M375883 五、新型說明： 【新型所屬之技術領域】 本創作係關於測試設備之定位裝置，特別地指一種透 過彈性緩衝元件之大範圍導引區將定位銷導向中心孔，使 測試頭與待測物之間能精準對位的定位裝置。 【先前技術】 ' 在半導體產業，一般都藉由測試設備來篩選良品與不 ' 良品以控管生產品質，然而隨著電子產品小型化趨勢使半 • 導體元件尺寸走向細微化，因此，對於半導體測試設備的 精密度標準也不斷地被提高。 爲了改善習用半導體測試設備定位費時費力及準確度 不足之缺點，已知有許多相關文獻被提出，例如第8圖所 示，爲本案發明人等於台灣發明專利公告第13 10090號， 提供一種「具精準定位輔助介面之半導體測試系統」，其 主要包括：一固定部（300 )、一樞接部（310)、一測試 . 設備（320 )、一輔助定位裝置（330 )及一輸送設備（340 •)等。 該固定部（3 00 )，在其底端具有一底座（301)用以 承載該輸送設備（ 340 ) »該樞接部（310)，其樞設一對 懸臂（31 1 )固著在該固定部（300 )上端，使該對懸臂以 此爲支點自由端可擺轉，該測試設備（ 320 )樞設在此懸臂 (311)自由端而受控可升降》 該測試設備（ 320 )，具有一測試單元（321)，及在 該該測試單元（321 )周邊至少設有三個定位孔（322 ); —測試頭（321 1 )，具有多數探針（3213 )用以抵接待測 M375883 , 物件；一測試頭基座（3 2 12 )，用以承載該測試頭（ )並與該測試設備（ 320)本體連接，且突出在該測試 (320 )之表面。 該輔助定位裝置（ 330)，至少包括三支定位銷 )可分別插入該定位孔（322)中，且其中之一定位銷 )長度大於其餘量二定位銷（331);至少包括三個定 ' 基座（3 32 )，分別承載該定位銷（331 )，且兩者之 可活動式的結合：該輔助定位裝置（ 330 )經由一支撐 • ( 330 )承載該定位銷基座（ 332 );及，該支撐機構 )對應於該測試單元（321 )形成一個貫穿孔（3 33 1 ) 許該測試頭（3211)通過以抵接該受測物件，該定位 座（3 3 2 )係位於此貫穿孔（33 3 1 )周邊，且該支定β 322 )之其中一端形成倒角等。 該輸送設備（ 340)，與該輔助定位裝置（ 330) 動式連結，其至少包括一承載部（341)用以承載受沏 _ ，且對應於該測試設備（320 )之測試單元（321 )。 # ，當測試設備下降時該測試頭上的多數探針可抵接在 物件之引線腳位上。 上述公開案，熟習此項技術者可以理解的是，定 與定位銷之間並無任何緩衝，幾乎沒有誤差的空間， 在兩者之間容易造成磨擦損傷，技術上仍有改善的空 【新型内容】 本創作主要目的在於提供一種用於測試設備之定 置，用來改善機台與機台連接所耗費時間過多的問題 本創作另一目的在於將該定位裝置設計在測試設 3211 :設備 (331 (331 :位銷 間係 ，iM操 (333 ，允 銷基 :銷（ 成活 丨物件 如此 受測 位孔 因此 間。 :位裝 〇 :備主 -4- M375883 體上，以減少組裝時產生之誤差且節省空間。 本創作又一目的在於透過彈性緩衝元件之大範圍導引 區將定位銷導向中心孔，使測試頭與待測物之間能精準對 位。 爲了達成上述目的及其他目的，根據本創作用於測試 設備之定位裝置，該測試設備係沿一承載設備相同中心線 • 配置，且受控而可相對移動。該承載設備，具有一承載部 - 並在若干定點上提供若干插銷端子，且對應與待測元件的 Ρ 引線腳位成電連接。一測試頭，固設在該測試設備上一起 連動，其包含若干插槽且各具備多數探針，隨同該測試設 備移動時可對應與該插銷端子嵌合，彼此連接在一起。其 中，包括一輔助定位裝置，包含若干定位銷，分別配置在 該插銷端子周邊。該定位裝置，包含若干螺栓元件，其一 端固設在該測試頭周邊，另一端對應於該等定位銷各形成 一中心孔。及，若干緩衝元件，其一端各形成一擴大直徑 的導引孔，另一端蓄有一彈性元件之勢能，且分別穿設在 Φ 該等螺栓元件之外側。 ' 根據本創作，該緩衝元件在導引孔的開口端形成一倒 角，及在該螺栓元件中心孔的開口端也形成一倒角，且該 定位銷在自由端的端部上對應形成一倒角。如此，利用緩 衝元件大範圍導引區及具有彈性的導引孔，可引導定位銷 導向中心孔，且藉由彈性元件（彈簧）之長度落差以減緩 與定位銷之間的磨擦損傷，能使測試頭與待測物之間能快 速而準確對位。 【實施方式】 M375883 以下將配合實施例對本創作技術特點作進一步地說 明，該實施例僅爲較佳的範例，並非用來限定本創作之實 施範圍，謹藉由參考附圖結合下列詳細說明而獲致最好的 理解。 首先，請參考第4圖並對照第1至3圖，其用以說明 本創作定位裝置應用於一種上下對位之測試設備的實施 ' 例。根據本創作，該測試設備10基本上設置在一輸送設備 - 20推進行程之定點上，並經由一支持裝置30支持著且受控 | 而可升降。該輸送設備20,至少包括一承載部21用以承載 待測元件50向該定點上推進。如同先前技術，該支持裝置 30,包括一固定部31，在其底端具有一底座部33用以承載 該輸送設備20。一樞接部32,其樞設一對懸臂34固著在該 固定部31上端，使該對懸臂34以此爲支點自由端可擺轉， 該測試設備10被樞設在此懸臂34自由端受控而可升降。一 測試頭12,固設在該測試設備10上一起連動，其具備多數 探針121隨同測試設備10下降時可抵接在待測元件50之引 • 線腳位上。 本創作不同之處在於包括一輔助定位裝置48與該輸送 設備20相連結，其包含若干定位銷480，均等的配置在該 待測元件50周邊，用以輔助定位。該定位裝置40，包含若 干螺栓元件41，其一端均等的固設在該測試頭12周邊，另 一端對應於該等定位銷48各形成一中心孔411。及，若干 緩衝元件42,其一端各形成一擴大直徑的導引孔421，另一 端蓄有一彈性元件43之勢能，且分別穿設在該等螺栓元件 4 1之外側。 M375883 根據本創作，該測試設備1 0包括一基座部1 1用以支承 該測試頭12，並使測試頭12突出在該測試設備10表面。 該輔助定位裝置48包括若干基座4 82分別對應承載該等定 位銷48 0，且兩者之間成活動式結合。及，該輔助定位裝置 48又包括一支撐構件483，用以支承該基座482，並可移動 地與該輸送設備20相連結，且該支撐構件483對應於測試 ' 頭12形成一個貫穿孔484,並允許該測試頭12穿過抵接待 測元件50。較佳地，有三個定位銷480並成等距/等角的配 Β 置在該貫穿孔484的周邊，形成三點定位。 根據本創作，對應於該等定位銷480該螺栓元件41具 有三個，誠如第1至3圖所示，該螺栓元件41—端具有螺 紋部4 1 3，並經由一螺帽部44固定在該測試頭1 2之印刷電 路基板14上；另一端在該中心孔411的外側包含一圓筒部 410，及在此圓筒部410的端部上形成一突肩414。及，在 該緩衝元件42底部上形成一個貫穿孔423套設在該螺栓元 件41圓筒部410的外側可滑動。其中，該彈性元件43例如 φ 圈式彈簧，穿設在該圓筒部410的外側，且介於該緩衝元件 42底部和測試頭12之印刷電路基板14之間。按照本創作， 該緩衝元件42在導引孔421的開口端形成一倒角422，在 該螺栓元件41中心孔411的開口端也形成一倒角412;又’ 在該定位銷480自由端的端部上對應形成一倒角481。 再如第5及6圖所示，當進行測試時，先將上述輔助 定位裝置48之支撐構件48 3與該輸送設備連結在一起’並 校正該定位銷480準位，使其能分別對應在該定位裝置40 之螺栓元件41的中心孔411。該測試設備1〇受控下降時’ M37.5883 由於緩衝元件42具有擴大直徑的導引孔421，且在該導引 孔421的開口端形成有倒角422，而形成一個大範圍導引 區，及在該螺栓元件41中心孔4 1 1的開口端也形成一倒角 412;並且，該定位銷480在自由端的端部上對應形成一倒 角481，因此該定位銷480很容易被導向中心孔411，可避 免摩擦損傷；同時，使該測試頭12上之多數探針121準確 地抵接在待測元件50的引線腳位上，能使該測試頭12與待 測元件50之間能快速而準確對位。此外，該緩衝元件42 又藉由彈簧43之長度落差，除了可減緩與定位銷之間的磨 擦損傷之外，更可降低探針1 2 1與半導體元件之間的損傷 等。 另外，第7圖用以說明本創作定位裝置應用於一種左 右對位之測試設備的實施例。根據本創作之定位裝置，該 測試設備10係沿一承載設備20’相同中心線CL配置，且 受控而可相對移動。該承載設備20’ ，具有一承載部21， 並在若干定點上提供若干插銷端子2 1 0且對應與待測元件 (圖中未示）的引線腳位成電連接。一測試頭12，固設在 該測試設備10上一起連動，其包含若干插槽120且各具備 多數探針121，隨同該測試設備10向承載設備20’移動時 可對應與該插銷端子210嵌合，彼此連接在一起。其中，又 包括一輔助定位裝置48，包含若干定位銷480，並分別配置 在該插銷端子210周邊。該定位裝置40，包含若干螺栓元 件41，其一端固設在該測試頭12周邊，另一端對應於該等 定位銷48各形成一中心孔411。及，若干緩衝元件42，其 一端各形成一擴大直徑的導引孔421，另一端蓄有一彈性元 M37.5883 件43之勢能，且分別穿設在該等螺栓元件4 1之外側》如此， 當該測試設備向承載設備移動時，利用緩衝元件大範圍導 引區及具有彈性的導引孔，可引導定位銷導向中心孔，且 藉由彈性元件之長度落差以減緩與定位銷之間的磨擦損 傷，能使測試頭之插槽與插銷端子之間能快速而準確對位。 以上僅爲本創作的較佳實施例，並不侷限本創作實施 ' 範圍，即不偏離本創作申請專利範圍所作之均等變化與修 - 飾，應仍屬本創作之涵蓋範圍。 _ 【圖式簡單說明】 第1圖爲本創作用於測試設備之定位裝置之分解狀態 立體圖。 第2圖爲顯示第1圖定位裝置之組合狀態立體圖。 第3圖顯示本創作定位裝置之局部剖面示意圖。 第4圖爲本創作定位裝置應用於一種上下對位之測試 設備的實施例示意圖。 第5圖顯示本創作定位裝置之定位前狀態之局部剖面 秦放大圖。 第6圖顯示本創作定位裝置之定位狀態之局部剖面放 大圖。 第7圖爲本創作定位裝置應用於一另種左右對位之測 試設備的實施例示意圖。 第8圖爲先前技術，係轉繪自台灣發明專利公告第 13 10090號「具精準定位輔助介面之半導體測試系統」之示 意圖。 【主要元件符號說明】 M375883 43 彈性元件 44 螺帽部 48 輔助定位裝置 480 定位銷 48 1 倒角 482 基座 483 支撐構件 484 貫穿孔 50 待測元件M375883 V. New description: [New technical field] This creation is about the positioning device of the test equipment, especially refers to a large-scale guiding area through the elastic buffering element to guide the positioning pin to the center hole, so that the test head and the test head A positioning device that can accurately align between objects. [Prior Art] 'In the semiconductor industry, it is common to use good test equipment to screen good and not good products to control production quality. However, with the trend toward miniaturization of electronic products, the size of semi-conductor components is neglected, so for semiconductors. The precision standards of test equipment are also constantly being improved. In order to improve the shortcomings of conventional semiconductor test equipment positioning, such as time-consuming, labor-intensive and inaccurate, many related documents have been proposed. For example, as shown in Fig. 8, the inventor of the present invention is equal to Taiwan Invention Patent Notice No. 13 10090, providing a A semiconductor test system for accurately positioning an auxiliary interface, comprising: a fixing portion (300), a pivoting portion (310), a test device (320), an auxiliary positioning device (330), and a conveying device (340) •)Wait. The fixing portion (300) has a base (301) at its bottom end for carrying the conveying device (340) » the pivoting portion (310), and a pair of cantilever arms (31 1 ) are fixed thereto. The upper end of the fixing portion (300) is configured such that the pair of cantilever arms can be pivoted as a fulcrum free end, and the testing device (320) is pivoted at the free end of the cantilever (311) and controlled to be lifted and lowered. The testing device (320), Having a test unit (321), and at least three positioning holes (322) around the test unit (321); a test head (321 1 ) having a plurality of probes (3213) for receiving M375883, An object; a test head base (3 2 12 ) for carrying the test head ( ) and connected to the test device ( 320 ) body and protruding on the surface of the test ( 320 ). The auxiliary positioning device (330) includes at least three positioning pins respectively inserted into the positioning holes (322), and one of the positioning pins is longer than the remaining two positioning pins (331); at least three fixed' a pedestal (32), respectively carrying the locating pin (331), and a movable combination of the two: the auxiliary positioning device (330) carries the locating pin base (332) via a support (330); And the supporting mechanism) corresponding to the testing unit (321) forms a through hole (3 33 1 ), the test head (3211) passes to abut the object to be tested, and the positioning seat (3 3 2 ) is located here. One end of the through hole (33 3 1 ), and one end of the branch β 322 ) forms a chamfer or the like. The conveying device (340) is movably coupled to the auxiliary positioning device (330), and includes at least one carrying portion (341) for carrying the brewing_, and the testing unit (321) corresponding to the testing device (320) . # , When the test equipment is lowered, most of the probes on the test head can abut on the lead pins of the object. In the above publication, those skilled in the art can understand that there is no buffer between the fixing pin and the positioning pin, and there is almost no space for error, which is likely to cause friction damage between the two, and there is still technical improvement. Contents The main purpose of this creation is to provide a fixed-use test equipment for improving the time it takes to connect the machine to the machine. Another purpose of this creation is to design the positioning device in the test device 3211: Equipment (331 (331: between the pin and pin, iM operation (333, the base of the pin: pin (the active object is so measured hole hole. Therefore: the position is mounted: the main -4- M375883 body to reduce the error caused by assembly Another object of the present invention is to guide the positioning pin to the center hole through a wide guiding area of the elastic cushioning element, so that the test head and the object to be tested can be accurately aligned. To achieve the above and other purposes, This creation is used to test the positioning device of the device, which is configured along the same centerline of a carrier device and is controlled and relatively movable. Having a carrier portion - and providing a plurality of pin terminals at a plurality of fixed points, and correspondingly connected to the 引线 lead pins of the device to be tested. A test head is fixedly attached to the test device and includes a plurality of slots. Each of the plurality of probes is configured to be coupled to the pin terminal and coupled to each other when the test device is moved. The auxiliary positioning device includes a plurality of positioning pins respectively disposed around the pin terminal. The utility model comprises a plurality of bolt elements, one end of which is fixed on the periphery of the test head, and the other end forms a central hole corresponding to each of the positioning pins, and a plurality of cushioning elements each of which forms an enlarged diameter guiding hole at one end and the other end The potential energy of the elastic element is stored and is respectively disposed on the outer side of the bolt elements Φ. According to the present creation, the cushioning element forms a chamfer at the open end of the guiding hole, and at the open end of the central hole of the bolt element A chamfer is also formed, and the positioning pin is correspondingly formed with a chamfer at the end of the free end. Thus, a buffering element is used for a wide range of guiding regions and The elastic guiding hole guides the positioning pin to the center hole, and the length difference of the elastic member (spring) is used to slow the friction damage between the positioning pin and the test head and the object to be tested can be quickly and accurately [Embodiment] M375883 The following is a description of the technical features of the present invention in conjunction with the embodiments. This embodiment is only a preferred example and is not intended to limit the scope of implementation of the present invention. For the best understanding, please refer to Figure 4 and compare the first to third figures, which are used to illustrate the implementation of the authoring positioning device in a test device of up and down alignment. According to this creation, The test apparatus 10 is disposed substantially at a fixed point of the delivery device-20 and supported and controlled via a support device 30. The conveying device 20 includes at least one carrying portion 21 for carrying the member to be tested 50 to advance toward the fixed point. As in the prior art, the support device 30 includes a fixing portion 31 having a base portion 33 at its bottom end for carrying the conveying device 20. A pivoting portion 32 is pivotally fixed to the upper end of the fixing portion 31, so that the pair of cantilever arms 34 can be pivoted as a fulcrum, and the testing device 10 is pivoted at the free end of the cantilever 34 Controlled and can be raised and lowered. A test head 12 is fixedly coupled to the test device 10, and has a plurality of probes 121 that can abut on the lead pins of the device under test 50 as the test device 10 descends. The present invention differs in that an auxiliary positioning device 48 is coupled to the transport device 20 and includes a plurality of locating pins 480 that are equally disposed about the periphery of the component under test 50 to aid in positioning. The positioning device 40 includes a plurality of bolt members 41, one end of which is equally fixed to the periphery of the test head 12, and the other end of which forms a central hole 411 corresponding to each of the positioning pins 48. And a plurality of cushioning members 42 each having an enlarged diameter guiding hole 421 at one end and a potential energy of the elastic member 43 at the other end and respectively passing through the outer sides of the bolt members 41. M375883 According to the present invention, the test apparatus 10 includes a base portion 1 1 for supporting the test head 12 and causing the test head 12 to protrude from the surface of the test apparatus 10. The auxiliary positioning device 48 includes a plurality of bases 4 82 respectively corresponding to the positioning pins 48 0 and is in a movable combination therebetween. And the auxiliary positioning device 48 further includes a supporting member 483 for supporting the base 482 and movably coupled to the conveying device 20, and the supporting member 483 forms a through hole 484 corresponding to the test 'head 12 And allowing the test head 12 to pass through the receiving component 50. Preferably, there are three locating pins 480 and are equidistant/equalized at the periphery of the through hole 484 to form a three-point positioning. According to the present invention, the bolt member 41 has three corresponding to the positioning pins 480. As shown in FIGS. 1 to 3, the bolt member 41 has a threaded portion 4 1 3 and is fixed via a nut portion 44. On the printed circuit board 14 of the test head 12; the other end includes a cylindrical portion 410 on the outer side of the center hole 411, and a shoulder 414 is formed on the end portion of the cylindrical portion 410. Further, a through hole 423 is formed in the bottom of the cushioning member 42 so as to be slidable outside the cylindrical portion 410 of the bolt member 41. The elastic member 43, for example, a φ coil spring, is disposed outside the cylindrical portion 410 and interposed between the bottom of the cushioning member 42 and the printed circuit board 14 of the test head 12. According to the present invention, the cushioning member 42 forms a chamfer 422 at the open end of the guiding hole 421, and a chamfer 412 is also formed at the open end of the center hole 411 of the bolt member 41; and 'the free end of the positioning pin 480 A chamfer 481 is formed on the portion. As shown in FIGS. 5 and 6, when the test is performed, the support member 48 3 of the auxiliary positioning device 48 is first coupled to the conveying device and the positioning pin 480 is corrected to be aligned. The center hole 411 of the bolt member 41 of the positioning device 40. When the test device 1 is controlled to descend, 'M37.5883, the buffer member 42 has an enlarged diameter guide hole 421, and a chamfer 422 is formed at the open end of the guide hole 421 to form a large-scale guide region. And a chamfer 412 is also formed at the open end of the center hole 4 1 1 of the bolt member 41; and the positioning pin 480 correspondingly forms a chamfer 481 at the end of the free end, so the positioning pin 480 is easily guided The central hole 411 can avoid the friction damage; at the same time, the majority of the probes 121 on the test head 12 are accurately abutted on the lead pins of the device under test 50, so that the test head 12 and the device under test 50 can be Can be quickly and accurately aligned. Further, the cushioning member 42 is further reduced in length by the length of the spring 43, in addition to slowing the abrasion damage with the positioning pin, and further reducing damage and the like between the probe 112 and the semiconductor element. In addition, Fig. 7 is a diagram for explaining an embodiment in which the present inventive positioning device is applied to a test apparatus of right and left alignment. According to the present positioning device, the test device 10 is disposed along the same centerline CL of a carrier device 20' and is controlled to be relatively movable. The carrying device 20' has a carrying portion 21 and provides a plurality of latch terminals 2 1 0 at a plurality of fixed points and is electrically connected to the lead pins of the device to be tested (not shown). A test head 12 is fixedly coupled to the test device 10 and includes a plurality of slots 120 and each has a plurality of probes 121. The test device 10 can be correspondingly embedded with the pin terminal 210 as the test device 10 moves toward the carrier device 20'. Close together, connected to each other. There is further included an auxiliary positioning device 48, which includes a plurality of positioning pins 480, and is respectively disposed around the pin terminal 210. The positioning device 40 includes a plurality of bolt elements 41, one end of which is fixed to the periphery of the test head 12, and the other end of which forms a central hole 411 corresponding to the positioning pins 48. And a plurality of buffering members 42 each having an enlarged diameter guiding hole 421 at one end and a potential energy of the elastic element M37.5883 43 at the other end, and respectively disposed on the outer side of the bolt elements 4 1 . When the testing device moves toward the carrying device, the locating pin can be guided to the central hole by using a wide guiding area of the cushioning element and the guiding hole with elasticity, and the length difference between the elastic elements is used to slow down between the positioning pin and the positioning pin. Friction damage enables fast and accurate alignment between the slot of the test head and the pin terminal. The above is only the preferred embodiment of the present invention, and is not limited to the scope of the creation of the creation, that is, the equal changes and modifications made without departing from the scope of the patent application of this creation should still be covered by this creation. _ [Simple description of the drawing] Figure 1 is a perspective view of the exploded state of the positioning device used for the test equipment. Fig. 2 is a perspective view showing the combined state of the positioning device of Fig. 1. Figure 3 is a partial cross-sectional view showing the creation positioning device. Fig. 4 is a schematic view showing an embodiment of a test positioning device applied to a test device of up and down alignment. Fig. 5 is a partial enlarged view showing the state of the pre-positioning state of the present locating device. Fig. 6 is a partial cross-sectional enlarged view showing the positioning state of the creation positioning device. Fig. 7 is a schematic view showing an embodiment of the test positioning device applied to a test device of the left and right alignment. Figure 8 is a prior art and is shown in the Taiwan Invention Patent Bulletin No. 13 10090 "Semiconductor Test System with Precision Positioning Assistant Interface". [Main component symbol description] M375883 43 Elastic component 44 Nut section 48 Auxiliary positioning device 480 Locating pin 48 1 Chamfer 482 Base 483 Support member 484 Through hole 50 Component to be tested