M394565 五、新型說明： 【新型所屬之技術領域】 本創作為提供一種晶圓傳送择苗 更換晶圓由鱗的卡盒（cassjte2姑尤指:種縮短製程時間，而對 所花費的咖驗的晶晴钱置的卡盒（cassette)内 【先前技術】 按，晶圓半導體大多必須在盈塵 對的’晶圓上的禁忌即是必須無任^ ^仃，、運載等’因此相 1即會影響晶圓的品質，般 姐塵矢附著，若有些許塵埃附著 附著於晶圓上的廣;去：，潔多為風刀處理，將 附著有塵埃時，理當將晶圓更換至乾淨的卡盒（C纖tte) 晶圓更換至乾淨的卡盒（casse 的^ 内，而將 機械手臂對卡盒（cassette)内的晶現有技術來說係使用 乾淨的卡倉（cassette)内:订抓取’將晶圓移位容置到 )。 賴6)内’以便成功的將晶圓置換卡盒（cassette 題與械手臂置換晶圓過輕於使用時 ’為確實存在下列問 時，圓^換至乾淨的卡盒（⑽_内 夹取'位^3非=長，對單-晶圓進行置入、 公-般卡盒(c_二的 時’該機械手臂則必須—個—個分_ =的數里，虽此數置多 r，全部的_位至乾淨的====== M394565 .【新型内容】 故本創作之創作人有鑑於上述缺失，搜隼 ^ ^ 考量’並以從事於此㈣累積ί多=相=斷= me) 程時I，，對更換晶圓由辦的卡盒（cass 晶圖傳送裝置=3:tte)崎花#的時間大幅縮短的 ，且要目的在於：該升降機構上係界定有至少—承置平台 置平口上係樞接有一旋轉平台，而該升降機構頂部俜界 底部承置於該旋轉平二蓋= 該中央平么傷該中央平台上係設有一固持機構，而於 有一頂推機構，而於另-側界定有-風扇，另於 S卡處:而再經由該旋轉平台對兩卡盒 +各、隹~+二 皿、口相對應（面對面），再由該固持機構對該 下i 嶋輸啦梅雌中央平台 機構係式!潔，此時，該固持 2該風扇啟動，於晶難移過程中將晶圓上之塵埃由反方向吹心， 針的卡盒升至該罩蓋内，藉由上述技術二可 進行置人、夾取二=:其2M394565 V. New Description: [New Technology Field] This creation is to provide a kind of wafer transfer cassette to replace the wafer scale (cassjte2: especially shorten the process time, but the cost of the test In the case of the crystal clear money box (previous technology), most of the wafer semiconductors must be on the 'wafer' of the dust-proof pair, that is, there must be no ^^仃, carry, etc. Affect the quality of the wafer, such as the dust of the sister, if some dust adheres to the wafer; go to: clean, the air knife will be treated, when the dust will be attached, it is reasonable to replace the wafer to a clean card The box (C fiber tte) is replaced with a clean cartridge (casse's ^, and the robot is used in the cassette's existing technology to use a clean card cage (cassette): Take 'displace the wafer to the inside.' Depends on 6) in order to successfully replace the wafer replacement cassette (cassette problem and arm replacement wafer is too light to use) when there is indeed the following question, circle ^ Change to a clean cartridge ((10)_内夹取' bit ^3 non=long, pair -When the wafer is placed, the public-like cartridge (c_two's time, the mechanical arm must be one-----------, although the number is set to r, all _ bits to clean = ===== M394565 . [New content] Therefore, the creators of this creation have in view of the above-mentioned shortcomings, search for ^ ^ to consider 'and to engage in this (four) accumulation ί more = phase = break = me) Cheng I,, right The time to replace the wafer card (cass crystal transfer device = 3: tte) is significantly shortened, and the purpose is to: at least the upper and lower sides of the platform are defined Connected to a rotating platform, and the bottom of the lifting mechanism is placed on the bottom of the rotating flat cover = the central flat is wounded. The central platform is provided with a holding mechanism, and has a pushing mechanism, and is defined on the other side. There is a fan, and at the S card: and then through the rotating platform, the two card boxes + each, the 隹~+ two dishes, the mouth corresponding to each other (face to face), and then the holding mechanism of the lower i 啦 啦 梅 雌The central platform mechanism is clean! At this time, the holding of the fan 2 starts, and the dust on the wafer is blown from the opposite direction during the hard-to-make process. , the card holder of the needle is raised into the cover, and the above technique 2 can be used for placing and clamping two=: 2
Ccassette) , 里田此數里多時，該機械手臂則必須一個一個分開 進仃1取f位’與此過财，當魏全部的 機構將晶0-次推向另一新乾淨卡盒内，縮短 巧 同時對卡盒底座及晶圓面進行清潔之實用進步I/、曰、’還可 4 M394565 _【實施方式】 送裝置1 意圖’由圖中可清楚看出本創作傳 -具有旋轉且該承置平台111上係樞接 係界定有複數個1，該升降機構1 1頂部1 1 3 構! 1 2，而位於該升降機 船頂部⑴與’並且該升降機 件13’另外上述之旋轉； 複數個用於容置晶圓的卡盒2 〇，該等卡 =1二底座21係界定有-旋轉開七Τ ? 1係與一界疋於該旋轉平台1 ] η 6 \ ^ ^以及—設於該111持座3 2上且用於移動該固持Ccassette), when Ritian has been in this number for a long time, the robotic arm must be separated into one by one and take the f-position, and when Wei’s organization pushes the crystal 0-times into another new clean cartridge, Practical advancement of shortening the cleaning of the cartridge base and the wafer surface at the same time I/, 曰, ' can also be 4 M394565 _ [Embodiment] The delivery device 1 is intended to be clearly seen from the figure - the rotation of the creation The mounting platform 111 is pivotally bound to define a plurality of ones, and the lifting mechanism 1 1 has a top 1 1 3 structure! 1 2, and is located at the top of the elevator vessel (1) and 'and the elevator member 13' is further rotated as described above; A plurality of cartridges 2 for accommodating the wafers, the cards =1 and the second base 21 are defined with a rotation opening seven Τ 1 system and a boundary 该 on the rotating platform 1 ] η 6 \ ^ ^ and Provided on the 111 holder 3 2 and used to move the holding
持座3 2係包含有—固定件3 21及一 H 該固⑽1與該定位件 c- n工—日门 τ夹十台1 1 4另一側處係界定有一風扁 _⑽同時對位於針㈣每層内的^ »又於該中央平台114下方的清潔機構6 〇，該清潔機構6 〇 5 •係為風刀式或液體式。 · 藉由上述之結構、組成設計，兹 下’請同時配合參閱第-圖〜第十 1 作動情形說明如 ί立，、固持座示意圖、實施示意圖、動作作;交佳實施例 第—圖〜第四圖為例，圖中可清楚看 二圖—〜九’其中以 0欲互換至新乾淨的卡盒2 G 〇ί ΐ先；C2 ◦内之晶圓7 該對接開關1 i 2 1進行作動，使該對ί馬達1 5將 轉開關21 1，而使該底座21與該罩蓋 七1，帶動該旋 二經由該升降機構1 1將該承置平台1 1 ；!下降之^^分離）， ^於下降同時藉由該偵測感應元件 二1 4 7 0是否有破片（若右砝κ目丨丨作: 層问時先束掃猫晶圓 再同時4第】圖無續動作);並 、2 2 該旋轉平台112上的卡盒 絲链心ί订面對面的錯位旋轉；並再同時參閱第七圖及第八Η，火 ，結束定位後，該位移元件3 3將該固持 3 ft當 件3 2 2 SI二ίΓ 3 2上的固定件3 2 1及該定位 ί軍與定位件3 2 2是否有爽持完整（若夾 完整則繼續運作（同時參閱第二圖））；並^: 2 第圖’而後該升降機構1 1再將底座21降至清潔機 冓6 0上方進仃風刀或液體清潔；並再同時參閱第十 二、 同時，該位侃件3 3藉由該滑座3 i將舊卡盒2 —4乾淨卡盒2 Q 〇結合’再由該晶圓頂推機構4 Q對卡盒2 〇’内 ，一層的晶圓7 0進行頂推’將該等晶圓7 Q頂推至新乾淨卡盒 内，此頂推動作的過程中，同時該風扇5 〇啟動將該晶圓7 〇上 塵埃吹除〇為絲移方向之反方向吹動）。結束上述步驟後該位蔣 請3 3P遺即將舊卡盒2 〇回復原位置，此後承置平台丄丄工上 新乾淨卡盒2 0 〇再次裝人罩蓋12 〇内，而由第-驅動馬達15蔣 底座21與罩蓋12進行鎖固。 、 惟，以上所述僅為本創作之較佳實施例而已，非因此即侷限本創 M394565 •作之專利範圍，故舉凡運用本創作 及等效結構變化，均應同理包含於本創二及圖式内容所為之簡易修飾 故，請參閱全部附圖 =專利範圍内，合予陳明。 實存在下列優點： 尽虐1作使用時，與習用技術相較，著 透過晶圓頂推機構4〇將晶 〇内，縮短了製程換料間，並 ===乾淨卡盒2 0 圓7 0,行清潔，達到客製化之實二=盒2 0底座2丄及晶 到其功效及i的，故^^構於使㈣’為確實能達 利之申請要件，：*依法提出巾二，二=優異之創作’為符合新型專 創作人之辛苦創作’倘* “有:ί賜’以保障 創作人定當竭力配合，實感德便。 θ叫不吝來函指示， M394565 【圖式簡單說明】 第一圖係為本創作較佳實施例之立體圖。 第二圖係為本創作較佳實施例之固持座示意圖。 第三圖係為本創作較佳實施例之實施示意圖。 第四圖係為本創作較佳實施例之動作示意圖一。 第五圖係為本創作較佳實施例之動作示意圖二。 第六圖係為本創作較佳實施例之動作示意圖三。 第七圖係為本創作較佳實施例之動作示意圖四。 第八圖係為本創作較佳實施例之動作示意圖五。 第九圖係為本創作較佳實施例之動作示意圖六。 第十圖係為本創作較佳實施例之動作示意圖七。 第十一圖係為本創作較佳實施例之動作示意圖八。 第十二圖係為本創作較佳實施例之動作示意圖九。The holder 3 2 includes - the fixing member 3 21 and a H. The solid (10) 1 and the positioning member c-n - the Japanese door τ clip ten sets 1 1 4 the other side defines a wind flat _ (10) at the same time The needle (4) in each layer is further a cleaning mechanism 6 下方 below the central platform 114, and the cleaning mechanism 6 〇5 is a wind knife type or a liquid type. · With the above structure and composition design, please refer to the following section - Figure 11 to explain the situation, such as 立立, 固定 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座 座The fourth figure is an example. The figure can clearly see the two pictures - ~ nine ' which are interchanged with 0 to the new clean cartridge 2 G 〇 ΐ ;; C2 inside the wafer 7 the docking switch 1 i 2 1 Actuating, so that the pair of motor 15 will turn the switch 21 1, and the base 21 and the cover seven 1, driving the rotary two via the lifting mechanism 1 1 to lower the receiving platform 1 1 ; Separation), ^ is decreased by the detection of the sensing element 2 1 7 7 0 whether there is a fragment (if right κ 丨丨 丨丨 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : And; 2 2, the card chain 003 on the rotating platform 112 is in a face-to-face misaligned rotation; and at the same time, refer to the seventh figure and the eighth Η, fire, after the positioning is finished, the displacement element 3 3 holds the 3 ft when the piece 3 2 2 SI 2 Γ 3 2 on the fixing piece 3 2 1 and the positioning ί 军 and the positioning piece 3 2 2 is cool and complete (if the clip is complete Then continue to operate (see also the second figure)); and ^: 2 Figure 'and then the lifting mechanism 1 1 then lower the base 21 to the top of the cleaning machine 冓 60 into the hurricane knife or liquid cleaning; and then refer to the same 12. At the same time, the component 3 3 combines the old cartridge 2-4 clean cartridge 2 Q ' by the slider 3 i and then the cartridge pushing mechanism 4 Q into the cartridge 2 〇 ' The wafer 70 of the first layer is pushed up to push the wafers 7 Q into the new clean cartridge. During the pushing action, the fan 5 starts to blow the wafer 7 onto the dust. Except that the 吹 is blown in the opposite direction of the wire movement direction). After the above steps, the position of Jiang 3 3P will return the original card box 2 〇 to the original position, and then the platform will be completed with a new clean card box 2 0 〇 reloading the cover 12 inside, and by the first drive The motor 15 and the base 21 are locked with the cover 12. However, the above description is only a preferred embodiment of the present invention, and thus does not limit the scope of the patent of M394565. Therefore, the use of this creation and the equivalent structural changes should be included in this creation. And the content of the drawing is a simple modification, please refer to all the drawings = patent scope, and give it to Chen Ming. There are the following advantages: When using 1D, compared with the conventional technology, the wafer is pushed through the wafer pushing mechanism 4, shortening the process refueling room, and === clean card box 2 0 round 7 0, line cleaning, to achieve the customary two = box 2 0 base 2 丄 and crystal to its effect and i, so ^ ^ structure in the (four) 'for the real Da Li application requirements,: * According to the law , 2 = excellent creation 'to meet the hard work of the new type of creator 'If you have: 赐 ' ' to protect the creator to do their best to cooperate, the real sense of virtue. θ 吝 吝 吝 吝 , , M M M M M M M M M M M M M The first drawing is a perspective view of a preferred embodiment of the present invention. The second drawing is a schematic view of the holding frame of the preferred embodiment of the present invention. The third drawing is a schematic diagram of the implementation of the preferred embodiment of the present invention. Figure 1 is a schematic view of the operation of the preferred embodiment of the present invention. The fifth figure is a schematic diagram of the action of the preferred embodiment of the present invention. The sixth figure is a schematic diagram of the action of the preferred embodiment of the present invention. Figure 4 is a schematic diagram of the operation of the preferred embodiment. FIG. 9 is a schematic diagram of the action of the preferred embodiment of the present invention. The tenth figure is a schematic diagram of the action of the preferred embodiment of the present invention. FIG. 12 is a schematic diagram of the operation of the preferred embodiment of the present invention.
8 M3945658 M394565
第一驅動馬達 卡盒···· 底座· · · · 旋轉開關·· 固持機構·· 滑座···· 1 2 0、2 0 0 2 1 2 11 30 【主要元件符號說明】 傳送裝置·· · • 1 0 '升降機構· · · • 1 1 承置平台·· · • 1 11 旋轉平台·· · • 1 12 對接開關·· · • 1 12 1 頂部..... • 1 13 中央平台·· · • 1 14 罩蓋..... • 1 2 罩蓋..... • 1 2 0 偵測感應元件· • 1 3 第二驅動馬達 固持座.....3 2 • 固定件.....3 2 1 定位件.....3 2 2 定位感應元件·· 3 2 3 位移元件· · · · 3 3 晶圓頂推機構··40 風扇......5 0 清潔機構· · · · 6 0 晶圓......7 0 9First drive motor cartridge ···· Base · · · · Rotary switch ·· Holding mechanism·· Slider···· 1 2 0, 2 0 0 2 1 2 11 30 [Description of main component symbols] Transfer device· · · • 1 0 'lifting mechanism · · · · 1 1 mounting platform·· · • 1 11 rotating platform ·· · • 1 12 docking switch ·· · • 1 12 1 top..... • 1 13 central Platform·· · • 1 14 Cover..... • 1 2 Cover..... • 1 2 0 Detection sensor • 1 3 Second drive motor holder.....3 2 • Fixing parts.....3 2 1 Positioning parts.....3 2 2 Positioning sensing elements·· 3 2 3 Displacement elements · · · · 3 3 Wafer pushing mechanism ··40 Fans..... .5 0 Cleaning Mechanism · · · · 6 0 Wafer...7 0 9