TWM385624U - Gas flow rate control valve - Google Patents

Gas flow rate control valve

Info

Publication number: TWM385624U
Authority: TW; Taiwan
Prior art keywords: flow rate; control valve; gas flow; rate control; gas
Prior art date: 2010-01-04

Application number

TW99200023U

Other languages

Chinese (zh)

Inventor

Ya-Wen He

Original Assignee

Ya-Wen He

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2010-01-04

Filing date

2010-01-04

Publication date

2010-08-01

2010-01-04 Application filed by Ya-Wen He filed Critical Ya-Wen He

2010-01-04 Priority to TW99200023U priority Critical patent/TWM385624U/en

2010-08-01 Publication of TWM385624U publication Critical patent/TWM385624U/en

Links

TW99200023U 2010-01-04 2010-01-04 Gas flow rate control valve TWM385624U (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
TW99200023U TWM385624U (en)	2010-01-04	2010-01-04	Gas flow rate control valve

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
TW99200023U TWM385624U (en)	2010-01-04	2010-01-04	Gas flow rate control valve

Publications (1)

Publication Number	Publication Date
TWM385624U true TWM385624U (en)	2010-08-01

Family

ID=50602414

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW99200023U TWM385624U (en)	2010-01-04	2010-01-04	Gas flow rate control valve

Country Status (1)

Country	Link
TW (1)	TWM385624U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI710022B (en) *	2016-04-13	2020-11-11	日商東京威力科創股份有限公司	Gas supply mechanism and semiconductor manufacturing system

2010
- 2010-01-04 TW TW99200023U patent/TWM385624U/en not_active IP Right Cessation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
TWI710022B (en) *	2016-04-13	2020-11-11	日商東京威力科創股份有限公司	Gas supply mechanism and semiconductor manufacturing system

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Legal Events

Date	Code	Title	Description
2013-05-01	MM4K	Annulment or lapse of a utility model due to non-payment of fees