TWM465658U - Slide type substrate gripping device - Google Patents

Description

Slide rail substrate clamping device

The present invention relates to a gripping device, which particularly relates to a slide rail type substrate gripping device which is easy to assemble and has high assembly precision.

In the 21st century, human life has entered the realm of digital age. Today, many items and utensils around human life are replaced by digital high-tech products, which not only bring people a lot of convenience, but also enjoy high-tech. Civilization progresses, and in the era of digitalization, most electrical appliances and appliances are related to digital technology or controlled by high-tech IC chips to achieve rapid and accurate automation, so human beings live in digital technology. In the field, it is necessary to control various high-tech products with more advanced digital knowledge and technology, such as: computers, televisions, audio-visual equipment, central management of buildings, automobiles, airplanes, etc., food, clothing, housing, and related products. appliance.

The high-tech IC chip is a very important component. The IC chip is composed of extremely precise integrated circuits. The manufacturing process is to use a high-precision machine to polish the wafer in a clean room environment. The high-precision lamination work is completed, and the manufacturing cost of the machine and the factory is very high. Therefore, in the process of manufacturing the wafer, the product yield can determine whether a semiconductor factory is profitable or not, so it is committed to improving the product. The yield is the most important issue for every semiconductor factory operator.

The most important factor affecting the yield of the wafer is whether the mask is contaminated. If the dust particles appear on the mask, the contaminated mask will be used in the semiconductor lithography process to cause corresponding defects in the wafer (Defect). Therefore, in order to keep the reticle clean, the reticle must be cleaned. Usually, the cleaning device picks up the reticle through a clamping device for cleaning. The clamping device is disclosed in the Chinese Patent Publication No. I317149. Please refer to the first figure, which discloses a clamping device 1'. The clamping device 1' mainly comprises: a body 11' having at least two groups. a pair of parallel perforations 111', the central portion of the base 11' houses a rotary driving device 12'; a plurality of connecting rods 13', one end of each connecting rod 13' is pivotally connected to a pivoting point of the rotating output end, the plural The pivot points can be tangentially displaced with the rotation of the driving device; a plurality of pivoting seats 14', each pivoting seat 14' is pivoted adjacent to the central portion to the other end of the connecting rod away from the rotary driving device; a plurality of pairs The interlocking rod 15' is displaced in a straight line in the through hole 111', and the pair of interlocking rods 15' are connected to both sides of the pivoting seat; a plurality of clamping blocks 16', each clamping block 16' Is connected to each pair of linkage rods 15', reversed or moved toward the rotary drive device 12' with the displacement of the linkage rod 15'; and elastic buffering clamping members connected to the plurality of clamping blocks 16' and light a portion where the cover contacts to reduce the clamping block 16' to the mask Therefore, the rotation of the rotary driving device 12' is operated, and the rotational displacement is converted to a linear displacement via the connecting rod 13' to drive the clamping block 16' to move outward or inward to achieve the effect of relaxing or clamping the mask. By.

The conventional clamping device 1 ′ can achieve the purpose of clamping the substrate. However, the conventional clamping device 1 ′ uses the connecting rods 13 ′ to drive the linkage rods 15 ′, and the linkage rods 15 ′ drive the clamping portions. Block 16', but each linkage rod 15' is connected to the corresponding link 13' and the clamping block 16', and the through holes 111' are mainly provided in the base 11', and the through holes 111' are provided for the linkage rods 15' The through holes 111' are produced with tolerances. If the through holes 111' are not accurately aligned, the tolerances of the through holes 111' are accumulated, and finally the connecting rods 15' are connected to the links. The precision of the rod 13' and the clamping blocks 16'. Therefore, how to solve the above problems and shortcomings in the past is the direction for the relevant manufacturers engaged in this industry to research and improve.

In view of the above problems, the present invention provides a slide-type substrate clamping device which has a simple structure, reduces the setting of the perforations, and reduces the number of components used therein, thereby simplifying the assembly process and improving the assembly precision.

The purpose of the present invention is to provide a slide-type substrate gripping device which has a simple structure, reduces the setting of perforations, and reduces the number of components used therein, thereby simplifying assembly procedures and improving assembly precision.

In order to achieve the above-mentioned various purposes and effects, the present invention discloses a slide-type substrate gripping device comprising: a body; and a plurality of slide rails disposed on the seat body; a plurality of clamping members, respectively a sliding member disposed on the corresponding sliding rail; and a driving member pivotally disposed on the seat body and located between the sliding rails, each clamping member connecting the driving member, the driving member rotating and driving the clips The holding members are respectively slid to the corresponding sliding rails, and the clamping members are simultaneously moved away from the seat body or toward the seat body to grip a substrate.

1'‧‧‧Clamping device
11'‧‧‧
110'‧‧‧ accommodating space
111'‧‧‧Perforation
13'‧‧‧ Connecting rod
14'‧‧‧ pivoting seat
15'‧‧‧ linkage rod
16'‧‧‧Clamping block
1‧‧‧Substrate gripping device
10‧‧‧ body
101‧‧‧ first surface
1011‧‧‧ accommodating slots
102‧‧‧ second surface
12‧‧‧Slide rails
14‧‧‧Clamping parts
141‧‧‧Clamping body
1411‧‧‧First side wall
1412‧‧‧Second side wall
1413‧‧‧ Positioning Department
142‧‧‧Connected ontology
143‧‧‧ Slider
15‧‧‧Connecting parts
151‧‧‧Ontology
152‧‧‧Connecting convex
16‧‧‧ Drives
161‧‧‧ drive ontology
1611‧‧‧ curved slot
162‧‧‧ drive shaft
18‧‧‧ cover
181‧‧‧Perforation
182‧‧‧ venting holes
19‧‧‧Waterproof strips
191‧‧‧ Fixed Department
2‧‧‧Substrate
3‧‧‧Substrate cleaning equipment
30‧‧‧Actuator
31‧‧‧Substrate supply area
32‧‧‧Substrate cleaning area

First figure: it is a schematic view of a conventional clamping device;
The second drawing is a schematic view of the substrate clamping device of the first embodiment of the present invention;
FIG. 3 is an assembled view of the substrate clamping device of the first embodiment of the present invention;
4A to 4E drawings: a state of use of the substrate clamping device of the first embodiment of the present invention;
Figure 5 is a schematic view showing a substrate chucking device of a second embodiment of the present invention;
Figure 6 is an assembled view of a substrate chucking device according to a second embodiment of the present invention; and a seventh drawing: a schematic view of the substrate chucking device of the third embodiment of the present invention.

In order to give your reviewers a better understanding and understanding of the features and effects of the present invention, please refer to the examples and the detailed descriptions, as explained below:

The conventional substrate clamping device utilizes a plurality of interlocking rods to drive the plurality of clamping members to open and close to clamp the substrate. However, the connection between the linkage rods of the substrate gripping device and the clamping members is required to provide a plurality of perforations in the clamping members and the body, and each of the perforations is formed with tolerances, and the perforations are not Precise positioning, the tolerance of each perforation is accumulated and the accuracy of the overall assembly is not good. In view of the above problems, the present embodiment provides a slide type substrate clamping device to improve the above problems.

Please refer to the second and third figures, which are schematic diagrams and assembly diagrams of the substrate clamping device according to the first embodiment of the present invention; as shown in the figure, the embodiment provides a slide rail substrate clamping device 1 and a substrate. The clamping device 1 comprises a body 10, four sliding rails 12, four clamping members 14 and a driving member 16. The base 10 has a first surface 101 and a second surface 102 opposite to the first surface 101. 12 is disposed on the first surface 101 of the base 10, and the slide rails 12 extend from the center of the base 10 to each corner of the base 10. One end of each clamping member 14 is slidably disposed on the corresponding sliding rail 12, and the other end thereof extends along the side of the base 10 to the second surface 102 of the base 10 and protrudes from the second surface 102. The driving member 16 is pivotally disposed at the center of the first surface 101 of the base 10, that is, at the intersection of the extensions of the sliding rails 12. Each of the clamping members 14 is connected to the driving member 16. When the driving member 16 rotates, the driving member 16 drives the clamping members 14 to slide away from the base 10 or toward the base 10 to clamp. A substrate.

Referring to the third embodiment, the first surface 101 of the base 10 of the present embodiment has a receiving slot 1011. The sliding rails 12 and the driving member 16 are disposed in the receiving slot 1011. Each of the clamping members 14 of the present embodiment includes a clamping body 141, a connecting body 142 and a slider 143. The clamping body 141 has a first sidewall 1411 and a second sidewall 1412. The first sidewall 1411 is vertical. The first side wall 1412 and the second side wall 1412 of the clamping body 141 of each clamping member 14 are disposed on the second side wall 1412. The intersection corresponds to a corner of the seat body 10, and the first side wall 1411 and the second side wall 1412 are adjacent to the two side edges adjacent to the corner. One end of the connecting body 142 of each clamping member 14 is connected to the clamping body 141. However, the connecting body 142 can be connected to the clamping body 141 by means of locking, adhesive or other connection. The other end of the connecting body 142 is connected to the driving member 16 pivotally mounted on the base 10. The driving member 16 is described below, and details are not described herein. The slider 143 of each clamping member 14 is slidably disposed on the sliding rail 12 and disposed on the connecting body 142 to drive the connecting body 142 to slide on the sliding rail 12. The connecting body 142 drives the clamping body 141 away from the base 10. Or move in the direction of the seat 10. The connection between the slider 143 and the connecting body 142 can be through locking, adhesive or other connection.

The driving member 16 includes a driving body 161 and a driving shaft 162. The driving shaft 162 is disposed at the center of the driving body 161. The driving body 161 is pivotally disposed on the first surface 101 of the base 10 and located in the receiving groove 1011. The driving body 161 is provided with four identical curved through grooves 1611. The curved through grooves 1611 are formed in an annular array by driving the center of the body 161. Each of the curved through grooves 1611 drives the body from the center of the driving body 161. The edge of 161 extends. The connecting body 142 of each clamping member 14 is inserted through a connecting member 15 through the corresponding curved through slot 1611 for connection with the driving member 16. The connecting member 15 of the present embodiment has a body 151 and a connecting protrusion 152. The connecting protrusion 152 is disposed on the body 151. The connecting protrusion 152 passes through the connecting body 142, and the body 151 is fixed to the connecting body 142. The body 151 and the connecting protrusion 152 are two separate components, and may of course be integrally formed, and details are not described herein. When the clamping member 14 is coupled to the driving member 16, the connecting projection 152 penetrates into the corresponding curved through slot 1611 to connect the clamping member 14 with the driving member 16. However, the connecting member 15 can be integrally formed with the connecting body 142 of the clamping member 14, and details are not described herein.

Please refer to FIG. 4A to FIG. 4E, which are diagrams showing the use state of the substrate clamping device according to the first embodiment of the present invention; as shown, the substrate clamping device 1 of the present embodiment can be applied to the substrate cleaning device 3 The substrate clamping device 1 is first moved to the substrate supply area 31 of the substrate cleaning device 3. When the substrate clamping device 1 is to clamp the substrate 2, the driving shaft 162 of the driving member 16 is first subjected to the actuator 30 of the substrate cleaning device 3. The driving shaft 161 drives the driving body 161 to rotate. The arc-shaped through slot 1611 of the driving body 161 drives the connecting member 15 connected to the corresponding connecting body 142. As the driving body 161 rotates, the connecting member 15 Moving from one end of the arcuate through slot 1611 near the center of the driving body 161 to an end of the arcuate through slot 1611 near the edge of the driving body 161, while the connecting member 15 drives the connecting body 142 to move, the slide rail 12 and the slider 143 ( As shown in the third figure, the corresponding connecting body 142 can only linearly slide thereon, so that the connecting body 142 drives the clamping body 141 connected thereto to move away from the seat body 10 to allow the clamping members to be moved. 14 away from the seat 10 at the same time The direction is moved to further open the clamping members 14, and one of the substrates 2 supplied by the substrate supply area 31 is located between the clamping members 14 and corresponds to the second surface 102 of the base 10 (eg, the fourth C-picture) Shown).

Then, the actuator 30 drives the driving rod 162 to rotate, the driving rod 162 drives the driving body 161 to rotate, and the driving body 162 drives each connecting member 15 to move to the corresponding curved through groove 1611, that is, an arc from the edge of the driving body 162. One end of the through slot 1611 is moved to one end of the arcuate slot 1611 near the center of the driving body 162, so that each connecting member 15 drives the corresponding connecting body 142 to move toward the center of the base 10, and the connecting body 142 drives the connecting body 142. The clamping body 141 moves toward the base 10 to grip the substrate 2 located in the substrate supply area 31, and then the substrate clamping device 1 moves to a substrate cleaning area 32 of the substrate cleaning apparatus 3, and the substrate cleaning area 32 is opposite to the substrate. 2 to clean.

It can be seen from the above that the clamping members 14 of the substrate clamping device 1 of the present embodiment slide on the sliding rail 12 to achieve the purpose of clamping the substrate 2, and the conventional substrate clamping device drives the clamps by using a plurality of links. The purpose of clamping the substrate is to hold the component. When the conventional substrate clamping device is assembled, the assembly procedure is cumbersome due to the large number of components, and the assembly precision is not good. The substrate chucking device 1 of the present embodiment improves the problem of the conventional substrate chucking device, and the number of components is small, thereby effectively reducing the assembly procedure and further increasing the assembly precision.

Please refer to the fifth and sixth figures, which are schematic diagrams and assembly diagrams of the substrate clamping device according to the second embodiment of the present invention; as shown in the figure, the substrate clamping device 1 of the present embodiment further includes a cover plate 18 The center of the cover plate 18 has a through hole 181, and the through hole 181 of the cover plate 18 is sleeved on the driving shaft 162, and the cover plate 18 is locked to the first surface 101 of the base body 10, and covers the clamping member 14 The connecting body 142, the connecting members 15 and the driving body 161 of the driving member 16 are used to insulate the clamping members 14, the connecting members 15 and the driving body 161 of the driving member 16 from external dust or contaminants. The cover plate 18 of the embodiment further includes at least one air venting hole 182, and the air venting hole 182 is in communication with the base body 10 (ie, communicates with the accommodating groove 1011), and the air venting hole 182 is present in the base body 10 and the cover. The dust or contaminants between the plates 18 and the liquid of the cleaning substrate 2 are extracted to prevent dust or contaminants and the liquid of the cleaning substrate 2 from contaminating the clamping members 14, the connecting members 15 and the driving members 16, thereby avoiding dust. Or contaminants contaminate the substrate 2.

Please refer to the seventh figure, which is a schematic diagram of the substrate clamping device according to the third embodiment of the present invention. As shown in the figure, the substrate clamping device 1 of the present embodiment further includes a waterproof rubber strip 19, and the waterproof rubber strip 19 is The hollow square shape, the four corners of the waterproof rubber strip 19 respectively have a fixing portion 191, and the fixing portions 191 of the waterproof rubber strip 19 are respectively fixed to the plurality of positioning portions 1413 of the clamping members 14, wherein each positioning portion 1413 is disposed. At the intersection of the first side wall 1411 and the second side wall 1412 of the clamping body 141, when the waterproof rubber strip 19 is disposed on the clamping members 14, the four sides of the waterproof rubber strip 19 and the first clamping body 142 A side wall 1411, that is, the second side wall 1412 is in close contact with each other, so that the waterproof rubber strip 19 is stretched as the holding members 14 are simultaneously moved away from the seat body 10. When the clamping members 14 grip the substrate 2, the waterproof rubber strip 19 is located between the clamping members 14 and the substrate 2 to prevent the liquid of the cleaning substrate 2 from entering the substrate clamping device 1, thereby avoiding the liquid to the substrate. The components in the gripping device 1 are rusted.

As can be seen from the above, the present invention provides a slide type substrate gripping device which can achieve the purpose of gripping a substrate by using a small number of components, thereby simplifying the assembly process and increasing the assembly precision. Then, the substrate clamping device is further provided with a cover plate covering the components in the substrate clamping device to isolate external contaminants from entering the substrate clamping device, thereby preventing the substrate from being contaminated; The pore extraction substrate picks up the contaminants in the device and the liquid remaining when the substrate is cleaned, thereby preventing the components in the substrate clamping device from being damaged by the contaminants and liquids; the substrate clamping device is further provided with a waterproof rubber strip to prevent the cleaning of the substrate. The liquid enters the substrate gripping device, thereby preventing rusting of components in the substrate gripping device.

However, the above descriptions are only for the embodiments of the present invention, and are not intended to limit the scope of the present invention, and the variations, modifications, and modifications of the shapes, structures, features, and spirits described in the scope of the patent application. It should be included in the scope of the patent application for this creation.

This creative department is a novelty, progressive and available for industrial use. It should meet the requirements of patent applications stipulated in China's Patent Law. It is undoubtedly a new type of patent application, and the Prayer Council will grant patents as soon as possible. prayer.

1‧‧‧Substrate gripping device

10‧‧‧ body

14‧‧‧Clamping parts

16‧‧‧ Drives

Claims (10)

A slide type substrate clamping device comprising:
a body; and a plurality of slide rails disposed on the seat body;
a plurality of clamping members respectively slidably disposed on the corresponding sliding rails; and a driving member pivotally disposed on the base body and located between the sliding rails, each clamping member connecting the driving member, the driving The piece rotates and drives the clamping members to respectively slide on the corresponding sliding rails, and the pair of clamping members simultaneously move away from the seat body or toward the seat body to grip a substrate. The slide rail type substrate gripping device of claim 1, wherein each of the clamping members comprises:
a clamping body on one side of the base body; and a connecting body, one end of which is connected to the clamping body, the other end of which is connected to the driving component, the connecting body is slidably disposed on the sliding rail, and the driving component rotates The connecting body is driven, and the connecting body slides on the sliding rail and drives the clamping body to move away from the seat body or toward the seat body. The slide rail type substrate gripping device of claim 2, wherein each of the gripping members further comprises:
A slider is slidably disposed on the slide rail and connected to the connecting body. The slide rail type substrate gripping device of claim 2, wherein the clamping body has a first side wall and a second side wall, the first side wall is vertically disposed on the second side wall, the first side wall And the intersection of the second sidewall corresponds to a corner of the body, and the first sidewall and the second sidewall are adjacent to two sides adjacent to the corner. The slide rail type substrate clamping device according to claim 4, further comprising:
A waterproof rubber strip having a plurality of fixing portions, each fixing portion being disposed at a positioning portion of the clamping member. The slide rail type substrate gripping device of claim 5, wherein the positioning portion is disposed at an intersection of the first side wall and the second side wall of the clamping member. The slide rail type substrate gripping device of claim 1, wherein the driving member comprises:
a driving body pivotally disposed on the base body and having a plurality of arc-shaped through slots, wherein the arc-shaped through slots are in an annular array, the clamping members respectively corresponding to the arc-shaped through slots, and the plurality of connecting members are disposed through the plurality of connecting members The clamping members are respectively located in the corresponding arcuate slots; and a drive shaft is coupled to the driving body. The slide rail type substrate gripping device of claim 7, wherein each of the connecting members comprises:
a body; and a connecting protrusion disposed on the body, the connecting protrusion passing through the connecting body and corresponding to the curved through slot, the body being fixed to the connecting body. The slide rail type substrate clamping device according to claim 1, further comprising:
A cover plate is disposed on the base body and covers the pair of slide rails and the pair of clamping members, and the driving member penetrates the cover plate. The slide rail type substrate gripping device of claim 9, wherein the cover plate further comprises at least one air venting hole, the air venting hole being in communication with the base body.