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TWI909954B - Manufacturing methods of conductor substrates, wiring substrates, expandable elements, and wiring substrates - Google Patents

Manufacturing methods of conductor substrates, wiring substrates, expandable elements, and wiring substrates

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Publication number
TWI909954B
TWI909954B TW114104054A TW114104054A TWI909954B TW I909954 B TWI909954 B TW I909954B TW 114104054 A TW114104054 A TW 114104054A TW 114104054 A TW114104054 A TW 114104054A TW I909954 B TWI909954 B TW I909954B
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Taiwan
Prior art keywords
resin layer
conductor
stretchable resin
stretchable
substrate
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TW114104054A
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Chinese (zh)
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TW202521344A (en
Inventor
小川禎宏
正木剛史
川守崇司
唐伊 沈
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日商力森諾科股份有限公司
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Publication of TW202521344A publication Critical patent/TW202521344A/en
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Publication of TWI909954B publication Critical patent/TWI909954B/en

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Abstract

一種導體基板,具有伸縮性樹脂層;以及導體箔,設置於伸縮性樹脂層上。伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑。A conductor substrate has a stretchable resin layer and a conductor foil disposed on the stretchable resin layer. The stretchable resin layer comprises a cured resin composition containing (A) a rubber component, (B) a crosslinking component having epoxy groups, and (C) an ester-based curing agent.

Description

導體基板、配線基板、可伸縮元件和配線基板的製造方法Manufacturing methods of conductor substrates, wiring substrates, expandable elements, and wiring substrates

本發明的一方面是有關於一種可具有高伸縮性的配線基板和其製造方法。本發明的另一方面是有關於一種可用以形成所述配線基板的導體基板。本發明的又一方面是有關於一種使用所述配線基板的可伸縮元件。One aspect of the invention relates to a wiring substrate with high scalability and a method for manufacturing the same. Another aspect of the invention relates to a conductor substrate that can be used to form the wiring substrate. Yet another aspect of the invention relates to a stretchable element using the wiring substrate.

近年來,於穿戴式設備及健康照護(health care)關聯設備等領域中,例如需要可沿著身體的曲面或關節部來使用,並且即便穿脫亦難以產生連接不良的柔性及伸縮性。為構成此種設備,需要具有高伸縮性的配線基板或基材。In recent years, in fields such as wearable devices and healthcare-related devices, there is a need for devices that can be used along the curves of the body or joints, and that are flexible and elastic enough to prevent poor connections even when put on and taken off. To construct such devices, wiring boards or substrates with high elasticity are required.

專利文獻1中記載有使用伸縮性的樹脂組成物對記憶體晶片(memory chip)等半導體器件進行密封的方法。專利文獻1中主要研究有伸縮性的樹脂組成物於密封用途中的應用。 [現有技術文獻] [專利文獻] Patent 1 describes a method for sealing semiconductor devices such as memory chips using a stretchable resin composition. Patent 1 primarily studies the application of stretchable resin compositions in sealing applications. [Prior Art Documents] [Patent Documents]

[專利文獻1]國際公開第2016/080346號[Patent Document 1] International Publication No. 2016/080346

[發明所欲解決之課題] 如專利文獻1中所記載般,藉由使密封材具有伸縮性,能夠實現習知之密封材中難以實現的具有伸縮性的部材。另一方面,基底基材並不具有伸縮性,因此難以具有更高的伸縮性。因此,需要具有更高的伸縮性的配線基板。 [Problem to be Solved by the Invention] As described in Patent 1, by making the sealing material elastic, it is possible to realize elastic components that are difficult to achieve in conventional sealing materials. On the other hand, the substrate material does not have elasticity, and therefore it is difficult to achieve higher elasticity. Therefore, there is a need for a wiring board with higher elasticity.

另外,就耐熱性提高的觀點而言,作為用以製作配線基板的基底基材的材料,研究了使用具有反應性官能基的交聯成分。然而,若使用具有反應性官能基的交聯成分,則存在如下問題:所得的基底基材的介電損耗角正切容易增加,設置於基底基材上的配線的傳輸損耗容易增大。Furthermore, from the perspective of improving heat resistance, crosslinking components with reactive functional groups were investigated as materials for substrates used in the fabrication of wiring boards. However, if crosslinking components with reactive functional groups are used, the following problems arise: the dielectric loss tangent of the resulting substrate tends to increase, and the transmission loss of the wiring disposed on the substrate tends to increase.

此種狀況下,本發明的一方面的目的在於提供一種具有高伸縮性且具有低介電損耗角正切的導體基板、使用該導體基板的配線基板、可伸縮元件和配線基板的製造方法。 [解決課題之手段] In this context, one objective of the present invention is to provide a conductor substrate with high scalability and low dielectric loss tangent, a wiring substrate using the conductor substrate, a scalable element, and a method for manufacturing the wiring substrate. [Means for Solving the Problem]

為了達成所述目的,本發明的一方面提供一種導體基板,其具有:伸縮性樹脂層;以及導體箔,設置於所述伸縮性樹脂層上,所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑。To achieve the aforementioned objective, one aspect of the present invention provides a conductor substrate having: a stretchable resin layer; and a conductor foil disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition containing (A) a rubber component, (B) a crosslinking component having epoxy groups and (C) an ester-based curing agent.

本發明的另一方面提供一種導體基板,其具有:伸縮性樹脂層;以及導體鍍膜,設置於所述伸縮性樹脂層上。所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑。Another aspect of the present invention provides a conductor substrate having: a stretchable resin layer; and a conductor coating disposed on the stretchable resin layer. The stretchable resin layer comprises a cured resin composition containing (A) a rubber component, (B) a crosslinking component having epoxy groups, and (C) an ester-based curing agent.

根據所述導體基板,藉由使用包含(A)橡膠成分的伸縮性樹脂層作為其基底基材,可獲得高伸縮性。另外,認為先前於使用具有反應性官能基的交聯成分作為用以製作伸縮性樹脂層的材料的情況下介電損耗角正切增加的原因在於:交聯成分在硬化反應時生成羥基。羥基為體積小、高極化性的官能基,因此具有羥基的材料將整體上增加介電損耗角正切。另一方面,本發明者等人發現藉由組合使用作為交聯成分的(B)具有環氧基的交聯成分與作為硬化劑的(C)酯系硬化劑,可明顯抑制於交聯成分的硬化反應時生成羥基。其原因在於:交聯成分所具有的環氧基與酯系硬化劑的硬化反應不涉及羥基的生成,並且硬化後亦難以生成羥基。再者,該些的硬化物不會對伸縮性造成不良影響。因此,根據具有所述構成的導體基板,使用可維持高伸縮性並且可提高耐熱性的交聯成分而實現低介電損耗角正切。According to the aforementioned conductor substrate, high elongation can be obtained by using a stretchable resin layer containing (A) a rubber component as its base material. Furthermore, it is believed that the increase in dielectric loss tangent when using a crosslinking component with reactive functional groups as the material for fabricating the stretchable resin layer is due to the formation of hydroxyl groups during the curing reaction. Hydroxyl groups are small, highly polarizable functional groups; therefore, materials containing hydroxyl groups generally increase the dielectric loss tangent. On the other hand, the inventors have found that by combining (B) an epoxy-containing crosslinking component as a crosslinking component with (C) an ester-based curing agent as a curing agent, the formation of hydroxyl groups during the curing reaction of the crosslinking component can be significantly suppressed. The reason is that the curing reaction between the epoxy groups of the crosslinking component and the ester-based curing agent does not involve the formation of hydroxyl groups, and it is difficult to form hydroxyl groups after curing. Furthermore, these cured products do not adversely affect the extensibility. Therefore, according to the conductor substrate having the above-described structure, a low dielectric loss tangent can be achieved by using crosslinking components that can maintain high extensibility and improve heat resistance.

本發明的另一方面提供一種配線基板,其包含所述本發明的導體基板,所述導體箔或導體鍍膜形成配線圖案。所述配線基板是所述本發明的導體基板中的導體箔或導體鍍膜形成配線圖案的基板,並且所述配線基板包括具有所述特定的構成的伸縮性樹脂層,因此具有高伸縮性。並且藉由使用交聯成分,而具有高耐熱性,並且可具有低介電損耗角正切,配線圖案的傳輸損耗可充分降低。Another aspect of the present invention provides a wiring substrate comprising the conductor substrate of the present invention, wherein the conductor foil or conductor plating forms a wiring pattern. The wiring substrate is a substrate in which the conductor foil or conductor plating forms the wiring pattern within the conductor substrate of the present invention, and the wiring substrate includes a stretchable resin layer having the specific configuration, thus exhibiting high stretchability. Furthermore, by using crosslinking components, it exhibits high heat resistance and can have a low dielectric loss tangent, thereby significantly reducing the transmission loss of the wiring pattern.

本發明的另一方面提供一種可伸縮元件,其包括:所述本發明的配線基板;以及搭載於所述配線基板上的電子器件。所述可伸縮元件包括所述本發明的配線基板,包括具有所述特定的構成的伸縮性樹脂層,因此具有高伸縮性,且藉由使用交聯成分而具有高耐熱性並且可具有低介電損耗角正切,配線圖案的傳輸損耗可充分減少。Another aspect of the present invention provides a stretchable element comprising: the wiring substrate of the present invention; and an electronic device mounted on the wiring substrate. The stretchable element includes the wiring substrate of the present invention, comprising a stretchable resin layer having the specific configuration described above, thus exhibiting high stretchability, and possessing high heat resistance and low dielectric loss tangent through the use of crosslinking components, thereby significantly reducing transmission losses in the wiring pattern.

本發明的另一方面提供一種所述本發明的導體基板,其用以形成配線基板。所述配線基板包含具有伸縮性樹脂層、以及設置於所述伸縮性樹脂層上的導體箔或導體鍍膜的導體基板,所述導體箔或導體鍍膜形成配線圖案。Another aspect of the present invention provides a conductor substrate for forming a wiring substrate. The wiring substrate includes a conductor substrate having a stretchable resin layer and a conductor foil or conductor film disposed on the stretchable resin layer, the conductor foil or conductor film forming a wiring pattern.

本發明的另一方面提供一種製造所述本發明的配線基板的方法,包括:準備具有伸縮性樹脂層與積層於所述伸縮性樹脂層上的導體箔的積層板的步驟;於所述導體箔上形成蝕刻抗蝕劑的步驟;對所述蝕刻抗蝕劑進行曝光並對曝光後的所述蝕刻抗蝕劑進行顯影而形成覆蓋所述導體箔的一部分的抗蝕劑圖案的步驟;將未被所述抗蝕劑圖案覆蓋的部分的所述導體箔去除的步驟;以及將所述抗蝕劑圖案去除的步驟。Another aspect of the present invention provides a method for manufacturing the wiring substrate of the present invention, comprising: a step of preparing a multilayer having a stretchable resin layer and a conductor foil deposited on the stretchable resin layer; a step of forming an etching resist on the conductor foil; a step of exposing the etching resist and developing the exposed etching resist to form an etching resist pattern covering a portion of the conductor foil; a step of removing the portion of the conductor foil not covered by the etching resist pattern; and a step of removing the etching resist pattern.

本發明的另一方面提供一種製造所述本發明的配線基板的方法,包括:於伸縮性樹脂層上形成鍍覆抗蝕劑的步驟;對所述鍍覆抗蝕劑進行曝光並對曝光後的所述鍍覆抗蝕劑進行顯影而形成覆蓋所述伸縮性樹脂層的一部分的抗蝕劑圖案的步驟;於所述伸縮性樹脂層的未被所述抗蝕劑圖案覆蓋的部分的表面上,藉由無電鍍形成導體鍍膜的步驟;以及將所述抗蝕劑圖案去除的步驟。Another aspect of the present invention provides a method for manufacturing the wiring substrate of the present invention, comprising: a step of forming a coating resist on a stretchable resin layer; a step of exposing the coating resist and developing the exposed coating resist to form a resist pattern covering a portion of the stretchable resin layer; a step of forming a conductor film on the surface of the portion of the stretchable resin layer not covered by the resist pattern by electroless plating; and a step of removing the resist pattern.

本發明的另一方面提供一種製造所述本發明的配線基板的方法,包括:於伸縮性樹脂層上藉由無電鍍形成導體鍍膜的步驟;於所述導體鍍膜上形成鍍覆抗蝕劑的步驟;對所述鍍覆抗蝕劑進行曝光並對曝光後的所述鍍覆抗蝕劑進行顯影而形成覆蓋所述伸縮性樹脂層的一部分的抗蝕劑圖案的步驟;於未被所述抗蝕劑圖案覆蓋的部分的所述導體鍍膜上,藉由電鍍進一步形成導體鍍膜的步驟;將所述抗蝕劑圖案去除的步驟;以及將藉由無電鍍而形成的所述導體鍍膜中的未被藉由電鍍所形成的所述導體鍍膜覆蓋的部分去除的步驟。Another aspect of the present invention provides a method for manufacturing the wiring substrate of the present invention, comprising: a step of forming a conductor film on a stretchable resin layer by electroless plating; a step of forming a coating resist on the conductor film; exposing the coating resist and developing the exposed coating resist to form a coating covering the stretchable resin layer. The steps include: a step of forming a partial resist pattern; a step of further forming a conductor film by electroplating on the portion of the conductor film not covered by the resist pattern; a step of removing the resist pattern; and a step of removing the portion of the conductor film formed by electroless plating that was not covered by the conductor film formed by electroplating.

本發明的另一方面提供一種製造所述本發明的配線基板的方法,包括:於伸縮性樹脂層上所形成的導體鍍膜上形成蝕刻抗蝕劑的步驟;對所述蝕刻抗蝕劑進行曝光並對曝光後的所述蝕刻抗蝕劑進行顯影而形成覆蓋所述伸縮性樹脂層的一部分的抗蝕劑圖案的步驟;將未被所述抗蝕劑圖案覆蓋的部分的所述導體鍍膜去除的步驟;以及將所述抗蝕劑圖案去除的步驟。Another aspect of the present invention provides a method for manufacturing the wiring substrate of the present invention, comprising: a step of forming an etching resist on a conductor film formed on a stretchable resin layer; a step of exposing the etching resist and developing the exposed etching resist to form an etching resist pattern covering a portion of the stretchable resin layer; a step of removing the portion of the conductor film not covered by the etching resist pattern; and a step of removing the etching resist pattern.

藉由所述製造方法,可有效率地製造導體箔或導體鍍膜形成配線圖案的本發明的配線基板。 [發明的效果] The aforementioned manufacturing method allows for the efficient fabrication of the wiring substrate of this invention, which uses conductor foil or conductor plating to form wiring patterns. [Effects of the Invention]

根據本發明的一方面,可提供一種具有高伸縮性且具有低介電損耗角正切的導體基板、使用該導體基板的配線基板、可伸縮元件和配線基板的製造方法。According to one aspect of the present invention, a conductor substrate with high scalability and low dielectric loss tangent, a wiring substrate using the conductor substrate, a scalable element, and a method for manufacturing the wiring substrate can be provided.

以下,對本發明的數個實施形態進行詳細說明。但是,本發明並不限定於以下的實施形態。The following describes several embodiments of the present invention in detail. However, the present invention is not limited to the following embodiments.

根據一實施形態的導體基板,其具有伸縮性樹脂層;以及導體層,設置於伸縮性樹脂層的單面上或兩面上。伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑。一實施形態的配線基板具有包含所述樹脂組成物的硬化物的伸縮性樹脂層、以及設置於伸縮性樹脂層的單面上或兩面上且形成配線圖案的導體層。導體層可為導體箔或導體鍍膜。According to one embodiment of a conductor substrate, it has a stretchable resin layer and a conductor layer disposed on one or both sides of the stretchable resin layer. The stretchable resin layer includes a cured resin composition containing (A) a rubber component, (B) a crosslinking component having epoxy groups, and (C) an ester-based curing agent. Another embodiment of a wiring substrate has a stretchable resin layer containing the cured resin composition and a conductor layer disposed on one or both sides of the stretchable resin layer and forming a wiring pattern. The conductor layer may be a conductor foil or a conductor coating.

<導體基板> [導體箔] 導體箔的彈性係數可為40 GPa~300 GPa。藉由導體箔的彈性係數為40 GPa~300 Gpa,配線基板的伸長所致的導體箔的斷裂會有難以產生的傾向。就相同的觀點而言,導體箔的彈性係數可為50 GPa以上、或60 GPa以上,亦可為280 GPa以下、或250 GPa以下。此處的導體箔的彈性係數可以是利用共振法測定的值。 <Conductor Substrate> [Conductor Foil] The elastic coefficient of the conductor foil can be 40 GPa to 300 GPa. With an elastic coefficient of 40 GPa to 300 GPa, breakage of the conductor foil due to elongation of the wiring substrate is less likely to occur. From the same perspective, the elastic coefficient of the conductor foil can be 50 GPa or higher, or 60 GPa or higher, or 280 GPa or lower, or 250 GPa or lower. The elastic coefficient of the conductor foil here can be a value measured using the resonance method.

導體箔可為金屬箔。作為金屬箔,可列舉:銅箔、鈦箔、不鏽鋼箔、鎳箔、坡莫合金(permalloy)箔、42合金(42 alloy)箔、科伐合金(Kovar)箔、鎳鉻合金(Nichrome)箔、鈹銅箔、磷青銅箔、黃銅箔、鋅白銅箔、鋁箔、錫箔、鉛箔、鋅箔、焊錫箔、鐵箔、鉭箔、鈮箔、鉬箔、鋯箔、金箔、銀箔、鈀箔、莫內爾合金(Monel)箔、英高鎳合金(Inconel)箔、赫史特合金(hastelloy)箔等。就適當的彈性係數等的觀點而言,導體箔可選自銅箔、金箔、鎳箔、及鐵箔。就配線形成性的觀點而言,導體箔可為銅箔。銅箔可藉由微影而簡易地形成配線圖案且不會損及伸縮性樹脂層的特性。Conductor foil can be metal foil. Examples of metal foils include: copper foil, titanium foil, stainless steel foil, nickel foil, permalloy foil, 42 alloy foil, Kovar foil, nickel-chromium foil, beryllium copper foil, phosphor bronze foil, brass foil, zinc white copper foil, aluminum foil, tin foil, lead foil, zinc foil, solder foil, iron foil, tantalum foil, niobium foil, molybdenum foil, zirconium foil, gold foil, silver foil, palladium foil, Monel foil, Inconel foil, and Hastelloy foil, among others. From the perspective of appropriate elasticity, the conductor foil can be selected from copper foil, gold foil, nickel foil, and iron foil. From the perspective of wiring formation, the conductor foil can be copper foil. Copper foil can be easily formed into wiring patterns by photolithography without damaging the properties of the stretchable resin layer.

銅箔並無特別限制,例如可使用覆銅積層板及柔性配線板等中所使用的電解銅箔及輥軋銅箔。作為市售的電解銅箔,例如可列舉:F0-WS-18(古河電氣工業股份有限公司製造,商品名)、NC-WS-20(古河電氣工業股份有限公司製造,商品名)、YGP-12(日本電解股份有限公司製造,商品名)、GTS-18(古河電氣工業股份有限公司製造,商品名)及F2-WS-12(古河電氣工業股份有限公司製造,商品名)。作為壓延銅箔,例如可列舉:TPC箔(JX金屬股份有限公司製造,商品名)、HA箔(JX金屬股份有限公司製造,商品名)、HA-V2箔(JX金屬股份有限公司製造,商品名)、及C1100R(三井住友金屬礦山伸銅股份有限公司製造,商品名)。就與伸縮性樹脂層的密接性的觀點而言,可使用實施了粗糙化處理的銅箔。就耐折性的觀點而言,可使用輥軋銅箔。There are no particular restrictions on the copper foil used; for example, electrolytic copper foil and roll-rolled copper foil used in copper-clad laminates and flexible wiring boards can be used. Commercially available electrolytic copper foils include, for example: F0-WS-18 (manufactured by Furukawa Electric Industries, Ltd., trade name), NC-WS-20 (manufactured by Furukawa Electric Industries, Ltd., trade name), YGP-12 (manufactured by Nippon Electrolytic Co., Ltd., trade name), GTS-18 (manufactured by Furukawa Electric Industries, Ltd., trade name), and F2-WS-12 (manufactured by Furukawa Electric Industries, Ltd., trade name). Examples of rolled copper foils include: TPC foil (manufactured by JX Metals Co., Ltd., trade name), HA foil (manufactured by JX Metals Co., Ltd., trade name), HA-V2 foil (manufactured by JX Metals Co., Ltd., trade name), and C1100R (manufactured by Sumitomo Mitsui Metal Mining Shinco Co., Ltd., trade name). From the viewpoint of adhesion to the stretchable resin layer, copper foil with a roughening treatment can be used. From the viewpoint of folding endurance, roll-rolled copper foil can be used.

金屬箔可具有藉由粗糙化處理而形成的粗糙化面。於該情況下,金屬箔通常以粗糙化面與伸縮性樹脂層相接的朝向設置於伸縮性樹脂層上。就伸縮性樹脂層與金屬箔的密接性的觀點而言,粗糙化面的表面粗糙度Ra可為0.1 μm~3 μm、或0.2 μm~2.0 μm。為容易地形成微細的配線,粗糙化面的表面粗糙度Ra可為0.3 μm~1.5 μm。The metal foil may have a roughened surface formed by a roughening treatment. In this case, the metal foil is typically disposed on the stretchable resin layer with the roughened surface in contact with the stretchable resin layer. From the viewpoint of the adhesion between the stretchable resin layer and the metal foil, the surface roughness Ra of the roughened surface can be 0.1 μm to 3 μm, or 0.2 μm to 2.0 μm. To facilitate the formation of fine wiring, the surface roughness Ra of the roughened surface can be 0.3 μm to 1.5 μm.

表面粗糙度Ra例如可使用表面形狀測定裝置Wyko NT9100(維易科(Veeco)公司製造)並以如下條件進行測定。 測定條件 內部透鏡:1倍 外部透鏡:50倍 測定範圍:0.120×0.095 mm 測定深度:10 μm 測定方式:垂直掃描型干涉方式(VSI方式) Surface roughness Ra can be measured, for example, using the Wyko NT9100 surface shape measuring device (manufactured by Veeco) under the following conditions: Measurement Conditions Inner lens: 1x Outer lens: 50x Measurement range: 0.120 × 0.095 mm Measurement depth: 10 μm Measurement method: Vertical scanning interferometry (VSI)

導體箔的厚度並無特別限制,可為1 μm~50 μm。若導體箔的厚度為1 μm以上,則可更容易地形成配線圖案。若導體箔的厚度為50 μm以下,則特別容易進行蝕刻及處理。There is no particular limitation on the thickness of the conductor foil, which can range from 1 μm to 50 μm. If the thickness of the conductor foil is greater than 1 μm, it is easier to form wiring patterns. If the thickness of the conductor foil is less than 50 μm, it is particularly easy to etch and process.

導體箔設置於伸縮性樹脂層的單面或兩面上。藉由於伸縮性樹脂層的兩面上設置導體箔,可抑制由用於硬化等的加熱引起的翹曲。Conductor foils are disposed on one or both sides of the stretchable resin layer. By disposing conductor foils on both sides of the stretchable resin layer, warping caused by heating for hardening, etc., can be suppressed.

設置導體箔的方法並無特別限制,例如有:將用以形成伸縮性樹脂層的樹脂組成物直接塗佈於金屬箔的方法;及將用以形成伸縮性樹脂層的樹脂組成物塗佈於載體膜(carrier film)而形成樹脂層(硬化前的伸縮性樹脂層),並將所形成的樹脂層積層於導體箔上的方法。There are no particular limitations on the method of setting the conductor foil. For example, there are methods such as: directly coating a resin composition for forming a scalable resin layer onto a metal foil; and coating a resin composition for forming a scalable resin layer onto a carrier film to form a resin layer (scalable resin layer before curing), and depositing the formed resin layer onto the conductor foil.

[導體鍍膜] 導體鍍膜可藉由加成法(additive method)或半加成法(semi-additive method)中所使用的通常的鍍覆法來形成。例如,於進行使鈀附著的鍍覆觸媒賦予處理後,將伸縮性樹脂層浸漬於無電鍍液中而於底塗層(primer)的整個表面上析出厚度為0.3 μm~1.5 μm的無電鍍層(導體層)。可視需要進一步進行電鍍(電性鍍覆)而調整成所需的厚度。作為無電鍍中使用的無電鍍液,可使用任意的無電鍍液,並無特別限制。關於電鍍,亦可採用通常的方法,並無特別限制。就成本方面及電阻值的觀點而言,導體鍍膜(無電鍍膜、電鍍膜)可為鍍銅膜。 [Conductor Coating] Conductor coatings can be formed using conventional coating methods employed in addition or semi-additive methods. For example, after treatment with a palladium-adhesive coating catalyst, a stretchable resin layer is immersed in an electroless plating solution to deposit an electroless plating layer (conductor layer) with a thickness of 0.3 μm to 1.5 μm on the entire surface of the primer. Further electroplating (electrodecoration) can be performed as needed to adjust the thickness to the desired level. Any electroless plating solution can be used without particular limitation. Conventional methods can also be employed for electroplating without particular limitation. From the perspectives of cost and resistance, conductor coatings (electrode-coating and electroplating) can be copper-plated films.

再者,可將不需要的部分蝕刻去除而形成電路層。蝕刻中所使用的蝕刻液可根據鍍層的種類而適當地選擇。例如,在導體為鍍銅的情況下,作為蝕刻中所使用的蝕刻液,例如可使用濃硫酸或過氧化氫水的混合溶液、或者氯化鐵溶液等。Furthermore, unwanted portions can be etched away to form the circuit layer. The etching solution used in the etching process can be appropriately selected depending on the type of plating layer. For example, in the case of copper plating, the etching solution used in the etching process can be a mixture of concentrated sulfuric acid or hydrogen peroxide water, or a ferric chloride solution, etc.

為使與導體鍍膜的接著力提高,可於伸縮性樹脂層上預先形成凹凸。作為形成凹凸的方法,例如可列舉對銅箔的粗糙化面進行轉印的方法。作為銅箔,例如可使用YGP-12(日本電解股份有限公司製造,商品名)、GTS-18(古河電氣工業股份有限公司製造,商品名)、或F2-WS-12(古河電氣工業股份有限公司製造,商品名)。To improve adhesion to the conductor coating, unevenness can be pre-formed on the stretchable resin layer. One method for forming unevenness is, for example, transferring the roughened surface of the copper foil. For the copper foil, examples include YGP-12 (manufactured by Nippon Electrolytic Co., Ltd., trade name), GTS-18 (manufactured by Furukawa Electric Industries, Ltd., trade name), or F2-WS-12 (manufactured by Furukawa Electric Industries, Ltd., trade name).

作為對銅箔的粗糙化面進行轉印的方法,例如有:將用以形成伸縮性樹脂層的樹脂組成物直接塗佈於銅箔的粗糙化面的方法;及將用以形成伸縮性樹脂層的樹脂組成物塗敷於載體膜後,在銅箔上成型樹脂層(硬化前的伸縮性樹脂層)的方法。藉由於伸縮性樹脂層的兩面上形成導體鍍膜,可抑制由用於硬化等的加熱引起的翹曲。Methods for transferring the roughened surface of copper foil include: directly applying a resin composition used to form a stretchable resin layer to the roughened surface of the copper foil; and a method of coating a resin composition used to form a stretchable resin layer onto a carrier film and then forming a resin layer (the stretchable resin layer before curing) on the copper foil. By forming a conductor coating on both sides of the stretchable resin layer, warping caused by heating for curing, etc., can be suppressed.

可以與導體鍍膜的高接著化為目的而對伸縮性樹脂層實施表面處理。作為表面處理,例如可列舉一般的配線板的製造步驟中所使用的粗糙化處理(除膠渣(de-smear)處理)、紫外線(ultraviolet,UV)處理、及電漿處理。Surface treatments can be applied to stretchable resin layers for the purpose of achieving high adhesion of conductor coatings. Examples of surface treatments include roughening treatments (de-smearing), ultraviolet (UV) treatment, and plasma treatment used in the general wiring board manufacturing process.

作為除膠渣處理,可使用一般的配線板的製造步驟中所使用的方法,例如可使用高錳酸鈉水溶液。As a process for removing adhesive residue, methods used in the general wiring board manufacturing process can be employed, such as using an aqueous solution of sodium permanganate.

[伸縮性樹脂層] 伸縮性樹脂層可具有例如進行拉伸變形至應變為20%為止後的恢復率為80%以上的伸縮性。該恢復率是在使用伸縮性樹脂層的測定樣品的拉伸試驗中求出。將第1次拉伸試驗中所施加的應變(位移量)設為X,接著將回到初始位置而再次進行拉伸試驗時開始施加負荷時的位置與X的差設為Y,且藉由式:R(%)=(Y/X)×100%來計算出R,將該R定義為恢復率。可將X設為20%來測定恢復率。圖1是表示恢復率的測定例的應力-應變曲線。就相對於重覆使用的耐受性的觀點而言,恢復率可為80%以上、85%以上、或90%以上。恢復率於定義上的上限為100%。 [Expandable Resin Layer] Expandable resin layers can have, for example, a recovery rate of 80% or more after tensile deformation to a strain of 20%. This recovery rate is determined in a tensile test of a test sample using an expandable resin layer. Let X be the strain (displacement) applied in the first tensile test, then let Y be the difference between X and the position at which the load is first applied when the sample returns to its initial position and is subjected to tensile testing again. R is calculated using the formula: R (%) = (Y/X) × 100%, and this R is defined as the recovery rate. The recovery rate can be measured by setting X to 20%. Figure 1 shows the stress-strain curve for a measurement example of the recovery rate. In terms of tolerance to repeated use, the recovery rate can be above 80%, 85%, or 90%. The upper limit of the recovery rate by definition is 100%.

伸縮性樹脂層的彈性係數(拉伸彈性係數)可為0.1 MPa以上、1000 MPa以下。若彈性係數為0.1 MPa以上、1000 MPa以下,則存在作為基材的操作性及可撓性特別優異的傾向。就該觀點而言,彈性係數可為0.3 MPa以上、100 MPa以下,或0.5 MPa以上、50 MPa以下。The elastic modulus (tensile elastic modulus) of the stretchable resin layer can be 0.1 MPa or higher and 1000 MPa or lower. If the elastic modulus is 0.1 MPa or higher and 1000 MPa or lower, it tends to have particularly excellent workability and flexibility as a substrate. From this point of view, the elastic modulus can be 0.3 MPa or higher and 100 MPa or lower, or 0.5 MPa or higher and 50 MPa or lower.

伸縮性樹脂層的斷裂伸長率可為100%以上。若斷裂伸長率為100%以上,則存在容易獲得充分的伸縮性的傾向。就該觀點而言,斷裂伸長率可為150%以上、200%以上、300%以上或500%以上。斷裂伸長率的上限並無特別限制,通常為1000%左右以下。The elongation at break of the extensible resin layer can be 100% or higher. If the elongation at break is 100% or higher, there is a tendency to easily obtain sufficient extensibility. From this perspective, the elongation at break can be 150% or higher, 200% or higher, 300% or higher, or 500% or higher. There is no particular upper limit to the elongation at break, and it is usually around 1000% or lower.

伸縮性樹脂層的介電損耗角正切(Df)可為0.004以下。若介電損耗角正切為0.004以下,則存在可充分減少設置在伸縮性樹脂層上的配線圖案的傳輸損耗的傾向。就該觀點而言,介電損耗角正切可為0.0035以下、0.003以下、或0.0025以下。介電損耗角正切的下限並無特別限制,通常為0.0005左右以上。The dielectric loss tangent (Df) of the stretchable resin layer can be 0.004 or less. If the dielectric loss tangent is 0.004 or less, there is a tendency to sufficiently reduce the transmission loss of wiring patterns disposed on the stretchable resin layer. From this perspective, the dielectric loss tangent can be 0.0035 or less, 0.003 or less, or 0.0025 or less. There is no particular limitation on the lower limit of the dielectric loss tangent, which is usually around 0.0005 or more.

伸縮性樹脂層的介電常數(Dk)可為4.0以下。若介電常數為4.0以下,則存在可充分減少設置於伸縮性樹脂層上的配線圖案的傳輸損耗的傾向。就該觀點而言,介電常數可為3.5以下、3.0以下、或2.5以下。The dielectric constant (Dk) of the stretchable resin layer can be 4.0 or less. If the dielectric constant is 4.0 or less, there is a tendency to sufficiently reduce the transmission loss of the wiring pattern disposed on the stretchable resin layer. From this point of view, the dielectric constant can be 3.5 or less, 3.0 or less, or 2.5 or less.

伸縮性樹脂層可以是在其紅外線吸收光譜中不存在歸屬於羥基的伸縮振動的吸收峰值的層。藉此,伸縮性樹脂層的介電損耗角正切充分減少,存在可充分減少設置於伸縮性樹脂層上的配線圖案的傳輸損耗的傾向。The stretchable resin layer can be a layer in which there are no absorption peaks attributable to the stretching vibrations of hydroxyl groups in its infrared absorption spectrum. This sufficiently reduces the dielectric loss tangent of the stretchable resin layer, and there is a tendency to sufficiently reduce the transmission loss of wiring patterns disposed on the stretchable resin layer.

伸縮性樹脂層包含樹脂組成物(硬化性樹脂組成物)的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑。即,伸縮性樹脂層含有(B)具有環氧基的交聯成分的交聯聚合物。主要藉由所述(A)橡膠成分而容易地對伸縮性樹脂層賦予伸縮性。The stretchable resin layer comprises a cured resin composition (curing resin composition) containing (A) a rubber component, (B) an epoxy-containing crosslinking component, and (C) an ester-based curing agent. That is, the stretchable resin layer contains a crosslinked polymer of (B) the epoxy-containing crosslinking component. Stretchability is readily imparted to the stretchable resin layer primarily by means of the rubber component (A).

(A)橡膠成分例如可包含選自由丙烯酸橡膠、異戊二烯橡膠、丁基橡膠、苯乙烯丁二烯橡膠、丁二烯橡膠、丙烯腈丁二烯橡膠、矽酮橡膠、胺基甲酸酯橡膠、氯丁二烯橡膠、乙烯丙烯橡膠、氟橡膠、硫化橡膠、表氯醇橡膠、及氯化丁基橡膠所組成的群組中的至少一種橡膠。就對配線進行保護而免受因吸濕等造成的損傷的觀點而言,可使用透氣性低的橡膠成分。從此觀點而言,(A)橡膠成分可包含選自苯乙烯丁二烯橡膠、丁二烯橡膠、及丁基橡膠中的至少一種。藉由使用苯乙烯丁二烯橡膠,可以提高伸縮性樹脂層對鍍覆步驟中使用的各種藥液的耐受性,並且可以高良率地製造配線基板。(A) The rubber component may include, for example, at least one rubber selected from the group consisting of acrylic rubber, isoprene rubber, butyl rubber, styrene-butadiene rubber, butadiene rubber, acrylonitrile-butadiene rubber, silicone rubber, urethane rubber, chloroprene rubber, ethylene propylene rubber, fluororubber, vulcanized rubber, epichlorohydrin rubber, and chlorinated butyl rubber. From the viewpoint of protecting the wiring from damage caused by moisture absorption, a rubber component with low air permeability may be used. Therefore, (A) the rubber component may include at least one selected from styrene-butadiene rubber, butadiene rubber, and butyl rubber. By using styrene-butadiene rubber, the tolerance of the stretchable resin layer to various chemicals used in the coating process can be improved, and wiring boards can be manufactured with high yield.

作為丙烯酸橡膠的市售品,例如可列舉:日本瑞翁(ZEON)股份有限公司的「尼珀(Nipol)AR系列」,可樂麗(Kuraray)股份有限公司的「可樂麗特(KURARITY)系列」。Commercially available acrylic rubber products include, for example, the "Nipol AR series" from ZEON Corporation of Japan and the "KURARITY series" from Kuraray Corporation.

作為異戊二烯橡膠的市售品,例如可列舉:日本瑞翁(ZEON)股份有限公司的「尼珀(Nipol)IR系列」。Commercially available isoprene rubber products include, for example, the "Nipol IR series" from ZEON Corporation of Japan.

作為丁基橡膠的市售品,例如可列舉:JSR股份有限公司的「巴蒂(BUTYL)系列」等。Commercially available butyl rubber products include, for example, JSR Corporation's "BUTYL" series.

作為苯乙烯丁二烯橡膠的市售品,例如可列舉:JSR股份有限公司的「戴納龍(Dynaron)SEBS系列」、「戴納龍(Dynaron)HSBR系列」,日本科騰聚合物(Kraton polymers Japan)股份有限公司的「科騰(Kraton)D聚合物系列」,及阿隆化成(Aronkasei)股份有限公司的「AR系列」。Commercially available styrene-butadiene rubber products include, for example, JSR Corporation's "Dynaron SEBS series" and "Dynaron HSBR series", Kraton Polymers Japan Co., Ltd.'s "Kraton D Polymer series", and Aronkasei Co., Ltd.'s "AR series".

作為丁二烯橡膠的市售品,例如可列舉:日本瑞翁(ZEON)股份有限公司的「尼珀(Nipol)BR系列」等。Commercially available butadiene rubber products include, for example, the "Nipol BR series" from ZEON Corporation of Japan.

作為丙烯腈丁二烯橡膠的市售品,例如可列舉:JSR股份有限公司的「JSR NBR系列」。Commercially available acrylonitrile butadiene rubber products include, for example, JSR Corporation's "JSR NBR series".

作為矽酮橡膠的市售品,例如可列舉:信越矽酮股份有限公司的「KMP系列」。Commercially available silicone rubber products include, for example, Shin-Etsu Silicone Co., Ltd.'s "KMP series".

作為乙烯丙烯橡膠的市售品,例如可列舉:JSR股份有限公司的「JSR EP系列」等。Commercially available products made of ethylene propylene rubber include, for example, JSR Corporation's "JSR EP series".

作為氟橡膠的市售品,例如可列舉:大金(Daikin)股份有限公司的「戴艾魯(DAIEL)系列」等。Commercially available fluororubber products include, for example, Daikin Corporation's "DAIEL series".

作為表氯醇橡膠的市售品,例如可列舉:日本瑞翁(ZEON)股份有限公司的「黑得林(Hydrin)系列」。Commercially available epichlorohydrin rubber products include, for example, the "Hydrin series" from ZEON Corporation of Japan.

(A)橡膠成分亦可利用合成而製作。例如,丙烯酸橡膠可藉由如下方式獲得:使(甲基)丙烯酸、(甲基)丙烯酸酯、芳香族乙烯基化合物、氰化乙烯基化合物等反應。(A) Rubber components can also be synthesized. For example, acrylic rubber can be obtained by reacting (meth)acrylic acid, (meth)acrylate, aromatic vinyl compounds, cyanide vinyl compounds, etc.

(A)橡膠成分亦可包含具有交聯基的橡膠。藉由使用具有交聯基的橡膠,從而存在容易提高伸縮性樹脂層的耐熱性的傾向。交聯基只要為可使將(A)橡膠成分的分子鏈交聯的反應進行的反應性基即可。作為其例,可列舉:後述的(B)交聯成分所具有的反應性基、酸酐基、胺基、羥基、環氧基及羧基。(A) The rubber component may also include rubber with cross-linking groups. By using rubber with cross-linking groups, there is a tendency to easily improve the heat resistance of the stretchable resin layer. The cross-linking group is any reactive group that enables the reaction of cross-linking the molecular chains of the (A) rubber component. Examples include reactive groups, anhydride groups, amino groups, hydroxyl groups, epoxy groups, and carboxyl groups possessed by the cross-linking component (B) described later.

(A)橡膠成分亦可包含具有酸酐基和羧基中的至少一交聯基的橡膠。作為具有酸酐基的橡膠的例子,可列舉利用馬來酸酐而部分改質的橡膠。利用馬來酸酐而部分改質的橡膠為包含源自馬來酸酐的構成單元的聚合物。作為利用馬來酸酐而部分改質的橡膠的市售品,例如存在旭化成股份有限公司製造的苯乙烯系彈性體「塔夫普倫(tufprene)912」。(A) The rubber component may also include rubber having at least one cross-linking group among an anhydride group and a carboxyl group. Examples of rubber having an anhydride group include rubber partially modified with maleic anhydride. Rubber partially modified with maleic anhydride is a polymer containing constituent units derived from maleic anhydride. Commercially available examples of rubber partially modified with maleic anhydride include, for instance, the styrene-based elastomer "Tufprene 912" manufactured by Asahi Kasei Corporation.

利用馬來酸酐而部分改質的橡膠亦可為利用馬來酸酐而部分改質的氫化型苯乙烯系彈性體。氫化型苯乙烯系彈性體亦可期待耐候性提高等效果。氫化型苯乙烯系彈性體是使氫與具有包含不飽和雙鍵的軟鏈段的苯乙烯系彈性體的不飽和雙鍵進行加成反應而獲得的彈性體。作為經順丁烯二酸酐部分地改質的氫化型苯乙烯系彈性體的市售品的例子,有日本科騰聚合物(Kraton polymers Japan)股份有限公司的「FG1901」、「FG1924」、旭化成股份有限公司的「塔芙泰科(TufTech)M1911」、「塔芙泰科(TufTech)M1913」、「塔芙泰科(TufTech)M1943」。Partially modified rubber using maleic anhydride can also be a partially modified hydrogenated styrene-based elastomer using maleic anhydride. Hydrogenated styrene-based elastomers are also expected to have improved weather resistance and other effects. Hydrogenated styrene-based elastomers are elastomers obtained by reacting hydrogen with the unsaturated double bonds of a styrene-based elastomer having soft chains containing unsaturated double bonds. Examples of commercially available hydrogenated styrene-based elastomers that have been partially modified with maleic anhydride include "FG1901" and "FG1924" from Kraton Polymers Japan Co., Ltd., and "TufTech M1911", "TufTech M1913" and "TufTech M1943" from Asahi Kasei Corporation.

就塗膜性的觀點而言,(A)橡膠成分的重量平均分子量可為20000~200000、30000~150000、或50000~125000。此處的重量平均分子量(Mw)是表示藉由凝膠滲透層析法(Gel Permeation Chromatography,GPC)而求出的標準聚苯乙烯換算值。From a coating perspective, (A) the weight-average molecular weight of the rubber component can be 20,000–200,000, 30,000–150,000, or 50,000–125,000. Here, the weight-average molecular weight (Mw) represents the standard polystyrene conversion value obtained by gel permeation chromatography (GPC).

在樹脂組成物中,以(A)橡膠成分、(B)交聯成分及(C)酯系硬化劑的總量作為基準,(A)橡膠成分的含量較佳為60質量%~95質量%,更佳為65質量%~90質量%,再更佳為70質量%~85質量%。若(A)橡膠成分的含量為60質量%以上,則存在如下傾向:容易獲得更充分的伸縮性,且橡膠成分與交聯成分充分混合。若(A)橡膠成分的含量為95質量%以下,則存在如下傾向:伸縮性樹脂層於密接性、絕緣可靠性及耐熱性的方面具有特別優異的特性。以伸縮性樹脂層的質量作為基準,伸縮性樹脂層中的(A)橡膠成分的含量可為所述範圍內。In the resin composition, based on the total amount of (A) rubber component, (B) crosslinking component, and (C) ester-based hardener, the content of (A) rubber component is preferably 60% to 95% by mass, more preferably 65% to 90% by mass, and even more preferably 70% to 85% by mass. If the content of (A) rubber component is 60% by mass or more, there is a tendency to obtain more sufficient elasticity, and the rubber component and crosslinking component are thoroughly mixed. If the content of (A) rubber component is 95% by mass or less, there is a tendency for the elastic resin layer to have particularly excellent properties in terms of adhesion, insulation reliability, and heat resistance. Based on the quality of the stretchable resin layer, the content of (A) rubber component in the stretchable resin layer can be within the range described.

(B)具有環氧基的交聯成分是於硬化反應時交聯而形成交聯聚合物的成分。(B)具有環氧基的交聯成分若於分子內具有環氧基則並無特別限制,例如可為通常的環氧樹脂。作為環氧樹脂,可為單官能、二官能或多官能的任一種,並無特別限制,但為了獲得充分的硬化性,可使用二官能或多官能的環氧樹脂。(B) Crosslinking components with epoxy groups are components that crosslink during the curing reaction to form crosslinked polymers. (B) There are no particular limitations on the presence of epoxy groups within the molecule in crosslinking components; for example, they can be ordinary epoxy resins. As epoxy resins, they can be monofunctional, difunctional, or polyfunctional without particular limitation, but difunctional or polyfunctional epoxy resins can be used to obtain sufficient curability.

作為環氧樹脂,可列舉:雙酚A型、雙酚F型、苯酚酚醛清漆型、萘型、二環戊二烯型、甲酚酚醛清漆型等。經脂肪鏈改質的環氧樹脂可賦予柔軟性。作為市售的脂肪鏈改質環氧樹脂,例如可列舉:迪愛生(DIC)股份有限公司製造的EXA-4816。就硬化性、低黏性、及耐熱性的觀點而言,可選擇苯酚酚醛清漆型、甲酚酚醛清漆型、萘型、或二環戊二烯型的環氧樹脂。所述環氧樹脂可單獨使用或者將兩種以上組合使用。Examples of epoxy resins include: bisphenol A type, bisphenol F type, phenolic varnish type, naphthalene type, dicyclopentadiene type, and cresol varnish type. Aliphatic chain modified epoxy resins impart softness. Commercially available aliphatic chain modified epoxy resins include, for example, EXA-4816 manufactured by DIC Corporation. From the perspectives of curability, low viscosity, and heat resistance, phenolic varnish type, cresol varnish type, naphthalene type, or dicyclopentadiene type epoxy resins can be selected. These epoxy resins can be used alone or in combination of two or more.

藉由具有馬來酸酐基或羧基的橡膠與具有環氧基的化合物(環氧樹脂)的組合,就伸縮性樹脂層的耐熱性及低透濕度、伸縮性樹脂層與導電層的密接性、及伸縮性樹脂層的低黏度的方面而言,可獲得特別優異的效果。若伸縮性樹脂層的耐熱性提高,則例如可抑制氮回流般的加熱步驟中的伸縮性樹脂層的劣化。若伸縮性樹脂層具有低黏度,則可作業性良好地操作導體基板或配線基板。By combining rubbers with maleic anhydride or carboxyl groups with epoxy compounds (epoxy resins), particularly excellent effects can be obtained in terms of the heat resistance and low moisture permeability of the stretchable resin layer, the adhesion between the stretchable resin layer and the conductive layer, and the low viscosity of the stretchable resin layer. If the heat resistance of the stretchable resin layer is improved, for example, the degradation of the stretchable resin layer during heating steps such as nitrogen reflux can be suppressed. If the stretchable resin layer has low viscosity, the conductor substrate or wiring substrate can be handled with good workability.

樹脂組成物可於不顯著損及本發明的效果的範圍內包含(B)具有環氧基的交聯成分以外的其他交聯成分。就更充分地減少伸縮性樹脂層的介電損耗角正切的觀點而言,相對於(B)具有環氧基的交聯成分100質量份,其他交聯成分的含量較佳為未滿10質量份。The resin composition may contain crosslinking components other than (B) the epoxy-containing crosslinking component, to the extent that it does not significantly impair the effects of the invention. From the viewpoint of more sufficiently reducing the dielectric loss tangent of the stretchable resin layer, the content of other crosslinking components is preferably less than 10 parts by mass relative to 100 parts by mass of (B) the epoxy-containing crosslinking component.

(C)酯系硬化劑是其自身參與硬化反應的化合物,可提高伸縮性樹脂層的耐熱性且減少介電損耗角正切。(C) Ester-based hardeners are compounds that participate in the hardening reaction themselves, which can improve the heat resistance of stretchable resin layers and reduce dielectric loss tangent.

作為酯系硬化劑,並無特別限制,但就更充分地獲得耐熱性提高效果及介電損耗角正切減少效果的觀點而言,可較佳地使用苯酚酯類、苯硫酚酯類、N-羥基胺酯類、雜環羥基化合物的酯類等於一分子中具有一個或兩個以上的高反應活性的酯基的化合物。作為酯系硬化劑,更具體而言,例如可列舉「艾比克隆(EPICLON)HPC8000-65T」、「艾比克隆(EPICLON)HPC8000-L-65MT」、「艾比克隆(EPICLON)HPC8150-60T」(均為迪愛生(DIC)股份有限公司製造的商品名)等。該些可單獨使用一種或者將兩種以上組合使用。There are no particular limitations on ester-based curing agents, but from the viewpoint of more fully obtaining the effects of improved heat resistance and reduced dielectric loss tangent, compounds with one or more highly reactive ester groups per molecule, such as phenolic esters, thiophenolic esters, N-hydroxyamine esters, and heterocyclic hydroxyl compounds, are preferable. More specifically, examples of ester-based curing agents include "EPICLON HPC8000-65T", "EPICLON HPC8000-L-65MT", and "EPICLON HPC8150-60T" (all trade names manufactured by DIC Corporation). These can be used alone or in combination.

認為酯系硬化劑於硬化反應時如下述式(I)所示般與(B)交聯成分反應。認為於所述(C)酯系硬化劑與(B)交聯成分的反應中不生成羥基,另外,即便發生副反應,亦難以生成羥基,結果可實現低介電損耗角正切。It is believed that the ester-based curing agent reacts with the crosslinking component (B) as shown in formula (I) below during the curing reaction. It is believed that no hydroxyl groups are generated in the reaction between the ester-based curing agent (C) and the crosslinking component (B). Furthermore, even if side reactions occur, it is difficult to generate hydroxyl groups, resulting in a low dielectric loss tangent.

[化1] 式中,R 1、R 2及R 3分別獨立地表示一價有機基,就可更充分地獲得本發明的效果的方面而言,亦可為具有芳香環的一價有機基。 [Chemistry 1] In the formula, R1 , R2 and R3 each independently represent a monovalent organic group, and in order to more fully obtain the effects of the invention, they can also be monovalent organic groups with aromatic rings.

樹脂組成物可於不顯著損及本發明的效果的範圍內包含(C)酯系硬化劑以外的其他硬化劑。就更充分地減少伸縮性樹脂層的介電損耗角正切的觀點而言,相對於(C)酯系硬化劑100質量份,其他硬化劑的含量較佳為未滿10質量份。The resin composition may contain curing agents other than (C) ester-based curing agent to a extent that does not significantly impair the effects of the invention. From the viewpoint of more sufficiently reducing the dielectric loss tangent of the stretchable resin layer, the content of other curing agents is preferably less than 10 parts by weight relative to 100 parts by weight of (C) ester-based curing agent.

於樹脂組成物中,以(A)橡膠成分、(B)交聯成分及(C)酯系硬化劑的總量作為基準,(B)交聯成分及(C)酯系硬化劑的合計含量較佳為5質量%~40質量%,更佳為10質量%~35質量%,再更佳為15質量%~30質量%。若(B)交聯成分及(C)酯系硬化劑的合計含量為5質量%以上,則存在如下傾向:容易獲得更充分的硬化且伸縮性樹脂層於密接性、絕緣可靠性及耐熱性的方面具有特別優異的特性。若(B)交聯成分及(C)酯系硬化劑的合計含量為40質量%以下,則存在如下傾向:容易獲得更充分的伸縮性,且橡膠成分與交聯成分充分混合。In the resin composition, using the total amount of (A) rubber component, (B) crosslinking component and (C) ester-based hardener as a benchmark, the total content of (B) crosslinking component and (C) ester-based hardener is preferably 5% to 40% by mass, more preferably 10% to 35% by mass, and even more preferably 15% to 30% by mass. If the total content of (B) crosslinking component and (C) ester-based hardener is 5% by mass or more, there is a tendency to obtain more complete curing and the extensible resin layer has particularly excellent properties in terms of adhesion, insulation reliability and heat resistance. If the total content of (B) crosslinking component and (C) ester-based curing agent is less than 40% by mass, there is a tendency to obtain more sufficient elasticity and for the rubber component and crosslinking component to be fully mixed.

於樹脂組成物中,(B)交聯成分與(C)酯系硬化劑的含量比較佳為以(B)環氧樹脂中的環氧基與(C)酯系硬化劑中的酯鍵的當量比計為4:5~5:4的範圍內。藉由含量比為所述範圍內,存在如下傾向:容易獲得更充分的硬化且伸縮性樹脂層於密接性、絕緣可靠性及耐熱性的方面具有特別優異的特性。In the resin composition, the preferred content ratio of (B) crosslinking component to (C) ester-based hardener is within the range of 4:5 to 5:4, calculated as the equivalent ratio of epoxy groups in (B) epoxy resin to ester bonds in (C) ester-based hardener. Within this content range, there is a tendency to obtain more complete curing, and the elastomeric resin layer exhibits particularly excellent properties in terms of adhesion, insulation reliability, and heat resistance.

樹脂組成物亦可進一步含有(D)硬化促進劑。(D)硬化促進劑為作為硬化反應的觸媒而發揮功能的化合物。(D)硬化促進劑亦可為選自三級胺、咪唑、有機酸金屬鹽、磷系化合物、路易斯酸、胺錯合物鹽及膦中者。其中,就樹脂組成物的清漆的保存穩定性及硬化性的觀點而言,可使用咪唑。於(A)橡膠成分包含利用馬來酸酐而部分改質的橡膠的情況下,亦可選擇與其相容的咪唑。The resin composition may further contain a (D) curing accelerator. The (D) curing accelerator is a compound that functions as a catalyst for the curing reaction. The (D) curing accelerator may also be selected from tertiary amines, imidazoles, organic acid metal salts, phosphorus compounds, Lewis acids, amine complex salts, and phosphines. Among these, imidazoles may be used from the viewpoint of the storage stability and curing properties of the varnish of the resin composition. In cases where the (A) rubber component contains rubber partially modified using maleic anhydride, a compatible imidazole may also be selected.

於樹脂組成物中,相對於(A)橡膠成分、(B)交聯成分及(C)酯系硬化劑的合計量100質量份,(D)硬化促進劑的含量可為0.1質量份~10質量份。若(D)硬化促進劑的含量為0.1質量份以上,則存在容易獲得更充分的硬化的傾向。若(D)硬化促進劑的含量為10質量份以下,則存在容易獲得更充分的耐熱性的傾向。就以上觀點而言,(D)硬化促進劑的含量可為0.3質量份~7質量份、或0.5質量份~5質量份。In the resin composition, relative to 100 parts by mass of the total amount of (A) rubber component, (B) crosslinking component, and (C) ester-based curing agent, the content of (D) curing accelerator can be 0.1 parts by mass to 10 parts by mass. If the content of (D) curing accelerator is 0.1 parts by mass or more, there is a tendency to obtain more sufficient curing. If the content of (D) curing accelerator is 10 parts by mass or less, there is a tendency to obtain more sufficient heat resistance. Based on the above considerations, the content of (D) curing accelerator can be 0.3 parts by mass to 7 parts by mass, or 0.5 parts by mass to 5 parts by mass.

樹脂組成物除了所述成分以外,亦可視需要於並不顯著損及本發明的效果的範圍內進而包含抗氧化劑、黃變防止劑、紫外線吸收劑、可見光吸收劑、著色劑、塑化劑、穩定劑、填充劑、阻燃劑、調平劑等。In addition to the aforementioned components, the resin composition may also include, as needed and to the extent that it does not significantly impair the effects of the invention, antioxidants, anti-yellowing agents, ultraviolet absorbers, visible light absorbers, colorants, plasticizers, stabilizers, fillers, flame retardants, leveling agents, etc.

尤其,樹脂組成物可含有選自由抗氧化劑、熱穩定劑、光穩定劑、及抗水解劑所組成的群組中的至少一種抗劣化劑。抗氧化劑抑制由氧化引起的劣化。另外,抗氧化劑對伸縮性樹脂層賦予高溫下的充分的耐熱性。熱穩定劑對伸縮性樹脂層賦予高溫下的穩定性。作為光穩定劑的例子,可列舉:防止由紫外線引起的劣化的紫外線吸收劑、將光阻斷的光阻斷劑、具有接受有機材料所吸收的光能而使有機材料穩定化的消光功能的消光劑。抗水解劑抑制由水分引起的劣化。抗劣化劑可為選自由抗氧化劑、熱穩定劑、及紫外線吸收劑所組成的群組中的至少一種。作為抗劣化劑,可自以上所例示的成分中僅使用一種,亦可併用兩種以上。為了獲得更優異的效果,可併用兩種以上的抗劣化劑。In particular, the resin composition may contain at least one anti-deterioration agent selected from the group consisting of antioxidants, heat stabilizers, light stabilizers, and anti-hydrolysis agents. Antioxidants inhibit deterioration caused by oxidation. Furthermore, antioxidants impart sufficient heat resistance to the stretchable resin layer at high temperatures. Heat stabilizers impart stability to the stretchable resin layer at high temperatures. Examples of light stabilizers include: ultraviolet absorbers that prevent deterioration caused by ultraviolet radiation, light-blocking agents that block light, and matting agents that have the function of stabilizing organic materials by accepting the light energy absorbed by the organic materials. Anti-hydrolysis agents inhibit deterioration caused by moisture. Anti-degradation agents may be at least one selected from the group consisting of antioxidants, heat stabilizers, and ultraviolet absorbers. As an anti-degradation agent, only one of the ingredients listed above may be used, or two or more may be used in combination. For better results, two or more anti-degradation agents may be used in combination.

抗氧化劑例如可為選自由酚系抗氧化劑、胺系抗氧化劑、硫系抗氧化劑、及亞磷酸酯系抗氧化劑所組成的群組中的一種以上。為了獲得更優異的效果,可併用兩種以上的抗氧化劑。亦可併用酚系抗氧化劑與硫系抗氧化劑。Antioxidants may be one or more selected from the group consisting of phenolic antioxidants, amine antioxidants, sulfur-based antioxidants, and phosphite antioxidants. For better results, two or more antioxidants may be used in combination. Phenolic antioxidants and sulfur-based antioxidants may also be used in combination.

酚系抗氧化劑可為於酚性羥基的鄰位具有第三丁基(t-丁基)及三甲基矽烷基等立體阻礙大的取代基的化合物。酚系抗氧化劑亦稱為受阻酚系抗氧化劑。Phenolic antioxidants can be compounds with sterically hindering substituents such as t-butyl and trimethylsilyl groups adjacent to the phenolic hydroxyl group. Phenolic antioxidants are also known as hindered phenolic antioxidants.

酚系抗氧化劑例如可為選自由2-第三丁基-4-甲氧基苯酚、3-第三丁基-4-甲氧基苯酚、2,6-二第三丁基-4-乙基苯酚、2,2'-亞甲基-雙(4-甲基-6-第三丁基苯酚)、4,4'-硫代雙-(3-甲基-6-第三丁基苯酚)、4,4'-亞丁基雙(3-甲基-6-第三丁基苯酚)、1,1,3-三(2-甲基-4-羥基-5-第三丁基苯基)丁烷、1,3,5-三甲基-2,4,6-三(3,5-二-第三丁基-4-羥基苄基)苯及四-[亞甲基-3-(3',5'-二第三丁基-4'-羥基苯基)丙酸酯]甲烷所組成的群組中的一種以上的化合物。酚系抗氧化劑可為以1,3,5-三甲基-2,4,6-三(3,5-二第三丁基-4-羥基苄基)苯及四-[亞甲基-3-(3',5'-二第三丁基-4'-羥基苯基)丙酸酯]甲烷為代表的高分子型酚系抗氧化劑。Phenolic antioxidants can be, for example, one or more compounds selected from the group consisting of 2-tert-butyl-4-methoxyphenol, 3-tert-butyl-4-methoxyphenol, 2,6-ditert-butyl-4-ethylphenol, 2,2'-methylene-bis(4-methyl-6-tert-butylphenol), 4,4'-thiobis(3-methyl-6-tert-butylphenol), 4,4'-butylenebis(3-methyl-6-tert-butylphenol), 1,1,3-tris(2-methyl-4-hydroxy-5-tert-butylphenyl)butane, 1,3,5-trimethyl-2,4,6-tris(3,5-di-tert-butyl-4-hydroxybenzyl)benzene and tetra-[methylene-3-(3',5'-ditert-butyl-4'-hydroxyphenyl)propionate]methane. Phenolic antioxidants can be represented by high molecular weight phenolic antioxidants such as 1,3,5-trimethyl-2,4,6-tris(3,5-ditert-butyl-4-hydroxybenzyl)benzene and tetra-[methylene-3-(3',5'-ditert-butyl-4'-hydroxyphenyl)propionate]methane.

亞磷酸酯系抗氧化劑例如可為選自由亞磷酸三苯酯、亞磷酸二苯基異癸酯、亞磷酸苯基二異癸酯、4,4'-亞丁基-雙(3-甲基-6-第三丁基苯基)-二(十三烷基)亞磷酸酯、環新戊烷四基-雙(壬基苯基)亞磷酸酯、環新戊烷四基-雙(二壬基苯基)亞磷酸酯、環新戊烷四基-三(壬基苯基)亞磷酸酯、環狀新戊烷四基-三(二壬基苯基)亞磷酸酯、10-(2,5-二羥基苯基)-10H-9-氧雜-10-磷雜菲-10-氧化物、2,2-亞甲基雙(4,6-二第三丁基苯基)-2-乙基己基亞磷酸酯、二異癸基季戊四醇二亞磷酸酯及三(2,4-二第三丁基苯基)亞磷酸酯所組成的群組中的一種以上的化合物,可為三(2,4-二第三丁基苯基)亞磷酸酯。Phosphite antioxidants can be selected from triphenyl phosphite, diphenyl isodecyl phosphite, phenyl diisodecyl phosphite, 4,4'-butylene-bis(3-methyl-6-tert-butylphenyl)-di(tetrazyl) phosphite, cyclonepentanetetrayl-bis(nonylphenyl) phosphite, cyclonepentanetetrayl-bis(dinonylphenyl) phosphite, cyclonepentanetetrayl-tris(nonylphenyl) phosphite, and cyclonepentanetetrayl-tris(di(di)) phosphite. One or more compounds from the group consisting of nonylphenyl phosphite, 10-(2,5-dihydroxyphenyl)-10H-9-oxa-10-phosphenanthroline-10-oxide, 2,2-methylenebis(4,6-ditert-butylphenyl)-2-ethylhexyl phosphite, diisodecyl pentaerythritol diphosphite and tris(2,4-ditert-butylphenyl) phosphite may be tris(2,4-ditert-butylphenyl) phosphite.

作為其他抗氧化劑的例子,可列舉以N-甲基-2-二甲氨基乙醯氧肟酸(N-methyl-2-dimethyl amino acetohydroxamic acid)為代表的羥基胺系抗氧化劑、以3,3'-硫代二丙酸二月桂酯為代表的硫系氧化劑。Examples of other antioxidants include hydroxyamine antioxidants, represented by N-methyl-2-dimethyl amino acetohydroxamic acid, and sulfur-based antioxidants, represented by dilauryl 3,3'-thiodipropionate.

抗氧化劑的含量亦可以樹脂組成物的質量(固體成分總量)作為基準而為0.1質量%~20質量%。若抗氧化劑的含量為0.1質量%以上,則容易獲得伸縮性樹脂層的充分的耐熱性。若抗氧化劑的含量為20質量%以下,則可抑制滲出及起霜(bloom)。The antioxidant content can also be based on the mass of the resin composition (total solid content) and ranges from 0.1% to 20% by mass. If the antioxidant content is above 0.1% by mass, sufficient heat resistance of the stretchable resin layer can be easily obtained. If the antioxidant content is below 20% by mass, exudation and blooming can be inhibited.

就防止加熱中的昇華的觀點而言,抗氧化劑的分子量可為400以上、600以上、或750以上。於包含兩種以上的抗氧化劑的情況下,該些的分子量的平均值可為上述範圍。From the perspective of preventing sublimation during heating, the molecular weight of antioxidants can be 400 or higher, 600 or higher, or 750 or higher. When two or more antioxidants are included, the average molecular weight of these antioxidants can be within the above range.

作為熱穩定劑(熱劣化防止劑),例如可列舉:如高級脂肪酸的鋅鹽與鋇鹽的組合般的金屬皂或無機酸鹽、如有機錫順丁烯二酸鹽及有機錫硫醇鹽般的有機錫化合物、以及富勒烯(例如羥基化富勒烯)。Examples of heat stabilizers (heat deterioration preventers) include: metal soaps or inorganic salts such as combinations of zinc and barium salts of higher fatty acids; organotin compounds such as organotin maleate and organotin thiolate; and fullerenes (e.g., hydroxylated fullerenes).

作為紫外線吸收劑,例如可列舉:以2,4-二羥基二苯甲酮為代表的二苯甲酮系紫外線吸收劑、以2-(2'-羥基-5'-甲基苯基)苯并三唑為代表的苯并三唑系紫外線吸收劑、及以2-乙基己基-2-氰基-3,3'-二苯基丙烯酸酯為代表的氰基丙烯酸酯系紫外線吸收劑。Examples of UV absorbers include: benzophenone-based UV absorbers, represented by 2,4-dihydroxybenzophenone; benzotriazole-based UV absorbers, represented by 2-(2'-hydroxy-5'-methylphenyl)benzotriazole; and cyanoacrylate-based UV absorbers, represented by 2-ethylhexyl-2-cyano-3,3'-diphenylacrylate.

作為抗水解劑,例如可列舉:碳二醯亞胺衍生物、環氧化合物、異氰酸酯化合物、酸酐、噁唑啉化合物、及三聚氰胺化合物。Examples of hydrolytic agents include: carbodiimide derivatives, epoxy compounds, isocyanate compounds, acid anhydrides, oxazoline compounds, and melamine compounds.

作為其他抗劣化劑,例如可列舉:受阻胺系光穩定劑、抗壞血酸、沒食子酸丙酯、兒茶酸、草酸、丙二酸、及亞磷酸酯。Other anti-deterioration agents include, for example, hindered amine light stabilizers, ascorbic acid, propyl gallate, catechin, oxalic acid, malonic acid, and phosphites.

伸縮性樹脂層例如可藉由以下方法來製造,所述方法包括:將(A)橡膠成分、(B)交聯成分及(C)酯系硬化劑、以及視需要的其他成分溶解或分散於有機溶劑而獲得樹脂清漆;以及藉由後述的方法而於導體箔或載體膜之上對樹脂清漆進行成膜。The stretchable resin layer can be manufactured, for example, by means of: dissolving or dispersing (A) a rubber component, (B) a crosslinking component and (C) an ester-based curing agent, and other components as needed, in an organic solvent to obtain a resin varnish; and forming the resin varnish onto a conductor foil or carrier film by means of the method described later.

作為此處使用的有機溶劑,並無特別限制,例如可列舉:甲苯、二甲苯、均三甲苯、枯烯、對異丙基甲苯(p-cymene)等芳香烴;四氫呋喃、1,4-二噁烷等環狀醚;丙酮、甲基乙基酮、甲基異丁基酮、環己酮、4-羥基-4-甲基-2-戊酮等酮;乙酸甲酯、乙酸乙酯、乙酸丁酯、乳酸甲酯、乳酸乙酯、γ-丁內酯等酯;碳酸伸乙酯、碳酸伸丙酯等碳酸酯;N,N-二甲基甲醯胺、N,N-二甲基乙醯胺、N-甲基吡咯啶酮等醯胺等。就溶解性及沸點的觀點而言,亦可使用甲苯、或N,N-二甲基乙醯胺。該些有機溶劑可單獨使用或者將兩種以上組合使用。樹脂清漆中的固體成分(有機溶媒以外的成分)濃度可為20質量%~80質量%。There are no particular restrictions on the organic solvents used here. Examples include: aromatic hydrocarbons such as toluene, xylene, mesitylene, cumene, and p-isopropyltoluene; cyclic ethers such as tetrahydrofuran and 1,4-dioxane; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, and 4-hydroxy-4-methyl-2-pentanone; esters such as methyl acetate, ethyl acetate, butyl acetate, methyl lactate, ethyl lactate, and γ-butyrolactone; carbonates such as ethyl carbonate and propyl carbonate; and acetamides such as N,N-dimethylformamide, N,N-dimethylacetamide, and N-methylpyrrolidone. Toluene or N,N-dimethylacetamide may also be used from the perspective of solubility and boiling point. These organic solvents can be used alone or in combination of two or more. The concentration of solid components (other than organic solvents) in resin varnishes can be 20% to 80% by mass.

作為載體膜,並無特別限制,例如可列舉:聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)、聚對苯二甲酸丁二酯、聚萘二甲酸乙二酯等聚酯;聚乙烯、聚丙烯等聚烯烴;聚碳酸酯、聚醯胺、聚醯亞胺、聚醯胺醯亞胺、聚醚醯亞胺、聚醚硫醚、聚醚碸、聚醚酮、聚苯醚、聚苯硫醚、聚芳酯、聚碸、液晶聚合物等膜。其中,就柔軟性及強韌性的觀點而言,亦可將聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚萘二甲酸乙二酯、聚丙烯、聚碳酸酯、聚醯胺、聚醯亞胺、聚醯胺醯亞胺、聚苯醚、聚苯硫醚、聚芳酯、或聚碸的膜用作載體膜。There are no particular limitations on the carrier film. Examples include: polyethylene terephthalate (PET), polybutylene terephthalate, polyethylene naphthalate, and other polyesters; polyethylene, polypropylene, and other polyolefins; polycarbonate, polyamide, polyimide, polyamide-imide, polyether-imide, polyether sulfide, polyether ketone, polyphenylene ether, polyphenylene sulfide, polyarylate, polyether, liquid crystal polymers, and other films. In terms of flexibility and toughness, films made of polyethylene terephthalate, polybutylene terephthalate, polyethylene naphthalate, polypropylene, polycarbonate, polyamide, polyimide, polyamide-imide, polyphenylene ether, polyphenylene sulfide, polyarylate, or polyurethane can also be used as carrier films.

載體膜的厚度並無特別限制,可為3 μm~250 μm。若載體膜的厚度為3 μm以上,則膜強度充分,若載體膜的厚度為250 μm以下,則可獲得充分的柔軟性。就以上觀點而言,厚度可為5 μm~200 μm、或7 μm~150 μm。就提高與伸縮性樹脂層的剝離性的觀點而言,亦可視需要使用利用矽酮系化合物、含氟化合物等對載體膜實施了脫模處理的膜。There is no particular limitation on the thickness of the carrier film, which can range from 3 μm to 250 μm. If the thickness of the carrier film is 3 μm or more, the film strength is sufficient; if the thickness of the carrier film is less than 250 μm, sufficient flexibility can be obtained. From the above point of view, the thickness can be 5 μm to 200 μm or 7 μm to 150 μm. From the viewpoint of improving the peelability from the stretchable resin layer, films that have undergone release treatment using silicone-based compounds, fluorine-containing compounds, etc., can also be used as needed.

視需要亦可將保護膜貼附於伸縮性樹脂層上,設為包含導體箔或載體膜、伸縮性樹脂層及保護膜的3層結構的積層膜。If necessary, the protective film can also be attached to the stretchable resin layer to form a laminated film with a three-layer structure including a conductor foil or carrier film, a stretchable resin layer and a protective film.

作為保護膜,並無特別限制,例如可列舉:聚對苯二甲酸乙二酯、聚對苯二甲酸丁二酯、聚萘二甲酸乙二酯等聚酯;聚乙烯、聚丙烯等聚烯烴等膜。其中,就柔軟性及強韌性的觀點而言,可將聚對苯二甲酸乙二酯等聚酯的膜;聚乙烯、聚丙烯等聚烯烴的膜用作保護膜。就提高與伸縮性樹脂層的剝離性的觀點而言,可藉由矽酮系化合物、含氟化合物等對保護膜進行脫模處理。There are no particular limitations on the protective film used; examples include polyesters such as polyethylene terephthalate (PET), polybutylene terephthalate (PET), and polyethylene naphthalate (PET); and polyolefin films such as polyethylene and polypropylene. From the perspective of flexibility and toughness, polyester films such as polyethylene terephthalate and polyolefin films such as polyethylene and polypropylene can be used as protective films. From the perspective of improving the peelability from the stretchable resin layer, the protective film can be treated with silicone-based compounds or fluorinated compounds for release.

保護膜的厚度可根據作為目標的柔軟性而適宜改變,亦可為10 μm~250 μm。厚度若為10 μm以上,則有膜強度充分的傾向,若為250 μm以下,則有可獲得充分的柔軟性的傾向。就以上觀點而言,厚度可為15 μm~200 μm、或20 μm~150 μm。The thickness of the protective film can be appropriately varied depending on the desired flexibility, and can range from 10 μm to 250 μm. A thickness of 10 μm or more tends to provide sufficient film strength, while a thickness of less than 250 μm tends to provide sufficient flexibility. Based on these considerations, a thickness of 15 μm to 200 μm, or 20 μm to 150 μm, is suitable.

[配線基板的製造方法] 一實施形態之具有導體箔的配線基板例如可藉由如下方法而製造,所述方法包括:準備積層板(導體基板)的步驟,所述積層板具有伸縮性樹脂層與積層於伸縮性樹脂層上的導體箔;於導體箔上形成蝕刻抗蝕劑的步驟;對蝕刻抗蝕劑進行曝光並對曝光後的所述蝕刻抗蝕劑進行顯影而形成覆蓋導體箔的一部分的抗蝕劑圖案的步驟;將未由抗蝕劑圖案覆蓋的部分的導體箔去除的步驟;以及將抗蝕劑圖案去除的步驟。 [Manufacturing Method of Wiring Substrate] A wiring substrate having a conductor foil in one embodiment can be manufactured, for example, by a method comprising: preparing a multilayer board (conductor substrate) having a stretchable resin layer and a conductor foil deposited on the stretchable resin layer; forming an etching resist on the conductor foil; exposing the etching resist and developing the exposed etching resist to form an etching resist pattern covering a portion of the conductor foil; removing the portion of the conductor foil not covered by the etching resist pattern; and removing the etching resist pattern.

作為獲得具有伸縮性樹脂層及導體箔的積層板(導體基板)的方法,可使用任意的方法,有將用以形成伸縮性樹脂層的樹脂組成物的清漆塗敷於導體箔的方法;及藉由真空壓機、層壓機等將導體箔積層於載體膜上所形成的伸縮性樹脂層的方法等。伸縮性樹脂層可藉由對樹脂組成物進行加熱並進行交聯成分的交聯反應(硬化反應)而形成。As a method for obtaining a laminate (conductor substrate) having a scalable resin layer and a conductor foil, any method can be used, including applying a varnish of the resin composition used to form the scalable resin layer to the conductor foil; and a method for forming a scalable resin layer by depositing the conductor foil onto a carrier film using a vacuum press, laminator, or the like. The scalable resin layer can be formed by heating the resin composition and carrying out a crosslinking reaction (curing reaction) of the crosslinking components.

作為將載體膜上的伸縮性樹脂層積層於導體箔上的方法,可為任意的方法,可使用輥層壓機、真空層壓機、真空壓機等。就生產效率的觀點而言,可使用輥式層壓機或真空層壓機進行成型。The method for depositing a stretchable resin layer on a carrier film onto a conductor foil can be any method, such as using a roller laminator, a vacuum laminator, or a vacuum press. From the viewpoint of production efficiency, a roller laminator or a vacuum laminator can be used for forming.

伸縮性樹脂層的乾燥後的厚度並無特別限定,通常為5 μm~1000 μm。若為所述範圍,則容易獲得伸縮性樹脂層的充分的強度,且因充分地進行乾燥,因此可減少伸縮性樹脂層中的殘留溶媒量。The thickness of the dried stretchable resin layer is not particularly limited, and is typically 5 μm to 1000 μm. Within this range, sufficient strength of the stretchable resin layer can be easily obtained, and due to thorough drying, the amount of residual solvent in the stretchable resin layer can be reduced.

亦可在伸縮性樹脂層的導體箔的相反側的面上進而積層導體箔,藉此製作於伸縮性樹脂層的兩面上形成有導體箔的積層板。藉由在伸縮性樹脂層的兩面上設置導體層,可抑制硬化時的積層板的翹曲。Alternatively, a conductor foil can be further laminated on the opposite side of the conductor foil in the stretchable resin layer, thereby creating a laminate with conductor foils on both sides of the stretchable resin layer. By providing conductor layers on both sides of the stretchable resin layer, warping of the laminate during curing can be suppressed.

作為於積層板(配線基板形成用積層板)的導體箔上形成配線圖案的方法,可使用通常使用蝕刻等的方法。例如,於將銅箔用作導體箔的情況下,作為蝕刻液,例如可使用濃硫酸與過氧化氫水的混合溶液、氯化鐵溶液等。As a method for forming wiring patterns on the conductor foil of a laminate (a laminate for forming a wiring substrate), methods such as etching can be used. For example, when copper foil is used as the conductor foil, the etching solution can be a mixture of concentrated sulfuric acid and hydrogen peroxide, or a ferric chloride solution.

作為蝕刻中使用的蝕刻抗蝕劑,例如可列舉:夫泰科(Photec)H-7025(日立化成股份有限公司製造、商品名)及夫泰科(Photec)H-7030(日立化成股份有限公司製造、商品名)、X-87(太陽控股(TAIYO HOLDINGS)股份有限公司製造、商品名)。於配線圖案的形成後,通常將蝕刻抗蝕劑去除。Examples of etching resists used in etching include: Photec H-7025 (manufactured by Hitachi Chemical Co., Ltd., trade name) and Photec H-7030 (manufactured by Hitachi Chemical Co., Ltd., trade name), and X-87 (manufactured by Taiyo Holdings Co., Ltd., trade name). The etching resist is typically removed after the wiring pattern is formed.

作為製造具有導體鍍膜的配線基板的方法的一實施形態包括:於伸縮性樹脂層上藉由無電鍍形成導體鍍膜的步驟;於導體鍍膜上形成鍍覆抗蝕劑的步驟;對鍍覆抗蝕劑進行曝光並對曝光後的鍍覆抗蝕劑進行顯影而形成覆蓋伸縮性樹脂層的一部分的抗蝕劑圖案的步驟;於未由抗蝕劑圖案覆蓋的部分的導體鍍膜上,藉由電鍍進一步形成導體鍍膜的步驟;將抗蝕劑圖案去除的步驟;以及將藉由無電鍍而形成的導體鍍膜中的、未由藉由電鍍而形成的導體鍍膜覆蓋的部分去除的步驟。One embodiment of a method for manufacturing a wiring substrate having a conductor coating includes: a step of forming a conductor coating on a stretchable resin layer by electroless plating; a step of forming a coating resist on the conductor coating; and a step of exposing the coating resist and developing the exposed coating resist to form a coating covering the stretchable resin layer. The steps include: partially forming an anti-corrosion pattern; further forming a conductor film by electroplating on the portion of the conductor film not covered by the anti-corrosion pattern; removing the anti-corrosion pattern; and removing the portion of the conductor film formed by electroless plating that is not covered by the conductor film formed by electroplating.

作為製造配線基板的方法的又一實施形態包括:於伸縮性樹脂層上所形成的導體鍍膜上形成蝕刻抗蝕劑的步驟;對蝕刻抗蝕劑進行曝光並對曝光後的蝕刻抗蝕劑進行顯影而形成覆蓋伸縮性樹脂層的一部分的抗蝕劑圖案的步驟;將未由抗蝕劑圖案覆蓋的部分的導體鍍膜去除的步驟;以及將抗蝕劑圖案去除的步驟。Another embodiment of the method for manufacturing a wiring substrate includes: a step of forming an etching resist on a conductor film formed on a stretchable resin layer; a step of exposing the etching resist and developing the exposed etching resist to form an resist pattern covering a portion of the stretchable resin layer; a step of removing the portion of the conductor film not covered by the resist pattern; and a step of removing the resist pattern.

作為用作鍍覆的遮罩的鍍覆抗蝕劑,例如可列舉:福泰克(Photech)RY3325(日立化成股份有限公司製造、商品名)、及福泰克(Photech)RY-5319(日立化成股份有限公司製造、商品名)、MA-830(太陽鐵工(Taiyo Holdings)股份有限公司製造、商品名)。此外,關於無電鍍及電鍍的詳情如上所述。Examples of coating corrosion inhibitors used as masks for plating include: Photech RY3325 (manufactured by Hitachi Chemical Co., Ltd., trade name), Photech RY-5319 (manufactured by Hitachi Chemical Co., Ltd., trade name), and MA-830 (manufactured by Taiyo Holdings Co., Ltd., trade name). Furthermore, details regarding electroless plating and electroplating are as described above.

藉由在配線基板上搭載各種電子器件可獲得可伸縮元件。 [實施例] Scalable components can be obtained by mounting various electronic devices on a wiring board. [Example]

關於本發明,列舉以下的實施例進一步進行具體說明。但,本發明並不限定於該些實施例。The present invention is further illustrated by the following embodiments. However, the present invention is not limited to these embodiments.

(實施例1) <伸縮性樹脂層形成用的樹脂清漆的製作> 一邊將作為(A)成分的利用甲苯稀釋且調整為不揮發成分25質量%的馬來酸酐改質苯乙烯乙烯丁二烯橡膠(卡頓(KRATON)股份有限公司製造的商品名「FG1924GT」)80質量份(不揮發成分的調配量)、作為(B)成分的利用甲苯稀釋且調整為不揮發成分25質量%的二環戊二烯型環氧樹脂(迪愛生(DIC)股份有限公司製造的商品名「艾比克隆(EPICLON)HP7200H」)11.1質量份(不揮發成分的調配量)、作為(C)成分的利用甲苯稀釋而調整為不揮發成分25質量%的酯系硬化劑(迪愛生(DIC)股份有限公司製造的商品名「HPC8000-65T」)、二環戊二烯型的二苯酚化合物8.9質量份(不揮發成分的調配量)、以及作為(D)成分的1-苄基-2-甲基咪唑(四國化成股份有限公司製造的商品名「1B2MZ」)3質量份攪拌並一邊混合,而獲得樹脂清漆。 (Example 1) <Preparation of Resin Varnish for Forming a Strength-Expanding Resin Layer> While (A) is composed of 80 parts by weight (amount of non-volatile component) of maleic anhydride-modified styrene-vinyl butadiene rubber (trade name "FG1924GT" manufactured by KRATON Corporation), diluted with toluene and adjusted to a non-volatile component of 25% by weight, and (B) 11 parts by weight of dicyclopentadiene-type epoxy resin (trade name "EPICLON HP7200H" manufactured by DIC Corporation), diluted with toluene and adjusted to a non-volatile component of 25% by weight. 0.1 parts by weight (amount of non-volatile components), 25% by weight of an ester-based hardener (DIC Corporation trade name "HPC8000-65T") diluted with toluene to achieve a non-volatile content as component (C), 8.9 parts by weight of a dicyclopentadiene-type diphenol compound (amount of non-volatile components), and 3 parts by weight of 1-benzyl-2-methylimidazolium (Shikoku Chemical Co., Ltd. trade name "1B2MZ") as component (D), are stirred and mixed to obtain a resin varnish.

<積層膜的製作> 準備脫模處理聚對苯二甲酸乙二酯(PET)膜(帝人杜邦膜(Teijin DuPont Films)股份有限公司製造的商品名「普雷克斯(Purex)A31」、厚度25 μm)作為載體膜。於該PET膜的脫模處理面上,使用刮刀塗佈機(康井精機股份有限公司製造的商品名「SNC-350」)來塗佈所述樹脂清漆。於乾燥機(二葉科學股份有限公司製造的商品名「MSO-80TPS」)中以100℃將塗膜加熱20分鐘來進行乾燥,形成厚度100 μm的樹脂層(硬化前的伸縮性樹脂層)。於所形成的樹脂層上,以脫模處理面成為樹脂層側的朝向貼附與載體膜相同的脫模處理PET膜作為保護膜,獲得積層膜。 <Fabrication of the Lamination Film> A release-treated polyethylene terephthalate (PET) film (Teijin DuPont Films Co., Ltd., trade name "Purex A31", 25 μm thick) was prepared as the carrier film. The resin varnish was applied to the release-treated surface of the PET film using a doctor blade coater (Kangjing Precision Machinery Co., Ltd., trade name "SNC-350"). The coating was then dried in a dryer (Futaba Science Co., Ltd., trade name "MSO-80TPS") at 100°C for 20 minutes to form a 100 μm thick resin layer (the stretchable resin layer before curing). A PET film with the same release treatment as the carrier film is attached as a protective film to the formed resin layer, with the release treatment surface facing the resin layer side, to obtain a laminated film.

<導體基板的製作> 將積層膜的保護膜剝離,於露出的樹脂層上,以粗化面成為樹脂層側的朝向重疊具有表面粗糙度Ra為1.5 μm的粗化面的電解銅箔(古河電氣工業股份有限公司製造的商品名「F2-WS-12」)。於該狀態下,使用真空加壓式層壓機(日光材料(nikko-materials)股份有限公司製造的商品名「V130」),以壓力0.5 MPa、溫度90℃以及加壓時間60秒的條件將電解銅箔層壓於樹脂層上。其後,於乾燥機(二葉科學股份有限公司製造的商品名「MSO-80TPS」)中,以180℃加熱60分鐘,藉此獲得具有作為樹脂層的硬化物的伸縮性樹脂層、與作為導體層的電解銅箔的導體基板。 <Conductor Substrate Fabrication> The protective film of the laminated film is peeled off. On the exposed resin layer, an electrolytic copper foil with a roughened surface Ra of 1.5 μm (trade name "F2-WS-12" manufactured by Furukawa Electric Industries, Ltd.) is overlapped with the resin layer facing outwards. In this state, the electrolytic copper foil layer is pressed onto the resin layer using a vacuum pressure laminator (trade name "V130" manufactured by Nikko Materials Co., Ltd.) under conditions of 0.5 MPa pressure, 90°C temperature, and 60 seconds of pressing time. Subsequently, the substrate was heated at 180°C for 60 minutes in a dryer (manufactured by Futaba Science Co., Ltd., under the trade name "MSO-80TPS") to obtain a conductive substrate having a stretchable resin layer as the resin layer and an electrolytic copper foil as the conductive layer.

(實施例2~實施例6及比較例1~比較例2) 除了將樹脂清漆的組成變更為表1所示的組成以外,以與實施例1相同的方式製作樹脂清漆、積層膜及導體基板。再者,表1中,「HP5000」為酚醛清漆型環氧樹脂(迪愛生(DIC)股份有限公司製造的商品名「艾比克隆(EPICLON)HP5000」),「HPC8000-L-65MT」為酯系硬化劑(迪愛生(DIC)股份有限公司製造的商品名「艾比克隆(EPICLON)HPC8000-L-65MT」、HPC8000-L-65MT的低分子量等級),「HPC8150-60T」為酯系硬化劑(迪愛生(DIC)股份有限公司製造的商品名「艾比克隆(EPICLON)HPC8150-60T」、具有萘骨架的化合物)。另外,表1中的各成分的調配量為不揮發成分的調配量,單位為「質量份」。 (Examples 2 to 6 and Comparative Examples 1 to 2) Except for changing the composition of the resin varnish to the composition shown in Table 1, the resin varnish, the laminated film and the conductor substrate are manufactured in the same manner as in Example 1. Furthermore, in Table 1, "HP5000" is a phenolic varnish-type epoxy resin (manufactured by DIC Corporation under the trade name "EPICLON HP5000"), "HPC8000-L-65MT" is an ester-based hardener (manufactured by DIC Corporation under the trade name "EPICLON HPC8000-L-65MT", a low molecular weight grade of HPC8000-L-65MT), and "HPC8150-60T" is an ester-based hardener (manufactured by DIC Corporation under the trade name "EPICLON HPC8150-60T", a compound with a naphthalene skeleton). Additionally, the amounts of each component in Table 1 are the amounts of non-volatile components, expressed in parts by mass.

[拉伸彈性係數及斷裂伸長率的測定] 以180℃將實施例及比較例中所得的積層膜加熱60分鐘,藉此使樹脂層硬化從而形成伸縮性樹脂層。去除載體膜及保護膜,將伸縮性樹脂層切斷為長度40 mm、寬度10 mm的長條狀,而獲得試驗片。使用自動繪圖儀(autograph)(島津製作所股份有限公司製造的商品名「EZ-S」)進行該試驗片的拉伸試驗,獲得應力-應變曲線。根據所獲得的應力-應變曲線求出拉伸彈性係數及斷裂伸長率。拉伸試驗是以夾頭間距離20 mm、拉伸速度50 mm/分鐘的條件進行。拉伸彈性係數是根據應力0.5 N~1.0 N的範圍的應力-應變曲線的斜率而求出。將試驗片斷裂的時點的應變記錄為斷裂伸長率。將結果示於表1中。 [Determination of Tensile Elasticity and Elongation at Break] The laminated films obtained in the Examples and Comparative Examples were heated to 180°C for 60 minutes to harden the resin layer and form a stretchable resin layer. The carrier film and protective film were removed, and the stretchable resin layer was cut into strips 40 mm long and 10 mm wide to obtain test pieces. Tensile tests were performed on these test pieces using an autograph (manufactured by Shimadzu Corporation, trade name "EZ-S") to obtain stress-strain curves. The tensile elasticity and elongation at break were determined from the obtained stress-strain curves. Tensile tests were conducted with a clamp spacing of 20 mm and a tensile speed of 50 mm/min. The tensile elastic coefficient was determined based on the slope of the stress-strain curve in the stress range of 0.5 N to 1.0 N. The strain at the point of fracture was recorded as the elongation at break. The results are shown in Table 1.

[恢復率的測定] 與所述拉伸彈性係數及斷裂伸長率的測定同樣地,製作長度40 mm、寬度10 mm的長條狀的伸縮性樹脂層的試驗片。使用自動繪圖儀(島津製作所股份有限公司製造的商品名「EZ-S」),以拉伸速度100 mm/分鐘使所述試驗片伸長至應變為20%為止,其後解放應力而回到初始位置後,再次進行拉伸試驗。恢復率R是將第1次拉伸試驗中所施加的應變(位移量)設為X,將再次進行拉伸試驗時開始施加負荷時的位置與X的差設為Y,藉由下述式求出。本試驗中,X為20%。將結果示於表1中。 R(%)=Y/X×100 [Determination of Recovery Rate] Similar to the determination of tensile elasticity coefficient and elongation at break, a strip of extensible resin layer, 40 mm in length and 10 mm in width, was prepared. Using an automatic plotter (Shimadzu Corporation, trade name "EZ-S"), the test piece was stretched at a speed of 100 mm/min until the strain reached 20%. After releasing the stress and returning to the initial position, a tensile test was performed again. The recovery rate R is calculated by setting the strain (displacement) applied in the first tensile test as X, and the difference between the position at which the load was first applied in the second tensile test and X as Y, using the following formula. In this test, X was 20%. The results are shown in Table 1. R (%) = Y/X × 100

[介電常數(Dk)·介電損耗角正切(Df)的測定] 與所述拉伸彈性係數及斷裂伸長率的測定同樣地,製作80 mm×80 mm的大小的伸縮性樹脂層的試驗片。使用所述試驗片,藉由空腔共振器法算出Dk及Df。測定器分別使用向量型網路分析儀E8364B(是德科技公司(Keysight Technologies)製造)、CP531(關東電子應用開發公司製造)及CPMA-V2(程式),於環境溫度25℃、頻率10 kHz的條件下進行測定。將結果示於表1中。 [Determination of Dielectric Constant (Dk) and Dielectric Loss Tangent (Df)] Similar to the determination of tensile elasticity and elongation at break, test pieces of stretchable resin layers measuring 80 mm × 80 mm were prepared. Using these test pieces, Dk and Df were calculated using the cavity resonator method. Measurements were performed using a vector network analyzer E8364B (manufactured by Keysight Technologies), a CP531 (manufactured by Kanto Electronics Applications Development Co., Ltd.), and a CPMA-V2 (program), at an ambient temperature of 25°C and a frequency of 10 kHz. The results are shown in Table 1.

[耐熱性的評價] 以180℃將實施例1~實施例6及比較例1~比較例2中所得的積層膜加熱60分鐘,藉此使樹脂層硬化從而形成伸縮性樹脂層。將載體膜及保護膜去除後,使用氮回流系統(田村製作所股份有限公司製造的商品名「TNV-EN」)對伸縮性樹脂層進行耐熱性試驗,所述耐熱性試驗是將利用依據IPC/JEDEC J-STD-020的圖3的溫度分佈進行加熱處理的步驟重覆10次。於耐熱性試驗後,利用與所述同樣的方法測定伸縮性樹脂層的拉伸彈性係數、斷裂伸長率及恢復率。將其結果與耐熱性試驗前的測定結果一併示於表2及表3中。 [Evaluation of Heat Resistance] The laminated films obtained in Examples 1 to 6 and Comparative Examples 1 to 2 were heated to 180°C for 60 minutes to harden the resin layer and form a stretchable resin layer. After removing the carrier film and protective film, the stretchable resin layer was subjected to a heat resistance test using a nitrogen reflux system (trade name "TNV-EN" manufactured by Tamura Manufacturing Co., Ltd.). The heat resistance test was performed by repeating the heating process 10 times using the temperature distribution shown in Figure 3 of IPC/JEDEC J-STD-020. After the heat resistance test, the tensile elasticity, elongation at break, and recovery rate of the stretchable resin layer were measured using the same method. The results, along with the results of the tests conducted before the heat resistance test, are shown in Tables 2 and 3.

[紅外線吸收光譜(IR)的測定] 關於比較例1的積層膜的樹脂層(硬化前的伸縮性樹脂層)及於180℃下將其加熱60分鐘而硬化後的伸縮性樹脂層、以及於180℃下將實施例1及比較例3的積層膜的樹脂層加熱60分鐘而硬化後的伸縮性樹脂層,於去除載體膜及保護膜後,使用傅立葉轉換紅外分光光度計(Bio-Rad公司製造的商品名「FTS3000MX」),藉由透過法測定紅外線吸收光譜。圖4表示比較例1的硬化前後的伸縮性樹脂層的紅外線吸收光譜,圖5表示實施例1、實施例3及比較例1的硬化後的伸縮性樹脂層的紅外線吸收光譜。 [Determination of Infrared Absorption Spectroscopy (IR)] Regarding the resin layer of the laminated film of Comparative Example 1 (the stretchable resin layer before curing) and the stretchable resin layer after curing by heating it at 180°C for 60 minutes, and the stretchable resin layer after curing by heating the resin layer of the laminated film of Example 1 and Comparative Example 3 at 180°C for 60 minutes, after removing the carrier film and protective film, the infrared absorption spectrum was determined by transmission using a Fourier transform infrared spectrophotometer (trade name "FTS3000MX" manufactured by Bio-Rad Corporation). Figure 4 shows the infrared absorption spectra of the stretchable resin layers of Comparative Example 1 before and after curing, and Figure 5 shows the infrared absorption spectra of the stretchable resin layers of Examples 1, 3, and 1 after curing.

如圖4所示,於比較例1的伸縮性樹脂層中,確認到於硬化後出現硬化前不存在的歸屬於羥基的伸縮振動的3400 cm -1附近的吸收峰值,藉由硬化反應而生成羥基。另外,如圖5所示,於實施例1及實施例3的伸縮性樹脂層中,確認到歸屬於羥基的伸縮振動的吸收峰值幾乎不存在,羥基的生成得以抑制。 As shown in Figure 4, in the stretchable resin layer of Comparative Example 1, an absorption peak near 3400 cm⁻¹ belonging to the stretching vibrations of hydroxyl groups, which was not present before curing, was observed after curing, indicating that hydroxyl groups were generated through the curing reaction. Furthermore, as shown in Figure 5, in the stretchable resin layers of Examples 1 and 3, the absorption peak of the stretching vibrations belonging to hydroxyl groups was almost absent, and the formation of hydroxyl groups was suppressed.

[配線基板的製作與其評價] 製作如圖2所示的試驗用的配線基板1,該試驗用的配線基板1具有伸縮性樹脂層3、及作為導體層5的形成於伸縮性樹脂層3上且具有波型圖案的導體箔(電解銅箔)。首先,於在伸縮性樹脂層表面形成有凹凸的實施例及比較例中所得的導體基板的導體層上利用輥層壓機貼合蝕刻抗蝕劑(日立化成股份有限公司製造的商品名「夫泰科(Photec)RY-5325」),並於其上密接形成有波型圖案的光罩(photo tool)。使用奧克(ORC)製作所公司製造的EXM-1201型曝光機,以50 mJ/cm 2的能量對蝕刻抗蝕劑進行曝光。繼而,以30℃的1質量%碳酸鈉水溶液進行240秒噴霧顯影,使蝕刻抗蝕劑的未曝光部溶解,形成具有波型的開口部的抗蝕劑圖案。繼而,利用蝕刻液將未由抗蝕劑圖案覆蓋的部分的銅箔去除。其後,利用剝離液將蝕刻抗蝕劑去除,獲得於伸縮性樹脂層3上具有形成配線寬度為50 μm且沿規定方向X蜿蜒的波型的配線圖案的導體層5的配線基板1。 [Fabrication and Evaluation of Wiring Substrate] A test wiring substrate 1 as shown in Figure 2 was fabricated. The test wiring substrate 1 has a stretchable resin layer 3 and a conductor foil (electrolytic copper foil) formed on the stretchable resin layer 3 as a conductor layer 5 and having a wave pattern. First, an etching resist (trade name "Photec RY-5325" manufactured by Hitachi Chemical Co., Ltd.) was laminated onto the conductor layer of the conductor substrate obtained in the embodiments and comparative examples where the surface of the stretchable resin layer has an uneven surface, using a roller laminator, and a photomask with a wave pattern was formed on it. The etching resist was exposed using an EXM-1201 exposure machine manufactured by ORC Corporation at an energy of 50 mJ/ cm² . Then, it was spray-developed for 240 seconds in a 1% sodium carbonate aqueous solution at 30°C to dissolve the unexposed portions of the etching resist, forming a resist pattern with wavy openings. Next, the copper foil not covered by the resist pattern was removed using an etching solution. Subsequently, the etching resist was removed using a stripping solution, resulting in a wiring substrate 1 with a conductor layer 5 on a stretchable resin layer 3, forming a wavy wiring pattern with a wiring width of 50 μm that meanders along a predetermined direction X.

使所獲得的配線基板於X方向上拉伸變形直至應變10%為止,觀察返回至原狀時的伸縮性樹脂層及波型的配線圖案。其結果實施例及比較例的任一者的配線基板於拉伸時亦不會產生伸縮性樹脂層及配線圖案的斷裂。The obtained wiring substrate is stretched and deformed in the X direction until the strain reaches 10%, and the stretchable resin layer and the waveform wiring pattern are observed when it returns to its original state. As a result, the wiring substrate of either the embodiment or the comparative example does not experience breakage of the stretchable resin layer or the wiring pattern during stretching.

[表1] 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 比較例1 比較例2 (A)成分 FG1924 80 80 80 80 80 80 80 80 (B)成分 HP7200H 11.1 11.2 10.9 - - - 20 - HP5000 - - - 10.6 10.7 10.5 - 20 (C)成分 HPC8000-65T 8.9 - - 9.4 - - - - HPC8000-L-65MT - 8.8 - - 9.3 - - - HPC8150-60T - - 9.1 - - 9.5 - - (D)成分 1B2MZ 3 3 3 3 3 3 3 3 拉伸彈性係數(MPa) 3.8 3.4 3.4 3.1 2.9 2.9 3.5 2.9 斷裂伸長率(%) 860 800 800 770 740 810 550 690 恢復率(%) 94 94 94 94 94 94 94 94 介電常數Dk 2.4 2.3 2.2 2.3 2.3 2.2 2.5 2.4 介電損耗角正切Df 0.0023 0.0021 0.0016 0.0024 0.0024 0.0018 0.0050 0.0048 [Table 1] Implementation Example 1 Implementation Example 2 Implementation Example 3 Implementation Example 4 Implementation Example 5 Implementation Example 6 Comparative example 1 Comparative example 2 (A) Ingredients FG1924 80 80 80 80 80 80 80 80 (B) Components HP7200H 11.1 11.2 10.9 - - - 20 - HP5000 - - - 10.6 10.7 10.5 - 20 (C) Components HPC8000-65T 8.9 - - 9.4 - - - - HPC8000-L-65MT - 8.8 - - 9.3 - - - HPC8150-60T - - 9.1 - - 9.5 - - (D) Component 1B2MZ 3 3 3 3 3 3 3 3 Tensile elasticity coefficient (MPa) 3.8 3.4 3.4 3.1 2.9 2.9 3.5 2.9 Elongation at break (%) 860 800 800 770 740 810 550 690 Recovery rate (%) 94 94 94 94 94 94 94 94 Dielectric constant Dk 2.4 2.3 2.2 2.3 2.3 2.2 2.5 2.4 Dielectric loss tangent Df 0.0023 0.0021 0.0016 0.0024 0.0024 0.0018 0.0050 0.0048

[表2] 實施例1 實施例2 實施例3 實施例4 耐熱性 試驗前 耐熱性 試驗後 耐熱性 試驗前 耐熱性 試驗後 耐熱性 試驗前 耐熱性 試驗後 耐熱性 試驗前 耐熱性 試驗後 拉伸彈性係數(MPa) 3.8 3.8 3.4 3.3 3.4 3.4 3.1 3.1 斷裂伸長率(%) 860 690 800 710 800 740 770 690 恢復率(%) 94 94 94 94 94 94 94 94 [Table 2] Implementation Example 1 Implementation Example 2 Implementation Example 3 Implementation Example 4 Before heat resistance test After heat resistance test Before heat resistance test After heat resistance test Before heat resistance test After heat resistance test Before heat resistance test After heat resistance test Tensile elasticity coefficient (MPa) 3.8 3.8 3.4 3.3 3.4 3.4 3.1 3.1 Elongation at break (%) 860 690 800 710 800 740 770 690 Recovery rate (%) 94 94 94 94 94 94 94 94

[表3] 實施例5 實施例6 比較例1 比較例2 耐熱性 試驗前 耐熱性 試驗後 耐熱性 試驗前 耐熱性 試驗後 耐熱性 試驗前 耐熱性 試驗後 耐熱性 試驗前 耐熱性 試驗後 拉伸彈性係數(MPa) 2.9 2.9 2.9 2.8 3.5 3.4 2.9 2.9 斷裂伸長率(%) 740 650 810 690 550 440 690 600 恢復率(%) 94 94 94 93 94 94 94 94 [Table 3] Implementation Example 5 Implementation Example 6 Comparative example 1 Comparative example 2 Before heat resistance test After heat resistance test Before heat resistance test After heat resistance test Before heat resistance test After heat resistance test Before heat resistance test After heat resistance test Tensile elasticity coefficient (MPa) 2.9 2.9 2.9 2.8 3.5 3.4 2.9 2.9 Elongation at break (%) 740 650 810 690 550 440 690 600 Recovery rate (%) 94 94 94 93 94 94 94 94

根據表1所示的結果可以了解,實施例1~實施例6的導體基板與比較例1~比較例2的導體基板相比,確認到具有優異的伸縮性,且具有低介電損耗角正切。另外,根據表2及表3所示的結果可以了解,實施例1~實施例6的導體基板確認到於耐熱性試驗後亦可維持良好的伸縮性及彈性係數。 [產業上之可利用性] As shown in Table 1, the conductor substrates of Examples 1 to 6 exhibit superior scalability and low dielectric loss tangent compared to the conductor substrates of Comparative Examples 1 to 2. Furthermore, as shown in Tables 2 and 3, the conductor substrates of Examples 1 to 6 maintain good scalability and elasticity even after heat resistance testing. [Industrial Applicability]

本發明的導體基板及由其而獲得的配線基板可期待用作例如穿戴式設備的基板。The conductor substrate and the wiring substrate obtained therefrom of the present invention are expected to be used as substrates for, for example, wearable devices.

1:配線基板 3:伸縮性樹脂層 5:導體層(導體箔或導體鍍膜) X:第1次拉伸試驗中所施加的應變(位移量) Y:再次進行拉伸試驗時開始施加負荷時的位置與X的差 1: Wiring substrate 3: Extensible resin layer 5: Conductor layer (conductor foil or conductor coating) X: Strain (displacement) applied in the first tensile test Y: Difference between the starting position when the load is applied in the subsequent tensile test and X

圖1是表示恢復率的測定例的應力-應變曲線。 圖2是表示配線基板的一實施形態的平面圖。 圖3是表示耐熱性試驗的溫度分佈(profile)的曲線圖。 圖4是表示比較例1的硬化前後的伸縮性樹脂層的紅外線吸收光譜的圖。 圖5是表示實施例1、實施例3及比較例1的硬化後的伸縮性樹脂層的紅外線吸收光譜的圖。 Figure 1 is a stress-strain curve showing the recovery rate measurement example. Figure 2 is a plan view showing one embodiment of the wiring substrate. Figure 3 is a temperature profile curve showing the heat resistance test. Figure 4 is a graph showing the infrared absorption spectra of the stretchable resin layer before and after curing in Comparative Example 1. Figure 5 is a graph showing the infrared absorption spectra of the cured stretchable resin layers of Examples 1, 3, and 1.

1:配線基板 1: Wiring board

3:伸縮性樹脂層 3: Extensible resin layer

5:導體層(導體箔或導體鍍膜) 5: Conductor layer (conductor foil or conductor coating)

X:第1次拉伸試驗中所施加的應變(位移量) X: Strain (displacement) applied in the first tensile test

Claims (21)

一種導體基板,具有: 伸縮性樹脂層;以及 導體箔,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體, 所述具有交聯基的苯乙烯系彈性體為包含酸酐基或羧基的苯乙烯丁二烯橡膠。A conductor substrate comprising: a stretchable resin layer; and a conductor foil disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups and (C) an ester-based curing agent, the (A) rubber component comprising a styrene-based elastomer having crosslinking groups, the styrene-based elastomer having crosslinking groups being a styrene-butadiene rubber comprising an anhydride group or a carboxyl group. 一種導體基板,具有: 伸縮性樹脂層;以及 導體箔,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體, 所述具有交聯基的苯乙烯系彈性體為具有酸酐基的苯乙烯系彈性體。A conductor substrate comprising: a stretchable resin layer; and a conductor foil disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups and (C) an ester-based curing agent, the (A) rubber component comprising a styrene-based elastomer having crosslinking groups, the styrene-based elastomer having crosslinking groups being a styrene-based elastomer having an anhydride group. 一種導體基板,具有: 伸縮性樹脂層;以及 導體箔,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體, 對所述伸縮性樹脂層進行拉伸變形至應變為20%為止後的恢復率為80%以上。A conductor substrate comprising: a stretchable resin layer; and a conductor foil disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups and (C) an ester-based curing agent, the (A) rubber component comprising a styrene-based elastomer having crosslinking groups, and the recovery rate of the stretchable resin layer after being stretched to a strain of 20% is 80% or more. 一種導體基板,具有: 伸縮性樹脂層;以及 導體箔,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分、(C)酯系硬化劑及抗氧化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體。A conductor substrate comprising: a stretchable resin layer; and a conductor foil disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups, (C) an ester-based curing agent and an antioxidant, wherein the (A) rubber component comprises a styrene-based elastomer having crosslinking groups. 如請求項1至請求項4中任一項所述的導體基板,其中所述導體箔的彈性係數為40 GPa~300 GPa。The conductor substrate as described in any one of claims 1 to 4, wherein the elastic coefficient of the conductor foil is 40 GPa to 300 GPa. 一種導體基板,具有: 伸縮性樹脂層;以及 導體鍍膜,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體, 所述具有交聯基的苯乙烯系彈性體為包含酸酐基或羧基的苯乙烯丁二烯橡膠。A conductor substrate comprising: a stretchable resin layer; and a conductor coating disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups and (C) an ester-based curing agent, the (A) rubber component comprising a styrene-based elastomer having crosslinking groups, the styrene-based elastomer having crosslinking groups being a styrene-butadiene rubber comprising an anhydride group or a carboxyl group. 一種導體基板,具有: 伸縮性樹脂層;以及 導體鍍膜,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體, 所述具有交聯基的苯乙烯系彈性體為具有酸酐基的苯乙烯系彈性體。A conductor substrate comprising: a stretchable resin layer; and a conductor coating disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups and (C) an ester-based curing agent, the (A) rubber component comprising a styrene-based elastomer having crosslinking groups, the styrene-based elastomer having crosslinking groups being a styrene-based elastomer having an anhydride group. 一種導體基板,具有: 伸縮性樹脂層;以及 導體鍍膜,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分及(C)酯系硬化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體, 對所述伸縮性樹脂層進行拉伸變形至應變為20%為止後的恢復率為80%以上。A conductor substrate comprising: a stretchable resin layer; and a conductor coating disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups and (C) an ester-based curing agent, the (A) rubber component comprising a styrene-based elastomer having crosslinking groups, and the recovery rate of the stretchable resin layer after being stretched to a strain of 20% is 80% or more. 一種導體基板,具有: 伸縮性樹脂層;以及 導體鍍膜,設置於所述伸縮性樹脂層上, 所述伸縮性樹脂層包含樹脂組成物的硬化物,所述樹脂組成物含有(A)橡膠成分、(B)具有環氧基的交聯成分、(C)酯系硬化劑及抗氧化劑, 所述(A)橡膠成分包含具有交聯基的苯乙烯系彈性體。A conductor substrate comprising: a stretchable resin layer; and a conductor coating disposed on the stretchable resin layer, the stretchable resin layer comprising a cured resin composition, the resin composition comprising (A) a rubber component, (B) a crosslinking component having epoxy groups, (C) an ester-based curing agent and an antioxidant, wherein the (A) rubber component comprises a styrene-based elastomer having crosslinking groups. 如請求項2或請求項7所述的導體基板,其中所述具有酸酐基的苯乙烯系彈性體為利用馬來酸酐而部分改質的氫化型苯乙烯系彈性體。The conductor substrate as described in claim 2 or claim 7, wherein the styrene elastomer having an anhydride group is a hydrogenated styrene elastomer partially modified with maleic anhydride. 如請求項1至請求項4及請求項6至請求項9中任一項所述的導體基板,其中所述樹脂組成物更含有(D)硬化促進劑。The conductor substrate as described in any one of claims 1 to 4 and claims 6 to 9, wherein the resin composition further contains a (D) curing accelerator. 如請求項1至請求項4及請求項6至請求項9中任一項所述的導體基板,其中以所述(A)橡膠成分、所述(B)交聯成分及所述(C)酯系硬化劑的總量作為基準,所述(A)橡膠成分的含量為60質量%~95質量%。The conductor substrate as described in any one of claims 1 to 4 and claims 6 to 9, wherein the total amount of the (A) rubber component, the (B) crosslinking component and the (C) ester curing agent is used as a reference, and the content of the (A) rubber component is 60% to 95% by mass. 一種配線基板,包含如請求項1至請求項4中任一項所述的導體基板,所述導體箔形成配線圖案。A wiring substrate comprising a conductor substrate as described in any one of claims 1 to 4, wherein the conductor foil forms a wiring pattern. 一種配線基板,包含如請求項6至請求項9中任一項所述的導體基板,所述導體鍍膜形成配線圖案。A wiring substrate comprising a conductor substrate as described in any one of claims 6 to 9, wherein the conductor is coated to form a wiring pattern. 一種可伸縮元件,包括:如請求項13或請求項14所述的配線基板;以及電子器件,搭載於所述配線基板。A retractable element includes: a wiring substrate as described in claim 13 or claim 14; and an electronic device mounted on the wiring substrate. 如請求項1至請求項4中任一項所述的導體基板,其用以形成配線基板,所述配線基板包含具有伸縮性樹脂層、以及設置於所述伸縮性樹脂層上的導體箔的導體基板,所述導體箔形成配線圖案。A conductor substrate as described in any one of claims 1 to 4, used to form a wiring substrate, the wiring substrate comprising a conductor substrate having a stretchable resin layer and a conductor foil disposed on the stretchable resin layer, the conductor foil forming a wiring pattern. 如請求項6至請求項9中任一項所述的導體基板,其用以形成配線基板,所述配線基板包含具有伸縮性樹脂層以及設置於所述伸縮性樹脂層上的導體鍍膜的導體基板,所述導體鍍膜形成配線圖案。A conductor substrate as described in any one of claims 6 to 9, used to form a wiring substrate, the wiring substrate comprising a conductor substrate having a stretchable resin layer and a conductor coating disposed on the stretchable resin layer, the conductor coating forming a wiring pattern. 一種配線基板的製造方法,所述配線基板如請求項13所述的配線基板,所述方法包括: 準備具有伸縮性樹脂層與積層於所述伸縮性樹脂層上的導體箔的積層板的步驟; 於所述導體箔上形成蝕刻抗蝕劑的步驟; 對所述蝕刻抗蝕劑進行曝光並對曝光後的所述蝕刻抗蝕劑進行顯影而形成覆蓋所述導體箔的一部分的抗蝕劑圖案的步驟; 將未被所述抗蝕劑圖案覆蓋的部分的所述導體箔去除的步驟;以及 將所述抗蝕劑圖案去除的步驟。A method for manufacturing a wiring substrate, the wiring substrate being as described in claim 13, the method comprising: a step of preparing a multilayer board having a stretchable resin layer and a conductor foil deposited on the stretchable resin layer; a step of forming an etching resist on the conductor foil; a step of exposing the etching resist and developing the exposed etching resist to form an etching resist pattern covering a portion of the conductor foil; a step of removing the portion of the conductor foil not covered by the etching resist pattern; and a step of removing the etching resist pattern. 一種配線基板的製造方法,其製造如請求項14所述的配線基板,所述方法包括: 於伸縮性樹脂層上形成鍍覆抗蝕劑的步驟; 對所述鍍覆抗蝕劑進行曝光並對曝光後的所述鍍覆抗蝕劑進行顯影而形成覆蓋所述伸縮性樹脂層的一部分的抗蝕劑圖案的步驟; 於所述伸縮性樹脂層的未被所述抗蝕劑圖案覆蓋的部分的表面上,藉由無電鍍形成導體鍍膜的步驟;以及 將所述抗蝕劑圖案去除的步驟。A method for manufacturing a wiring substrate, comprising: forming a coated resist on a stretchable resin layer; exposing the coated resist and developing the exposed coated resist to form a resist pattern covering a portion of the stretchable resin layer; forming a conductor film on the surface of the portion of the stretchable resin layer not covered by the resist pattern by electroless plating; and removing the resist pattern. 一種配線基板的製造方法,其製造如請求項14所述的配線基板,所述方法包括: 於伸縮性樹脂層上藉由無電鍍形成導體鍍膜的步驟; 於所述導體鍍膜上形成鍍覆抗蝕劑的步驟; 對所述鍍覆抗蝕劑進行曝光並對曝光後的所述鍍覆抗蝕劑進行顯影而形成覆蓋所述伸縮性樹脂層的一部分的抗蝕劑圖案的步驟; 於未被所述抗蝕劑圖案覆蓋的部分的所述導體鍍膜上,藉由電鍍進一步形成導體鍍膜的步驟; 將所述抗蝕劑圖案去除的步驟;以及 將藉由無電鍍而形成的所述導體鍍膜中的未被藉由電鍍所形成的所述導體鍍膜覆蓋的部分去除的步驟。A method for manufacturing a wiring substrate, comprising the method described in claim 14, wherein the method includes: forming a conductor film on a stretchable resin layer by electroless plating; forming a coating resist on the conductor film; exposing the coating resist and developing the exposed coating resist to form a resist pattern covering a portion of the stretchable resin layer; further forming a conductor film on the portion of the conductor film not covered by the resist pattern by electroplating; and removing the resist pattern. The step of removing the portion of the conductor film formed by electroless plating that was not covered by the conductor film formed by electroplating. 一種配線基板的製造方法,其製造如請求項14所述的配線基板,所述方法包括: 於伸縮性樹脂層上所形成的導體鍍膜上形成蝕刻抗蝕劑的步驟; 對所述蝕刻抗蝕劑進行曝光並對曝光後的所述蝕刻抗蝕劑進行顯影而形成覆蓋所述伸縮性樹脂層的一部分的抗蝕劑圖案的步驟; 將未被所述抗蝕劑圖案覆蓋的部分的所述導體鍍膜去除的步驟;以及 將所述抗蝕劑圖案去除的步驟。A method for manufacturing a wiring substrate, comprising the method described in claim 14, the method comprising: forming an etching resist on a conductor film formed on a stretchable resin layer; exposing the etching resist and developing the exposed etching resist to form an etching resist pattern covering a portion of the stretchable resin layer; removing the portion of the conductor film not covered by the etching resist pattern; and removing the etching resist pattern.
TW114104054A 2018-05-11 2019-05-10 Manufacturing methods of conductor substrates, wiring substrates, expandable elements, and wiring substrates TWI909954B (en)

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US20140118964A1 (en) 2012-11-01 2014-05-01 Ajinomoto Co., Inc. Method for producing printed wiring board

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140118964A1 (en) 2012-11-01 2014-05-01 Ajinomoto Co., Inc. Method for producing printed wiring board

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