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TWI912038B - Joint cleaning device - Google Patents

Joint cleaning device

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Publication number
TWI912038B
TWI912038B TW113146262A TW113146262A TWI912038B TW I912038 B TWI912038 B TW I912038B TW 113146262 A TW113146262 A TW 113146262A TW 113146262 A TW113146262 A TW 113146262A TW I912038 B TWI912038 B TW I912038B
Authority
TW
Taiwan
Prior art keywords
liquid
joint
conduit
cleaning
gas
Prior art date
Application number
TW113146262A
Other languages
Chinese (zh)
Inventor
徐桂樑
Original Assignee
台灣矽科宏晟科技股份有限公司
Filing date
Publication date
Application filed by 台灣矽科宏晟科技股份有限公司 filed Critical 台灣矽科宏晟科技股份有限公司
Application granted granted Critical
Publication of TWI912038B publication Critical patent/TWI912038B/en

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Abstract

本發明提出一種接頭清洗裝置,其能承載一接頭,並能以一液體清洗接頭,以一氣體乾燥接頭。接頭清洗裝置具有一本體、一擋板、一液體管道、一氣體管道及一排液孔。本體內形成一清洗空間。擋板設置於本體中並位於清洗空間上方。擋板具有一通孔連通清洗空間,並能承載接頭。液體管道環繞設置於本體並能流通液體。液體管道具有複數出液口,出液口形成於本體的壁面並連通清洗空間。氣體管道環繞設置於本體並能流通氣體。氣體管道具有複數出氣口,出氣口形成於本體的壁面並連通清洗空間。出液口及等出氣口朝向接頭。排液孔形成於本體的底部。This invention discloses a joint cleaning device capable of supporting a joint, cleaning the joint with a liquid, and drying the joint with a gas. The joint cleaning device comprises a main body, a baffle plate, a liquid conduit, a gas conduit, and a drain hole. A cleaning space is formed within the main body. The baffle plate is disposed within the main body and positioned above the cleaning space. The baffle plate has a through hole connecting to the cleaning space and can support the joint. The liquid conduit is arranged around the main body and allows liquid to flow through it. The liquid conduit has a plurality of outlets formed on the wall of the main body and connecting to the cleaning space. The gas conduit is arranged around the main body and allows gas to flow through it. The gas conduit has a plurality of outlets formed on the wall of the main body and connecting to the cleaning space. The liquid outlets and gas outlets face the joint. A drain hole is formed at the bottom of the main body.

Description

接頭清洗裝置Joint cleaning device

本發明是關於一種清洗裝置,特別是一種化學桶接頭的清洗裝置。This invention relates to a cleaning device, and more particularly to a cleaning device for chemical tank fittings.

在半導體、晶圓代工、液晶平板顯示器、太陽能電池等電子領域的製程中,會使用到各種化學品。為了避免化學品暴露於空氣中導致化學品變質或遭到汙染,在製程中多直接以接頭連接化學桶,並抽取化學桶內的化學品以進行作業。Various chemicals are used in the manufacturing processes of electronics, such as semiconductors, wafer foundries, LCD flat panel displays, and solar cells. To prevent chemicals from being exposed to the air and deteriorating or becoming contaminated, chemical tanks are often directly connected to connectors during the manufacturing process, and the chemicals inside the tanks are extracted for operation.

當化學桶內的化學品用完後,作業人員將接頭與化學品分離,在更換新的化學桶。依照標準作業流程,接頭與化學桶一旦分離,須清洗接頭,以避免接頭受到汙染,導致接頭汙染下一個化學桶內的化學品。然而,每次將接頭自管道拆除清洗會造成作業時程的延誤,費時費力。When the chemicals in a chemical tank are used up, the operator separates the connector from the chemicals before replacing it with a new chemical tank. According to standard operating procedures, once the connector is separated from the chemical tank, it must be cleaned to prevent contamination and potential contamination of the chemicals in the next chemical tank. However, repeatedly disconnecting and cleaning the connector from the pipeline causes delays and is time-consuming and labor-intensive.

本發明提出一種接頭清洗裝置,其能用以承載一接頭,並能同時以一液體清洗該接頭,再以一氣體乾燥該接頭。The present invention provides a joint cleaning device that can support a joint and simultaneously clean the joint with a liquid and dry it with a gas.

本發明所提出的接頭清洗裝置具有: 一本體,其內形成一清洗空間; 一擋板,其設置於該本體中,並位於該清洗空間的上方;該擋板具有: 一通孔,該通孔連通該清洗空間,並用以承載該接頭; 一液體管道,其環繞設置於該本體,並能流通該液體;該液體管道具有: 一進液口,該液體自該進液口流入該液體管道; 複數出液口,其貫穿形成於該本體的壁面,並連通該清洗空間; 一氣體管道,其環繞設置於該本體,並能流通該氣體;該氣體管道具有: 一進氣口,該氣體自該進氣口流入該氣體管道; 複數出氣口,其貫穿形成於該本體的壁面,並連通該清洗空間; 一排液孔,其形成於該本體的底部。 The connector cleaning device proposed in this invention comprises: a body having a cleaning space therein; a baffle disposed within the body and positioned above the cleaning space; the baffle having: a through hole communicating with the cleaning space and for supporting the connector; a liquid conduit surrounding the body and allowing liquid to flow through; the liquid conduit having: a liquid inlet through which the liquid flows into the liquid conduit; a plurality of liquid outlets penetrating the wall of the body and communicating with the cleaning space; a gas conduit surrounding the body and allowing gas to flow through; the gas conduit having: an air inlet through which the gas flows into the gas conduit; Multiple air outlets are formed penetrating the wall of the body and connecting to the cleaning space; A row of liquid holes is formed at the bottom of the body.

本發明的優點在於,接頭清洗裝置能透過擋板的通孔承載接頭,同時透過液體管道清洗接頭,並透過氣體管道乾燥接頭。舉例而言,當使用者更換化學桶時,能將連接原化學桶的接頭暫放於接頭清洗裝置,並同時透過接頭清洗裝置清洗及乾燥接頭,再將清洗完畢的接頭安裝至新化學桶,完成更換化學桶的標準作業流程。藉此,接頭清洗裝置能減少拆裝清洗接頭所耗費的人力及時間。The advantage of this invention is that the joint cleaning device can support the joint through the through-hole of the baffle, simultaneously clean the joint through a liquid pipeline, and dry the joint through a gas pipeline. For example, when a user replaces a chemical tank, the joint connected to the old chemical tank can be temporarily placed in the joint cleaning device, and simultaneously cleaned and dried by the device. Then, the cleaned joint can be installed into the new chemical tank, completing the standard operating procedure for replacing the chemical tank. In this way, the joint cleaning device can reduce the manpower and time spent on disassembling and cleaning joints.

如上述之接頭清洗裝置,其中,該接頭清洗裝置具有一超音波發射器,該超音波發射器設置於該清洗空間中。As described above, the joint cleaning device includes an ultrasonic transmitter disposed in the cleaning space.

如上述之接頭清洗裝置,其具有: 一偵測管道,其設置於該本體的旁邊;該偵測管道連接至該本體,並連通該清洗空間; 一控制裝置,其設置於該偵測管道;該控制裝置能偵測該偵測管道內的該液體的液面位置,並能控制該液體流入該液體管道;當該液體的液面位置達到一預定位置時,該控制裝置能停止該液體流入該液體管道。 The joint cleaning device described above includes: a detection conduit disposed beside the main body; the detection conduit is connected to the main body and communicates with the cleaning space; a control device disposed in the detection conduit; the control device is capable of detecting the liquid level in the detection conduit and controlling the flow of the liquid into the liquid conduit; when the liquid level reaches a predetermined position, the control device stops the flow of the liquid into the liquid conduit.

如上述之接頭清洗裝置,其中,該偵測管道於該本體的底部連通該清洗空間。As described above, in the joint cleaning device, the detection conduit connects to the cleaning space at the bottom of the body.

如上述之接頭清洗裝置,其中,該擋板的該通孔上側的孔徑大於該通孔下側的孔徑。In the aforementioned joint cleaning device, the upper diameter of the through hole of the baffle is larger than the lower diameter of the through hole.

如上述之接頭清洗裝置,其中,當該接頭清洗裝置用以承載該接頭時,該等出液口及該等出氣口朝向該接頭。As described above, when the joint cleaning device is used to support the joint, the liquid outlets and the air outlets face the joint.

如上述之接頭清洗裝置,其中,該氣體管道位於該液體管道的上方。As described above, in the joint cleaning device, the gas pipe is located above the liquid pipe.

請參考圖1至圖6。本發明提出一種接頭清洗裝置,其能用以承載一接頭A,並能以一液體清洗接頭A,再以一氣體使接頭A乾燥。接頭清洗裝置具有一本體10、一擋板20、一液體管道30、一氣體管道40、一排液孔50、一超音波發射器60、一偵測管道70及一控制裝置80。Please refer to Figures 1 to 6. This invention provides a joint cleaning device that can support a joint A, clean the joint A with a liquid, and then dry the joint A with a gas. The joint cleaning device comprises a body 10, a baffle 20, a liquid conduit 30, a gas conduit 40, a drain hole 50, an ultrasonic transmitter 60, a detection conduit 70, and a control device 80.

本體10的內部形成一清洗空間11。擋板20設置於本體10中,並位於清洗空間11的上方。擋板20具有一通孔21。通孔21貫穿形成於擋板20中央,並連通該清洗空間11。接頭清洗裝置透過擋板20的通孔21承載接頭A。通孔21上側的孔徑大於通孔21下側的孔徑,且通孔21上側的孔徑大於接頭A的直徑,通孔21下側的孔徑小於接頭A的直徑。換言之,通孔21呈一錐狀,且通孔21的壁面呈一斜面。當擋板20承載接頭A時,接頭A會穿設於通孔21,且接頭A需要清洗的部位位於清洗空間11中。A cleaning space 11 is formed inside the body 10. A baffle 20 is disposed in the body 10 and located above the cleaning space 11. The baffle 20 has a through hole 21. The through hole 21 is formed through the center of the baffle 20 and connects to the cleaning space 11. The joint cleaning device carries the joint A through the through hole 21 of the baffle 20. The upper diameter of the through hole 21 is larger than the lower diameter of the through hole 21, and the upper diameter of the through hole 21 is larger than the diameter of the joint A, while the lower diameter of the through hole 21 is smaller than the diameter of the joint A. In other words, the through hole 21 is tapered, and the wall of the through hole 21 is inclined. When the baffle 20 supports the connector A, the connector A will pass through the through hole 21, and the part of the connector A that needs to be cleaned is located in the cleaning space 11.

液體管道30環繞設置於本體10,並能流通液體。液體管道30具有一進液口31及複數出液口32。出液口32貫穿形成於本體10的壁面,並連通清洗空間11。液體自進液口31流入液體管道30,再自出液口32注入清洗空間11中。氣體管道40環繞設置於本體10,並能流通氣體。氣體管道40具有一進氣口41及複數出氣口42。出氣口42貫穿形成於本體10的壁面,並連通清洗空間11。氣體自進氣口41流入氣體管道40,再自出氣口42注入清洗空間11中。A liquid conduit 30 is disposed around the body 10 and allows liquid to flow through it. The liquid conduit 30 has an inlet 31 and a plurality of outlets 32. The outlets 32 penetrate the wall of the body 10 and connect to a cleaning space 11. Liquid flows into the liquid conduit 30 from the inlet 31 and then into the cleaning space 11 from the outlets 32. A gas conduit 40 is disposed around the body 10 and allows gas to flow through it. The gas conduit 40 has an inlet 41 and a plurality of outlets 42. The outlets 42 penetrate the wall of the body 10 and connect to the cleaning space 11. Gas flows into the gas conduit 40 from the inlet 41 and then into the cleaning space 11 from the outlets 42.

當接頭A放置於接頭清洗裝置中時,出液口32朝向接頭A需要清洗的部位,且液體能自出液口32噴至接頭A上,進而清洗接頭A。類似地,當接頭A放置於接頭清洗裝置中時,出氣口42朝向接頭A需要乾操的部位,且氣體能自出氣口42噴至接頭A上,進而使接頭A乾燥。本實施例中,氣體管道40位於液體管道30的上方,且出氣口42水平貫穿於本體10的壁面,而出液口32斜向貫穿於本體10的壁面,但不以此為限。When connector A is placed in the connector cleaning device, the liquid outlet 32 faces the part of connector A that needs to be cleaned, and liquid can be sprayed from the liquid outlet 32 onto connector A, thereby cleaning connector A. Similarly, when connector A is placed in the connector cleaning device, the air outlet 42 faces the part of connector A that needs to be dried, and gas can be sprayed from the air outlet 42 onto connector A, thereby drying connector A. In this embodiment, the gas pipe 40 is located above the liquid pipe 30, and the air outlet 42 horizontally penetrates the wall of the body 10, while the liquid outlet 32 obliquely penetrates the wall of the body 10, but this is not a limitation.

排液孔50形成於本體10的底部,並能連通或阻斷清洗空間11及本體10的外部。當排液孔50連通清洗空間11及本體10的外部時,排液孔50能排除位於清洗空間11中的液體。當排液孔50阻斷清洗空間11及本體10的外部時,液體能於清洗空間11中累積,進而接頭A需要清洗的部位能浸泡於液體中。超音波發射器60設置於清洗空間11中。當接頭A需要清洗的部位浸泡於液體中時,超音波發射器60能啟動,並以超音波清洗接頭A。A drain hole 50 is formed at the bottom of the body 10 and can connect to or block the cleaning space 11 and the outside of the body 10. When the drain hole 50 connects to the cleaning space 11 and the outside of the body 10, the drain hole 50 can drain the liquid located in the cleaning space 11. When the drain hole 50 blocks the cleaning space 11 and the outside of the body 10, the liquid can accumulate in the cleaning space 11, and the part of connector A that needs to be cleaned can be immersed in the liquid. An ultrasonic transmitter 60 is disposed in the cleaning space 11. When the part of connector A that needs to be cleaned is immersed in the liquid, the ultrasonic transmitter 60 can be activated and the connector A is cleaned with ultrasound.

偵測管道70設置於本體10的旁邊,且偵測管道70連接至本體10,並連通清洗空間11。本實施例中,偵測管道70於本體10的底部連通清洗空間11,但不以此為限。控制裝置80設置於偵測管道70,並能偵測偵測管道70內的液體的液面位置。根據連通管原理,清洗空間11中的液體的液面與偵測管道70中的液體的液面位於同一平面。藉此,控制裝置80能藉由偵測管道70內的液體的液面位置判斷清洗空間11中的液體量,進而控制液體流入液體管道30。具體而言,當液體的液面位置達到一預定位置時,控制裝置80能停止液體流入液體管道30。本實施例中,當接頭A需要清洗的部位浸泡於液體中時,代表液體的液面位置達到預定位置,但不以此為限。A detection pipe 70 is disposed beside the main body 10 and is connected to the main body 10 and the cleaning space 11. In this embodiment, the detection pipe 70 is connected to the cleaning space 11 at the bottom of the main body 10, but this is not a limitation. A control device 80 is disposed in the detection pipe 70 and can detect the liquid level in the detection pipe 70. According to the principle of the connecting pipe, the liquid level in the cleaning space 11 and the liquid level in the detection pipe 70 are on the same plane. Thereby, the control device 80 can determine the amount of liquid in the cleaning space 11 by detecting the liquid level in the detection pipe 70, and then control the liquid to flow into the liquid pipe 30. Specifically, when the liquid level reaches a predetermined position, the control device 80 can stop the liquid from flowing into the liquid pipe 30. In this embodiment, when the part of joint A that needs to be cleaned is immersed in the liquid, it means that the liquid level has reached the predetermined position, but this is not the only limitation.

首先將待清洗的接頭A放置於擋板20的通孔21,接頭A需要清洗的部位穿過通孔21並位於清洗空間11中。接著液體自進液口31流入液體管道30,再自出液口32噴至接頭A上,進而清洗接頭A。隨著液體清洗接頭A,注入的液體於清洗空間11中累積至預定位置後,控制裝置80停止液體流入液體管道30。隨後超音波發射器60啟動,並以超音波清洗接頭A。接著排液孔50連通清洗空間11及本體10的外部,以排除位於清洗空間11中的液體。最後氣體自出氣口42噴至接頭A上,進而使接頭A乾燥,以完成接頭A的清洗。First, the connector A to be cleaned is placed in the through hole 21 of the baffle 20, with the part of connector A to be cleaned passing through the through hole 21 and positioned in the cleaning space 11. Then, liquid flows into the liquid pipe 30 from the inlet 31 and is sprayed onto connector A from the outlet 32, thus cleaning connector A. As the liquid cleans connector A, once the injected liquid accumulates to a predetermined position in the cleaning space 11, the control device 80 stops the liquid from flowing into the liquid pipe 30. Subsequently, the ultrasonic transmitter 60 is activated, and connector A is cleaned with ultrasound. Then, the drain hole 50 connects the cleaning space 11 to the outside of the main body 10 to drain the liquid located in the cleaning space 11. Finally, gas is sprayed onto connector A from the outlet 42, thereby drying connector A and completing the cleaning of connector A.

本發明的優點在於,接頭清洗裝置能透過擋板20的通孔21承載接頭A,同時透過液體管道30清洗接頭A,並透過氣體管道40乾燥接頭A。舉例而言,當使用者更換化學桶時,能將連接原化學桶的接頭A暫放於接頭清洗裝置,並同時透過接頭清洗裝置清洗及乾燥接頭A,再將清洗完畢的接頭A安裝至新化學桶,完成更換化學桶的標準作業流程。藉此,接頭清洗裝置能減少拆裝清洗接頭A所耗費的人力及時間。The advantage of this invention is that the joint cleaning device can support joint A through the through hole 21 of the baffle 20, clean joint A through the liquid pipe 30, and dry joint A through the gas pipe 40. For example, when a user replaces a chemical tank, joint A connected to the original chemical tank can be temporarily placed in the joint cleaning device, and joint A can be cleaned and dried simultaneously through the joint cleaning device. Then, the cleaned joint A can be installed into the new chemical tank, completing the standard operating procedure for replacing the chemical tank. In this way, the joint cleaning device can reduce the manpower and time spent on disassembling and cleaning joint A.

A:接頭 10:本體 11:清洗空間 20:擋板 21:通孔 30:液體管道 31:進液口 32:出液口 40:氣體管道 41:進氣口 42:出氣口 50:排液孔 60:超音波發射器 70:偵測管道 80:控制裝置A: Connector 10: Body 11: Cleaning Space 20: Baffle 21: Through Hole 30: Liquid Pipe 31: Liquid Inlet 32: Liquid Outlet 40: Gas Pipe 41: Air Inlet 42: Air Outlet 50: Drain Hole 60: Ultrasonic Emitter 70: Detection Pipe 80: Control Device

圖1為本發明於承載接頭時之立體示意圖。 圖2為本發明於承載接頭時之立體剖面示意圖。 圖3為本發明於承載接頭時之剖面示意圖。 圖4為本發明之立體示意圖。 圖5為本發明之立體剖面示意圖。 圖6為本發明之剖面示意圖。 Figure 1 is a perspective view of the invention in the form of a load-bearing joint. Figure 2 is a perspective cross-sectional view of the invention in the form of a load-bearing joint. Figure 3 is a cross-sectional view of the invention in the form of a load-bearing joint. Figure 4 is a perspective view of the invention. Figure 5 is a perspective cross-sectional view of the invention. Figure 6 is a cross-sectional view of the invention.

A:接頭 A: Connector

10:本體 10: The Body

30:液體管道 30: Liquid Pipeline

31:進液口 31:Liquid inlet

40:氣體管道 40: Gas Pipeline

41:進氣口 41: Air Inlet

70:偵測管道 70: Detecting Pipelines

80:控制裝置 80: Control Device

Claims (7)

一種接頭清洗裝置,其能用以承載一接頭,並能以一液體清洗該接頭,以一氣體乾燥該接頭;該接頭清洗裝置具有: 一本體,其內形成一清洗空間; 一擋板,其設置於該本體中,並位於該清洗空間的上方;該擋板具有: 一通孔,該通孔連通該清洗空間,並用以承載該接頭; 一液體管道,其環繞設置於該本體,並能流通該液體;該液體管道具有: 一進液口,該液體自該進液口流入該液體管道; 複數出液口,其貫穿形成於該本體的壁面,並連通該清洗空間; 一氣體管道,其環繞設置於該本體,並能流通該氣體;該氣體管道具有: 一進氣口,該氣體自該進氣口流入該氣體管道; 複數出氣口,其貫穿形成於該本體的壁面,並連通該清洗空間; 一排液孔,其形成於該本體的底部。 A joint cleaning device is used to support a joint, clean the joint with a liquid, and dry the joint with a gas. The joint cleaning device comprises: a body forming a cleaning space therein; a baffle disposed within the body and positioned above the cleaning space; the baffle having: a through-hole communicating with the cleaning space and for supporting the joint; a liquid conduit surrounding the body and allowing the liquid to flow through; the liquid conduit having: a liquid inlet through which the liquid flows into the liquid conduit; a plurality of liquid outlets penetrating the wall of the body and communicating with the cleaning space; a gas conduit surrounding the body and allowing the gas to flow through; the gas conduit having: One air inlet through which gas flows into the gas pipe; A plurality of air outlets formed through the wall of the body and connecting to the cleaning space; A liquid drain hole formed at the bottom of the body. 如請求項1所述之接頭清洗裝置,其中,該接頭清洗裝置具有一超音波發射器,該超音波發射器設置於該清洗空間中。The joint cleaning apparatus as described in claim 1, wherein the joint cleaning apparatus has an ultrasonic transmitter disposed in the cleaning space. 如請求項1所述之接頭清洗裝置,其具有: 一偵測管道,其設置於該本體的旁邊;該偵測管道連接至該本體,並連通該清洗空間; 一控制裝置,其設置於該偵測管道;該控制裝置能偵測該偵測管道內的該液體的液面位置,並能控制該液體流入該液體管道;當該液體的液面位置達到一預定位置時,該控制裝置能停止該液體流入該液體管道。 The joint cleaning device as described in claim 1 comprises: a detection conduit disposed beside the main body; the detection conduit being connected to the main body and communicating with the cleaning space; a control device disposed in the detection conduit; the control device being capable of detecting the liquid level in the detection conduit and controlling the flow of the liquid into the liquid conduit; and stopping the flow of the liquid into the liquid conduit when the liquid level reaches a predetermined position. 如請求項3所述之接頭清洗裝置,其中,該偵測管道於該本體的底部連通該清洗空間。The joint cleaning device as described in claim 3, wherein the detection conduit connects to the cleaning space at the bottom of the body. 如請求項1至4中任一項所述之接頭清洗裝置,其中,該擋板的該通孔上側的孔徑大於該通孔下側的孔徑。The joint cleaning device as described in any of claims 1 to 4, wherein the upper diameter of the through hole of the baffle is larger than the lower diameter of the through hole. 如請求項5所述之接頭清洗裝置,其中,當該接頭清洗裝置用以承載該接頭時,該等出液口及該等出氣口朝向該接頭。The joint cleaning apparatus as described in claim 5, wherein when the joint cleaning apparatus is used to hold the joint, the liquid outlets and the air outlets face the joint. 如請求項6所述之接頭清洗裝置,其中,該氣體管道位於該液體管道的上方。The joint cleaning apparatus as described in claim 6, wherein the gas conduit is located above the liquid conduit.
TW113146262A 2024-11-29 Joint cleaning device TWI912038B (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113182244A (en) 2021-03-29 2021-07-30 江苏亚电科技有限公司 Photovoltaic silicon wafer cleaning method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113182244A (en) 2021-03-29 2021-07-30 江苏亚电科技有限公司 Photovoltaic silicon wafer cleaning method

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