TWM464660U - Probe needle module - Google Patents

Abstract

A probe needle module comprises a substrate, a holder arranged at the substrate, and at least one probe-needle row arranged at the substrate along a first direction. Each probe-needle row comprises a plurality of probe-needles which are arranged along a second direction and respectively has a contacting segment, and a cantilever segment arranged on the holder and having an included angle with the contacting segment whereby the cantilever segment of probe-needles are layered to form a plurality needle layers from a sample side to a testing machine side, and are classified into at least two sub needle-groups respectively having at least two needles arranged in at least two needle-layers, wherein the contact segment of each probe-needle is the same for same needle-layer while being different for different needle-layer and the included angle of each probe-needle is different for any two corresponding needle-layers belonging different needle-group, and the at least two probe-needles of each sub needle-group are respectively arranged in at least two needle layers corresponding to each other.

Description

Probe module

This creation is a probe structure, especially a probe module with a probe configuration with an angular change.

When the semiconductor wafer is tested, the test machine must contact a device under test (DUT), such as a wafer, through a probe card, and obtain signal to be measured by signal transmission and electrical signal analysis. Test results. The probe card usually comprises a plurality of precision probes arranged in a mutual arrangement, and each probe generally corresponds to a specific electrical contact on the wafer, and when the probe contacts the corresponding electrical contact on the object to be tested, It does pass the test signal from the test machine; at the same time, with the control and analysis program of the probe card and the test machine, the purpose of measuring the electrical characteristics of the test object is achieved.

However, as electronic components become more and more precise, their size is getting smaller and smaller, so that the electrical contact density of the wafer is getting higher and higher, so the density and number of layers of the probe are also increased. Please refer to FIGS. 1A and 1B, which are schematic diagrams of the multilayer probe structure of the probe module of the prior art. In FIG. 1A, the wafer 100 has electrical contacts 100a and 100b, and the probe module has a first probe train and a second probe train. Wherein the first probe train has a plurality of probes (12-1, 12-2), and the second probe train also has a plurality of probes (12-3, 12-4), each probe having an end 12b is in contact with electrical contacts 100a and 100b. The cantilever segment 12d of each probe has an angle with the contact segment 12e, and the relationship between the angles of the probes is as follows. For the probes of the same column, the angles of the probes are not the same, such as: the second probe column, the probe 12 The angle θ _{1 of} -3 is smaller than the angle θ ₂ with the probe 12 - ₄ , and the angle θ _{1 of the} probe _{12 - 1 of the} first probe train is smaller than the angle θ _{2 of the} probe 12-2. In addition, for different columns and corresponding probes, the angles are the same, for example, the angle between the probe 12-1 of the first column and the probe 12-3 of the second column is θ ₁ ; the first column The angle between the probe 12-2 and the probe 12-4 of the second row is θ ₂ . In addition, in Fig. 1B, the angle of each probe is the same, and the length of the contact section of each column of probe is different.

The present invention provides a probe module having at least one probe column structure, a plurality of probe sets in each probe column, and each probe set having a plurality of probes passing through each probe column Probes having equal contact lengths in adjacent probe sets have an angular difference between the angles of the probes for electrical detection of wafers having high density and small pitch electrical contact distribution .

A probe module is configured to transmit a test signal of a test machine to a test object for electrical test, and define a direction in which the test machine is in a high side, and the direction of the object to be tested is a low side. The needle module comprises: a substrate; a holding member disposed on the substrate; and at least one probe row arranged along a first direction, each probe column having a plurality of probes in a second direction a needle set, each probe set includes: a plurality of probes each having a contact section and a cantilever section, one end of the cantilever section being connected to the substrate and the other end being connected to the contact section, The contact segment has an angle with the cantilever segment, and the cantilever segment of the probe of each probe row is disposed on the holder to form a plurality of needle layers from the low lateral side, the probes forming at least two subsets. Each subset includes at least two probes respectively disposed in at least two needle layers, the probes of the same needle layer have equal contact lengths, the lengths of the probe contact segments of different needle layers are not equal, and different subsets are in the same The probe angles of the needle layers are not equal, and the two sub-sets At least two probes provided in the same line of the needle at least two layers.

In another embodiment, the present invention provides a probe module for transmitting a test signal of a test machine to an object to be tested for electrical testing, and defining the direction of the test machine as a high side. The probe module comprises: a substrate; a holding member disposed on the substrate; and at least one probe column arranged along a first direction, each probe being listed a plurality of probe sets in a second direction, each probe set comprising: a plurality of probes, each probe having a contact section and a cantilever section, one end of the cantilever section being connected to the substrate The other end is connected to the contact segment, the contact segment has an angle with the cantilever segment, and the cantilever segment of the probe of each probe row is disposed on the holding member to form a plurality of layers of pins from the low lateral side a layer, the probes forming at least two subsets, each subset comprising at least four probes respectively disposed in at least four needle layers, wherein the four needle layers of the at least four layers have The length of the contact segment is low and high in order to be a first needle layer, a second needle layer, a third needle layer and a fourth needle layer. The probes of the same needle layer have equal contact lengths and different needle layers. The lengths of the probe contact segments are not equal, and the probes in each subset are sequentially arranged in the first needle layer, the third needle layer, the second needle layer and the fourth needle layer, and the at least two subsets are arranged. The at least four probes are disposed in the same four-needle layer, and the probe sets of the different subsets are not equal in the same needle layer.

2‧‧‧ Probe Module

20‧‧‧Substrate

200‧‧‧through hole

201‧‧‧ edge

202‧‧‧ peripheral structure

21~24, 21a~23a, 21b~22b‧‧‧ probe array

25a, 25c, 25e, 25g‧‧‧ first needle probe

25a', 25c', 25e', 25g'‧‧‧ first needle probe

25b, 25d, 25f, 25h‧‧‧ second needle probe

25b', 25d', 25f', 25h'‧‧‧ second needle probe

25i, 25l, 25o, 25i', 25l', 25o'‧‧‧ first needle probe

25j, 25m, 25p, 25j', 25m', 25p'‧‧‧ second needle probe

25k, 25n, 25q, 25k', 25n', 25q'‧‧‧ third needle probe

25r, 25v, 25r', 25v'‧‧‧ first needle probe

25t, 25x, 25t', 25x'‧‧‧ second needle probe

25s, 25w, 25s', 25w'‧‧‧ third needle probe

25u, 25y, 25u', 25y'‧‧‧ fourth needle probe

250‧‧‧Contact section

251‧‧‧Cantilever section

210~240‧‧‧ probe set

211~231‧‧‧ probe group

212~222‧‧‧ probe set

210a~210b, 220a~220b, 230a~230b, 240a~240b‧‧‧subset

211a~211b, 221a~221b, 231a~231b‧‧‧subset

212a~212b, 222a~222b‧‧‧subset

26‧‧‧Retaining parts

3‧‧‧Local area

4‧‧‧Tester

9‧‧‧Samps to be tested

90‧‧‧Electrical contacts

91‧‧‧ first side

92‧‧‧ second side

93‧‧‧ third side

94‧‧‧ fourth side

95‧‧‧High side

96‧‧‧low side

1A and 1B are respectively schematic diagrams of the multilayer probe structure of the probe module of the prior art.

Figure 2 is a side view and partial cross-sectional view of the probe module embodiment of the present invention.

Fig. 3A is a perspective view showing an enlarged view of a partial area in Fig. 2.

Figure 3B is a top plan view of the contact sections of the probes in Figure 3A.

Fig. 3C is a schematic cross-sectional view of the four probe sets 210-240 in Fig. 3A in the X direction of the holder in Fig. 2.

The 3D figure is a schematic diagram of the length error of the contact section of the probe.

Figure 3E is a schematic side view of the single probe set in the Y direction in Figure 3A.

Figure 3F is a schematic side view of the two probe sets in the Y direction in Figure 3A.

The 3G graph is a schematic diagram of the misalignment relationship of adjacent probe columns.

Figure 4A is a schematic view of another embodiment of the probe module of the present invention.

Fig. 4B is a schematic cross-sectional view showing the probe group of Fig. 4A in the X direction of the holder in Fig. 2;

Figure 5A is a schematic view of still another embodiment of the probe module of the present invention.

Fig. 5B is a schematic cross-sectional view showing the probe group of Fig. 5A in the X direction of the holder in Fig. 2;

Fig. 6 is a schematic view showing another embodiment of the probe module of the present invention.

Since the present invention discloses a probe module for use on a probe card, The related principles and basic functions of the probe module on the probe card are well known to those skilled in the relevant art, and therefore will not be fully described in the following description. At the same time, the drawings in the following texts express the structural schematics related to the creative features, and do not need to be completely drawn according to the actual size, which is described first.

Please refer to FIG. 2, which is a side view and a partial cross-sectional view of the probe module embodiment of the present invention. The probe module 2 is configured to transmit a test signal of a test machine 4 to an object to be tested (such as the wafer to be tested 9 shown in FIG. 2) for electrical testing. In the following description of the embodiment, the direction of the test machine 4 is the high side 95 in the direction of the Z direction in the third direction, and the direction of the object to be tested is the low side 96. The probe module includes a substrate 20 and a plurality of probe columns 21-24. The substrate 20 has a through hole 200 having an edge 201 having a peripheral structure 202. The four probe columns 21-24 are respectively fixed on the substrate 20 between the edge 201 of the through hole 200 and the peripheral structure 202 of the substrate 20. In the present embodiment, in order to strengthen the holding probe rows 21 to 24, a holding member 26 is further provided on the substrate 20 to provide the holding probe rows 21 to 24. In addition, it should be noted that the probe needle end portion after the holder 26 is welded according to the electrical contact layout of the substrate 20, and does not necessarily have a uniform arrangement as shown in FIG. The position at which the tail end of the probe is attached to the substrate 20 is determined according to actual needs, and is not limited to the one shown in Fig. 2.

Please refer to FIG. 3A, which is an enlarged perspective view of a partial area 3 in FIG. The probes of the probe arrays 21-24 are in electrical contact with the electrical contacts 90 on the wafer 9 to be tested to detect the electrical characteristics of the wafers 9 to be tested, wherein for the electrical contacts of the same column, The pitch d of the adjacent electrical contacts 90 is less than or equal to 40 μm. It should be noted that, in an embodiment, the chip to be tested is a liquid crystal display driver (LCD driver IC), but is not limited thereto. In this embodiment, the plurality of probe columns 21-24 are sequentially arranged in a first direction X from the first side 91 of the wafer 9 to be tested to the second side 92 of the wafer 9 to be tested, and each probe column is arranged. 21-24 has a plurality of probe sets in a second direction Y, and the third side 93 of the wafer to be tested 9 in the second direction is aligned to the fourth side 94 of the wafer 9 to be tested. For example: for probe column 21 it is in Y a plurality of probe sets 210 in the direction; a probe array 22 having a plurality of probe sets 220 in the Y direction; a probe array 23 having a plurality of probe sets 230 in the Y direction; and a probe array 24 There are a plurality of probe sets 240 in the Y direction.

Each of the probe sets 210, 220, 230, and 240 has a plurality of probes, and the probes of each of the probe sets 210, 220, 230, and 240 are divided into at least two subsets, which are divided into There are two subsets 210a and 210b, 220a and 220b, 230a and 230b, and 240a and 240b. Each of the subsets has at least two probes respectively. In the present embodiment, two probes are taken as an example, wherein the subsets 210a of the first probe array 21 have probes 25a and 25b, and the subset 210b has probes 25a'. And 25b', the subset 220a of the second probe array 22 has probes 25c and 25d, the subset 220b has probes 25c' and 25d', and the subset 230a of the third probe array 23 has probes 25e and 25f. The subset 230b has probes 25e' and 25f', the subsets 240a of the fourth probe array 24 have probes 25g and 25h, and the subset 240b has probes 25g' and 25h'. Each probe (taking the probe 25a as an example) has a contact section 250 and a cantilever section 251, one end of the cantilever section 251 is connected to the substrate 20 and the other end extends toward the through hole 200. The contact section 250 is connected, and the contact section 250 has an angle θ with the cantilever section 251. The angle θ is defined as the angle θ between the center line of the contact segment 250 and the center line of the cantilever segment 251.

Referring to FIG. 2, the cantilever segment of the probe of each probe row is disposed on the holding member 26 to form a plurality of needle layers from the low side 96 to the high side 95, and the probe subsets of the different subsets in the same needle layer are formed. not equal. The probes of the corresponding needle layer in each subset have equal contact lengths, and the probe contact lengths of the different needle layers are not equal. Taking FIG. 3A and FIG. 3B as an example, each subset 210a and 210b, 220a and 220b, 230a and 230b, and 240a and 240b have two stitch layers, for example, a subset of the first probe set 210. In 210a, the probe 25a belongs to the first needle probe, and the probe 25b belongs to the second needle probe. In the subset 210b, the probe 25a' belongs to the first needle probe, and the probe 25b' belongs to the Two-needle probes, the other analogy with this concept. Probes 25a and 25a' or 25b and 25b' of the same needle layer have the same length of contact segment 250.

Please also refer to Figures 3A, 3B and 3C, which 3B is a top view of the contact section of each probe in FIG. 3A, and FIG. 3C is a section of the four probe sets 210 to 240 in FIG. 3A in the X direction of the holding member 26 in FIG. schematic diagram. The rectangular regions in Fig. 3B represent the positions of the probe contact segments, and the relationship between the probes will be described. In this embodiment, taking the first probe array 21 as an example, the subset 210a of each probe set 210 of the first probe array 21 includes a probe 25a with a first needle layer and a second needle layer. The needle 25b, adjacent to the other subset 210b, has a first needle layer probe 25a' and a second needle layer probe 25b'. Wherein, the probes 25a and 25a' have the same length of the contact segment 250, belonging to the first needle layer; and the probe 25b and the probe 25b' also have the same length of the contact segment 250, belonging to the second needle layer. And the at least two probe sets of the two subsets in each probe column are disposed in the same at least two needle layers.

It should be noted that the so-called length in the present invention can allow a height difference. For example, as shown in FIG. 3D, for the probes 25a and 25a' of the first needle layer, the contact section 250 has a height difference Δd. The absolute value of the height difference Δd is greater than or equal to 0 and less than or equal to 1 mil (thousandth of a mile). In addition, as shown in FIGS. 3A and 3B, in the present embodiment, the lengths of the contact segments 250 of the probes 25b and 25b' of the second needle layer are respectively greater than the contacts of the probes 25a and 25a' of the first needle layer. Segment 250 length.

For the probe arrays 22-24, the third side 93 is arranged in the order of the subsets (220a, 220b), (230a, 230b), and (240a, 240b). The second direction is Y. The lengths of the contact segments 250 of the probes used in the corresponding sub-sets of the probe sets in the adjacent probe sets are different. Further, as shown in Figure 3C, the adjacent two-probe columns are The needle layers used are not the same. As with the manner in which the probes of the first probe array are arranged, the subset 220a of each probe set 220 of the second probe array 22 includes the probes of the first needle layer and the probes of the second needle layer. 25d, the adjacent subset 220b has a probe 25c' of the first needle layer and a probe 25d' of the second needle layer. The subset 230a of each probe set 230 of the third probe array 23 includes a first needle layer probe 25e and a second needle layer probe 25f, and the adjacent other subset 230b has a first The needle layer probe 25e' and the second needle layer probe 25f'. The subset 240a of each probe set 240 of the fourth probe array 24 includes a probe 25g of a first needle layer and a probe 25h of a second needle layer, The other subset 240b adjacent thereto has a probe 25g' of the first needle layer and a probe 25h' of the second needle layer. Wherein the probes 25c and 25c' of the first needle layer of the probe set 220 have the same length of the contact segment 250, and the probes 25e and 25e' of the first needle layer of the probe set 230 have the same length of the contact segment 250 and The probes 25g of the first needle layer of the probe set 240 have the same length of the contact segment 250 as 25g', and the above belongs to the first needle layer in the corresponding subset, of course, one point to emphasize, each probe set 220, 230 And the first needle layer of 240 is a different needle layer; and the probes 25d and 25d' of the second needle layer of the probe set 220, the probes 25f and 25f' of the second needle layer of the probe set 230, and The probes 25h and 25h' of the second needle layer of the needle set 240 also have the same length of the contact segment 250, respectively, and the above belongs to the second needle layer in the corresponding subset, of course, one point to emphasize, each probe set 220, The second needle layers of 230 and 240 are different needle layers.

In addition, in this embodiment, for each subset, the lengths of the contact segments 250 of the second needle layer probes 25b and 25b', 25d and 25d', 25f and 25f', and 25h and 25h' are respectively greater than the length The length of the contact segments 25a and 25a', 25c and 25c', 25e and 25e' and 25g and 25g' of the contact segment 250 can be expressed as: L _25a = L _{25a '} < L _25b = L _{25b '} ; L _25c = L _25c' <L _25d = L _25d' ; L _25e = L _25e' <L _25f = L _25f' ; L _25g = L _25g' <L _25h = L _25h' ; the above expression can also be explained in In the same probe column, the probe angle of the adjacent sub-set of each probe set in the same needle layer is gradually increased along the second direction Y.

Where L is the length of the contact segment 250, and the lower right corner number corresponds to the probe number of Figure 3B. Referring to FIG. 3C and referring to FIG. 3B, the length of the contact section 250 of each probe can be expressed as: L _25a = L _25a' <L _25b = L _25b' <L _25c = L _25c' <L _25d = L _25d' <L _25e = L _25e' <L _25f = L _25f' <L _25g = L _25g' <L _25h = L _25h' ; It should be noted that in the present embodiment, the probe columns 21 to 24 have Each of the probe sets 210, 220, 230, and 240 has probes that correspond to each other in the X and Y directions and are aligned with each other without offset.

Next, the angle feature of the present invention will be described. The contact segment 250 of the present deployment probe and the angle of the cantilever segment 251 are characterized in that each probe column 21-24 has an adjacent position in the second direction Y. In the probe set, the adjacent subsets belong to the two probes in the same needle layer, and the angle between the two has an angular difference, that is, the probe having the length of the contact section has a corner between the angles In the embodiment, the absolute value of the angle difference between the two is greater than or equal to 2 degrees. Taking the first probe array 21 of FIG. 3E as an example, the angle of the probe 25a' of the first needle layer is larger than the angle of the probe 25a of the first needle layer; the angle of the probe 25b' of the second needle layer is larger than the angle The angle between the probes 25b of the two-needle layer, and the angle difference between the above-mentioned angles is 2 degrees. The same rules apply to the second to fourth probe columns. In summary, the angle of the probe is θ _25a' ≧ θ _25a + 2°; θ _25b' ≧ θ _25b + 2°.

In addition, for the same subset, the probe of the second needle layer has an angle larger than the angle of the probe of the first needle layer, for example, for the subset 210a, the probe 25b of the second needle layer The angle is larger than the angle of the probe 25a of the first needle layer, and the angle of the probe is θ _25b > θ _25a .

In addition, in the same probe column, among the two needle layers adjacent to each probe group, the probe having the largest angle among the needle layers close to the low side and the probe layer near the high side have the smallest angle. The absolute angle of the angle difference between the two needles is greater than or equal to 1 degree. The two sub-sets 210a and 210b of the probe set 210 are illustrated as shown in FIG. 3E, which is a schematic side view of the probe set 210 in the Y direction in FIG. 3A, and a probe in the 3E figure. The centerline represents the probes within the probe set 210. Please refer to FIG. 3C and FIG. 3E simultaneously, the adjacent two sub-sets 210a and 210b of the probe set 210 use the adjacent two needle layers (the first needle layer and the second needle layer), and the probe set 210 A needle layer is a needle layer adjacent to the low side 96, a second needle layer of the probe set 210 is a needle layer adjacent to the high side 95, and a probe between adjacent two subsets 210a and 210b is a subset 210a The probe 25b and the probe 25a' of the subset 210b, wherein the probe 25a having the largest angle among the first needle layers of the probe set 210 and the second needle layer of the probe set 210 have the smallest angle The needle 25b has an angular difference. In one embodiment, the absolute value of the angle difference is greater than or equal to 1 degree, and the angle of the probe is θ _25b ≧ θ _25a' +1°.

In summary, the probe angle relationship of the probe set 210 of the probe array 21 is θ _25b' > θ _25b > θ _25a' > θ _25a . For the same reason, the same rules are applied to each of the probe sets 220 to 240 of the probe arrays 22-24.

In addition, for the probe sets corresponding to different columns, the adjacent probe columns use different needle layers, that is, the angles of the angles are not the same as the size of the contact segments. Referring to FIG. 2, FIG. 3A and FIG. 3C, the arrangement of the probe needle layers will be described in units of probe rows. Usually, the needle layer of the probe array 24 is higher than the probe array 23, if the low side is 96 to the high side 95, followed by probe rows 21, 22, 23 and 24. The adjacent two probe rows 21 and 22, 22 and 23 or 23 and 24 respectively have two adjacent high needle layers and low needle layers, and the probes having the largest angle between the low needle layers and the high needle layer have the smallest For the angled probe, the absolute value of the angle difference between the two is greater than or equal to 1 degree. As shown in FIG. 3F, taking probe arrays 21 and 22 as an example, for different columns and corresponding probe sets 210-220, probe set 210 has a first needle layer (probes 25a, 25a' are set Wherein) and the second needle layer (where the probes 25b, 25b' are disposed), and the probe set 220 also has a first needle layer (where the probes 25c, 25c' are disposed) and a second needle layer (probes 25d, 25d) 'Setting therein, the adjacent two probe rows 21 and 22 have adjacent two high needle layers and a low needle layer, and the high needle layer refers to the first needle layer of the probe set 220, and the low needle layer is Refers to the second needle layer of probe set 210. The probe 25c having the smallest angle in the high needle layer has the angle of the probe 25b' having the largest angle among the low needle layers, and the two have an angular difference. In an embodiment, the absolute value of the angle difference is greater than Equal to 1 degree.

In summary, the corresponding probe angle relationship is θ _25c ≧ θ _25b' +1°. For the same reason, the same rules apply to the probe set 220~230 or 230~240.

The foregoing embodiment is an embodiment in which the probes correspond to each other in the X and Y directions and are aligned with each other without misalignment. Further, as shown in FIG. 3G, in the present embodiment, the probe columns of different columns correspond to each other. The probes between the probe sets have a pitch in the second direction Y such that adjacent probe columns are misaligned with each other. For example, taking the first probe array 21 and the second probe array 22 as an example, the corresponding probe sets 210a and 220a have probes 25a and 25c having a spacing D in the second direction Y such that The probe array 21 and the second probe array 22 are offset from each other. Although only the two probe columns 21 and 22 are shown in the 3G diagram, they are not limited to two columns. For example, the arrangement of the four probe columns shown in FIG. 3B may be arranged in the manner shown in FIG. 3G.

In summary, the probe module may also have at least three probe columns, and each subset of the probe sets may have two probes respectively disposed on adjacent two needle layers; or each probe The subset of needle sets may have three probes respectively disposed adjacent to the three needle layers (see another embodiment described in Figures 4A and 4B), depending on actual needs. In addition, all of the technical features of the probe module having at least three probe trains may be based on the above-disclosed technical features or the above-disclosed rules.

Please refer to FIG. 4A and FIG. 4B , which are schematic diagrams of another embodiment of the probe module of the present invention. The rectangular area shown in Fig. 4A represents the position of each probe contact section, and the relationship between the probes is explained. Fig. 4B is a schematic cross-sectional view showing the probe group of Fig. 4A in the X direction of the holder 26 in Fig. 2; In the present embodiment, a total of three probe columns 21a, 22a and 23a are provided. Each of the probe columns 21a, 22a, and 23a has a plurality of probe sets 211 to 231. Each of the probe sets 211 to 231 has two sets of sub-sets, which are 211a and 211b, 221a and 221b, and 231a and 231b, respectively. In this embodiment, each subset has three probes, which are respectively disposed on adjacent three-pin layers. The subset 211a of the probe set 211 of the first probe array 21a includes a probe 25i of a first needle layer, a probe 25j of a second needle layer, and a probe 25k of a third needle layer, adjacent to each other. A subset 211b has a probe 25i' of the first needle layer, a probe 25j' of the second needle layer, and a probe 25k' of the third needle layer, and the probe 25i of the first needle layer of the probe set 211 It has the same contact length as 25i'; the probes of the second needle layer of the probe set 211 have the same contact length between the probes 25j and 25j'; and the probe of the third needle layer of the probe set 211 The same contact length is also available between 25k and 25k'. In addition, the lengths of the contact segments of the probes 25j and 25j' of the second needle layer of the probe set 211 in this embodiment are respectively greater than the lengths of the contact segments of the probes 25i and 25i' of the first needle layer of the probe set 211; The length of the contact segments of the probes 25k and 25k' of the third needle layer of the probe set 211 is greater than the length of the contact segments of the probes 25j and 25j' of the second needle layer of the probe set 211, respectively. For the first probe array 21a, a subset of the subsets 211a and 211b is formed as a probe set 211, in the second direction Y, The third side 93 is sequentially arranged to the fourth side 94.

As with the manner in which the probes of the first probe array 21a are arranged, the subset 221a of the probe sets 221 for the second probe array 22a includes the first needle layer probe 25l and the second needle layer probe 25m. The third needle layer probe 25n, and the adjacent other subset 221b, has a first needle layer probe 25l', a second needle layer probe 25m', and a third needle layer probe 25n'. The subset 231a of the probe set 231 of the third probe array 23a includes a probe 25o of the first needle layer, a probe 25p of the second needle layer and a probe 25q of the third needle layer, and the other adjacent one The collection 231b has a probe 25o' of the first needle layer, a probe 25p' of the second needle layer, and a probe 25q' of the third needle layer. Wherein, the probes 25l and 251' of the first needle layer of the probe set 221 have the same contact length, and the probes 25o and 25o' of the first needle layer of the probe set 231 have the same contact length; The probes 25m and 25m' of the second needle layer of the needle set 221 have the same contact length, and the probes 25p and 25p' of the second needle layer of the probe set 231 have the same contact length; The probes 25n and 25n' of the third needle layer of the group 221 have the same contact length, and the probes 25q and 25q' of the third needle layer of the probe set 231 have the same contact length.

The length of the probe contact section of each probe layer of the probe set 221 is the length of the contact section of the probe (25n, 25n') of the third needle layer of the probe set 221, which is larger than the second needle layer of the probe set 221. The length of the contact section of the probe (25m, 25m') is greater than the length of the contact section of the probe (25l, 25l') of the first needle layer of the probe set 221; the length of the probe contact section of each needle layer of the probe set 231 is The length of the contact section of the probe (25q, 25q') of the third needle layer of the probe set 231 is longer than the probe of the second needle layer of the probe set 231 (25p, 25p'). The length of the contact section of the probe (25o, 25o') of the first needle layer of the group 231. In the first direction X, the contact section of the probe is increased from the first side 91 to the second side 92; and in the second direction Y, the length of the contact section of the probe is from the third side 93 to the fourth side 94 increase. Further, for the probe arrays 22a-23a, the subsets (221a, 221b) and (231a, 231b) are a set of probes, and in the second direction Y, the third side 93 is sequentially arranged to the fourth side 94. It should be noted that, in the present embodiment, the probes provided in the probe arrays 21a to 23a correspond to each other in the X and Y directions and are not aligned with each other.

In summary, the length relationship of the probe contact segments in Figures 4A and 4B can be expressed as: L _25i = L _{25i '} < L _25j = L _{25j '} < L _25k = L _{25k '} ; L _25l = L _{25l '} <L _25m =L _25m' <L _25n =L _25n' ;L _25o =L _25o' <L _25p =L _25p' <L _25q =L _25q' ; the above representation can also be explained in the same probe column The probe angle of the adjacent sub-set of each probe set in the same needle layer is gradually increased along the second direction Y. Where L is the length of the contact segment 250, and the lower right corner number corresponds to the probe number of Figure 4A.

In addition, for the probe sets corresponding to different columns, the adjacent probe columns use different needle layers, that is, the angles of the angles are not the same as the size of the contact segments. In Figs. 4A and 4B, the arrangement of the probe needle layers is described in units of probe rows. Usually, the needle layer of the probe array 23a is higher than the probe array 22a, and the low side 96 is toward the high side 95. Then, the probe columns 21a, 22a, and 23a are sequentially arranged.

In summary, the relationship between the lengths of the probe contact segments in Figures 4A and 4B can be expressed as: L _25i = L _25i' <L _25j = L _25j' <L _25k = L _25k' <L _25l = L _{25l '} <L _25m =L _25m' <L _25n =L _25n' <L _25o =L _25o' <L _25p =L _25p' <L _25q =L _25q' ; Next, the angle characteristics of the present embodiment, the same probe In the column, the adjacent subset of each probe set, the two probes in the same needle layer, the absolute difference between the angle angles of the two is greater than or equal to 2 degrees. Taking the probe set 211 of the probe array 21a shown in FIGS. 4A and 4B as an example, the angle between the probes 25i' is larger than the angle between the probes 25i, and the angle difference between the angles is greater than or equal to 2 degrees, and the probe 25j' The angle is larger than the angle between the probes 25j, and the angle difference between the angles of the angles is greater than or equal to 2 degrees. The angle between the probes 25k' is larger than the angle between the probes 25k, and the angle difference between the angles is greater than or equal to 2 degrees. The same is true for the needle layer angular relationship of the probe columns 22a and 23a. In summary, the angle of the probe is θ _25i' ≧ θ _25i + 2°; θ _25j' ≧ θ _25j + 2°; θ _25k' ≧ θ _25k + 2°.

In addition, for the same subset, the probe of the third needle layer has an angle larger than the angle of the probe of the second needle layer, and the probe of the second needle layer has an angle larger than that of the first needle layer. The probe has an included angle. For example, for the subset 211a, the probe 25k of the third needle layer has an angle larger than that of the probe 25j of the second needle layer, and the angle of the probe 25i of the first needle layer is larger than that of the first needle layer. The angle between the angles of the probes is θ _25k > θ _25j > θ _25i .

In addition, in the same probe column, among the two needle layers adjacent to each probe group, the probe having the largest angle among the needle layers close to the low side and the probe layer near the high side have the smallest angle. The absolute angle of the angle difference between the two needles is greater than or equal to 1 degree. The two sub-sets 211a and 211b of the probe set 211 are illustrated. As shown in FIGS. 4A and 4B, the adjacent two sub-sets 211a and 211b of the probe set 211 use the adjacent three-pin layer (first The needle layer, the second needle layer and the third needle layer), the first needle layer of the probe set 211 is a needle layer close to the low side, and the third needle layer of the probe set 211 is a needle layer close to the high side (here) The high and low sides are defined the same as the high side 95 and the low side 96 of FIG. 2, and the second needle layer of the probe set 211 is located between the first and third needle layers of the probe set 211, and the probe set 211 adjacent to the two needle layers (the first needle layer is adjacent to the second needle layer, the second needle layer is adjacent to the third needle layer), and the first needle layer and the second needle layer of the probe set 211 are For example, the probe 25i' having the largest angle among the first needle layers of the probe set 211 and the probe 25j having the smallest angle among the second needle layers of the probe set 211 have an angular difference, in an embodiment. The absolute value of the angle difference is greater than or equal to 1 degree; taking the second needle layer and the third needle layer as an example, the probe 25j' having the largest angle among the second needle layers of the probe set 211 and the probe set 211 The third needle layer has the smallest angle The probe 25k has an angular difference. In one embodiment, the absolute value of the angle difference is greater than or equal to 1 degree. In summary, the angle of the probe is θ _25j ≧ θ _25i' +1°; θ _25k ≧ θ _25j' +1°.

The probe angle relationship of the probe set 211 of the probe array 21a is θ _25k' > θ _25k > θ _25j' > θ _25j > θ _25i' > θ _25i . Similarly, the same rules apply to the probe sets 221 to 231 of the probe arrays 22a-23a. The probe angle relationship of the probe set 221 of the probe array 22a is θ _25n' > θ _25n > θ _25m' > θ _25m > θ _25l' > θ _25l . The probe angle relationship of the probe set 231 of the probe array 23a is θ _25q' > θ _25q > θ _25p' > θ _25p > θ _25o' > θ _25o .

In addition, the adjacent two probe columns (21a and 22a or 22a and 23a) use different needle layers for the two probe columns, and the adjacent two probe columns respectively have adjacent two high and low needle layers. The low needle layer has the largest angle of the probe and the high needle layer The probe with the smallest angle, the absolute value of the angle difference between the two is greater than or equal to 1 degree, as shown in Figures 4A and 4B, for different columns and corresponding probe sets 211~221, the adjacent The two probe rows 21a and 22a respectively have two adjacent high and low needle layers, the high needle layer refers to the first needle layer of the probe group 221, and the low needle layer refers to the third needle layer of the probe group 211. . The probe 25l having the smallest angle in the high needle layer has an angle of the probe 25k' having the largest angle among the low needle layers, and the two have an angular difference. In an embodiment, the absolute value of the angle difference is greater than Equal to 1 degree.

In summary, the corresponding angle of the probe is θ _25l ≧ θ _25k' +1°. Similarly, for the probe sets 221 to 231, the same rule is also adopted, and the corresponding angle of the probe is θ _25o ≧ θ _25n' +1°.

It should be noted that although the probes of FIG. 4A are aligned with each other, there is no misalignment, but in another embodiment, the probes corresponding to the probe arrays may be similar to the embodiment shown in FIG. 3G. There is a spacing in the second direction Y, such that the pitch of the probe columns is misaligned.

Please refer to FIG. 5A and FIG. 5B , which are schematic diagrams of still another embodiment of the probe module of the present invention. The rectangular area shown in Fig. 5A represents the position of each probe contact section, and the relationship between the probes is explained. Fig. 5B is a schematic cross-sectional view showing the probe group of Fig. 5A in the X direction of the holder 26 in Fig. 2; In the present embodiment, a total of two probe columns 21b and 22b are provided. Each of the probe columns 21b and 22b has a plurality of probe sets 212-222. Each of the probe sets 212-222 has two sub-sets 212a-212b and 222a and 222b respectively. In this embodiment, each sub-set has four probes respectively disposed on adjacent four-pin layers, wherein The four-needle layer is a probe layer of the same needle layer according to the length of the contact section of the probe, which is low and high in order to be a first needle layer, a second needle layer, a third needle layer and a fourth needle layer. Having equal lengths of the contact segments, the lengths of the probe contact segments of the different needle layers are not equal, and the probes in each subset are the first needle layer, the third needle layer, the second needle layer and the fourth needle layer Arrange in order.

The relationship between the contact segment and the needle layer is described by taking the first probe array 21b of FIGS. 5A and 5B as an example. The subset 212a of the first probe array 21b is sequentially provided with the probe 25r of the first needle layer, Probe for the third needle layer 25s, probe for the second needle layer The probe 25u of the 25t and the fourth needle layer, and the adjacent subset 212b of the fourth needle layer are sequentially provided with the probe 25r' of the first needle layer, the probe 25s' of the third needle layer, and the second needle layer Probe 25t' and probe 25u' of the fourth needle layer. For the first probe array 21b, each subset (212a or 212b), in the second direction Y, the probe and the needle layer are sequentially arranged from the third side 93 to the fourth side 94, a probe 25r (25r') of the first needle layer, a probe 25s (25s') of the third needle layer, a probe 25t (25t') of the second needle layer, and a probe of the fourth needle layer 25u (25u'). Wherein, the probes 25r and 25r' of the first needle layer have the same length of contact segments; and the probes 25s and 25s' of the third needle layer also have the same length of contact segments; and the probes of the second needle layer 25t The same contact length is also obtained between the probes 25u and 25u' having the same contact length as the 25t' and the fourth needle layer. In this embodiment, the lengths of the contact segments of the probes 25t and 25t' of the second needle layer of the probe set 212 are greater than the lengths of the contact segments of the probes 25r and 25r' of the first needle layer of the probe set 212, respectively; The length of the contact segments of the probes 25s and 25s' of the third needle layer of the group 212 is greater than the length of the contact segments of the probes 25t and 25t' of the second needle layer of the probe set 212, respectively; the fourth needle of the probe set 212 The length of the contact segments of the probes 25u and 25u' of the layer is greater than the length of the contact segments of the probes 25s and 25s' of the third needle layer of the probe set 212, respectively. For the same reason, the same rule is also applied to the probe set 222. In addition, in this embodiment, the contact length relationship of each subset is X in the first direction, and the contact section of the probe is increased from the first side 91 to the second side 92.

As with the manner in which the probes of the first probe array 21b are disposed, the subset 222a of the second probe array 22b includes the probe 25v of the first needle layer, the probe 25w of the third needle layer, and the second needle. The probe 25x of the layer and the probe 25y of the fourth needle layer, and the other subset 222b adjacent thereto have the probe 25v' of the first needle layer, the probe 25w' of the third needle layer, and the second needle layer Probe 25x' and probe 4y' of the fourth needle layer. Wherein the probes 25v of the first needle layer of the probe set 222 have the same contact length as the 25v'; the probes 25w and 25w' of the third needle layer of the probe set 222 have the same contact length; The second needle layer of the probe set 222 has the same contact length between the probes 25x and 25x'; and the probes 25y and 25y' of the fourth needle layer of the probe set 222 have the same contact length.

The lengths of the probe contact segments of the needle layers of the probe set 222 are sequentially probes. The contact length of the probe of the fourth needle layer of the group 222 (25y, 25y') is longer than the length of the probe of the probe layer of the third needle layer of the probe set 222 (25w, 25w') is greater than that of the probe set 222 The length of the contact section of the probe of the two-needle layer (25x, 25x') is greater than the length of the contact section of the probe (25v, 25v') of the first needle layer of the probe set 222; in the first direction X, the probe The contact segment is increased from the first side 91 to the second side 92; and in the second direction Y, the probe and the needle layer are sequentially arranged from the third side 93 to the fourth side 94, and the first needle layer is Probe 25v (25v'), probe 25w (25w') of the third needle layer, probe 25x (25x') of the second needle layer, and probe 25y (25y') of the fourth needle layer . In addition, for the probe array 22b, the subsets (222a, 222b) are a set of probes, and in the second direction Y, the third side 93 is sequentially arranged to the fourth side 94. . It should be noted that, in the present embodiment, the probes of the probe arrays 21b-22b correspond to each other in the X and Y directions and are aligned with each other without misalignment.

In summary, the relationship between the probe contact lengths in Figures 5A and 5B can be expressed as: L _25r = L _25r' <L _25t = L _25t' <L _25s = L _25s' <L _25u = L _{25u '; L 25v = L 25v'} <L 25x = L 25x '<L 25w = L 25w'<L 25y = L 25y '; represents the above-described, the probe may be described in the same column, with each probe set The probe angles of the neighboring sub-sets in the same needle layer are gradually increased along the second direction Y. Where L is the length of the contact segment 250, and the lower right corner number corresponds to the probe number of the 5A and 5B drawings.

In addition, for the probe sets corresponding to different columns, the adjacent probe columns use different needle layers, that is, the angles of the angles are not the same as the size of the contact segments. 5A and 5B, the arrangement of the probe needle layers will be described in units of probe rows. Usually, the needle layer of the probe array 22b is higher than the probe array 21b, and the low side 96 goes to the high side 95. Then, the sequence is the probe columns 21b and 22b.

In summary, the relationship between the probe contact lengths in Figures 5A and 5B can be expressed as: L _25r = L _25r' <L _25t = L _25t' <L _25s = L _25s' <L _25u = L _{25u '<L 25v = L 25v'} <L 25x = L 25x '<L 25w = L 25w'<L 25y = L 25y ' here, particular note, the probe of the present embodiment within each subset to the embodiment of The first needle layer, the third needle layer, the second needle layer and the fourth needle layer are sequentially arranged, because the spacing between the two probes can be reduced, thereby achieving the purpose of Fine Ptich. Therefore, the manner of the needle swing is somewhat different from the other embodiments, and is hereby explained.

Next, the angle feature of the embodiment will be described. In the same probe column, the adjacent subset of each probe set, and the two probes in the same needle layer, the absolute angle difference between the two is greater than or equal to 2 degrees. . Taking the probe array 21b shown in FIGS. 5A and 5B as an example, the angle between the probes 25r' is larger than the angle between the probes 25r, and the angle difference between the angles is greater than or equal to 2 degrees; the angle between the probes 25s' is larger than the probes 25s. The angle between the angles of the angles of the probes is greater than or equal to 2 degrees; the angle between the probes 25t' is larger than the angle between the probes 25t, and the angle difference between the angles of the probes is greater than or equal to 2 degrees; the angle between the probes 25u' is larger than the angle between the probes 25u, and the angle of the angles is The difference is greater than or equal to 2 degrees. As for the needle layer angle relationship of the probe array 22b, the same rule is also adopted. In summary, the angle of the probe is θ _25r' ≧ θ _25r + 2°; θ _25s' ≧ θ _25s + 2°; θ _25t' ≧ θ _25t + 2°; θ _25u' ≧ θ _25u + 2°.

In addition, for the same subset, the probe of the fourth needle layer has an angle larger than that of the probe of the third needle layer, and the probe of the third needle layer has an angle larger than that of the second needle layer. The probe has an included angle, and the probe of the second needle layer has an angle larger than that of the probe of the first needle layer, for example, for the subset 212a, the probe 25u of the fourth needle layer has The angle of the probe 25s larger than the third needle layer is larger than the angle of the probe 25t of the second needle layer is larger than the angle of the probe 25r of the first needle layer, and the angle of the probe is θ _25u > θ _25s > θ _25t > θ _25r .

The probe angle relationship of the probe set 212 for the probe array 21b is θ _25u' > θ _25u > θ _25s' > θ _25s > θ _25t' > θ _25t > θ _25r' > θ _25r . For the same reason, the same rule is also applied to each probe set 222 of the probe array 22b. Angles between line probe to the probe 22b of probe set 222 having the as _{θ 25y '> θ 25y> θ} 25w'> θ 25w> θ 25x '> θ 25x> θ 25v'> θ 25v.

In addition, in the same probe column, among the two needle layers adjacent to each probe group, the probe having the largest angle among the needle layers close to the low side and the probe layer near the high side have the smallest angle. The needle, the absolute value of the angle difference between the two is greater than or equal to 1 degree, and is illustrated by two sub-sets 212a and 212b of the probe set 212. As shown in FIGS. 5A and 5B, adjacent two of the probe sets 212 The subsets 212a and 212b use an adjacent four-needle layer (the first needle layer, the second needle layer, the third needle layer, and the fourth needle layer), and the first needle layer of the probe set 212 is a needle near the lower side. The fourth needle layer of the probe set 212 is the needle layer near the high side (the high and low sides here are the same as the high side 95 and the low side 96 of FIG. 2), and the two needle layers adjacent to the probe set 212 Medium (the first needle layer is adjacent to the second needle layer, the second needle layer is adjacent to the third needle layer, and the third needle layer is adjacent to the fourth needle layer), and the first needle layer of the probe set 212 is Taking the second needle layer as an example, the probe 25r' having the largest angle among the first needle layers of the probe set 212 and the probe 25t having the smallest angle among the second needle layers of the probe set 212 have an angle difference therebetween. In an implementation In the example, the absolute value of the angle difference is greater than or equal to 1 degree; taking the second needle layer and the third needle layer as an example, the probe 25t' and the probe set having the largest angle among the second needle layers of the probe set 212 The probe 25s having the smallest angle among the third needle layers of 212 has an angular difference. In one embodiment, the absolute value of the angle difference is greater than or equal to 1 degree; the third needle layer and the fourth needle layer For example, the probe 25s' having the largest angle among the third needle layers of the probe set 212 and the probe 25u having the smallest angle among the fourth needle layers of the probe set 212 have an angular difference, in an implementation In the example, the absolute value of the angle difference is greater than or equal to 1 degree. In summary, the angle of the probe is θ _25t ≧ θ _25r' +1°; θ _25s ≧ θ _25t' +1; θ _25u ≧ θ _25s' +1.

In addition, adjacent two probe columns (21b and 22b), the needle layers used in the two probe columns are not the same, and the adjacent two probe columns respectively have adjacent two high and low needle layers, the low The probe with the largest angle between the needle layer and the probe with the smallest angle of the high needle layer, the absolute value of the angle difference between the two is greater than or equal to 1 degree, as shown in Figures 5A and 5B, for different columns and corresponding In the probe sets 212-222, the adjacent two probe rows 21b and 22b respectively have two adjacent high and low needle layers, and the high needle layer refers to the first needle layer of the probe set 222, and the low needle The layer refers to the fourth layer of the probe set 212. The probe 25v having the smallest angle in the high needle layer has an angle of the probe 25u' having the largest angle among the low needle layers, and the two have an angular difference. In an embodiment, the absolute value of the angle difference is greater than Equal to 1 degree. In summary, the corresponding angle of the probe is θ _25v ≧ θ _{25u '} +1°.

It should be noted that although the probes in Figure 5A are aligned with each other, there is no Misalignment, but in another embodiment, similar to the embodiment shown in FIG. 3G, the corresponding probes between the probe columns have a spacing in the second direction Y, such that the probe column spacing There is a misaligned arrangement.

The foregoing embodiment is an embodiment having a plurality of probe columns. However, according to the spirit of the angle relationship between the probes in the present invention, in another embodiment, there may be only one column of probe columns, which also have a complex number. Probe sets. A subset of each probe set can be set with 2, 3, 4, 6 or 8 probes as required. In addition, it is to be noted that the first direction and the second direction shown in FIG. 3A are not limited to the X and Y directions in which the same plane is perpendicular to each other. In another embodiment, as shown in FIG. 6, the The figure is a schematic diagram of another embodiment of the probe module of the present invention, that is, the same plane is a combination of radial and arc directions. In this embodiment, the probe is arranged in such a manner that the first direction is an arc direction (θ) and the second direction is a radial direction (r). In this coordinate system defined by the arc direction (θ) and the radial direction (r), the embodiment of Fig. 6 also has four probe columns 21 to 24, each of which has a plurality of probe sets. Taking the first probe column 21 as an example, it has a plurality of probe sets 210, each probe set 210 has two subsets 210a and 210b, and each subset has a first needle probe 25a and a second Needle probe 25b. Similarly, the other probe columns 22 to 24 are also arranged according to the arrangement of the first probe columns. As for the angle relationship between the probes, as described above, it will not be described here.

The specific embodiments described above are only used to illustrate the features and functions of the present invention, and are not intended to limit the scope of implementation of the present invention, without departing from the spirit and technology of the present invention. The equivalent changes and modifications made by the present disclosure are still covered by the scope of the following patent application.

21~24‧‧‧ Probe column

25a, 25c, 25e, 25g‧‧‧ first needle probe

25b, 25d, 25f, 25h‧‧‧ second needle probe

25a', 25c', 25e', 25g'‧‧‧ first needle probe

25b', 25d', 25f', 25h'‧‧‧ second needle probe

250‧‧‧Contact section

251‧‧‧Cantilever section

210~240‧‧‧ probe set

9‧‧‧Samps to be tested

90‧‧‧Electrical contacts

91‧‧‧ first side

92‧‧‧ second side

93‧‧‧ third side

94‧‧‧ fourth side

210a~240a‧‧‧Subset

210b~240b‧‧‧Subset

Θ‧‧‧ angle

D‧‧‧ pitch

Claims (13)

A probe module is configured to transmit a test signal of a test machine to a test object for electrical test, and define a direction in which the test machine is in a high side, and the direction of the object to be tested is a low side. The needle module comprises: a substrate; a holding member disposed on the substrate; and at least one probe row arranged along a first direction, each probe column having a plurality of probes in a second direction a needle set, each probe set includes: a plurality of probes each having a contact section and a cantilever section, one end of the cantilever section being connected to the substrate and the other end being connected to the contact section, The contact segment has an angle with the cantilever segment, and the cantilever segment of the probe of each probe row is disposed on the holder to form a plurality of needle layers from the low lateral side, the probes forming at least two subsets. Each subset includes at least two probes respectively disposed in at least two needle layers, the probes of the same needle layer have equal contact lengths, the lengths of the probe contact segments of different needle layers are not equal, and different subsets are in the same The probe angles of the needle layers are not equal, and the two sub-sets At least two probes provided in the same line of the needle at least two layers. The probe module of claim 1, which has at least three probe columns, and a subset of each probe set has two probes respectively disposed on adjacent two needle layers. The probe module of claim 1, comprising at least three probe columns, and the subset of each probe set has three probes disposed respectively adjacent to the three needle layers. A probe module is configured to transmit a test signal of a test machine to a test object for electrical test, and define a direction in which the test machine is in a high side, and the direction of the object to be tested is a low side. The needle module includes: a substrate; a holding member disposed on the substrate; At least one probe array, arranged along a first direction, each probe array having a plurality of probe sets in a second direction, each probe set comprising: a plurality of probes, each probe having one a contact section and a cantilever section, one end of the cantilever section is connected to the substrate and the other end is connected to the contact section, the contact section has an angle with the cantilever section, and the cantilever section of the probe of each probe column is disposed Forming a plurality of needle layers on the holder from the low lateral side, the probes forming at least two subsets, each subset comprising at least four probes respectively disposed on at least four needle layers, The four needle layers of at least four layers are low- and high-ordered as a first needle layer, a second needle layer, a third needle layer and a fourth needle layer according to the length of the contact portion of the probe. The probes of the same needle layer have equal contact lengths, and the lengths of the probe contact segments of different needle layers are not equal, and the probes in each subset are the first needle layer, the third needle layer, and the second needle The layer and the fourth needle layer are sequentially arranged, and the at least four probe sets of the at least two subsets are disposed at The four layers of the same needle, a different subset of the same angle does not equal the probe needles layer. The probe module according to claim 1 or 4, wherein in the same probe column, adjacent subsets of each probe set, two probes in the same needle layer, both The absolute value of the angle difference is greater than or equal to 2 degrees. The probe module according to claim 1 or 4, wherein in the same probe column, among the two needle layers adjacent to each probe group, the needle layer adjacent to the lower side has the largest The angled probe has a minimum angle between the probe and the needle layer near the high side, and the absolute angle difference between the two is greater than or equal to 1 degree. The probe module of claim 1 or 4, wherein the probe module has two adjacent probe rows, and the needle probe layers used in the two probe columns are different. The probe module of claim 1 or 4, wherein the probe module has an adjacent two-probe column, and the two probe columns use different needle layers, and the adjacent two probes are different. Each of the columns has two adjacent high and low needle layers, and the probe having the largest angle between the low needle layer and the probe having the smallest angle of the high needle layer has a difference between the two. The pair value is greater than or equal to 1 degree. The probe module according to claim 1 or 4, wherein in the same probe column, the probe angle of the adjacent sub-set of each probe group in the same needle layer is gradually increased along the second direction. . The probe module of claim 1 or 4, wherein the angle is an angle between a center line of the contact segment and a center line of the cantilever segment. The probe module of claim 1 or 4, wherein the length of the contact section of the equal length is greater than or equal to 0 and less than or equal to 1 mil. The probe module of claim 1 or 4, wherein the first direction and the second direction are a combination of two planes and mutually perpendicular directions, or the same plane and radial and arc. Combine it. The probe module of claim 1 or 4, wherein the object to be tested is a liquid crystal display driver chip (LCD driver IC).