M328326 八、新型說明： 【新型所屬之技術領域】 特別是有關於一 本創作係有關於一種滾筒清潔裝置 種塗佈機之滾筒清潔裝置。 【先前技術】 滾筒式塗佈機應用之層面非當 -抖i非吊的廣泛’從傳統產業至 间科技產業均&夠看到滾筒式塗佈機之應用，例如 印刷業的滾筒式印刷機以及技術密集之薄膜電晶體液晶顯 示器（TFT-LCD)產業的光阻塗佈機。 "" 以下以薄膜電晶體液晶顯示器產業為例。馨於薄膜電 晶體液晶顯示器具有省電、輕薄與低輻射等優點，故薄膜 電晶體液晶顯示器已經成為顯示器產業之主流產品。在追 f最低成本最高獲利的經濟原則下，薄膜電晶體液晶顯示 器有往大尺寸發展的趨勢，而為因應此—趨勢伴隨而來之 玻璃基板光阻塗佈問題，光阻塗佈機亦須加以改進調整。 因此，在光阻塗佈機的演進上，光阻塗佈機由以往適用於 小尺寸液晶顯示器的旋轉式塗佈機演變成適用於次世代液 晶顯示器的滾筒式光阻塗佈機。 在滾筒式光阻塗佈機中，用以塗佈光阻之塗佈滾筒於 使用一段時間後，容易在塗佈滾筒表面沾附雜質而形成印 痕，進而造成後續液晶顯示器玻璃基板產生光阻塗佈不均 (亦即光阻塗佈膜厚不均）等非預期之缺陷，故必須針對塗佈 滾筒進行清潔之動作。請參照第1圖，其係繪示一般針對 塗佈滾筒表面實施清潔動作之裝置的示意圖。塗佈滾筒10 M328326 由驅動裝置（未繪示）驅動以繞著塗佈滾筒1〇之中心12轉 動，配合位於塗佈滾筒10 一侧的刮刀板14可清除沾附於 塗佈滾筒10表面之雜質。經過刮刀板14清除雜質之塗佈 滾筒ίο的表面，隨即由位於刮刀板14上方之吹氣排管16 進行第二次清除雜質之吹氣步驟。M328326 VIII. New description: [New technical field of the invention] In particular, there is a drum cleaning device for a coating machine of a roller cleaning device. [Prior Art] The application of the drum coater is not the same as the wide-angle of the non-hanging technology. From the traditional industry to the technology industry, it is enough to see the application of the drum coater, such as the drum printing of the printing industry. Machine and technology-intensive photoresist coating machine for the thin film transistor liquid crystal display (TFT-LCD) industry. "" The following is an example of the thin film transistor liquid crystal display industry. The thin film transistor liquid crystal display has the advantages of power saving, thinness and low radiation, so the thin film transistor liquid crystal display has become the mainstream product of the display industry. Under the economic principle of chasing the lowest cost and the highest profit, the thin film transistor liquid crystal display has a tendency to develop in a large size, and the photoresist coating machine is also a problem of the photoresist coating of the glass substrate accompanying this trend. Improvements must be made. Therefore, in the evolution of the photoresist coater, the photoresist coater has evolved from a rotary coater suitable for a small-sized liquid crystal display to a roll-type photoresist coater suitable for a next-generation liquid crystal display. In the drum type photoresist coater, after the coating roller for coating the photoresist is used for a period of time, it is easy to adhere to the surface of the coating roller to form an imprint, thereby causing a photoresist coating on the subsequent liquid crystal display glass substrate. Undesirable defects such as unevenness of the cloth (that is, uneven thickness of the photoresist coating film) must be cleaned for the coating drum. Referring to Figure 1, there is shown a schematic view of a device generally performing a cleaning action on the surface of a coating drum. The coating drum 10 M328326 is driven by a driving device (not shown) to rotate around the center 12 of the coating drum 1 , and the blade 14 on the side of the coating drum 10 can be removed from the surface of the coating drum 10 . Impurities. The surface of the coating roller ίο is removed by the blade plate 14, and then a second blowing step of removing impurities is performed by the blowing pipe 16 located above the blade plate 14.
目前，此一清潔結構並無法有效地將塗佈滾筒1〇表面 上沾附的雜質清除，進而無法去除塗佈滾筒1〇上之印痕， 故對接文塗佈產品之良率仍有負面的影響。 【新型内容】 本創作之目的在提供-種滾筒清潔裝置，藉由清潔溶 劑的浸泡與清潔滾筒的搭配使用，對塗佈滾筒沾附之雜質 實施清除。 、 本創作之另一目的為提供一種包括前述滚筒清潔裝置 的塗佈機’配合清潔溶劑與清潔滾筒能夠提高塗佈機產品 之良率。 很艨本創作之-實施例，提供可清潔塗佈滾筒的一濟 滾筒仴潔裝置，至少包括：浸泡槽與清潔滾筒。其中浸遂 槽容置有清潔溶劑，塗佈滾筒可轉動且水平置放於浸泡補 上’且塗佈滾筒的其中__部分浸泡於浸泡槽中之清潔溶劑 的液面下。清潔滾筒亦可轉動^水平置放於浸泡槽上，且 /月潔滾筒其中—部分浸泡於浸泡槽中之清潔溶劑的液面 下，而清潔滾筒與塗佈滾筒係平行接觸。 .根據本創作之另一實施例，提供一種塗佈機，至少包 括.塗佈裝置與滾筒清潔裝置。其中塗佈裝置至少包括塗 M328326 料筒。而滾筒清潔裝置至少包括：浸泡槽與清潔滾筒。 #中浸泡槽容置有清潔溶劑’塗佈滾筒可轉動且水平置放 於浸泡槽上，且塗佈滾筒的其中一部分浸泡於浸泡槽中之 清潔溶劑的液面下。清潔滾筒亦可轉動且水平置放於浸泡 槽上，且清潔滚筒其中-部分浸泡於浸泡槽中之清潔溶劑 的液面τ，而清潔滾筒肖塗佈滚筒係平行接觸。 . 目此，應用本創作之實施例的優點是，可於㈣製程 -巾提供塗佈滾筒更佳的清潔’進而提高塗佈滾筒之產品的 良率。 【實施方式】 請參照第2 ®與第3圖’其係分麟示根據本創作 -較佳實施例之滾筒清㈣置的立體示意圖與側面示 圖。塗佈滾筒20係-圓柱狀元件，塗佈滾筒2〇相對二 面之中心21具有支撐軸承（未緣示），而藉由二側之支撐 承可將㈣滾筒2G架設在㈣架上（未料），進而使得 佈滚筒20能夠以中心21為軸心作轉動。 本創作之滾筒清潔裝置22至少包括浸泡槽23與清 滾筒24，其中浸泡槽23中衰有清潔溶劑25。利用、袞^ 潔裝置22進行塗佈滾筒20之清潔程序時，清潔滾筒^ 塗佈滾筒2G水平放置在浸泡槽23上方，且清潔滾筒24 塗佈滾筒20之一部分位於清潔溶劑25之液面 佈滚筒2G與清潔滾筒24兩滾筒係平行接觸，如第2圖 第3圖所示。而清潔滾筒24亦為一圓柱狀元件 24同樣可透過相對二側面之中心，上之支撐軸承(未二 M328326 而架設於支撐架上（未繪示），進而使得清潔滾筒24能夠繞 著中心26所形成之軸作旋轉。 如第3圖所示，當塗佈滾筒20受到驅動而進行轉動 時’塗佈滾同20之表面可連續地通過浸泡槽23中的清潔 溶劑25,使得塗佈滾筒20在任何時刻均有部分表面浸泡於 清潔溶劑25中，進而利用清潔溶劑25來對塗佈滾筒2()之 表面實施清潔的步驟。 在前述利用清潔溶劑25對塗佈滾筒20作清潔的同 時，清潔滾筒24亦受到驅動，而進行與前述塗佈滾筒2〇 相似之程序。因此，清潔滾筒24之表面亦連續地通過浸泡 槽23中的清潔溶劑25，清潔滾筒24在任何時刻均有部分 表面浸泡於清潔溶劑25中，離開清潔溶劑25之清潔滾筒 24的表面繼續旋轉而與塗佈滾筒2()之表面作平行接觸。透 過清潔滾筒24與塗佈滾筒2〇的平行接觸，以及清潔滾筒 24表面所沾附之清潔溶劑25，可對塗佈滾筒2()之表面進 行擦拭作用’進-步清除塗佈滾筒2()之表面殘存的雜質。 在本實施例中，可利用一連動機構29，例如皮帶，來進行 清潔滾筒24的驅動，透過連動機構29冑塗佈滾筒2〇之轉 動傳遞至清潔滾筒24,使清潔滾筒24與塗佈滾筒2〇具有 相同的旋轉方向，且因為、、主參 ,π "^為^春滾筒24與塗佈滾筒2〇且有 旋轉方向，所以在清潔滾筒24與塗佈滚筒2(^接 的、、主向相反的移動’使得擦拭作用能夠更有效 可:二達之表面上的雜f。在其他之實施例中， 乂且:广 滾筒24,而使清潔滾筒24與塗佈滾 …有相同的旋轉方向，同樣可達到清潔塗佈滾筒;〇At present, this cleaning structure cannot effectively remove the impurities adhering to the surface of the coating drum 1 and thus cannot remove the impression on the coating drum 1 , so the yield of the coated product is still negatively affected. . [New content] The purpose of this creation is to provide a roller cleaning device that cleans the impurities adhering to the coating drum by using a cleaning solvent immersion and a cleaning roller. Another object of the present invention is to provide a coater comprising the aforementioned drum cleaning device, which cooperates with the cleaning solvent and the cleaning roller to improve the yield of the coater product. In an embodiment of the present invention, there is provided a scouring and cleaning device for cleaning a coating drum, comprising at least: a immersion tank and a cleaning drum. The dipping tank is provided with a cleaning solvent, the coating drum is rotatable and placed horizontally on the soaking padding' and the portion of the coating drum is immersed in the surface of the cleaning solvent in the dipping tank. The cleaning roller can also be rotated horizontally on the soaking tank, and the /month cleaning roller is partially immersed in the liquid surface of the cleaning solvent in the immersion tank, and the cleaning roller is in parallel contact with the coating drum. According to another embodiment of the present invention, there is provided a coater comprising at least a coating device and a drum cleaning device. Wherein the coating device comprises at least a coated M328326 cartridge. The drum cleaning device at least includes: a soaking tank and a cleaning drum. The #中浸泡槽 contains a cleaning solvent. The coating drum is rotatably and horizontally placed on the immersion tank, and a part of the coating drum is immersed in the surface of the cleaning solvent in the immersion tank. The cleaning roller can also be rotated and placed horizontally on the soaking tank, and the cleaning roller is partially immersed in the liquid surface τ of the cleaning solvent in the immersion tank, and the cleaning drum is coated in parallel with the drum. Accordingly, an advantage of the embodiment of the present application is that a better cleaning of the coating drum can be provided in the (four) process-to-belt, thereby increasing the yield of the product of the coating drum. [Embodiment] Referring to the 2nd and 3rd drawings, a perspective view and a side view of the drum cleaning (four) according to the present invention will be described. The coating drum 20 is a cylindrical member, and the coating drum 2 has a support bearing (not shown) at the center 21 of the two sides, and the (4) roller 2G is erected on the (four) frame by the supporting supports on both sides (not The cloth drum 20 is further rotatable about the center 21 as an axis. The drum cleaning device 22 of the present invention includes at least a soaking tank 23 and a cleaning drum 24 in which the cleaning solvent 25 is fading. When the cleaning process of the coating drum 20 is performed by the cleaning device 22, the cleaning roller 2 coating roller 2G is horizontally placed above the immersion tank 23, and the cleaning roller 24 is partially disposed on the surface of the cleaning solvent 25 The drum 2G and the cleaning drum 24 are in parallel contact with each other, as shown in Fig. 2 and Fig. 3. The cleaning roller 24 is also a cylindrical member 24 which is also permeable to the center of the opposite sides, and the upper support bearing (not the M328326 is mounted on the support frame (not shown), so that the cleaning roller 24 can surround the center 26 The formed shaft is rotated. As shown in Fig. 3, when the coating drum 20 is driven to rotate, the surface of the coating roller 20 can continuously pass through the cleaning solvent 25 in the immersion tank 23, so that the coating roller At any time, a portion of the surface is immersed in the cleaning solvent 25, and the surface of the coating drum 2 () is cleaned by the cleaning solvent 25. In the foregoing, the coating drum 20 is cleaned by the cleaning solvent 25. The cleaning roller 24 is also driven to perform a procedure similar to that of the aforementioned coating roller 2. Therefore, the surface of the cleaning roller 24 also continuously passes through the cleaning solvent 25 in the immersion tank 23, and the cleaning roller 24 is partially at any time. The surface is immersed in the cleaning solvent 25, and the surface of the cleaning roller 24 leaving the cleaning solvent 25 continues to rotate to be in parallel contact with the surface of the coating drum 2 (). The cleaning roller 24 is coated and coated. The parallel contact of the cylinders 2 and the cleaning solvent 25 adhered to the surface of the cleaning drum 24 can wipe the surface of the coating drum 2 () to remove impurities remaining on the surface of the coating drum 2 (step). In this embodiment, the driving roller 29 can be driven by a linkage mechanism 29, such as a belt, and the rotation of the coating roller 2 is transmitted to the cleaning roller 24 through the linkage mechanism 29, so that the cleaning roller 24 and the coating roller 2〇 has the same direction of rotation, and because, the main parameter, π " ^ is the spring roller 24 and the coating drum 2 〇 and has a direction of rotation, so the cleaning roller 24 and the coating roller 2 The main movement to the opposite direction enables the wiping action to be more effective: the miscellaneous f on the surface of the second. In other embodiments, the wide drum 24 is used, and the cleaning roller 24 is the same as the coating roller. The direction of rotation can also be achieved by cleaning the coating roller;
M328326 之表面的效果。 s “照第4圖’本創作之另一實施 :之浸泡槽23與清潔滾筒24外，更可進 二： 鸿27。乾燥步汽^ 摩乙燥/袞 、紅M ，、、琦27水平置放於浸泡槽23之上，豆中私、陆 23 25 27相對η與清潔滾筒24平行接觸，而乾燥滾筒 筒27; 包含支撐軸承（未緣示），使得乾燥滾 术設在支樓架上（未繪示），並以兩側之中心28為軸 清:=;4另外，乾燥滾筒27與塗佈滾筒20係分別位於 之兩側。透過乾燥滾筒27與清潔滾筒Μ的接 觸々’可對清潔滾筒24進行乾燥處理。在—實施例中，肤 滾筒27與清潔滾筒24間兩平行中心線的水平距離心即 燥滚筒27二侧面之中心28與清潔滚筒24二側面之中心26 間的水平距離d，小於乾燥滾筒27之半徑與清潔滾筒Μ ^丰徑的和，換言之，即乾燥滚筒27可對清潔滾筒24進 饤擠壓作用，藉以增進乾燥滾筒27的乾燥作用。 、凊參照第5圖，其係、繪示根據本創作之_較佳實施例 之塗佈機的裝置示意圖。如帛5圖所示，本實施例之塗佈 機咒至少包括塗佈裝置52與滾筒清潔裝置22。請搭配參 照第1圖、第2圖與第3圖，其中塗佈裝置52至少包括塗 佈滾筒20,塗佈滾筒20係類似於第！圖所示之塗佈滾= :〇’利用塗佈滾筒20二側之中心、21的支撐軸承將塗佈滾 筒20架設於支撐架上，如此可利用以塗佈滾筒2〇二側之 中心21為軸之轉動作用將塗佈液塗佈於待塗佈之元件上。 如同先前參照第2圖與第3圖所作之描述，滾筒清潔裝置 M328326 22至少包括浸泡槽23與清潔滾筒24。 當塗佈滾筒20欲進行清潔程序時，將塗佈滾筒2〇移 ,又至滾筒清潔裝置22中，並將塗佈滾筒2〇與清潔滾筒24 水平設置於浸泡槽23之上，而使塗佈滚筒2〇與清潔滾筒 24平订接觸，同時使塗佈滾筒2〇與清潔滾筒之一部分均位 於浸泡槽23内所容置之清潔溶劑25的液面下，如第2圖 與第3圖所示。然後，即可進行塗佈滾筒2()的清潔程序。 雖然本創作已詳述一些實施例揭露如上，然其並非用 以限本創作’任何熟習此技藝者，在不脫離本創作之精 神和範圍内，當可作各種之更動與潤飾，因此本創作之保 護範圍當視後附之巾請專利範圍所界定者為準。並且，可 理解的疋，本創作所討論之裝置包含有習知的結構，由於 這些習知結構和步驟為此技術領域所習知，故只會以一般 程度之細節來討論。再者，& 了枝及舉例起見，重複使 用參考符號於圖示中，然而，這樣的重複並非代表圖示中 之特徵或步驟的任何必要結合。 【圖式簡單說明】 創作可由上述之详細說明並輔以所附圖式而獲得库 佳之了解。要強調的是，根據卫業之標準常規，附圖中^ 各種特徵並未依比例繪示。事實上，為清楚說明上述實方 歹1，可任意地放大或縮小各種特徵之尺寸。 梦署:1圖係繪示一般針對塗佈滾筒表面實施清潔動作4 $置的示意圖。 第2圖係繪示根據本創作之—較佳實施例之滾筒清漠 M328326 裝置的立體示意圖。 第3圖係繪示根據本創作之一較佳實施例之滾筒清潔 裝置的側面示意圖。 第4圖係繪示根據本創作之一較佳實施例之滾筒清潔 裝置的側面示意圖。 第5圖係繪示根據本創作之一較佳實施例之塗佈機的 裝置示意圖。 【主要元件符號說明】The effect of the surface of M328326. s "According to Figure 4" Another implementation of this creation: the soaking trough 23 and the cleaning drum 24, can also enter two: Hong 27. Dry step steam ^ Mo E dry / 衮, red M,,, Qi 27 level Placed on the immersion tank 23, the beans in the private and land 23 25 27 are in parallel with the cleaning roller 24 in parallel with the cleaning roller 24, and the drying drum tube 27; includes a supporting bearing (not shown), so that the drying roller is set on the branch frame Upper (not shown), and the center 28 of both sides is the shaft clear: =; 4 In addition, the drying drum 27 and the coating drum 20 are respectively located on both sides. The contact between the drying drum 27 and the cleaning drum 々' The cleaning roller 24 can be subjected to a drying process. In the embodiment, the horizontal distance between the two parallel center lines between the skin roller 27 and the cleaning roller 24 is the center 28 of the two sides of the drying drum 27 and the center 26 of the two sides of the cleaning roller 24. The horizontal distance d is smaller than the sum of the radius of the drying drum 27 and the cleaning drum ,, in other words, the drying drum 27 can press the cleaning drum 24 to improve the drying effect of the drying drum 27. Figure 5 is a diagram showing the preferred implementation according to the present invention. A schematic view of the apparatus of the coater. As shown in Fig. 5, the coater of the present embodiment includes at least a coating device 52 and a drum cleaning device 22. Referring to Figures 1, 2, and 3, Wherein the coating device 52 comprises at least a coating drum 20, which is similar to the coating roller shown in the figure: 〇', using the support bearing on both sides of the coating drum 20, 21 to support the coating roller 20 is erected on the support frame, so that the coating liquid can be applied to the component to be coated by the rotation of the center 21 of the coating drum 2 on both sides. As before with reference to Figures 2 and 3 In the description, the drum cleaning device M328326 22 includes at least the soaking tank 23 and the cleaning drum 24. When the coating drum 20 is to be subjected to a cleaning process, the coating drum 2 is moved, to the drum cleaning device 22, and coated. The drum 2 〇 and the cleaning drum 24 are horizontally disposed on the immersion tank 23, and the coating drum 2 平 is in contact with the cleaning drum 24 while the coating drum 2 〇 and a part of the cleaning drum are both located in the immersion tank 23 Place the cleaning solvent 25 under the liquid level, as shown in Figures 2 and 3. The cleaning procedure of the coating drum 2 () can then be carried out. Although the present invention has been described in detail in the above description, it is not intended to limit the creation of any of the skilled artisans without departing from the creation. Within the spirit and scope, when various changes and refinements are available, the scope of protection of this creation shall be subject to the definition of the scope of the patent attached to the attached towel. And, understandably, the device discussed in this creation contains There are well-known structures, and since these conventional structures and steps are known to the art, they will only be discussed in a general degree of detail. Again, & However, such repetitions do not represent any necessary combination of features or steps in the drawings. [Simple description of the schema] The creation can be obtained from the above detailed description and supplemented by the drawings. It should be emphasized that, according to the standard practice of the industry, various features in the drawings are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily enlarged or reduced for clarity of the above description. Dreams: 1 is a schematic diagram showing the general cleaning action for the surface of the coating drum. Figure 2 is a perspective view showing the drum clearing M328326 apparatus according to the present preferred embodiment. Figure 3 is a side elevational view of a drum cleaning apparatus in accordance with a preferred embodiment of the present invention. Figure 4 is a side elevational view of a drum cleaning apparatus in accordance with a preferred embodiment of the present invention. Figure 5 is a schematic view showing the apparatus of a coater in accordance with a preferred embodiment of the present invention. [Main component symbol description]
10 :塗佈滾筒 12 ： 中心 14 :刮刀板 16 ： 吹氣排管 20 :塗佈滾筒 21 ： 中心 22 :滾筒清潔裝置 23 ： 浸泡槽 24 :清潔滾筒 25 ·· 清潔溶劑 26 :中心 27 ： 乾燥滾筒 28 :中心 29 ： 連動機構 50 :塗佈機 52 ： 塗佈裝置 d ·· 水平距離 1110 : coating drum 12 : center 14 : doctor blade 16 : blowing pipe 20 : coating drum 21 : center 22 : drum cleaning device 23 : soaking tank 24 : cleaning drum 25 · · cleaning solvent 26 : center 27 : drying Roller 28: Center 29: Linking mechanism 50: Coater 52: Coating device d ·· Horizontal distance 11