TWI912185B - Warpage detection device - Google Patents

Abstract

A warpage detection device includes a light-emitting platform with a carrying surface, a light-shielding member disposed on the carrying surface and having a light-shielding area, and a photosensitive device configured corresponding to the light-shielding member, so that when a target object is placed on the carrying surface, the light-emitting platform illuminates the target object, and the photosensitive device detects the light outside the light-shielding area. If a light-transmitting area encircled by the target object is formed outside the light-shielding area, the photosensitive device captures a light from the light-transmitting area, and the warpage detection device determines that a warping degree of the target object is unqualified.

Description

Warp detection device

This invention relates to a detection technique, and more particularly to a warp detection device for easily detecting the warp state of sheet materials.

To meet the high integration and miniaturization requirements of semiconductor devices, ensuring the flatness and accuracy of the substrates used to carry the chips is crucial for normal operation and reliability during semiconductor product manufacturing. This is especially true for inspecting warpage at the time of shipment. Furthermore, with increasing substrate demand and production volume, rapid screening methods are needed to improve inspection efficiency.

The mainstream method for measuring the warpage of a substrate is the Shadow Moire measurement system. This system uses a vertical light source to illuminate the substrate, then receives and analyzes the reflected signal to calculate the warpage. However, the Shadow Moire system is expensive, making it difficult to reduce testing costs. Furthermore, the analysis time is lengthy, and there are specific limitations on the size of the substrate being measured. This necessitates that the substrate design be adapted to the Shadow Moire system, thus creating a developmental dilemma in substrate design.

Therefore, the industry has adopted inexpensive pin gauges, which manually measure warpage using a gap gauge. However, this method has a larger error margin and higher labor and time costs. Furthermore, when the gap gauge is in direct contact with the front side of the substrate (layout/crystal plane), it can easily damage the substrate, significantly increasing the risk of substrate damage.

Therefore, overcoming the various problems associated with the aforementioned learning techniques has become an urgent issue that needs to be addressed.

In view of the various deficiencies of the prior art, the present invention provides a warping detection device, comprising: a working platform, which is a light-emitting platform having a supporting surface for placing and illuminating at least one target object, such as a sheet material; a light-shielding member erected on the supporting surface and having a light-shielding area adjacent to the supporting surface; and a sensing assembly comprising at least one photosensor corresponding to the light-shielding member, which detects light outside the light-shielding area.

In one specific embodiment, the work platform includes a platform body having the bearing surface and a light-emitting element disposed on another surface opposite the bearing surface. The platform body is made of a light-transmitting material so that the light-emitting element illuminates the target object.

In one specific embodiment, the warpage detection device may further include limiting members disposed on the support surface and located on opposite sides of the support surface, respectively, so that the limiting members and the light-shielding member clamp the target object. For example, a track structure is disposed on the support surface to allow the limiting members to move linearly along the track structure. Furthermore, at least one correction member is disposed above the support surface to keep the surface of the limiting member parallel to the light-shielding member during the movement of the limiting member.

In one specific embodiment, the light-shielding member is a plate made of a light-transmitting material, and the light-shielding area of the light-shielding member has a strip of opaque material formed therein.

In one specific embodiment, the shading area has a target height relative to the load-bearing surface, and this target height is the maximum permissible warpage of the target object.

In one specific embodiment, the sensing array further includes at least one indicator that is communicatively connected to the photosensor. For example, the indicator may be a light-type indicator.

In a specific embodiment, when the target object appears outside the light-blocking area, the target object will outline a light-transmitting area. Light from the work platform illuminating the target object passes through this light-transmitting area, and the photosensor detects the light in this area, indicating that the target object's warping is too excessive and therefore unacceptable.

As can be seen from the above, the warp detection device of this invention mainly uses the cooperation of the light-shielding component and the photosensitive sensor to screen the degree of warp of the target object. It not only has a simple structure and is easy to install, but also uses existing standard sensor modules, thus facilitating the inexpensive procurement of these modules and reducing detection costs.

Furthermore, the design of this photosensitive sensor allows for rapid analysis of whether the warp degree of the target object meets the requirements. Therefore, compared to prior art, the warp detection device of this invention employs automated analysis, resulting in extremely short analysis time, significantly reducing time costs, and minimal error. This meets the need for rapid screening of whether the warp degree of a product is acceptable.

Furthermore, by utilizing the movable design of the limiting member, its position can be adjusted to match the size of the target object. Therefore, compared to the conventional Shadow Moire measurement system, the warp detection device of this invention can detect the dimensions of various carrier plates, thus avoiding the development dilemmas in carrier plate design caused by size limitations.

Furthermore, the limiting member only contacts the side of the target object, thus avoiding damage to the front of the target object. Therefore, compared to conventional plug gauges, the warp detection device of this invention can reduce the risk of damage to the carrier board.

1: Warp Detection Device

10: Work Platform

10a: Load-bearing surface

100: Platform Body

101: Light-emitting components

11: Sunshade components

110: Scale line

12: Sensing Group

120: Image sensor

121, 122: Indicators

13: Limiting components

130: Guide slot

14: Track Structure

140: Rails

141: Support Plate

15: Calibration parts

9: Target

A: Shaded area

E: Transparent area

H: Target Height

L: Detection Altitude

S: Accommodation space

X, Y, Z: Arrow direction (The arrow points are X, Y, and Z.)

Figure 1 is a three-dimensional perspective view of the warp detection device of this invention.

Figure 2 is a side plan view showing the warp detection device of this invention in a qualified state during use.

Figure 3 is a side plan view of the warp detection device of this invention in a non-conforming state during use.

The following specific examples illustrate the implementation of this invention. Those skilled in the art can easily understand the other advantages and effects of this invention from the content disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc., shown in the accompanying drawings are only for the purpose of assisting those familiar with the technology in understanding and reading the content disclosed in the manual, and are not intended to limit the implementation of the invention. Therefore, they have no substantive technical significance. Any modifications to the structure, changes in the proportions, or adjustments to the size, without affecting the effectiveness and purpose of the invention, should still fall within the scope of the technical content disclosed in the invention. Furthermore, the terms used in this specification, such as "above," "below," "left," "right," "front," "back," "first," "second," "one," "two," and "five," are merely for clarity of description and are not intended to limit the scope of this invention. Any changes or adjustments to these relative relationships, without substantial alteration to the technical content, shall also be considered within the scope of this invention.

Figure 1 is a three-dimensional perspective view of the warp detection device 1 of the present invention. As shown in Figure 1, the warp detection device 1 is used for rapid screening of the warp state of semiconductor manufacturing materials. It includes a work platform 10 with a bearing surface 10a, a light-shielding member 11 erected on the bearing surface 10a, and a sensing assembly 12 corresponding to the light-shielding member 11.

In this embodiment, the warpage detection device 1 is based on the bearing surface 10a, defining the front and rear directions (e.g., arrow direction X) and left and right directions (e.g., arrow direction Y), and defining the direction perpendicular to the bearing surface 10a as the up and down directions (e.g., arrow direction Z). It should be understood that these orientations are used to illustrate the configuration of this embodiment and are not particularly limiting.

The work platform 10 is a light-emitting platform, and its bearing surface 10a is used to place and illuminate at least one target object 9, such as a sheet material.

In this embodiment, the work platform 10 includes a platform body 100 having the bearing surface 10a (the top surface as shown in the figure) and a light-emitting element 101 disposed on another surface opposite the bearing surface 10a (the bottom surface as shown in the figure) to illuminate the target object 9. For example, the light-emitting element 101 can emit uniform light to serve as a backlight, and the platform body 100 is made of a light-transmitting material (such as a transparent material) to form a rectangular stage, which can not only homogenize the light source so that the light from the light-emitting element 101 can be uniformly dispersed and penetrate the platform body 100, but also has a heat dissipation function. Furthermore, the illumination area of the luminescent element 101 can be controlled to be limited to the area of the bearing surface 10a in front of the sensing assembly 12, or the platform body 100 behind the light-shielding element 11 can be made to block light from passing through. For example, the platform body 100 can be processed to form an opaque material, such as black material, on the surface of the platform body 100 within the stated area to block light.

Furthermore, a limiting member 13 is disposed on the bearing surface 10a, which, along with the light-shielding member 11, is respectively located on opposite sides of the bearing surface 10a (the front and rear sides as shown in the figure). This allows the limiting member 13 to abut against the target object 9, thereby pressing and fixing the target object 9 in place. For example, the limiting member 13 may be a rectangular clamping plate made of a light-transmitting material, which clamps the target object 9 together with the light-shielding member 11.

Furthermore, the limiting member 13 is movable, and it moves linearly toward the light-shielding member 11 in the arrow direction X. For example, a track structure 14 can be configured on the bearing surface 10a to allow the limiting member 13 to move linearly along the track structure 14.

Furthermore, the track structure 14 includes at least one rail 140 disposed on the other two opposite sides (left and right sides as shown in the figure) of the bearing surface 10a, and the limiting member 13 has a guide groove 130 corresponding to the rail 140, so that the rail 140 is engaged in the guide groove 130 and slides relative to the guide groove 130. Preferably, the track structure 14 may include two support plates 141, mounted on opposite sides of the bearing surface 10a (as shown in the figure, the left and right sides), with four rails 140 arranged on the upper and lower edges of the support plates 141. Guide grooves 130 are provided at the four corners of the limiting member 13 to connect to the track structure 14, allowing for stable linear forward and backward displacement and preventing swaying during movement. For example, the support plate 141 may be a rectangular plate made of a light-transmitting material, and the rails 140 may be guide edges.

Additionally, at least one alignment member 15 can be disposed above the bearing surface 10a to ensure that the surface of the limiting member 13 remains parallel to the light-shielding member 11 during the movement of the limiting member 13. For example, the alignment member 15 can be a right-angle bracket, with one side forming a right angle positioned on a reference surface (such as the bearing surface 10a or the support plate 141), and the other side forming the right angle abutting against the limiting member 13 to ensure that the limiting member 13 firmly presses against the target object 9.

The target material 9 refers to wafers, carriers used to support semiconductor wafers (such as substrates, bonding pads, silicon interposers, or other carriers), or other substrates, without particular limitation.

The light-shielding member 11 has a light-shielding area A adjacent to the supporting surface 10a, and the light-shielding area A has a target height H relative to the supporting surface 10a, as shown in Figure 2. This height H is designed according to the maximum permissible warpage of the target object 9, as customized.

In this embodiment, the light-shielding member 11 is a rectangular plate made of light-transmitting material, with the support plate 141 connected to its opposite sides. For example, the light-shielding member 11, the limiting member 13, and the support plate 141 form an accommodating space S, and one end (rear end) of the rail 140 can be fixed to the light-shielding member 11.

Furthermore, the light-shielding area A is a rectangular strip formed on the light-shielding member 11 using an opaque material such as black. For example, scale lines 110 can be formed next to the light-shielding area A (as shown in the figure, provided on the support plate 141) to quantify the test results, so as to differentiate the requirements of the different targets 9 being screened.

The sensing assembly 12 includes at least one photosensor 120 corresponding to the light-shielding member 11, with its detection height L higher than the target height H, as shown in Figure 2, to detect light outside the light-shielding area A.

In this embodiment, the photosensor 120 is communicatively connected to a terminal computer (not shown), and in use, the light-blocking area A is located between the target object 9 and the photosensor 120. For example, in use, the target object 9 is located within the accommodating space S, while the photosensor 120 is located outside the accommodating space S.

Furthermore, the sensing range of the photosensor 120 corresponds to the distribution range of the shaded area A, so as to completely detect light outside the shaded area A. For example, the shaded area A may correspond to the arrangement of multiple (five) photosensors 120.

Furthermore, the sensor assembly 12 also includes at least one indicator 121, 122 that is communicatively connected to the photosensor 120. For example, the indicators 121, 122 are lamp-type, used to represent whether the warping degree of the target object 9 is normal by turning the lamp on/off. Further, the sensor assembly 12 includes two indicators 121, 122 that use different wavelengths of color for easy differentiation, forming more light signal combinations (e.g., on/off, off/on, on/on, off/off) for filtering target objects 9 that have acceptable or unacceptable warping degrees.

Therefore, in use, firstly, the light-emitting element 101, the photosensor 120, and the two indicators 121 and 122 are turned on. In the initial state, the indicator light of one indicator 121 is lit, serving as the first indicator light, while the indicator light of the other indicator 122 is off, serving as the second indicator light.

Next, the target object 9 is placed on the platform body 100 (or in the accommodating space S), so that the target object 9 is in an upwardly arched shape, and one side (rear side) of the target object 9 is in close contact with the light-shielding member 11, so that the light-shielding area A is located between the target object 9 and the photosensor 120.

Then, the limiting member 13 is slowly moved along the track structure 14 toward the light-shielding member 11, while the corrector 15 ensures that the limiting member 13 is pushed toward the target object 9 at a parallel angle until the limiting member 13 contacts and clamps the target object 9.

Finally, the photosensor 120 performs a sensing action so that the user can read the status of the indicator lights 122.

In this embodiment, when the warping of the target object 9 is excessive and unacceptable, a light-transmitting area E, circled by the side arc projection of the target object 9, will appear above the light-blocking area A, as shown in Figure 3. The light emanating from the light-emitting element 101 illuminates the target object 9 through the light-transmitting area E, allowing the photosensor 120 to capture the light from the target object 9 and the light-transmitting area E. At this time, the indicator lights of the indicators 122 remain unchanged; that is, the indicator light of the first indicator (indicator 121) remains lit, while the indicator light of the second indicator (indicator 122) remains off. Therefore, the user can classify the target object 9 as a defective product.

Conversely, if the warping degree of the target object 9 meets the requirements and is qualified, the light-blocking area A will completely block the side arched projection of the target object 9, as shown in Figure 2, preventing the photosensor 120 from capturing the additional light pattern. At this time, the status of the indicator lights 122 will change; that is, the indicator light of the first indicator (indicator 121) will turn off, while the indicator light of the second indicator (indicator 122) will light up. Therefore, the user can classify the target object 9 as a good product.

It should be understood that the signal lights of indicators 121 and 122 can vary in many ways, and are not limited to those described above.

In summary, the warp detection device 1 of this invention, through the cooperation of the light-shielding member 11 and the sensor assembly 12, can screen the degree of warp of the target object 9. It not only has a simple structure and is easy to install, but also uses a sensor assembly 12 of existing specifications, thus facilitating the inexpensive procurement of the sensor assembly 12 and reducing detection costs.

Furthermore, by utilizing the light detection results and light response of the sensor group 12, the warp degree of the target object 9 can be quickly analyzed to determine whether it meets the requirements. Therefore, compared to prior art, the warp detection device 1 of this invention employs automated analysis, which not only significantly reduces time costs due to its extremely short analysis time but also minimizes errors, thus meeting the need for rapid screening of whether the warp degree of a product is acceptable.

Furthermore, by utilizing the movable design of the limiting member 13, its position can be adjusted to match the size of the target object 9. Therefore, compared to the conventional Shadow Moire measurement system, the warp detection device 1 of this invention can detect the dimensions of various carrier plates, thus avoiding the development difficulties in carrier plate design caused by size limitations.

Furthermore, the limiting member 13 only contacts the side of the target object 9 (such as a carrier plate), thus avoiding damage to the front surface (i.e., the top and bottom surfaces) of the target object 9. Therefore, compared to conventional pin gauges, the warp detection device 1 of this invention can reduce the risk of carrier plate damage.

The foregoing embodiments are illustrative of the principles and effects of the present invention and are not intended to limit the invention. Any person skilled in the art may modify the foregoing embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be as set forth in the patent application section below.

1: Warp Detection Device

10: Work Platform

10a: Load-bearing surface

100: Platform Body

101: Light-emitting components

11: Sunshade components

110: Scale line

12: Sensing Group

120: Image sensor

121, 122: Indicators

13: Limiting components

130: Guide slot

14: Track Structure

140: Rails

141: Support Plate

15: Calibration parts

9: Target

A: Shaded area

S: Accommodation space

X, Y, Z: Arrow direction (The arrow points are X, Y, and Z.)

Claims (10)

A warpage detection device includes: The work platform is a luminescent platform with a support surface for placing and illuminating at least one target object, such as a sheet material. A light-shielding member is erected on the bearing surface and has a light-shielding area adjacent to the bearing surface; and The sensing array includes at least one photosensor corresponding to the light-shielding element, which detects light outside the light-shielding area. As described in claim 1, the warp detection device includes a platform body having the bearing surface and a light-emitting element disposed on another surface opposite the bearing surface, wherein the platform body is made of a light-transmitting material so that the light-emitting element illuminates the target object. The warpage detection device as described in claim 1 further includes a limiting member disposed on the bearing surface and located on opposite sides of the bearing surface as well as the light-shielding member, such that the limiting member and the light-shielding member clamp the target object. The warpage detection device as described in claim 3, wherein a track structure is disposed on the bearing surface to allow the limiting member to displace linearly along the track structure. The warpage detection device as described in claim 4, wherein at least one alignment member is disposed above the bearing surface to keep the surface of the limiting member parallel to the light-shielding member during movement of the limiting member. As described in claim 1, in the warp detection device, the light-shielding member is a plate made of a light-transmitting material, and the light-shielding area of the light-shielding member has a strip of opaque material formed therein. The warpage detection device as described in claim 1, wherein the shading area has a target height relative to the load-bearing surface, and the target height is the maximum permissible warpage of the target object. The warp detection device as described in claim 1, wherein the sensor array further includes at least one indicator that is communicatively connected to the photosensitive sensor. The warpage detection device as described in claim 8, wherein the indicator is a lamp type. As described in claim 1, in the warpage detection device, when the target object appears outside the light-blocking area, the target object will circle a light-transmitting area. Light illuminating the target object from the work platform passes through this light-transmitting area, and the photosensor detects the light in the light-transmitting area, indicating that the warpage of the target object is too excessive and therefore unqualified.