TWM470374U - The workpiece alignment fixture - Google Patents
The workpiece alignment fixture Download PDFInfo
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- TWM470374U TWM470374U TW102211027U TW102211027U TWM470374U TW M470374 U TWM470374 U TW M470374U TW 102211027 U TW102211027 U TW 102211027U TW 102211027 U TW102211027 U TW 102211027U TW M470374 U TWM470374 U TW M470374U
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Description
本創作係有關一種用以調整工件的輔助治具，特別是指一種可快速校正工件的工件校正治具。This creation relates to an auxiliary fixture for adjusting a workpiece, and more particularly to a workpiece correction fixture capable of quickly correcting a workpiece.
在自動化加工製程所應用的傳送設備當中，多進一步會設至數量不等的擷取裝置用以將物件逐一放入傳送設備，或將傳送設備上的物件加以擷取收集；因此，類似的擷取裝置除了必須具備可將物件夾持的能力外，更需要進一步具備對物件進行升降、平移或旋轉的功能。Among the transfer devices used in the automated processing process, there are a number of different pick-up devices for placing the articles one by one into the transfer device, or collecting the objects on the transfer device for collection; therefore, similar 撷In addition to the ability to hold the object, the pick-up device further needs to have the function of lifting, translating or rotating the object.
以一種應用於晶圓加工製程的晶圓植佈機為例，其所配置的擷取裝置，主要具有一可於預定行程往復運動夾臂，且於夾臂尾端設置一可供將晶圓夾持固定的夾具，其夾臂主要在傳動機構之帶動下，於傳送設備與加工設備(或檢驗設備)之間往復位移，以及在相關軟體之控制下，將原本固定在傳送設備支座上的晶圓交由加工設備之夾具承接。Taking a wafer spreader applied to a wafer processing process as an example, the picking device configured mainly has a reciprocating clamping arm at a predetermined stroke, and a wafer is provided at the end of the clamping arm. The clamping fixture is fixed, and the clamping arm is mainly driven by the transmission mechanism, and is reciprocally displaced between the conveying device and the processing device (or the inspection device), and is fixed on the conveying device support under the control of the relevant software. The wafer is handed over to the fixture of the processing equipment.
類似功能的夾具則係由至少兩個可相對朝晶圓往復運動的工件所組成，為確保夾具在每一次擷取過程中，能夠確實將晶圓夾持固定，其除在實際運作之前必須經過更為準確的定位調校，確保夾具可以到達至定位之外，更需要確認在每一次的擷取過程中，其夾具之工件可以確實的將晶圓夾持。A similarly functioning fixture consists of at least two workpieces that are reciprocable relative to the wafer. To ensure that the fixture is securely held in each extraction process, it must pass through the actual operation. More accurate positioning adjustment ensures that the fixture can reach the position outside the positioning. It is also necessary to confirm that the workpiece of the fixture can surely clamp the wafer during each extraction process.
又，工件本身是否具備正確良好位置，將是影響夾具動作可靠度的重要因素之一，而其夾具之工件在運作的過程中難免會受到不當的外力作用而變形；因此，如何提供一可適時且快速校正工件之裝置，使得以讓晶圓加工設備維持應有的加工產能，一直是學術界及產業者所亟欲解決之課題。Moreover, whether the workpiece itself has a correct and good position will be one of the important factors affecting the reliability of the fixture operation, and the workpiece of the fixture will inevitably be deformed by improper external force during the operation; therefore, how to provide a timely time And the device for quickly correcting the workpiece, so that the wafer processing equipment maintains the processing capacity that it should have, has been the subject of academics and industry.
有鑒於此，本創作即在提供一種可快速校正工件的工件校正治具，為其主要目的者。In view of this, the present invention provides a workpiece correction tool for quickly correcting a workpiece, which is its main purpose.
為達上揭目的，本創作之工件校正治具，係具有一組用以將工件夾制固定的夾座，於該夾座頂部設有至少一相對凸出該夾座側面的第一基準部，且於該第一基準部上設有複數檢測孔。In order to achieve the above object, the workpiece correction tool of the present invention has a set of clamping seats for clamping and fixing the workpiece, and at least one first reference portion protruding from the side of the clamping seat is provided on the top of the clamping seat. And a plurality of detection holes are provided on the first reference portion.
利用上述結構特徵，本創作之工件校正治具於使用時，係可將整個夾座放置在一工作平台上，且將欲進行校正的工件固定於夾座上，再配合由量測儀器之探針穿過檢測孔之方式，測量工件相對於量測孔之部位至第一基準部之間的距離；當量測部位至第一基準部之間的距離有誤差時，則可直接扳折工件露出的部位，再配合量測儀器測量工件至第一基準部之間的距離是否符合要求，俾可達到快速校正工件之目的。By using the above structural features, the workpiece correction tool of the present invention can be used to place the entire clamp on a working platform, and the workpiece to be corrected is fixed on the clamp seat, and then cooperated with the measuring instrument. The needle passes through the detecting hole to measure the distance between the workpiece relative to the measuring hole to the first reference portion; when there is an error in the distance between the equivalent measuring portion and the first reference portion, the workpiece can be directly folded The exposed part, together with the measuring instrument to measure whether the distance between the workpiece and the first reference part meets the requirements, can achieve the purpose of quickly correcting the workpiece.
依據上述結構特徵，所述工件校正治具另具有至少一供安裝於夾座上的基準板；該第一基準部上設有複數供安裝基準板的裝配孔，該至少一基準板上且設有至少一檢測孔。According to the above structural feature, the workpiece correction jig further has at least one reference plate for mounting on the clamp base; the first reference portion is provided with a plurality of assembly holes for mounting the reference plate, and the at least one reference plate is provided There is at least one detection hole.
所述工件校正治具係於該夾座之底部設有至少一與第一基準部對應的第二基準部，且於該少一第二基準部上設有複數檢測孔。The workpiece correction jig is provided with at least one second reference portion corresponding to the first reference portion at the bottom of the holder, and a plurality of detection holes are disposed on the second and second reference portions.
所述夾座係由一底座，以及一與底座相對接合的上座相鎖固構成；該至少一第一基準部係一體設於上座處。The clamping seat is formed by a base and a top seat that is oppositely engaged with the base; the at least one first reference portion is integrally provided at the upper seat.
所述夾座係由一底座，以及一與底座相對接合的上座相鎖固構成；該至少一第一基準部係一體設於上座處；該底座一體設有至少一與第一基準部對應的第二基準部，且於該少一第二基準部上設有複數檢測孔。The clamping seat is formed by a base and a top seat that is oppositely engaged with the base; the at least one first reference portion is integrally disposed at the upper seat; the base is integrally provided with at least one corresponding to the first reference portion The second reference portion is provided with a plurality of detection holes on the second and second reference portions.
所述夾座係由一底座，以及一與底座相對接合的上座相鎖固構成；於該底座及該上座之接合處對應設有至少一供置入工件的階級。The clamping seat is formed by a base and a top seat that is opposite to the base. The joint between the base and the upper seat is correspondingly provided with at least one stage for inserting the workpiece.
所述夾座係由一底座，以及一與底座相對接合的上座相鎖固構成；於該底座與上座相接合之部位設有複數螺絲孔，於該上座處設有複數分別與各螺絲孔對應的螺絲穿孔，另有複數螺絲分別穿過上座的螺絲穿孔再旋入底座的螺絲孔。The clamping seat is formed by a base and a top seat that is oppositely engaged with the base; a plurality of screw holes are arranged at a portion where the base and the upper seat are joined, and a plurality of screw holes are respectively arranged at the upper seat. The screw is perforated, and a plurality of screws are respectively passed through the screw of the upper seat and then screwed into the screw hole of the base.
具體而言，本創作所揭露之工件校正治具，係具有下列優點：Specifically, the workpiece correction jig disclosed in the present invention has the following advantages:
1.結構簡單，可直接於加工現場對工件進行檢測。1. The structure is simple, and the workpiece can be detected directly at the processing site.
2.可於檢測工件之同時，直接校正調整工件。2. It can directly correct and adjust the workpiece while detecting the workpiece.
3.適用性高，可符合不同工件之校正使用需求。3. High applicability, can meet the calibration needs of different workpieces.
11‧‧‧工件11‧‧‧Workpiece
12‧‧‧工件12‧‧‧Workpiece
20‧‧‧量測儀器20‧‧‧Measurement instruments
21‧‧‧探針21‧‧‧ probe
30‧‧‧夾座30‧‧‧Clip seat
31‧‧‧上座31‧‧‧上上
311‧‧‧第一基準部311‧‧‧First Benchmark
312‧‧‧檢測孔312‧‧‧Detection hole
313‧‧‧裝配孔313‧‧‧ Assembly holes
314‧‧‧螺絲穿孔314‧‧‧ Screw perforation
32‧‧‧底座32‧‧‧Base
321‧‧‧第二基準部321‧‧‧ second reference
322‧‧‧檢測孔322‧‧‧Detection hole
323‧‧‧螺絲孔323‧‧‧ screw holes
33‧‧‧階級33‧‧‧Class
34‧‧‧螺絲34‧‧‧ screws
41‧‧‧基準板41‧‧‧ reference board
411‧‧‧檢測孔411‧‧‧Detection hole
412‧‧‧螺絲孔412‧‧‧ screw holes
42‧‧‧螺絲42‧‧‧ screws
第一圖係為本創作第一實施例之工件校正治具外觀立體圖。The first figure is an external perspective view of the workpiece correction jig of the first embodiment of the creation.
第二圖係為本創作第一實施例之工件校正治具用以固定工件時之結構分解圖。The second figure is an exploded view of the workpiece correcting jig for the first embodiment of the present invention for fixing the workpiece.
第三圖係為本創作第一實施例之工件校正治具使用狀態外觀示意圖。The third figure is a schematic view showing the appearance of the workpiece correction jig of the first embodiment of the present invention.
第四圖係為本創作第一實施例之工件校正治具使用狀態局部 剖視圖。The fourth figure is the use state of the workpiece correction tool of the first embodiment of the present invention. Cutaway view.
第五圖係為本創作第二實施例之工件校正治具之基準板組裝示意圖。The fifth figure is a schematic diagram of the assembly of the reference plate of the workpiece correction jig of the second embodiment of the present invention.
第六圖係為本創作第二實施例之工件校正治具使用狀態外觀示意圖。The sixth drawing is a schematic view showing the appearance of the workpiece correction jig of the second embodiment of the present invention.
本創作主要提供一種可用以快速校正工件之工件校正治具，如第一圖本創作第一實施例之工件校正治具外觀立體圖、第二圖本創作第一實施例之工件校正治具用以固定工件時之結構分解圖所示，本創作之工件校正治具，基本少係具有一組用以將工件11夾制固定的夾座30，於夾座30頂部設有至少一相對凸出夾座30側面的第一基準部311，且於第一基準部311上設有複數檢測孔312。The present invention mainly provides a workpiece correction jig for quickly correcting a workpiece, such as a first perspective view of the workpiece correction jig of the first embodiment, and a second figure for creating a workpiece correction jig of the first embodiment. As shown in the structural exploded view of the fixed workpiece, the workpiece correcting jig of the present invention has a set of clamping holders 30 for clamping and fixing the workpiece 11 , and at least one opposite protruding clip on the top of the clamping seat 30 . The first reference portion 311 on the side of the seat 30 is provided with a plurality of detection holes 312 on the first reference portion 311.
請同時配合參照第三圖及第四圖所示，原則上，本創作之工件校正治具於使用時，係將欲進行校正的工件11固定於夾座30上，由量測儀器20之探針21穿過檢測孔312之方式，測量工件11相對於量測孔312之部位至第一基準部311之間的距離，由於本創作之工件校正治具結構極為簡單，而具備可直接於加工現場檢測工件之優點。Please refer to the third and fourth figures at the same time. In principle, the workpiece correction tool of the present invention is used to fix the workpiece 11 to be corrected on the holder 30, and the measuring instrument 20 is used. The distance between the portion of the workpiece 11 relative to the measuring hole 312 to the first reference portion 311 is measured by the manner in which the needle 21 passes through the detecting hole 312. Since the structure of the workpiece correcting jig of the present invention is extremely simple, it can be directly processed. The advantages of the workpiece are detected on site.
當然，若工件11至第一基準部311之間的距離有誤差時，則可直接扳折工件11露出的部位(將工件11向上或向下做不同程度之扳折)，再配合量測儀器20測量工件11至第一基準部311之間的距離是否符合要求，即可達到快速校正工件11之目的。Of course, if there is an error in the distance between the workpiece 11 and the first reference portion 311, the exposed portion of the workpiece 11 can be directly folded (the workpiece 11 is folded up or down to different degrees), and then the measuring instrument is matched. 20 The purpose of quickly correcting the workpiece 11 can be achieved by measuring whether the distance between the workpiece 11 and the first reference portion 311 meets the requirements.
再者，如第五圖及第六圖所示，本創作之整體工件校正治具係可以另外具有至少一供安裝於夾座30上的基準板41； 該第一基準部311上設有複數供安裝基準板41的裝配孔313，該至少一基準板41上且設有至少一檢測孔411；在本實施例中，該至少一基準板41係另外設有複數與各裝配孔313對應的螺絲孔412，以供利用複數螺絲42將基準板41鎖固於夾座30之第一基準部311上，藉由基準板41所產生的長度延伸效果，供檢測或校正不同形狀(或長度)之工件12使用，使整體工件校正治具更具適用性及使用便利性。Furthermore, as shown in the fifth and sixth figures, the overall workpiece correction jig of the present invention may additionally have at least one reference plate 41 for mounting on the holder 30; The first reference portion 311 is provided with a plurality of mounting holes 313 for mounting the reference plate 41. The at least one reference plate 41 is provided with at least one detecting hole 411. In the embodiment, the at least one reference plate 41 is additionally A plurality of screw holes 412 corresponding to the mounting holes 313 are provided for locking the reference plate 41 to the first reference portion 311 of the holder 30 by the plurality of screws 42. The length extension effect generated by the reference plate 41 is The use of the workpiece 12 for detecting or correcting different shapes (or lengths) makes the overall workpiece correction jig more applicable and convenient to use.
本創作之工件校正治具係可進一步於該夾座30之底部設有至少一與第一基準部311對應的第二基準部321，且於該少一第二基準部321上設有複數檢測孔322，使整體工件校正治具，具有可將夾座30反向對調使用的操作便利性。The workpiece correction tool of the present invention may further include at least one second reference portion 321 corresponding to the first reference portion 311 at the bottom of the holder 30, and a plurality of detections on the second and second reference portions 321 The hole 322 allows the entire workpiece to be corrected, and has the operational convenience of being able to reversely reverse the holder 30.
值得一提的是，在上述不同實施例下，整體夾座30係可以如第二圖所示，由一底座32，以及一與底座32相對接合的上座31相鎖固構成；在此結構形態下，該至少一第一基準部311則係一體設於上座31處。It should be noted that, in the above different embodiments, the integral holder 30 can be locked by a base 32 and a top seat 31 opposite to the base 32 as shown in the second figure; The at least one first reference portion 311 is integrally provided at the upper seat 31.
同樣的，在所述夾座30係由一底座32，以及一與底座32相對接合的上座31相鎖固構成，且該至少一第一基準部311係一體設於上座31處之結構型態下；該底座32亦可一體設有至少一與第一基準部311對應的第二基準部321，且於該少一第二基準部321上設有複數檢測孔322，同樣具有可將夾座30反向對調使用的操作便利性。Similarly, the holder 30 is locked by a base 32 and a top seat 31 opposite to the base 32, and the at least one first reference portion 311 is integrally formed at the upper seat 31. The base 32 can be integrally provided with at least one second reference portion 321 corresponding to the first reference portion 311, and the plurality of second reference portions 321 are provided with a plurality of detecting holes 322, which also have a clamping seat 30 Operational convenience for reverse swap.
在所述夾座30係由一底座32，以及一與底座32相對接合的上座31相鎖固構成之結構型態下，整體夾座30係於該底座32與上座31相接合之部位設有複數螺絲孔323，於該上座31處設有複數分別與各螺絲孔323對應的螺絲穿孔314，另有複數螺絲34分別穿過上座31的螺絲穿孔314再旋入底座32的螺絲孔 323，達到將上座31及底座32鎖固，以及將置於上座31及底座32之間的工件11夾制固定之目的。In the structure in which the holder 30 is locked by a base 32 and an upper seat 31 opposite to the base 32, the integral holder 30 is disposed at a portion where the base 32 and the upper seat 31 are joined. The plurality of screw holes 323 are provided at the upper seat 31 with a plurality of screw holes 314 corresponding to the screw holes 323, and a plurality of screws 34 are respectively passed through the screw holes 314 of the upper seat 31 and screwed into the screw holes of the base 32. 323, the upper seat 31 and the base 32 are locked, and the workpiece 11 placed between the upper seat 31 and the base 32 is clamped and fixed.
以及，在上述夾座30係由一底座32，以及一與底座32相對接合的上座31相鎖固構成之結構型態下，係可進一步於該底座32及該上座31之接合處，對應設有至少一供置入工件11的階級33，利用各階級33之設置對工件11產生相對較為穩固可靠的定位效果。Further, in the structure in which the holder 30 is locked by a base 32 and a seat 31 that is oppositely coupled to the base 32, the joint between the base 32 and the upper seat 31 can be further provided. There is at least one stage 33 for inserting the workpiece 11, which provides a relatively stable and reliable positioning effect on the workpiece 11 by the arrangement of the various stages 33.
具體而言，本創作所揭露之工件校正治具，係具有下列優點：Specifically, the workpiece correction jig disclosed in the present invention has the following advantages:
1.結構簡單，可直接於加工現場對工件進行檢測。1. The structure is simple, and the workpiece can be detected directly at the processing site.
2.可於檢測工件平直度之同時，直接校正調整工件。2. It can directly correct and adjust the workpiece while detecting the flatness of the workpiece.
3.適用性高，可符合不同工件之校正使用需求。3. High applicability, can meet the calibration needs of different workpieces.
綜上所述，本創作提供一較佳可行之工件校正治具，爰依法提呈新型專利之申請；本創作之技術內容及技術特點已揭示如上，然而熟悉本項技術之人士仍可能基於本創作之揭示而作各種不背離本案創作精神之替換及修飾。因此，本創作之保護範圍應不限於實施例所揭示者，而應包括各種不背離本創作之替換及修飾，並為以下之申請專利範圍所涵蓋。In summary, the present invention provides a better and feasible workpiece correction jig, and submits a new patent application according to law; the technical content and technical features of the present invention have been disclosed as above, but those familiar with the technology may still be based on this The creation of the creation and the various changes and modifications that do not depart from the creative spirit of the case. Therefore, the scope of the present invention is not limited to the embodiments disclosed, but includes various alternatives and modifications that do not depart from the present invention and are covered by the following claims.
11‧‧‧工件11‧‧‧Workpiece
20‧‧‧量測儀器20‧‧‧Measurement instruments
21‧‧‧探針21‧‧‧ probe
30‧‧‧夾座30‧‧‧Clip seat
31‧‧‧上座31‧‧‧上上
311‧‧‧第一基準部311‧‧‧First Benchmark
312‧‧‧檢測孔312‧‧‧Detection hole
313‧‧‧裝配孔313‧‧‧ Assembly holes
314‧‧‧螺絲穿孔314‧‧‧ Screw perforation
32‧‧‧底座32‧‧‧Base
321‧‧‧第二基準部321‧‧‧ second reference
322‧‧‧檢測孔322‧‧‧Detection hole
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102211027U TWM470374U (en) | 2013-06-13 | 2013-06-13 | The workpiece alignment fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102211027U TWM470374U (en) | 2013-06-13 | 2013-06-13 | The workpiece alignment fixture |
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| Publication Number | Publication Date |
|---|---|
| TWM470374U true TWM470374U (en) | 2014-01-11 |
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| TW102211027U TWM470374U (en) | 2013-06-13 | 2013-06-13 | The workpiece alignment fixture |
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| TW (1) | TWM470374U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI647037B (en) * | 2017-12-18 | 2019-01-11 | 新代科技股份有限公司 | Fixture correction device and method |
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2013
- 2013-06-13 TW TW102211027U patent/TWM470374U/en not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI647037B (en) * | 2017-12-18 | 2019-01-11 | 新代科技股份有限公司 | Fixture correction device and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4K | Annulment or lapse of a utility model due to non-payment of fees |