M360446 五、新型說明： 【新型所屬之技術領域】 * 本創作係關於一種太陽能晶圓移轉裝置，特別是一種移動太陽能晶圓 進入晶圓片匣之移轉裝置。 【先前技術】 太陽能具有取之不竭、綠色環保、實用性高等特性，太陽能晶圓更已 成為眾所矚目的標的，不僅大量製造、迅速分類容置等提高效率的方法皆 ® 為業界所競相追求的標的，確保於該等流程中減少瑕疵出現之可能亦極為 重要。 為求晶圓傳送、收納效率之提高，如圖j所示，在製造、檢測過程中 多以傳輸穩定、速率較快、且不會對晶圓9造成具破壞性可能的皮帶輪組i 進行晶圓移轉，藉由受馬達驅動之皮帶輪帶動皮帶旋轉，將晶圓9置放於 皮帶上傳輸。且一般太陽能晶圓在進行相關測試與分類前後，無論是機台 間之搬移或出貨之需求，都會將太陽能晶圓9疊層置放。 I 目前常見的晶圓承載裝置主要有兩種不同設計，如圖2所示的晶圓月 匣(cassette) 2 ’具有頂部、底部23及左右側壁’並且在兩側壁上形成有複 數凸緣，凸緣中之最下一個與該出入口底部間形成有一個間距D。晶圓則 從上述頂部、底部23及左右側壁所共同圍繞出的側向出入口 21進出，一 - 種習用技術是以一個夾制式的晶圓夾4完成進入料的動作，唯因進行上述 動作時，晶圓受夾制部位可能產生輕微之結構瑕症，即便以肉眼檢視無法 輕易發現，但待完成所有製造處理流程時，將會因此種微裂(micro_crack)而 導致實際電路受損的決定性影響。 而目前主要是依靠機械臂移動晶圓載片（圖未示），以晶圓載片（圊未 示）承載太陽能晶圓由上述皮帶輪組1處移動進入晶圓片匣2，一旦機械臂 3 M360446 移動過程中輕微震動或快速移動下之慣性作用，導致被承載之晶圓9偏位， 在進入晶圓片匣2時可能撞及側壁或凸緣，損及太陽能晶圓9，為避免此種 情況頻繁發生，此種結構裝置必須採用較緩慢之速度移動晶圓9至晶圓片 匣2 〇 隨之，有部分業者構思如圖3所示，利用上述皮帶輪組丨把處理過的 晶圓9直接移轉至晶圓片匣2容置’卻礙於習用皮帶輪組1之皮帶輪直徑 大於片匣間距D，以致如囷示所例，需捨棄片匣底部位置約3片晶圓的溶 置量’即便以單一晶圓片匣2看來’似無顯著妨礙，但對於高度自動化、 大量生產的太陽能晶圓產業，在搬運、儲放過程中之成本增加，便不容忽 視。 另一種晶圓承載裝置如圖4及圖5所示，是上方形成有一個頂端没放 口 31的晶圓片盒(magazine)3。若要把晶圓9置入晶圓片盒3或自晶圓片盒 3中取出，均可利用具有吸嘴的汲取器33吸取晶圓9，並將下方伸出的一 組推抵件32升高至配合吸嘴的高度，供吸取最上方晶圓9或增加一片疊置 BB圓9 ’以避免所處理的晶圓9不慎由高處跌落而損壞的風險。且當汲取器 33吸取前一片晶圓9水平位移至下一動作時，推抵件32再抵推下方晶圓9 至一個預備汲取位置，等待下一輪的汲取動作。 維然依照原廠設計，上述兩種晶圓承載裝置是分屬兩種不同系統而 不會產生關連，但在實際使用者的設廠過程，往往會取其所需而自行組合 運用’因此兩種承載裝置之間的移動變換也是頻繁出現的，但礙於原廠對 於此種混雜使用情況絕對不支持，因此並無相關轉換系統之出現。所以， 如何在自動化作業的檢測流程中，提升輸送速度，且不必犧牲承載裝置既 有的容量’又能在晶圓片匣與晶圓片盒間順利轉換承載的晶圓，無疑成為 業界關注的焦點。 4 M360446 【新型内容】 . 本創作之一目的’在提供一種符合晶圓片匣原始規格，並具備較快晶 圓輸送速度之太陽能晶圓移轉襄置。 本創作有一目的’在提供一種可變換扁形驅動件傾斜角度之太陽能晶 圓移轉裝置。 本創作再一目的，在提供一種可令晶圓在晶圓片盒及晶圓月匣間順利 移轉之太陽能晶圓移轉裝置。 Φ 本創作又一目的，在提供一種令晶圓在晶圓片盒及晶圓片匣間移轉， 無需額外辅助機構之太陽能晶圓移轉裝置。 本創作係一種太陽能晶圓移轉裝置，係供將太陽能晶圓移轉進出一個 形成有側向出入口之晶圓片E，且該晶圓片£對應該側向出入口之兩側壁 上形成有複數凸緣’料凸緣中之最下—健該出人口底部間形成有一個 間距，該移轉裝置包含至少兩組彼此以小於該等太陽能晶圓尺寸相間隔之 驅動機構’且該至少兩組驅動機構分別包括：一組承載件；一個遠離該晶 圓片S、供驅動該承載件沿著一個方向旋轉之遠端媒動件；及一個對應於M360446 V. New Description: [New Technology Field] * This creation is about a solar wafer transfer device, especially a mobile solar wafer into the wafer transfer device. [Prior Art] Solar energy is inexhaustible, environmentally friendly, and highly practical. Solar wafers have become the target of attention. Not only are mass production, rapid classification and other methods of improving efficiency, etc. It is also extremely important to pursue the target to ensure that the possibility of occurrence of defects in these processes is reduced. In order to improve the efficiency of wafer transfer and storage, as shown in FIG. j, in the manufacturing and testing process, the pulley set i which is stable in transmission, fast in speed, and which does not cause damage to the wafer 9 is crystallized. The circle is rotated, and the belt 9 is placed on the belt by the belt driven by the motor-driven pulley to rotate. In general, before and after the relevant testing and classification of solar wafers, the solar wafers 9 are stacked regardless of the need for moving or shipping between the machines. I currently have two different designs of wafer carrier devices. The wafer cassette 2' has a top, a bottom 23 and left and right sidewalls as shown in FIG. 2 and a plurality of flanges are formed on the two sidewalls. A gap D is formed between the lowermost one of the flanges and the bottom of the inlet and outlet. The wafer is fed in and out from the lateral entrances and exits 21 which are surrounded by the top, bottom 23 and left and right side walls. One conventional technique is to use a clip-on wafer holder 4 to complete the incoming material movement, only when performing the above actions. The wafer may be slightly damaged due to structural defects, even if it is not easily detected by the naked eye, but the micro-crack will cause a decisive influence on the actual circuit damage when all manufacturing processes are completed. . At present, the wafer carrier (not shown) is mainly moved by the robot arm, and the wafer is carried by the wafer carrier (not shown), and the wafer is moved from the pulley group 1 into the wafer 匣2, once the robot arm 3 M360446 moves. The inertia of slight vibration or rapid movement during the process causes the loaded wafer 9 to be offset, which may hit the sidewall or flange when entering the wafer 匣2, damaging the solar wafer 9 to avoid this situation. Frequently, such a structural device must move the wafer 9 to the wafer 匣 2 at a slower speed. Accordingly, some of the operators conceived that, as shown in FIG. 3, the processed wafer 9 is directly processed by the above-mentioned pulley set. The transfer to the wafer 匣 2 is accommodated 'but the pulley diameter of the conventional pulley set 1 is larger than the sheet pitch D, so that, as in the case of the illustration, it is necessary to discard the amount of dissolution of about 3 wafers at the bottom of the cassette' Even with a single wafer 匣2, it seems to be 'not significantly hindered, but for the highly automated, mass-produced solar wafer industry, the cost of handling, storage and release can not be ignored. Another wafer carrying device, as shown in Figs. 4 and 5, is a wafer 3 having a top end undisposed 31 formed thereon. To place or remove the wafer 9 into or from the wafer cassette 3, the wafer 9 can be sucked by the picker 33 having a nozzle, and a set of pushing members 32 extending downward can be used. Raised to match the height of the nozzle for sucking the top wafer 9 or adding a stack of BB circles 9' to avoid the risk of the wafer 9 being inadvertently dropped from a height. And when the picker 33 picks up the horizontal displacement of the previous wafer 9 to the next action, the pusher 32 pushes the lower wafer 9 to a preliminary picking position, waiting for the next round of the picking action. According to the original design, the above two wafer carrier devices are divided into two different systems without any connection, but in the process of setting up the actual user, they often take their own needs and use them together. The shifting of the movement between the carrying devices is also frequent, but it does not support the original factory for such mixed use, so there is no relevant conversion system. Therefore, how to improve the conveying speed in the inspection process of the automated operation without sacrificing the existing capacity of the carrier device and smoothly transferring the wafer under the wafer cassette and the wafer cassette has become an industry concern. focus. 4 M360446 [New Content] . One of the purposes of this creation is to provide a solar wafer transfer device that meets the original specifications of the wafer and has a faster wafer transport speed. The present invention has a purpose to provide a solar crystal transfer device that can change the tilt angle of a flat drive member. A further object of the present invention is to provide a solar wafer transfer device that allows wafers to be smoothly transferred between wafer cassettes and wafers. Φ Another object of the present invention is to provide a solar wafer transfer device that allows wafers to be transferred between wafer cassettes and wafer cassettes without the need for additional auxiliary mechanisms. The present invention relates to a solar wafer transfer device for transferring a solar wafer into and out of a wafer E formed with a lateral entrance and exit, and the wafer has a plurality of sidewalls corresponding to the lateral entrance and exit. The bottom of the flange 'the bottom of the material' is formed with a spacing between the bottoms of the population, and the transfer device includes at least two sets of driving mechanisms that are spaced apart from each other by less than the size of the solar wafers and the at least two groups The driving mechanism respectively comprises: a set of carriers; a remote medium moving away from the wafer S for driving the carrier to rotate in one direction; and a corresponding to
籲該晶圓片S、並具有-個小於其半徑之厚度、且當被伸入該對應晶圓片E 時可沿著-個與水平面失-個傾斜角度的旋轉轴旋轉而驅動該承載件沿著 上述方向旋轉、藉此使其與該承載件共同伸人該晶圓片£時所側高度小 ' 於其直徑之扁形驅動件。 本創作更係一種太陽能晶圓移轉裝置，可被應用以供在一個形成有一 個頂端汲放口之晶圓片盒與一個形成有側向出入口之晶圓片厘間移轉太陽 能晶圓，且該晶圓片E對應該侧向出人口之兩側壁上形成有複數凸緣，該 等凸緣中之最下-個與該出人口底部間形成有___距，該移轉裝置包含 至少兩組彼此以小於該等太陽能晶圓尺寸相間隔之驅動機構，且該至少兩 5 M360446 組驅動機構分別包括：一組承載件；一個對應於該晶圓片念供驅動該承 載件沿著一個方向旋轉之遠端驅動件；及一個對應於該晶圓片匣、並具有 一個小於其半徑之厚度、且當被伸入該對應晶圓片匣時可沿著一個與水平 面夾一個傾斜角度的旋轉轴旋轉而驅動該承載件沿著上述方向旋轉、藉此 使其/、該承載件共同伸入該晶圓片匡時所佔用高度小於其直.徑之扁形媒動 件0 承上所述，本創作提出—種太陽能晶圓移轉裴置，適於太陽能晶圓自 晶圓片盒移出後，承載太陽能晶圓接受進一步處理流程，並移轉太陽能晶 圓由承載件離開，放進晶圓片匣中，待進行例如分類動作的後續處理流程。 【實施方式】 有關本創作之前述及其他技術内容、特點與功效，在以下配合參考圖 式之較佳實施例的詳細說明中，將可清楚的呈現。為方便說明，本案中太 陽能晶圓移轉裝置係以用於晶圓傳輸的皮帶輪組為例，且省略必備於機台 基座之控制單元與支架線路，以免圖面紊亂。 如圖6所示之本創作第一實施例，且一併參考圖丨，圖示中皮帶輪組Γ 承接前文所述之汲取器（圖未示）吸取的晶圓9，該皮帶輪组1，係由兩組驅 動機構10’組合而成，並利用於此皆例示為皮帶輪且大小相同的遠端媒動件 12’及扁形驅動件13’，藉由旋轉軸131，旋動皮帶輪而輸送晶圓9抵達一個 檢測位置，以進行一個例如為外觀測試的檢驗流程。 再參照圓7，該俯視示意圖所示之分類機台，係以兩列晶圓片匣2分流， 一左一右可分別依序承接皮帶輪組Γ移轉的太陽能晶圓9;而此處並非以前 文所述之晶圓片盒進行晶圓收納，蓋因在晶圓處理系統中，當前業者可能 如本案所例示，為求晶圓各種處理皆達最優化，晶圓檢測機台與分類機台 分別利用不同腐:牌之機台，而各廉牌的機台又可能各自須配合對應之晶圓 6 M360446 片厘2或晶圓片盒（圖未示）。 故本實施例中’如圖8所示，以皮帶輪組（圖未示)，將分類機台所分 類的良品晶圓9移入晶圓片匣2,圖中，片匣底部23至片匣已置入晶圓9 之間仍具有遠大於扁形驅動件13’直徑之空間；令加設有角度調整件的爲形 驅動件13’得以伸入該晶圓片g 2，確實將晶圓9送至定位，擺放於兩側壁 22的相應凸緣221上。 承上，當放置進晶圓片E 2的晶圓9越來越多至如圖3所示，剩下3 片晶圓容納量時，參照圖9及圖1〇，則需利用—組例示為一個球狀機構的 角度調整件133’改變扁形驅動件13,旋轉軸131，之傾斜角度，且對應於該晶 圓片匣2，扁形驅動件13’具有一個小於其半徑之厚度，得以順利伸入至晶 圓片匿2時’並依靠旋轉軸131’旋轉’從而驅動承載件而移動晶圓9 ; 並於本例中，令扁形驅動件13,與遠端驅動件（圖未示）同步傾斜，讓依附 於皮帶輪的皮帶不至於脫落。 再如圖11所示，待把晶圓9置於凸緣最下一個之上時，可供扁形驅動 件13’伸入之空間尚有間距D加上凸緣221之高度，且該高度仍可使再度變 更其旋轉轴傾斜角度的扁形驅動件13,順利置放晶圓9。承上並如圖7所示， 若分類機台其中一列之待收晶圓片匣2已滿或發生故障，則可由另一列晶 圓片匣2完全承擔收納晶圓之責，使晶圓傳送不至於產生堵塞，影響到整 個晶圓處理系統。再者，為熟於此技藝者皆知，若皮帶輪组雖不具有改變 旋轉軸傾斜角度之功能，而設置以一固定的傾斜旋轉軸，令扁形驅動件仍 具有足夠的活動空間，此亦明顯屬於本案之範疇。 當然’如熟悉本技術領域者所能輕易理解，如圖12所示，遠端驅動件 12”亦可採用一個厚度大於扁形驅動件13”之皮帶輪，兩者雖都為皮帶輪， 但是僅需藉由扁形骧動件13”的傾斜，即可置放晶圓9，而遠端驅動件12” 不需要深入至晶圓片匣内，因此可採用較厚之設計，以延長使用壽命；再 7 M360446 因遠端驅動件12”具有一個較大厚度，並可輔以輪邊限制部，使扁形驅動 件13”的傾斜僅會導致例示為傳動皮帶的承載件1Γ’在—個限度内扭曲，仍 得以由兩驅動件12”、13”帶動。 此外，目前之太陽能晶圓除以上移轉方式外，亦有例如圖13本創作第 二實施例所示’該承載件1Γ”包括一條導引皮帶112’’’及複數受導引皮帶 U2’’’致動的承載輪113’’’ ’如此，由承載輪113，’’同樣可達到前文傳動皮帶 (圖未示）之功能。 如此一來，本創作可協助相異應用晶圓片匣或晶圓片盒的不同晶圓處 理機台，不受晶圓片匣固有結構之制約，無礙驅動機構傳輸晶圓進入晶圓 片匣。惟以上所述者，僅為本創作之較佳實施例而已，當不能以此限定本 創作實施之範圍，即大凡依本創作申請專利範圍及創作說明内容所作簡單 的等效變化與修飾，皆仍屬本創作專利涵蓋之範圍内。 【圖式簡單說明】 圖1為習知皮帶輪組進行晶圓輸送動作及外觀測試之側視示意圖； 圖2為晶圓夾進行晶圓輸入晶圓片匣動作的之侧視示意圖； 圖3為習知皮帶輪組進行晶圓輸入晶圓片匣動作的之正視示意圖； 圖4為承載晶圓的晶圓片盒示意圖； 圖5由晶圓片盒中汲取晶圓之動作示意圖； 圖6為本創作第一實施例，太陽能晶圓移轉裝置之立體示意圖； 圖7為本創作第一實施例，分類機台中，晶圓片匣承接分流容置太陽 能晶圓的俯視示意圖。 圖8為本創作第一實例，晶圓由晶圓片匣側向出入口進出之正視示 意圖； 圖9為本創作第一實施例，改變扁形驅動件旋轉轴傾斜角度的部份單 M360446 元運作示意圖； 圖ίο為本創作第一實施例’改變細驅動件傾斜角度後，晶圓由晶圓 片s側向出入口進出示意圖； 圖11為本創作第一實施例，再度改變扁形驅動件之傾斜角度，晶圓由 晶圓片匣侧向出入口進出示意圖； 圖12為本創作第二實施例’太陽能晶圓移轉裝置的俯視示意圖。The wafer S is called, and has a thickness smaller than a radius thereof, and when extended into the corresponding wafer E, the carrier can be driven to rotate along a rotation axis that is offset from the horizontal plane by an inclination angle Rotating in the above direction, thereby cooperating with the carrier to extend the flat drive member whose height is smaller than the diameter of the wafer. The present invention is a solar wafer transfer device that can be applied to transfer solar wafers between a wafer cassette having a top opening and a wafer having a lateral inlet and outlet. And the plurality of flanges are formed on the sidewalls of the wafer E corresponding to the lateral exit population, and a bottom edge of the flanges is formed with a ___ distance between the bottom and the bottom of the population, and the transfer device includes At least two sets of driving mechanisms spaced apart from each other by the size of the solar wafers, and the at least two 5 M360446 group driving mechanisms respectively comprise: a set of carriers; one corresponding to the wafer for driving the carrier along a distal drive member that rotates in one direction; and a thickness corresponding to the wafer defect and having a thickness smaller than a radius thereof, and an inclination angle along a horizontal plane when being inserted into the corresponding wafer defect Rotating the rotating shaft to drive the carrier to rotate in the above direction, thereby causing the carrier to co-extend into the wafer 匡 when the height of the wafer is less than the diameter of the flat dielectric member Said that this creation The solar wafer transfer device is adapted to carry the solar wafer from the wafer cassette, carry the solar wafer for further processing, and transfer the solar wafer away from the carrier and into the wafer cassette. A subsequent processing flow such as a sorting action is to be performed. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments. For convenience of description, the solar wafer transfer device in the present case is exemplified by a pulley set for wafer transfer, and the control unit and the support line necessary for the base of the machine are omitted to avoid disorder of the picture. As shown in Fig. 6, the first embodiment of the present invention, and referring to the figure, the pulley set 承 receives the wafer 9 sucked by the picker (not shown) as described above, and the pulley set 1 is The two sets of driving mechanisms 10' are combined, and the remote driving member 12' and the flat driving member 13' of the same size are illustrated as pulleys, and the wafer is rotated by the rotating shaft 131. 9 Arrives at a test location for an inspection process such as a visual test. Referring again to the circle 7, the sorting machine shown in the top view is divided into two rows of wafers 匣2, one left and one right respectively can sequentially take the pulleys Γ transferred solar wafers 9; The wafer cassette described above is used for wafer storage. Because the wafer processing system is in the wafer processing system, the current industry may be exemplified in this case, and the wafer processing machine and the sorting machine are optimized for various wafer processing. The stations use different rot: brand machines, and each of the cheap machines may have to match the corresponding wafer 6 M360446 2 or wafer cassette (not shown). Therefore, in the embodiment, as shown in FIG. 8, the good wafer 9 classified by the sorting machine is moved into the wafer 匣2 by a pulley set (not shown). In the figure, the bottom 23 of the cassette is set to the sheet. There is still a space between the incoming wafers 9 that is much larger than the diameter of the flat driving member 13'; the shaped driving member 13' to which the angle adjusting member is attached is inserted into the wafer g2, and the wafer 9 is surely sent to Positioned and placed on the corresponding flanges 221 of the two side walls 22. As shown in FIG. 3, when the wafers 9 placed in the wafer E 2 are more and more as shown in FIG. 3, when referring to FIG. 9 and FIG. The angle adjusting member 133' of a spherical mechanism changes the inclination angle of the flat driving member 13, the rotating shaft 131, and corresponds to the wafer crucible 2, and the flat driving member 13' has a thickness smaller than the radius thereof, which is smooth. Extending into the wafer 2' and rotating by the rotating shaft 131' to drive the carrier to move the wafer 9; and in this example, the flat driving member 13, and the distal driving member (not shown) Synchronous tilt so that the belt attached to the pulley does not fall off. Further, as shown in FIG. 11, when the wafer 9 is placed on the lowermost one of the flanges, the space in which the flat driving member 13' protrudes has a space D plus the height of the flange 221, and the height is still The flat driving member 13 whose angle of inclination of the rotating shaft is changed again can be placed, and the wafer 9 can be smoothly placed. As shown in Figure 7, if one of the sorting machines in a row of wafers 待2 is full or fails, the other wafers 匣2 can be fully responsible for accommodating the wafers, so that the wafers are transferred. There is no clogging that affects the entire wafer processing system. Moreover, as is well known to those skilled in the art, if the pulley set does not have the function of changing the tilt angle of the rotating shaft, and is provided with a fixed tilting rotating shaft, the flat driving member still has sufficient movable space, which is also obvious. Belongs to the scope of this case. Of course, as can be easily understood by those skilled in the art, as shown in FIG. 12, the distal driving member 12" can also adopt a pulley having a thickness larger than that of the flat driving member 13", both of which are pulleys, but only need to borrow The wafer 9 can be placed by the tilting of the flat flipper 13", and the distal drive member 12" does not need to penetrate into the wafer cassette, so a thicker design can be used to extend the service life; M360446 Because the distal drive member 12" has a large thickness and can be supplemented by the wheel limit portion, the inclination of the flat drive member 13" only causes the carrier 1", exemplified as the drive belt, to be twisted within a limit. It is still driven by the two drive members 12", 13". In addition, in addition to the above transfer mode, the current solar wafer also has a guide belt 112''' and a plurality of guided belts U2' as shown in the second embodiment of the present invention. ''Actuated load-bearing wheel 113'''' As such, the load wheel 113, '' can also achieve the function of the previous drive belt (not shown). As a result, this creation can assist in different application wafers. Or different wafer processing machines of the wafer cassette are not restricted by the inherent structure of the wafer, and the driving mechanism is not hindered from transferring the wafer into the wafer. However, the above is only the best of the creation. For example, when the scope of the creation of the creation cannot be limited by this, that is, the simple equivalent changes and modifications made by the applicant in accordance with the scope of the patent application and the content of the creation description are still within the scope of the creation patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side view showing a wafer transfer operation and an appearance test of a conventional pulley set; FIG. 2 is a side view showing a wafer insert for wafer input wafer picking; FIG. 3 is a conventional pulley. Group into FIG. 4 is a schematic diagram of a wafer cassette carrying a wafer; FIG. 5 is a schematic diagram of an operation of drawing a wafer from a wafer cassette; FIG. 6 is a first embodiment of the creation of the wafer; A schematic diagram of a solar wafer transfer device; FIG. 7 is a top view of a first embodiment of the present invention, in which a wafer cassette receives a shunt-receiving solar wafer in a sorting machine. FIG. FIG. 9 is a schematic view showing the operation of a single M360446 element for changing the tilt angle of the rotating shaft of the flat driving member according to the first embodiment of the present invention; FIG. 'After changing the tilt angle of the thin driver, the wafer is moved from the wafer s side to the inlet and outlet. FIG. 11 is a first embodiment of the present invention, and the tilt angle of the flat driving member is changed again. The wafer is laterally oriented from the wafer. FIG. 12 is a schematic plan view of a solar wafer transfer device according to a second embodiment of the present invention.
圖13為本創作第三實施例的承載件側視示意圖。 【主要元件符號說明】 1、Γ…皮帶輪組 113…承載輪 2...晶圓片 13Γ…旋轉轴 3…晶圓片盒 133’…角度調整件 4··.晶圓爽 21…側向出入口 9…太陽能晶圓 22...側壁 D...間距 221…凸緣 10’…驅動機構 23···底部 11’、11”、11”’...承載件 31…頂端汲放口 12’、12”…遠端驅動件 32.··推抵件 13’、13”…扁形驅動件 33··.沒取器 112’”…導引皮帶Figure 13 is a side elevational view of the carrier of the third embodiment of the present invention. [Description of main component symbols] 1. Γ... Pulley set 113... Carrying wheel 2... Wafer 13 Γ... Rotary shaft 3... Wafer cassette 133'... Angle adjustment member 4··. Wafer cool 21... Lateral Entrance and exit 9...solar wafer 22...sidewall D...pitch 221...flange 10'...drive mechanism 23···bottom 11', 11”, 11”'...carrier 31...top port 12', 12"... distal drive member 32. · push-on member 13', 13"... flat drive member 33··. no extractor 112'"... guide belt