[go: up one dir, main page]

TWI912155B - Circuit board and method for fabricating the same - Google Patents

Circuit board and method for fabricating the same

Info

Publication number
TWI912155B
TWI912155B TW114108410A TW114108410A TWI912155B TW I912155 B TWI912155 B TW I912155B TW 114108410 A TW114108410 A TW 114108410A TW 114108410 A TW114108410 A TW 114108410A TW I912155 B TWI912155 B TW I912155B
Authority
TW
Taiwan
Prior art keywords
layer
circuit
magnetic material
conductive
material layer
Prior art date
Application number
TW114108410A
Other languages
Chinese (zh)
Inventor
李成佳
Original Assignee
大陸商宏啟勝精密電子(秦皇島)有限公司
大陸商鵬鼎控股(深圳)股份有限公司
鵬鼎科技股份有限公司
Filing date
Publication date
Application filed by 大陸商宏啟勝精密電子(秦皇島)有限公司, 大陸商鵬鼎控股(深圳)股份有限公司, 鵬鼎科技股份有限公司 filed Critical 大陸商宏啟勝精密電子(秦皇島)有限公司
Application granted granted Critical
Publication of TWI912155B publication Critical patent/TWI912155B/en

Links

Abstract

A circuit board and a method for fabricating the same are provided. The circuit board includes two wire boards. The wire boards are opposite to each other, and a spacing layer is located between the wire boards. Each wire board includes a circuit layer and a magnetic material layer disposed on the circuit layer. The magnetic material layer has a first magnetic pole and a second magnetic pole. The first magnetic pole is located between the circuit layer and the second magnetic pole, and the magnetic material layer of one of the wire boards faces to the magnetic material layer of the other one of the wire boards. A repulsive force is formed between the second magnetic poles of the magnetic material layers.

Description

電路板及其製造方法Circuit board and its manufacturing method

本發明是有關於一種電路板,特別是指一種多層板電路板。This invention relates to a circuit board, and more particularly to a multilayer circuit board.

現今多層板電路板結構中的層數大於或者等於四層,而各層之間是依靠接合膠層及導電銅層分別進行結構的連接以及電性連接。然而,由於上述結構連接的限制,使得層與層之間無法達成相對位移。在多功能化終端電子產品趨勢下,這種結構將大幅限制多層板功能的應用。Modern multilayer circuit boards typically have four or more layers, with each layer connected structurally and electrically via adhesive layers and conductive copper layers. However, this structural limitation prevents relative displacement between layers. In the trend towards multifunctional terminal electronic products, this structure will significantly restrict the application of multilayer board functions.

因此,本發明提供了一種電路板,藉以實現電路板中相鄰兩層之間的相對位移。Therefore, the present invention provides a circuit board for realizing relative displacement between two adjacent layers in the circuit board.

本發明至少一實施例還提供一種製造上述電路板的方法。At least one embodiment of the present invention also provides a method for manufacturing the aforementioned circuit board.

本發明至少一實施例提供一種電路板,包含兩個線路基板。線路基板彼此相對設置,且線路基板之間具有一間隙層,每一個線路基板包含一線路層以及設置於線路層上的一磁性材料層,且磁性材料層具有極性相反的一第一磁極以及一第二磁極。第一磁極位於線路層以及第二磁極之間,且線路基板的其中一者的磁性材料層面對另一線路基板的磁性材料層,而磁性材料層其中一者的第二磁極以及另一磁性材料層的第二磁極之間形成一排斥力。At least one embodiment of the present invention provides a circuit board comprising two circuit substrates. The circuit substrates are disposed opposite to each other, and a gap layer is provided between the circuit substrates. Each circuit substrate includes a circuit layer and a magnetic material layer disposed on the circuit layer, and the magnetic material layer has a first magnetic pole and a second magnetic pole with opposite polarities. The first magnetic pole is located between the circuit layer and the second magnetic pole, and the magnetic material layer of one circuit substrate faces the magnetic material layer of the other circuit substrate, while a repulsive force is formed between the second magnetic pole of one magnetic material layer and the second magnetic pole of the other magnetic material layer.

本發明還提供了一種電路板的製造方法,包含提供一絕緣基板;在絕緣基板上形成一導電層;在導電層上形成一第一磁性材料層,且第一磁性材料層具有極性相反的一第一磁極以及一第二磁極,第一磁極位於導電層以及第二磁極之間;在第一磁性材料層上形成一可移除材料,其中第一磁性材料層位於導電層以及可移除材料之間;在可移除材料上形成一第二磁性材料層,可移除材料位於第二磁性材料層以及第一磁性材料層之間;在第二磁性材料層上形成一第一線路層,第二磁性材料層位於第一線路層以及可移除材料之間;在形成第一線路層之後,在第一磁性材料層、可移除材料以及第二磁性材料層中形成多個柔性導電結構,柔性導電結構電性連接至導電層。This invention also provides a method for manufacturing a circuit board, comprising providing an insulating substrate; forming a conductive layer on the insulating substrate; forming a first magnetic material layer on the conductive layer, wherein the first magnetic material layer has a first magnetic pole and a second magnetic pole with opposite polarities, the first magnetic pole being located between the conductive layer and the second magnetic pole; forming a removable material on the first magnetic material layer, wherein the first magnetic material layer is located between the conductive layer and the removable material; A second magnetic material layer is formed on the removable material, with the removable material located between the second magnetic material layer and the first magnetic material layer; a first circuit layer is formed on the second magnetic material layer, with the second magnetic material layer located between the first circuit layer and the removable material; after forming the first circuit layer, multiple flexible conductive structures are formed in the first magnetic material layer, the removable material, and the second magnetic material layer, and the flexible conductive structures are electrically connected to the conductive layers.

基於上述,本發明至少一實施例通過磁性材料層中的相反磁極來提供一排斥力,使兩層線路基板彼此之間不直接接觸,但通過柔性連接結構連接(包含電性連接)兩線路基板。如此,可以在未影響兩線路基板之間的電性連接下,使線路基板其中一者因外力產生的位移或變形不會帶動另一線路基板,進而提供電路板內部元件(例如,線路基板)相對位移的可行性。Based on the above, at least one embodiment of the present invention provides a repulsive force through opposite magnetic poles in the magnetic material layer, preventing the two circuit substrates from directly contacting each other, but connecting (including electrical connection) the two circuit substrates through a flexible connection structure. In this way, without affecting the electrical connection between the two circuit substrates, displacement or deformation of one circuit substrate due to external force will not drive the other circuit substrate, thereby providing the feasibility of relative displacement of internal components (e.g., circuit substrates) of the circuit board.

本發明將以下列實施例進行詳細說明。須注意的是, 以下本發明實施例的敘述在此僅用於舉例說明, 並非旨在詳盡無遺地揭示所有實施態樣或是限制本發明的具體實施態樣。舉例而言,敘述中之「第一特徵形成於第二特徵上」包含多種實施方式,其中涵蓋第一特徵與第二特徵直接接觸,亦涵蓋額外的特徵形成於第一特徵與第二特徵之間而使兩者不直接接觸。此外,圖式及說明書中所採用的相同元件符號會盡可能表示相同或相似的元件。This invention will be described in detail with reference to the following embodiments. It should be noted that the descriptions of the embodiments below are for illustrative purposes only and are not intended to reveal all embodiments exhaustively or to limit the specific embodiments of the invention. For example, the phrase "the first feature is formed on the second feature" includes multiple embodiments, covering situations where the first and second features are in direct contact, and situations where additional features are formed between the first and second features so that they are not in direct contact. Furthermore, the same element symbols used in the drawings and specifications will, to the extent possible, represent the same or similar elements.

空間相對的詞彙,例如「下層的」、「低於」、「下方」、「高於」、「上方」等相關詞彙,於此用以簡單描述如圖所示之元件或特徵與另一元件或特徵的關係。這些空間相對的詞彙除了圖中所描繪的轉向之外,也涵蓋在使用或操作裝置時的不同的轉向。此外,當元件可旋轉(旋轉90度或其他角度)時,在此使用之空間相對的描述語也可作對應的解讀。Spatially relative terms, such as "lower," "below," "below," "above," and "above," are used here to briefly describe the relationship between one component or feature as shown in the diagram and another component or feature. These spatially relative terms cover not only the rotation depicted in the diagram but also different rotations during the use or operation of the device. Furthermore, when the component can be rotated (rotated 90 degrees or other angles), the spatially relative descriptive terms used here can also be interpreted accordingly.

更甚者,當以「大約」、「約」等描述一數字或一數字範圍時,該詞彙旨在涵蓋合理範圍內之數字,且須考量到本領域的基本技術人員在製造過程中,所能理解之自然差異。數字範圍涵蓋包含所描述之數字的合理範圍,舉例而言,在所描述之數字的+/-10%內,是基於已知之製造公差,該公差數字與該製造特徵具備之特性有關。例如,具有「大約5奈米」厚度的材料層可以涵蓋從4.25奈米至5.75奈米之尺寸範圍,其中關於沉積該材料層的製造公差+/-15%,皆為本領域的基本技術人員所知 。 進一步而言,本發明可能會在各種示例中重複標號以及/或標示。此重複是為了簡化並清楚說明,而非意圖表明該處所討論的各種實施方式以及/或配置之間的關係。Furthermore, when using terms such as "approximately" or "about" to describe a number or a range of numbers, the term is intended to cover a reasonable range of numbers and must take into account the natural differences that a person skilled in the art would understand during the manufacturing process. A range of numbers covers a reasonable range including the number being described; for example, within +/-10% of the described number is based on known manufacturing tolerances that relate to the characteristics of the manufacturing feature. For instance, a material layer with a thickness of "approximately 5 nanometers" can cover a size range from 4.25 nanometers to 5.75 nanometers, where a manufacturing tolerance of +/-15% for depositing that material layer is known to a person skilled in the art. Furthermore, this invention may repeat reference numerals and/or designations in various examples. This repetition is for simplification and clarity, and is not intended to indicate the relationship between the various implementation methods and/or configurations discussed herein.

本發明提供一種電路板100。請參考圖1,電路板100包含線路基板110與線路基板120以及柔性連接結構130。線路基板110與線路基板120彼此相對設置,且線路基板110以及線路基板120之間具有間隙層150。每一個線路基板包含一線路層以及一磁性材料層。詳細來說,線路基板110包含線路層112以及磁性材料層114,而線路基板120包含線路層122以及磁性材料層124。This invention provides a circuit board 100. Referring to FIG1, the circuit board 100 includes a circuit substrate 110 and a circuit substrate 120, and a flexible connection structure 130. The circuit substrate 110 and the circuit substrate 120 are disposed opposite to each other, and a gap layer 150 is provided between the circuit substrate 110 and the circuit substrate 120. Each circuit substrate includes a circuit layer and a magnetic material layer. Specifically, the circuit substrate 110 includes a circuit layer 112 and a magnetic material layer 114, while the circuit substrate 120 includes a circuit layer 122 and a magnetic material layer 124.

磁性材料層114設置於線路層112上,且磁性材料層114具有極性相反的第一磁極114S以及第二磁極114N。另一方面,磁性材料層124設置於線路層122上,且磁性材料層124也具有極性相反的第一磁極124S以及第二磁極124N。第一磁極114S位於線路層112以及第二磁極114N之間,而第一磁極124S則位於線路層122以及第二磁極124N之間。A magnetic material layer 114 is disposed on the circuit layer 112, and the magnetic material layer 114 has a first magnetic pole 114S and a second magnetic pole 114N with opposite polarities. On the other hand, a magnetic material layer 124 is disposed on the circuit layer 122, and the magnetic material layer 124 also has a first magnetic pole 124S and a second magnetic pole 124N with opposite polarities. The first magnetic pole 114S is located between the circuit layer 112 and the second magnetic pole 114N, while the first magnetic pole 124S is located between the circuit layer 122 and the second magnetic pole 124N.

特別一提的是,線路基板110的磁性材料層114面對線路基板120的磁性材料層124。換言之,磁性材料層114以及磁性材料層124位於線路層112以及線路層122之間,且磁性材料層114的第二磁極114N面對磁性材料層124的第二磁極124N。由於第一磁極114S以及第一磁極124S的磁性相反於第二磁極114N以及第二磁極124N,故第二磁極114N以及第二磁極124N兩者之間形成一排斥力RF1。It is worth mentioning that the magnetic material layer 114 of the circuit substrate 110 faces the magnetic material layer 124 of the circuit substrate 120. In other words, the magnetic material layers 114 and 124 are located between the circuit layers 112 and 122, and the second magnetic pole 114N of the magnetic material layer 114 faces the second magnetic pole 124N of the magnetic material layer 124. Since the magnetism of the first magnetic poles 114S and 124S is opposite to that of the second magnetic poles 114N and 124N, a repulsive force RF1 is formed between the second magnetic poles 114N and 124N.

磁性材料層114以及磁性材料層124可以包含磁性薄膜材料(magnetic thin film material),此磁性薄膜材料可以是厚度在1µm以下的強磁性材。舉例來說,可以包含例如鐵氧體薄膜材料等鐵磁性材料或者亞鐵磁性材料,其中鐵氧體薄膜材料可以是由鐵、氧以及其他金屬元素(例如,鋅、鎳、錳、鈷等)通過特定製程而形成的薄膜形態。Magnetic material layers 114 and 124 may contain magnetic thin film material, which may be a strongly magnetic material with a thickness of less than 1µm. For example, it may contain ferromagnetic or ferrimagnetic materials such as ferrite thin film material, wherein the ferrite thin film material may be a thin film formed by iron, oxygen and other metallic elements (e.g., zinc, nickel, manganese, cobalt, etc.) through a specific process.

除此之外,線路基板110還包含一層導電層115、一絕緣基板116以及一層接合層118。導電層115設置於磁性材料層114以及線路層112之間,絕緣基板116設置於線路層112以及導電層115之間,而接合層118設置於絕緣基板116以及磁性材料層114之間。另一方面,線路基板120則包含一層接合層128,此接合層128設置於線路層122上,且線路層122位於磁性材料層124以及接合層128之間。In addition, the circuit substrate 110 also includes a conductive layer 115, an insulating substrate 116, and a bonding layer 118. The conductive layer 115 is disposed between the magnetic material layer 114 and the circuit layer 112, the insulating substrate 116 is disposed between the circuit layer 112 and the conductive layer 115, and the bonding layer 118 is disposed between the insulating substrate 116 and the magnetic material layer 114. On the other hand, the circuit substrate 120 includes a bonding layer 128, which is disposed on the circuit layer 122, and the circuit layer 122 is located between the magnetic material layer 124 and the bonding layer 128.

在本實施例中,線路基板110的導電層115可以包含銅或者類似的金屬材料。絕緣基板116可以包含例如聚醯亞胺(polyimide;PI)或類似的絕緣材料。接合層118以及接合層128可以包含例如環氧樹脂膠或類似的絕緣接著材料。In this embodiment, the conductive layer 115 of the circuit substrate 110 may comprise copper or a similar metallic material. The insulating substrate 116 may comprise, for example, polyimide (PI) or a similar insulating material. The bonding layer 118 and bonding layer 128 may comprise, for example, epoxy resin or a similar insulating bonding material.

柔性連接結構130設置於線路基板110以及線路基板120之間,並且連接線路基板110以及線路基板120。線路基板110通過柔性連接結構130而電性連接至線路基板120。詳細來說,柔性連接結構130的兩端分別連接線路基板110的線路層112以及線路基板120的線路層122,以在線路層112以及線路層122之間形成電性連接。A flexible connection structure 130 is disposed between and connects the circuit substrate 110 and the circuit substrate 120. The circuit substrate 110 is electrically connected to the circuit substrate 120 through the flexible connection structure 130. Specifically, the two ends of the flexible connection structure 130 are respectively connected to the circuit layer 112 of the circuit substrate 110 and the circuit layer 122 of the circuit substrate 120, so as to form an electrical connection between the circuit layer 112 and the circuit layer 122.

柔性連接結構130分布於間隙層150,且柔性連接結構130還包含導電材料135以及接合層138。導電材料135連接線路基板110以及線路基板120,且線路基板110的線路層112通過導電材料135連接至線路基板120的線路層122。接合層138包覆於導電材料135的外表面135s,並且完全覆蓋此外表面135s,以將導電材料135與間隙層150隔絕。導電材料135可以包含銅或者類似的金屬材料,而接合層138則可以包含環氧樹脂膠或類似的絕緣接著材料。A flexible connection structure 130 is distributed in the gap layer 150, and the flexible connection structure 130 further includes a conductive material 135 and a bonding layer 138. The conductive material 135 connects the circuit substrate 110 and the circuit substrate 120, and the circuit layer 112 of the circuit substrate 110 is connected to the circuit layer 122 of the circuit substrate 120 through the conductive material 135. The bonding layer 138 covers the outer surface 135s of the conductive material 135 and completely covers the outer surface 135s to isolate the conductive material 135 from the gap layer 150. The conductive material 135 may contain copper or a similar metal material, while the bonding layer 138 may contain epoxy resin or a similar insulating bonding material.

在本實施例中,電路板100還包括電子元件160以及柔性導電結構170。電子元件160設置於線路基板120上,且線路基板120位於電子元件160以及線路基板110之間。詳細來說,電子元件160設置於線路基板120的接合層128上,其中接合層128位於電子元件160以及線路層122之間。In this embodiment, the circuit board 100 further includes an electronic component 160 and a flexible conductive structure 170. The electronic component 160 is disposed on a circuit substrate 120, and the circuit substrate 120 is located between the electronic component 160 and the circuit substrate 110. More specifically, the electronic component 160 is disposed on a bonding layer 128 of the circuit substrate 120, wherein the bonding layer 128 is located between the electronic component 160 and the circuit layer 122.

柔性導電結構170設置於線路基板110以及電子元件160之間。如圖1所示,柔性導電結構170自線路基板120通過間隙層150,並且延伸至線路基板110中的導電層115,且電子元件160通過柔性導電結構170電性連接至線路基板110(以及/或者線路基板120)。A flexible conductive structure 170 is disposed between the circuit substrate 110 and the electronic component 160. As shown in FIG1, the flexible conductive structure 170 extends from the circuit substrate 120 through the gap layer 150 and to the conductive layer 115 in the circuit substrate 110, and the electronic component 160 is electrically connected to the circuit substrate 110 (and/or the circuit substrate 120) through the flexible conductive structure 170.

特別一提的是,電路板100還包含多個接墊102以及多個焊接材料(未繪示),這些接墊102設置於線路基板120的接合層128以及電子元件160之間,而焊接材料則設置於接墊102以及電子元件160之間。電子元件160可以通過焊接材料連接至接墊102,並且通過接墊102而連接至柔性導電結構170。也就是說,電子元件160可以通過焊接材料以及接墊102而電性連接至柔性導電結構170。Notably, the circuit board 100 also includes multiple pads 102 and multiple solder materials (not shown). The pads 102 are disposed between the bonding layer 128 of the circuit board 120 and the electronic components 160, while the solder materials are disposed between the pads 102 and the electronic components 160. The electronic components 160 can be connected to the pads 102 via the solder materials and, in turn, to the flexible conductive structure 170 via the pads 102. That is, the electronic components 160 can be electrically connected to the flexible conductive structure 170 via the solder materials and the pads 102.

請參考圖2,在另一實施例中,電路板100還可以包含電子元件180。電子元件180設置於線路基板110上,並且電性連接至線路基板110。線路基板110位於電子元件160以及電子元件180之間。電子元件160以及電子元件180可以是例如電晶體的主動元件,也可以是例如電容及電感等被動元件。此外,在其他實施例中,電子元件160也可以通過例如打件(wire bonding)的方式電性連接至線路基板120。Referring to Figure 2, in another embodiment, the circuit board 100 may further include an electronic component 180. The electronic component 180 is disposed on and electrically connected to the circuit substrate 110. The circuit substrate 110 is located between the electronic component 160 and the electronic component 180. The electronic component 160 and the electronic component 180 can be active components such as transistors, or passive components such as capacitors and inductors. Furthermore, in other embodiments, the electronic component 160 may also be electrically connected to the circuit substrate 120 by means such as wire bonding.

請回到圖1,線路基板110以及線路基板120還包含多個通孔TH1以及通孔TH2。這些通孔分布於線路層以及磁性材料層內,並且連通線路基板的相對兩側。詳細來說,通孔TH1位於線路層112以及磁性材料層114內,並且連通線路基板110的相對兩側,而通孔TH2位於線路層122以及磁性材料層124內,並且連通線路基板120的相對兩側。通孔TH1以及通孔TH2可以提供線路基板110以及線路基板120在相對位移的過程中釋放應力,以降低線路基板110以及線路基板120破損的可能性。Referring back to Figure 1, circuit substrates 110 and 120 also include multiple vias TH1 and TH2. These vias are distributed within the circuit layers and magnetic material layers, connecting opposite sides of the circuit substrates. Specifically, via TH1 is located within circuit layer 112 and magnetic material layer 114, connecting opposite sides of circuit substrate 110, while via TH2 is located within circuit layer 122 and magnetic material layer 124, connecting opposite sides of circuit substrate 120. Vias TH1 and TH2 can release stress on circuit substrates 110 and 120 during relative displacement, reducing the likelihood of damage to circuit substrates 110 and 120.

如圖1所示,電路板100還包含覆蓋層190。此覆蓋層190設置於線路基板110上。線路基板110位於覆蓋層190以及線路基板120之間,且覆蓋層190覆蓋於線路基板110的線路層112。覆蓋層190可以是(Coverlay;CVL),此外,電路板100還包含一保護層104,此保護層104設置於覆蓋層190上,且覆蓋層190位於保護層104以及線路基板110之間。As shown in Figure 1, the circuit board 100 further includes a cover layer 190. This cover layer 190 is disposed on the circuit substrate 110. The circuit substrate 110 is located between the cover layer 190 and the circuit substrate 120, and the cover layer 190 covers the circuit layer 112 of the circuit substrate 110. The cover layer 190 can be a coverlay (CVL). In addition, the circuit board 100 also includes a protective layer 104, which is disposed on the cover layer 190, and the cover layer 190 is located between the protective layer 104 and the circuit substrate 110.

請一併參考圖3A以及圖3B,繪示了本發明至少一實施例的電路板應用於電子模組的示意圖。如圖3A所示,電子模組30包含電路板100、第一模組元件301以及第二模組元件302。第一模組元件301以及第二模組元件302分別設置於電路板100的相對兩側,詳細來說,第一模組元件301設置於線路基板110上,而第二模組元件302設置於線路基板120上。線路基板110以及線路基板120位於第一模組元件301以及第二模組元件302之間。Please refer to Figures 3A and 3B together, which illustrate a schematic diagram of a circuit board according to at least one embodiment of the present invention applied to an electronic module. As shown in Figure 3A, the electronic module 30 includes a circuit board 100, a first module element 301, and a second module element 302. The first module element 301 and the second module element 302 are respectively disposed on opposite sides of the circuit board 100. Specifically, the first module element 301 is disposed on a circuit substrate 110, and the second module element 302 is disposed on a circuit substrate 120. The circuit substrates 110 and 120 are located between the first module element 301 and the second module element 302.

在本實施例中,第一模組元件301可以包含攝影機鏡頭,例如互補式金屬氧化物半導體(Complementary Metal Oxide Semiconductor;CMOS)攝影機鏡頭或者類似的元件,並且電性連接至線路基板120。另一方面,第二模組元件302可以包含攝影機鏡頭底板,並且電性連接至線路基板110。In this embodiment, the first module element 301 may include a camera lens, such as a complementary metal-oxide-semiconductor (CMOS) camera lens or a similar element, and is electrically connected to the circuit board 120. On the other hand, the second module element 302 may include a camera lens base plate and is electrically connected to the circuit board 110.

當電子模組30受到外力F1時,例如震動、搖擺等,第一模組元件301隨之發生位移。由於第一模組元件301與第二模組元件302之間是通過柔性連接結構130互相連接,故柔性連接結構130產生形變。如此,第二模組元件302不會受到第一受影響而位移或變形。換句話來說,雖然柔性連接結構130提供第一模組元件301以及第二模組元件302之間的連接(電性連接),但不影響第一模組元件301以及第二模組元件302位移的獨立性。When the electronic module 30 is subjected to an external force F1, such as vibration or swaying, the first module element 301 will displace accordingly. Since the first module element 301 and the second module element 302 are connected to each other through a flexible connection structure 130, the flexible connection structure 130 will deform. Thus, the second module element 302 will not be displaced or deformed by the first force. In other words, although the flexible connection structure 130 provides a connection (electrical connection) between the first module element 301 and the second module element 302, it does not affect the independence of the displacement of the first module element 301 and the second module element 302.

本發明至少一實施例提供一種電路板的製造方法,以電路板100為例,此製造方法可以包含如圖4A至圖4E所示的數個步驟。請參考圖4A,首先,提供絕緣基板116。接著,可以通過例如電鍍沉積、微影及蝕刻的方式,在絕緣基板116上形成導電層115。在形成導電層115之後,可以通過例如熱壓貼合的方式在導電層115上形成磁性材料層114。磁性材料層114具有極性相反的第一磁極114S以及第二磁極114N。如圖4A所示,第一磁極114S位於導電層115以及第二磁極114N之間。At least one embodiment of the present invention provides a method for manufacturing a circuit board. Taking circuit board 100 as an example, this method may include several steps as shown in Figures 4A to 4E. Referring to Figure 4A, firstly, an insulating substrate 116 is provided. Next, a conductive layer 115 can be formed on the insulating substrate 116 by means of, for example, electroplating, photolithography, and etching. After forming the conductive layer 115, a magnetic material layer 114 can be formed on the conductive layer 115 by means of, for example, hot pressing. The magnetic material layer 114 has a first magnetic pole 114S and a second magnetic pole 114N with opposite polarities. As shown in Figure 4A, the first magnetic pole 114S is located between the conductive layer 115 and the second magnetic pole 114N.

請參考圖4B,磁性材料層114上形成可移除材料405。磁性材料層114位於導電層115以及可移除材料405之間。可移除材料405可以包含例如聚碳酸乙烯酯(例如,QPAC)或類似的材料,並且可以通過例如熱分解的方式被移除。Referring to Figure 4B, a removable material 405 is formed on the magnetic material layer 114. The magnetic material layer 114 is located between the conductive layer 115 and the removable material 405. The removable material 405 may contain, for example, polyvinyl carbonate (e.g., QPAC) or a similar material, and can be removed by, for example, thermal decomposition.

接著,可以通過例如熱壓貼合的方式在可移除材料405上形成磁性材料層124。可移除材料405位於磁性材料層124以及磁性材料層114之間。接著,可以通過例如濺鍍沉積(sputtering)、微影及蝕刻的方式,在磁性材料層124上形成線路層122。磁性材料層124位於線路層122以及可移除材料405之間。Next, a magnetic material layer 124 can be formed on the removable material 405 by means such as hot pressing. The removable material 405 is located between the magnetic material layer 124 and the magnetic material layer 114. Next, a circuit layer 122 can be formed on the magnetic material layer 124 by means such as sputtering, photolithography, and etching. The magnetic material layer 124 is located between the circuit layer 122 and the removable material 405.

請參考圖4C,在形成線路層122之後,在磁性材料層114、可移除材料405以及磁性材料層124中形成多個柔性導電結構170,且這些柔性導電結構170電性連接至導電層115。特別一提的是,形成柔性導電結構170的方式包含:先通過雷射移除磁性材料層114、可移除材料405以及第二磁性材料層124的一部分,以形成多個開孔(未標示)。Referring to Figure 4C, after forming the circuit layer 122, multiple flexible conductive structures 170 are formed in the magnetic material layer 114, the removable material 405, and the magnetic material layer 124, and these flexible conductive structures 170 are electrically connected to the conductive layer 115. Notably, the flexible conductive structures 170 are formed by first removing a portion of the magnetic material layer 114, the removable material 405, and the second magnetic material layer 124 by laser to form multiple openings (not shown).

接著,在上述開孔內填充絕緣材料407,且絕緣材料407完全覆蓋上述開孔的內壁。在開孔內填充絕緣材料407之後,可以通過例如雷射鑽孔的方式,移除絕緣材料407的一部分,以在絕緣材料407內形成多個二次開孔(未標示),且這些二次開孔暴露導電層115。在形成上述二次開孔之後,可以通過例如電鍍沉積的方式,在二次開孔內填充一導電材料409,且導電材料409電性連接至導電層115。Next, insulating material 407 is filled into the opening, completely covering the inner wall of the opening. After filling the opening with insulating material 407, a portion of the insulating material 407 can be removed by means such as laser drilling to form multiple secondary openings (not shown) within the insulating material 407, exposing the conductive layer 115. After forming the secondary openings, a conductive material 409 can be filled into the secondary openings by means such as electroplating, and the conductive material 409 is electrically connected to the conductive layer 115.

請參考圖4D,在形成柔性導電結構170之後,在線路層122上設置電子元件160,此電子元件160通過柔性導電結構170而電性連接至導電層115。接著,可以通過例如濺鍍沉積的方式,在絕緣基板116上形成金屬層412’。Referring to Figure 4D, after the flexible conductive structure 170 is formed, an electronic component 160 is disposed on the circuit layer 122. This electronic component 160 is electrically connected to the conductive layer 115 through the flexible conductive structure 170. Next, a metal layer 412' can be formed on the insulating substrate 116 by means of, for example, sputtering deposition.

請參考圖4E,在形成金屬層412’之後,在磁性材料層114、可移除材料405(標示於圖4D)、磁性材料層124以及絕緣基板116中形成多個柔性連接結構130,此柔性連接結構130連接線路層122以及金屬層412’(標示於圖4D)。除此之外,部分柔性連接結構130連接電子元件160以及線路層112。Referring to Figure 4E, after the metal layer 412' is formed, multiple flexible connection structures 130 are formed in the magnetic material layer 114, the removable material 405 (shown in Figure 4D), the magnetic material layer 124, and the insulating substrate 116. These flexible connection structures 130 connect the circuit layer 122 and the metal layer 412' (shown in Figure 4D). In addition, some of the flexible connection structures 130 connect the electronic component 160 and the circuit layer 112.

特別一提的是,形成柔性連接結構130的方式包含:先通過雷射移除磁性材料層114、可移除材料405以及第二磁性材料層124的一部分,以形成多個第一開孔(未標示),這些開孔暴露線路層122。接著,在上述第一開孔內填充接合材料,以形成接合層138,且接合層138完全覆蓋上述第一開孔的內壁。在形成接合層138之後,可以通過例如雷射鑽孔的方式,移除接合層138的一部分,以在接合層138內形成多個第二開孔(未標示),且這些第二開孔暴露線路層122。在形成上述第二開孔之後,可以通過例如電鍍沉積的方式,在第二開孔內填充一導電材料135,且導電材料135電性連接至線路層122。Notably, the flexible connection structure 130 is formed by first removing a portion of the magnetic material layer 114, the removable material 405, and the second magnetic material layer 124 using a laser to form a plurality of first openings (not shown), which expose the wiring layer 122. Next, bonding material is filled into the first openings to form a bonding layer 138, which completely covers the inner walls of the first openings. After forming the bonding layer 138, a portion of the bonding layer 138 can be removed, for example, by laser drilling, to form a plurality of second openings (not shown) within the bonding layer 138, which expose the wiring layer 122. After the second opening is formed, a conductive material 135 can be filled into the second opening by means of electroplating, for example, and the conductive material 135 is electrically connected to the circuit layer 122.

在形成柔性連接結構130之後,可以通過例如微影及蝕刻的方式圖案化金屬層412’,以形成線路層112。線路層122通過柔性連接結構130電性連接至線路層112。在形成線路層112之後,移除可移除材料405,以在磁性材料層114以及所述磁性材料層124之間形成間隙層150。至此,已大致形成如圖1所繪示的電路板100。After the flexible interconnect structure 130 is formed, the metal layer 412' can be patterned by means of, for example, photolithography and etching to form the circuit layer 112. The circuit layer 122 is electrically connected to the circuit layer 112 via the flexible interconnect structure 130. After the circuit layer 112 is formed, the removable material 405 is removed to form a gap layer 150 between the magnetic material layer 114 and the magnetic material layer 124. At this point, the circuit board 100 as shown in FIG. 1 has been substantially formed.

綜上所述,本發明至少一實施例通過磁性材料層中的相反磁極來提供一排斥力,使兩層線路基板彼此之間不直接接觸,但通過柔性連接結構連接(包含電性連接)兩線路基板。如此一來,可以在未影響兩線路基板之間的電性連接下,使線路基板其中一者因外力產生的位移或變形不會帶動另一線路基板,進而提供電路板內部元件(例如,線路基板)相對位移的可行性。In summary, at least one embodiment of the present invention provides a repulsive force through opposite magnetic poles in a magnetic material layer, preventing two circuit substrates from directly contacting each other, but connecting (including electrical connections) the two circuit substrates through a flexible connection structure. In this way, without affecting the electrical connection between the two circuit substrates, displacement or deformation of one circuit substrate due to external force will not affect the other circuit substrate, thereby providing the feasibility of relative displacement of internal components (e.g., circuit substrates) within the circuit board.

雖然本發明之實施例已揭露如上,然其並非用以限定本發明之實施例,任何所屬技術領域中具有通常知識者,在不脫離本發明之實施例的精神和範圍內,當可作些許的更動與潤飾,故本發明之實施例的保護範圍當視後附的申請專利範圍所界定者為準。Although the embodiments of the present invention have been disclosed above, they are not intended to limit the embodiments of the present invention. Anyone with ordinary skill in the art may make some modifications and refinements without departing from the spirit and scope of the embodiments of the present invention. Therefore, the scope of protection of the embodiments of the present invention shall be determined by the appended patent application.

100:電路板 102:接墊 104:保護層 110,120:線路基板 112,122:線路層 114,124:磁性材料層 114S,124S:第一磁極 114N,124N:第二磁極 115:導電層 116:絕緣基板 118,128,138:接合層 130:柔性連接結構 135,409:導電材料 135s:外表面 150:間隙層 160,180:電子元件 170:柔性導電結構 190:覆蓋層 30:電子模組 301:第一模組元件 302:第二模組元件 405:可移除材料 407:絕緣材料 412’:金屬層 F1:外力 RF1:排斥力 TH1,TH2:通孔100: Circuit board 102: Pad 104: Protective layer 110, 120: Circuit board substrate 112, 122: Circuit layer 114, 124: Magnetic material layer 114S, 124S: First magnetic pole 114N, 124N: Second magnetic pole 115: Conductive layer 116: Insulating substrate 118, 128, 138: Bonding layer 130: Flexible connection structure 135, 409: Conductive material 135s: Outer surface 150: Gap layer 160, 180: Electronic component 170: Flexible conductive structure 190: Covering layer 30: Electronic module 301: First module component 302: Second module component 405: Removable material 407: Insulating material 412’: Metal layer F1: External force RF1: Repulsive force TH1, TH2: Through-holes

從以下詳細敘述並搭配圖式檢閱,可理解本發明的態樣。應注意,多種特徵並未以產業上實務標準的比例繪製。事實上,為了討論上的清楚易懂,各種特徵的尺寸可以任意地增加或減少。 圖1繪示本發明至少一實施例的電路板的剖視圖。 圖2繪示本發明另一實施例的電路板的剖視圖。 圖3A繪示本發明至少一實施例的電路板應用於電子模組的剖視示意圖。 圖3B繪示本發明至少一實施例的電路板應用於電子模組的剖視示意圖。 圖4A至圖4E繪示本發明至少一實施例的電路板製造方法的剖視圖。 The nature of the invention can be understood from the following detailed description and accompanying figures. It should be noted that many features are not drawn to industry-standard scale. In fact, the dimensions of various features can be arbitrarily increased or decreased for clarity of discussion. Figure 1 shows a cross-sectional view of a circuit board according to at least one embodiment of the invention. Figure 2 shows a cross-sectional view of a circuit board according to another embodiment of the invention. Figure 3A shows a schematic cross-sectional view of the circuit board according to at least one embodiment of the invention applied to an electronic module. Figure 3B shows a schematic cross-sectional view of the circuit board according to at least one embodiment of the invention applied to an electronic module. Figures 4A to 4E show cross-sectional views of a method for manufacturing the circuit board according to at least one embodiment of the invention.

100:電路板 100: Circuit Board

102:接墊 102: Pad

104:保護層 104: Protective Layer

110,120:線路基板 110,120: Circuit substrate

112,122:線路層 112,122: Line layer

114,124:磁性材料層 114, 124: Magnetic material layers

114S,124S:第一磁極 114S, 124S: First magnetic pole

114N,124N:第二磁極 114N, 124N: Second magnetic pole

115:導電層 115:Conductive layer

116:絕緣基板 116: Insulating substrate

118,128,138:接合層 118, 128, 138: Bonding layer

130:柔性連接結構 130: Flexible connection structure

135:導電材料 135: Conductive materials

135s:外表面 135s: Outer surface

150:間隙層 150: Interstitial layer

160:電子元件 160: Electronic Components

170:柔性導電結構 170: Flexible conductive structure

190:覆蓋層 190: Covering layer

RF1:排斥力 RF1: Repulsive force

TH1,TH2:通孔 TH1, TH2: Through holes

Claims (10)

一種電路板,包含: 兩個線路基板,彼此相對設置,且所述線路基板之間具有一間隙層,其中所述線路基板的每一者包含: 一線路層;以及 一磁性材料層,設置於所述線路層上,且所述磁性材料層具有極性相反的一第一磁極以及一第二磁極,其中所述第一磁極位於所述線路層以及所述第二磁極之間,且所述線路基板的其中一者的所述磁性材料層面對所述線路基板的另一者的所述磁性材料層,而所述磁性材料層其中一者的第二磁極以及所述磁性材料層另一者的第二磁極之間形成一排斥力。 A circuit board comprising: two circuit substrates disposed opposite to each other, with a gap layer between the circuit substrates, wherein each of the circuit substrates comprises: a circuit layer; and a magnetic material layer disposed on the circuit layer, the magnetic material layer having a first magnetic pole and a second magnetic pole of opposite polarity, wherein the first magnetic pole is located between the circuit layer and the second magnetic pole, and the magnetic material layer of one circuit substrate faces the magnetic material layer of the other circuit substrate, and a repulsive force is formed between the second magnetic pole of one magnetic material layer and the second magnetic pole of the other magnetic material layer. 如請求項1所述的電路板,還包含: 一柔性連接結構,設置於所述線路基板之間,並連接所述線路基板,而所述線路基板其中一者通過所述柔性連接結構而電性連接至所述線路基板另一者。 The circuit board of claim 1 further comprises: a flexible connection structure disposed between the circuit substrates and connecting the circuit substrates, wherein one of the circuit substrates is electrically connected to the other circuit substrate via the flexible connection structure. 如請求項2所述的電路板,其中所述柔性連接結構還包含: 一導電材料,連接所述線路基板,且所述線路基板其中一者的所述線路層通過所述導電材料連接至所述線路基板另一者的所述線路層;以及 一接合層,包覆於所述導電材料的一外表面。 The circuit board of claim 2, wherein the flexible connection structure further comprises: a conductive material connecting the circuit substrate, wherein a circuit layer of one of the circuit substrates is connected to a circuit layer of the other circuit substrate via the conductive material; and a bonding layer covering an outer surface of the conductive material. 如請求項1所述的電路板,其中所述線路基板其中一者還包含: 一導電層,設置於所述磁性材料層以及所述線路層之間; 一絕緣基板,設置於所述線路層以及所述導電層之間;以及 一接合層,設置於所述絕緣基板以及所述磁性材料層之間。 The circuit board of claim 1, wherein one of the circuit substrates further comprises: a conductive layer disposed between the magnetic material layer and the circuit layer; an insulating substrate disposed between the circuit layer and the conductive layer; and a bonding layer disposed between the insulating substrate and the magnetic material layer. 如請求項4所述的電路板,還包含: 一第一電子元件,設置於所述線路基板其中一者上,且所述線路基板的其中一者位於所述第一電子元件以及所述線路基板另一者之間;以及 一柔性導電結構,設置於所述線路基板另一者以及所述第一電子元件之間,其中所述柔性導電結構自所述線路基板其中一者通過所述間隙層,並且延伸至所述線路基板另一者的所述導電層,且所述第一電子元件通過所述柔性導電結構電性連接至所述線路基板的至少一者。 The circuit board of claim 4 further comprises: a first electronic component disposed on one of the circuit substrates, wherein the other circuit substrate is located between the first electronic component and the other circuit substrate; and a flexible conductive structure disposed between the other circuit substrate and the first electronic component, wherein the flexible conductive structure extends from one of the circuit substrates through the gap layer and to the conductive layer of the other circuit substrate, and the first electronic component is electrically connected to at least one of the circuit substrates through the flexible conductive structure. 如請求項1所述的電路板,其中所述線路基板的每一者還包含: 多個通孔,分布於所述線路層以及所述磁性材料層內,並且連通所述線路基板的相對兩側。 The circuit board of claim 1, wherein each of the circuit substrates further comprises: a plurality of through-holes distributed within the circuit layer and the magnetic material layer, and connecting opposite sides of the circuit substrate. 如請求項1所述的電路板,還包含: 一覆蓋層,設置於所述線路基板的其中一者上,且所述線路基板其中一者位於所述覆蓋層以及所述線路基板另一者之間。 The circuit board of claim 1 further comprises: a cover layer disposed on one of the circuit substrates, wherein the one of the circuit substrates is located between the cover layer and the other circuit substrate. 一種電路板的製造方法,包含: 提供一絕緣基板; 在所述絕緣基板上形成一導電層; 在所述導電層上形成一第一磁性材料層,且所述第一磁性材料層具有極性相反的一第一磁極以及一第二磁極,其中所述第一磁極位於所述導電層以及所述第二磁極之間; 在所述第一磁性材料層上形成一可移除材料,其中所述第一磁性材料層位於所述導電層以及所述可移除材料之間; 在所述可移除材料上形成一第二磁性材料層,其中所述可移除材料位於所述第二磁性材料層以及所述第一磁性材料層之間; 在所述第二磁性材料層上形成一第一線路層,其中所述第二磁性材料層位於所述第一線路層以及所述可移除材料之間;以及 在形成所述第一線路層之後,在所述第一磁性材料層、所述可移除材料以及所述第二磁性材料層中形成多個柔性導電結構,其中所述柔性導電結構電性連接至所述導電層。 A method for manufacturing a circuit board includes: providing an insulating substrate; forming a conductive layer on the insulating substrate; forming a first magnetic material layer on the conductive layer, the first magnetic material layer having a first magnetic pole and a second magnetic pole of opposite polarity, wherein the first magnetic pole is located between the conductive layer and the second magnetic pole; forming a removable material on the first magnetic material layer, wherein the first magnetic material layer is located between the conductive layer and the removable material; forming a second magnetic material layer on the removable material, wherein the removable material is located between the second magnetic material layer and the first magnetic material layer; forming a first circuit layer on the second magnetic material layer, wherein the second magnetic material layer is located between the first circuit layer and the removable material; and After forming the first circuit layer, a plurality of flexible conductive structures are formed in the first magnetic material layer, the removable material, and the second magnetic material layer, wherein the flexible conductive structures are electrically connected to the conductive layers. 如請求項8所述的方法,還包含: 在形成所述柔性導電結構之後,在所述絕緣基板上形成一金屬層; 在形成所述柔性導電結構之後,在所述第一磁性材料層、所述可移除材料、所述第二磁性材料層以及所述絕緣基板中形成多個柔性連接結構,其中所述柔性連接結構連接所述第一線路層以及所述金屬層; 在形成所述柔性連接結構之後圖案化所述金屬層,以形成一第二線路層,其中所述第一線路層通過所述柔性連接結構電性連接至所述第二線路層;以及 在形成所述第二線路層之後,移除所述可移除材料,以在所述第一磁性材料層以及所述第二磁性材料層之間形成一間隙層。 The method of claim 8 further comprises: After forming the flexible conductive structure, forming a metal layer on the insulating substrate; After forming the flexible conductive structure, forming a plurality of flexible connection structures in the first magnetic material layer, the removable material, the second magnetic material layer, and the insulating substrate, wherein the flexible connection structures connect the first circuit layer and the metal layer; After forming the flexible connection structures, patterning the metal layer to form a second circuit layer, wherein the first circuit layer is electrically connected to the second circuit layer through the flexible connection structures; and After forming the second circuit layer, removing the removable material to form a gap layer between the first magnetic material layer and the second magnetic material layer. 如請求項9所述的方法,其中形成所述柔性連接結構包含: 移除所述第一磁性材料層、所述可移除材料以及所述第二磁性材料層的一部分,以形成多個第一開孔,其中所述第一開孔暴露所述第一線路層; 在所述第一開孔內填充一絕緣材料,以形成一接合層,且所述接合層完全覆蓋所述第一開孔的一內壁; 在形成所述接合層之後,移除所述接合層的一部分,以形成多個第二開孔,其中所述第二開孔暴露所述第一線路層;以及 在形成所述第二開孔之後,在所述第二開孔內填充一導電材料,其中所述導電材料電性連接至所述第一線路層。 The method of claim 9, wherein forming the flexible connection structure comprises: removing a portion of the first magnetic material layer, the removable material, and the second magnetic material layer to form a plurality of first openings, wherein the first openings expose the first circuit layer; filling the first openings with an insulating material to form a bonding layer, wherein the bonding layer completely covers an inner wall of the first opening; after forming the bonding layer, removing a portion of the bonding layer to form a plurality of second openings, wherein the second openings expose the first circuit layer; and after forming the second openings, filling the second openings with a conductive material, wherein the conductive material is electrically connected to the first circuit layer.
TW114108410A 2025-03-06 Circuit board and method for fabricating the same TWI912155B (en)

Publications (1)

Publication Number Publication Date
TWI912155B true TWI912155B (en) 2026-01-11

Family

ID=

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170332494A1 (en) 2016-05-10 2017-11-16 Samsung Display Co., Ltd. Display apparatus, portable terminal, and operating method of display apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170332494A1 (en) 2016-05-10 2017-11-16 Samsung Display Co., Ltd. Display apparatus, portable terminal, and operating method of display apparatus

Similar Documents

Publication Publication Date Title
JP3961537B2 (en) Manufacturing method of semiconductor mounting wiring board and manufacturing method of semiconductor package
JP4058642B2 (en) Semiconductor device
US7755910B2 (en) Capacitor built-in interposer and method of manufacturing the same and electronic component device
JP6373574B2 (en) Circuit board and manufacturing method thereof
US20090273884A1 (en) Capacitor component, method of manufacturing the same and semiconductor package
CN102771200A (en) Multilayer printed circuit board and manufacturing method thereof
CN107770947A (en) The manufacture method of printed wiring board and printed wiring board
KR100834657B1 (en) Electronic device substrate and its fabrication method, and electronic device and its fabrication method
CN108811319A (en) Electronic unit and its manufacturing method
US11765826B2 (en) Method of fabricating contact pads for electronic substrates
US20160255717A1 (en) Multilayer wiring board
TW201104847A (en) Solid-state imaging device having penetration electrode formed in semiconductor substrate
JP6423313B2 (en) Electronic component built-in substrate, method for manufacturing the same, and electronic apparatus
US12284757B2 (en) Wiring circuit board
TWI912155B (en) Circuit board and method for fabricating the same
JP3832641B2 (en) Semiconductor device, stacked semiconductor device, and method for manufacturing semiconductor device
JPH0143473B2 (en)
JP2008159973A (en) Electronic component module and circuit board with built-in components incorporating the module
JP2009004813A (en) Wiring board for semiconductor mounting
TW201714504A (en) Chip package substrate and manufacturing method thereof
CN101958292A (en) Printed circuit board, encapsulation piece and manufacture methods thereof
JPH11274155A (en) Semiconductor device
JP2007005357A (en) Manufacturing method of semiconductor device
JP2007096337A (en) Wiring substrate for mounting semiconductor, semiconductor package, and its manufacturing method
JP4292860B2 (en) Multilayer electronic circuit device and manufacturing method thereof