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TWI913861B - Charged particle wire device and electron gun - Google Patents

Charged particle wire device and electron gun

Info

Publication number
TWI913861B
TWI913861B TW113132129A TW113132129A TWI913861B TW I913861 B TWI913861 B TW I913861B TW 113132129 A TW113132129 A TW 113132129A TW 113132129 A TW113132129 A TW 113132129A TW I913861 B TWI913861 B TW I913861B
Authority
TW
Taiwan
Prior art keywords
charged particle
electron gun
wire device
particle wire
gun
Prior art date
Application number
TW113132129A
Other languages
Chinese (zh)
Other versions
TW202514694A (en
Inventor
糟谷圭吾
大西崇
石川修平
土肥��
谷本憲史
渡辺俊一
Original Assignee
日商日立全球先端科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2023/035308 external-priority patent/WO2025069287A1/en
Application filed by 日商日立全球先端科技股份有限公司 filed Critical 日商日立全球先端科技股份有限公司
Publication of TW202514694A publication Critical patent/TW202514694A/en
Application granted granted Critical
Publication of TWI913861B publication Critical patent/TWI913861B/en

Links

TW113132129A 2023-09-27 2024-08-27 Charged particle wire device and electron gun TWI913861B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2023/035308 WO2025069287A1 (en) 2023-09-27 2023-09-27 Charged particle beam device and electron gun
WOPCT/JP2023/035308 2023-09-27

Publications (2)

Publication Number Publication Date
TW202514694A TW202514694A (en) 2025-04-01
TWI913861B true TWI913861B (en) 2026-02-01

Family

ID=

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201837957A (en) 2017-02-15 2018-10-16 日商日立高新技術科學股份有限公司 Focused ion beam apparatus
US20180308658A1 (en) 2017-04-19 2018-10-25 Hitachi High-Tech Science Corporation Ion Beam Apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201837957A (en) 2017-02-15 2018-10-16 日商日立高新技術科學股份有限公司 Focused ion beam apparatus
US20180308658A1 (en) 2017-04-19 2018-10-25 Hitachi High-Tech Science Corporation Ion Beam Apparatus

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