is not limited thereto. In the preferred embodiment, the first groove 431 and the second groove 432 are formed. The array arrangement, in other embodiments, the number of fiber sensing units may vary depending on the desired test sample or test environment. In addition, in order to increase the surface plasma effect intensity and increase the stability of the test sample combination, a metal layer 44 may be deposited on the surfaces of the first groove 431 and the second groove 432 by sputtering or other methods. The metal used in the metal layer of this embodiment is gold and has a deposition thickness of about 40 nm. Furthermore, the planes of the first recess 431 and the second recess 432 of the present embodiment have a maximum depth, and the maximum depths of the first recess 431 and the second recess 432 are the same. In other embodiments, The plane of the maximum depth of the grooves may be non-parallel according to the desired test sample or the detection environment, or the maximum depth of the grooves may be different. Embodiment 3 In this embodiment, the author The surface plasma sensor is applied to a surface plasma sensing device. The surface plasma sensing device can be used as a sigh for the use of M429094. The surface of the creation is illustrated by the following FIG. The plasma sensing device of the plasma sensing device comprises a laser diode 22 as a light source'. The laser light is introduced into the fiber optic sensor (not shown) containing the present invention by the multimode fiber 221 In the sample slot 23, a fiber sensing unit (not shown) and an optical signal detector 24 are coupled to the other multimode fiber 222. The optical signal detector 24 converts the laser light into a signal and transmits the signal. To the arithmetic control unit (not shown) for analysis Operation. Figure 5 is a measurement of the intensity of the peak value of the signal by using the surface acoustical sensor of the present invention applied to a surface plasma sensing device, wherein the correction value is about 1. The peak curve is the peak value of the original light measured, and the peak value of the correction value is about 〇75. The peak value measured by only one fiber sensing unit is used, and the peak value of the correction value is about 〇6. The peak value measured by the fiber sensing unit of the second-order string array array of Example 1 or 2. Therefore, as is clear from FIG. 5, using the surface acoustical sensor of the present invention, since the optical fiber sensing units form a tandem array arrangement, the measured signal has a peak curve distribution after correction. The noise is effectively reduced and the resolution of the analysis is effectively improved. In summary, the surface electro-polymerization sensing method has the advantages of not requiring prior measurement of the object to be measured, requiring a small amount of sample, and instantly detecting the interaction between the analyte and its ligand on the line, and the detection sensitivity is high. advantage. It can be applied to include detection of chemical gases, waste aqueous solutions, monitoring of pollutants, immunomedicine, and disease screening. Conventional techniques have used a Kretschmann-Raether method for analysis using a prismatic mirror, a thin metal layer, and a dielectric layer containing the object to be tested. However, this method cannot effectively improve the detection sensitivity and resolution of M429094. The surface plasma sensor of the present invention forms a string array arrangement for a plurality of fiber sensing units, and has the advantages of superior resolution, synchronous and rapid measurement, and noise reduction, which are superior to conventional sensors. Significantly reduce the cost and time required for testing, and overcome the cumbersome inspection steps and tedious time in previous inspection techniques. The above-described embodiments are merely examples for convenience of description, and the scope of the claims is intended to be based on the scope of the patent application, and is not limited to the above embodiments. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a conventional surface plasma resonance sensor. Figure 2 is a schematic illustration of the application of a conventional surface plasma sensor to a surface plasma sensing device. 3 is a surface plasma sensor of a preferred embodiment of the present invention. 4 is a surface plasma sensor of another preferred embodiment of the present invention. Figure 5 is a schematic diagram of the measurement signal applied to a surface plasma sensing device t using the surface acoustical sensor of the present invention. [Main component symbol description] 11 light source 12 incident light processing unit 15 photodetector 121 beam expander 124 focusing mirror 14 metal layer] 7 spectrometer 123 beam splitter 132 second side 13 稜鏡 16 test object carrying unit 122 polarizer 13 1 first side 2 surface plasma resonance sensing instrument 22 light source